JP2006263385A - Ultrasonic probe - Google Patents

Ultrasonic probe Download PDF

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JP2006263385A
JP2006263385A JP2005090078A JP2005090078A JP2006263385A JP 2006263385 A JP2006263385 A JP 2006263385A JP 2005090078 A JP2005090078 A JP 2005090078A JP 2005090078 A JP2005090078 A JP 2005090078A JP 2006263385 A JP2006263385 A JP 2006263385A
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piezoelectric vibrator
acoustic
acoustic matching
lens
ultrasonic waves
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JP4734005B2 (en
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Minoru Aoki
稔 青木
Hideki Kosaku
秀樹 小作
Hirohisa Makita
裕久 牧田
Koichi Shibamoto
弘一 芝本
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Toshiba Corp
Canon Medical Systems Corp
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Toshiba Medical Systems Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an ultrasonic probe having superior transmitting/receiving sensitivity of ultrasonic waves and being simply manufactured. <P>SOLUTION: This ultrasonic probe is provided with a piezoelectric vibrator transmitting/receiving the ultrasonic waves, and an acoustic matching lens 3 disposed on the side transmitting/receiving the ultrasonic waves of the piezoelectric vibrator; and the acoustic matching lens 3 is added with an additive so as to change a content rate as it is gradually separated from the piezoelectric vibrator. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、被検体と圧電振動子との間の音響インピーダンスを整合して、超音波の送受信感度を向上させた超音波プローブに関する。   The present invention relates to an ultrasonic probe in which acoustic impedance between a subject and a piezoelectric vibrator is matched to improve ultrasonic transmission / reception sensitivity.

被検体内を超音波で走査し、被検体内における音響インピーダンスの異なる界面からの反射波を受信することで、当該被検体の内部構造を画像化する超音波診断装置が知られている。この超音波診断装置は、装置本体と超音波プローブから構成され、超音波プローブを介して被検体に対して超音波を送受信している。   2. Description of the Related Art There is known an ultrasonic diagnostic apparatus that images an internal structure of a subject by scanning the inside of the subject with ultrasonic waves and receiving reflected waves from interfaces having different acoustic impedances in the subject. This ultrasonic diagnostic apparatus includes an apparatus main body and an ultrasonic probe, and transmits / receives ultrasonic waves to / from a subject via the ultrasonic probe.

超音波プローブは、超音波を送受信するための圧電振動子、圧電振動子からの超音波を収束するための音響レンズ、圧電振動子と音響レンズの間の音響インピーダンスを整合するための音響整合層、及び圧電振動子から操作者の手元側に伝播する超音波を減衰させる背面材を備えている。   The ultrasonic probe includes a piezoelectric vibrator for transmitting and receiving ultrasonic waves, an acoustic lens for converging ultrasonic waves from the piezoelectric vibrator, and an acoustic matching layer for matching acoustic impedance between the piezoelectric vibrator and the acoustic lens. And a back material for attenuating the ultrasonic wave propagating from the piezoelectric vibrator to the operator's hand.

ところで、音響整合層の役割である「音響インピーダンスの整合」とは、圧電振動子と音響レンズとの間の音響インピーダンスが急激に変化しないようにすることである。これは、超音波プローブ内に音響インピーダンスの大きく異なる界面が存在すると、その界面で超音波が反射してしまい、超音波の送受信感度を低下させるためである。   By the way, “acoustic impedance matching” which is a role of the acoustic matching layer is to prevent the acoustic impedance between the piezoelectric vibrator and the acoustic lens from changing abruptly. This is because if there is an interface with greatly different acoustic impedance in the ultrasonic probe, the ultrasonic wave is reflected at the interface and the ultrasonic transmission / reception sensitivity is lowered.

