JP2006242571A - Apparatus for measuring three-dimensional shape - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an apparatus for measuring three-dimensional shape with a simple configuration, high distance resolution, and capability of measuring the three-dimensional shape of objects to be measured in a short time. <P>SOLUTION: When signal optical pulses Ls is irradiated to an object 17 to be measured, reflected optical pulses Ls<SB>10</SB>that reflects at the surface 17a of the object 17 take a deformed shape reflecting the distance (height) of the surface 17a of the object 17. The reflected optical pulses Ls<SB>10</SB>are cut out by a light switch 30 at timings T<SB>1</SB>-T<SB>4</SB>. The cutout reflected optical pulses Ls<SB>11</SB>, Ls<SB>12</SB>, Ls<SB>13</SB>, Ls<SB>14</SB>are imaged by a camera 35 for measurement to acquire contour-line images 40a-40d made of contour lines Ls<SB>11</SB>'-Ls<SB>14</SB>'. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a three-dimensional shape measuring apparatus that irradiates a measurement object with light, receives reflected light from the measurement object, and performs three-dimensional measurement of the measurement object.

  As a method of measuring the three-dimensional shape of an object using light, there are many methods using a triangulation measurement using a three-dimensional camera, and the distance is determined from the positional relationship between a light source, an object, and a light receiving element (for example, Patent Literature 1 and 2).

  As other conventional three-dimensional shape measuring methods, intensity-modulated light is used as illumination light, and an electric shutter is used to cut out reflected light (see, for example, Patent Documents 3 and 4), or chirped ultrashort. A method using a pulse (see, for example, Patent Document 5) is known.

  A conventional method using a chirped ultrashort pulse divides pulse light emitted from a pulse light source into two light pulses, and generates a chirped light pulse whose color changes regularly from one of the light pulses. A color two-dimensional detector using an ultrafast nonlinear optical shutter that irradiates the object to be measured with the chirped light pulse, uses the other light pulse as excitation light, and reflects and reflects the reflected light from the object to be measured with the excitation light. The three-dimensional shape is measured by acquiring a colored contour map.

JP 2003-85534 A JP 2003-329424 A JP 2000-121339 A (FIG. 10) Japanese Patent Laying-Open No. 2004-45266 (FIG. 14) JP-A-7-229725 ([0029], [0030], FIG. 4)

  However, the conventional measurement method using triangular measurement has a drawback that the accuracy is deteriorated as the distance of the object is increased. In addition, time-consuming information processing such as difference calculation between images is required. In the conventional measurement method using an electric shutter, the distance resolution of cm level is the limit because the opening / closing speed of the electric shutter is slow. In addition, since intensity-modulated light is used as illumination light and the distance is obtained from the obtained bright and dark image, it is difficult to perform distance measurement with high accuracy. In addition, the conventional measurement method using the chirped ultrashort light pulse requires a complicated device such as a spectral light-receiving device for detecting the distance by wavelength.

  Accordingly, an object of the present invention is to provide a three-dimensional shape measuring apparatus that has a simple configuration, has high distance resolution, and can measure the three-dimensional shape of a measurement object in a short time.

  In order to achieve the above-described object, the present invention provides an irradiation unit that irradiates a measurement object with a light pulse, and an image that cuts out and captures a reflected light pulse reflected from the measurement object by irradiation of the light pulse at a predetermined timing. And a three-dimensional shape measuring apparatus.

  According to the above apparatus, the reflected light pulse reflected from the measurement object is deformed reflecting the uneven shape of the surface of the measurement object. A contour image can be acquired by cutting out and imaging the deformed reflected light pulse at a predetermined timing.

  The irradiation means includes a pulse light source that emits a light pulse, and a split optical system that divides the light pulse emitted from the pulse light source into a light pulse that irradiates a measurement target and a control light pulse, and the imaging means includes Preferably, the optical path of the reflected light pulse is provided with an optical shutter that opens and closes by the control light pulse, and a camera that captures and captures the reflected light pulse by opening and closing the optical shutter. By using an optical shutter, it can be opened and closed at high speed. Further, since it is difficult to be affected by disturbances such as vibration, stable imaging can be performed.

