JP2006263847A - Machining device and machining method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a machining device, correcting the relative positional relationship between the machining surface and a tool shaft at a part opposite to the machining surface in three dimensions and in a short time. <P>SOLUTION: A shaft 17 is moved in three dimensions by the movement along the XY plane of a two-axes stage 400, thereby causing a casing 50 incorporated with a spindle 2 to move. The casing 50 is fixed to a recessed spherical guided part 4, and the recessed spherical guided part 4 is guided by a projecting spherical guide part 3. As a result, the spindle 2 is moved along the spherical surface having a radius (r) around the point O and changed in its attitude. The spindle 2 is enabled to reciprocate in the direction of the tool shaft by a ball screw 5, a motor 6 and a linear guide part 7. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a processing apparatus and a processing method for operating a tool in a cantilever state like a milling machine or a machining center.

  In a machine tool used for high-precision machining such as a milling machine or a machining center, a tool is used in a cantilever state, and a workpiece is machined by its peripheral surface. Therefore, the tool is bent by receiving cutting resistance or grinding resistance in a direction perpendicular to the direction in which the cantilever extends. When machining a highly accurate shape using such a machine tool, in order to prevent the bending of the tool, the machining resistance received by the tool is reduced by reducing the feed rate of the tool and reducing the machining amount. Must be made as small as possible. Therefore, it is difficult to form a highly accurate shape in a short time.

As a technique for solving the above-described problems, there is a technique disclosed in Japanese Patent Laid-Open No. 2000-280112. The document discloses a method of adjusting the positional relationship of the tool axis with respect to the work surface of the work by relatively rotating the spindle and the work in consideration of the bending of the tool. According to this method, even if the tool is bent, the deviation of the relative positional relationship between the machining surface and the tool axis is corrected, the state where the machining surface and the tool axis are parallel is maintained, and the accuracy is improved. High processed products can be obtained.
JP 2000-280112 A

  According to the technique disclosed in the above-mentioned document, the tool can perform only one degree of freedom of movement within a predetermined plane. That is, the technique cannot operate the tool with two or more degrees of freedom. However, in a general-purpose machine tool such as a milling machine or a machining center, the direction of machining resistance changes. Therefore, the tool bends in an unspecified direction. Therefore, unless the tool can be corrected three-dimensionally, the positional deviation between the machining surface and the tool axis due to the bending of the tool cannot be corrected completely. Therefore, it is not possible to maintain a state in which the machining surface and the tool axis are parallel. As a result, a desired processed surface cannot be obtained.

  Further, according to the above technique, only the relative rotation angle of the positional relationship between the machining surface and the tool axis is corrected, so if the tool length is not strictly managed, the machining surface and the tool The positional deviation between the axes cannot be accurately corrected.

  The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a machining apparatus that can completely correct a positional deviation between a machining surface and a tool axis in a short time. It is. A further object of the present invention is to provide a machining apparatus and a machining method capable of accurately correcting a shift in the positional relationship between the machining surface and the tool axis without accurately managing the tool length. That is.

  The processing apparatus of the present invention includes a cantilevered tool, a spindle to which the tool is attached, a guided portion whose relative position with respect to the spindle is fixed, and a guide for guiding the guided portion along a predetermined spherical surface. A drive unit that moves the guided portion along the guide unit, and a control unit that controls the drive unit.

  According to the above configuration, the work surface of the workpiece and the tool axis caused by the bending of the tool can be used without adopting a machining method that lowers the machining resistance such as reduction of the feed rate of the tool and reduction of the machining amount. The positional deviation between them can be corrected three-dimensionally. For example, even if the tool is bent, the positional relationship between the machining surface of the workpiece and the tool axis of the portion facing the machining surface can always be maintained in a parallel state. Therefore, highly accurate processing can be performed in a short time.

