JP2006239508A - Liquid drop discharging apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid drop discharging apparatus which irradiates a liquid drop containing a functional material discharged from the outlet with laser light to efficiently conduct the drying and sintering. <P>SOLUTION: The controlling part 43 outputs the Latch signal LAT for driving a piezoelectric element 34 to discharge the liquid drop to a head driving circuit 51. The delayed pulse production circuit 61 of the laser driving circuit 52 outputs the switching signal GS 2 for driving the semiconductor laser L when the waiting time lapses from the falling of the Latch signal LAT. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a droplet discharge device.

  Conventionally, electro-optical devices such as liquid crystal display devices and organic electroluminescence display devices (organic EL display devices) have a plurality of electro-optical elements formed on a substrate. In general, a unique identification code such as a production number or a two-dimensional code obtained by coding the production number is drawn on this type of substrate for the purpose of quality control, product management, or the like. This identification code is read and decoded by a dedicated code reader as a recognition means.

  As a method of drawing an identification code on this substrate, a film with a metal foil is faced to the substrate (glass substrate) and laser light is irradiated to transfer the metal film to the substrate to form a mark on the substrate or polishing. There has been proposed a method in which water containing a material is sprayed onto a substrate or the like, and a number or the like is imprinted on the substrate (Patent Document 1 and Patent Document 2).

By the way, each of the above drawing methods has many drawing processes, and there is a problem that the apparatus is expensive and large. Therefore, there is an inkjet method that is inexpensive and small in size, and that can be drawn in a short time. In the ink jet method, a functional liquid (ink droplet) is discharged from a discharge nozzle onto a substrate using a droplet discharge device to form an identification code pattern such as a two-dimensional barcode.
Japanese Patent Laid-Open No. 11-77340 JP 2003-127537 A

  By the way, the ink jet method includes a step of drying the ink landed on the substrate to sinter the functional material so as to adhere to the substrate. This drying / sintering process was performed in a subsequent process, resulting in a large number of processes and poor work efficiency. Therefore, efficient drying and sintering have been desired in the ink jet method.

  The present invention has been made in order to solve the above-mentioned problems, and the purpose thereof is to irradiate droplets containing a functional material discharged from a discharge port with a laser beam with high accuracy, and to perform efficient drying and sintering. It is an object of the present invention to provide a droplet discharge device that can perform the above operation.

  The droplet discharge device of the present invention is a liquid that discharges a liquid material containing a functional material stored in a pressure chamber as droplets from the discharge port of the pressure chamber by pressurizing the pressure chamber by a pressurizing means. In the droplet discharge device, a laser output unit for irradiating the droplet discharged from the discharge port with laser light, and a drive control of the laser output unit relative to the pressurizing operation of the pressurizing unit And laser emission control means.

  According to this droplet discharge device, the laser output to the droplet by the laser output means is performed based on the pressurizing operation of the pressurizing means that causes the laser emission control means to discharge the droplet. The position of the droplet can be accurately grasped, and the functional material can be sintered by immediately irradiating the droplet with laser light and drying the droplet immediately.

In the liquid droplet ejection apparatus, the laser emission control unit is configured to take a time from the pressurization operation of the pressurization unit until the liquid droplet ejected from the ejection port reaches the laser beam irradiation position of the laser output unit. Based on this, the laser output means may be driven and controlled.

  According to this droplet apparatus, the laser emission control unit can control the laser output unit to irradiate the laser beam onto the droplet when the droplet reaches the laser beam irradiation position of the laser output unit. The liquid droplets discharged from the outlet can be dried to sinter the functional material.

  In this droplet discharge device, the laser emission control unit controls the laser output unit based on the time from the pressurizing operation of the pressurizing unit until the droplet discharged from the discharge port lands on the landing surface. You may make it drive-control.

  According to this droplet discharge device, the laser emission control means can control the laser output means so as to irradiate laser light to the landed droplet immediately and reliably when the droplet reaches the landing surface. The functional material in the droplet discharged from the outlet can be reliably fixed on the landing surface.

  In this droplet discharge device, the laser emission control means starts from the pressurizing operation of the pressurizing means until the landing surface of the droplet discharged from the discharge port reaches the laser light irradiation position of the laser output means. The laser output means may be driven and controlled on the basis of this time.

  According to this droplet discharge device, the laser emission control unit can control the laser output unit so as to reliably irradiate the droplet landed on the landing surface with the laser beam, and the laser output control unit can control the laser output unit in the droplet discharged from the discharge port. The functional material can be reliably fixed on the landing surface.

  In this droplet discharge apparatus, the laser emission control means includes a time measuring means, and starts the time measuring operation from the pressurizing operation of the pressurizing means, and drives and controls the laser output means after a predetermined time elapses. Good.

  According to this droplet discharge device, the timing unit counts the time from the pressurization operation of the pressurizing unit to the time when the droplet reaches the irradiation position after starting the timing operation. The laser emission control means drives and controls the laser output means based on the time measurement result of the time measurement means.

In this liquid droplet ejection apparatus, the laser output means may be a semiconductor laser.
According to this droplet discharge device, the droplet is dried by the laser beam irradiated from the semiconductor laser, and the functional material is sintered.

