JP2006259051A - Manufacturing equipment of electrooptical apparatus, manufacturing method of electrooptical apparatus and electrooptical apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing equipment of an electrooptical apparatus, a manufacturing method of the electrooptical apparatus and the electrooptical apparatus, in which a separating object is effectively and accurately separated from an object to be separated, without damaging a shape of a cut section of the separating object. <P>SOLUTION: A separating device 1 for separating the object 200 to be separated along a groove after forming approximately straight line shape grooves 100x, 100y, 171x and 171y on the object 200 to be separated, comprises; an elongation and contraction sheet 5 with adhesive in which both ends are fixed and the object 200 to be separated is stuck to a region 5r between the fixed ends; and an elevating member 2 for freely contacting, by elevating, to a rear face 5u of the face which is in the region 5r between the fixed ends of the elongation and contraction sheet and to which the object 200 to be separated is stuck. The elevating member 2 makes the elongation and contraction sheet 5 expand by further elevation after contacting the elongation and contraction sheet 5. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an electro-optical device manufacturing apparatus, an electro-optical device manufacturing method, and an electro-optical device, and in particular, after a substantially linear groove is formed on an object to be divided, the object to be divided is divided along the groove. The present invention relates to an electro-optical device manufacturing apparatus, an electro-optical device manufacturing method, and an electro-optical device.

  As is well known, an electro-optical device, for example, a liquid crystal display device is configured by enclosing liquid crystal between two substrates made of a glass substrate or the like, and one substrate is provided with, for example, a thin film transistor (Thin Film Transistor, hereinafter). Switching elements such as TFTs) and pixel electrodes are arranged in a matrix, a common electrode is arranged on the other substrate, and the optical characteristics of the liquid crystal layer sealed between the two substrates are changed according to the image signal. Thus, image display is possible.

  Further, the TFT substrate on which the TFT is disposed and the counter substrate disposed to face the TFT substrate are manufactured separately. The TFT substrate and the counter substrate are configured by laminating, for example, a semiconductor thin film, an insulating thin film, or a conductive thin film having a predetermined pattern on glass. Each layer is formed by repeating a film forming process and a photolithography process for various films.

  The TFT substrate and the counter substrate thus formed are bonded with high accuracy in the panel assembly process. In this panel assembling process, first, an alignment film for aligning liquid crystal molecules along the substrate surface is formed on the surfaces of the TFT substrate and the counter substrate manufactured in each substrate manufacturing process, which are in contact with the liquid crystal layer. . This alignment film is formed, for example, by printing polyimide with a thickness of about several tens of nanometers.

  Thereafter, baking is performed, and a rubbing process is performed to determine the alignment of liquid crystal molecules when no voltage is applied. Next, in the case of a liquid crystal dropping method, a plurality of sealing materials that are formed on a large plate, for example, a peripheral edge on a TFT substrate, are each formed with a specified height drawing or printing in a frame shape on the periphery of the TFT substrate. A prescribed amount of liquid crystal is dropped onto a liquid crystal filling region on the substrate inside the material.

  After that, when only the TFT substrate is formed with a large plate, a sealing material is provided so that the counter substrate in the form of a plurality of chips is placed opposite to the TFT substrate and the counter substrate on the large plate having a plurality of TFT substrates. Are bonded together under vacuum, and cured by pressure bonding while performing alignment.

  Then, after scribing or dicing the large plate on which a plurality of chip-like counter substrates are bonded and a plurality of TFT substrates are configured, the TFT substrate and the counter substrate are arranged so as to be opposed to each other from the large plate. Divide every pair. Furthermore, a plurality of liquid crystal display devices are manufactured by bonding a dustproof cover glass to each of the divided TFT substrate and counter substrate via an adhesive.

  Also, today, for the purpose of shortening the manufacturing process of the liquid crystal display device, a plurality of TFT substrates, each having a plurality of chip-like counter substrates arranged so as to face each other, are covered with a plurality of TFT substrates. After the large cover glass is pasted together with an adhesive, the TFT substrate with the cover glass adhered is separated from each large plate for each pair of the TFT substrate and the counter substrate that are arranged to face each other. Has also been done.

  Here, when the TFT substrate to which the cover glass, which is a part to be separated, is bonded from each large plate, which is a part to be divided, is divided into a plurality of TFT substrates arranged opposite to each other and the pair of the counter substrates, the TFTs are divided. If a defect such as a chip occurs in the divided cross section of the substrate and the cover glass, a product defect occurs in the liquid crystal display device. Therefore, a stable separation accuracy is required when dividing. For this reason, in the cutting process that requires cutting accuracy, a break method using a scribe that has higher cutting accuracy than dicing is often used.

