JP2006275691A5 - - Google Patents
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- JP2006275691A5 JP2006275691A5 JP2005093749A JP2005093749A JP2006275691A5 JP 2006275691 A5 JP2006275691 A5 JP 2006275691A5 JP 2005093749 A JP2005093749 A JP 2005093749A JP 2005093749 A JP2005093749 A JP 2005093749A JP 2006275691 A5 JP2006275691 A5 JP 2006275691A5
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- JP
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- Prior art keywords
- image
- brightness
- region
- inspection
- determining
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- 238000007689 inspection Methods 0.000 claims 29
- 239000013078 crystal Substances 0.000 claims 9
- 238000000034 method Methods 0.000 claims 4
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
Claims (8)
前記画像の明度を基にグレースケール画像を作成し、
前記グレースケール画像の明度のヒストグラムを作成し、
前記ヒストグラムから歪度を算出し、
前記歪度によって前記検査領域の結晶状態を判断することを特徴とする検査方法。 Take an image of the inspection area including the amorphous and polycrystalline areas,
Create a grayscale image based on the brightness of the image,
Create a histogram of brightness of the grayscale image,
Calculating skewness from the histogram,
An inspection method, comprising: determining a crystal state of the inspection region based on the degree of distortion.
前記画像の明度を基にグレースケール画像を作成し、
前記グレースケール画像の明度の最大値・最小値を測定し、
前記グレースケール画像の明度の閾値を下記の式により定め、
閾値（Ｔｈ）＝最小値＋（最大値−最小値）×Ａ
（ただし、Ａ＝０〜１）
前記閾値を基に二値画像を作成し、
前記二値画像中の連結領域を検出し、
前記二値画像に対する前記連結領域の割合から前記検査領域の結晶状態を判断することを特徴とする検査方法。 Take an image of the inspection area including the amorphous and polycrystalline areas,
Create a grayscale image based on the brightness of the image,
To measure the maximum and minimum values of the brightness of the gray-scale image,
The threshold value of the brightness of the grayscale image is determined by the following formula:
Threshold value (Th) = Minimum value + (Maximum value−Minimum value) × A
(However, A = 0 to 1)
Create a binary image based on the previous Ki閾 value,
Detecting a connected region in the binary image;
Inspection method characterized by determining the crystalline state of the inspection area from the ratio of the connecting area against the binary images.
前記画像の明度を基にグレースケール画像を作成し、Create a grayscale image based on the brightness of the image,
前記グレースケール画像の明度のヒストグラムを作成し、Create a histogram of brightness of the grayscale image,
前記ヒストグラムから歪度を算出し、Calculating skewness from the histogram,
前記歪度によって前記検査領域の結晶状態を判断する第１の工程を行い、Performing a first step of determining a crystal state of the inspection region based on the skewness;
前記グレースケール画像中の明度の最大値及び最小値を測定し、Measuring the maximum and minimum values of brightness in the grayscale image;
前記グレースケール画像の明度の閾値を下記の式により定め、The threshold value of the brightness of the grayscale image is determined by the following formula:
閾値（Ｔｈ）＝最小値＋（最大値−最小値）×ＡThreshold value (Th) = Minimum value + (Maximum value−Minimum value) × A
（ただし、Ａ＝０〜１）(However, A = 0 to 1)
前記閾値を基に二値画像を作成し、Create a binary image based on the threshold,
前記二値画像中の連結領域を検出し、Detecting a connected region in the binary image;
前記二値画像に対する前記連結領域の割合から前記検査領域の結晶状態を判断する第２の工程を行うことを特徴とする検査方法。An inspection method comprising performing a second step of determining a crystal state of the inspection region from a ratio of the connected region to the binary image.
