JP2006258865A - Optical component and manufacturing method thereof - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical component which is designed so that respective outgoing beams are in parallel when utilizing the optical path shift in a photonic crystal of face-centered cubic crystal structure oriented to (111), and to provide a manufacturing method of the optical component. <P>SOLUTION: In the optical component, the (111) surface of a dielectric periodical structure (photonic crystal 20) having face-centered cubic crystal formed on a transparent dielectric substrate is brought into contact with the transparent dielectric substrate 10, wherein a surface on the opposite side to the surface on which the dielectric periodical structure 20 of the transparent dielectric substrate 10 is formed is a cross-section in parallel to an arbitrary (111) surface of the dielectric periodical structure 20 and has a convex shape or a concave shape. As the dielectric periodical structure 20, an opal crystal in which globular transparent dielectric particles are integrated to a surface-centered crystal, such a structure that globular voids are arranged in transparent dielectric 1 into a face-centered cubic crystal shape and, in the globular voids, transparent dielectric 2 having a refractive index different from that of the transparent dielectric 1 is packed, such an inverse opal crystal that the globular voids are arranged in the transparent dielectric into a face-centered cubic crystal shape and the like can be used. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an optical component that utilizes anomalous optical characteristics of a photonic crystal having a dielectric periodic structure, and in particular, a micro device that continuously scans an optical path, an optical system that uses the optical device, and a discontinuous optical path. The present invention relates to an optical component suitable for a microdevice to be switched, an optical system to which the microdevice is applied, and a manufacturing method thereof.

  The following documents are related to optical scanning using the super prism effect of a photonic crystal.

  Japanese Patent Laid-Open No. 2004-157421 “Optical Element Using One-Dimensional Photonic Crystal” (Patent Document 1) discloses a second one that is not parallel to the film surface in a one-dimensional photonic crystal based on a multilayer structure. There has been disclosed an optical element that can cope with an incident light beam having a certain thickness by forming an inclined surface.

  Japanese Patent Laid-Open No. 2003-329823, “Optical Element Using One-Dimensional Photonic Crystal and Spectroscopic Device Using The Same” (Patent Document 2) describes a one-dimensional photonic crystal formed of a multilayer film in a triangular prism shape. By processing and providing phase modulation means on the light incident end face side, only specific high-order band light can be propagated, and by forming this in the optical waveguide, a compact spectroscopic device with high resolution can be configured A technique that enables this is disclosed.

  In addition, in JP-A-2003-255116, “optical element” (Patent Document 3), in a conventional two-dimensional photonic crystal, when used as a prism, it is necessary to perform oblique processing on the exit surface side. This has been very difficult in the past, but in this publication, the above problem is solved by making light incident from the yz planes of the x-axis and y-axis having a two-dimensional photonic crystal repetitive structure. An optical element configured to do so is disclosed.

  Japanese Patent Application Laid-Open No. 2003-195002 “Optical Device” (Patent Document 4) discloses an optical device such as an optical deflection element, an optical multiplexing element, and a scanning device using an organic photonic crystal using an organic material. .

  Japanese Patent Application Laid-Open No. 2002-71982 “Optical Element, Optical Deflection Element, Optical Multiplexing Element, and Scanning Device” (Patent Document 5) describes an incident surface in a photonic crystal in order to greatly shake emitted light. An element is disclosed in which the angle between the incident surface and the exit surface is determined under the condition that light must be emitted from different surfaces and light passes between the different entrance surfaces and the exit surface.

JP 2004-157421 A JP 2003-329823 A JP 2003-255116 A Japanese Patent Laid-Open No. 2003-195002 Japanese Patent Laid-Open No. 2002-71982

  A photonic crystal is a material having a periodic structure in which two or more materials having different refractive indexes (one may be air) have spatial symmetry and regularity. Since the photonic crystal has this regular structure / periodic structure, the photonic crystal exhibits characteristics that cannot be obtained by conventional optical materials.

  One of the expected characteristics of the photonic crystal is a super prism effect having prism characteristics that cannot be realized by a normal optical material, and a super collimating effect in which light propagates through the crystal without spreading.

