JP2006265000A - Method and device for producing quartz glass material - Google Patents
Method and device for producing quartz glass material Download PDFInfo
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- JP2006265000A JP2006265000A JP2005081715A JP2005081715A JP2006265000A JP 2006265000 A JP2006265000 A JP 2006265000A JP 2005081715 A JP2005081715 A JP 2005081715A JP 2005081715 A JP2005081715 A JP 2005081715A JP 2006265000 A JP2006265000 A JP 2006265000A
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
Description
本発明は、石英ガラス材を加熱しつつ、延伸することで所定の外径に石英ガラス材を製造する方法およびそれに適した製造装置に関する。なお、石英ガラス材とは、石英ガラス管および石英ガラス棒の双方が含まれる。石英ガラス管および石英ガラス棒は、例えば、通信用光ファイバ製造用部品などに用いられる。 The present invention relates to a method for producing a quartz glass material having a predetermined outer diameter by stretching the quartz glass material while heating the quartz glass material, and a production apparatus suitable for the method. The quartz glass material includes both a quartz glass tube and a quartz glass rod. The quartz glass tube and the quartz glass rod are used, for example, for parts for manufacturing optical fibers for communication.
現在、通信用光ファイバは、ＩＴ産業の成長とともに急速な発展を続けており、これに伴い、石英ガラス製品の需要も飛躍的に伸びている。これは、石英ガラスが高純度で、耐熱性および光透過性に優れているといった特性を持ち合わせていることから通信用光ファイバの製造治具などとして使用され、その活用範囲も多岐にわたるからである。 Currently, communication optical fibers continue to develop rapidly with the growth of the IT industry, and with this, the demand for quartz glass products has also increased dramatically. This is because quartz glass has characteristics such as high purity, heat resistance and light transmission, so it is used as a manufacturing jig for optical fibers for communications, and its application range is diverse. .
例えば、ＶＡＤ法（Vapor Phase Axial Deposition Method；気相軸付け法）、ＭＣＶＤ法（Modified Chemical Vapor Deposition Method；内付け法）による光ファイバプリフォーム製造の種棒および支持管、または線引きによる光ファイバ製造の支持棒は、円柱状または管状の石英ガラス材を延伸することにより製造される。 For example, a seed rod and support tube for manufacturing an optical fiber preform by the VAD method (Vapor Phase Axial Deposition Method), an MCVD method (Modified Chemical Vapor Deposition Method), or an optical fiber by drawing. The support rod is manufactured by stretching a cylindrical or tubular quartz glass material.
このような円柱状または管状の石英ガラス材は、従来、電気溶融炉で溶融しながら成形されるか、機械的に切削加工することにより製造されていた。しかし、前者の方法では、電気溶融炉で溶融するために石英ガラス棒の純度が著しく汚染されるという問題があった。また、後者の方法では、切削加工を伴うため、作業能率が悪く、更に石英ガラス屑粉が発生し、歩留りを一定以上に高くすることができないなどの問題があった。 Such a columnar or tubular quartz glass material has been conventionally produced by being molded in an electric melting furnace or by being mechanically cut. However, the former method has a problem that the purity of the quartz glass rod is significantly contaminated due to melting in the electric melting furnace. Further, the latter method has a problem that work efficiency is poor due to cutting, and further, quartz glass dust is generated and the yield cannot be increased beyond a certain level.
このような観点から、特許文献１には、石英ガラス棒を電気炉で加熱しつつ延伸加工することにより、石英ガラス棒の外径をコントロールする方法が開示されている。また、特許文献２には、石英ガラス材を延伸する場合に、延伸初期における加熱源の相対的移動速度を定常時の移動速度より低くし、加熱源が移動するに従って定常時の移動速度まで上昇させることで、石英ガラス材の外径の変動を抑制する方法が開示されている。
From such a viewpoint, Patent Document 1 discloses a method of controlling the outer diameter of a quartz glass rod by stretching the quartz glass rod while being heated in an electric furnace. In
しかし、上記の文献に開示された方法に従って石英ガラス材を製造しても、以下に示すような問題を解消することができない。 However, even if the quartz glass material is manufactured according to the method disclosed in the above document, the following problems cannot be solved.