そのため、現在の超音波プローブでは、この送受信感度の低下を低減させるために、音響整合層を音響インピーダンスの異なる複数の整合層で構成し、これらの整合層を圧電振動子から音響レンズに亘って音響インピーダンスが滑らかに変化するように積層している。   Therefore, in the current ultrasonic probe, in order to reduce the decrease in transmission / reception sensitivity, the acoustic matching layer is composed of a plurality of matching layers having different acoustic impedances, and these matching layers are extended from the piezoelectric vibrator to the acoustic lens. The layers are laminated so that the acoustic impedance changes smoothly.

しかしながら、音響整合層を複数の整合層で構成しても、各々の整合層は一定の音響インピーダンスであるため、整合層と整合層の境界や、整合層と音響レンズの境界では必ず超音波の反射が発生し、超音波の送受信感度を低下させる原因となる。   However, even if the acoustic matching layer is composed of a plurality of matching layers, each matching layer has a constant acoustic impedance, so an ultrasonic wave is always generated at the boundary between the matching layer and the matching layer, or at the boundary between the matching layer and the acoustic lens. Reflection occurs, which causes a decrease in ultrasonic transmission / reception sensitivity.

ところで近年、超音波の送受信感度を向上することを目的として、音響レンズにシリカ粒子を添加した超音波プローブが開示された（例えば、特許文献１）。
特開２００２−９５０８１号公報 Incidentally, in recent years, an ultrasonic probe in which silica particles are added to an acoustic lens has been disclosed for the purpose of improving the transmission / reception sensitivity of ultrasonic waves (for example, Patent Document 1).
JP 2002-95081 A

しかしながら、特許文献１に記載された超音波プローブは、音響レンズ内における超音波の減衰抑制を目的としており、被検体と圧電振動子との間における音響インピーダンスの総合的な整合に関しては全く記載されていない。したがって、圧電振動子と音響レンズの間に音響整合層を配置する場合には、その音響整合層の音響インピーダンスにより、超音波の送受信感度が左右される。すなわち、音響整合層の音響インピーダンスが不適切であれば、たとえ音響レンズで超音波の減衰抑制がうまくいっても、最終的な送受信感度は低下することもある。   However, the ultrasonic probe described in Patent Document 1 is intended to suppress the attenuation of ultrasonic waves in the acoustic lens, and does not completely describe the overall matching of acoustic impedance between the subject and the piezoelectric vibrator. Not. Therefore, when the acoustic matching layer is disposed between the piezoelectric vibrator and the acoustic lens, the transmission / reception sensitivity of the ultrasonic wave is influenced by the acoustic impedance of the acoustic matching layer. That is, if the acoustic impedance of the acoustic matching layer is inappropriate, the final transmission / reception sensitivity may decrease even if the attenuation of ultrasonic waves is successfully suppressed by the acoustic lens.

本発明は前記事情に鑑みてなされたもので、その目的とするところは、超音波の送受信感度が良く、簡単に製造できる超音波プローブを提供することにある。   The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an ultrasonic probe that has good ultrasonic wave transmission / reception sensitivity and can be easily manufactured.

前記課題を解決し目的を達成するために、本発明の超音波プローブは次のように構成されている。   In order to solve the above problems and achieve the object, the ultrasonic probe of the present invention is configured as follows.

（１）超音波を送受信する圧電振動子と、前記圧電振動子の超音波を送受信する側に配置される音響整合レンズとを備え、前記音響整合レンズには、前記圧電振動子から離間するにつれて含有割合が変化するように添加物が添加されている。 (1) A piezoelectric vibrator that transmits and receives ultrasonic waves, and an acoustic matching lens that is disposed on the side of the piezoelectric vibrator that transmits and receives ultrasonic waves, and the acoustic matching lens moves away from the piezoelectric vibrator. Additives are added so that the content ratio changes.

（２）超音波を送受信する圧電振動子と、前記圧電振動子の超音波を送受信する側に配置される音響整合レンズとを備え、前記音響整合レンズには、前記圧電振動子から離間するにつれて音響インピーダンスが変化するように添加物が添加されている。 (2) A piezoelectric vibrator that transmits and receives ultrasonic waves, and an acoustic matching lens that is disposed on the side of the piezoelectric vibrator that transmits and receives ultrasonic waves, and the acoustic matching lens moves away from the piezoelectric vibrator. Additives are added to change the acoustic impedance.

