JP2006231583A - Manufacturing method for liquid jet head and liquid jet head - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid jet head which reduces fluctuation of jet characteristics by improving the position accuracy of piezoelectric vibrators. <P>SOLUTION: A passage unit 26 which includes both a passage formation substrate 11 with a row of pressure generation chambers 19 that communicate with nozzle openings 15 set in a row and a diaphragm 12, a vibrator unit 30 whereat the piezoelectric vibrators 14 for making the pressure generation chambers 19 generate a pressure are fixed in the shape of a row to a fixing plate 20, and a head case 16 to which the passage unit 26 is fixed and in which the vibrator unit 30 is stored are prepared. Piezoelectric material plates 40 are fixed to both faces of the fixing plate 20 to respectively project from one ends of the fixing plate 20. To the two piezoelectric material plates 40 of both faces of the fixing plate 20, notches 34 are simultaneously formed by the same wire saw 41 from projecting ends to fixing parts. A plurality of the notches 34 are formed by a constant pitch. The piezoelectric vibrators 14 each in the shape of a rod are set in the row at both faces of the fixing plate 20. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a method of manufacturing a liquid ejecting head that ejects liquid supplied from a liquid cartridge or the like as droplets and a liquid ejecting head, and improves the positional accuracy of a piezoelectric vibrator to reduce variation in ejection characteristics. The present invention relates to a method of manufacturing a liquid jet head and a liquid jet head.

  In an ink jet recording apparatus, which is a typical example of a liquid ejecting apparatus, an ink jet recording head (liquid ejecting apparatus) having pressure generating means for pressurizing a pressure generating chamber and a nozzle opening for ejecting pressurized ink as ink droplets. Head) is mounted on a carriage.

A multi-nozzle ink jet recording head in which a plurality of nozzle openings are arranged on a single substrate is formed with a nozzle plate having a plurality of nozzle openings and a space serving as a pressure generation chamber and an ink supply channel. The flow path forming substrate and the vibration plate sealing the other surface are laminated and bonded to each other. The flow path unit is fixed to a head case in which a piezoelectric vibrator is accommodated, and is configured to generate pressure in a pressure generation chamber by a deformation stress of a diaphragm by the piezoelectric vibrator and to eject ink droplets from a nozzle opening. ing. (For example, the following patent document 1).
JP 2002-361868 A

  However, the conventional recording head is configured by housing a transducer unit in which a piezoelectric transducer is fixed in a row on one side of a fixed plate in a head case. In the case of a recording head having a plurality of nozzle rows, it is necessary to make a transducer unit for each row and position and incorporate the transducer unit in the head case for each row. For this reason, the positional accuracy of the piezoelectric vibrators between the rows varies, and the ejection characteristics of the ink droplets also vary, which may lead to deterioration in image quality. In particular, the flow path unit often has a structure in which two nozzles and one nozzle array are arranged, and common ink storage chambers are arranged on both sides of the pressure generating chambers facing each other. In this case, since the rows of the pressure generation chambers are closely opposed to each other, the piezoelectric vibrator rows must be positioned close to each other in a limited space, and workability is poor and product accuracy is also adversely affected. Was exerting.

  SUMMARY An advantage of some aspects of the invention is to provide a liquid ejecting head manufacturing method and a liquid ejecting head that improve the positional accuracy of a piezoelectric vibrator and reduce variations in ejection characteristics. .

  In order to solve the above problems, a method of manufacturing a liquid jet head according to the present invention includes a flow path forming substrate having a row of pressure generation chambers communicating with each nozzle opening formed in a row, and one surface of the flow path forming substrate. A flow path unit having an elastic plate joined to the vibrator, a vibrator unit in which a piezoelectric vibrator that deforms the elastic plate to generate pressure in a pressure generating chamber is fixed in a row to a fixed plate, and the flow path A liquid ejecting head manufacturing method including a head case in which a unit is fixed and the vibrator unit is accommodated, wherein the piezoelectric material plate protrudes from both ends of the fixing plate from one end of the fixing plate, respectively. The two piezoelectric material plates fixed on both sides of the fixed plate are simultaneously cut with the same tool from the protruding end protruding from one end of the fixed plate toward the fixed portion, and the cut is fixed at a fixed pitch. And forming a vibrator unit in which rod-shaped piezoelectric vibrators are arranged on both sides of the fixed plate, and housing the vibrator unit in a head case to obtain a liquid jet head. .