図３は、従来技術における問題点を示した模式図であり、(a)は延伸軸が正常な状態、(b)は延伸軸が垂れた状態、(c)は延伸軸がずれた状態を示す。石英ガラス材は、チャック（図示しない）によって支持された状態で、延伸軸を中心とする回転が与えられる。チャックの間には、ヒータ（図示しない）が設置されており、石英ガラス材は、少なくとも一部が加熱軟化された状態で、延伸される。このとき、延伸軸を中心とする回転が与えられた状態で、かつ温度条件その他の製造条件が正常な場合には、図３(a)に示すように、石英ガラス材の延伸軸は、一直線上にあり、石英ガラス材は正常に延伸され、直線精度の高い石英ガラス材の製品を製造することができる。 FIG. 3 is a schematic diagram showing the problems in the prior art, in which (a) shows the normal state of the stretching axis, (b) shows the state where the stretching axis hangs down, and (c) shows the state where the stretching axis is shifted. Show. The quartz glass material is rotated about the stretching axis while being supported by a chuck (not shown). A heater (not shown) is installed between the chucks, and the quartz glass material is stretched in a state where at least a part is heated and softened. At this time, when the rotation about the drawing axis is given and the temperature condition and other manufacturing conditions are normal, the drawing axis of the quartz glass material is straight as shown in FIG. The quartz glass material that is on the line is normally stretched, and a product of quartz glass material with high linear accuracy can be manufactured.
ところが、温度が高すぎるなどの場合には、図３(b)に示すように、石英ガラス材の延伸軸が垂れた状態となる。また、延伸される前の石英ガラス材自身に振れ回りが存在している（直線精度が悪い）と、図３(c)に示すような延伸軸がずれた状態となる。石英ガラス材は、回転した状態で延伸されるので、このような垂れやずれが発生すると、延伸後の石英ガラス材に振れ回りが生じて、製品としての直線精度が悪化する。このような場合には、更に外表面を機械加工するなどして形状制御する必要が生じ、工程数の増加および歩留の低下を招く。 However, when the temperature is too high, as shown in FIG. 3 (b), the extending axis of the quartz glass material hangs down. Further, if the quartz glass material itself before being stretched has a whirling (the linear accuracy is poor), the stretching axis is shifted as shown in FIG. Since the quartz glass material is stretched in a rotated state, when such dripping or displacement occurs, the quartz glass material after stretching is swung, and the linear accuracy as a product is deteriorated. In such a case, it is necessary to further control the shape by, for example, machining the outer surface, resulting in an increase in the number of processes and a decrease in yield.
本発明は、上記の従来技術の問題点を解決するためになされたものであり、直線精度の優れた石英ガラス材の製造方法および製造装置を提供することを目的とする。 The present invention has been made to solve the above-described problems of the prior art, and an object of the present invention is to provide a method and apparatus for producing a quartz glass material having excellent linear accuracy.
本発明は、下記の（ａ）〜（ｃ）に示す石英ガラス材の製造方法、および、下記の（ｄ）および（ｅ）に示す石英ガラス材の製造装置を要旨とする。 The gist of the present invention is a manufacturing method of the quartz glass material shown in the following (a) to (c) and a manufacturing apparatus of the quartz glass material shown in the following (d) and (e).
（ａ）石英ガラス材を加熱しつつ延伸することで所定寸法の石英ガラス材を製造する方法であって、石英ガラス材の加熱軟化領域の前後において回転差を与えて延伸することを特徴とする石英ガラス材の製造方法。 (A) A method for producing a quartz glass material having a predetermined size by stretching while heating the quartz glass material, characterized in that the quartz glass material is stretched with a rotational difference before and after the heat softening region of the quartz glass material. Manufacturing method of quartz glass material.
（ｂ）石英ガラス材の加熱軟化領域の前後における回転差ΔＲと石英ガラス材の引き抜き速度Ｖとが下記の(1)式を満足することを特徴とする上記の（ａ）に記載の石英ガラス材の製造方法。
Ｖ／ΔＲ≧５０ ・・・(1)
（ｃ）石英ガラス素材の振れ回りを検出し、その検出結果に基づき石英ガラス素材の加熱軟化領域の前後における回転差を制御することを特徴とする上記の（ａ）または（ｂ）に記載の石英ガラス材の製造方法。
(B) The quartz glass according to (a), wherein the rotation difference ΔR before and after the heat softening region of the quartz glass material and the drawing speed V of the quartz glass material satisfy the following expression (1): A method of manufacturing the material.
V / ΔR ≧ 50 (1)
(C) The whirling of the quartz glass material is detected, and the rotation difference before and after the heating and softening region of the quartz glass material is controlled based on the detection result, as described in (a) or (b) above Manufacturing method of quartz glass material.