In this droplet discharge device, the pressurizing means may be a piezoelectric element.
According to this droplet apparatus, the pressure chamber is pressurized by applying a voltage to expand and contract the piezoelectric element, and the droplet is ejected from the ejection port.

In the droplet discharge device of the present invention, the liquid materials containing the functional materials respectively stored in the plurality of pressure chambers are pressurized by the pressure chambers provided for the respective pressure chambers. In the droplet discharge device that discharges each droplet as a droplet from the discharge port provided for each pressure chamber,
A laser output unit provided for each pressurizing unit for irradiating the droplets ejected from the discharge port with laser light, and a discharge operation from each pressurizing unit according to the pressurizing operation of each pressurizing unit. And a laser emission control means for driving and controlling the corresponding laser output means on the basis of the time until each of the droplets reaches the laser light irradiation position of the corresponding laser output means. .

According to this droplet apparatus, the laser emission control means, when each droplet reaches the laser beam irradiation position of the laser output means from the pressurizing operation of each pressurizing means, to the corresponding laser output means. The droplet can be controlled to be irradiated with laser light, and the droplet discharged from the discharge port can be dried to sinter the functional material.

  In this droplet discharge device, each of the pressurizing units is driven to pressurize by a corresponding pressurizing control unit, and each pressurizing control unit performs pressurizing operation timing of each of the pressurizing units based on a discharge control signal. And pressurizing and driving the corresponding pressurizing means, and the laser emission control means outputs each laser output based on the time from the pressurizing operation timing until each corresponding droplet reaches the landing surface. The means may be driven and controlled.

  According to this droplet discharge device, the laser emission control unit irradiates each laser beam with the corresponding laser output unit when each droplet lands on the respective landing surface. The droplets discharged from the discharge ports can be simultaneously dried and simultaneously dried to sinter the functional material.

  In this droplet discharge device, each of the pressurizing units is driven to pressurize by a corresponding pressurizing control unit, and each pressurizing control unit performs pressurizing operation timing of each of the pressurizing units based on a discharge control signal. The corresponding pressurizing unit is pressurized and driven, and the laser emission control unit reaches the laser beam irradiation position of the corresponding laser output unit from the respective pressurizing operation timings. Each of the laser output means may be driven and controlled based on the time taken to do so.

  According to this droplet discharge device, the laser emission control means landed on the landing surface based on the time from the pressing operation timing of each pressing means until the landing surface of each droplet reaches the laser irradiation position. In order to control the emission timing of each laser output means by judging that each droplet has reached the laser irradiation position, the droplets discharged from each discharge port are dried simultaneously on the landing surface and the functional material is sintered. Can be made.

Hereinafter, embodiments of the present invention will be described with reference to FIGS.
First, a display module of a liquid crystal display device on which a dot pattern formed using a droplet discharge device is drawn will be described. 1 is a front view of a liquid crystal display module of the liquid crystal display device, FIG. 2 is a front view of a dot pattern formed on the back surface of the liquid crystal display module, and FIG. 3 is a side view of the dot pattern formed on the back surface of the liquid crystal display module. is there.

  In FIG. 1, a liquid crystal display module 1 includes a glass substrate 2 as a light-transmissive display substrate. A rectangular display unit 3 in which liquid crystal is sealed is formed at a substantially central position of the surface 2 a of the glass substrate 2, and a scanning line driving circuit 4 and a data line driving circuit 5 are formed outside the display unit 3. ing.

  A dot pattern 10 composed of dots D of the display module 1 is formed at the right corner of the back surface 2 b as the landing surface of the glass substrate 2. As shown in FIG. 2, the dot pattern 10 is composed of a plurality of dots D formed in the pattern formation region Z1. A predetermined blank area Z2 is formed on the outer periphery of the pattern formation area Z1. The dot pattern 10 formed in the pattern formation region Z1 is a two-dimensional code in this embodiment, and is read by a two-dimensional code reader. The blank area Z2 is an area in which the dot D is not formed, and prevents the two-dimensional code reader from specifying the pattern formation area Z1 and erroneously detecting the dot pattern 10 in the pattern formation area Z1. It is an area.

The pattern formation region Z1 is a square region of 1 to 2 mm square, and as shown in FIG.
Virtually divided into 16 rows × 16 columns of cells C, dots D are selectively formed for the divided cells C. The cell C in which the dot D is formed in the divided cell C is referred to as a black cell C1, and the cell C in which the dot D is not formed in the cell C is referred to as a white cell C0 (non-formation region). Then, dots D are selectively formed for each cell C of 16 rows × 16 columns, and a dot pattern 10 (two-dimensional code) for identifying the display module 1 constituted by each dot D is formed. The

  The dots D formed in the black cell C1 (dot region) are formed in close contact with the glass substrate 2 in a hemispherical shape as shown in FIGS. In this embodiment, the dot D is formed by an ink jet method. More specifically, the dot D represents a droplet Cb of a functional liquid Fa (see FIG. 8) as a liquid containing a manganese fine particle as a functional material from a discharge nozzle N of a droplet discharge device 20 described later in a cell C (black). Discharge into cell C1). Next, the droplet Fb landed on the black cell C1 is dried to sinter the manganese fine particles, whereby hemispherical dots D made of manganese adhered to the glass substrate 2 are formed. The drying / sintering is performed by irradiating the droplet Fb landed on the glass substrate 2 (black cell C1) with laser light.