  FIG. 10A is a diagram illustrating an example of light refraction in the case of a normal prism, and FIG. 10B is a diagram illustrating an example of light refraction in the case of having a super prism effect. As described above, the super prism exhibits completely different characteristics from the normal prism.

  Moreover, FIG. 11 is a figure for demonstrating the super collimating effect, and has shown a mode that light propagates without spreading in a crystal | crystallization.

  By making it possible to use characteristics such as the super prism effect and super collimation effect of photonic crystals, it becomes possible to bend the light path continuously in a small space or to change the light path rapidly. .

  Next, how such a super prism effect and a super collimator effect are expressed will be described by considering a dispersive surface in which the positions of wave numbers (k) having equal frequencies are drawn in the wave number space (k space). .

  In order to explain the concept based on the dispersion surface, first, the concept when light is incident on a normal isotropic medium from vacuum (or air) will be described with reference to the drawings.

  As shown in FIG. 12A, in a normal isotropic optical medium, the shape of the dispersion surface is a sphere, and in an arbitrary cross section passing through the origin of the k space, it is a circle defined by ck = nω. Here, c is the speed of light in vacuum, n is the refractive index, and ω is the angular frequency.

  A light dispersion surface in a vacuum (or air) of n = 1.0 and a dispersion surface in a medium of n = 1.5 can be expressed as circles having different sizes as shown in FIG.

  Consider a case where light is incident on a medium of n = 1.5 from vacuum (or air) as shown in FIG. At this time, in the dispersion plane representation of the k space (wave number space), it can appear as indicated by an arrow “k vector in vacuum” shown in FIG.

  Since the k vector of light in the vacuum and the k vector of light in the medium, which are incident light, are stored for components parallel to the surface of the medium, as shown in FIG. 12 (d), “auxiliary reflecting the perpendicular from the surface” Using the “line”, the k vector in the medium can be obtained from the intersection of the dispersion surface (large circle) in the medium and the auxiliary line. By knowing the k vector in the medium, the propagation direction of light in the medium can be known.

Next, the light propagation of the photonic crystal will be described.
Light propagation in the photonic crystal is governed by the band structure of the photonic crystal, but the dispersion surface formed by higher-order bands has a shape with anisotropy different from that of a sphere, and the light used By appropriately selecting the frequency, a dispersion surface having such anisotropy can be used. For example, the dispersion surface of the band 3 of a face-centered cubic becomes a shape as shown in FIG. 13 (a), the cross-sectional shape in the k _x = k _y is as shown in FIG. 13 (b).

  Here, as shown in FIG. 13C, a case where light is incident on a face-centered cubic type photonic crystal oriented from (001) to (001) from vacuum (or air) is considered.

  As in the case of the normal medium described with reference to FIG. 12, in this example, “incident light k vector (in vacuum)” and “auxiliary line reflecting the perpendicular from the surface” as shown in FIG. Can be drawn.

  Also, as in the case of normal media, the “k vector in the photonic crystal” is calculated from the intersection of the “auxiliary line reflecting the perpendicular from the surface” and the “dispersion plane in the photonic crystal”. Obtainable.

Since the group velocity v _g of light propagation in the medium is determined by the gradient ∇kω of the dispersion surface (v _g = ∇ _kω ), the light propagation in the photonic crystal is “an auxiliary line reflecting the perpendicular from the surface” And “dispersion plane in photonic crystal” are propagated in a direction perpendicular to the dispersion plane, and are indicated by arrows of “light propagation in photonic crystal” in FIG. The light propagates in the opposite direction. As described above, light behaves greatly different from a normal optical medium in a photonic crystal.

Next, as shown in FIG. 14A, light is incident on the face-centered cubic type photonic crystal oriented at (111) at incident angles θ ₁ , θ ₂ , θ ₃ , and θ ₄ . Think about the case.

  The idea is the same as described above, but since the crystal surface (light incident surface) is different, the direction in which k must be stored on the crystal surface is different. The drawing method of “Auxiliary Line” is different.