（ｄ）石英ガラス材を加熱するヒータと、ヒータによる加熱領域へ送り出す側と引き抜き側で異なる回転数を石英ガラス材に与えつつ異なる速度で移動可能な一対のチャックと、石英ガラス材の振れ回りを検出する検出手段を備えたことを特徴とする石英ガラス材の製造装置。 (D) A heater for heating the quartz glass material, a pair of chucks that can be moved at different speeds while giving different rotation speeds to the quartz glass material on the side to be fed to the heating area by the heater and the drawing side, and swinging of the quartz glass material An apparatus for producing a quartz glass material, comprising: a detecting means for detecting
（ｅ）石英ガラス材を加熱するヒータと、ヒータによる加熱領域へ送り出す側と引き抜き側で異なる回転数を石英ガラス材に与えつつ異なる速度で移動可能な一対のチャックと、石英ガラス材の振れ回りを検出する検出手段と、検出された振れ回りの値に基づき石英ガラス材の送り出し側と引き抜き側の石英ガラス材の回転数を設定する制御手段を備えたことを特徴とする石英ガラス材の製造装置。 (E) A heater that heats the quartz glass material, a pair of chucks that can move at different speeds while giving different rotation speeds to the quartz glass material on the side to be fed to the heating area by the heater and the drawing side, and the swing of the quartz glass material And a control means for setting the number of rotations of the quartz glass material on the sending side and the drawing side of the quartz glass material based on the detected value of the swinging motion. apparatus.
本発明に係る石英ガラス材の製造方法によれば、石英ガラス材の延伸軸をその回転軸と常時一致させることができるので、延伸前から振れ回りが存在している石英ガラス材の製造においてはその振れ回りを矯正し、製造過程において過熱状態となっても石英ガラス材の製品に振れ回りを生じさせない。このため、直線精度に優れる石英ガラス材の製品を提供することができる。また、本発明に係る石英ガラス材の製造装置は、上記の石英ガラス材の製品を製造するのに適している。 According to the method for producing a quartz glass material according to the present invention, the drawing axis of the quartz glass material can always coincide with the rotation axis thereof. The whirling is corrected and no whirling occurs in the quartz glass material product even if it is overheated in the manufacturing process. For this reason, the product of the quartz glass material which is excellent in linear accuracy can be provided. Moreover, the quartz glass material manufacturing apparatus according to the present invention is suitable for manufacturing the above-mentioned quartz glass material product.
図１および図２は、本発明に係る石英ガラス材の製造方法および製造装置を例示した模式図である。なお、石英ガラス管の製造方法と石英ガラス棒の製造方法とは基本的に同じであるので、以下の説明においては、主として石英ガラス管の製造方法および製造装置について説明する。 1 and 2 are schematic views illustrating a method and apparatus for producing a quartz glass material according to the present invention. In addition, since the manufacturing method of a quartz glass tube and the manufacturing method of a quartz glass rod are fundamentally the same, in the following description, the manufacturing method and manufacturing apparatus of a quartz glass tube are mainly demonstrated.
図１に示すように、本発明に係る石英ガラス材（図１では石英ガラス管の例を示す）１の製造方法および製造装置においては、石英ガラス管１の長手方向両端部をそれぞれチャック2-1、2-2で保持して、ヒータ３によって形成される加熱軟化領域に対して石英ガラス管１を相対的に移動させることにより石英ガラス管１をその長手方向に順次加熱軟化し、チャック2-1、2-2間の間隔を広げることにより石英ガラス管１を延伸する。
As shown in FIG. 1, in a method and apparatus for manufacturing a quartz glass material 1 according to the present invention (an example of a quartz glass tube is shown in FIG. 1), both longitudinal ends of the quartz glass tube 1 are chucked. The quartz glass tube 1 is heated and softened sequentially in the longitudinal direction by moving the quartz glass tube 1 relative to the heat softening region formed by the
なお、チャック2-1、2-2で石英ガラス管１を保持する場合には、図１に示すように、予め石英ガラス素管の両端部にダミー材4-1、4-2を溶着などにより取り付けたものを用いるのがよい。これにより、石英ガラス素材を余すことなく延伸することができるので、歩留を向上するとともに、チャック部周辺からの汚染を防止することができる。 When the quartz glass tube 1 is held by the chucks 2-1 and 2-2, as shown in FIG. 1, dummy materials 4-1 and 4-2 are previously welded to both ends of the quartz glass tube. It is good to use what was attached by. Thereby, the quartz glass material can be stretched without leaving, so that the yield can be improved and contamination from the periphery of the chuck portion can be prevented.
そして、本発明の製造方法および製造装置は、石英ガラス管１の加熱軟化領域の前後において回転差を与えて延伸するものである。 And the manufacturing method and manufacturing apparatus of this invention give a rotation difference before and behind the heating softening area | region of the quartz glass tube 1, and are extended | stretched.
これは、前掲の図３に示すように、回転差を与えることなく、石英ガラス管を延伸すると、温度条件等により垂れが生じ、延伸軸のずれが生じやすいからである。なお、加熱軟化領域の温度を下げれば、石英ガラス管の垂れを抑制できるが、ヒータとして保熱効果の高い黒鉛等を用いている場合には、急速に温度を下げることができない。 This is because, as shown in FIG. 3 described above, when a quartz glass tube is stretched without giving a rotation difference, drooping occurs due to temperature conditions or the like, and the stretching axis is liable to shift. If the temperature of the heat softening region is lowered, dripping of the quartz glass tube can be suppressed. However, when graphite or the like having a high heat retention effect is used as the heater, the temperature cannot be lowered rapidly.
