JP2006234734A - Temperature sensor arrangement member, and thermometer having it - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a temperature sensor arrangement member and thermometer allowing precise temperature measurement by specifying not only the length direction of a protective tube but also arrangement on the cross section of the protective tube, in the arrangement of a sensitive section of the temperature sensor in the protective tube. <P>SOLUTION: The thermometer has a plurality of temperature sensors in the protective tube. The thermometer has the temperature sensor arrangement member that is a rod-like member installed in the protective tube and of which cross section shape vertical to the axis is a polygon, a circle, or a shape having a plurality of projecting parts radially projecting from the cross section center, and the plurality of temperature sensors arranged by the temperature sensor arrangement member. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a temperature sensor arrangement member and a thermometer including the same, and more particularly to a temperature sensor arrangement member for accurately and quickly measuring the temperature of a substance to be measured and a thermometer including the temperature sensor arrangement member.

  Sensitive parts of thermometers such as thermocouples and thermistors are usually covered with protective tubes. In particular, when measuring the temperature in a heating furnace or reactor, a protective tube or a protective member is essential to protect the sensitive part of the thermometer from the surrounding atmosphere. However, if the sensitive part is covered with a protective tube, it becomes difficult to quickly and accurately measure the temperature of the measurement target part due to the heat conduction and heat capacity of the protective tube. Therefore, it is better to make the protective tube thinner as long as the sensitive part of the thermometer can be protected. On the other hand, when multiple points of temperature measurement are required, it is common to insert multiple temperature sensors together into a single protective tube from the viewpoint of workability of thermometer installation and suppression of the influence on the substance to be measured. It is. In that case, the protective tube must be relatively thick depending on the number of temperature sensors. If the inner diameter of the protective tube is increased, accurate temperature measurement, particularly temperature change measurement, becomes difficult due to a delay in heat conduction and an increase in the heat capacity of the protective tube itself. Usually, the inner diameter of the protective tube is about 10 to 15 mm from the viewpoint of measurement accuracy. On the other hand, some large furnaces and reactors have a size of several meters to several tens of meters, and the length of the protective tube and the temperature sensor is close to this. In such a case, it is not easy to insert the temperature sensor into the protective tube or to accurately position the temperature sensor in the protective tube.

  In Patent Document 1, in order to easily determine the exact position of the temperature sensor in the length direction in the protective tube, a dummy sheath is added at the tip of the heat sensitive part of the temperature sensor, regardless of the position of the sensitive part. The lengths of the temperature sensors are aligned to facilitate insertion into the protective tube and positioning of the temperature sensor within the protective tube. In Patent Document 2, the temperature sensor is inserted from both sides of the protective tube to reduce the thickness of the thermometer with a protective tube having a plurality of temperature sensors, thereby increasing the accuracy of temperature measurement and installing the thermometer. A method for facilitating this is disclosed. Furthermore, Patent Document 3 and Patent Document 4 disclose methods for improving temperature measurement accuracy by inserting a filler around the heat-sensitive part of the temperature sensor and devising the shape and the like. This filler is not for facilitating the arrangement of the sensitive part of the temperature sensor, and the temperature measurement accuracy is improved by fixing and protecting the position of the sensitive part close to the measurement object.

JP-A-2-236130 Japanese Patent Laid-Open No. 2-10126 Japanese Patent Laid-Open No. 2002-350241 JP 2002-317499 A

  As described above, there are known methods for improving workability and measuring accuracy for inserting a temperature sensor in a temperature measurement at a plurality of positions in the length direction in the protective tube by inserting a plurality of temperature sensors into the protective tube. However, recently, as in a diffusion furnace used in semiconductor manufacturing, temperature control in each region is increasingly demanded, and even a temperature difference due to a difference in position on the cross section in the protection tube of the thermometer may become a problem. is there. In particular, when there is a large difference in temperature depending on the direction of the thermometer, such as near the side of the electric furnace, it is possible to accurately measure the temperature around the thermometer protruding into the furnace space and the state of its change. Desired. Conventional thermometers with protective tubes have been difficult to meet these requirements.