Next, the droplet discharge device 20 used for forming the dot pattern 10 on the back surface 2b of the glass substrate 2 will be described.
FIG. 5 is a perspective view showing a configuration of a droplet discharge device 20 that discharges droplets Fb for forming the dot pattern 10 on the back surface 2b of the glass substrate 2. FIG.

  As shown in FIG. 5, the droplet discharge device 20 includes a base 21 formed in a rectangular parallelepiped shape. In the present embodiment, the longitudinal direction of the base 21 is the Y arrow direction, and the direction orthogonal to the Y arrow direction is the X arrow direction.

A pair of guide concave grooves 22 extending in the Y arrow direction are formed on the upper surface 21a of the base 21 over the entire width in the Y arrow direction. A stage 23 having a linear motion mechanism (not shown) corresponding to the pair of guide grooves 22 is attached to the upper side of the base 21. The linear motion mechanism of the stage 23 is, for example, a screw-type linear motion mechanism including a screw shaft (drive shaft) extending along the guide groove 22 and a ball nut screwed with the screw shaft. It is connected to a Y-axis motor MY (see FIG. 9) made up of a step motor. When a drive signal corresponding to a predetermined number of steps is input to the Y-axis motor MY, the Y-axis motor MY rotates forward or reversely, and the stage 23 corresponds to the same number of steps in the Y arrow direction. It moves forward or backward along a predetermined speed (moves in the Y direction).

  A placement surface 24 is formed on the upper surface of the stage 23, and a suction-type substrate chuck mechanism (not shown) is provided on the placement surface 24. When the glass substrate 2 is placed on the placement surface 24, the glass substrate 2 is positioned and fixed at a predetermined position on the placement surface 24 by the substrate chuck.

  A pair of support bases 25a and 25b are erected on both sides of the base 21 in the X arrow direction, and a guide member 26 extending in the X arrow direction is installed on the pair of support bases 25a and 25b. The guide member 26 is formed such that the longitudinal width thereof is longer than the X arrow direction of the stage 23, and one end of the guide member 26 projects to the support base 25a side.

  On the upper side of the guide member 26, a storage tank 27 for storing the functional liquid Fa containing the manganese fine particles is disposed. On the other hand, on the lower side of the guide member 26, a pair of upper and lower guide rails 28 extending in the direction of the arrow X are provided so as to protrude over the entire width in the X direction.

The carriage 29 is formed in a rectangular parallelepiped shape. The linear movement mechanism of the carriage 29 is
For example, a screw type linear motion mechanism having a screw shaft (drive shaft) extending along the guide rail 28 and a ball nut screwed to the screw shaft, the drive shaft receives a predetermined pulse signal and performs a step. It is connected to an X-axis motor MX (see FIG. 9) that rotates forward and backward in units. When a drive signal corresponding to a predetermined number of steps is input to the X-axis motor MX, the X-axis motor rotates forward or reverse, and the carriage 29 moves forward along the X arrow direction by the amount corresponding to the same number of steps. Or return.

  Further, the carriage 29 is integrally provided with a droplet discharge head 30. FIG. 6 is a perspective view when the lower surface (surface on the stage 23 side) of the droplet discharge head 30 is directed upward. The droplet discharge head 30 includes a nozzle plate 31 on the lower surface thereof. In this embodiment, 16 nozzles N as nozzles for forming the dot pattern 10 are arranged in a row in the X arrow direction. It is formed to penetrate at equal intervals.

  FIG. 8 is a cross-sectional view of a main part for explaining the structure of the droplet discharge head 30. As shown in FIG. 8, a cavity 32 as a pressure chamber is formed at a position above the nozzle plate 31 and facing the nozzle N. The cavities 32 communicate with the storage tanks 27 so that functional liquids Fa as liquid bodies in which manganese fine particles as functional materials in the storage tanks 27 are dispersed with a dispersion medium can be supplied into the corresponding cavities 32 respectively. To do. On the upper side of the cavity 32, as a pressurizing means comprising a vibration plate 33 that vibrates in the vertical direction and expands and contracts the volume in the cavity 32, and a piezoelectric element that expands and contracts in the vertical direction to vibrate the vibration plate 33. A piezoelectric element 34 is provided.

  When the droplet discharge head 30 receives a nozzle drive signal for controlling the drive of the piezoelectric element 34, the piezoelectric element 34 expands and contracts to enlarge or reduce the volume in the cavity 32 and reduce from the corresponding nozzle N. A functional liquid Fa containing a volume of manganese fine particles is discharged as droplets Fb onto the glass substrate 2.

  As shown in FIG. 6, a laser irradiation device 38 is provided together with the nozzle plate 31 on the lower surface of the droplet discharge head 30 and on one side of the nozzle plate 31. In the laser irradiation device 38, semiconductor lasers L as 16 laser output means provided corresponding to the 16 nozzles N are arranged in parallel at equal intervals in a line in the X arrow direction. Each semiconductor laser L irradiates the droplet Fb that has landed on the glass substrate 2 by ejecting the droplet Fb from the corresponding nozzle N, dries the droplet Fb, and sinters the manganese part particles. Let

  The laser array composed of 16 semiconductor lasers L is provided side by side with the nozzle array composed of 16 nozzles N, and the intervals between the corresponding semiconductor lasers L and nozzles N are both formed to be the same. ing.