  The imaging unit includes an optical path length scanning unit that scans the optical path length of the control light pulse in a predetermined range and opens and closes the optical shutter multiple times, and the camera captures and captures the reflected light pulse at a plurality of timings. It is good also as a structure. According to this configuration, the reflected light pulse can be imaged continuously or intermittently.

  The imaging means includes a wavelength conversion unit that converts the wavelength of the reflected light pulse or the control light pulse, a control light cut filter that is provided after the optical shutter and cuts the wavelength of the control light pulse, and transmits the control light cut filter. It is good also as a structure provided with the camera which images the reflected light pulse which performed. According to this configuration, only the reflected light pulse can be imaged, and the S / N ratio is improved.

  The imaging means includes a reference camera that captures a reflected light pulse before the optical shutter to acquire a luminance image, a measurement camera that captures a reflected light pulse after the optical shutter to acquire a contour image, and a contour line. It is good also as a structure provided with the process part which adds the brightness | luminance information which a brightness | luminance image has to an image, and forms a process image. By adding luminance information to the contour image, a processed image reflecting the reflectance of the surface of the measurement object can be obtained.

  The irradiation unit preferably includes a pulse light source that emits a light pulse, and a continuous pulse generator that generates a plurality of light pulses continuous from the light pulse emitted from the pulse light source and irradiates the measurement object. . As a result, it is possible to generate a plurality of light pulses having a constant light pulse interval.

  The continuous pulse generator is provided with a half mirror that divides an optical pulse introduced from a pulse light source into two optical pulses, and is provided at a predetermined position. It is good also as a structure provided with a pair of right angle reflective surface which generate | occur | produces one optical pulse. By increasing the pair of right-angle reflecting surfaces, the number of continuous light pulses can be increased.

  In the continuous pulse generator having the half mirror and the pair of right-angle reflecting surfaces, the optical path between the half mirror and the pair of right-angle reflecting surfaces is preferably formed of a transparent medium. Thereby, the positional accuracy of the half mirror and the right-angle reflecting surface is increased, and it becomes easy to ensure the accuracy of the interval between the light pulses and the emission direction.

  The irradiating unit may irradiate the measurement object with the optical pulse train through the observation fiber, and the imaging unit may image the optical pulse train reflected from the measurement object through the observation fiber. Thereby, it can apply to a medical fiberscope, an industrial fiberscope, etc.

  According to the three-dimensional shape measuring apparatus of the present invention, the configuration is simple, the distance resolution is high, and the three-dimensional shape of the measurement object can be measured in a short time.

[First Embodiment]
FIG. 1 shows a configuration of a three-dimensional shape measuring apparatus according to a first embodiment of the present invention. The three-dimensional shape measuring apparatus 10 includes a pulse light source 11 that emits a light pulse L, a half-wave plate 12 that tilts the polarization direction of the light pulse L of the pulse light source 11 in a predetermined direction, and a light pulse from the half-wave plate 12. A first polarization beam splitter 13A as a splitting optical system that splits L into a signal light pulse Ls and a control light pulse Lc according to the polarization direction;

Further, a continuous pulse generator 14 for generating a plurality of continuous signal light pulses Ls _{1 to} Ls ₄ by inputting the signal light pulse Ls from the first polarization beam splitter 13A on the optical path of the signal light pulse Ls, The signal light pulses Ls _{1 to} Ls ₄ emitted from the pulse generator 14 through the magnifying optical system 15 are irradiated to the measurement object 17 side through the second polarizing beam splitter 13B and the λ / 4 wavelength plate 16. . The signal light pulses Ls _{1 to} Ls ₄ reflected from the measurement object 17 are incident again on the polarization beam splitter 13B through the λ / 4 wavelength plate 16 and reflected to the measurement camera 35 side.