  In order to solve the above problems, the present invention specifies not only the arrangement of the temperature sensor in the protective tube in the longitudinal direction of the protective tube but also the arrangement on the cross section of the protective tube, and a precise measurement object. The purpose is to enable temperature measurement of the position.

Means for achieving the above object
(1) In a thermometer provided with a plurality of temperature sensors in a protective tube, a rod-shaped member installed in the protective tube, the cross-sectional shape perpendicular to the axis being a polygon, a circle, or a plurality of radially protruding from the center of the cross-section It is a temperature sensor arrangement | positioning member which is a shape with a convex part.
(2) In a thermometer having a plurality of temperature sensors in a protective tube, a rod-shaped member installed in the protective tube, and a temperature sensor arrangement member in which a temperature sensor insertion hole or a temperature sensor insertion gap is formed along the axial direction. is there.
(3) A thermometer provided with the temperature sensor arrangement member according to (1) or (2) in the protective tube, and a plurality of temperature sensors respectively arranged at predetermined positions in the protective tube by the temperature sensor arrangement member. .
(4) A thermometer in which the space inside the protective tube is divided by the temperature sensor arrangement member provided in the protective tube so as to form a plurality of regions along the axial direction, and the temperature sensor is inserted into the formed region.
(5) The thermometer according to claim 3 or 4, wherein a mark representing a circumferential position of the protective tube is attached to an outer peripheral surface, a root portion, or a lid portion of the protective tube.

  The temperature sensor arrangement member of the present invention is a rod-shaped member installed in a protective tube in a thermometer having a plurality of temperature sensors, and the cross-sectional shape perpendicular to the axis of the rod-shaped member is polygonal, circular, or from the center of the cross section It has a shape with a plurality of convex portions protruding radially. Or it is a rod-shaped member installed in a protection tube, Comprising: It is a member which has a temperature sensor insertion hole or a temperature sensor insertion gap | interval along the length direction substantially perpendicularly with respect to the cross section of a rod-shaped member. The temperature sensor arrangement member of the present invention is characterized in that not only the position of the temperature sensor in the protective tube in the longitudinal direction but also the arrangement on the cross section can be specified.

  The temperature sensor arrangement member of the present invention will be described with reference to FIG. FIG. 1A is an example of the temperature sensor arrangement member of the present invention whose cross-sectional shape is a square among polygons. The size of the temperature sensor arrangement member is preferably large enough to be stored in the protective tube of the thermometer. Generally, the length of the side of the cross section is several mm to 20 mm, and the length of the arrangement member is often several tens cm to several m. The material of the temperature sensor arrangement member may be selected depending on the operating temperature, and metal may be used up to several hundred degrees of measurement temperature. However, when the temperature exceeds 800 ° C., heat-resistant ceramics such as alumina, silica, silicon carbide, and silicon nitride are suitable. is there.

  C of FIG. 1 represents the cross section of the protection tube when the temperature sensor arrangement member 1 and the four temperature sensors 3 shown in FIG. 1A are inserted into the protection tube 2 of the thermometer. The four temperature sensors 3 are arranged so as not to move between the inner wall of the protective tube 2 and the respective surfaces of the temperature sensor arrangement member 1 so as to move in the protective tube. In particular, the movement to the space formed by the adjacent surface of the temperature sensor arrangement member 1 is reliably limited by the corner portion 5 of the temperature sensor arrangement member 1. For this purpose, the corner portion 5 should be as close to the wall surface of the protective tube 2 as possible. Thereby, the heat sensitive part at the tip of the temperature sensor is not moved in the cross-sectional direction in the protective tube. In addition, it is preferable that the corner portion 5 is chamfered or has a curved surface structure so that the corner portion 5 does not come into contact with the inner wall of the protective tube 2 to be damaged. The position of the sensitive part at the tip of the temperature sensor in the protective tube length direction is determined when the temperature sensor is first inserted into the protective tube. There is no. In this way, the sensitive portion of the temperature sensor can be securely fixed not only in the length direction in the protective tube but also in the cross section of the protective tube. Furthermore, the sensitive part is arranged near the side wall of the protective tube, and the temperature outside the protective tube in the vicinity of the temperature sensor sensitive part can be measured accurately and quickly. Further, if the sensitive part of the temperature sensor is arranged near the side wall of the protective tube, heat transfer from the side wall is good, and the delay and error in temperature measurement are reduced even if the protective tube is thick.