  In order to solve the above problems, the liquid jet head of the present invention is bonded to a flow path forming substrate having a row of pressure generation chambers communicating with each nozzle opening formed in a row and one surface of the flow path forming substrate. A flow path unit having an elastic plate formed thereon, a vibrator unit in which a piezoelectric vibrator that deforms the elastic plate to generate pressure in the pressure generation chamber is fixed to the fixed plate in a row, and the flow path unit includes The vibrator unit is arranged in a fixed pitch on both sides of the fixed plate so that the piezoelectric vibrator protrudes from one end of the fixed plate in a rod shape. In addition, the base portion of each piezoelectric vibrator is formed to be fixed to a fixed plate, and the vibrator unit includes one of the piezoelectric vibrator rows formed on both surfaces of the fixed plate. Column The direction end, and summarized in that accommodated in the head case as the column direction positioning portion of the two rows piezoelectric vibrator row of.

  That is, in the method of manufacturing a liquid jet head according to the present invention, the piezoelectric material plates are fixed to both surfaces of the fixed plate so as to protrude from one end of the fixed plate, and the two piezoelectric material plates are fixed to both surfaces of the fixed plate. On the other hand, a cut is formed simultaneously from the protruding end protruding from one end of the fixed plate toward the fixed portion with the same tool, and a plurality of the cuts are formed at a constant pitch. The arranged vibrator units are formed, and the vibrator units are accommodated in the head case. In this way, by forming notches with the same tool on the two piezoelectric material plates fixed to both surfaces of the fixed plate to form two rows of piezoelectric transducers, the two rows of piezoelectric transducers are substantially the same. It is formed with the positional accuracy. Since the transducer unit in which two rows of piezoelectric transducer arrays are formed on one fixed plate is accommodated in the head case, the transducer units are not positioned for each column as in the prior art, but are substantially the same. By positioning the fixed plate on which two rows of piezoelectric vibrator rows formed with positional accuracy are positioned, the two rows can be positioned simultaneously. In this way, since two rows of piezoelectric vibrators formed with substantially the same position accuracy can be positioned simultaneously, there is almost no variation in the position accuracy of the piezoelectric vibrators between the two rows. Even in the case of having three or more piezoelectric vibrator rows, variations in positional accuracy of the entire piezoelectric vibrator can be suppressed, and as a result, variations in droplet ejection characteristics are reduced, leading to an improvement in image quality. In addition, by configuring the fixing plate from a metal plate, the fixing plate itself can be made thin while maintaining the rigidity of the liquid ejecting head itself, which is advantageous in reducing the size of the liquid ejecting head itself. Furthermore, since the contact portion with the resinous head case is reduced, even if the head case expands due to the influence of the environmental humidity, the influence of the expansion on the placement accuracy of the piezoelectric vibrator is reduced. As a result, the deterioration of the injection characteristics due to the decrease is reduced.

  In the method of manufacturing a liquid jet head according to the aspect of the invention, when the vibrator unit is accommodated in the head case, among the piezoelectric vibrator rows formed on both surfaces of the fixed plate, the column direction end of one piezoelectric vibrator row is used. When accommodated as a positioning portion in the column direction of two rows of piezoelectric vibrator rows, two rows of piezoelectric vibrator rows formed with substantially the same positional accuracy can be simultaneously positioned by one positioning portion. There is almost no variation in the positional accuracy of the piezoelectric vibrators between the two rows. In addition, the workability of the positioning work in a limited space is dramatically improved, so that the work efficiency is improved and the workability is improved, and the accuracy of the entire liquid jet head is also positively affected, and the precision level is improved. .

  In the method of manufacturing a liquid jet head according to the present invention, when the tool is a wire saw and two piezoelectric material plates fixed to both surfaces of the fixed plate are simultaneously cut with the wire saw, The two piezoelectric material plates fixed on both sides can be cut with the same wire saw, and two rows of piezoelectric vibrators can be formed with substantially the same positional accuracy.

  In the method of manufacturing a liquid jet head according to the aspect of the invention, the head case is formed with two openings for bringing the tip of the piezoelectric vibrator array into contact with the flow path unit, and is formed between the openings. When the surface of the fixed plate on the flow path unit side is in contact with the fixed bar, the surface of the fixed plate on the flow path unit side is in contact with the fixed bar and is orthogonal to the row of piezoelectric vibrators. Directional positioning work can be performed. For this reason, the workability of the positioning work in a limited space is dramatically improved, so that the work efficiency is improved, and the workability is improved, so that the accuracy of the entire liquid jet head is also affected and the accuracy level is improved. To do. Furthermore, since the number of contact portions parallel to the injection direction with the resinous head case is reduced, even if the head case expands due to the influence of environmental humidity, the expansion has little effect on the placement accuracy of the piezoelectric vibrator. Therefore, the deterioration of the injection characteristics due to environmental humidity and the like is reduced.

