JP2006266401A - Block fixing structure and accumulation valve - Google Patents

Block fixing structure and accumulation valve Download PDF

Info

Publication number
JP2006266401A
JP2006266401A JP2005085626A JP2005085626A JP2006266401A JP 2006266401 A JP2006266401 A JP 2006266401A JP 2005085626 A JP2005085626 A JP 2005085626A JP 2005085626 A JP2005085626 A JP 2005085626A JP 2006266401 A JP2006266401 A JP 2006266401A
Authority
JP
Japan
Prior art keywords
block
diameter
bolt
fixing structure
flow path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005085626A
Other languages
Japanese (ja)
Other versions
JP4575819B2 (en
Inventor
Akinori Nagaya
暁典 長屋
Kazuhiko Koike
和彦 小池
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CKD Corp
Original Assignee
CKD Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CKD Corp filed Critical CKD Corp
Priority to JP2005085626A priority Critical patent/JP4575819B2/en
Priority to PCT/JP2006/302023 priority patent/WO2006100841A1/en
Priority to TW095104343A priority patent/TW200641279A/en
Publication of JP2006266401A publication Critical patent/JP2006266401A/en
Application granted granted Critical
Publication of JP4575819B2 publication Critical patent/JP4575819B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
    • F16B35/00—Screw-bolts; Stay-bolts; Screw-threaded studs; Screws; Set screws
    • F16B35/04—Screw-bolts; Stay-bolts; Screw-threaded studs; Screws; Set screws with specially-shaped head or shaft in order to fix the bolt on or in an object
    • F16B35/041—Specially-shaped shafts
    • F16B35/048—Specially-shaped necks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
    • F16B43/00—Washers or equivalent devices; Other devices for supporting bolt-heads or nuts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
    • F16B5/00—Joining sheets or plates, e.g. panels, to one another or to strips or bars parallel to them
    • F16B5/02—Joining sheets or plates, e.g. panels, to one another or to strips or bars parallel to them by means of fastening members using screw-thread

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Connection Of Plates (AREA)
  • Valve Housings (AREA)
  • Gasket Seals (AREA)
  • Fluid-Pressure Circuits (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a block fixing structure and an accumulation valve capable of positioning and assembling a block and a base member simply and accurately. <P>SOLUTION: In this block fixing structure 1 for fixing the block 127 on the base member 110 by tightening a bolt 2 inserted into the block 127 on the base member 110, a circular cylinder part 4 having outside diameter being smaller than diameter of a head part 3 and larger than diameter of a screw part 5 is provided between the head part 3 and the screw part 5 of the bolt 2, a large diameter part 6 having larger diameter than diameter of a through hole 7 is formed in an opening part at one end of the through hole 7, and an annular member 9 having predetermined width in the circumferential direction and forming an annular shape is crushed by pressing it and is deformed between a step part 8 having the through hole 7 and the large diameter part 6 continuously and the head part 3 of the bolt 2. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、例えば、第１ブロックを第２ブロックに固定するブロック固定構造及びその固定構造を用いた集積弁に関する。   The present invention relates to, for example, a block fixing structure for fixing a first block to a second block and an integrated valve using the fixing structure.

半導体製造のウェハ処理工程には、ホトレジスト加工（ホトレジスト塗布、露光、現像、エッチング）のエッチング等にガスが使用され、数種類の中から特定のプロセスガスをチャンバへ供給するためのガス供給回路が構成されている。ガス供給回路は、ガスの種類に従ってガス供給ラインが構成され、各ガスをマスフローコントローラ等の流体制御機器を介してチャンバへと送り込むようにしている。また、ガスは腐食性、毒性があるため、窒素ガス等のパージガスを使用してガスの置換を行い、更にはガスの排気処理を行うため、そのガス供給ラインにはパージガス供給ラインやベントラインが組み合わされている。   Gas is used for wafer processing in semiconductor manufacturing, such as etching for photoresist processing (photoresist coating, exposure, development, etching), etc., and a gas supply circuit for supplying a specific process gas from several types to the chamber is configured. Has been. In the gas supply circuit, a gas supply line is configured according to the type of gas, and each gas is sent into the chamber via a fluid control device such as a mass flow controller. In addition, since gas is corrosive and toxic, purge gas such as nitrogen gas is used for gas replacement, and further gas exhaust processing is performed, so the gas supply line has a purge gas supply line and a vent line. It is combined.

従って、ガス供給ラインは、プロセスガスやパージガスの流れ或いは排気を制御するため、図６に示すように複数の弁やマスフローコントローラ等の流体制御機器が必要であり、これらガス供給ラインを構成する流体制御機器１０１〜１０８は、設置面積のコンパクト化や流路長さの短縮などの観点から全体取付のユニット化が図られている。そうしたガス供給ユニット１００は、ガス供給ラインを構成する流体制御機器１０１〜１０８が一つの取付板１１０上に一列に並べられ、取付板１１０上に固定される流路ブロック１２１〜１２８を介して取り付けられている。流路ブロック１２１〜１２８には、１２２に断面図で示すように、Ｖ字型の流路が形成されている。流路ブロック１２１〜１２８は、１２７に示すように、取付板１１０にボルト１３０で固定されている。   Therefore, in order to control the flow or exhaust of the process gas or purge gas, the gas supply line requires a plurality of valves and a fluid control device such as a mass flow controller as shown in FIG. 6, and the fluid constituting the gas supply line The control devices 101 to 108 are unitized as a whole from the viewpoint of compacting the installation area and shortening the flow path length. Such a gas supply unit 100 is attached via flow path blocks 121 to 128 in which fluid control devices 101 to 108 constituting a gas supply line are arranged in a line on one attachment plate 110 and fixed on the attachment plate 110. It has been. In the flow path blocks 121 to 128, V-shaped flow paths are formed as shown in a sectional view at 122. The flow path blocks 121 to 128 are fixed to the mounting plate 110 with bolts 130 as indicated by 127.