（３）（１）に記載された超音波プローブにおいて、前記音響整合レンズは、前記圧電振動子に積層された、前記添加物の密度の相異なる複数のシートから構成されている。 (3) In the ultrasonic probe described in (1), the acoustic matching lens is composed of a plurality of sheets having different densities of the additive, which are stacked on the piezoelectric vibrator.

（４）（２）に記載された超音波プローブにおいて、前記音響整合レンズは、前記圧電振動子に積層された、音響インピーダンスの相異なる複数のシートから構成されている。 (4) In the ultrasonic probe described in (2), the acoustic matching lens is composed of a plurality of sheets having different acoustic impedances laminated on the piezoelectric vibrator.

本発明によれば、超音波の送受信感度を向上でき、更に製造工程を簡単化できる。   According to the present invention, the transmission / reception sensitivity of ultrasonic waves can be improved, and the manufacturing process can be simplified.

以下、図１〜図４を参照しながら本発明の一実施形態について説明する。
［超音波プローブの構成］
まず、図１を用いて超音波プローブの構成を説明する。図１は本発明の一実施形態に係る超音波プローブの概略図である。図１において、符号１はケース、符号２は圧電振動子、符号３は音響整合レンズ、符号４は音響整合層、符号５は背面材である。 Hereinafter, an embodiment of the present invention will be described with reference to FIGS.
[Configuration of ultrasonic probe]
First, the configuration of the ultrasonic probe will be described with reference to FIG. FIG. 1 is a schematic view of an ultrasonic probe according to an embodiment of the present invention. In FIG. 1, reference numeral 1 is a case, reference numeral 2 is a piezoelectric vibrator, reference numeral 3 is an acoustic matching lens, reference numeral 4 is an acoustic matching layer, and reference numeral 5 is a back material.

ケース１は、先端面に開口部を備え、その内側からは音響整合レンズ３が露出している。圧電振動子２は、図示しない装置本体からの駆動信号に基づき超音波を発生させ、また被検体からの反射波に基づき電気信号を発生させる。音響整合レンズ３は、圧電振動子２の超音波を送受信する側に配置され、圧電振動子２からの超音波を被検体側に伝播し、また被検体からの反射波を圧電振動子２側に伝播する。音響整合層４は、圧電振動子２と音響整合レンズ３の間に配置され、圧電振動子２と音響整合レンズ３との間の音響インピーダンスを整合させる。背面材５は、圧電振動子２の音響整合層４と反対側に配置され、圧電振動子２から伝播してくる不要な超音波を吸収する。   The case 1 has an opening on the tip surface, and the acoustic matching lens 3 is exposed from the inside thereof. The piezoelectric vibrator 2 generates an ultrasonic wave based on a drive signal from an apparatus body (not shown), and generates an electric signal based on a reflected wave from the subject. The acoustic matching lens 3 is disposed on the side of the piezoelectric vibrator 2 that transmits and receives ultrasonic waves, propagates the ultrasonic waves from the piezoelectric vibrator 2 to the subject side, and reflects reflected waves from the subject on the piezoelectric vibrator 2 side. Propagate to. The acoustic matching layer 4 is disposed between the piezoelectric vibrator 2 and the acoustic matching lens 3 and matches the acoustic impedance between the piezoelectric vibrator 2 and the acoustic matching lens 3. The backing material 5 is disposed on the opposite side of the piezoelectric vibrator 2 from the acoustic matching layer 4 and absorbs unnecessary ultrasonic waves propagating from the piezoelectric vibrator 2.