Next, the electrical configuration of the droplet discharge device 20 configured as described above will be described with reference to FIG.
9, the control device 40 includes an I / F unit 42 that receives various data from an input device 41 such as an external computer, a control unit 43 that includes a CPU and the like, a RAM 44 that includes DRAM and SRAM, and stores various data. A ROM 45 for storing various control programs is provided. Further, the control device 40 includes a drive waveform generation circuit 46, an oscillation circuit 47 that generates a clock signal CLK for synchronizing various drive signals, and a power supply circuit that generates a laser drive voltage VDL for driving the semiconductor laser L. 48, an I / F unit 49 for transmitting various drive signals is provided. In the control device 40, the I / F unit 42, the control unit 43, the RAM 44, the ROM 45, the drive waveform generation circuit 46, the oscillation circuit 47, the power supply circuit 48, and the I / F unit 49 are connected via the bus 50. ing.

The I / F unit 42 receives, from the input device 41, an image of the dot pattern 10 obtained by two-dimensionally coding the identification data such as the product number and lot number of the substrate 2 by a known method as the drawing data Ia in a predetermined format. .

  The control unit 43 executes a dot pattern creation processing operation based on the drawing data Ia received by the I / F unit 42. That is, the control unit 43 uses the RAM 44 or the like as a processing area, moves the stage 23 according to a control program (for example, a dot pattern creation program) stored in the ROM 45 or the like, and carries out the transfer processing operation of the substrate 2. Each of the piezoelectric elements 34 is driven to perform a droplet discharge processing operation. Further, the control unit 43 performs a drying processing operation for driving the semiconductor lasers L to dry the droplets Fb in accordance with the dot pattern creation program.

  More specifically, the control unit 43 performs predetermined development processing on the drawing data Ia received by the I / F unit 42, and discharges the droplet Fb to each cell C on the two-dimensional drawing plane (pattern formation region Z1). Bitmap data BMD indicating whether or not to be generated is generated and stored in the RAM 44. The bitmap data BMD is serial data having a bit length of 16 × 16 bits corresponding to the piezoelectric element 34, and the piezoelectric element 34 is turned on or off according to the value (0 or 1) of each bit. It prescribes.

  Further, the control unit 43 performs a development process different from the development process of the bitmap data BMD on the drawing data Ia, generates waveform data of the piezoelectric element drive voltage VDP applied to the piezoelectric element 34, and generates a drive waveform generation circuit. 46 is output. The drive waveform generation circuit 46 includes a waveform memory 46a that stores the waveform data generated by the control unit 43, a D / A conversion unit 46b that digitally / analog converts the waveform data and outputs the analog signal, and a D / A conversion A signal amplifying unit 46c for amplifying an analog waveform signal output from the unit. The drive waveform generation circuit 46 digital / analog converts the waveform data stored in the waveform memory 46a by the D / A converter 46b, amplifies the waveform signal of the analog signal by the signal amplifier 46c, and outputs the piezoelectric element drive voltage VDP. Is generated.

  Then, the control unit 43 uses the I / F unit 49 as a head drive circuit 51 (shift described later) as an ejection control signal SI that is synchronized with the clock signal CLK generated by the oscillation circuit 47 using the bitmap data BMD. Serial transfer is sequentially performed to the register 56). Further, the control unit 43 outputs a latch signal LAT for latching the transferred ejection control signal SI to the head drive circuit 51. Further, the control unit 43 outputs the piezoelectric element drive voltage VDP to the head drive circuit 51 (switch elements Sa1 to Sa16) in synchronization with the clock signal CLK generated by the oscillation circuit 47.

  The control device 40 includes a head drive circuit 51, a laser drive circuit 52 as laser emission control means, a substrate detection device 53, an X-axis motor drive circuit 54, and a Y-axis motor drive circuit 55 via an I / F unit 49. Is connected.

The head drive circuit 51 includes a shift register 56, a latch circuit 57, a level shifter 58, and a switch circuit 59. The shift register 56 performs serial / parallel conversion on the ejection control signal SI transferred from the control device 40 (control unit 43) in synchronization with the clock signal CLK in association with the 16 piezoelectric elements 34. The latch circuit 57 latches the 16-bit ejection control signal SI converted in parallel from the shift register 56 in synchronization with the latch signal LAT from the control device 40 (control unit 43), and the latched ejection control signal SI is level shifter 58. And output to the laser driving circuit 52. Based on the ejection control signal SI latched by the latch circuit 57, the level shifter 58 boosts the voltage to the voltage driven by the switch circuit 59, and generates the open / close signals GS1 corresponding to the 16 piezoelectric elements 34, respectively. The switch circuit 59 is provided with a switch element S1 corresponding to each piezoelectric element 34.
1, the common piezoelectric element driving voltage VDP is input to the input side, and corresponding piezoelectric elements 34 are connected to the output side. Each switch element S1 receives a corresponding open / close signal GS1 from the level shifter 58, and controls whether to supply the piezoelectric element drive voltage VDP to the piezoelectric element 34 in accordance with the open / close signal GS1. ing.