図７は、従来のブロック固定構造を示す図である。
流路ブロック１２７には、大径部１３１に段部１３２を介して連なる小径部１３３が形成されている。小径部１３３は、内径がボルト１３０の頭部より小径であって軸部より大径になるように設定され、スペーサ１３４をはめ込まれている。スペーサ１３４と段部１３２との間には、ゴムワッシャ１３５が配設され、スペーサ１３４の端部を取付板１１０に突き当てるまでボルト１３０を取付板１１０に締め付けることにより、ゴムワッシャ１３５を軸方向に押し潰して弾性変形させている。流路ブロック１２７は、ゴムワッシャ１３５の弾圧力によって取付板１１０側に付勢され、がたつかない（例えば、特許文献１参照。）。 FIG. 7 is a diagram showing a conventional block fixing structure.
The flow path block 127 has a small-diameter portion 133 that is continuous with the large-diameter portion 131 via the step portion 132. The small-diameter portion 133 is set so that the inner diameter is smaller than the head of the bolt 130 and larger than the shaft portion, and a spacer 134 is fitted therein. A rubber washer 135 is disposed between the spacer 134 and the stepped portion 132. By tightening the bolt 130 to the mounting plate 110 until the end of the spacer 134 abuts against the mounting plate 110, the rubber washer 135 is axially moved. It is crushed and elastically deformed. The flow path block 127 is urged toward the mounting plate 110 by the elastic pressure of the rubber washer 135 and does not rattle (see, for example, Patent Document 1).

特開平１１−９４０９８号公報（段落００４０〜００４３、第３図）JP-A-11-94098 (paragraphs 0040-0043, FIG. 3)

しかしながら、従来のブロック固定構造は、スペーサ１３４の一端にゴムワッシャ１３５を装着してから、スペーサ１３４の他端を流路ブロック１２７の小径部１３３に嵌め入れた後、ボルト１３０を流路ブロック１２７の大径部１３１からスペーサ１３４へと貫き通して取付板１１０に締め付けなければならず、組立に手間がかかっていた。   However, in the conventional block fixing structure, after attaching the rubber washer 135 to one end of the spacer 134, the other end of the spacer 134 is fitted into the small diameter portion 133 of the flow path block 127, and then the bolt 130 is attached to the flow path block 127. The large-diameter portion 131 must be penetrated from the large-diameter portion 131 to the spacer 134 and fastened to the mounting plate 110, which requires time and effort.

また、従来のブロック固定構造は、スペーサ１３４の内径がボルト１３０の軸部の径より大きく、すきまばめされている。そのため、ボルト１３０の軸部の径が最小公差Ｈ１−ａであり、スペーサ１３４の内径が最大公差Ｈ２＋ａである場合、ブロック固定構造全体の公差が２ａとなる。ボルト１３０は、スペーサ１３４に挿通されているだけなので、ボルト１３０をスペーサ１３４の中心に挿通する位置出しをしにくく、流路ブロック１２７が取付板１１０に対して位置ずれして固定される可能性がある。流路ブロック１２７の固定位置がずれると、他の流路ブロックや流体制御機器と流路を接続しにくくなったり、流路接続部分のシール性を十分に確保できないおそれがある。そのため、従来のブロック固定構造は、治具を用いて流路ブロック１２７を取付板１１０に位置決めし、ボルト１３０を締結しており、組立作業に手間がかかっていた。   Further, in the conventional block fixing structure, the inner diameter of the spacer 134 is larger than the diameter of the shaft portion of the bolt 130 and is fitted with a clearance. Therefore, when the diameter of the shaft portion of the bolt 130 is the minimum tolerance H1-a and the inner diameter of the spacer 134 is the maximum tolerance H2 + a, the tolerance of the entire block fixing structure is 2a. Since the bolt 130 is only inserted through the spacer 134, it is difficult to position the bolt 130 through the center of the spacer 134, and the flow path block 127 may be displaced with respect to the mounting plate 110 and fixed. There is. If the fixing position of the flow path block 127 is shifted, it may be difficult to connect the flow path to another flow path block or fluid control device, or the sealability of the flow path connection portion may not be sufficiently secured. For this reason, in the conventional block fixing structure, the flow path block 127 is positioned on the mounting plate 110 using a jig and the bolt 130 is fastened, which takes time for assembly work.

そこで、本発明は、上記問題点を解決するためになされたものであり、ブロックとベース部材を簡単かつ正確に位置合わせして組み立てることができるブロック固定構造及び集積弁を提供することを目的とする。   Accordingly, the present invention has been made to solve the above-described problems, and an object thereof is to provide a block fixing structure and an integrated valve that can be assembled by simply and accurately aligning a block and a base member. To do.