The notation by the dispersion surface in the case of incident angles θ ₁ , θ ₂ , θ ₃ , and θ ₄ is shown in FIGS. 14-1 (b), (c), 14-2 (d), and (e). From this consideration, the light in the photonic crystal propagates as shown in FIG.

  Next, a (111) -oriented face-centered cubic type photonic crystal is formed on the dielectric substrate, and light propagation when light is incident from the (111) plane of the photonic crystal Similar to the explanation, it can be known from the consideration of dispersion.

FIG. 16 shows a diagram of the dispersion surface when the incident angle is θ3. Although the other incident angles are omitted, as a result, as shown in FIG. 17, light is transmitted between the photonic crystal and the dielectric substrate corresponding to the incident angles θ ₁ , θ ₂ , θ ₃ , and θ ₄ . Propagate through and go out (i), (b), (c), (d) in vacuum. As can be seen from the above description and FIGS. 14-1, 14-2, 15, and 16, the incident angles θ ₁ , θ ₂ , θ ₃ , and θ ₄ are the dispersion planes of the photonic crystal. The angle is chosen so that the characteristics of can be clearly understood.

When such a photonic crystal is used, the optical path shift on the exit side is used by changing the incident angle as in the above example. Since a large shift amount cannot be obtained in the range of θ _{1 to} θ ₂ , it is usually difficult to use the shift amount. Since a large shift amount is obtained in the regions θ _{2 to} θ ₃ and θ _{3 to} θ ₄ , application to an optical path changeover switch and an optical scanning device using this characteristic can be expected.

  In the above description, the incident angle of incident light is changed. However, except for an incident angle of 0 ° (perpendicular incidence), the photonic crystal that can be used can be used by changing the frequency of incident light without changing the incident angle. Since the size of the dispersion surface changes, the same effect as described above can be obtained.

In order to make it easy to understand the problems that are the subject of the present invention, only θ ₂ and θ ₃ are extracted from FIG. 17 and FIG. 18A shows θ ₃ and θ ₄ . As can be seen from FIG. 18, since the emitted light is in the same direction as the incident light in either case, the direction of each emitted light is different, which is inconvenient in using the optical path shift.

  An object of the present invention is to solve the above-mentioned point that becomes a problem when utilizing the characteristics of optical path shift. The specific purpose of each claim will be described below.

a) An object of the invention described in claim 1 is to make each outgoing light parallel when using an optical path shift in a photonic crystal of a face-centered cubic crystal type oriented in (111). .

b) The object of the invention described in claims 2 to 4 is to specifically specify a dielectric periodic structure that can be a face-centered cubic type photonic crystal oriented in (111) in the optical component described in claim 1. Is to present.

c) The object of the invention of claims 5 to 7 is to present a specific structure for having a specific relationship between the crystal orientation of the photonic crystal and the direction of the symmetry axis of the concave and convex shapes of the substrate. (To achieve the object of claim 1, the crystal orientation of the photonic crystal and the direction of the symmetry axis of the concave and convex shapes of the substrate must have a specific relationship).

d) The object of the invention described in claims 8 to 11 is to provide a specific manufacturing method for making the crystal orientation of the photonic crystal and the direction of the symmetry axis of the concave and convex shapes of the substrate have a specific relationship. (To achieve the object of claim 1, the crystal orientation of the photonic crystal and the direction of the symmetry axis of the concave and convex shapes of the substrate must have a specific relationship).

  The present invention employs the following configuration in order to achieve the above object. The configuration for each claim will be described below.

a) The invention according to claim 1 is an optical component in which a (111) plane of a dielectric periodic structure having a face-centered cubic crystal formed on a transparent dielectric substrate is in contact with the transparent dielectric substrate, A surface of the transparent dielectric substrate opposite to the surface on which the dielectric periodic structure is formed is a cross section parallel to an arbitrary {110} plane of the dielectric periodic structure, and has a convex shape or a concave shape. It is characterized by becoming.

b) The invention according to claim 2 is the optical component according to claim 1, wherein the dielectric periodic structure is an opal crystal in which spherical transparent dielectric particles are accumulated in face-centered cubic crystals. Yes.