石英ガラス管の加熱領域の前後において回転差を与えれば、石英ガラス管が過熱状態となった場合でも、加熱軟化領域に回転ベクトル差が生じ求心力が働くので、石英ガラス材の垂れ、ひいては振れ回りを抑制できる。回転差は、常時与えてもよいが、以下に示すように、振れ回り検出器を設置し、その検出データに従って適当な回転差を与えることとしても良い。 If a rotation difference is given before and after the heating region of the quartz glass tube, even if the quartz glass tube is overheated, a rotation vector difference occurs in the heat softening region, and the centripetal force acts. Can be suppressed. The rotation difference may be given all the time, but as shown below, a swing detector may be installed and an appropriate rotation difference may be given according to the detection data.
図２に示す例は、検出手段と制御手段とを有する石英ガラス材の製造方法および製造装置を例示した模式図である。図２において、振れ回りは、検出手段５により検出され、制御装置６に入力される。制御装置６では入力された振れ回りにあわせて、チャック2-1、2-2の回転数を制御する。 The example shown in FIG. 2 is a schematic view illustrating a manufacturing method and manufacturing apparatus for a quartz glass material having detection means and control means. In FIG. 2, the whirling is detected by the detection means 5 and input to the control device 6. The control device 6 controls the number of rotations of the chucks 2-1 and 2-2 in accordance with the input swinging.
振れ回り検出器５としては、例えばレーザー変位計を用いることができる。レーザー変位計を用いる場合には、例えば石英ガラス管１の外径位置をレーザービームの走査および受光により明暗の境界位置として測定し、その外径位置からその中心位置の延伸軸からのずれ（振れ回り）を検出するようにすればよい。検出器を用いる場合には、振れ回りの発生と同時に回転差を与えることが可能であるため、振れ回りが大きくなることをより確実に抑制することができるというメリットがある。 As the whirling detector 5, for example, a laser displacement meter can be used. In the case of using a laser displacement meter, for example, the outer diameter position of the quartz glass tube 1 is measured as a light / dark boundary position by scanning and receiving a laser beam, and the center position shifts from the stretching axis (shakes). )) May be detected. In the case of using a detector, since it is possible to give a rotation difference simultaneously with the occurrence of the whirling, there is an advantage that the whirling can be more reliably suppressed.
石英ガラス管の加熱領域の前後における回転差の範囲は、特に制限はないが、０．１ｒｐｍ以上とするのが望ましい。０．１ｒｐｍ未満では、石英ガラス管の振れ回りを十分に抑制することができない場合があるからである。また、初期の振れ回りが大きい場合は、回転差も大きくするのが望ましく、後段の実施例で説明するように、初期の振れ回りが2.5mm/mの場合には回転差は2.0rpm以上とするのが望ましい。これに対し、回転差の上限も特に限定しないが、大きすぎると、石英ガラス管の表面性状が劣化する場合があるので、１０ｒｐｍ以下とするのが望ましい。 The range of the rotation difference before and after the heating region of the quartz glass tube is not particularly limited, but is preferably 0.1 rpm or more. This is because if the rotation speed is less than 0.1 rpm, the whirling of the quartz glass tube may not be sufficiently suppressed. In addition, when the initial runout is large, it is desirable to increase the rotational difference, and as described in the following embodiment, when the initial runout is 2.5 mm / m, the rotational difference is 2.0 rpm or more. It is desirable to do. On the other hand, the upper limit of the rotation difference is not particularly limited, but if it is too large, the surface properties of the quartz glass tube may be deteriorated.
石英ガラス材の加熱軟化領域の前後における回転差ΔＲと石英ガラス材の引き抜き速度Ｖとは、下記の(1)式を満足することが望ましい。これは、「Ｖ／ΔＲ」が５０未満の場合、外周部に凹凸が発生しやすく、表面性状が悪化するおそれがあるからである。
Ｖ／ΔＲ≧５０ ・・・(1)
入側チャック2-1の送り込み速度（S1）と出側チャック2-2の引き抜き速度(S2)との比（S1/S2）は、石英ガラス素材の断面積(A1)と所望する石英ガラス製品の断面積(A2)の比の逆数（A1/A2）と一致するように設定すればよい。
It is desirable that the rotation difference ΔR before and after the heat softening region of the quartz glass material and the drawing speed V of the quartz glass material satisfy the following expression (1). This is because when “V / ΔR” is less than 50, irregularities are likely to occur on the outer peripheral portion, and the surface properties may be deteriorated.