本発明に係るブロック固定構造は、上記目的を達成するために以下の構成を有する。
（１）ブロックに挿通したボルトをベース部材に締め付けて、ブロックをベース部材に固定するブロック固定構造において、ボルトが、頭部とネジ部との間に、外径が頭部の径より小さく且つネジ部の径より大きい円柱部を設けられ、ブロックが、円柱部を挿通される貫通孔の一端開口部に貫通孔の径より大きい径を有する大径部を形成され、円周方向に所定幅を有する環状をなし、貫通孔と大径部を連ねる段部と、ボルトの頭部との間で押し潰されて変形する環状部材を有することを特徴とする。 The block fixing structure according to the present invention has the following configuration in order to achieve the above object.
(1) In a block fixing structure in which a bolt inserted into a block is fastened to a base member and the block is fixed to the base member, the bolt has an outer diameter smaller than the diameter of the head between the head and the screw portion and A cylindrical portion larger than the diameter of the screw portion is provided, and the block is formed with a large diameter portion having a diameter larger than the diameter of the through hole at one end opening portion of the through hole inserted through the cylindrical portion, and has a predetermined width in the circumferential direction. It is characterized by having an annular member that is deformed by being crushed between a step portion connecting the through hole and the large diameter portion and a head portion of the bolt.

（２）（１）に記載の発明において、環状部材は、頭部に当接する端面に、外側面から内側面に向かって傾斜するテーパ面を形成されていることを特徴とする。 (2) In the invention described in (1), the annular member is characterized in that a tapered surface that is inclined from the outer surface toward the inner surface is formed on an end surface that contacts the head.

また、本発明に係る集積弁は、上記目的を達成するために以下の構成を有する。
（３）（１）又は（２）に記載のブロック固定構造を有するものであって、ブロックが流路ブロックであり、ベース部材が取付板又は取付レールであることを特徴とする。 Moreover, the integrated valve which concerns on this invention has the following structures, in order to achieve the said objective.
(3) The block fixing structure according to (1) or (2) is provided, wherein the block is a flow path block, and the base member is a mounting plate or a mounting rail.

上記構成を有する本発明のブロック固定構造は、ボルトの円柱部をブロックの貫通孔に挿通し、円柱部とネジ部との間の段差部分をベース部材に突き当てるまでネジ部をベース部材にねじ込むと、環状部材がボルトの頭部とブロックの段部との間で押し潰されて円周方向に変形し、ボルトの円柱部外周面とブロックの大径部内周面に当接する。このとき、ボルトがブロックにすきまばめされ、ボルトの円柱部とブロックの貫通孔との間に隙間があっても、環状部材が円柱部を中心部に向かって押圧し、ボルトをセンタリングするため、治具を用いなくてもブロックをベース部材に位置決めして固定することができる。また、従来例で使用していたスペーサを用いなくても、ボルトの円柱部とネジ部との間の段差部分を用いてボルトの締付量を規定するので、従来例より部品点数が減少し、組立作業にかかる手間を軽減できる。
よって、本発明のブロック固定構造によれば、ブロックとベース部材を簡単かつ正確に位置合わせして組み立てることができる。 In the block fixing structure of the present invention having the above configuration, the cylindrical portion of the bolt is inserted into the through hole of the block, and the screw portion is screwed into the base member until the stepped portion between the cylindrical portion and the screw portion abuts against the base member. Then, the annular member is crushed between the head portion of the bolt and the step portion of the block and deformed in the circumferential direction, and comes into contact with the outer peripheral surface of the cylindrical portion of the bolt and the inner peripheral surface of the large-diameter portion of the block. At this time, even if there is a clearance between the bolt cylinder and the through hole of the block, the annular member presses the cylinder toward the center and centers the bolt The block can be positioned and fixed to the base member without using a jig. Even without using the spacer used in the conventional example, the bolt tightening amount is defined by using the stepped portion between the cylindrical part of the bolt and the screw part, so the number of parts is reduced compared to the conventional example. , The labor required for the assembly work can be reduced.
Therefore, according to the block fixing structure of the present invention, the block and the base member can be assembled simply and accurately.

そして、環状部材がボルトの頭部に当接する端面に外側面から内側面に向かって傾斜するテーパ面を形成した場合には、ボルトの締結時に、外周縁部が最初にボルトの頭部に当たって円周方向にほぼ均一な荷重を加えられるため、環状部材を円周方向に均一に押し潰すことができる。   When the annular member is formed with a tapered surface inclined from the outer surface toward the inner surface on the end surface that contacts the head portion of the bolt, the outer peripheral edge portion first contacts the head portion of the bolt when the bolt is fastened. Since a substantially uniform load can be applied in the circumferential direction, the annular member can be uniformly crushed in the circumferential direction.

本発明のブロック固定構造を有する集積弁は、複数の流路ブロックを取付板又は取付レールに簡単かつ正確に位置合わせして組み付けることができることに加え、流路ブロック同士や流路ブロックと流体制御機器を適切に接続して、十分なシール性を確保することができる。   The integrated valve having the block fixing structure according to the present invention can easily and accurately align and assemble a plurality of flow path blocks to a mounting plate or a mounting rail, and can control flow paths between each other or between the flow path blocks and the fluid control. Equipment can be properly connected to ensure sufficient sealing performance.

次に、本発明に係るブロック固定構造及び集積弁の実施形態について説明する。   Next, an embodiment of a block fixing structure and an integrated valve according to the present invention will be described.