c) The invention according to claim 3 is the optical component according to claim 1, wherein the dielectric periodic structure has spherical voids arranged in a face-centered cubic crystal in the transparent dielectric 1. A spherical gap is characterized by a structure in which a transparent dielectric 2 having a refractive index different from that of the transparent dielectric 1 is filled.

d) According to a fourth aspect of the present invention, in the optical component according to the first aspect, the dielectric periodic structure is an inverse opal crystal in which spherical voids are arranged in a face-centered cubic form in a transparent dielectric. It is characterized by being.

e) The invention according to claim 5 is the optical component according to claim 2, wherein the surface of the transparent dielectric substrate on which the opal crystal is formed has an uneven pattern, and the shape of the recessed pattern is It is an island shape, a band shape, or an island shape connected by a band, and the ridges and valleys of the uneven pattern are formed by straight lines.

f) The invention according to claim 6 is the optical component according to claim 3, wherein the dielectric periodic structure on the transparent dielectric substrate has an island shape, a band shape, or an island shape connected by a band. It is characterized by having the following pattern shape.

g) The invention according to claim 7 is the optical component according to claim 4, wherein the inverse opal crystal on the transparent dielectric substrate has an island shape, a band shape, or an island-like pattern shape connected by a band. It is characterized by having.

h) The invention according to claim 8 is an optical component manufacturing method for manufacturing the optical component according to claim 2, 3 or 4, wherein the crystal orientation of the dielectric periodic structure is determined by measurement. The transparent dielectric substrate is processed to have a convex shape or a concave shape in a cross section parallel to an arbitrary {110} plane of the dielectric periodic structure.

i) The invention according to claim 9 is an optical component manufacturing method for manufacturing the optical component according to claim 5, wherein one surface has a concave shape or a convex shape along an arbitrary linear axis. And the other surface of the dielectric substrate has an island-shaped uneven pattern in which the ridges and valleys of the uneven pattern are constituted by straight lines, or a band-shaped or island-shaped uneven pattern connected by a band. An opal crystal is grown on the side of the transparent dielectric substrate having the concavo-convex pattern.

j) The invention according to claim 10 is a method of manufacturing an optical component for manufacturing the optical component according to claim 6, and the spherical particles of the transparent dielectric 1 of opal crystal after the step according to claim 9. A transparent dielectric 2 is obtained by injecting and solidifying a fluid between them.

k) The invention according to claim 11 is a method of manufacturing an optical component according to claim 7, wherein the surface on one side of the substrate for growing an opal crystal has straight ridges and valleys in the concavo-convex pattern. After forming the opal crystal on the side having the concavo-convex pattern of the transparent dielectric substrate having an island-shaped concavo-convex pattern connected with the island-shaped, band-shaped, or band-shaped substrate, the substrate On one side of the transparent dielectric substrate having a concave or convex shape along an arbitrary linear axis, the opal crystal is sandwiched between the spherical particles of the opal crystal. The spherical particles and the opal crystal growth substrate are removed after forming a transparent dielectric material by injecting and solidifying.

  According to the present invention, when the optical path shift is used, each outgoing light can be made parallel. The effects of each claim will be described below.

a) Effects of the Invention According to Claim 1 The optical component according to claims 1 and 2 can take out the light of each optical path that is largely shifted in parallel due to the characteristics of the photonic crystal.

b) Effects of Invention of Claim 3 The optical component according to claim 3 can be made to be in a weaker modulation state in the photonic crystal part of the optical component than that of claim 2.

c) Effect of the Invention According to Claim 4 The optical component according to claim 4 can be more strongly modulated than that according to claim 2 in the photonic crystal portion of the optical component.

d) Effect of Invention of Claim 5 In the optical component according to claim 5, since the crystal orientation is determined in accordance with the uneven shape of the substrate, the crystal orientation of the photonic crystal and the substrate are utilized. It becomes possible to make a structure in which the directions of the symmetry axes of the concave and convex shapes have a specific relationship.

e) Effects of the Invention of Claim 6 The optical component according to claim 6 has a correlation between the pattern shape of the dielectric periodic structure and the orientation of the crystal of the dielectric periodic structure. It is possible to obtain a structure in which the crystal orientation of the photonic crystal and the direction of the substrate concave and convex symmetrical axes have a specific relationship.