  In addition, from each large plate, when dividing the TFT substrate to which the cover glass is attached into a plurality of opposingly arranged TFT substrates and opposing substrate groups, if divided into one at a time, after dividing, In some cases, the cross sections of the plurality of cover glasses and the TFT substrate come into contact with each other, and chipping or the like may occur on the end surfaces of the TFT substrate and the cover glass.

  Therefore, first, from each large plate, the cover glass to which the TFT substrate is attached is divided into strips for each set of the TFT substrate and the counter substrate that are arranged to face each other, and then the strip glass is used. Therefore, the TFT substrate on which the cover glass is attached is divided one by one for each set of the TFT substrate and the counter substrate.

  Here, since the adhesive used when the cover glass is bonded to the TFT substrate has a predetermined hardness after bonding, when the scribe break is used for the division, the adhesive is cured only by the scribe break. There was a problem that the adhesive could not be divided.

  In view of such a problem, generally, after scribing, a technique is used in which the cured adhesive is cut by an operator's hand.

Further, in Patent Document 1, a UV curable sealant is used as an adhesive for laminating a cover glass, and the UV curable sealant is cut in an uncured state by shielding UV light. Proposals have been made for techniques that facilitate the division of the above.
JP 2003-295202 A

  However, in the technique disclosed in Patent Document 1, since the UV curable sealant is divided without being cured, the UV curable sealant may remain on the end face of the substrate after manufacture.

  In addition, when the operator's hand divides the TFT substrate on which the cover glass is attached from each large plate into a strip shape for each set of the TFT substrate and the counter substrate arranged to face each other, immediately after dividing into the strip shape In some cases, a TFT substrate with a cover glass attached to each pair of TFT substrate and counter substrate may unexpectedly fall from a strip shape, and the TFT substrate and cover glass may be separated by the dropping. Since the cross-section is chipped, measures for manufacturing have been demanded.

  The present invention has been made by paying attention to the above circumstances, and its purpose is to provide an electric device that can efficiently divide a material to be divided from the material to be divided without damaging the shape of the divided surface of the material to be divided. An optical device manufacturing apparatus, an electro-optical device manufacturing method, and an electro-optical device are provided.

  In order to achieve the above object, an electro-optical device manufacturing apparatus according to the present invention forms a substantially linear groove on an object to be divided, and then divides the object to be cut along the groove. The manufacturing apparatus according to claim 1, wherein both ends are fixed, and the material to be divided is attached to a region between the fixed portions. An elevating member that can be brought into contact with the back surface of the surface to which the object to be divided is attached by raising and lowering, and the elevating member is further provided after contact with the stretchable sheet The stretchable sheet is stretched by either rising or lowering.

  According to the electro-optical device manufacturing apparatus of the present invention, after the stretchable sheet to which the material to be divided is attached is stretched by the elevating member, the material to be divided is divided, and then the divided material is divided into the elastic sheet. It will be in the state which stuck. Therefore, it is possible to prevent unintentional dropping of the divided material after the division, and thus it is possible to prevent cracking of the divided surface of the divided material, so that the divided material can be accurately separated from the material to be divided without impairing the shape of the divided surface. can do. In addition, when a plurality of divided objects are formed on the object to be divided, a plurality of divided objects can be divided from the object to be divided by either raising or lowering the lifting member once with respect to the stretchable sheet. , It has the effect that it can be divided efficiently.

  The elevating member is a region between the fixed sheets of the stretchable sheet, and is capable of abutting against a back surface at a position where the material to be divided is attached.

  According to the electro-optical device manufacturing apparatus of the present invention, there is an effect that the divided object can be accurately divided from the object to be divided without impairing the shape of the divided section.

  Furthermore, the part to be divided includes a first substrate in which a plurality of element substrates having mounting terminal portions are configured, a second substrate in which a plurality of counter substrates facing the element substrate are configured, and the first substrate It is at least one of a cover glass bonded to at least one of the substrate and the second substrate.

  According to the electro-optical device manufacturing apparatus of the present invention, the divided element substrate, counter substrate, and cover glass remain adhered to the stretchable sheet after being divided from the first substrate, the second substrate, and the cover glass, respectively. It becomes a state. Therefore, since the unexpected fall after division | segmentation can be prevented, since each element substrate after a division | segmentation, a counter substrate, and the crack of the division | segmentation cross section of a cover glass can be prevented, a 1st board | substrate, a 2nd board | substrate, cover glass Therefore, the element substrate, the counter substrate, and the cover glass can be accurately separated without impairing the shape of the divided section. In addition, the plurality of element substrates, the counter substrate, and the cover glass can be respectively separated from the first substrate, the second substrate, and the cover glass by one of the raising and lowering of the lifting member with respect to the elastic sheet. Therefore, it has the effect that each can be divided efficiently.