（第１実施形態）
図１は、第１実施形態のブロック固定構造を示す図である。
本実施形態のブロック固定構造１は、従来例と同様、図６に示す集積弁１００に用いられ、流路ブロック（特許請求の範囲の「ブロック」に相当。）１２１〜１２８を取付板（特許請求の範囲の「ベース部材」に相当。）１１０に固定するために使用される。ここでは、従来例と同様、流路ブロック１２７を取付板１１０に固定する場合を例に挙げて説明する。 (First embodiment)
FIG. 1 is a diagram illustrating a block fixing structure according to the first embodiment.
The block fixing structure 1 of the present embodiment is used in the integrated valve 100 shown in FIG. 6 as in the conventional example, and the flow path blocks (corresponding to “blocks” in the claims) 121 to 128 are attached to the mounting plates (patents). Corresponding to the “base member” in the claims.) Used to fix to 110. Here, as in the conventional example, the case where the flow path block 127 is fixed to the mounting plate 110 will be described as an example.

ボルト２は、ステンレスや、鉄、アルミなどの金属を材料とし、頭部３と円柱部４とネジ部５が基端部から先端部に向かって連ねられている。円柱部４は、外径が頭部３の径より小さく設定されている。ネジ部５は、外径が円柱部４の径より小さく設定され、外周面に取付板１１０の雌ネジ部にねじ込まれる雄ネジ部が形成されている。流路ブロック１２７は、ステンレスを直方体形状に成形し、流路等をドリルで穿設したものである。   The bolt 2 is made of a metal such as stainless steel, iron, or aluminum, and a head portion 3, a cylindrical portion 4, and a screw portion 5 are connected from the base end portion toward the tip end portion. The cylindrical part 4 is set to have an outer diameter smaller than the diameter of the head part 3. The screw part 5 has an outer diameter set smaller than the diameter of the columnar part 4, and a male screw part to be screwed into the female screw part of the mounting plate 110 is formed on the outer peripheral surface. The channel block 127 is formed by forming stainless steel into a rectangular parallelepiped shape and drilling a channel or the like with a drill.

流路ブロック１２７には、図中上側面から図中下側面へと貫通する貫通孔７が設けられている。貫通孔７は、内径ｈ２が円柱部４の外径ｈ１より僅かに大きく設定されている。貫通孔７の図中上端開口部の周りには、貫通孔７の径より大きい径を有する大径部６が設けられ、ボルト２の頭部３を収納するようになっている。そのため、大径部６と貫通孔７は、段部８を介して連なっている。ボルト４と段部８との間には、ゴムワッシャ（特許請求の範囲の「環状部材」に相当。）９が圧縮保持され、流路ブロック１２７を取付板１１０に押し付けるように付勢して、流路ブロック１２７のがたつきを防止している。   The flow path block 127 is provided with a through hole 7 penetrating from the upper side surface in the drawing to the lower side surface in the drawing. The through hole 7 has an inner diameter h <b> 2 that is slightly larger than the outer diameter h <b> 1 of the cylindrical portion 4. A large-diameter portion 6 having a diameter larger than the diameter of the through-hole 7 is provided around the upper end opening in the drawing of the through-hole 7 so as to accommodate the head 3 of the bolt 2. Therefore, the large diameter part 6 and the through hole 7 are connected via the step part 8. A rubber washer (corresponding to an “annular member” in the claims) 9 is compressed and held between the bolt 4 and the stepped portion 8 to urge the flow passage block 127 against the mounting plate 110. Further, rattling of the flow path block 127 is prevented.

図２は、ゴムワッシャ９の断面図である。
ゴムワッシャ９は、フッ素ゴムやパーフロロエラストマーなどのゴム材料を射出成形したものである。ゴムワッシャ９は、一定幅を有する環状をなし、断面形状が略長方形状をなす。ゴムワッシャ９の図中上側面には、外側面側から内側面側に傾斜するテーパ面１０が形成され、外周縁部１１が軸方向に最も突き出している。 FIG. 2 is a sectional view of the rubber washer 9.
The rubber washer 9 is formed by injection molding a rubber material such as fluoro rubber or perfluoroelastomer. The rubber washer 9 has an annular shape with a certain width, and has a substantially rectangular cross-sectional shape. A tapered surface 10 that is inclined from the outer surface side to the inner surface side is formed on the upper side surface of the rubber washer 9 in the figure, and the outer peripheral edge portion 11 protrudes most in the axial direction.

図１に示すように、ゴムワッシャ９を流路ブロック１２７の大径部６に装着し、ボルト２を大径部６からゴムワッシャ９、貫通孔７に貫き通し、ネジ部５を取付板１１０に締め付けると、やがて、円柱部４とネジ部５との間の段差部分が取付板１１０の端面に当接し、ネジ部５を取付板１１０に締め付けることができなくなる。このとき、ゴムワッシャ９は、外周縁部１１がボルト２の頭部３に当接した後、ボルト２の下降に伴ってテーパ面１０を加圧されて押し潰される。ゴムワッシャ９は、内周面がボルト２の円柱部外周に当接する一方、外周面が流路ブロック１２７の大径部内周に当接すると、ボルト２の円柱部４を中心部に向かって押圧する。   As shown in FIG. 1, the rubber washer 9 is attached to the large diameter portion 6 of the flow path block 127, the bolt 2 is passed from the large diameter portion 6 to the rubber washer 9 and the through hole 7, and the screw portion 5 is attached to the mounting plate 110. When tightened, the stepped portion between the columnar portion 4 and the screw portion 5 comes into contact with the end surface of the mounting plate 110, and the screw portion 5 cannot be tightened to the mounting plate 110. At this time, after the outer peripheral edge 11 abuts on the head 3 of the bolt 2, the rubber washer 9 is crushed by pressing the tapered surface 10 as the bolt 2 descends. The rubber washer 9 presses the cylindrical portion 4 of the bolt 2 toward the center when the outer peripheral surface abuts on the inner periphery of the large-diameter portion of the flow path block 127 while the inner peripheral surface abuts on the outer periphery of the cylindrical portion of the bolt 2. To do.