f) Effect of Invention of Claim 7 The optical component according to claim 7 has a correlation between the pattern shape of the inverse opal structure and the orientation of the crystal of the inverse opal structure. It becomes possible to make a structure in which the crystal orientation and the direction of the substrate concave and convex symmetrical axes have a specific relationship.

g) Effects of the Invention of Claim 8 The method for manufacturing an optical component according to claim 8 forms the concave or convex shape of the substrate after determining the crystal orientation. It becomes possible to manufacture a structure in which the direction of the symmetry axis of the substrate concave and convex shapes has a desired relationship.

h) Effect of the Invention of Claim 9 The method for manufacturing an optical component according to claim 9 has a concave or convex shape on one surface of the transparent dielectric substrate and a back surface shape on the other surface. A concavo-convex pattern (a template for opal crystal growth control) having a desired angular relationship with the axis of symmetry is formed in advance, and an opal crystal is formed on the side of the concavo-convex pattern. It becomes possible to manufacture a structure having a desired relationship in the direction of the symmetry axis

i) Effect of the Invention of Claim 10 The optical component manufacturing method of Claim 10 is formed by injecting and solidifying a fluid between spherical particles of opal crystal after the process of Claim 9. Therefore, it is possible to manufacture a structure in which the crystal orientation of the dielectric periodic structure and the direction of the substrate concave and convex symmetrical axes have a desired relationship.

j) Effect of the Invention of Claim 11 In the method for manufacturing an optical component according to claim 11, a concavo-convex pattern (an opal crystal growth control template) is formed in advance on one side of an opal crystal growth substrate. By forming the opal crystal on the side, the crystal orientation can be known from the pattern shape of the opal crystal. Therefore, when the transparent dielectric substrate is bonded, the concave or convex shape formed on the surface of the transparent dielectric substrate The symmetry axis of the crystal and the crystal orientation of the crystal can be adjusted at a desired angle. As a result, it is possible to manufacture a structure in which the crystal orientation of the inverse opal structure and the direction of the substrate concave and convex symmetrical axes have a desired relationship.

(Summary of Invention)
When light is introduced from the (111) plane side of a (111) -oriented face-centered cubic type photonic crystal on a dielectric substrate and used for optical path shifting, as described above, Since it is in the same direction as the incident light, the direction of each emitted light is different, which is inconvenient in using the optical path shift.

  In the present invention, the shape of the dielectric substrate on the outgoing image side is made concave or convex so that the outgoing lights are made parallel.

More specifically, as shown in FIG. 1A in the region of θ _{2 to} θ ₃ , the exit surface side of the dielectric substrate is concave, and in the region of θ ₃ to θ ₄ , FIG. As shown in b), by making the emission surface side of the dielectric substrate convex, each emitted light can be made parallel. The concave and convex curvatures are determined by the thickness of the photonic crystal portion and the like.

The above description is an explanation of when viewed in a k _x = k _y {110} cross-sectional, since the dispersion surface of the photonic crystal is shaped as in FIG. 13 (a), the other section When light is incident in such a direction as to be controlled, the light propagates according to the cross-sectional shape. Accordingly, when used as an optical path shift the incident light vector to be in the a above k _x = k _y {110} plane.

  In order to make the light incident so that the incident light vector exists in the {110} plane in this way, is it necessary to mark the optical component of the invention so that the direction of the crystal orientation is known (FIG. 2 (a))? ), And a cylindrical shape that is flat in the direction perpendicular to the paper surface of FIG. 1 (FIG. 2B).

  Embodiments of an optical component and a manufacturing method thereof according to the present invention will be described below in detail with reference to the drawings.

Example 1
The present embodiment is an embodiment of the invention according to claims 1, 2, and 8.

  In this example, a raw material liquid in which spherical monodispersed silica particles having a particle diameter of 350 nm are dispersed in ethanol dispersion medium at 4 wt% is prepared by putting it in a container for growing opal crystals.