  In the processing method of the present invention, the cantilever-shaped tool, the spindle to which the tool is attached, the guided portion whose relative position is fixed with respect to the spindle, and the guided portion along a predetermined arc. A processing apparatus is used that includes a guide unit that guides, a drive unit that moves the guided unit along the guide unit, and a control unit that controls the drive unit. Moreover, in the processing method, the workpiece processed by the tool is mounted on the rotary table. Further, in the machining method, the machining surface of the workpiece and the tool axis are obtained by combining the reciprocating motion along a predetermined arc of the tool caused by driving the machining device and the rotational motion of the workpiece caused by the rotation of the rotary table. The positional deviation between the two is corrected.

  According to the above method, in addition to the effect that high-precision machining can be performed in a short time, the rotary table and the machining apparatus are separated, and thus the machining apparatus can be downsized.

  Hereinafter, a processing apparatus according to an embodiment of the present invention will be described with reference to the drawings. In each embodiment, parts denoted by the same reference numerals have substantially the same structure and function.

Embodiment 1 FIG.
First, the processing apparatus of Embodiment 1 of this invention is demonstrated using FIGS. 1-4. As shown in FIGS. 1 and 2, the machining apparatus according to the present embodiment includes a cantilevered tool 1, a spindle 2 that rotates the tool 1 around a tool axis, and a movement of the spindle 2 along the tool axis. A linear guide 7 that guides the ball, a ball screw 5 that is connected to the spindle 2 and extends in the tool axis direction to move the spindle 2 in the tool axis direction, and a motor 6 that drives the ball screw 5 And. The workpiece 200 to be processed by the tool 1 is mounted on the stage 300.

  Further, in the present embodiment, a part of the spindle 2 is included in the housing 50, and the concave spherical guided portion 4 is fixed to the housing 50. The concave spherical guided portion 4 is in contact with the convex spherical guide portion 3 having a corresponding shape. The concave spherical guided portion 4 moves relative to the convex spherical guide portion 3 by driving a biaxial stage 400 described later. Accordingly, the spindle 2 moves along a spherical surface having a radius r centered on the point O, and the posture of the workpiece 200 with respect to the processing surface 200a changes. Point O is a point on the tool axis when the tool 1 is in contact with the entire processing surface 200a at the same height position as the uppermost end of the processing surface 200a of the workpiece 200. The convex spherical guided portion may be fixed to the housing 50, and the convex spherical guided portion may be a processing apparatus that moves relative to the concave spherical guide portion whose position is fixed. . This also produces the same effect as described above.

  Moreover, the processing apparatus of the embodiment has a biaxial stage 400 as a drive unit of the present invention. The biaxial stage 400 has a base plate 8 whose position is fixed. The biaxial stage 400 includes an X axis stage 10 that moves along the X axis direction, a ball screw 11a that moves the X axis stage 10, an X axis motor 11 that drives the ball screw 11a, and a base plate 8. And two X-axis guide portions 9 that guide the movement of the X-axis stage 10 in the X-axis direction. The Y-axis stage 13 that moves along the Y-axis direction, the ball screw 14a that moves the Y-axis stage 13, the Y-axis motor 14 that drives the ball screw 14a, and the X-axis stage 10 are provided on the Y-axis. And two Y-axis guide portions 12 for guiding the movement of the stage 13 in the Y-axis direction.

  The operation of the biaxial stage 400 is transmitted to the housing 50 and the spindle 2 via the shaft 17 and the rotation mechanism 16. The shaft 17 is supported by a slide mechanism 15 as a slide bearing, moves relative to the slide mechanism 15, and can reciprocate along the Z-axis direction. Further, the rotating mechanism 16 is constituted by a spherical bearing, and the three-dimensional movement of the shaft 17 causes the posture of the housing 50, the spindle 2, and the tool 1 to the work surface 200a of the workpiece 200 in a three-dimensional manner. It is possible to change.