［音響整合レンズ３の構成］
次に、図２と図３を用いて音響整合レンズ３の構成を説明する。図２は同実施形態に係る音響整合レンズ３の構成図である。図２に示すように、この音響整合レンズ３は、圧電振動子２側から順に、第１の整合層３（１）、第２の整合層３（２）、…第ｎの整合層３（ｎ）を備えている。なお、層数は２以上とする。これら第１〜第ｎの整合層３（１）〜３（ｎ）は、いずれもシリコーンを基材としており、接合により一体化されている。なお、図２では層間の境界面が描かれているが、実際には目視できるものではない。 [Configuration of Acoustic Matching Lens 3]
Next, the configuration of the acoustic matching lens 3 will be described with reference to FIGS. 2 and 3. FIG. 2 is a configuration diagram of the acoustic matching lens 3 according to the embodiment. As shown in FIG. 2, the acoustic matching lens 3 includes a first matching layer 3 (1), a second matching layer 3 (2),..., An nth matching layer 3 (in order from the piezoelectric vibrator 2 side. n). The number of layers is 2 or more. These first to nth matching layers 3 (1) to 3 (n) are all made of silicone as a base material and integrated by bonding. In addition, although the interface between layers is drawn in FIG. 2, it cannot actually be visually observed.

第１〜第ｎ−１の整合層３（１）〜（ｎ−１）は薄いシート状をしており、その内部にはＺｎＯ粒子Ｐ（添加物）が添加されている。一方、第ｎの整合層３（ｎ）は、圧電振動子２の反対側に超音波を収束するための凸曲面を備えており、その内部にはＺｎＯ粒子Ｐが添加されている。なお、ＺｎＯ粒子Ｐは、粒径が１μｍ、密度が５．６ｇ／ｃｍ３である。ここで重要なのは、圧電振動子２から遠い整合層ほどＺｎＯ粒子Ｐの添加量を低くする点である。以下、その理由を説明する。   The first to (n-1) -th matching layers 3 (1) to (n-1) have a thin sheet shape, and ZnO particles P (additives) are added therein. On the other hand, the n-th matching layer 3 (n) has a convex curved surface for converging ultrasonic waves on the opposite side of the piezoelectric vibrator 2, and ZnO particles P are added therein. The ZnO particles P have a particle size of 1 μm and a density of 5.6 g / cm 3. What is important here is that the matching layer farther from the piezoelectric vibrator 2 lowers the amount of ZnO particles P added. The reason will be described below.

図３は同実施形態に係るＺｎＯ粒子Ｐの添加量とシリコーンゴムの音響インピーダンスとの関係を示すグラフである。図３を見ると、ＺｎＯ粒子Ｐの添加量が増すにつれて、シリコーンゴムの音響インピーダンスが線形的に上昇していることがわかる。   FIG. 3 is a graph showing the relationship between the added amount of ZnO particles P and the acoustic impedance of the silicone rubber according to the embodiment. FIG. 3 shows that the acoustic impedance of the silicone rubber increases linearly as the addition amount of the ZnO particles P increases.

したがって、前述のように圧電振動子２から遠い整合層ほどＺｎＯ粒子Ｐの添加量を低くすることで、第１〜第ｎの整合層３（１）〜３（ｎ）の音響インピーダンスを、圧電振動子２から離間するにつれて徐々に低下させることができる。   Therefore, the acoustic impedance of the first to nth matching layers 3 (1) to 3 (n) is reduced by reducing the amount of ZnO particles P added to the matching layer farther from the piezoelectric vibrator 2 as described above. It can be gradually lowered as the distance from the vibrator 2 increases.

また、各整合層を薄くして整合層の数ｎを大きくすれば、音響整合レンズ３の音響インピーダンスを連続的に変化させることができるから、音響整合レンズ３内における超音波の反射を抑制することができる。   Further, if each matching layer is made thin and the number n of matching layers is increased, the acoustic impedance of the acoustic matching lens 3 can be continuously changed, and therefore reflection of ultrasonic waves in the acoustic matching lens 3 is suppressed. be able to.