  The substrate uses a quartz substrate with smooth and parallel surfaces, and after ultrasonic cleaning with acetone, it is immersed in a mixed solution of concentrated sulfuric acid and hydrogen peroxide for 1 hour, rinsed with pure water, dried and then dried. In addition, a protective film 42 (see FIG. 3) is used so that no opal crystal grows.

  As shown in FIG. 3, the quartz substrate 41 is immersed in a raw material solution in a growth vessel in an upright state, and the ambient temperature of the constant temperature atmosphere 43 is kept at 50 ° C. and left.

  The raw material liquid is gradually dried, and the opal crystal 44 is formed after the raw material liquid is retracted. When the necessary area length is obtained, the quartz substrate 41 is pulled up and collected. The film thickness of the opal crystal 44 can be controlled by the concentration of the raw material liquid and the drying speed of the raw material liquid.

  At this time, if an appropriate electrolyte is added to the raw material liquid according to the conditions, the uniformity of the thickness of the opal crystal 44 can be secured. After the opal crystal growth, the protective film 42 attached to one side is peeled off.

  The opal crystal 44, which is a spherical particle opal crystal, has a face-centered cubic crystal structure, and has a property that the surface restricted as a boundary surface becomes (111) during growth, and is thus recovered from the growth. In this state, (111) orientation is obtained.

  Thereafter, the Kikuchi / Kossel / pattern is measured by irradiating the crystal with laser light in an arrangement as shown in FIG. In FIG. 4, reference numerals 41 and 44 denote the quartz substrate and the opal crystal 44 described above. This is irradiated with a laser beam 53 through a light diffusion sheet, and a pattern is measured by an observation screen 52 provided on the dielectric block 51.

  The Kikuchi, Kossel, and pattern measurement using this laser is described in detail in Japanese Patent Application Laid-Open No. 2004-101324, so an outline will be described here.

  The Kikuchi Kossell pattern varies depending on the crystal lattice size and the laser beam, but a dark line pattern as shown in FIG. 4B can be observed. From this Kikuchi Kossell pattern, the direction that can be used as the {110} cross section can be found as shown in FIG.

  Since the crystal orientation has been determined by the above measurement, the axis 62 shown in FIG. 4B and the symmetry axis 61 of the cylindrical dielectric substrate 60 are bonded together as shown in FIG. . At the time of bonding, an adhesive that matches the refractive index with the quartz substrate is used.

  Through the steps described above, an optical component as shown in FIG. 2B can be manufactured. In the above description, a convex cylindrical shape is taken as an example, but a concave cylindrical shape can also be manufactured in the same process.

  A case where the substrate surface is spherical will be described with reference to FIG. Even when the surface of the substrate is spherical, the dielectric substrate 10 and the photonic crystal 20 are bonded to the mark 30 that has been formed in advance so that the orientation of the crystal can be understood. Can be manufactured. The optical component thus manufactured is shown in FIG.

(Example 2)
This embodiment is an embodiment of the invention according to claim 1, claim 2, claim 5 and claim 9.

  In the present embodiment, an example in which the crystal orientation is controlled using the uneven pattern of the opal growth substrate will be described. The island-shaped, band-shaped, and concave / convex patterns connected by the bands described in the present invention are patterns as shown in FIGS. 6A, 6B, and 6C, respectively. In the figure, 64, 66, and 68 indicate protruding areas (convex areas), and 65, 67, and 69 indicate grooves (concave areas).

  When such a concavo-convex pattern is formed on a substrate and an opal crystal is formed thereon, the particle arrangement is aligned along the pattern wall, for example, as shown in FIG. Can be controlled. FIG. 7 shows a state in which the particles 70 are regularly arranged in a region (concave region) that is a groove surrounded by a projecting region 71 on the substrate. FIG. 8 also shows a direction 72 that can be used as a {110} cross section.

  In order to be able to control the orientation of the crystal, the pattern needs to be a geometric shape composed of straight lines. In particular, in the case of an island pattern as shown in FIG. 6A, the angle between adjacent sides is desirably 120 degrees or 60 degrees.

  The manufacturing method will be described. First, a quartz substrate having a cylindrical shape with one convex surface is prepared. An uneven pattern is formed on the flat side of the substrate using a photosensitive resin.