V / ΔR ≧ 50 (1)
The ratio (S1 / S2) between the feeding speed (S1) of the inlet chuck 2-1 and the drawing speed (S2) of the outlet chuck 2-2 is the cross-sectional area (A1) of the quartz glass material and the desired quartz glass product. It may be set so as to coincide with the reciprocal (A1 / A2) of the ratio of the cross-sectional area (A2).
石英ガラスを構成する石英ガラス材としては、ＶＡＤ法などで製造される合成石英ガラスに限定され得ることはなく、天然石英ガラスその他の石英ガラスを用いてもよい。図１に示す例のように石英ガラス母材として石英ガラス管を用いる場合には、石英ガラス管の内圧を制御してもよい。また、石英ガラス棒を製造する場合には、石英ガラス棒素材を用いればよい。 The quartz glass material constituting the quartz glass is not limited to synthetic quartz glass manufactured by the VAD method or the like, and natural quartz glass or other quartz glass may be used. When a quartz glass tube is used as the quartz glass base material as in the example shown in FIG. 1, the internal pressure of the quartz glass tube may be controlled. Further, when a quartz glass rod is manufactured, a quartz glass rod material may be used.
石英ガラス素材の温度は、軟化点を左右するＯＨ基、Ｃｌ基等の濃度との関係で設定すればよい。加熱炉の温度は、2000〜2700℃程度の範囲で、石英ガラス素材の軟化点にあわせて設定すればよい。 The temperature of the quartz glass material may be set in relation to the concentration of OH groups, Cl groups, etc. that influence the softening point. What is necessary is just to set the temperature of a heating furnace in the range of about 2000-2700 degreeC according to the softening point of a quartz glass raw material.
外径159.01mm、内径36.75mmの石英ガラス材（管材）を、図１に示す装置を使って外径25mm、内径13mmの石英ガラス管とする実験をおこなった。 An experiment was conducted using a quartz glass material (tube material) having an outer diameter of 159.01 mm and an inner diameter of 36.75 mm as a quartz glass tube having an outer diameter of 25 mm and an inner diameter of 13 mm using the apparatus shown in FIG.
まず、上記の石英ガラス材をダミー材に接着させたものを入側チャックに固定した状態で、石英ガラス材の他端における振れ回り〔入側チャックの中心軸からのずれ幅(mm)／入側チャックの先端部から石英ガラス材の他端までの長さ(m)〕を測定し、振れ回りが1.20mm/mとなるように入側チャックの保持状態を調整した。この状態で入側チャックをヒータ内出側に移動させ、出側チャックで保持したダミー材と石英ガラス材とを溶着させた。 First, with the quartz glass material bonded to the dummy material fixed to the inlet chuck, the quartz glass material swung around the other end [deviation width from the central axis of the inlet chuck (mm) / input The length from the front end of the side chuck to the other end of the quartz glass material (m)] was measured, and the holding state of the input side chuck was adjusted so that the runout would be 1.20 mm / m. In this state, the entrance side chuck was moved to the exit side in the heater, and the dummy material held by the exit side chuck and the quartz glass material were welded.
その後、送り込み速度を9.27mm/min、引き抜き速度を486.52mm/min、ヒータ温度を２２００℃、入側（送り込み側）チャックの回転数を10rpmとして、石英ガラス管を作製した。同様の実験を、出側（引き抜き側）チャックの回転数を順次変えて、「Ｖ／ΔＲ」の値を調整しつつおこなった。 Thereafter, a quartz glass tube was produced with a feeding speed of 9.27 mm / min, a drawing speed of 486.52 mm / min, a heater temperature of 2200 ° C., and an inlet side (feed side) chuck rotation speed of 10 rpm. A similar experiment was conducted while adjusting the value of “V / ΔR” by sequentially changing the rotation speed of the delivery side (drawing side) chuck.
延伸後の石英ガラス製品について、両端を１０００ｍｍ離れたＶブロックにて固定し、ダイヤルゲージにより中心位置（両端から５００ｍｍ位置）での振れ回り（直線制度）を測定した。また、延伸後の石英ガラス製品の表面性状を、直接の目視及び集光ランプを使用する目視により確認し、表面に螺旋や凹凸が存在しない場合を「○」とし、存在する場合を「×」として評価した。これらの結果を製造条件とともに表１に示す。 About the quartz glass product after extending | stretching, both ends were fixed with the V block 1000 mm apart, and the run-around (straight line system) in the center position (500 mm position from both ends) was measured with the dial gauge. In addition, the surface property of the quartz glass product after stretching is confirmed by direct visual observation and visual observation using a condenser lamp. As evaluated. These results are shown in Table 1 together with the production conditions.