  Further, the object to be divided is characterized in that the cover glass is adhered to the first substrate through an adhesive having breakability.

  According to the electro-optical device manufacturing apparatus of the present invention, when the element substrate to which the cover glass is attached is divided from the first substrate to which the large cover glass is attached, the divided cover glass is attached. The attached element substrate remains attached to the elastic sheet. Therefore, since the unexpected fall after dividing can be prevented, it is possible to prevent cracking of the divided section of the element substrate and the cover glass, etc., so that the element substrate to which the cover glass is attached from each large plate, It is possible to accurately divide without damaging the shape of the divided section. Moreover, it has the effect that the adhesive which bonds a cover glass and a 1st board | substrate can also be parted reliably by using expansion | extension of an elastic sheet. Furthermore, since the element substrate to which the cover glass is stuck can be divided into a plurality of pieces from each large plate by either raising or lowering the elevating member once with respect to the elastic sheet, it can be divided efficiently. It has such an effect.

  An electro-optical device manufacturing method according to the present invention is a method for manufacturing an electro-optical device in which a substantially linear groove is formed on a part to be cut, and then the part is cut along the groove. Forming a substantially linear groove on the material to be divided, attaching the material on which the groove is formed to an adhesive elastic sheet, and stretching the elastic sheet. Thus, the method includes a step of dividing the material to be divided along the groove and a step of separating the stretchable sheet from the divided material.

  According to the method of manufacturing the electro-optical device of the present invention, the part to be divided is divided by stretching the stretchable sheet to which the part to be cut is stuck. It will be in the state still affixed on the sheet | seat. Therefore, it is possible to prevent unexpected fall after splitting, so that it is possible to prevent cracking of the cross-section of the part after splitting, so that the split part can be accurately cut from the part to be cut without damaging the shape of the cross-section. can do. In addition, when a plurality of divided objects are formed on the object to be divided, a plurality of divided objects can be divided from the object to be divided by one extension process on the stretchable sheet. It has the effect that a thing can be divided.

  Further, the step of attaching the material to be divided to the stretchable sheet is characterized by sticking to a region between the fixed portions of the stretchable sheet to which both ends are fixed.

  According to the method for manufacturing an electro-optical device of the present invention, there is an effect that the divided object can be accurately divided from the object to be divided without impairing the shape of the divided section.

  Further, the step of extending the elastic sheet is an area between the fixed sheets of the elastic sheet, and after bringing the lifting member into contact with the back surface of the surface to which the material to be divided is attached, It is characterized by performing either by further raising or lowering of the elevating member.

  According to the method for manufacturing an electro-optical device of the present invention, the part to be divided is divided by the stretchable sheet to which the part to be divided is attached being stretched by the elevating member. A thing will be in the state stuck on the elastic sheet. Therefore, it is possible to prevent unintentional falling after splitting, so that it is possible to prevent cracking of the cross section of the split material after splitting, so that the split material can be accurately split without damaging the shape of the split cross section. can do. Moreover, since a plurality of divided objects can be divided from the object to be divided by either raising or lowering the lifting member once with respect to the stretchable sheet, the object can be efficiently divided from the object to be separated. It has such an effect.

  The object to be divided includes a first substrate having a plurality of element substrates each having a mounting terminal portion, a second substrate having a plurality of counter substrates facing the element substrate, and the first substrate. It is at least one of a cover glass bonded to at least one of the substrate and the second substrate.

  According to the method for manufacturing an electro-optical device of the present invention, after the first substrate, the second substrate, and the cover glass are divided, the divided element substrate, counter substrate, and cover glass remain adhered to the stretchable sheet. It becomes a state. Therefore, since the unexpected fall after division | segmentation can be prevented, the element substrate after a division | segmentation, a counter substrate, the crack of the division | segmentation cross section of a cover glass, etc. can be prevented, Therefore A 1st board | substrate, a 2nd board | substrate, a cover glass Therefore, the element substrate, the counter substrate, and the cover glass can be accurately separated without impairing the shape of the divided section. In addition, since the element substrate, the counter substrate, and the cover glass can be divided into a plurality of parts from the first substrate, the second substrate, and the cover glass by a single extension step with respect to the stretchable sheet, it can be efficiently divided. It has such an effect.

  Further, the object to be divided is characterized in that the cover glass is attached to the first substrate through an adhesive having breakability.