  An optical path length scanning unit 19 that scans the optical path length of the control light pulse Lc emitted from the first polarizing beam splitter 13A via the reflection mirror 18 within a predetermined range on the optical path of the control light pulse Lc, and a control A wavelength conversion unit 20 that converts the wavelength of the light pulse Lc to a wavelength different from that of the signal light pulse Ls is provided.

Further, the apparatus 10 reflects the reflected light pulse Ls ₁₀ from the measurement object 17 reflected by the second polarizing beam splitter 13B and introduced through the condenser lens 21, the collimating lens 22, the polarizer 23, and the beam splitter 24. ˜Ls ₄₀ and the control light pulse Lc from the wavelength conversion unit 20 are combined with the dichroic prism 27, and the combined light is introduced through the condenser lens 28 and the pinhole 29 to reflect the reflected light pulses Ls _{10 to} Ls _40. An optical switch 30 for changing the polarization state of the light, an analyzer 32 for introducing the reflected light pulses Ls _{10 to} Ls ₄₀ from the optical switch 30 through the collimator lens 31, and a control light pulse among the light transmitted through the analyzer 32. The control light cut filter 33 that cuts the frequency component of the light and the reflected light pulse that has passed through the control light cut filter 33 are imaged via the imaging optical system 34. Measurement camera 35, reference camera 26 that captures the reflected light pulse from measurement object 17 as a luminance image via beam splitter 24 and coupling optical system 25, and reference camera for the imaging results of measurement camera 35 And a signal processing unit 36 for processing using the 26 imaging results.

  Next, the detail of each part of this apparatus 10 is demonstrated.

  The pulsed light source 11 may be a pulsed light source such as a mode-locked titanium sapphire laser, erbium or yttrium-doped mode-locked fiber laser that emits ultrashort pulsed light having a pulse width of about picoseconds to femtoseconds.

  The optical path length scanning unit 19 includes a driving unit such as a piezoelectric element and a motor that scans the pair of reflection mirrors 190a and 190b that reflect the introduced control light pulse Lc within a predetermined range, and outputs a position signal corresponding to the scanning range. Is configured to do.

  The wavelength conversion unit 20 can use a polarization maintaining optical fiber having a wavelength shift characteristic corresponding to the incident light intensity of the ultrashort pulsed light and the fiber length.

The reference camera 26 images the reflected light pulses Ls _{10 to} Ls ₄₀ from the measurement object 17 via the beam splitter 24 and the coupling optical system 25 by a surface photoelectric conversion element such as a CCD camera, and the measurement object 17. A luminance image reflecting the reflectance of the surface 17a is acquired.

  The optical switch 30, the polarizer 23, and the analyzer 32 constitute a Kerr shutter that is one of the optical shutters. The optical switch 30 used for the Kerr shutter is a surface type and has a practically preferable nonlinear optical characteristic, is short in the pulse width of the light pulse used for the opening and closing time of the shutter, and is chemically and thermally. And optically stable. From the above viewpoint, as the optical switch 30, for example, a dye-aggregate thin film made of squarylium J-aggregate as disclosed in JP-A-11-282034, disclosed in JP-A-2000-314901. As described above, a dye aggregate film made of squarylium dye or the like that causes a change in optical properties due to two-photon absorption can be used. In addition, as an optical switch material having high-speed response, Si, GaAs, ZnSe, Semiconductors such as CdTe, phthalocyanine dyes, π-conjugated polymers such as polydiacetylene and polythiophene, fullerene thin films such as C60 and C70, and the like can be used.

  The measurement camera 35 is a surface photoelectric conversion element such as a CCD camera that captures a signal light pulse cut by the opening / closing operation of the optical switch 30, and displays a contour image including distance information to the surface 17 a of the measurement target 17. Take an image.