表１に示すように、回転差がない試験No.1では、表面性状は良好であるが、完成品に0.50mm/mの振れ回りが残存し、素材の振れ回りが十分に抑制されなかった。回転差を設けた試験No.2〜11では、完成品の振れ回りは小さく抑えられ、いずれも直線精度が良好であった。但し、Ｖ／ΔＲが50未満であった試験No.11では、表面性状が悪かった。 As shown in Table 1, in Test No. 1 with no difference in rotation, the surface properties were good, but the runout of 0.50 mm / m remained in the finished product, and the runout of the material was not sufficiently suppressed. . In Test Nos. 2 to 11 with a difference in rotation, the runout of the finished product was suppressed to a small level, and all of the linear accuracy was good. However, in Test No. 11 where V / ΔR was less than 50, the surface properties were poor.
外径159.00mmの石英ガラス材（棒材）を、図１に示す装置を使って外径39.2mmの石英ガラス棒とする実験をおこなった。 An experiment was conducted in which a quartz glass rod (rod) having an outer diameter of 159.00 mm was converted into a quartz glass rod having an outer diameter of 39.2 mm using the apparatus shown in FIG.
まず、上記の石英ガラス材をダミー材に接着させたものを入側チャックに固定した状態で、石英ガラス材の他端における振れ回り〔入側チャックの中心軸からのずれ幅(mm)／入側チャックの先端部から石英ガラス材の他端までの長さ(m)〕を測定し、振れ回りが2.50mm/mとなるように入側チャックの保持状態を調整した。この状態で入側チャックをヒータ内出側に移動させ、出側チャックで保持したダミー材と石英ガラス材とを溶着させた。 First, with the quartz glass material bonded to the dummy material fixed to the inlet chuck, the quartz glass material swung around the other end [deviation width from the central axis of the inlet chuck (mm) / input The length (m) from the tip of the side chuck to the other end of the quartz glass material] was measured, and the holding state of the entrance side chuck was adjusted so that the run-out was 2.50 mm / m. In this state, the entrance side chuck was moved to the exit side in the heater, and the dummy material held by the exit side chuck and the quartz glass material were welded.
その後、送り込み速度を26.70mm/min、引き抜き速度を439.40mm/min、ヒータ温度を２４００℃、入側（送り込み側）チャックの回転数を10rpmとして、石英ガラス管を作製した。同様の実験を、出側（引き抜き側）チャックの回転数を順次変えて、「Ｖ／ΔＲ」の値を調整しつつおこなった。 Thereafter, a quartz glass tube was produced with an infeed speed of 26.70 mm / min, an extraction speed of 439.40 mm / min, a heater temperature of 2400 ° C., and an inlet (feed side) chuck rotation speed of 10 rpm. A similar experiment was conducted while adjusting the value of “V / ΔR” by sequentially changing the rotation speed of the delivery side (drawing side) chuck.
延伸後の石英ガラス棒について、上記の方法で振れ回りおよび表面性状を確認した。これらの結果を製造条件とともに表２に示す。 About the quartz glass rod after extending | stretching, the whirling and surface property were confirmed by said method. These results are shown in Table 2 together with the production conditions.
表２に示すように、回転差がない試験No.12では、表面性状は良好であるが、完成品に1.20mm/mの振れ回りが残存した。回転差を設けた試験No.13〜19では、完成品の振れ回りがかなり改善された。但し、Ｖ／ΔＲが50未満であった試験No.19では、表面性状が悪かった。 As shown in Table 2, in Test No. 12 with no rotational difference, the surface properties were good, but a runout of 1.20 mm / m remained in the finished product. In Test Nos. 13 to 19 with a difference in rotation, the runout of the finished product was considerably improved. However, in Test No. 19 in which V / ΔR was less than 50, the surface properties were poor.
外径159.01mm、内径36.75mmの石英ガラス材（管材）を、図１に示す装置を使って外径25mm、内径13mmの石英ガラス管とする実験をおこなった。 An experiment was conducted using a quartz glass material (tube material) having an outer diameter of 159.01 mm and an inner diameter of 36.75 mm as a quartz glass tube having an outer diameter of 25 mm and an inner diameter of 13 mm using the apparatus shown in FIG.
まず、上記の石英ガラス材をダミー材に接着させたものを入側チャックに固定した状態で、石英ガラス材の他端における振れ回り〔入側チャックの中心軸からのずれ幅(mm)／入側チャックの先端部から石英ガラス材の他端までの長さ(m)〕を測定し、振れ回りが1.20mm/mとなるように入側チャックの保持状態を調整した。この状態で入側チャックをヒータ内出側に移動させ、出側チャックで保持したダミー材と石英ガラス材とを溶着させた。 First, with the quartz glass material bonded to the dummy material fixed to the inlet chuck, the quartz glass material swung around the other end [deviation width from the central axis of the inlet chuck (mm) / input The length from the front end of the side chuck to the other end of the quartz glass material (m)] was measured, and the holding state of the input side chuck was adjusted so that the runout would be 1.20 mm / m. In this state, the entrance side chuck was moved to the exit side in the heater, and the dummy material held by the exit side chuck and the quartz glass material were welded.
