JP2006266761A - Measurement device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To release and/or reset the vibration removal state in a short time with a small constitution easily. <P>SOLUTION: In the measurement device capable of alternatively setting the non-measurement sequence at least including transfer action for positioning to the prescribed measurement position and the measurement sequence for measuring the work, at least the vibration removing means (vibration removing base 3, base 4 and vibration removing part 5) and the fixing means (Z stage 1 and holding part 2) are provided to activate the vibration removing means at the measurement sequence, and to activate the fixing means at the non-measurement sequence. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a measurement apparatus, and more particularly to a measurement apparatus that can alternately set a non-measurement sequence and a measurement sequence.

  Precision instruments such as high-precision measuring instruments and processing machines are usually mounted on vibration isolation mechanisms using compressed air. Such a vibration isolation mechanism has a damper performance, so it is difficult to ensure positioning accuracy. When trying to replace a workpiece of a precision instrument in conjunction with the transport device, the transport device and the precision measuring instrument The relative position of must be kept to a certain degree of accuracy. For this reason, it is necessary to place the precision device and the transport device together on the vibration isolation mechanism, or cancel the vibration isolation state of the vibration isolation mechanism on which the precision device is mounted, and return the vibration isolation state after exchanging the sample. In general, the vibration isolation mechanism has a problem that it takes time and effort to cancel and restore the vibration isolation state because the vibration isolation table is floated by compressed air from the base.

On the other hand, in order to cancel the vibration isolation state and shorten the recovery time, in Japanese Utility Model Publication No. 3-42316, in the vibration isolation mechanism using an air spring, a fixing air spring is provided separately from the original vibration spring for the vibration isolation mechanism. When the vibration isolation state is released, the vibration isolation mechanism air spring is not released and compressed air is introduced into the fixing air spring to fix the vibration isolation mechanism and the vibration isolation state is restored. Discloses releasing air from the fixing air spring.
Japanese Utility Model Publication No. 3-42316

  The above prior art has the following problems.

1. When the vibration isolation mechanism is not released, a large vibration isolation mechanism for mounting both the precision device (workpiece) and the transfer device is necessary.

2. When an air spring is used to release the vibration isolation mechanism, the work requires time and effort because it requires a force greater than that of the vibration isolation air spring. Furthermore, when returning, it is necessary to remove air from the fixing air spring, which further takes time and effort. Further, the vibration isolation position and the vibration isolation release position are different. In order to match the vibration isolation position with the vibration isolation release position, the position of the work must be readjusted after returning.

  The present invention has been made paying attention to such a problem, and an object of the present invention is to provide a measuring device capable of easily releasing and returning the vibration isolation state in a short time and with a small configuration. It is in.

  In order to achieve the above object, according to a first aspect of the present invention, a non-measurement sequence including at least a transport operation for transporting a workpiece and positioning the workpiece at a predetermined measurement position and a measurement sequence for measuring the workpiece are alternately performed. In the measurement apparatus that can be set to, the vibration isolation means and the fixing means for fixing the vibration isolation means are at least included, the vibration isolation means is operated in the measurement sequence, and the fixation is performed in the non-measurement sequence. Activate the means.

  According to a second aspect of the present invention, in the first aspect, the fixing unit includes a holding unit that is movable in a vertical direction to hold the vibration isolation unit, and a plurality of support columns that support the holding unit. Consists of

  According to a third aspect of the present invention, in the first or second aspect, the vibration isolation means has a fitting portion including a plurality of grooves or holes, and the fixing means is the plurality of grooves or holes. And the fitting portion and the protrusion portion are fitted to uniquely position the vibration isolation means.

  According to a fourth aspect of the present invention, in any one of the first to third aspects, the vibration isolation means is supported by a compressed gas, a magnetic force, a spring, or a rubber-like elastic member installed on the base. It is comprised by the plate-shaped member.

  According to a fifth aspect of the present invention, in the third aspect, the protrusions of the fixing member face each other, and the vibration isolator is clamped in a substantially horizontal direction, thereby uniquely positioning the vibration isolator. Secure to.

  According to a sixth aspect of the present invention, in any one of the first to fifth aspects, the sixth aspect further includes a shielding cover having an opening / closing window for covering the vibration isolation means, and the opening / closing window is opened / closed. Transport the workpiece.

  According to a seventh aspect of the present invention, in the sixth aspect, the apparatus further includes a detector for detecting the movement of the workpiece, and opens and closes the opening / closing window based on a detection output of the detector.

  Further, an eighth aspect of the present invention is that, in the sixth or seventh aspect, the opening / closing window is closed in the measurement sequence to operate the vibration isolation unit, and the opening / closing window is opened in the non-measurement sequence. The workpiece is conveyed or the fixing means is operated.