従って、本実施形態のブロック固定構造１によれば、ボルト２の円柱部４を流路ブロック１２７の貫通孔７に挿通し、円柱部４とネジ部５との間の段差部分を取付板１１０に突き当てるまでネジ部５を取付板１１０にねじ込むと、ゴムワッシャ９がボルト２の頭部３と流路ブロック１２７の段部８との間で押し潰されて円周方向に弾性変形し、ボルト２の円柱部外周面と流路ブロック１２７の大径部内周面に当接する。このとき、ボルト２が流路ブロック１２７にすきまばめされ、例えば、ボルト２の円柱部４の径が最小公差ｈ１−ａであり、流路ブロック１２７の貫通孔７の径が最大公差ｈ２＋ａであって、ブロック固定構造１全体の公差が２ａになっても、ゴムワッシャ９が円柱部４を中心部に向かって押圧し、ボルト２をセンタリングするため、治具を用いなくても流路ブロック１２７を取付板１１０に位置決めして固定することができる。また、従来例で使用していたスペーサ１３４を用いなくても、ボルト２の円柱部４とネジ部５との間の段差部分を用いてボルトの締付量を規定するので、従来例より部品点数が減少し、組立作業にかかる手間を軽減できる。
よって、本実施形態のブロック固定構造１によれば、流路ブロック１２７と取付板１１０を簡単かつ正確に位置合わせして組み立てることができる。 Therefore, according to the block fixing structure 1 of the present embodiment, the cylindrical portion 4 of the bolt 2 is inserted into the through hole 7 of the flow path block 127, and the stepped portion between the cylindrical portion 4 and the screw portion 5 is attached to the mounting plate 110. When the screw portion 5 is screwed into the mounting plate 110 until it abuts against the rubber plate, the rubber washer 9 is crushed between the head portion 3 of the bolt 2 and the step portion 8 of the flow path block 127 and elastically deformed in the circumferential direction, The cylinder 2 is in contact with the outer peripheral surface of the cylindrical portion of the bolt 2 and the inner peripheral surface of the large-diameter portion of the flow path block 127. At this time, the bolt 2 is fitted into the flow path block 127. For example, the diameter of the cylindrical portion 4 of the bolt 2 is the minimum tolerance h1-a, and the diameter of the through hole 7 of the flow path block 127 is the maximum tolerance h2 + a. Even if the tolerance of the entire block fixing structure 1 is 2a, the rubber washer 9 presses the cylindrical portion 4 toward the center and centers the bolt 2, so that the flow path block can be used without using a jig. 127 can be positioned and fixed to the mounting plate 110. Further, even if the spacer 134 used in the conventional example is not used, the tightening amount of the bolt is defined by using the stepped portion between the cylindrical portion 4 and the screw portion 5 of the bolt 2, so that the part is more than the conventional example. The number of points can be reduced, and the labor required for assembly work can be reduced.
Therefore, according to the block fixing structure 1 of the present embodiment, the flow path block 127 and the mounting plate 110 can be easily and accurately aligned and assembled.

また、ゴムワッシャ９がボルト２の頭部３に当接する端面に外側面から内側面に向かって傾斜するテーパ面１０を形成されており、ボルト２の締結時に、外周縁部１１が最初にボルト２の頭部３に当たって円周方向にほぼ均一な荷重を加えられるため、ゴムワッシャ９を円周方向に均一に押し潰すことができる。   The rubber washer 9 is formed with a tapered surface 10 which is inclined from the outer surface toward the inner surface on the end surface where the rubber washer 9 abuts against the head 3 of the bolt 2. Since a substantially uniform load can be applied in the circumferential direction when it hits the head 3 of 2, the rubber washer 9 can be uniformly crushed in the circumferential direction.

そして、本実施形態のブロック固定構造１を有する集積弁１００は、複数の流路ブロック１２１〜１２８を取付板１１０に簡単かつ正確に位置合わせして組み付けることができることに加え、流路ブロック１２１〜１２８と流体制御機器１０１〜１０８を適切に接続して、十分なシール性を確保することができる。   In addition, the integrated valve 100 having the block fixing structure 1 of the present embodiment allows the plurality of flow path blocks 121 to 128 to be easily and accurately aligned and assembled to the mounting plate 110, and in addition to the flow path blocks 121 to 128 and the fluid control devices 101 to 108 can be appropriately connected to ensure sufficient sealing performance.