  According to the electro-optical device manufacturing apparatus of the present invention, when the element substrate to which the cover glass is attached is divided from the first substrate to which the large cover glass is attached, the divided cover glass is attached. The attached element substrate remains attached to the elastic sheet. Therefore, since it is possible to prevent an unexpected fall after the division, it is possible to prevent a crack or the like of the divided section of the element substrate and the cover glass, so that the element substrate on which the cover glass is attached from each large plate It is possible to divide with high accuracy without impairing the shape of the divided section. Moreover, it has the effect that the adhesive which bonds a cover glass and a 1st board | substrate can also be parted reliably by using expansion | extension of an elastic sheet. Furthermore, since the element substrate to which the cover glass is stuck can be divided into a plurality of pieces from each large plate by either raising or lowering the elevating member once with respect to the elastic sheet, it can be divided efficiently. It has such an effect.

  The electro-optical device according to the present invention is manufactured by using the manufacturing method according to claims 5 to 9.

  According to the electro-optical device of the present invention, since it is configured by a precision-formed segment that has no chipping or the like in the divided cross section, the stability of the electro-optical device is improved and the yield is improved. This has the effect that it can be achieved.

  Embodiments of the present invention will be described below with reference to the drawings. In this embodiment, the electro-optical device will be described using a liquid crystal display device as an example. Therefore, of the pair of substrates used in the liquid crystal display device, one substrate is a TFT substrate which is an element substrate, and the other substrate is a substrate facing the TFT substrate (hereinafter referred to as a counter substrate). I will explain. Further, a liquid crystal display device manufactured by a liquid crystal dropping method will be described as an example.

First, a configuration of a liquid crystal display device manufactured by a liquid crystal display device manufacturing apparatus according to an embodiment of the present invention will be described with reference to FIGS.
FIG. 1 is a plan view of a TFT substrate of a liquid crystal display device as viewed from the counter substrate side together with each component formed thereon, and FIG. 2 is an assembly process for sealing the TFT substrate and the counter substrate together to enclose liquid crystal It is sectional drawing which cut | disconnected the liquid crystal display device after completion | finish, along the II-II line | wire in FIG.

  As shown in the figure, the liquid crystal display device 500 is configured by enclosing a liquid crystal 50 between a TFT substrate 10 and a counter substrate 20 provided facing the TFT substrate 10. Pixel electrodes 9a and the like constituting pixels are arranged in a matrix on the TFT substrate 10.

  A light shielding film (BM) 42 is provided on the counter substrate 20 as a frame for partitioning the display area. The light shielding film 42 is made of, for example, a light shielding material.

  A sealing material 41 that encloses liquid crystal is formed between the TFT substrate 10 and the counter substrate 20 in a region outside the light shielding film 42. The sealing material 41 is disposed, for example, so as to substantially match the contour shape of the counter substrate 20, and fixes the TFT substrate 10 and the counter substrate 20 to each other.

  One end of the data line driving circuit 61 and an FPC (none of which is shown) for connecting the assembled liquid crystal display device 500 and an electronic device such as a projector is connected to the region outside the sealing material 41 of the TFT substrate 10. A mounting terminal portion 62 is provided along one side of the TFT substrate 10, and a scanning line driving circuit 63 is provided along two sides adjacent to the one side.

  A dust-proof cover glass 71 is attached to the back surface of the TFT substrate 10 facing the counter substrate 20 via a breakable adhesive such as a silicone adhesive, and the TFT of the counter substrate 20 A dust-proof cover glass 72 is also attached to the back surface of the surface facing the substrate 10 via a breakable adhesive such as a silicone adhesive. The adhesive is not limited to a silicone adhesive.

  Next, a manufacturing method of the liquid crystal display device 500 configured as described above will be described with reference to FIGS. FIG. 3 is a process diagram schematically showing a method of manufacturing the liquid crystal display device of FIG. 1, and FIG. 4 is a plan view showing that a scribe line for cutting is formed on a large plate on which a plurality of TFT substrates are formed. is there. Hereinafter, in the process diagram of FIG. 3, the description of the pixel electrode 9a, the sealing material 41, the light shielding film 42, the liquid crystal 50, the data line driving circuit 61, and the mounting terminal portion 62 shown in FIG. 2 is omitted. Show.

  As shown in FIG. 3A, first, for the large plate 100 configured with a plurality of, for example, 116 TFT substrates 10, the same number of chip-like counter substrates 20 as the TFT substrates 10 are provided on the TFT substrate 10, respectively. It sticks together through the sealing material 41 (refer FIG. 2) so that it may oppose.

  Note that components such as the pixel electrode 9a and the mounting terminal portion 62 (see FIG. 2) are formed on the surface of the TFT substrate 10 facing the counter substrate 20 by a known film forming process. Components such as pixel electrodes (not shown) are formed on the entire surface of the substrate 20 facing the TFT substrate 10 by a known film forming process. Further, as shown in FIG. 4, the large plate 100 has, for example, a circular shape, and is made of transmissive or reflective quartz, glass, or the like that can be divided.