  The signal processing unit 36 generates a distance image based on the plurality of contour images continuously captured by the measurement camera 35 and the position signal from the optical path length scanning unit 19, and the luminance image from the reference camera 26. Is used to generate a processed image in which luminance information is added to the distance image. As the distance image, an image obtained by combining a plurality of contour images and adding shade information or color information corresponding to the distance (height) is conceivable. For example, the contour line having a shorter distance to the surface 17a of the measurement object 17 may be expressed by a bright emission line or a color having a longer wavelength.

(Continuous pulse generator)
FIG. 2 shows a detailed configuration of the continuous pulse generator 14. The continuous pulse generator 14 is configured to adjust the first optical path length to the first and second right-angle prisms 140 and 141 joined on the inclined surface via the half mirror 142 and the first surface 140 a of the first right-angle prism 140. The third right-angle prism 144 joined via the parallel plate 143A, the fourth right-angle prism 145 joined to the second surface 140b of the first right-angle prism 140, and the first right-angle prism 141 first. A fifth right-angle prism 146 bonded to the surface 141a, and a sixth right-angle prism 147 bonded to the second surface 141b of the second right-angle prism 141 via the second optical path length adjusting parallel plate 143B. Prepare. Note that the pair of surfaces that turn back the pulses of the third to sixth right-angle prisms 144 to 147 constitute a pair of right-angle reflection surfaces.

When an incident pulse (signal light pulse Ls) is incident on the first surface 140a of the first right-angle prism 140 of the continuous pulse generator 14 configured as described above, the half mirror 142 divides the pulse into a pulse b and a pulse b. The pulse a is turned back by the fourth right-angle prism 145 and then divided by the half mirror 142 into a pulse a ₁ and a pulse a ₂ . On the other hand, the pulse b is then folded in a sixth rectangular prism 147 through the second optical path length adjustment parallel plate 143B, is split by the half mirror 142 to the pulse _{b 1} and the pulse _{b 2.} Duplex pulses a ₁ and b ₁ are generated in the first right-angle prism 140, and double-pulses a ₂ and b ₂ are generated in the second right-angle prism 141. Double pulses _a 1, _{b 1} interval, the two consecutive pulses _a 2, _{b 2} intervals, and the thickness of the second optical path length adjustment parallel plate 143B [Delta] L, the refractive index is n, the 2nΔL respectively .

The double pulses a ₁ and b ₁ generated in the first right-angle prism 140 are turned back by the third right-angle prism 144 via the first optical path length adjusting parallel plate 143A and then double-lined by the half mirror 142. The pulse is divided into pulses a ₃ and b ₃ and double pulses a ₄ and b ₄ . On the other hand, the double pulses a ₂ and b ₂ generated in the second right-angle prism 141 are turned back by the fifth right-angle prism 146 and then the double pulses a ₅ and b ₅ and the double pulse a are formed by the half mirror 142. _6, is divided into _{b 6.} The first quadruple pulse _{a 5, b 5, a 4} , b 4 is emitted from the second surface 140b of the right-angle prism 140, first from second surface 141b quadruple pulse _a 6 second right angle prism 141, b ₆ , a ₃ , b ₃ are emitted. The interval between the quadruple pulses a ₅ , b ₅ , a ₄ , b _{4 and} the interval between the quadruple pulses a ₆ , b ₆ , a ₃ , b ₃ are determined by the thickness of the first optical path length adjusting parallel plate 143A. When 2ΔL and the refractive index are n, 2nΔL respectively. The quadruple pulses a ₆ , b ₆ , a ₃ and b ₃ are used for shape measurement as signal light pulses Ls _{1 to} Ls ₄ .

  The number of continuous pulses is not limited to four, and an arbitrary number of continuous pulses can be generated. For example, the first and second right-angle prisms 140 and 141 are enlarged, two right-angle prisms are provided on the second surface 140b of the first right-angle prism 140, and two on the second surface 141b of the second right-angle prism 141 By providing a right-angle prism, it is possible to generate an 8-series pulse. Further, the continuous pulse generator 14 can also be composed of a half mirror and a reflection mirror without using a transparent medium.