（第２実施形態）
続いて、本発明の第２実施形態について説明する
本実施形態のブロック固定構造２１は、従来例と同様に集積弁１００に設けられ、ゴムワッシャ１５が第１実施形態のゴムワッシャ９と相違し、その他が第１実施形態のブロック固定構造１と共通する。よって、ここでは、第１実施形態と相違するゴムワッシャ１５を中心に説明し、共通するものについては図面に第１実施形態と同一符号を付し、説明を適宜省略する。 (Second Embodiment)
Subsequently, the second embodiment of the present invention will be described. The block fixing structure 21 of the present embodiment is provided in the integrated valve 100 as in the conventional example, and the rubber washer 15 is different from the rubber washer 9 of the first embodiment. Others are common to the block fixing structure 1 of the first embodiment. Therefore, here, the rubber washer 15 different from that of the first embodiment will be mainly described, and common parts will be denoted by the same reference numerals as those of the first embodiment, and description thereof will be omitted as appropriate.

図４は、ゴムワッシャ１５の断面図である。
ゴムワッシャ１５は、フッ素ゴムやパーフロロエラストマーなどのゴム材料を射出成形したものである。ゴムワッシャ１５は、円周方向に一定幅を有する環状をなす。ゴムワッシャ１５は、断面形状が上端面と下端面、及び、内周面と外周面がそれぞれ平行な多角形状をなす。従って、ゴムワッシャ１５は、図中上側面の外周縁部が軸方向に張り出していない。 FIG. 4 is a cross-sectional view of the rubber washer 15.
The rubber washer 15 is obtained by injection molding a rubber material such as fluoro rubber or perfluoroelastomer. The rubber washer 15 has an annular shape having a constant width in the circumferential direction. The rubber washer 15 has a polygonal shape in which the cross-sectional shape is an upper end surface and a lower end surface, and an inner peripheral surface and an outer peripheral surface are parallel to each other. Accordingly, the rubber washer 15 does not protrude in the axial direction at the outer peripheral edge of the upper side surface in the drawing.

図５は、ゴムワッシャ１５の装着部分の一部拡大断面図である。
ゴムワッシャ１５をボルト２の円柱部４に装着して、ボルト２を流路ブロック１２７の大径部６から貫通孔７に貫き通し、ネジ部５を取付板１１０に締め付けると、ゴムワッシャ１５は、図中上下端面がボルト２の頭部３の下端面と流路ブロック１２７の段部８に当接して加圧される。ゴムワッシャ１５は、ボルト２の頭部３と流路ブロック１２７の段部８との間で挟み込まれて弾性変形し、内周面がボルト２の円柱部外周面に当接する一方、外周面が流路ブロック１２７の大径部内周面に当接すると、ボルト２の円柱部４を中心部に向かって直接押圧する。そのため、本実施形態のブロック固定構造も、ゴムワッシャ１５が、ボルト２の締付時にボルト２のセンタリングを行うことができる。 FIG. 5 is a partially enlarged cross-sectional view of a mounting portion of the rubber washer 15.
When the rubber washer 15 is attached to the cylindrical portion 4 of the bolt 2, the bolt 2 is passed through the through hole 7 from the large diameter portion 6 of the flow path block 127, and the screw portion 5 is tightened to the mounting plate 110, the rubber washer 15 is In the drawing, the upper and lower lower end surfaces are pressed against the lower end surface of the head 3 of the bolt 2 and the step portion 8 of the flow path block 127. The rubber washer 15 is sandwiched between the head portion 3 of the bolt 2 and the step portion 8 of the flow path block 127 and elastically deformed. The inner peripheral surface abuts on the outer peripheral surface of the cylindrical portion of the bolt 2, while the outer peripheral surface is When abutting against the inner peripheral surface of the large-diameter portion of the flow path block 127, the cylindrical portion 4 of the bolt 2 is directly pressed toward the center portion. Therefore, also in the block fixing structure of this embodiment, the rubber washer 15 can center the bolt 2 when the bolt 2 is tightened.

尚、本発明の実施の形態について説明したが、本発明は、上記実施の形態に限定されることなく、色々な応用が可能である。
例えば、上記実施形態では、流路ブロックをステンレスなどの金属で形成したが、ＰＦＡやＰＴＦＥなどの樹脂であってもよい。
例えば、上記実施形態では、ガスを流す集積弁について説明したが、薬液等の流体を流す集積弁に適用してもよい。
例えば、上記実施形態では、ゴムを材質とするゴムワッシャを使用したが、ＰＦＡやＰＴＦＥなどの樹脂を材質とするワッシャを使用してもよい。この場合にも、ワッシャは、一定の幅を有する環状をなし、ボルト２に当接する側面に外側面から内側面に傾斜するテーパ面を設けることが望ましい。このような樹脂製のワッシャは、ボルト２と流路ブロック１２７との間で押し潰されて塑性変形し、ボルト２の円柱部４を中心部に向かって押圧してセンタリングを行うことができる。
上記実施形態では流路ブロック１２７を取付板１１０に固定したが、取付レールに固定してもよい。 Although the embodiments of the present invention have been described, the present invention is not limited to the above-described embodiments, and various applications are possible.
For example, in the above embodiment, the flow path block is formed of a metal such as stainless steel, but may be a resin such as PFA or PTFE.
For example, in the above-described embodiment, the integrated valve for flowing a gas has been described. However, the integrated valve may flow to a fluid such as a chemical solution.
For example, in the above embodiment, a rubber washer made of rubber is used, but a washer made of resin such as PFA or PTFE may be used. Also in this case, it is desirable that the washer has an annular shape having a certain width, and a tapered surface inclined from the outer surface to the inner surface is provided on the side surface that contacts the bolt 2. Such a resin washer is crushed between the bolt 2 and the flow path block 127 to be plastically deformed, and can be centered by pressing the cylindrical portion 4 of the bolt 2 toward the center portion.
In the above embodiment, the flow path block 127 is fixed to the mounting plate 110, but may be fixed to the mounting rail.