  That is, the droplet discharge device 20 of the present embodiment applies the piezoelectric element drive voltage VDP generated by the drive waveform generation circuit 46 to each corresponding piezoelectric element 34 via each switch element S1, and each of them. The opening / closing of the switch element S1 is controlled by a discharge control signal SI (open / close signal GS1) output from the control device 40 (control unit 43). When the switch element S1 is closed, the piezoelectric element drive voltage VDP is supplied to the piezoelectric element 34 corresponding to the switch element S1, and the droplet Fb is ejected from the nozzle N corresponding to the piezoelectric element 34.

  More specifically, the latch signal LAT is output every time one horizontal row of the pattern formation region Z1 of the glass substrate 2 passes directly below the 16 nozzles N. Then, in response to the latch signal LAT, the piezoelectric element 34 is driven and the droplet Fb is ejected from the nozzle N, whereby dots D are formed in each cell C (black cell C1) of the pattern formation region Z1. .

  FIG. 10 shows the pulse waveforms of the latch signal LAT, the discharge control signal SI and the opening / closing signal GS1, and the waveform of the piezoelectric element driving voltage VDP applied to the piezoelectric element 34 in response to the opening / closing signal GS1.

  As shown in FIG. 10, when the latch signal LAT output from the control unit 43 to the head drive circuit 51 falls, the opening / closing signal GS1 is generated based on the 16-bit ejection control signal SI, and 16 opening / closing signals are generated. The piezoelectric element drive voltage VDP is supplied to the piezoelectric element 34 corresponding to the open / close signal GS1 that rises in GS1. The piezoelectric element 34 contracts as the piezoelectric element drive voltage VDP increases, and the functional fluid Fa is drawn into the cavity 32. The piezoelectric element 34 expands and decreases as the voltage value of the piezoelectric element drive voltage VDP decreases. The functional fluid Fa inside is pushed out, that is, the droplet Fb is ejected. When the droplet Fb is ejected, the voltage value of the piezoelectric element driving voltage VDP returns to the initial voltage, and the ejection operation of the droplet Fb by driving the piezoelectric element 34 is completed.

  As shown in FIG. 9, the laser drive circuit 52 includes a delay pulse generation circuit 61 and a switch circuit 62 as time measuring means. The delay pulse generation circuit 61 delays the ejection control signal SI latched by the latch circuit 57 in response to the fall of the latch signal LAT by a predetermined time (waiting time T) (open / close signal GS2). Then, the switching signal GS2 is output to the switch circuit 62. Here, the waiting time T is based on the driving timing of the piezoelectric element 34 (falling timing of the latch signal LAT) as a reference (reference time Tk), and immediately below the semiconductor laser L corresponding to the piezoelectric element 34 (nozzle N). This is the time required for the droplet Fb to pass through (laser irradiation position). More specifically, the waiting time T in the present embodiment is a time set in advance based on a test or the like, and the droplet Fb from the time when the ejection operation of the piezoelectric element 34 starts (when the piezoelectric element driving voltage VDP rises). This is the time it takes to land and the landed droplet Fb reaches the laser irradiation position. Accordingly, the delay pulse generation circuit 61 causes the ejection control signal SI latched in response to the falling edge of the latch signal LAT by the latch circuit 57 to elapse, that is, when the landed droplet Fb is emitted from the semiconductor laser L. When it comes directly below (laser irradiation position), an open / close signal GS2 is output to the switch circuit 62.

The switch circuit 62 includes switch elements S2 corresponding to the 16 semiconductor lasers L. The common laser drive voltage VDL generated by the power supply circuit 48 is input to the input side of each switch element S2, and the corresponding semiconductor lasers L are connected to the output side. Each switch element S2 receives a corresponding open / close signal GS2 from the delay pulse generation circuit 61, and controls whether to supply the laser drive voltage VDL to the semiconductor laser L according to the open / close signal GS2. It has become.

  That is, the droplet discharge device 20 of the present embodiment applies the laser drive voltage VDL generated by the power supply circuit 48 in common to the corresponding semiconductor lasers L via the switch elements S2, and the switch elements S2 The opening / closing is controlled by a discharge control signal SI (open / close signal GS2) supplied by the control device 40 (control unit 43). When the switch element S2 is closed, the laser drive voltage VDL is supplied to the semiconductor laser L corresponding to the switch element S2, and laser light is emitted from the corresponding semiconductor laser L.

  That is, as shown in FIG. 10, when the latch signal LAT is input to the head drive circuit 51, the open / close signal GS2 is generated after the standby time T. When the open / close signal GS2 rises, the laser driving voltage VDL is applied to the corresponding semiconductor laser L, and the droplet Fb landed on the glass substrate 2 (black cell C1) passing through the irradiation position of the semiconductor laser L has just been applied. A laser beam is emitted from the semiconductor laser L. Then, the open / close signal GS2 rises, the supply of the laser drive voltage VDL is cut off, and the drying processing operation by the semiconductor laser L is completed.