  When the concave spherical guided portion 4 is guided and moved by the convex spherical guide portion 3, the relative distance and relative angle between the base plate 8 of the biaxial stage 400 and the housing 50, the spindle 2 and the tool 1 change. To do. This change in relative distance is absorbed by the slide mechanism 15 provided on the biaxial stage 400, and the change in the relative angle is absorbed by the rotation mechanism 16 provided on the biaxial stage 400.

  A control unit 18 is provided in the vicinity of the biaxial stage 400. The control unit 18 controls the X-axis motor 11, the Y-axis motor 14, and the motor 6.

  According to the processing apparatus configured as described above, as shown in FIGS. 3 and 4, the predetermined point P of the spindle 2 is moved three-dimensionally along a spherical surface having a radius r centered on the point O. It becomes possible. Therefore, it is possible to three-dimensionally correct the relative positional deviation between the tool axis and the machining surface 200a of the workpiece 200 caused by the machining resistance. That is, according to the bending of the tool 1, the posture of the part of the tool axis facing the machining surface 200a with respect to the machining surface 200a can always be made substantially constant.

  Further, according to the processing apparatus of the present embodiment, the spindle 2 can be reciprocated along the rotation center axis by driving the ball screw 5 and the motor 6. Therefore, regardless of the value of the tool length, the height of the tip of the tool 1 and the height of the lowermost end of the machining surface 200a can be matched. As a result, even if the tool length is not strictly managed, it is possible to easily correct the relative positional relationship (attitude) between the machining surface 200a and the portion of the tool axis facing the machining surface 200a. Therefore, highly accurate processing can be performed in a short time.

  The characteristics of the processing apparatus of the present embodiment as described above can be summarized as follows.

  The relative spherical positional relationship between the concave spherical guided portion 4 as an example of the guided portion and the spindle 2 is fixed, and the concave spherical guided portion is along a spherical surface having a radius r centered on the point O. 4 is guided to the convex spherical guide part 3 as an example of the guide part. Therefore, the positional relationship between the machining surface 200a and the tool axis is shifted due to the bending of the tool 1 without adopting a machining method that lowers the machining resistance such as reduction of the feed speed of the tool 1 and reduction of the machining amount. Can be corrected three-dimensionally. For example, as shown in FIG. 5, even if the tool 1 is bent, the machining surface 200a and the tool axis S are always maintained in a parallel state. Therefore, highly accurate processing can be performed in a short time.

  In addition, since only the concave spherical guided portion 4 and the convex spherical guide portion 3 maintain the parallel state of the machining surface 200a and the tool axis S, the machining accuracy of the workpiece 200 can be increased with respect to the guide portion of the driving unit. Large dependence on accuracy is prevented. Moreover, since the drive part consists of the biaxial stage 400, the slide mechanism 15, and the rotation mechanism 16, the spindle 2 and the tool 1 can be moved within a wide range.

  In addition, since the machining apparatus of the present embodiment includes the ball screw 5 and the motor 6 as a moving mechanism that moves the spindle 2 along the tool axis S, even if the attitude of the tool 1 with respect to the workpiece 200 is changed. The tip of the tool 1 can always be brought into contact with the height position of the lowermost end of the machining surface 200a of the workpiece 200. Therefore, even if the tool length is not strictly managed, it is possible to three-dimensionally correct the positional relationship between the machining surface 200a and the portion of the tool axis S facing the machining surface 200a.

Embodiment 2. FIG.
6 and 7 are a front view and a side view, respectively, of the processing apparatus according to the second embodiment of the present invention. The processing apparatus 100 according to the present embodiment includes a cantilevered tool 1 and a spindle 2 that rotates the tool 1 about its axis. A part of the spindle 2 is housed in the housing 50. A guided portion 50 a is provided so as to protrude from the housing 50. The guided portion 50a is guided by an arcuate guide portion 21 described later. As a result, the housing 50 rotates about the processing point O around the Y axis. The rotation operation around the Y axis of the housing 50 is realized by the piezoelectric element 22 vibrating the housing in the X axis direction. The piezoelectric element 22 is attached to a moving unit 30 provided so as to surround the housing 50.