  Similar to FIG. 1C, a rod-shaped temperature sensor arrangement member having a triangular and hexagonal cross-section as shown in FIGS. 2E and 2F can provide a suitable thermometer. Although not shown, a temperature sensor arrangement member having another polygonal cross-sectional shape such as a pentagon or an octagon may be used. What is necessary is just to select the cross-sectional shape of a temperature sensor arrangement | positioning member suitably according to the direction to measure with respect to the number of temperature sensors, and a protection tube. Furthermore, a temperature sensor arrangement member having a circular cross section may be used as shown in FIG. In this case, the temperature sensor 3 may be fixed by being sandwiched between the side wall of the protective tube 2 and the temperature sensor arrangement member 1, but the temperature sensor 3 is bound around the temperature sensor arrangement member 1 and the temperature sensor 3 is bound to the temperature sensor 3. It is desirable to keep the sensitive part of the sensor 3 from moving in the protective tube. For example, for high temperature measurement of 1000 ° C. or higher, a heat-resistant metal wire 6 such as a platinum wire may be bundled, which is preferable for inserting a temperature sensor into a protective tube and for precise and quick measurement at the time of temperature measurement.

  Further, the temperature sensor arranging member of the present invention may have a shape in which the axial cross-sectional shape of the rod-shaped member has a plurality of convex portions protruding radially from the cross-sectional center. FIG. 1B is an example of the temperature sensor arrangement member of the present invention having a shape having four convex portions. In other words, this temperature sensor arrangement member is a rod-shaped member in which four long plate members are aligned with the long side portion at the center, and the short side portion protrudes radially from the center to have a cross-shaped cross section. FIG. 1D is an axial cross-sectional view showing a state in which the temperature sensor arrangement member and the temperature sensor are inserted into the protective tube. The H and I diagrams of FIG. 2 are also exemplary diagrams of a thermometer including a temperature sensor having three and five convex portions corresponding to the D diagram of FIG. As shown in FIG. 1D, the gap formed by the rod-shaped member installed in the protective tube can specify the position of the thermometer on the cross section of the protective tube. In this case, even if each temperature sensor 3 is arranged in the gap partitioned by the plate-like body 4 that is a convex portion extending radially from the axial center of the rod-like member and this aggregate is inserted into the protective tube 2. Alternatively, the temperature sensor arrangement member 1 may be inserted into the protective tube 2 and the temperature sensor 3 may be inserted into the protective tube 2 up to a predetermined length. As shown in FIGS. 1B and 1D, the tip of the plate-like body 4 which is a convex portion extending radially from the axial center of the rod-like member is convex, and the corner portion 5 is the protective tube 2. The shape is not in contact with the inner wall. Alternatively, the corner portion 5 is preferably chamfered or curved. This is because the acute corner portion 5 does not contact the inner wall of the protective tube and damage the protective tube. The L and M diagrams in FIG. 4 correspond to the B and D diagrams in FIG. 1, but the temperature sensor arranging member in a shape in which the temperature sensor arranging member in FIG. Represents. Thus, a temperature sensor arrangement member having the same cross-sectional shape but having a structure twisted around an axis is also a preferred form.