  Here, in the case of a hexagonal island pattern, which direction is the “direction that can be used as a {110} cross section” is described in FIG. 7, the uneven pattern is a pattern of hexagonal islands aggregated. The case will be described.

  When patterning the concavo-convex pattern, the cylindrical symmetry axis formed on the opposite surface is formed so as to have the relationship of FIG. 7 with respect to the hexagonal pattern (FIG. 8). In FIG. 8, only one island is written so that the direction of the pattern can be clearly understood, but in practice, a repeating pattern of islands may be used.

  Next, a protective film 42 is attached to the surface on which the cylindrical is formed, and an opal crystal is formed using spherical monodispersed silica particles having a particle diameter of 350 nm by the same method as in Example 1. When an opal crystal having a desired width is formed, the substrate is recovered.

  Finally, by peeling off the protective film 42, an optical component as shown in FIG. 1B can be manufactured.

(Example 3)
This embodiment is an embodiment of the invention according to claim 1, claim 3, claim 6 and claim 10.

  This example is manufactured to the middle in the same process as in Example 2, but before peeling off the protective film, a resin is selected and injected between the opal crystal particles so as to have a target refractive index difference. Then, it is solidified, and finally the protective film is peeled off to produce an optical component as shown in FIG.

Example 4
The present embodiment is an embodiment of the invention according to claims 1, 4, 7 and 11.

  In this embodiment, first, a concavo-convex pattern consisting of a set of hexagonal islands is formed on a quartz substrate to obtain an opal crystal growth substrate. An opal crystal is formed on this substrate using spherical monodispersed silica particles having a particle size of 350 nm by the same method as in Example 1. When an opal crystal having a desired width is formed, the substrate is recovered.

  Since the orientation of the crystal can be known from the pattern shape, as shown in FIG. 9, the one side is in a cylindrical shape in the same direction as described above (ie, the pattern direction 80 and the symmetry axis 79 of the cylindrical substrate 78 are aligned). A resin substrate (cylindrical substrate) 78 whose other surface is a flat surface is bonded to the surface of the opal crystal 77 with the flat surface side as a bonding surface. A resin having a target refractive index is injected between the bonded surfaces and solidified.

  Finally, the opal crystal growth substrate and silica particles are removed by hydrofluoric acid etching to produce an optical component as shown in FIG.

It is a figure for demonstrating the emitted light taken out in parallel in this invention. It is a figure which shows the optical component which concerns on this invention. It is a figure for demonstrating the opal crystal growth method. It is a figure for demonstrating the determination method of a crystal orientation. It is a figure for demonstrating bonding of a cylindrical substrate. It is a figure for demonstrating an uneven | corrugated pattern (figure seen from the board | substrate upper direction). It is a figure for demonstrating the particle arrangement by which the direction was controlled by the uneven | corrugated pattern. It is a figure for demonstrating pattern direction alignment. It is a figure for demonstrating direction alignment of a cylindrical board | substrate. It is a figure for demonstrating the super prism effect. It is a figure for demonstrating a super collimating effect. It is a figure which shows the consideration (normal optical medium) of the light propagation by a dispersion surface. It is a figure which shows consideration ((001) orientation photonic crystal) of the light propagation by a dispersion surface. It is a figure which shows the consideration ((111) orientation photonic crystal) of the light propagation by a dispersion surface (the 1). It is a figure which shows the consideration ((111) orientation photonic crystal) of the light propagation by a dispersion surface (the 2). It is a figure for demonstrating the incident and propagation ((111) orientation photonic crystal) to a photonic crystal from a vacuum. It is a figure for demonstrating the incidence and propagation (dispersion surface) to a photonic crystal / dielectric substrate from a vacuum. It is a figure for demonstrating the incidence and propagation ((111) orientation photonic crystal) to a photonic crystal / dielectric substrate from a vacuum (the 1). It is a figure for demonstrating the incident and propagation ((111) orientation photonic crystal) to a photonic crystal / dielectric substrate from a vacuum (the 2).