  On the inner surface of the moving part 30, an arcuate guide part 21 extending along an arc having a radius r centered on the point O is provided. The point O is a point on the tool axis when the tool 1 is in contact with the entire processing surface 200a at the same height position as the uppermost end of the processing surface 200a of the workpiece 200. The moving unit 30 is provided with a gear unit 23. The gear portion 23 meshes with the gear portion 26 of the motor 25. The motor 25 is attached to a fixed portion 24 whose position is fixed.

  When the motor 25 rotates, the guided portion 30 a protruding from the moving portion 30 is guided by the arcuate guide portion 31. The arcuate guide portion 31 is attached to the fixed portion 24 and extends along an arc having a radius R larger than the radius r centered on the point O. Accordingly, the moving unit 30 rotates about the processing point O around the X axis. The workpiece 200 to be processed by the tool 1 is mounted on the stage 300.

  Although not shown, the machining apparatus 100 according to the present embodiment is similar to the machining apparatus according to the first embodiment in that the linear guide portion 7 that guides the movement of the spindle 2 along the tool axis and the spindle 2 In order to move the spindle 2 in the tool axis direction, a ball screw 5 provided so as to extend in the tool axis direction and a motor 6 for driving the ball screw 5 are provided. Therefore, even with the machining apparatus of the present embodiment, the height position of the tip of the tool 1 and the height position of the lowermost end of the machining surface 200a are always matched by driving the ball screw 5 and the motor 6, thereby reducing the shortness. High-precision processing can be performed in time.

  Also with the processing apparatus 100 of the present embodiment, the predetermined point P of the spindle 2 can be moved along a spherical surface with a radius r centered on the point O, similarly to the processing apparatus of the first embodiment. Become. Therefore, it is possible to three-dimensionally correct a relative positional shift between the tool 1 and the machining surface 200a of the workpiece 200 due to machining resistance. Further, since the housing 50 is rotated around the Y axis using the piezoelectric element 22, the posture (angle) of the tool axis with respect to the processing surface 200a can be changed at a high frequency.

  Also in the present embodiment, if the guided portion 50a as the protruding portion is guided and moved by the arcuate guide portion 21, the relative distance and the relative angle between the housing 50 and the moving portion 30 may change. However, the change in the relative distance and the change in the relative angle are absorbed by the elastic deformation of the piezoelectric element 22. However, a rotation mechanism and a slide mechanism are provided between the housing 50 and the moving unit 30, and changes in relative distance and relative angle are absorbed by the rotation mechanism and slide mechanism as in the first embodiment. Also good. Further, as the arcuate guide portion 21, a commercially available guide called an R guide can be used, so that an inexpensive processing apparatus can be manufactured. Further, the piezoelectric element 22 and the motor 25 are controlled by the control unit 18.

  The characteristics of the present embodiment processing apparatus 100 are summarized as follows.

  The machining apparatus 100 according to the present embodiment includes, as a guide portion, an arcuate guide portion 21 extending along the first arc on a spherical surface having a radius r centered on the point O, and a spherical surface having a radius R centered on the point O. It has an arcuate guide portion 31 extending along the second arc on the upper side, and is guided by the guided portion 50a guided by the arcuate guide portion 21 and the arcuate guide portion 31 as the guided portion. And a guided portion 30a. Therefore, since the guide portion and the guided portion can be manufactured using only a commercially available arcuate guide portion, the above-described processing apparatus can be easily manufactured.

  Further, the machining apparatus 100 of the present embodiment includes a motor 25 and a gear portion 26 to which the rotation of the motor 25 is transmitted as a drive portion, and has an arcuate guide portion 21 as a guide portion. Is included. Further, the gear part 23 of the moving part 30 is engaged with the gear part 26. According to this structure, the attitude | position of the spindle 2 changes with mesh | engagement of gear parts. As a result, the relative distance and relative angle between the motor 25 serving as the drive unit and the spindle 2 do not change. Therefore, a slide mechanism and a rotation mechanism for correcting the deflection of the tool 1 are not required. Therefore, the structure of the processing apparatus is simplified.