(Measurement principle)
Next, the measurement principle will be described with reference to FIGS. FIG. 3 shows a case where a single signal light pulse is used, and FIG. 4 shows a case where a plurality of continuous signal light pulses are used. Here, the measurement object 17 is described as a sphere. As shown in FIG. 3, when one signal light pulse Ls is irradiated onto the spherical measurement object 17, the reflected light pulse Ls ₁₀ reflected by the surface 17 a of the measurement object 17 causes the distance to the surface 17 a of the measurement object 17. It becomes a deformed shape reflecting (height). When the control light pulse Lc is scanned by the optical path length scanning unit 19 and the optical switch 30 is operated at timings T _{1 to} T ₄ , the optical switch 30 cuts out the reflected light pulse Ls ₁₀ at each timing T _{1 to} T _4. Reflected light pulses Ls ₁₁ , Ls ₁₂ , Ls ₁₃ and Ls ₁₄ are emitted. The extracted reflected light pulses Ls ₁₁ , Ls ₁₂ , Ls ₁₃ , and Ls ₁₄ are imaged by the measurement camera 35 to obtain four contour images 40a to 40d as shown in FIG. Contour lines Ls ₁₁ ′ to Ls ₁₄ ′ appear in each image 40 a to 40 d.

Next, as shown in FIG. 4, a case where a spherical measurement object 17 is irradiated with _four signal light pulses Ls _{1 to} Ls ₄ will be described. When the measurement object 17 is irradiated with _four signal light pulses Ls _{1 to} Ls ₄ , the reflected light pulses Ls _{10 to} Ls ₄₀ reflected by the surface 17 a of the measurement object 17 are respectively separated from the surface 17 a of the measurement object 17 ( The shape reflects the height. When the control light pulse Lc is scanned by the optical path length scanning unit 19 and the optical switch 30 is operated at timings T _{1 to} T ₄ , the optical switch 30 emits the reflected light pulse Ls ₁₁ at the first timing T ₁ , and then timing _{T 2} of the reflected light pulse Ls _12, Ls ₂₁ emits, the reflected light pulse Ls _13, Ls _22, Ls ₃₁ emitted at the next timing _{T 3,} the reflected light pulse Ls ₁₄ at the next timing _{T 4,} emits _{ls 23, ls 32, ls 41} , emits the reflected light pulse ls _24, ls _33, ls ₄₂ at the next timing _{T 5,} emits the reflected light pulse ls _34, ls ₄₃ at the next timing _{T 6} emits the reflected light pulse Ls ₄₄ at the end of the timing T _6. At each timing, the reflected light pulse is captured by the measurement camera 35, and seven contour image images 40a to 40g are obtained. Contour lines Ls _{10 to} Ls ₄₀ ′, Ls _{11 to} Ls ₁₄ ′, Ls _{22 to} Ls ₂₄ ′, Ls _{32 to} Ls ₃₄ ′, and Ls _{41 to} Ls ₄₄ ′ appear in each image _{40 a to 40} g.

(Operation of the first embodiment)
Next, the operation of the first embodiment will be described. When the light pulse L is emitted from the pulse light source 11, the polarization direction of the light pulse L is tilted to a predetermined direction by the half-wave plate 12, and the signal light pulse Ls is generated by the first polarization beam splitter 13A. And the control light pulse Lc.

When the signal light pulse Ls from the first polarization beam splitter 13A is incident on the continuous pulse generator 14, a continuous pulse generator 14, four optical signal pulse Ls ₁ ～Ls ₄ consecutive as described in FIG. 2 The generated signal light pulses Ls _{1 to} Ls ₄ are incident on the λ / 4 wavelength plate 16 via the second polarizing beam splitter 13B after the beam diameter is expanded by the magnifying optical system 15, and λ / 4 The wave plate 16 becomes circularly polarized light and is irradiated onto the measurement object 17. The light reflected by the surface 17a of the measurement object 17 becomes linearly polarized light by the λ / 4 wavelength plate 16, and is reflected by the second polarizing beam splitter 13B to the measurement camera 35 side.