  The temperature sensor arrangement member according to the second aspect of the present invention is the thermometer provided with a plurality of temperature sensors in the protective tube, and the rod-shaped member installed in the protective tube has the same cross-sectional shape, and the temperature sensor is inserted along the axial direction. A temperature sensor arrangement member having a hole or a temperature sensor insertion gap. The cross-sectional shape of the temperature sensor insertion hole or the temperature sensor insertion gap is preferably as small as possible with a shape similar to that of the temperature sensor as long as the temperature sensor can be inserted. If it does in this way, when arranging a temperature sensor in a protection tube provided with a temperature sensor arrangement member, it can arrange without error in a predetermined position, and a sensitive part of a temperature sensor does not move in a protection tube when using a thermometer. Because. As a specific example, in addition to the forms shown in FIGS. 1 and 2, there is a temperature sensor arrangement member having a shape as shown in the J and K diagrams of FIG. 3. FIG. J shows a temperature sensor arrangement member 1 in which the appearance is a cylindrical shape having an outer diameter close to the inner diameter of the protective tube 2, and a temperature sensor insertion hole 7 into which the temperature sensor 3 can be inserted is formed along the length direction. Represents a thermometer with If the temperature sensor 3 is inserted into the temperature sensor insertion hole 7 of the temperature sensor arrangement member 1 inserted into the protective tube 2, the position of the sensitive portion at the tip of the temperature sensor is reliably fixed within the protective tube 2. It should be noted that the temperature measurement sensitivity increases as the insertion port is as close to the outer periphery as possible. 3 is provided with a temperature sensor arrangement member in which three notches are provided along the length direction of a cylinder having an outer shape close to the inner diameter of the protective tube, and this is used as a temperature sensor insertion gap 8. Represents a thermometer. This shape can also be regarded as a rod-shaped temperature sensor arrangement member having a plurality of convex portions projecting radially from the axial cross-sectional center described above. Even in this shape, it is desirable that the corner portion 5 has a curved surface so as not to contact the protective tube and damage the inner wall of the protective tube. A thermometer used in a heat treatment furnace exceeding 1000 ° C. uses a sensitive part of the sensor such as platinum-platinum rhodium, and a protective tube made of heat-resistant silicon carbide. In this case, it is known that silicon is produced from silicon carbide in a high temperature range and platinum is deteriorated. Therefore, the inside of the silicon carbide protective tube prevents silicon from being released by a silicon dioxide coating. However, when the corner 5 or the like at the tip of the temperature sensor arrangement member is sharp, friction with the inner wall of the protective tube may cause the silicon dioxide film to peel off. In order to prevent this, it is desirable that the corner portion 5 at the tip of the temperature sensor arranging member is curved by chamfering or the like.

  If the above-mentioned temperature sensor arrangement member is inserted into the protective tube and the temperature sensor is inserted to a predetermined position in the gap formed by the protective tube and the temperature sensor arrangement member, the thermometer of the present invention is obtained. Alternatively, the temperature sensor arrangement member and the temperature sensor may be combined in advance and inserted into the protective tube. The space for inserting the temperature sensor of the temperature sensor arrangement member is not formed in the entire length direction of the temperature sensor arrangement member, but is formed up to the position where the temperature sensor is to be inserted as shown in FIG. If this material is left, it may be advantageous because the position in the length direction of the protective tube can be easily specified when the temperature sensor is inserted into the protective tube. In addition, the outer peripheral part of the protective tube of the thermometer of the present invention, for example, the outer peripheral part of the protective tube, the root part, or the lid part, etc. It is preferable to attach. For example, as shown in FIG. 5M, a small protrusion 9 is attached to the outer wall of the protective tube so that the insertion position of the temperature sensor 3d at the root portion of the protective tube can be distinguished from the appearance of the thermometer. .