本発明の第１実施形態に係り、ブロック固定構造を示す図である。It is a figure which concerns on 1st Embodiment of this invention and shows a block fixing structure. 同じく、ゴムワッシャの断面図である。Similarly, it is sectional drawing of a rubber washer. 同じく、ゴムワッシャ装着部分の一部拡大断面図である。Similarly, it is a partially expanded sectional view of a rubber washer mounting portion. 本発明の第２実施形態に係り、ゴムワッシャの断面図である。It is sectional drawing of a rubber washer concerning 2nd Embodiment of this invention. 同じく、ゴムワッシャ装着部分の一部拡大断面図である。Similarly, it is a partially expanded sectional view of a rubber washer mounting portion. 集積弁の側面図である。It is a side view of an integrated valve. 従来のブロック固定構造を示す図である。It is a figure which shows the conventional block fixing structure.

符号の説明Explanation of symbols

１ ブロック固定構造
２ ボルト
３ 頭部
４ 円柱部
５ ネジ部
６ 大径部
７ 貫通孔
８ 段部
９ ゴムワッシャ
１０ テーパ面
１５ ゴムワッシャ
１２７ 流路ブロック
１１０ 取付板 DESCRIPTION OF SYMBOLS 1 Block fixing structure 2 Bolt 3 Head 4 Cylindrical part 5 Screw part 6 Large diameter part 7 Through-hole 8 Step part 9 Rubber washer 10 Tapered surface 15 Rubber washer 127 Flow path block 110 Mounting plate

Claims (3)

ブロックに挿通したボルトをベース部材に締め付けて、前記ブロックを前記ベース部材に固定するブロック固定構造において、
前記ボルトが、頭部とネジ部との間に、外径が前記頭部の径より小さく且つ前記ネジ部の径より大きい円柱部を設けられ、
前記ブロックが、前記円柱部を挿通される貫通孔の一端開口部に前記貫通孔の径より大きい径を有する大径部を形成され、
円周方向に所定幅を有する環状をなし、前記貫通孔と前記大径部を連ねる段部と、前記ボルトの頭部との間で押し潰されて変形する環状部材を有することを特徴とするブロック固定構造。 In the block fixing structure for fixing the block to the base member by tightening the bolt inserted into the block to the base member,
The bolt is provided with a cylindrical portion between the head and the screw portion, the outer diameter of which is smaller than the diameter of the head and larger than the diameter of the screw portion,
The block is formed with a large-diameter portion having a diameter larger than the diameter of the through-hole at one end opening of the through-hole inserted through the cylindrical portion,
An annular member having a predetermined width in the circumferential direction, and having an annular member that is deformed by being crushed between a step portion connecting the through hole and the large diameter portion and a head portion of the bolt. Block fixing structure. 請求項１に記載するブロック固定構造において、
前記環状部材は、前記頭部に当接する端面に、外側面から内側面に向かって傾斜するテーパ面を形成されていることを特徴とするブロック固定構造。 In the block fixing structure according to claim 1,
The block fixing structure, wherein the annular member is formed with a tapered surface inclined from an outer surface toward an inner surface on an end surface contacting the head. 請求項１又は請求項２に記載するブロック固定構造を有するものであって、
前記ブロックが流路ブロックであり、
前記ベース部材が取付板又は取付レールであることを特徴とする集積弁。 It has a block fixing structure according to claim 1 or claim 2,
The block is a flow path block;
The integrated valve, wherein the base member is a mounting plate or a mounting rail.
JP2005085626A 2005-03-24 2005-03-24 Block fixing structure and integrated valve Active JP4575819B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2005085626A JP4575819B2 (en) 2005-03-24 2005-03-24 Block fixing structure and integrated valve
PCT/JP2006/302023 WO2006100841A1 (en) 2005-03-24 2006-02-07 Block fixing structure and integrated valve
TW095104343A TW200641279A (en) 2005-03-24 2006-02-09 Block fixing structure and accumulation valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005085626A JP4575819B2 (en) 2005-03-24 2005-03-24 Block fixing structure and integrated valve

Publications (2)

Publication Number Publication Date
JP2006266401A true JP2006266401A (en) 2006-10-05
JP4575819B2 JP4575819B2 (en) 2010-11-04

Family

ID=37023526

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005085626A Active JP4575819B2 (en) 2005-03-24 2005-03-24 Block fixing structure and integrated valve

Country Status (3)

Country Link
JP (1) JP4575819B2 (en)
TW (1) TW200641279A (en)
WO (1) WO2006100841A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101574292B1 (en) * 2015-03-31 2015-12-08 엘이오테크 주식회사 LED lighting device
CN105276185A (en) * 2014-07-18 2016-01-27 神讯电脑(昆山)有限公司 Locking structure
JP2020063812A (en) * 2018-10-18 2020-04-23 日本精機株式会社 Waterproof structure of case member