  According to the present invention, the vibration isolation state can be easily released and restored in a short time and with a small configuration.

  Embodiments of the present invention will be described below in detail with reference to the drawings.

(First embodiment)
FIG. 1 (A) shows the configuration of the vibration isolation state of the measuring apparatus according to the first embodiment of the present invention, and FIG. 1 (B) is a top view thereof. In this configuration, two pairs of vibration isolation parts 5 composed of compressed gas, magnetic force, or a plate-like member supported by a spring or rubber-like elastic member are disposed on the base 4, and a vibration isolation table is further provided thereon. 3 is arranged. The base 4, the vibration isolation unit 5, and the vibration isolation table 3 constitute a vibration isolation unit. A pair of holding portions 2 that are supported by a Z stage 1 as a pair of support columns and can be driven in the vertical direction are disposed on both side surfaces of the vibration isolation table 3. The holding part 2 and the Z stage 1 constitute a fixing means.

  The measurement apparatus according to the present embodiment includes the vibration isolation unit and the fixing unit as described above, and operates the vibration isolation unit in a measurement sequence for measuring the workpiece, conveys the workpiece, and positions the workpiece at a predetermined measurement position. The fixing means is operated in a non-measurement sequence including at least a transport operation.

  In the above-described configuration, when the workpiece is transported, the pair of holding units 2 are moved upward from the vibration-isolating state as shown in FIG. 1 (C)). Since the vibration isolation table 3 always performs the vibration isolation operation in the vibration isolation state, the position is indefinite, and it is difficult to transport the workpiece. On the other hand, in the locked state, the position of the vibration isolation table 3 is fixed, and the workpiece can be easily conveyed.

  In the case of a vibration isolation system using compressed air, feedback is stopped (the air valve is shut off) in the locked state.

  In the first embodiment, the load on the holding unit 2 can be reduced if the vibration isolation table 3 is not lifted up completely by the holding unit 2 and is lifted by several mm from the vibration isolation state.

(Second Embodiment)
FIG. 2A shows the configuration of the vibration isolation state of the measuring apparatus according to the second embodiment of the present invention, and FIG. 2B is a top view thereof. In this configuration, two pairs of vibration isolation parts 5 composed of compressed gas, magnetic force, or a plate-like member supported by a spring or rubber-like elastic member are disposed on the base 4, and a vibration isolation table is further provided thereon. 3 is arranged. A pair of lock mechanisms 6 that can be moved to the left and right to lock the vibration isolation table 3 are disposed on both sides of the vibration isolation table 3. The vibration isolation table 3 is provided with a groove (fitting portion) 3-1 for receiving a lock member 6-1 as a protruding portion of the lock mechanism 6, so that positioning accuracy in the locked state can be obtained. . A hole may be used instead of the groove 3-1. FIG. 2C shows a state where the vibration isolation table 3 is locked. The vibration isolation table 3 is uniquely positioned by fitting the lock member 6-1 into the groove 3-1 as the fitting portion.

  FIG. 3 is a view for explaining the lock mechanism 6. FIG. 3 shows a configuration in which a pair of lock members 6-1 are simultaneously moved in both directions by a single motor, and are laid out so as to move by twice the amount of movement of the power point. Fix is a fulcrum.

  At the time of locking, the locking members 6-1 of the locking mechanism 6 face each other by a motor (not shown) and move substantially horizontally inward to sandwich the vibration isolation table 3, and the position is uniquely fixed.

  Further, the layout is not limited to this layout as long as the movement amounts of the pair of lock members 6-1 are the same.

  FIG. 4 is a diagram for explaining a first modification of the second embodiment. This modification is characterized in that the shape of the tip of the lock member 6-1 is not sharp as shown in FIG. 4A, but is spherical as shown in FIG. 4B. FIG. 4C is a top view of the measuring apparatus according to this modification. Thus, by using two pairs of spherical lock members, it is possible to improve not only the vertical direction but also the horizontal position accuracy.

  FIG. 5 is a diagram for explaining a second modification of the second embodiment. In this modification, the shape of the lock member 6-1 is a triangular prism, and one side thereof is held in line contact with the groove 3-1 of the vibration isolation table 3.

  FIG. 6 is a diagram for explaining a second modification of the first embodiment. This modification is an embodiment in which the holding unit 2 of the first embodiment and the lock member 6-1 of the second embodiment are combined.

(Third embodiment)
FIG. 7A shows the configuration of the vibration isolation state (during measurement) of the measurement apparatus according to the third embodiment of the present invention. In this configuration, two pairs of vibration isolation parts 5 composed of compressed gas, magnetic force, or a plate-like member supported by a spring or rubber-like elastic member are disposed on the base 4, and a vibration isolation table is further provided thereon. 3 is arranged. A pair of lock mechanisms 6 that can be moved to the left and right to lock the vibration isolation table 3 are disposed on both sides of the vibration isolation table 3.