  Next, as shown in FIG. 4, the surface of the large plate 100 opposite to the surface on which the counter substrate 20 is bonded (hereinafter referred to as the back surface), and in the x direction in FIG. A plurality of scribe lines 100x and 100y, which are substantially linear grooves in the y direction, are formed in succession, and then cracks penetrate the large plate 100 along the scribe lines 100x and 100y (only 100x 'is shown in the figure). Is generated by known means.

  Next, as shown in FIG. 3B, the cover glass 171 of the large plate is bonded to the back surface of the large plate 100 so as to cover all the TFT substrates 10 formed on the large plate 100. It is attached via an agent, for example a silicone adhesive.

  Next, as shown in FIG. 3C, a substantially straight line is formed at a position overlapping the scribe lines 100 x and 100 y formed on the large plate 100 with respect to the large cover glass 171 adhered to the back surface of the large plate 100. After forming a plurality of scribe lines 171x and 171y, which are groove-like, sequentially, a crack that penetrates the large plate 100 along the scribe lines 171x and 171y (only 171x 'is shown in the figure) is a known means. Is generated.

  Next, as shown in FIG. 3 (d), a plurality of TFT substrates 10 and counter substrates 20 are arranged opposite to each other from the large plate 100 and the large cover glass 171 using a cutting apparatus 1 (see FIG. 5) described later. For each set, the cover glass 71 to which the TFT substrate 10 is adhered is divided by means described later. As a result, the TFT substrate 10 and the cover glass 71 on which the counter substrate 20 is disposed facing each other are divided into a plurality of strips from the large plate 100 and the large cover glass 171.

  Finally, after the TFT substrate 10 and the cover glass 71 on which the plurality of counter substrates 20 divided into strips are arranged to face each other are divided one by one by an operator's hand, as shown in FIG. Further, a chip-like cover glass 72 having substantially the same size as that of the counter substrate 20 is attached to the back surface of the counter substrate 20 of the TFT substrate 10 through an adhesive having breakability, for example, a silicone adhesive. As a result, a plurality of liquid crystal display devices 500 are manufactured.

  Next, the TFT substrate 10 and the cover glass 71 are separated from the large plate 100 and the large cover glass 171 shown in FIG. A configuration of a cutting apparatus, which is an electro-optical device manufacturing apparatus, will be described with reference to FIGS. FIG. 5 is a front view showing a cutting apparatus according to an embodiment of the present invention, and FIG. 6 is a cross-sectional view taken along the line VI-VI in FIG.

  As shown in the figure, the cutting apparatus 1 has a main part composed of a pedestal 8, an expandable sheet 5 introduced into the upper surface 8j of the pedestal 8, and an elevating member 2 disposed in a hole 8h of the pedestal 8. It is configured.

The pedestal 8 has an upper surface 8j formed in a substantially flat surface, and a hole 8h is formed in an arbitrary position of the upper surface 8j, for example, a substantially central position in FIGS. The surface 5f has adhesiveness, and, as shown in FIG. 5, the material to be cut 200 described later is attached to the surface 5f. It has become. The stretchable sheet 5 is not limited to a semiconductor expanded tape as long as it has adhesiveness and stretchability.

  The stretchable sheet 5 is introduced into the upper surface 8j of the pedestal 8 by known introduction means so as to cover the hole 8h, and then is fixed at any two points, for example, near both ends in FIGS. The base 8 is fixed to the upper surface 8j.

  The elevating member 2 is constituted by, for example, an air cylinder, and has a table-like contact portion in which the contact surface that contacts the back surface 5u of the attachment surface of the stretchable sheet 5 is substantially flat at the tip in the height direction. 2t is fixed.

  The elevating member 2 is movable up and down in the height direction of the pedestal 8 so that the abutting portion 2t is moved up and down in the hole portion 8h by air and moved into and out of the hole portion 8h. Specifically, the elevating member 2 can raise the contact portion 2t to, for example, the stroke end of the elevating member 2.

  Therefore, the contact portion 2t is a region 5r between the fixing member 3 of the stretchable sheet 5 introduced to the upper surface 8j of the base 8 so as to cover the hole portion 8h. It is possible to contact the back surface 5u of the position to be stuck from below the stretchable sheet 5.

  Further, the contact portion 2t is further lifted from the hole portion 8h after being in contact with the back surface 5u, whereby the fixing member 3 extends the elastic sheet 5 having both ends fixed to the upper surface 8j of the base 8 respectively. .