  A substrate detection device 53 is connected to the control device 40 via an I / F unit 49. The substrate detection device 53 is used when the edge of the glass substrate 2 is detected and the position of the glass substrate 2 passing directly under the ejection head 30 (nozzle N) is calculated by the control device 40.

  An X-axis motor drive circuit 54 is connected to the control device 40 via an I / F unit 49, and an X-axis motor drive control signal is output to the X-axis motor drive circuit 54. In response to an X-axis motor drive control signal from the control device 40, the X-axis motor drive circuit 54 rotates the X-axis motor MX that reciprocates the carriage 29 in the forward or reverse direction. For example, when the X-axis motor MX is rotated forward, the carriage 29 moves in the X arrow direction, and when it is rotated reversely, the carriage 29 moves in the counter X arrow direction.

  An X-axis motor rotation detector 54a is connected to the control device 40 through the X-axis motor drive circuit 54, and a detection signal is input from the X-axis motor rotation detector 54a. Based on this detection signal, the control device 40 detects the rotation direction and the rotation amount of the X-axis motor MX, and calculates the movement amount and the movement direction of the ejection head 30 (carriage 29) in the X arrow direction. It has become.

  A Y-axis motor drive circuit 55 is connected to the control device 40 via an I / F unit 49, and a Y-axis motor drive control signal is output to the Y-axis motor drive circuit 55. In response to the Y-axis motor drive control signal from the control device 40, the Y-axis motor drive circuit 55 rotates the Y-axis motor MY that reciprocates the stage 23 in the normal direction or reverse direction, and sets the stage 23 at a predetermined speed. It is supposed to be moved with. For example, when the Y-axis motor MY is rotated forward, the stage 23 (glass substrate 2) moves in the direction of the arrow Y at a predetermined speed, and when reversed, the stage 23 (glass substrate 2) moves at a predetermined speed. Move in the direction of the Y arrow.

  A Y-axis motor rotation detector 55a is connected to the control device 40 via the Y-axis motor drive circuit 55, and a detection signal is input from the Y-axis motor rotation detector 55a. The control device 40 detects the rotation direction and the rotation amount of the Y-axis motor MY based on the detection signal from the Y-axis motor rotation detector 55a, and the movement direction and the movement amount of the substrate 2 in the Y arrow direction relative to the ejection head 30. Is calculated.

Next, a method for forming the dot pattern 10 on the back surface 2b of the substrate 2 using the droplet discharge device 20 will be described.
First, as shown in FIG. 5, the glass substrate 2 is arranged and fixed on the stage 23 positioned at the forward movement position so that the back surface 2b is on the upper side. At this time, the side on the Y arrow direction side of the glass substrate 2 is arranged on the side opposite to the Y arrow direction from the guide member 26. The carriage 29 (ejection head 30) is set to a position where the position (pattern formation region Z1) for forming the dot pattern 10 passes immediately below the substrate 2 when the substrate 2 moves in the Y arrow direction.

  From this state, the control device 40 drives and controls the Y-axis motor MY, and conveys the glass substrate 2 in the direction of the arrow Y at a predetermined speed via the stage 23. Eventually, when the substrate detection device 53 detects the edge of the glass substrate 2 on the Y arrow side, the control device 40, based on the detection signal from the Y-axis motor rotation detector 55a, displays a horizontal row of cells C (black cells). It is calculated whether or not C1) has been conveyed to just below the nozzle N.

  During this time, the control device 40 outputs the ejection control signal SI based on the bitmap data BMD stored in the RAM 44 and the piezoelectric element drive voltage VDP generated by the drive waveform generation circuit 46 to the head drive circuit 51 according to the dot pattern creation program. . Further, the control device 40 outputs the laser drive voltage VDL generated by the power supply circuit 48 to the laser drive circuit 52. Then, the control device 40 waits for the timing to output the latch signal LAT.

  When the cell C (black cell C1) in the first row is transported to the position immediately below the nozzle N (landing position), the control device 40 outputs a latch signal LAT to the head drive circuit 51. The head drive circuit 51 responds to the latch signal LAT from the control device 40, generates the opening / closing signal GS1 based on the ejection control signal SI, and outputs the opening / closing signal GS1 to the switch circuit 59. Then, the piezoelectric element driving voltage VDP is supplied to the piezoelectric element 34 corresponding to the switch element S1 in the closed state, and the droplets Fb corresponding to the piezoelectric element driving voltage VDP are simultaneously ejected from the corresponding nozzles N.

  On the other hand, the laser drive circuit 52 (delayed pulse generation circuit 61) receives the ejection control signal SI latched by the latch circuit 57 and starts generating the opening / closing signal GS2, and waits for the waiting time T (glass substrate 2 (black cell C1)). It waits for the time that the landed droplet Fb reaches the laser irradiation position. When the standby time T elapses after receiving the latch signal LAT, the laser drive circuit 52 outputs the open / close signal GS2 generated by the delay pulse generation circuit 61 to the switch circuit 62, and corresponds to the switch element S2 in the closed state. A laser drive voltage VDL is supplied to the semiconductor laser L.