その後、送り込み速度を9.27mm/min、引き抜き速度を486.52mm/min、ヒータ温度を２２００℃または２５００℃、入側（送り込み側）チャックの回転数を10rpmとして、石英ガラス管を作製した。出側（引き抜き側）チャックの回転数を入側チャックとの回転差が0.00または2.00となるように変えて同様の実験をおこなった。 Thereafter, a quartz glass tube was produced with a feeding speed of 9.27 mm / min, a drawing speed of 486.52 mm / min, a heater temperature of 2200 ° C. or 2500 ° C., and an inlet side (feed side) chuck speed of 10 rpm. The same experiment was performed by changing the rotation speed of the output side (drawing side) chuck so that the rotation difference from the input side chuck was 0.00 or 2.00.
延伸後の石英ガラス棒について、上記の方法で振れ回りおよび表面性状を確認した。これらの結果を製造条件とともに表３に示す。 About the quartz glass rod after extending | stretching, the whirling and surface property were confirmed by said method. These results are shown in Table 3 together with the production conditions.
表３に示すように、回転差がない試験No.20では、表面性状は良好であるが、完成品に0.50mm/mの振れ回りが発生し、ヒータ温度が高すぎる試験No.22では、表面性状が悪く、しかも、完成品に1.21mm/mの振れ回りが発生した。回転差を設けた試験No.21および23では、完成品の振れ回りは小さく抑えられ、いずれも直線精度が良好で、表面性状においても良好であった。 As shown in Table 3, in Test No. 20 where there is no rotational difference, the surface properties are good, but in the finished product, a runout of 0.50 mm / m occurs and the heater temperature is too high. The surface properties were poor, and a runout of 1.21 mm / m occurred in the finished product. In Test Nos. 21 and 23 with a difference in rotation, the runout of the finished product was suppressed to a small level, and both had good linear accuracy and good surface properties.
外径159.00mmの石英ガラス材（棒材）を、図１に示す装置を使って外径39.2mmの石英ガラス棒とする実験をおこなった。 An experiment was conducted in which a quartz glass rod (rod) having an outer diameter of 159.00 mm was converted into a quartz glass rod having an outer diameter of 39.2 mm using the apparatus shown in FIG.
まず、上記の石英ガラス材をダミー材に接着させたものを入側チャックに固定した状態で、石英ガラス材の他端における振れ回り〔入側チャックの中心軸からのずれ幅(mm)／入側チャックの先端部から石英ガラス材の他端までの長さ(m)〕を測定し、振れ回りが0.30となるように入側チャックの保持状態を調整した。この状態で入側チャックをヒータ内出側に移動させ、出側チャックで保持したダミー材と石英ガラス材とを溶着させた。 First, with the quartz glass material bonded to the dummy material fixed to the inlet chuck, the quartz glass material swung around the other end [deviation width from the central axis of the inlet chuck (mm) / input The length from the tip of the side chuck to the other end of the quartz glass material (m)] was measured, and the holding state of the inlet chuck was adjusted so that the runout was 0.30. In this state, the entrance side chuck was moved to the exit side in the heater, and the dummy material held by the exit side chuck and the quartz glass material were welded.
その後、送り込み速度を26.70mm/min、引き抜き速度を439.40mm/min、ヒータ温度を２４００℃または２７００℃、入側（送り込み側）チャックの回転数を10rpmとして、石英ガラス管を作製した。出側（引き抜き側）チャックの回転数を入側チャックとの回転差が0.00または2.00となるように変えて同様の実験をおこなった。 Thereafter, a quartz glass tube was produced with an infeed speed of 26.70 mm / min, an extraction speed of 439.40 mm / min, a heater temperature of 2400 ° C. or 2700 ° C., and an inlet (feed side) chuck rotation speed of 10 rpm. The same experiment was performed by changing the rotation speed of the output side (drawing side) chuck so that the rotation difference from the input side chuck was 0.00 or 2.00.
延伸後の石英ガラス棒について、上記の方法で振れ回りおよび表面性状を確認した。これらの結果を製造条件とともに表４に示す。 About the quartz glass rod after extending | stretching, the whirling and surface property were confirmed by said method. These results are shown in Table 4 together with the production conditions.