  The thermometer equipped with the temperature sensor arrangement member of the present invention is capable of measuring the temperature sensor in a strict arrangement by specifying the arrangement of the temperature sensor sensitive part in the protection tube not only in the length direction of the protection tube but also in the cross-sectional direction. I have to. And since the sensitive part of a temperature sensor can also be arrange | positioned near the surface in a protective tube, accurate and quick temperature measurement is possible even if a protective tube becomes thick. Further, the sensitive part of the temperature sensor can be arranged in a desired direction with respect to the axis of the protective tube, and temperature measurement in a specific direction with respect to the protective tube is also possible. Furthermore, the temperature sensor arrangement member serves as a guide, and the temperature sensor can be easily attached to the protective tube. In addition, when a part of the temperature sensor is damaged, only the temperature sensor can be easily replaced. On the other hand, before inserting a plurality of temperature sensors to be inserted into the protective tube, if the temperature sensor is disposed at a predetermined position of the temperature sensor arrangement member and tied up as shown in FIG. The temperature sensor can be easily installed in the protective tube in a desired arrangement. If a mark is attached to the outer peripheral surface of the protective tube, the arrangement of the temperature sensor in the protective tube can be confirmed by this mark.

  With reference to FIGS. 5 and 6, an example of a preferred temperature sensor arrangement member and thermometer of the present invention will be described. 5 is a perspective view of the temperature sensor arrangement member of the present invention. In FIG. 1B described above, the cross-shaped cross section in front is fixed with the axis of the rod-shaped member as the center, and the cross section on the back side is rotated clockwise once and twisted. By twisting about the axis of the temperature sensor arrangement member, the space in which the temperature sensor is to be inserted can be moved while twisting the position with respect to the center on the cross section of the protective tube. In the example of FIG. 5, the spaces in which the four temperature sensors are to be inserted are twisted at the same time. For example, while the spaces move from one end to the other end in the length direction of the temperature sensor arranging member, Go around. If it is evenly twisted with respect to the axial direction, the space in which the temperature sensor is to be inserted rotates by a quarter every movement of a quarter distance along the axial direction. At this time, when viewed from the same direction with respect to the axis of the temperature sensor arrangement member, the space is changed to a space in which the adjacent temperature sensor is to be inserted every ¼ movement along the axis. Using such a temperature sensor arrangement member, for example, when measuring the temperature in the direction facing the upper right of the temperature sensor arrangement member in FIG. If the temperature sensor is inserted into the space in the direction with the length of 1/4, 1/2, 3/4, 4/4 of the axial length sequentially, all the sensitive parts at the tip of the four temperature sensors It faces the upper right direction of the sensor arrangement member. That is, if the temperature sensor arrangement member and the temperature sensor are inserted into the thermometer protection tube in this state, all the sensitive parts of the temperature sensor face in a certain direction on the cross section of the protection tube, for example, the upper right direction. In the M diagram of FIG. 5, it is the direction in which the small protrusions 9 are present.

  FIG. 6 is a cross-sectional view of the thermometer protection tube representing this state. FIG. N is a cross-sectional view of the protective tube at a position of a distance of ¼ from the protective tube root side of the temperature sensor arrangement member to the protective tube tip side. Similarly, the O diagram is a 1/2 position, the P diagram is also a 3/4 position, the Q diagram is also a 4/4 position, that is, a cross section of the protective tube at the temperature sensor arrangement member at the distal end of the protective tube. FIG. The temperature sensors 3a, 3b, 3c, and 3d are inserted one by one in the counterclockwise direction in order from the upper left from the temperature sensor insertion space on the protective tube base side (see FIG. 5M). The insertion lengths of the temperature sensors 3a, 3b, 3c, and 3d are 1/4, 1/2, 3/4, and 4/4 of the length of the temperature sensor arrangement member, respectively. In FIG. N, since the shape of the protective tube root portion is twisted 90 degrees clockwise, the temperature sensor 3a comes to the upper right. And since the length of the temperature sensor 3a is 1/4 of the temperature sensor arrangement | positioning member, the sensitive part of the front-end | tip part is arrange | positioned here. Similarly, in FIG. O, the sensitive part of the temperature sensor 3b is arranged on the upper right. The space a communicates with the space in which the temperature sensor 3a is inserted, but the temperature sensor is gone. Further, the P and Q diagrams show a state in which the temperature sensors 3c and 3d are arranged on the upper right. That is, this thermometer is in the same direction as seen from the axis of the protective tube at positions of 1/4, 1/2, 3/4, and 4/4 from the root of the protective tube toward the tip. In FIG. 6, all are located in the upper right direction with the small protrusion 9 which is a mark. In this way, the temperature can be measured in the same direction with respect to the axis of the thermometer protection tube, and the speed and accuracy are further improved. Moreover, no matter how thick the protective tube is used, the temperature sensor is located in the same direction near the inner wall of the protective tube on the cross section of the protective tube, so that the temperature in the same direction of the thermometer can be measured accurately. If the small protrusion 9 is attached to the upper right direction of the outer wall surface of the protective tube as a temperature sensor arrangement mark inside the protective tube, the temperature measuring direction of the protective tube can be easily determined from the appearance, and a thermometer for a heating furnace or the like. Convenient for installation.