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1925829A1 (en) * 2006-11-21 2008-05-28 Magneti Marelli Powertrain S.p.A. A metal clamping screw for plastic component
JP2010032470A (en) * 2008-07-31 2010-02-12 Nippon Seiki Co Ltd Waterproof structure of case
CN102072235A (en) * 2011-01-19 2011-05-25 奇瑞汽车股份有限公司 Standing bolt for fixed rail of timing chain
JP5775718B2 (en) 2011-03-28 2015-09-09 株式会社フジキン Lower member fixing device and fluid control device including the same
CN102287437B (en) * 2011-04-29 2013-01-16 深圳市大富科技股份有限公司 Screw for fixing resonant bar, cavity filter and communication equipment
JP6186271B2 (en) 2013-12-26 2017-08-23 株式会社フジキン Lower member fixing device and fluid control device including the same
US9551373B2 (en) * 2014-06-27 2017-01-24 The Boeing Company Apparatus for fuel tank spark containment

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6179016U (en) * 1984-10-30 1986-05-27
JPH02103850U (en) * 1989-02-06 1990-08-17
JPH08219289A (en) * 1995-02-14 1996-08-27 Ngk Insulators Ltd Screw seal structure and bushing using it
JPH0960730A (en) * 1995-08-25 1997-03-04 Nichias Corp Spiral gasket and its manufacture
JPH09119525A (en) * 1995-10-25 1997-05-06 Sumitomo Wiring Syst Ltd Shaft fastening seal structure
JPH1194098A (en) * 1997-09-24 1999-04-09 Fujikin Inc Low stage member fixing device and fluid controller provided with it
JP2000249132A (en) * 1999-02-26 2000-09-12 Sumitomo Heavy Ind Ltd Seal washer
JP2001332878A (en) * 2000-05-23 2001-11-30 Denso Corp Screw tightening structure of electronic apparatus

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6179016U (en) * 1984-10-30 1986-05-27
JPH02103850U (en) * 1989-02-06 1990-08-17
JPH08219289A (en) * 1995-02-14 1996-08-27 Ngk Insulators Ltd Screw seal structure and bushing using it
JPH0960730A (en) * 1995-08-25 1997-03-04 Nichias Corp Spiral gasket and its manufacture
JPH09119525A (en) * 1995-10-25 1997-05-06 Sumitomo Wiring Syst Ltd Shaft fastening seal structure
JPH1194098A (en) * 1997-09-24 1999-04-09 Fujikin Inc Low stage member fixing device and fluid controller provided with it
JP2000249132A (en) * 1999-02-26 2000-09-12 Sumitomo Heavy Ind Ltd Seal washer
JP2001332878A (en) * 2000-05-23 2001-11-30 Denso Corp Screw tightening structure of electronic apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105276185A (en) * 2014-07-18 2016-01-27 神讯电脑(昆山)有限公司 Locking structure
KR101574292B1 (en) * 2015-03-31 2015-12-08 엘이오테크 주식회사 LED lighting device
JP2020063812A (en) * 2018-10-18 2020-04-23 日本精機株式会社 Waterproof structure of case member
JP7159783B2 (en) 2018-10-18 2022-10-25 日本精機株式会社 Waterproof structure of case material

Also Published As

Publication number Publication date
TW200641279A (en) 2006-12-01
JP4575819B2 (en) 2010-11-04
WO2006100841A1 (en) 2006-09-28
TWI295716B (en) 2008-04-11

Similar Documents

Publication Publication Date Title
JP4575819B2 (en) Block fixing structure and integrated valve
JP7209390B2 (en) Fixture for valve case split and mounting method
JP2007321958A (en) Chemical valve
JP4653551B2 (en) Chemical valve mounting method
JPWO2017073596A1 (en) Piping connection structure, piping connector and piping connection method
JP4624491B2 (en) Fluid equipment module
JP2006329340A (en) Flange reinforcement tool and reinforcing method of flange connection part
JP2007071334A (en) Flange fastening structure
TWI658225B (en) Fixing device for lower stage member and fluid control device provided with same
JP2007024307A (en) Manifold block and valve unit using the same
JP2005307994A (en) Fluid control valve mounting structure
JP4603875B2 (en) Mounting structure for fluid equipment
JP2022173855A (en) Saddle branch joint, pipe branch method, and fluid device
JP7141705B2 (en) Seal structure, sealing method, and joint with this seal structure
TW201712236A (en) Fluid pressure cylinder
JP2008025696A (en) Water stop apparatus for preventing leakage from valve shaft of drain valve
JP2021190471A (en) Attachment method of refrigerant pipe with flange
JPH1162941A (en) Bolt fall preventing structure of gas feed unit
JPH11125398A (en) Flow amount limiting mechanism
JP2020034042A (en) Flange reinforcement jig and attachment method of the same
WO2024111299A1 (en) Coupling structure
WO2017111757A1 (en) Connection adapter
KR102136502B1 (en) How to assemble thermal actuators and sealing elements
KR20230109402A (en) Pipe connecting assembly
JP2005233155A (en) Fuel joint device for high pressure fuel line

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20061025

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20091208

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100126

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20100817

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20100820

R150 Certificate of patent or registration of utility model

Ref document number: 4575819

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130827

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130827

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140827

Year of fee payment: 4