The reflected light pulses Ls _{10 to} Ls ₄₀ reflected from the measurement object 17 reflected by the second polarization beam splitter 13B enter the dichroic prism 27 via the condenser lens 21, the collimator lens 22, the polarizer 23, and the beam splitter 24. To do.

On the other hand, the control light pulse Lc from the first polarization beam splitter 13A is scanned by the optical path length scanning unit 19 and then wavelength-converted by the wavelength conversion unit 20, and then enters the dichroic prism 27. The reflected light pulses Ls _{10 to} Ls ₄₀ from the measurement object 17 are combined.

The combined light enters the optical switch 30 through the condenser lens 28 and the pinhole 29. The optical switch 30 induces anisotropy only when the incident timings of the reflected light pulses Ls _{10 to} Ls ₄₀ and the control light pulse Lc coincide, and changes the polarization state of the reflected light pulses Ls _{10 to} Ls ₄₀ , The analyzer 32 is transmitted through the collimating lens 31.

Measuring camera 35 is captured by the reflected light pulse Ls ₁₀ ~Ls ₄₀ cut out by the opening and closing operation of the optical switch 30, to obtain a plurality of contour images 40a~40g as described in FIG. On the other hand, the reference camera 26 images the reflected light pulses Ls _{10 to} Ls ₄₀ from the measurement object 17 and acquires a luminance image reflecting the reflectance of the surface 17 a of the measurement object 17.

  The signal processing unit 36 generates a distance image based on the plurality of contour images continuously captured by the measurement camera 35 and the position signal from the optical path length scanning unit 19, and the luminance image from the reference camera 26. A processed image in which luminance information is added to the distance image is generated based on the above.

(Effects of the first embodiment)
According to the first embodiment, since the ultrashort optical pulse having a pulse width of about picosecond to femtosecond is used, the surface shape of the measurement object can be measured with high resolution. Further, since the control light cut filter 33 that transmits only the reflected light pulse is disposed in front of the measurement camera 35, the S / N ratio in the shape measurement can be improved. In addition, since the optical shutter responds faster than the electric shutter, the surface shape can be measured with high resolution.

[Second Embodiment]
FIG. 5 shows a three-dimensional shape measuring apparatus according to the second embodiment of the present invention. In the three-dimensional shape measuring apparatus 10 according to the second embodiment, the wavelength converter 20 is arranged in the optical path of the signal light pulse Ls in the first embodiment, and the others are the first embodiment. It is comprised similarly to a form. Also with this configuration, the same effect as in the first embodiment can be obtained.

[Third Embodiment]
FIG. 6 shows a three-dimensional shape measuring apparatus according to the third embodiment of the present invention. The three-dimensional shape measuring apparatus 10 according to the third embodiment is an application of the first embodiment to a fiberscope. However, unlike the first embodiment, the magnifying optical system 15, the condensing lens 21, and the collimating lens 22 are omitted, and a fiber coupling lens is provided between the λ / 4 wavelength plate 16 and the measurement object 17. 37, an imaging fiber 38 and a collimating lens 39 are disposed. According to this configuration, it can be applied to medical fiberscopes such as gastric cameras, industrial fiberscopes such as in-tube exploration, and the like.

[Other embodiments]
The present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the present invention. For example, the constituent elements of each embodiment can be arbitrarily combined within a range that does not change the gist of the present invention.