  Further, the processing apparatus 100 of the present embodiment uses the reciprocating motion caused by the vibration of the piezoelectric element 22 to move the guided portion 50a, the casing 50, and the spindle 2 along the arcuate guide portion 21. The tool 1 can be operated at high speed.

Embodiment 3 FIG.
8 and 9 are a front view and a side view, respectively, of the processing apparatus according to the third embodiment of the present invention. The processing apparatus 100 according to the present embodiment includes a tool 1 on a cantilever and a spindle 2 that rotates the tool 1 around its axis. The spindle 2 is built in the housing 50. The housing 50 is guided by the arcuate guide portion 21 and rotates around the Y axis around the point O. The point O is a point on the tool axis when the tool 1 is in contact with the entire processing surface 200a at the same height position as the uppermost end of the processing surface 200a of the workpiece 200.

  Further, the gear portion 23 provided on the inner surface of the moving portion 30 and the gear portion 41 of the motor 40 mesh with each other by the rotation of the motor 40 around the axis along the Y axis. As a result, the guided portion 50 a of the housing 50 is guided to the arcuate guide portion 21 of the moving portion 30. The motor 40 is attached to the back surface of the housing 50. The arcuate guide portion 21 is provided on the inner surface of the moving portion 30.

  A rotation mechanism 35 is attached to the upper surface of the moving unit 30. The rotation mechanism 35 is attached to the fixed portion 24 whose position is fixed. The rotation mechanism 35 can rotate the moving unit 30 around the Z axis in the XY plane. The workpiece 200 to be processed by the tool 1 is mounted on the stage 300.

  Although not shown, the machining apparatus 100 according to the present embodiment is similar to the machining apparatus according to the first embodiment in that the linear guide portion 7 that guides the movement of the spindle 2 along the tool axis and the spindle 2 In order to move the spindle 2 in the tool axis direction, a ball screw 5 provided so as to extend in the tool axis direction and a motor 6 for driving the ball screw 5 are provided. Therefore, also by the processing apparatus 100 of the present embodiment, the height of the tip of the tool 1 and the lowermost end of the processing surface 200a are always matched by driving the ball screw 5 and the motor 6, thereby achieving high precision in a short time. Can be processed.

  Also with the machining apparatus 100 of the present embodiment, a predetermined point P of the spindle 2 can be moved along a spherical surface with a radius r centered on the point O, as in the machining apparatuses of the first and second embodiments. become. Therefore, it is possible to three-dimensionally correct a relative positional shift between the tool 1 and the machining surface 200a of the workpiece 200 due to machining resistance. Further, since the drive unit of the present invention is configured only by the motor 40 and the rotation mechanism 35, the number of parts of the processing apparatus 100 can be reduced. The rotation mechanism 35 and the motor 25 are controlled by the control unit 18.

  The characteristics of the processing apparatus 100 of the present embodiment are summarized as follows.

  The processing apparatus 100 according to the present embodiment has an arcuate guide portion 21 that extends along an arc on a spherical surface with a radius r centered on a point O as a guide portion. The housing 50 contains the spindle 2. The housing 50 is provided with a guided portion 50 a guided by the arcuate guide portion 21. Furthermore, the processing apparatus 100 of this Embodiment has the rotation mechanism 35 as a drive part. The rotation mechanism 35 rotates the moving unit 30 around the rotation axis C extending in the radial direction of the spherical surface with the processing point O as the center. As a result, the arcuate guide portion 21 rotates around the rotation axis C within a spherical surface centered on the point O. As a result, the rotation trajectory of the arcuate guide portion 21 draws a part of a spherical shell on a spherical surface having a radius r centered on the point O. That is, the predetermined point P of the spindle 2 can move on a spherical surface having a radius r centered on the point O. The point O is a point on the tool axis when the tool 1 is in contact with the entire processing surface 200a at the same height position as the uppermost end of the processing surface 200a of the workpiece 200.