  Next, the effect | action of the parting apparatus 1 comprised in this way is demonstrated using FIGS. 3-6 and FIGS. 7-9. FIG. 7 is a flowchart showing a cutting method using the cutting device of FIG. 6, FIG. 8 is a cross-sectional view showing a state in which a material to be cut is attached to the cutting device of FIG. 6, and FIG. 9 is a cutting device of FIG. It is sectional drawing which shows the state which the raising / lowering member of this raises and has extended the elastic sheet.

  In the following description, as shown in FIGS. 3 (a) to 3 (c), a plurality of chip-like counter substrates 20 are opposed to each other to be cut by the cutting apparatus 1. A large cover glass 171 is attached to the back surface of the large plate 100 on which the plurality of TFT substrates 10 are formed via a silicone adhesive, and the scribe lines 100x, 100x, An example in which 100y and through cracks (in the drawing, only 100x ′ and 171x ′ are described) is formed will be described.

  Therefore, the object to be divided is a large plate 100 on which a plurality of counter substrates 20 are arranged to face each other and a large cover glass 171 attached to the back surface of the large plate 10. This will be described as the object 200.

  As shown in FIG. 7, first, after the scribed object 200 is prepared in step S <b> 1, the subsequent step S <b> 2 covers the hole 8 h of the base 8 on the upper surface 8 j of the base 8 of the cutting apparatus 1. Thus, the stretchable sheet 5 is introduced by known introduction means. Thereafter, the process proceeds to step S3.

  In step S <b> 3, two arbitrary points of the stretchable sheet 5, for example, the vicinity of both ends in FIGS. 5 and 6 are fixed to the upper surface 8 j of the base 8 by the fixing member 3. In subsequent step S4, as shown in FIG. 8, the material to be divided 200 is attached to the surface 5f of the stretchable sheet 5 and the region 5r between the two fixing members 3.

  Specifically, a large cover glass 171 is attached to the stretchable sheet 5. As a result, the sticking surface of the cover glass 171 is protected by the surface 5 f of the stretchable sheet 5. Thereafter, the process proceeds to step S5.

  In step S5, as shown in FIG. 9, the abutting portion 2t of the elevating member 2 is raised using air, and the abutting portion 2t is the region 5r of the stretchable sheet 5, and the material to be divided 200 is pasted. It is brought into contact with the back surface 5u at the position to be worn from below.

  After that, the contact portion 2t is lifted from the hole portion 8h to the stroke end of the elevating member 2 using air, for example, 250 to 300 mm from the opening of the hole portion 8h, whereby both ends are fixed to the upper surface 8j of the base 8 respectively. The stretchable sheet 5 fixed by 3 is extended by, for example, 50 mm with a constant torque in a direction substantially perpendicular to the elevating direction of the elevating member 2.

  By the extension of the stretchable sheet 5 in the direction substantially perpendicular to the lifting direction of the lifting member 2, the article 200 is cut. Specifically, from the large plate 100 and the cover glass 171 of the large plate, the TFT substrate 10 to which the cover glass 71 that is a fragmented material is attached is provided for each set of the TFT substrate 10 and the counter substrate 20 that are arranged to face each other. Then, along the cracks 100x ′ and 171x ′, for example, a plurality of strips are divided into strips each having a set of 15 sets of TFT substrates 10 and a counter substrate 20 in a row. At this time, the silicone adhesive for adhering the large plate 100 and the large cover glass 171 is also reliably divided. Thereafter, the process proceeds to step S6.

  Finally, in step S <b> 6, the TFT substrate 10 on which the strip-shaped cover glass 71 is attached, on which the counter substrate 20, which is a part to be separated, is opposed, is peeled from the stretchable sheet 5. At this time, organic matter may adhere to the sticking surface of the cover glass 71, but the organic matter is removed in an alcohol wiping step performed in a later step.

  Thereafter, the TFT substrate 10 to which the strip-shaped cover glass 71 is attached is divided into one by one by the operator's hand along the scribe lines 100y and 171y for each set of the TFT substrate 10 and the counter substrate 20. As a result, a plurality of liquid crystal display devices 500 are formed.

  In addition, when the strip-shaped cover glass 71 and the TFT substrate 10 are cut into pieces along the scribe lines 100y and 171y for each set of the TFT substrate 10 and the counter substrate 20, the cutting apparatus 1 is used. May be.

  Thus, in the cutting apparatus 1 which shows this Embodiment, by using the raising / lowering member 2, the expansion | extension sheet | seat 5 by which the vicinity of both ends was fixed to the base 8 is extended | stretched, and the division | segmentation stuck to the expansion / contraction sheet | seat 5 was carried out. From the large plate 100 and the large cover glass 171, which are the object 200, the plurality of counter substrates 20 facing each other, the TFT substrate 10, the plurality of counter substrates 20, which are separated from each other, and the TFT substrate 10 The cover glass 71 adhered to the back surface was divided.