更に、第１の整合層３（１）の音響インピーダンスを音響整合層２に近い値にし、第ｎの整合層３（ｎ）の音響インピーダンスを被検体に近い値にすれば、音響整合レンズ３と被検体との界面や、音響整合層２と音響整合レンズ３との界面における超音波の反射を抑制することができる。   Furthermore, if the acoustic impedance of the first matching layer 3 (1) is set to a value close to the acoustic matching layer 2 and the acoustic impedance of the nth matching layer 3 (n) is set to a value close to the subject, the acoustic matching lens 3 And reflection of ultrasonic waves at the interface between the object and the object and between the acoustic matching layer 2 and the acoustic matching lens 3 can be suppressed.

［音響整合レンズ３の製造方法］
図４を用いて音響整合レンズ３の製造方法を説明する。図４は同実施形態に係る音響整合レンズ３の製造方法を示す模式図である。まず、所定量の添加物を添加した第１〜第ｎのシリコーンゴムシート３ａ（１）〜３ａ（ｎ）を準備する。なお、第ｎのシリコーンゴムシート３ａ（ｎ）は、第ｎの整合層３（ｎ）に対応するものであり、シート状ではないが、ここではシリコーンゴムシートと呼ぶことにする。また、第１〜第ｎのシリコーンゴムシート３ａ（１）〜３ａ（ｎ）に対するＺｎＯ粒子Ｐの添加量は、それぞれ第１〜第２の整合層３（１）〜３（ｎ）に対応している。 [Manufacturing Method of Acoustic Matching Lens 3]
A method of manufacturing the acoustic matching lens 3 will be described with reference to FIG. FIG. 4 is a schematic view showing a method for manufacturing the acoustic matching lens 3 according to the embodiment. First, first to nth silicone rubber sheets 3a (1) to 3a (n) to which a predetermined amount of additives are added are prepared. The n-th silicone rubber sheet 3a (n) corresponds to the n-th matching layer 3 (n) and is not a sheet, but is referred to herein as a silicone rubber sheet. Further, the added amount of ZnO particles P to the first to nth silicone rubber sheets 3a (1) to 3a (n) corresponds to the first to second matching layers 3 (1) to 3 (n), respectively. ing.

次に、図４に示すように、金型Ｋ内に第１〜第ｎのシリコーンゴムシート３ａ（１）〜３ａ（ｎ）を、第ｎのシリコーンゴムシート３ａ（ｎ）が金型Ｋの湾曲面側となるように順に積層し、所定の温度、圧力をかけて成型する。これにより、第１〜第ｎのシリコーンゴムシート３（１）〜３ａ（ｎ）が一体化され、第１〜第ｎの整合層３（１）〜３（ｎ）からなる前記構成の音響整合レンズ３が完成する。   Next, as shown in FIG. 4, the first to nth silicone rubber sheets 3a (1) to 3a (n) are placed in the mold K, and the nth silicone rubber sheet 3a (n) is the mold K. The layers are sequentially laminated so as to be on the curved surface side, and are molded by applying a predetermined temperature and pressure. As a result, the first to nth silicone rubber sheets 3 (1) to 3a (n) are integrated, and the acoustic matching having the above-described configuration comprising the first to nth matching layers 3 (1) to 3 (n). The lens 3 is completed.