Explanation of symbols

10: Dielectric substrate 20: Photonic crystal 30: Mark indicating crystal orientation 41: Quartz substrate 42: Protective film 43: Constant temperature atmosphere 44: Opal crystal 51: Dielectric block 52: Screen for observation 53: Laser beam 60: Cylindrical Dielectric substrate 61: Axis of symmetry 62: Axis determined by Kikuchi / Cossell pattern measurement 64, 66, 68: Protruding area (convex area)
65, 67, 69: grooved area (concave area)
70: Particle 71: Protruding area (convex area)
72: Direction that can be used as a {110} cross section 73: Photosensitive resin layer for pattern formation 74: Pattern direction 75, 76: Cylindrical symmetry axis 77: Opal crystal 78: Cylindrical substrate 79: Symmetry axis 80: Pattern direction

Claims (11)

An optical component in which a (111) plane of a dielectric periodic structure having a face-centered cubic crystal formed on a transparent dielectric substrate is in contact with the transparent dielectric substrate,
The surface of the transparent dielectric substrate opposite to the surface on which the dielectric periodic structure is formed is a cross section parallel to an arbitrary {110} plane of the dielectric periodic structure, and has a convex shape or a concave shape. An optical component characterized by The optical component according to claim 1,
The optical periodic structure is an opal crystal in which spherical transparent dielectric particles are accumulated in face-centered cubic crystals. The optical component according to claim 1,
In the dielectric periodic structure, spherical voids are arranged in a face-centered cubic shape in the transparent dielectric 1, and a transparent dielectric 2 having a refractive index different from that of the transparent dielectric 1 is provided in the spherical voids. An optical component having a filled structure. The optical component according to claim 1,
2. The optical component according to claim 1, wherein the dielectric periodic structure is an inverse opal crystal in which spherical voids are arranged in a face-centered cubic form in a transparent dielectric. The optical component according to claim 2,
The surface of the transparent dielectric substrate on which the opal crystal is formed has a concavo-convex pattern, and the shape of the concave pattern is an island shape, a band shape, or an island shape connected by a band, An optical component characterized in that the ridges and valleys of the concavo-convex pattern are composed of straight lines. The optical component according to claim 3,
The optical periodic component on the transparent dielectric substrate has an island shape, a band shape, or an island-like pattern shape connected by a band. The optical component according to claim 4,
An inverse opal crystal on a transparent dielectric substrate has an island shape, a band shape, or an island-like pattern shape connected by a band. An optical component manufacturing method for manufacturing the optical component according to claim 2, 3 or 4,
After the crystal orientation of the dielectric periodic structure is determined by measurement, the transparent dielectric substrate has a convex or concave shape in a cross section parallel to an arbitrary {110} plane of the dielectric periodic structure. A method for manufacturing an optical component, characterized by comprising: An optical component manufacturing method for manufacturing the optical component according to claim 5,
One surface has a concave shape or a convex shape along an arbitrary linear axis, and the other surface of the dielectric substrate is an island shape in which the ridges and valleys of the concave-convex pattern are formed by straight lines. Or manufacturing an optical component characterized in that an opal crystal is grown on the side having a concavo-convex pattern of a transparent dielectric substrate having an concavo-convex pattern of islands connected by bands or bands. Method. An optical component manufacturing method for manufacturing the optical component according to claim 6,
10. A method of manufacturing an optical component, wherein after the step according to claim 9, a fluid is injected between the spherical particles of the transparent dielectric 1 of opal crystal and solidified to form the transparent dielectric 2. An optical component manufacturing method for manufacturing the optical component according to claim 7,
Transparent dielectric with one side of the substrate for opal crystal growth having an island-like concavo-convex pattern in which the ridges and valleys of the concavo-convex pattern are constituted by straight lines, or strips, or islands connected by strips After forming the opal crystal on the side of the body substrate having the concavo-convex pattern, the surface on one side of the substrate becomes the plane of the transparent dielectric substrate that is concave or convex along an arbitrary linear axis The opal crystal is sandwiched between the spherical particles of the opal crystal, and a fluid is injected between the opal crystals to solidify it to form a transparent dielectric, and then the spherical particles and the opal crystal growth substrate are removed. A method for manufacturing an optical component.

Images