前記画像の明度を基にグレースケール画像を作成し、
前記グレースケール画像の明度のヒストグラムを作成し、
前記ヒストグラムから歪度を算出し、
前記歪度によって前記検査領域の結晶状態を判断する第１の工程を行い、
前記グレースケール画像中の明度の最大値及び最小値を測定し、
前記グレースケール画像の明度の閾値を下記の式により定め、
閾値（Ｔｈ）＝最小値＋（最大値−最小値）×Ａ
（ただし、Ａ＝０〜１）
前記閾値を基に二値画像を作成し、
前記二値画像中の連結領域を検出し、
前記二値画像に対する前記連結領域の割合から前記検査領域の結晶状態を判断する第２の工程を行い、
前記連結領域の数または大きさから前記検査領域の結晶状態を判断する第３の工程を行うことを特徴とする検査方法。 Take an image of the inspection area including the amorphous and polycrystalline areas,
Create a grayscale image based on the brightness of the image,
Create a histogram of brightness of the grayscale image,
Calculating skewness from the histogram,
Performing a first step of determining a crystal state of the inspection region based on the skewness;
To measure the maximum and minimum values of the brightness before SL in the gray scale image,
The threshold value of the brightness of the grayscale image is determined by the following formula:
Threshold value (Th) = Minimum value + (Maximum value−Minimum value) × A
(However, A = 0 to 1)
Create a binary image based on the previous Ki閾 value,
Detecting a connected region in the binary image;
Performing a second step of determining the crystal state of the inspection area from the ratio of the connecting area against the binary image picture,
An inspection method comprising performing a third step of determining a crystal state of the inspection region from the number or size of the connection regions.
前記画像の明度を基にグレースケール画像を作成する手段と、
前記グレースケール画像を基にヒストグラムを作成する手段と、
前記ヒストグラムから歪度を算出する手段と、
前記歪度から前記検査領域の結晶状態を判断する手段と、を有することを特徴とする検査装置。 Means for capturing an image of an inspection region including an amorphous region and a polycrystalline region ;
Means for creating a grayscale image based on the brightness of the image;
Means for creating a histogram based on the grayscale image;
Means for calculating skewness from the histogram;
Inspection apparatus characterized by having a means for determining the crystalline state of the inspection area from the skewness.
前記画像の明度を基にグレースケール画像を作成する手段と、
前記グレースケール画像中の明度の最大値・最小値を測定する手段と、
前記グレースケール画像の明度の閾値を下記の式により定める手段と、
閾値（Ｔｈ）＝最小値＋（最大値−最小値）×Ａ
（ただし、Ａ＝０〜１）
前記閾値を基に二値画像を作成する手段と、
前記二値画像中の連結領域を検出する手段と、
前記二値画像に対する前記連結領域の割合から前記検査領域の結晶状態を判断する手段と、を有することを特徴とする検査装置。 Means for capturing an image of an inspection region including an amorphous region and a polycrystalline region;
Means for creating a grayscale image based on the brightness of the image;
Means for measuring maximum and minimum values of brightness in the grayscale image;
Means for determining a lightness threshold of the grayscale image by the following equation:
Threshold value (Th) = Minimum value + (Maximum value−Minimum value) × A
(However, A = 0 to 1)
It means for creating a binary image based on the previous Ki閾 value,
Means for detecting a connected region in the binary image;
Inspection apparatus characterized by having a means for determining the crystalline state of the inspection area from the ratio of the connecting area against the binary images.
前記画像の明度を基にグレースケール画像を作成する手段と、Means for creating a grayscale image based on the brightness of the image;
前記グレースケール画像を基にヒストグラムを作成する手段と、Means for creating a histogram based on the grayscale image;
前記ヒストグラムから歪度を算出する手段と、Means for calculating skewness from the histogram;
前記歪度によって前記検査領域の結晶状態を判断する手段と、Means for determining a crystal state of the inspection region based on the degree of distortion;
前記グレースケール画像中の明度の最大値及び最小値を測定する手段と、Means for measuring maximum and minimum values of brightness in the grayscale image;
前記グレースケール画像の明度の閾値を下記の式により定める手段と、Means for determining a lightness threshold of the grayscale image by the following equation:
閾値（Ｔｈ）＝最小値＋（最大値−最小値）×ＡThreshold value (Th) = Minimum value + (Maximum value−Minimum value) × A
（ただし、Ａ＝０〜１）(However, A = 0 to 1)
前記閾値を基に二値画像を作成する手段と、Means for creating a binary image based on the threshold;
前記二値画像中の連結領域を検出する手段と、Means for detecting a connected region in the binary image;
前記連結領域の数または大きさから前記検査領域の結晶状態を判断する手段と、を有することを特徴とする検査装置。Means for determining a crystal state of the inspection region from the number or size of the connection regions.