  Also by the configuration of the processing apparatus of the present embodiment, it is possible to exhibit the same function as the processing apparatuses of the first and second embodiments. Moreover, according to this structure, since the rotation mechanism 35 plays the role of an arcuate guide part, the structure of the guide part can be simplified.

  Further, the processing apparatus of the present embodiment includes a motor 40 and a gear part 41 to which rotation of the motor 40 is transmitted as a drive part, and has an arcuate guide part 21 as a guide part. The moving part 30 which includes the housing | casing 50 is included. Further, the gear part 23 of the moving part 30 is engaged with the gear part 41. Also with this configuration, as in the configuration of the second embodiment, the attitude of the spindle 2 changes due to the meshing of the gear portions. Therefore, the relative distance and the relative angle between the motor 40 as the drive unit and the spindle 2 do not change. As a result, a slide mechanism and a rotation mechanism for correcting the deflection of the tool 1 are not required. Therefore, the structure of the processing apparatus is simplified.

Embodiment 4 FIG.
10 and 11 are a front view and a side view, respectively, of the processing apparatus and the rotary table according to the fourth embodiment of the present invention. The processing apparatus 100 according to the present embodiment includes a cantilevered tool 1 and a spindle 2 that rotates the tool 1 about its axis. The spindle 2 is built in the housing 50. A guided portion 50 a protrudes from the side surface of the housing 50. The guided portion 50 a is guided by the arcuate guide portion 21.

  Further, the housing 50 is housed in the moving unit 30. A motor 42 is attached to the inner surface of the moving unit 30. As the motor 42 reciprocates in the X-axis direction, the ball screw 43 reciprocates. By the reciprocating motion of the ball screw 43, the housing 50 and the spindle 2 are guided by the arcuate guide portion 21, and rotate around the Y axis about the point O. The point O is a point on the tool axis when the tool 1 is in contact with the entire processing surface 200a at the same height position as the uppermost end of the processing surface 200a of the workpiece 200.

  Further, in the processing method of the present embodiment, a rotary table 500 is used in addition to the above-described processing apparatus. A workpiece 200 is placed on the main surface of the rotary table 500. Further, the rotary table 500 rotates around the Z axis along the XY plane.

  Although not shown, the machining apparatus of the present embodiment is connected to the spindle 2 and the linear guide portion 7 that guides the movement of the spindle 2 along the tool axis, like the machining apparatus of the first embodiment. In order to move the spindle 2 in the tool axis direction, a ball screw 5 provided so as to extend in the tool axis direction and a motor 6 for driving the ball screw 5 are provided. Therefore, even with the machining apparatus of the present embodiment, the height position of the tip of the tool 1 and the height position of the lowermost end of the machining surface 200a are always matched by driving the ball screw 5 and the motor 6, thereby reducing the shortness. High-precision processing can be performed in time.

  According to the high-precision machining method of the present embodiment, the relative relationship between the tool 1 caused by machining resistance and the machining surface 200a of the workpiece 200 can be obtained without using the machining apparatus used in the first to third embodiments. The positional deviation can be corrected three-dimensionally. Further, since the rotary table 500 has a structure separated from the processing apparatus, the processing apparatus can be downsized.

  The control unit 18 controls the motor 42 and the rotary table 500. Further, in the present embodiment, the processing apparatus 100 and the rotary table 500 are described as separate apparatuses. However, since both are controlled by the control unit 18, an apparatus including both is one processing. An apparatus may be used.

  Also in the present embodiment, when the guided portion 50a moves while being guided by the arcuate guide portion 21, the relative distance and the relative angle between the housing 50 and the moving portion 30 change. The change in the relative distance is absorbed by the slide mechanism 47 provided between the casing 50 and the ball screw 43, and the change in the relative angle is a rotation mechanism provided between the casing 50 and the ball screw 43. 45 is absorbed. However, in FIG. 10 and FIG. 11, the specific structures of the rotation mechanism 45 and the slide mechanism 47 are not drawn.