  As a result, the divided cover glass 71 and the TFT substrate 10 remain attached to the stretchable sheet 5, so that the unexpected fall after the division can be prevented. Therefore, the TFT substrate due to the unexpected fall after the division. 10 and the cover glass 71 can be prevented from being broken. Therefore, the TFT substrate 10 to which the cover glass 71 is pasted from the large plate 100 and the large cover glass 171 can be accurately divided without impairing the shape of the sectional surface.

  In addition, by using the extension of the stretchable sheet 5 to divide, it is possible to protect the sticking surface of the cover glass 171 attached to the stretchable sheet 5, and from the large plate 100 and the large cover glass 171, When the TFT substrate 10 to which the cover glass 71 is adhered is divided, the silicone adhesive that cannot be divided by the scribe break, which bonds the large cover glass 171 and the large plate 100 together, can be reliably divided.

  Furthermore, the TFT substrate 10 to which a plurality of cover glasses 71 are pasted from the large plate 100 and the large cover glass 171 by a single raising of the elevating member 2 with respect to the stretchable sheet 5 is formed into a plurality of strips at a time. Therefore, it can be divided efficiently.

Hereinafter, a modification is shown.
In this Embodiment, it showed that the to-be-divided thing 200 which the parting apparatus 1 partes is the large board 100 and the large board cover glass 171 with which the some opposing board | substrate 20 was opposingly arranged. The cutting apparatus 1 is not limited to this, and the cutting apparatus 1 includes a large plate 100 on which a plurality of TFT substrates 10 are configured, a second substrate (not shown) on which a plurality of counter substrates 20 are configured, and a large cover glass 171. You may use when dividing at least one of.

  Further, the cutting apparatus 1 includes one large plate 100 on which a plurality of TFT substrates 10 are configured, and the other large plate (not shown) that is a second substrate on which the same number of counter substrates 20 as the TFT substrates 10 are configured. Are attached so as to face each other, and then a plurality of liquid crystal display devices 500 are manufactured by dividing the TFT substrate 10 and the opposite substrate 20 placed opposite to each other. Of course, the liquid crystal display device 500 may not be used.

  Further, in the large plate assembly method, one large plate 100 having a plurality of TFT substrates 10 and the other large plate (second substrate having the same number of counter substrates 20 as the TFT substrates 10). And a large cover glass 171 was adhered to the back surface of one large plate 100, and a large cover glass was also adhered to the other large plate. Thereafter, the TFT substrate 10 to which the cover glass 71 is attached and the counter substrate 20 to which the cover glass 72 is attached are divided to produce a plurality of liquid crystal display devices 500 to which the cover glass is attached. Of course, it is okay.

  In the present embodiment, when the contact portion 2t of the elevating member 2 is brought into contact with the back surface 5u of the stretchable sheet 5 by raising, the stretchable sheet 5 is extended by further raising the contact portion 2t. Indicated. For example, after the elevating member 2 is disposed above the pedestal 8, the abutting portion 2 t of the elevating member 2 is brought into contact with the surface 5 f of the stretchable sheet 5 by lowering, and then the further abutting portion 2 t. Even if the stretchable sheet 5 is stretched by the lowering, the same effect as in the present embodiment can be obtained.

  Furthermore, in this Embodiment, it showed that the raising / lowering of the raising / lowering member 2 was used for the expansion | extension of the elastic sheet 5. As shown in FIG. However, if the stretchable sheet 5 is simply stretched, the stretchable sheet 5 is attached to the stretchable sheet 5 and then pulled from both sides or from one side by using a specific means. Even if the stretchable sheet 5 is stretched, the same effect as in the present embodiment can be obtained.

  Furthermore, in the present embodiment, the electro-optical device has been described by taking a liquid crystal display device manufactured by a liquid crystal dropping method as an example, but the present invention provides a notch in the sealing material 41, and the You may apply to the liquid crystal display device manufactured by the liquid crystal injection system which inject | pours a liquid crystal and plugs the said notch after injection | pouring.

  Further, although the electro-optical device has been described by taking a liquid crystal display device as an example, the present invention is not limited to this, and the electroluminescence device, in particular, an organic electroluminescence device, an inorganic electroluminescence device, etc., a plasma display device, FED (Field Emission Display) devices, SED (Surface-Conduction Electron-Emitter Display) devices, LED (Light Emitting Diode) display devices, electrophoretic display devices, devices using thin televisions such as thin cathode ray tubes or liquid crystal shutters, etc. It can be applied to various electro-optical devices.