  Accordingly, the laser beams are irradiated from the semiconductor lasers L corresponding to the droplets Fb landed simultaneously in the horizontal row of black cells C1. As a result, the dispersion medium of the droplets Fb evaporates upon landing, and the droplets Fb are dried and fixed on the back surface 2b.

  In other words, the droplets Fb that are discharged all at once and land on the glass substrate 2 to form the horizontal rows of dots D are irradiated with the laser beam by the corresponding semiconductor lasers L at the same time. As a result, the dispersion medium of the droplets Fb is evaporated by the energy of the laser beam, and the manganese fine particles contained in the droplets Fb are sintered and adhered to the glass substrate 2. That is, hemispherical dots D made of manganese are formed on the glass substrate 2. Thereafter, similarly, each time the droplet Fb discharged from each nozzle N and landed on the glass substrate 2 is conveyed directly below the corresponding semiconductor laser L, the laser beam is irradiated. Then, hemispherical dots D constituting the dot pattern 10 are formed for each horizontal row.

  When all the dots D of the dot pattern 10 formed in the pattern formation region Z1 are formed, the control device 40 controls the Y-axis motor MY to move the glass substrate 2 from the lower position of the droplet discharge head 30. Evacuate.

Next, effects of the present embodiment configured as described above will be described below.
(1) According to the above-described embodiment, since the droplet discharge process and the drying / sintering process are completed by transporting the glass substrate 2 once, the pattern forming operation can be shortened and work efficiency can be improved. it can.

  (2) According to the above embodiment, the driving timing of the semiconductor laser L is based on the falling edge of the latch signal LAT that determines the start of driving of the nozzle N (reference time Tk), that is, the piezoelectric for discharging the droplet Fb. Since it is determined based on the drive of the element 34, the position of the droplet Fb discharged from the nozzle N can be accurately grasped. Therefore, the laser beam can be accurately irradiated onto the droplet Fb, and the droplet Fb can be reliably dried and sintered. In addition, the load on the control unit 43 can be reduced.

(3) According to the above embodiment, the laser beam can be irradiated with high accuracy, so that the minimum laser energy can be irradiated, and the power consumption of the semiconductor laser L can be suppressed.
(4) According to the above embodiment, since the 16 semiconductor lasers L are driven only by the semiconductor lasers L corresponding to the driven piezoelectric elements 34, the power consumption of the semiconductor lasers L can be suppressed.

In addition, you may change the said embodiment as follows.
In the above embodiment, the standby time T is set with reference to the falling edge of the latch signal LAT. However, the standby time T may be set with reference to the rising edge of the latch signal LAT. Any timing may be used as long as the standby time T is set based on the drive signal that determines the drive operation.

  In the above embodiment, the laser irradiation position of the laser light emitted from the semiconductor laser L is made different from the landing position of the droplet Fb, but the laser irradiation position may be made coincident with the landing position of the droplet. Immediately upon landing, the droplet Fb can be dried and sintered.

  In the above embodiment, the droplet Fb is ejected using the piezoelectric element 34 made of a piezo element or the like as the pressurizing means. However, the pressurizing means that pressurizes the pressure chamber (cavity 32) by a method other than the piezoelectric element 34 is used. May be implemented.

  In the above embodiment, the liquid droplet ejection device 20 for forming the dots D constituting the dot pattern 10 is embodied. For example, a liquid droplet containing a wiring material as a functional material is ejected to the substrate, and the substrate You may apply to the droplet discharge apparatus which forms a metal wiring on. Also in this case, the drying / sintering in the subsequent process can be performed by the droplet discharge device.

  In the above embodiment, the shape is embodied by the hemispherical dot D, but the shape is not limited. For example, the planar shape is an elliptical dot or a bar constituting a barcode. It may be linear.

  In the above embodiment, the pattern is an identification code of a two-dimensional code, but is not limited to this, and may be a barcode, for example. Further, the pattern may be letters, numbers, symbols, and the like.

In the above embodiment, the dot pattern 10 is formed on the glass substrate 2 as a display substrate, but it may be a silicon wafer, a resin film, a metal plate, or the like.
In the above embodiment, the droplet Fb is ejected by the expansion and contraction of the piezoelectric element 34. However, the inside of the cavity 32 may be formed by a method other than the piezoelectric element 34 (for example, a method of generating and bursting bubbles in the cavity 32). May be pressurized to discharge the droplet Fb.

  In the above embodiment, the delay pulse generation circuit 61 of the laser drive circuit 52 outputs the open / close signal GS2 when the standby time T has elapsed. The control device 40 measures the standby time T and outputs a control signal to the laser drive circuit 52 when the standby time T has elapsed. Then, the laser driving circuit 52 may output an opening / closing signal GS2 generated based on the ejection control signal SI input from the latch circuit 57 of the head driving circuit 51 in response to the control signal.

  In the above embodiment, the liquid droplet ejection device 20 for forming the dots D is embodied. However, for example, the liquid droplet ejection device for forming the insulating film and the metal wiring may be applied. Also in this case, the pattern size can be controlled to a desired size.