［本実施形態による作用］
本実施形態によれば、シリコーンを基材とした音響整合レンズ３に、前記圧電振動子２から離間するにつれて密度が高まるようにＺｎＯ粒子Ｐを添加している。これにより、音響整合レンズ３の音響インピーダンスが、圧電振動子２から離間するにつれて徐々に低下するから、音響整合レンズ３内における超音波の反射を大幅に抑制することができる。その結果、超音波の送受信感度が向上し、従来よりも鮮明な超音波画像を取得することができる。また、ＺｎＯ粒子Ｐの添加量の異なる第１〜第ｎのシリコーンゴムシート３ａ（１）〜３ａ（ｎ）を用意しておき、これらを金型で一体化するだけで済むから、製造工程が簡単であり、コストの削減を実現することができる。更に、シリコーンゴムの音響インピーダンスは、ＺｎＯ粒子Ｐの添加量に対して線形変化するため、ＺｎＯ粒子Ｐの添加量の調整が極めて簡単である。 [Operation according to this embodiment]
According to this embodiment, the ZnO particles P are added to the acoustic matching lens 3 using a silicone as a base material so that the density increases as the distance from the piezoelectric vibrator 2 increases. Thereby, since the acoustic impedance of the acoustic matching lens 3 gradually decreases as the distance from the piezoelectric vibrator 2 increases, reflection of ultrasonic waves in the acoustic matching lens 3 can be significantly suppressed. As a result, the transmission / reception sensitivity of ultrasonic waves is improved, and a clearer ultrasonic image can be obtained than before. In addition, since the first to nth silicone rubber sheets 3a (1) to 3a (n) having different addition amounts of ZnO particles P are prepared and integrated with a mold, the manufacturing process is performed. It is simple and can realize cost reduction. Furthermore, since the acoustic impedance of the silicone rubber changes linearly with the addition amount of the ZnO particles P, the adjustment of the addition amount of the ZnO particles P is very simple.

また、従来の超音波プローブでは、音響整合層の数だけの接合工程が存在していた。すなわち、音響整合層が３層である場合、３回の接合工程が必要であった。しかしながら、本実施形態では、従来の音響レンズに相当する部品（音響整合レンズ３）に音響整合の機能を持たせたため、従来と比較して音響整合層の数を１つ減らすことができる。その結果、製造工程が簡略化され、このことによってもコストの削減を実現することができる。   Further, in the conventional ultrasonic probe, there are as many bonding steps as the number of acoustic matching layers. That is, when there are three acoustic matching layers, three bonding steps are required. However, in this embodiment, since the component (acoustic matching lens 3) corresponding to the conventional acoustic lens has an acoustic matching function, the number of acoustic matching layers can be reduced by one as compared with the conventional one. As a result, the manufacturing process is simplified, and this can also realize cost reduction.

なお、本実施形態では、シリコーンゴムを基材としているが、これに限定されることはなく、例えばゴムや接着剤等であっても良い。また、添加物としてＺｎＯ粒子Ｐを用いているが、これに限定されるものではなく、例えばＡｕ粒子やＰｔ粒子等であってもよい。   In the present embodiment, silicone rubber is used as the base material, but the present invention is not limited to this, and may be, for example, rubber or adhesive. Further, although ZnO particles P are used as an additive, the present invention is not limited to this, and for example, Au particles or Pt particles may be used.

本発明は、前記実施形態そのままに限定されるものではなく、実施段階ではその要旨を逸脱しない範囲で構成要素を変形して具体化できる。また、前記実施形態に開示されている複数の構成要素の適宜な組み合せにより種々の発明を形成できる。例えば、実施形態に示される全構成要素から幾つかの構成要素を削除してもよい。   The present invention is not limited to the above-described embodiments as they are, and can be embodied by modifying the constituent elements without departing from the scope of the invention in the implementation stage. Moreover, various inventions can be formed by appropriately combining a plurality of constituent elements disclosed in the embodiment. For example, some components may be deleted from all the components shown in the embodiment.

本発明の一実施形態に係る超音波プローブ。The ultrasonic probe which concerns on one Embodiment of this invention. 同実施形態に係る音響整合レンズの構成図。The block diagram of the acoustic matching lens which concerns on the same embodiment. 同実施形態に係るＺｎＯ粒子の添加量とシリコーンゴムの音響インピーダンスとの関係を示すグラフ。The graph which shows the relationship between the addition amount of the ZnO particle | grains which concern on the same embodiment, and the acoustic impedance of silicone rubber. 同実施形態に係る音響整合レンズの製造方法を示す模式図。The schematic diagram which shows the manufacturing method of the acoustic matching lens which concerns on the same embodiment.