  Further, the electro-optical device of the present invention is not limited to the illustrated examples described above, and it is needless to say that various modifications can be made without departing from the gist of the present invention. For example, the above-described liquid crystal display device has been described by taking an active matrix type liquid crystal display module using an active element (active element) such as a TFT (thin film transistor) as an example. The present invention can also be applied to an active matrix liquid crystal display module using active elements such as

The top view which looked at the TFT substrate of the liquid crystal display device from the counter substrate side with each component formed on it. Sectional drawing which cut | disconnected the liquid crystal display device after the assembly process which bonds a TFT substrate and a counter substrate together, and encloses a liquid crystal along the II-II line | wire in FIG. Process drawing which shows the manufacturing method of the liquid crystal display device of FIG. 1 typically. The top view which shows having formed the scribe line for a cutting | disconnection on the large board with which the some TFT substrate was comprised. The front view which shows the cutting device which shows one embodiment of this invention. 6 is a sectional view taken along line VI-VI in FIG. The flowchart which shows the cutting method using the cutting apparatus of FIG. Sectional drawing which shows the state which stuck the to-be-divided material to the cutting apparatus of FIG. Sectional drawing which shows the state which the raising / lowering member of the parting apparatus of FIG. 6 raises and has extended the elastic sheet.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Dividing device, 2 ... Elevating member, 5 ... Stretch sheet, 5f ... Surface of stretch sheet, 5r ... Area where stretch sheet was fixed, 5u ... Back surface of stretch sheet, 10 ... TFT substrate, 20 ... Counter substrate 62 ... mounting terminal portion, 71 ... cover glass, 72 ... cover glass, 100 ... large plate with a plurality of TFT substrates, 100x ... scribe line, 100y ... scribe line, 171 ... cover glass, 171x ... scribe line, 171y ... scribe line, 200 ... part to be cut, 500 ... liquid crystal display device.

Claims (10)

An apparatus for manufacturing an electro-optical device that forms a substantially linear groove with respect to an object to be divided and then divides the object to be divided along the groove,
Both ends are fixed, and the part to be divided is stuck to the fixed area, an elastic sheet having adhesiveness,
An elevating member that is an area between the fixed sheets of the stretchable sheet and that can freely come into contact with the back surface of the surface to which the object to be divided is attached, by elevating,
Have
The electro-optical device manufacturing apparatus according to claim 1, wherein the elevating member extends the expandable sheet by either further raising or lowering after contact with the expandable sheet.   The said raising / lowering member is the area | region between the said fixed sheets of the said expansion-contraction sheet | seat, Comprising: It can contact | abut with respect to the back surface of the position where the said to-be-divided material is affixed. Electro-optical device manufacturing equipment.   The object to be divided includes a first substrate having a plurality of element substrates each having a mounting terminal portion, a second substrate having a plurality of counter substrates opposed to the element substrate, and the first substrate. 3. The electro-optical device manufacturing apparatus according to claim 1, wherein the apparatus is at least one of a cover glass bonded to at least one of the second substrate. 4.   The electro-optical device manufacturing apparatus according to claim 3, wherein the part to be divided is the first substrate bonded with the cover glass via a breakable adhesive. . A method of manufacturing an electro-optical device that forms a substantially linear groove with respect to an object to be divided, and then divides the object to be divided along the groove,
Forming a substantially linear groove with respect to the object to be divided;
A step of sticking the material to be cut formed with the groove to an elastic sheet having adhesiveness;
A step of dividing the material to be divided along the groove by extending the elastic sheet;
Peeling the stretchable sheet from the divided product,
A method for manufacturing an electro-optical device.   6. The electro-optical device according to claim 5, wherein the step of attaching the material to be divided to the elastic sheet is attached to a region between the fixed sheets of the elastic sheet having both ends fixed. Production method.   The step of extending the stretchable sheet is a region between the fixed portions of the stretchable sheet, and after the lifting member is brought into contact with the back surface of the surface to which the material to be separated is attached, the lifting and lowering is performed. The method of manufacturing an electro-optical device according to claim 5, wherein the method is performed by further raising or lowering the member.   The object to be divided includes a first substrate having a plurality of element substrates each having a mounting terminal portion, a second substrate having a plurality of counter substrates opposed to the element substrate, and the first substrate. The method for manufacturing an electro-optical device according to claim 5, wherein the method is at least one of a cover glass bonded to at least one of the second substrate.   9. The method of manufacturing an electro-optical device according to claim 8, wherein the object to be divided is a material in which the cover glass is attached to the first substrate via an adhesive having breakability. .   An electro-optical device manufactured using the manufacturing method according to claim 5.

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