  A precision measuring unit 100 such as a high-precision measuring instrument or a microscope is mounted on the vibration isolation mechanism described above, and is entirely covered with an exterior cover 7 as a shielding cover. Further, an opening / closing window 8 is provided on the side surface of the exterior cover 7. The workpiece 10 is conveyed into and out of the main body through the opening / closing window 8. FIG. 6B shows a state in which the workpiece 10 is conveyed outside the main body. Further, a sensor 9 for detecting that the opening / closing window 8 is opened is provided near the opening / closing window 8. The sensor 9 has a reflected light amount when the light from the sensor 9 is not blocked by the XY stage 11 during measurement, and the light from the sensor 9 is blocked by the XY stage 11 when the XY stage 11 moves during conveyance. The vibration isolation state and the lock state can be determined based on the difference in the amount of reflected light.

  In the above configuration, when the XY stage 11 on which the workpiece 10 is placed moves to the transfer position, the sensor 9 is crossed. This sensor 9 not only controls the opening / closing of the open / close window 8 together with a controller (not shown), but also controls the vibration isolation / lock state. That is, the controller opens the opening / closing window 8 and locks the vibration isolation mechanism (FIG. 6B). In this state, the workpiece 10 can be exchanged with an external conveyance unit (not shown). After the workpiece 10 is replaced, the XY stage 11 moves again to the measurement position. Since the XY stage 11 is away from the position of the sensor 9, the open / close window 8 is closed, and the vibration isolation mechanism is in a vibration isolation state (FIG. 6A).

  In the present embodiment, the light shielding property is considered by using the exterior cover 7 and the opening / closing window 8. However, when the light shielding is not necessary, the exterior cover 7 and the opening / closing window 8 are not necessary. Further, the workpiece 10 is exchanged from the lateral direction by driving the XY stage 11, but a similar effect can be obtained by providing a workpiece exchange opening / closing window on the upper side to form a Z stage.

  According to the present embodiment, the vibration isolation state can be easily released and restored in a short time and with a small configuration. Moreover, delivery with a conveyance system can be performed easily and it becomes possible to incorporate in various apparatuses simply.

It is a figure which shows the structure of the measuring device which concerns on 1st Embodiment of this invention. It is a figure which shows the structure of the measuring device which concerns on 2nd Embodiment of this invention. It is a figure for demonstrating the locking mechanism. It is a figure for demonstrating the 1st modification of 2nd Embodiment. It is a figure for demonstrating the 2nd modification of 2nd Embodiment. It is a figure for demonstrating the 2nd modification of 1st Embodiment. It is a figure for demonstrating 3rd Embodiment of this invention.

Explanation of symbols

1 Z stage 2 Holding unit 3 Vibration isolation table 4 Base 5 Vibration isolation unit

Claims (8)

In a measurement apparatus capable of alternately setting a non-measurement sequence including at least a transport operation for transporting a workpiece and positioning the workpiece at a predetermined measurement position, and a measurement sequence for measuring the workpiece, the vibration isolation unit and the vibration isolation unit include: And a fixing device for fixing, wherein the vibration isolation device is operated in the measurement sequence, and the fixing device is operated in the non-measurement sequence. The measuring apparatus according to claim 1, wherein the fixing unit includes a holding unit that is movable in a vertical direction to hold the vibration isolation unit, and a plurality of support columns that support the holding unit. The vibration isolation means has a fitting portion made up of a plurality of grooves or holes, the fixing means has a plurality of protrusions corresponding to the plurality of grooves or holes, and the fitting portion and the protrusions are The measuring device according to claim 1 or 2, wherein the vibration isolating means is uniquely positioned by fitting. The said vibration isolation means is comprised by the plate-shaped member supported by the compressed gas installed in the base, magnetic force, or a spring or a rubber-like elastic member, The one of Claim 1 thru | or 3 characterized by the above-mentioned. The measuring device described in 1. The measuring apparatus according to claim 3, wherein the protrusions of the fixing member face each other, and the position of the vibration isolation unit is uniquely fixed by sandwiching the vibration isolation unit in a substantially horizontal direction. The measurement according to any one of claims 1 to 5, further comprising a shielding cover having an opening / closing window for covering the vibration isolation means, wherein the workpiece is conveyed by opening / closing the opening / closing window. apparatus. The measuring apparatus according to claim 6, further comprising a detector for detecting movement of the workpiece, wherein the opening / closing window is opened / closed based on a detection output of the detector. The closed window is closed in the measurement sequence to operate the vibration isolation unit, and the open / close window is opened in the non-measurement sequence to transport the workpiece or operate the fixing unit. 8. The measuring device according to 7.

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