  The thermometer equipped with the temperature sensor arrangement member of the present invention performs a runaway reaction due to temperature measurement of a high temperature reactor such as a diffusion furnace for semiconductor manufacturing, which requires high-precision temperature control, and a large reactor. Therefore, it is useful as a thermometer for quickly monitoring the reaction temperature at a specific position.

FIG. 1 is an exemplary view of a temperature sensor arrangement member of the present invention. A is an example of a temperature sensor arrangement member having a square cross-sectional shape, and C represents a cross section of a protection tube of a thermometer in which the temperature sensor position member A and four temperature sensors are inserted into the protection tube. B is a temperature sensor arrangement member which is a rod-shaped member whose cross-sectional shape is a shape (called a cross shape) having four protrusions protruding radially from the center. D represents the cross section of the protective tube of the thermometer in which the temperature sensor arrangement member B and four temperature sensors are inserted into the protective tube. FIG. 2 shows a cross section of a protection tube of a thermometer in which various temperature sensor arrangement members of the present invention and a plurality of temperature sensors are inserted into the protection tube. FIG. 3 shows a cross section of a protective tube of a thermometer in which the temperature sensor arrangement member of the second aspect of the present invention and a plurality of temperature sensors are inserted into the protective tube. FIG. 4 is another exemplary view of the temperature sensor arrangement member of the present invention. FIG. 5 is an exemplary view of a temperature sensor arrangement member of the present invention. L is a temperature sensor arrangement member, and M represents a cross section at the base of the protective tube when the temperature sensor arrangement member and the thermometer are inserted into the protective tube. FIG. 6 shows four types of cross-sectional shapes of a portion moved by a quarter length from the root of the protective tube of the thermometer of the present invention shown in M of FIG. 5 to the tip.

Explanation of symbols

1, temperature sensor arrangement member 2, protective tube 3, 3a, 3b, 3c, 3d, temperature sensor 4, plate-like body which is a convex part of temperature sensor arrangement member 5, contact with protective tube of temperature sensor arrangement member Corner portion 6, temperature sensor binding member 7, temperature sensor insertion hole 8, temperature sensor insertion gap 9, small protrusions a, b, c, d, temperature sensor insertion gap

Claims (5)

  In a thermometer equipped with a plurality of temperature sensors in a protective tube, a rod-shaped member installed in the protective tube, wherein the cross-sectional shape perpendicular to the axis is a polygon, a circle, or a plurality of convex portions protruding radially from the center of the cross-section A temperature sensor arrangement member having a shape.   In a thermometer provided with a plurality of temperature sensors in a protective tube, a temperature sensor arrangement member which is a rod-shaped member installed in the protective tube and which forms a temperature sensor insertion hole or a temperature sensor insertion gap along the axial direction.   A thermometer comprising a temperature sensor arrangement member according to claim 1 or 2 in the protective tube, and a plurality of temperature sensors respectively arranged at predetermined positions in the protective tube by the temperature sensor arrangement member.   A thermometer in which a space inside the protective tube is divided by the temperature sensor arrangement member provided in the protective tube so as to form a plurality of regions along the axial direction, and the temperature sensor is inserted into the formed region.   The thermometer of Claim 3 or 4 which attached | subjected the label | marker which shows the position on the circumference of a protective tube to the outer peripheral surface of the protective tube, a base part, or the cover part.

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