It is a figure which shows the structure of the three-dimensional shape measuring apparatus which concerns on the 1st Embodiment of this invention. It is a figure which shows the detailed structure of a continuous pulse generation part. It is a figure which shows the measurement principle at the time of using the single signal light pulse of this invention. It is a figure which shows the measurement principle at the time of using the continuous signal light pulse of this invention. It is a figure which shows the structure of the three-dimensional shape measuring apparatus which concerns on the 2nd Embodiment of this invention. It is a figure which shows the structure of the three-dimensional shape measuring apparatus which concerns on the 3rd Embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Three-dimensional shape measuring apparatus 11 Pulse light source 12 Half wave plate 13A, 13B Polarization beam splitter 14 Continuous pulse generation part 15 Magnification optical system 16 (lambda) / 4 wavelength plate 17 Measurement object 17a Surface 18 Reflection mirror 19 Optical path length scanning part 20 Wavelength Conversion unit 21 Condensing lens 22 Collimating lens 23 Polarizer 24 Beam splitter 25 Coupled optical system 26 Reference camera 27 Dichroic prism 28 Condensing lens 29 Pinhole 30 Optical switch 31 Collimating lens 32 Analyzer 33 Control light cut filter 34 Imaging Optical system 35 Measurement camera 36 Signal processing unit 37 Fiber coupling lens 38 Imaging fiber 39 Collimating lens 40a-40g Contour image 140, 141 Right angle prism 140a, 140b, 141a, 141b Surface 142 Half mirror 14 3A, 143B pathlength adjusting parallel plate 144-147 rectangular prism 190a, 190b reflecting mirror Lc control pulse Ls optical signal pulse _{Ls 10 ~Ls 40, Ls 11 ~Ls} 14, Ls 22 ~Ls 24, Ls 32 ~Ls 34 , Ls _{41 to} Ls ₄₄ reflected light pulse T _{1 to} T ₆ timing

Claims (9)

Irradiating means for irradiating the measurement object with a light pulse;
A three-dimensional shape measuring apparatus comprising: an imaging unit that cuts out and captures a reflected light pulse reflected from the measurement object by irradiation of the light pulse at a predetermined timing. The irradiation means includes a pulse light source that emits a light pulse, and a split optical system that divides the light pulse emitted from the pulse light source into the light pulse and the control light pulse that irradiate the measurement object,
The imaging means includes an optical shutter that is provided in an optical path of the reflected light pulse, and that opens and closes by the control light pulse, and a camera that cuts and captures the reflected light pulse by opening and closing the optical shutter. The three-dimensional shape measuring apparatus according to claim 1, wherein The imaging means includes an optical path length scanning unit that scans the optical path length of the control light pulse in a predetermined range and opens and closes the optical shutter a plurality of times.
The three-dimensional shape measuring apparatus according to claim 2, wherein the camera captures and captures the reflected light pulse at a plurality of timings.   The imaging means includes a wavelength conversion unit that converts the wavelength of the reflected light pulse or the control light pulse, a control light cut filter that is provided at a subsequent stage of the optical shutter and cuts the wavelength of the control light pulse, and the control The three-dimensional shape measuring apparatus according to claim 2, further comprising a camera that images the reflected light pulse transmitted through the light cut filter.   The imaging means includes a reference camera that captures the reflected light pulse before the optical shutter to acquire a luminance image, and a measurement camera that captures the reflected light pulse after the optical shutter to acquire a contour image. The three-dimensional shape measuring apparatus according to claim 2, further comprising: a camera; and a processing unit that adds brightness information of the brightness image to the contour line image to form a processed image.   The irradiation means includes a pulse light source that emits a light pulse, and a continuous pulse generation unit that generates a plurality of light pulses continuous from the light pulse emitted from the pulse light source and irradiates the measurement object. The three-dimensional shape measuring apparatus according to claim 1.   The continuous pulse generator is provided at a predetermined position with a half mirror that divides the light pulse introduced from the pulse light source into two light pulses, and the two light pulses are folded back and split by the half mirror. The three-dimensional shape measuring apparatus according to claim 6, further comprising a pair of right-angle reflecting surfaces that generate two continuous light pulses.   The three-dimensional shape measuring apparatus according to claim 6, wherein the continuous pulse generator includes a transparent medium in an optical path between the half mirror and the pair of right-angle reflecting surfaces. The irradiation means irradiates the object to be measured with the optical pulse through an observation fiber,
The three-dimensional shape measuring apparatus according to claim 1, wherein the imaging unit images the reflected light pulse through the observation fiber.