  In the above embodiment, the liquid crystal display module 1 is embodied. For example, a display module of an organic electroluminescence display device may be used, or a field effect device (including a planar electron-emitting device and using light emission of a fluorescent material by electrons emitted from the device) ( A display module including an FED, an SED, or the like may be used. Further, the glass substrate 2 or the like on which the dot pattern 10 is formed may be used not only for these display devices but also for other electronic devices.

The front view of the liquid crystal display module of a liquid crystal display device. The front view of the dot pattern formed in the back surface of a liquid crystal display module. The side view of the dot pattern formed in the back surface of a liquid crystal display module. Explanatory drawing for demonstrating the structure of a dot pattern. FIG. 3 is a perspective view of a main part of the droplet discharge device according to the embodiment. The perspective view for demonstrating a droplet discharge head. The side view for demonstrating a droplet discharge head. FIG. 3 is a cross-sectional view of a main part for explaining a droplet discharge head. The electric block circuit diagram for demonstrating the electrical structure of a droplet discharge apparatus. The timing chart for demonstrating the drive timing of a piezoelectric element and a semiconductor laser.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Display module, 2 ... Glass substrate as a board | substrate or a display substrate, 2b ... The back surface as a landing surface, 10 ... Dot pattern as a pattern, 20 ... Droplet discharge ejection apparatus, 30 ... Droplet discharge head, 32 ... Cavity as pressure chamber, 34 ... Piezoelectric element as pressurizing means, 40 ... Control device as pressurizing control means, 43 ... Control unit, 51 ... Head drive circuit, 52 ... Laser drive circuit as laser emission control means, 61: Delay pulse generation circuit as timing means, N: Droplet discharge nozzle as discharge port, Fb ... Droplet, L ... Semiconductor laser as laser output means, LAT ... Latch signal, GS1 ... First open / close signal, GS2 ... second opening / closing signal, T ... standby time, Tk ... reference time, Z1 ... pattern formation area, Z2 ... margin area, C ... cell, D ... dot.

Claims (10)

In a liquid droplet ejection apparatus that ejects a liquid material containing a functional material stored in a pressure chamber as a liquid droplet from a discharge port of the pressure chamber by pressurizing the pressure chamber by a pressurizing unit.
Laser output means for irradiating the droplets discharged from the discharge port with laser light;
A liquid droplet ejection apparatus, comprising: a laser emission control unit for driving and controlling the laser output unit relative to a pressurizing operation of the pressurizing unit. The droplet discharge device according to claim 1,
The laser emission control means controls the laser output means based on the time from the pressurizing operation of the pressurizing means until the droplet discharged from the discharge port reaches the laser light irradiation position of the laser output means. A droplet discharge device that controls driving. The liquid droplet ejection apparatus according to claim 1 or 2,
The laser emission control means drives and controls the laser output means based on the time from the pressurizing operation of the pressurizing means until the liquid droplets ejected from the ejection port land on the landing surface. Droplet discharge device. The liquid droplet ejection apparatus according to claim 1 or 2,
The laser emission control unit is configured to perform the laser based on the time from the pressurizing operation of the pressurizing unit until the landing surface of the droplet discharged from the discharge port reaches the laser beam irradiation position of the laser output unit. A droplet discharge apparatus that controls driving of an output unit. In the liquid droplet ejection apparatus according to any one of claims 1 to 4,
The laser emission control unit includes a time measuring unit, and starts a time measuring operation from the pressurizing operation of the pressurizing unit, and drives and controls the laser output unit after a predetermined time has elapsed. . In the liquid droplet ejection device according to any one of claims 1 to 5,
The liquid droplet ejection apparatus, wherein the laser output means is a semiconductor laser. In the droplet discharge device according to any one of claims 1 to 6,
The droplet discharge device, wherein the pressurizing means is a piezoelectric element. Discharge ports provided for each of the pressure chambers by applying a liquid material containing the functional material stored in each of the plurality of pressure chambers to each of the pressure chambers by pressurizing means provided for each of the pressure chambers. In a droplet discharge device that discharges each as a droplet from
Laser output means provided for each pressurizing means, for irradiating the droplets discharged from the discharge ports with laser light;
Based on the time from the pressurizing operation of each pressurizing unit to the time when each droplet discharged from the corresponding discharge port reaches the laser beam irradiation position of each corresponding laser output unit, the corresponding A droplet discharge apparatus comprising: laser emission control means for driving and controlling each laser output means. The liquid droplet ejection apparatus according to claim 8,
Each pressurizing unit is driven to pressurize by a corresponding pressurizing control unit, and each pressurizing control unit corresponds to the pressurizing unit corresponding to the pressurizing operation timing of each pressurizing unit based on a discharge control signal. The laser emission control means drives and controls each of the laser output means based on the time from the pressurization operation timing until the corresponding droplet reaches the landing surface. A droplet discharge device characterized by the above. The liquid droplet ejection apparatus according to claim 8,
Each pressurizing unit is driven to pressurize by a corresponding pressurizing control unit, and each pressurizing control unit corresponds to the pressurizing unit corresponding to the pressurizing operation timing of each pressurizing unit based on a discharge control signal. The laser emission control means is based on the time from the timing of each pressurizing operation until the landing surface of the corresponding droplet reaches the laser light irradiation position of the corresponding laser output means. A droplet discharge device that controls driving of each of the laser output units.

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