  The features of the processing method using the processing apparatus and the rotary table of the above embodiment are summarized as follows.

  The machining apparatus according to the present embodiment includes a guided portion 50a whose relative position is fixed with respect to the spindle 2, and an arcuate guide portion that guides the guided portion 50a along a predetermined arc centered on the point O. 21, a motor 42 as a drive unit that moves the guided portion 50 a along the arcuate guide portion 21, and a control unit 18 that controls the motor 42.

  In the machining method of the present embodiment, a rotary table 500 on which a workpiece 200 to be machined by the tool 1 is mounted is used. Further, in the machining method of the present embodiment, a combination of a reciprocating motion along a predetermined arc of the tool 1 resulting from the driving of the machining device 100 and a rotating motion of the workpiece 200 resulting from the rotation of the rotary table 500, Deviation in the positional relationship between the machining surface 200a and the tool axis is corrected three-dimensionally.

  According to this method, by moving the tool 1 and the machining surface 200a of the workpiece 200 relatively, the same operation as the machining method by the machining apparatus according to the first to third embodiments occurs. That is, in the machining method of the present embodiment, when the relative operation of the machining apparatus 100 with respect to the rotary table 500 is seen, the predetermined point P of the spindle 2 is the same as the machining method by the machining apparatus of the first to third embodiments. Is moving along a spherical surface with a radius r centered on the point O. Therefore, also by the above-described processing method, high-precision processing can be performed in a short time, similarly to the processing method using the processing apparatus according to the first to third embodiments. Moreover, according to the processing method of this Embodiment, since the rotary table 500 and the processing apparatus 100 are isolate | separated, it becomes possible to reduce the processing apparatus 100 in size.

Embodiment 5. FIG.
FIG. 12 is a view for explaining a control unit for controlling the machining apparatus according to the fifth embodiment of the present invention. The control unit of the present embodiment is the same as the control unit 18 used in each of the first to fourth embodiments.

  The control unit of the present embodiment includes a movement amount measurement sensor 51 that measures an actual movement amount of the drive unit 54, and an arithmetic device 53 in which a database 52 that stores the movement amount to which the drive unit 54 is to be moved is incorporated. It has. The arithmetic device 53 compares the actual movement amount data of the drive unit 54 obtained from the movement amount measurement sensor 51 with the movement amount to be moved of the drive unit 54 stored in the database 52. As a result, the arithmetic device 53 calculates the amount of movement of the drive unit 54 for bringing the drive unit 54 into a predetermined posture, and transmits a command signal to the drive unit 54 to move the drive unit 54 by the amount of movement.

  According to the above-described control unit, the relative relationship between the machining surface 200a caused by the bending of the tool 1 and the tool axis of the portion facing the machining surface 200a can be changed only by changing the movement amount stored in the database 52. It is possible to change the amount of movement of the driving unit 54 for three-dimensionally correcting the positional relationship deviation. If the relationship between the movement amount of the tool 1 and the posture of the tool 1 is measured in advance, the movement amount of the drive unit 54 is determined based on the measurement result, and the movement amount is stored in the database 52. If so, the posture of the tool 1 with respect to the machining surface 200a can be easily corrected.

  The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

FIG. 3 is a top view showing the processing apparatus in the normal state according to the first embodiment. It is the II-II sectional view taken on the line of FIG. FIG. 3 is a top view showing a processing apparatus during correction control according to the first embodiment. It is the IV-IV sectional view taken on the line of FIG. It is a figure for demonstrating the relationship between the tool axis | shaft in a process point, and the process surface of a workpiece | work. It is a front view of the processing apparatus of Embodiment 2. It is a side view of the processing apparatus of Embodiment 2. It is a front view of the processing apparatus of Embodiment 3. FIG. 10 is a side view of the processing apparatus according to the third embodiment. It is a front view of the processing apparatus of Embodiment 4. It is a side view of the processing apparatus of Embodiment 4. FIG. 10 is a configuration diagram of a control unit according to a fifth embodiment.