表４に示すように、回転差がない試験No.24では、表面性状は良好であるが、完成品に0.90mm/mの振れ回りが発生し、ヒータ温度が高すぎる試験No.26では、表面性状が悪く、しかも、完成品に2.14mm/mの振れ回りが発生した。回転差を設けた試験No.25よび27では、完成品の振れ回りは小さく抑えられ、いずれも直線精度が良好で、表面性状においても良好であった。 As shown in Table 4, in Test No. 24 where there is no rotation difference, the surface properties are good, but in the test No. 26 where the whirling of 0.90 mm / m occurs in the finished product and the heater temperature is too high, The surface properties were poor, and a runout of 2.14 mm / m occurred in the finished product. In Test Nos. 25 and 27 with a difference in rotation, the run-out of the finished product was suppressed to a small level, both of which had good linear accuracy and good surface properties.
本発明に係る石英ガラス材の製造方法によれば、石英ガラス材の延伸軸をその回転軸と常時一致させることができるので、延伸前から振れ回りが存在している石英ガラス材の製造においてはその振れ回りを矯正し、製造過程において過熱状態となっても石英ガラス材の製品に振れ回りを生じさせない。このため、直線精度に優れる石英ガラス材の製品を提供することができる。また、本発明に係る石英ガラス材の製造装置は、上記の石英ガラス材の製品を製造するのに適している。 According to the method for producing a quartz glass material according to the present invention, the drawing axis of the quartz glass material can always coincide with the rotation axis thereof. The whirling is corrected and no whirling occurs in the quartz glass material product even if it is overheated in the manufacturing process. For this reason, the product of the quartz glass material which is excellent in linear accuracy can be provided. Moreover, the quartz glass material manufacturing apparatus according to the present invention is suitable for manufacturing the above-mentioned quartz glass material product.
１．石英ガラス材、2-1、2-2．チャック、
３．ヒータ、4-1、4-2．ダミー材、
５．振れ回り検出手段、６．制御装置
1. Quartz glass material, 2-1, 2-2. Chuck,
3. Heater, 4-1, 4-2. Dummy material,
5. 5. swing-out detection means; Control device
Claims (5)
Ｖ／ΔＲ≧５０ ・・・(1) The method for producing a quartz glass material according to claim 1, wherein the rotation difference ΔR before and after the heat softening region of the quartz glass material and the drawing speed V of the quartz glass material satisfy the following expression (1).
V / ΔR ≧ 50 (1)
A heater that heats the quartz glass material, a pair of chucks that can be moved at different speeds while giving different rotation speeds to the quartz glass material on the side to be sent to the heating area by the heater and the drawing side, and detects the swing of the quartz glass material An apparatus for producing a quartz glass material, comprising: a detecting means; and a control means for setting the number of revolutions of the quartz glass material on the sending side and the drawing side of the quartz glass material on the basis of the detected swing value.
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| JPH064035U (en) * | 1992-06-09 | 1994-01-18 | 東芝硝子株式会社 | Glass tube processing equipment |
| JPH0769665A (en) * | 1993-06-22 | 1995-03-14 | Sumitomo Electric Ind Ltd | Optical fiber preform, optical fiber and production thereof |
| JP2000088768A (en) * | 1998-09-10 | 2000-03-31 | Shin Etsu Chem Co Ltd | Method and apparatus for drawing glass base material |
| JP2000247672A (en) * | 1999-02-25 | 2000-09-12 | Shin Etsu Chem Co Ltd | Method for processing optical fiber preform and processing apparatus therefor |
| JP2003327441A (en) * | 2002-05-09 | 2003-11-19 | Sumitomo Electric Ind Ltd | Method and apparatus for producing glass pipe for optical fiber |
| JP2005263527A (en) * | 2004-03-17 | 2005-09-29 | Sumitomo Electric Ind Ltd | Method and apparatus for manufacturing glass pipe |
| JP2006021979A (en) * | 2004-07-09 | 2006-01-26 | Sumitomo Electric Ind Ltd | Method for manufacturing glass pipe |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH064035U (en) * | 1992-06-09 | 1994-01-18 | 東芝硝子株式会社 | Glass tube processing equipment |
| JPH0769665A (en) * | 1993-06-22 | 1995-03-14 | Sumitomo Electric Ind Ltd | Optical fiber preform, optical fiber and production thereof |
| JP2000088768A (en) * | 1998-09-10 | 2000-03-31 | Shin Etsu Chem Co Ltd | Method and apparatus for drawing glass base material |
| JP2000247672A (en) * | 1999-02-25 | 2000-09-12 | Shin Etsu Chem Co Ltd | Method for processing optical fiber preform and processing apparatus therefor |
| JP2003327441A (en) * | 2002-05-09 | 2003-11-19 | Sumitomo Electric Ind Ltd | Method and apparatus for producing glass pipe for optical fiber |
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| JP2006021979A (en) * | 2004-07-09 | 2006-01-26 | Sumitomo Electric Ind Ltd | Method for manufacturing glass pipe |
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