前記画像の明度を基にグレースケール画像を作成する手段と、
前記グレースケール画像を基にヒストグラムを作成する手段と、
前記ヒストグラムから歪度を算出する手段と、
前記歪度によって前記検査領域の結晶状態を判断する手段と、
前記グレースケール画像中の明度の最大値及び最小値を測定する手段と、
前記グレースケール画像の明度の閾値を定める手段と、
閾値（Ｔｈ）＝最小値＋（最大値−最小値）×Ａ
（ただし、Ａ＝０〜１）
前記閾値を基に二値画像を作成する手段と、
前記二値画像中の連結領域を検出する手段と、
前記二値画像に対する前記連結領域の割合から前記検査領域の結晶状態を判断する手段と、
前記連結領域の数または大きさから前記検査領域の結晶状態を判断する手段と、を有することを特徴とする検査装置。 Means for capturing an image of an inspection region including an amorphous region and a polycrystalline region;
Means for creating a grayscale image based on the brightness of the image;
Means for creating a histogram based on the grayscale image;
Means for calculating skewness from the histogram;
Means for determining a crystal state of the inspection region based on the degree of distortion;
Means for measuring maximum and minimum values of brightness in the grayscale image;
The threshold of lightness of the gray-scale image and a constant Mel means,
Threshold value (Th) = Minimum value + (Maximum value−Minimum value) × A
(However, A = 0 to 1)
It means for creating a binary image based on the previous Ki閾 value,
Means for detecting a connected region in the binary image;
It means for determining the crystalline state of the inspection area from the ratio of the connecting area against the binary image picture,
Inspection apparatus characterized by having a means for determining the crystalline state of the inspection area from the number or size of the coupling region.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005093749A JP2006275691A (en) | 2005-03-29 | 2005-03-29 | Inspection method and inspection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005093749A JP2006275691A (en) | 2005-03-29 | 2005-03-29 | Inspection method and inspection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006275691A JP2006275691A (en) | 2006-10-12 |
| JP2006275691A5 true JP2006275691A5 (en) | 2008-05-15 |
Family
ID=37210617
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005093749A Withdrawn JP2006275691A (en) | 2005-03-29 | 2005-03-29 | Inspection method and inspection device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2006275691A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012122964A (en) * | 2010-12-10 | 2012-06-28 | Tokyu Car Corp | Method of detecting surface defect |
| JP7221126B2 (en) * | 2019-04-24 | 2023-02-13 | 大阪瓦斯株式会社 | Aging degree determination system and aging degree determination method |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2800726B2 (en) * | 1995-07-10 | 1998-09-21 | 東洋紡績株式会社 | Woven cloth inspection equipment |
| JP3797499B2 (en) * | 1996-08-08 | 2006-07-19 | 東京電力株式会社 | Canal runoff monitoring device |
| JPH10162193A (en) * | 1996-11-27 | 1998-06-19 | Miyota Co Ltd | Discriminating device |
| JP2000009655A (en) * | 1998-06-25 | 2000-01-14 | Kobe Steel Ltd | Visual inspection device |
| JP2000171230A (en) * | 1998-09-29 | 2000-06-23 | Toshiba Corp | Method and device for inspecting micropattern shape |
| JP2001084427A (en) * | 1999-09-16 | 2001-03-30 | Sankyo Seiki Mfg Co Ltd | Device for recognizing reflecting optical element and device for recognizing storage medium |
| JP2003031630A (en) * | 2001-07-12 | 2003-01-31 | Sony Corp | Method and apparatus for determining crystal boundary |
| JP2003250789A (en) * | 2002-02-28 | 2003-09-09 | Canon Inc | Radiation imaging apparatus, program, and computer- readable storage medium |
| JP2004179190A (en) * | 2002-11-22 | 2004-06-24 | Sharp Corp | Device and method for inspecting crystalline film |
| JP2005071129A (en) * | 2003-08-26 | 2005-03-17 | Sharp Corp | Image processor and image processing method |
-
2005
- 2005-03-29 JP JP2005093749A patent/JP2006275691A/en not_active Withdrawn
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