Explanation of symbols

  1 Tool, 2 Spindle, 3 Convex spherical guide part, 4 Concave spherical guided part, 5 Ball screw, 6 Motor, 7 Linear guide, 8 Base plate, 9 X axis guide part, 10 X axis stage, 11 X axis motor 11a ball screw, 12 Y-axis guide part, 13 Y-axis stage, 14 Y-axis motor, 14a ball screw, 15 slide mechanism, 16 rotating mechanism, 17 shaft, 18 control unit, 21 arc-shaped guide part, 22 piezoelectric element, 23 gear part, 24 fixed part, 25 motor, 26 gear part, 30 moving part, 30a guided part, 31 arc guide part, 35 rotating mechanism, 40 motor, 41 gear part, 42 motor, 43 ball screw, 45 rotation Mechanism, 47 slide mechanism, 51 movement amount measuring sensor, 52 database, 53 arithmetic unit, 54 drive unit 100 processing unit, 200 workpiece, 200a processing surface, 300 stage, 400 2-axis stage 500 rotation table, C rotating axis, O processing point, P predetermined point, S tool axis, r, R radius.

Claims (9)

A cantilevered tool,
A spindle to which the tool is attached;
A guided portion whose relative position is fixed with respect to the spindle;
A guide portion for guiding the guided portion along a predetermined spherical surface;
A drive section for moving the guided section along the guide section;
A processing apparatus comprising: a control unit that controls the drive unit. The guide portion has a convex or concave spherical guide portion along the predetermined spherical surface,
The processing apparatus according to claim 1, wherein the guided portion has a concave or convex spherical guided portion corresponding to the convex or concave spherical guide portion.   The drive unit includes a first drive unit that reciprocates the spindle along a first axis, and a second drive unit that reciprocates the spindle along a second axis different from the first axis. The processing apparatus according to claim 2, comprising an axis stage. The guide portion includes a first arcuate guide portion extending along a first arc on the predetermined spherical surface, and a second arcuate guide portion extending along a second arc on a spherical surface having the same center as the predetermined spherical surface. And
The said guided part has a 1st guided part guided by the said 1st circular arc-shaped guide part, and a 2nd guided part guided by the said 2nd circular arc-shaped guide part. Processing equipment. The guide portion has an arcuate guide portion extending along an arc on the predetermined spherical surface,
The guided part has an arcuate guided part guided by the arcuate guide part,
The drive unit has a rotation mechanism having a rotation axis extending in a radial direction of the predetermined spherical surface,
The processing apparatus according to claim 1, wherein the rotation mechanism rotates the arcuate guide portion within the predetermined spherical surface. The drive unit includes a motor and a first gear unit to which rotation of the motor is transmitted,
The processing apparatus according to claim 1, wherein a relative position of the guide portion is fixed to a second gear portion that meshes with the first gear portion.   The processing device according to claim 1, wherein the drive unit moves the spindle along the guide unit by using a reciprocating motion caused by vibration of the piezoelectric element.   The processing apparatus according to claim 1, further comprising a moving mechanism that moves the spindle along a tool axis. A cantilevered tool, a spindle to which the tool is attached, a guided portion whose relative position is fixed to the spindle, and a guide portion for guiding the guided portion along a predetermined arc; A processing unit comprising: a drive unit that moves the guided unit along the guide unit; and a control unit that controls the drive unit;
A processing method using a rotary table on which a workpiece to be processed by the tool is mounted,
A portion facing the machining surface and the machining surface by a combination of a reciprocating motion along the predetermined arc of the tool caused by driving of the machining device and a rotation motion of the workpiece caused by rotation of the rotary table Machining method that corrects the deviation of the positional relationship between the tool axis.

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