符号の説明Explanation of symbols

２…圧電振動子、３…音響整合レンズ、Ｐ…ＺｎＯ粒子（添加物）。   2 ... piezoelectric vibrator, 3 ... acoustic matching lens, P ... ZnO particles (additive).

Claims (4)

超音波を送受信する圧電振動子と、
前記圧電振動子の超音波を送受信する側に配置される音響整合レンズと、
を備え、
前記音響整合レンズには、前記圧電振動子から離間するにつれて含有割合が変化するように添加物が添加されていることを特徴とする超音波プローブ。 A piezoelectric vibrator for transmitting and receiving ultrasonic waves;
An acoustic matching lens disposed on the side of transmitting and receiving ultrasonic waves of the piezoelectric vibrator;
With
The ultrasonic probe according to claim 1, wherein an additive is added to the acoustic matching lens such that the content ratio changes as the distance from the piezoelectric vibrator increases. 超音波を送受信する圧電振動子と、
前記圧電振動子の超音波を送受信する側に配置される音響整合レンズと、
を備え、
前記音響整合レンズには、前記圧電振動子から離間するにつれて音響インピーダンスが変化するように添加物が添加されていることを特徴とする超音波プローブ。 A piezoelectric vibrator for transmitting and receiving ultrasonic waves;
An acoustic matching lens disposed on the side of transmitting and receiving ultrasonic waves of the piezoelectric vibrator;
With
The ultrasonic probe according to claim 1, wherein an additive is added to the acoustic matching lens such that an acoustic impedance changes as the acoustic matching lens moves away from the piezoelectric vibrator. 前記音響整合レンズは、前記圧電振動子に積層された、前記添加物の密度の相異なる複数のシートから構成されていることを特徴とする請求項１記載の超音波プローブ。   The ultrasonic probe according to claim 1, wherein the acoustic matching lens includes a plurality of sheets stacked on the piezoelectric vibrator and having different densities of the additive. 前記音響整合レンズは、前記圧電振動子に積層された、音響インピーダンスの相異なる複数のシートから構成されていることを特徴とする請求項２記載の超音波プローブ。   The ultrasonic probe according to claim 2, wherein the acoustic matching lens includes a plurality of sheets stacked on the piezoelectric vibrator and having different acoustic impedances.
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015118028A (en) * 2013-12-19 2015-06-25 セイコーエプソン株式会社 Ultrasonic sensor element, manufacturing method therefor, and ultrasonic sensor
KR102549497B1 (en) * 2022-12-21 2023-06-29 주식회사 에프씨유 Method for manufacturing an ultrasonic transducer in which an acoustic lens is injection molded
KR102549491B1 (en) * 2022-12-21 2023-06-29 주식회사 에프씨유 A method for manufacturing an ultrasonic transducer in which a sound absorbing material is injection molded

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JPH07136164A (en) * 1993-11-12 1995-05-30 Olympus Optical Co Ltd Ultrasonic probe
JP2003169397A (en) * 2001-09-19 2003-06-13 Matsushita Electric Ind Co Ltd Ultrasonic probe and its producing method

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JPH07136164A (en) * 1993-11-12 1995-05-30 Olympus Optical Co Ltd Ultrasonic probe
JP2003169397A (en) * 2001-09-19 2003-06-13 Matsushita Electric Ind Co Ltd Ultrasonic probe and its producing method

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Publication number Priority date Publication date Assignee Title
JP2015118028A (en) * 2013-12-19 2015-06-25 セイコーエプソン株式会社 Ultrasonic sensor element, manufacturing method therefor, and ultrasonic sensor
KR102549497B1 (en) * 2022-12-21 2023-06-29 주식회사 에프씨유 Method for manufacturing an ultrasonic transducer in which an acoustic lens is injection molded
KR102549491B1 (en) * 2022-12-21 2023-06-29 주식회사 에프씨유 A method for manufacturing an ultrasonic transducer in which a sound absorbing material is injection molded

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