  In the method of manufacturing a liquid jet head according to the aspect of the invention, the flow path unit has a structure in which two rows of pressure generation chambers are arranged to face each other, and common ink storage chambers are arranged on both sides thereof. In the vibrator unit, when the piezoelectric vibrators corresponding to the two rows of the pressure generating chambers are formed on both surfaces of the fixed plate, the rows of the pressure generating chambers are closely opposed to each other. Therefore, the piezoelectric vibrator arrays must be positioned close to each other in a limited space, improving the workability of positioning work in the limited space, improving the work efficiency, and improving the workability. The effect of improving the accuracy level by exerting a good influence on the accuracy of the entire liquid ejecting head is noticeable and effective.

  In the liquid ejecting head according to the aspect of the invention, the vibrator units may be arranged on the both sides of the fixed plate at a fixed pitch so that the piezoelectric vibrators protrude from one end of the fixed plate in a rod shape. The base unit is formed by being fixed to a fixed plate, and the vibrator unit includes two rows of piezoelectric transducer rows arranged at one end of one piezoelectric vibrator row among the piezoelectric vibrator rows formed on both surfaces of the fixed plate. It is housed in the head case as a positioning portion in the row direction of the transducer row. Rather than positioning the transducer unit for each row as in the past, positioning two rows simultaneously by positioning a fixed plate on which two rows of piezoelectric transducer rows formed with substantially the same positional accuracy are formed. Therefore, there is almost no variation in the positional accuracy of the piezoelectric vibrators between the two rows. Further, since the two piezoelectric vibrator rows can be simultaneously positioned by one positioning portion, there is almost no variation in the positional accuracy of the piezoelectric vibrators between the two rows. In addition, the workability of the positioning work in a limited space is dramatically improved, so that the work efficiency is improved and the workability is improved, and the accuracy of the entire liquid jet head is also positively affected, and the precision level is improved. . Even in the case of having three or more piezoelectric vibrator rows, variations in positional accuracy of the entire piezoelectric vibrator can be suppressed, and as a result, variations in droplet ejection characteristics are reduced, leading to an improvement in image quality. In addition, by configuring the fixing plate from a metal plate, the fixing plate itself can be thinned while maintaining the rigidity of the liquid ejecting head itself, which is advantageous for downsizing the liquid ejecting head itself. Furthermore, since the contact portion with the resinous head case is reduced, even if the head case expands due to the influence of the environmental humidity, the influence of the expansion on the placement accuracy of the piezoelectric vibrator is reduced. As a result, the deterioration of the injection characteristics due to the decrease is reduced.

  In the liquid ejecting head according to the aspect of the invention, the head case may include two openings for bringing the tip of the piezoelectric vibrator array into contact with the flow path unit, and a fixed plate may be provided between the openings. If a fixed bar that contacts the flow path unit side surface is formed, positioning in the direction orthogonal to the rows of piezoelectric vibrators with the flow path unit side surface of the fixed plate in contact with the fixed bar Work can be done. For this reason, the workability of the positioning work in a limited space is dramatically improved, so that the work efficiency is improved, and the workability is improved, so that the accuracy of the entire liquid jet head is also affected and the accuracy level is improved. To do. Furthermore, since the number of contact portions parallel to the injection direction with the resinous head case is reduced, even if the head case expands due to the influence of environmental humidity, the expansion has little effect on the placement accuracy of the piezoelectric vibrator. Therefore, the deterioration of the injection characteristics due to environmental humidity and the like is reduced.

  In the liquid ejecting head according to the aspect of the invention, the flow path unit has a structure in which two rows of pressure generation chambers are arranged to face each other, and common ink storage chambers are arranged on both sides thereof. When the piezoelectric vibrators corresponding to the two rows of the pressure generating chambers are formed on both surfaces of the fixed plate, the unit faces the rows of the pressure generating chambers close to each other. The piezoelectric vibrator array must be positioned close to each other in a limited space, and the workability of positioning work in the limited space is improved, the work efficiency is improved, and the workability is improved. The effect of improving the accuracy level by exerting a good influence on the accuracy of the entire ejection head appears remarkably and is effective.

  Next, embodiments of the present invention will be described in detail.

  1 to 7 are views showing an example of the structure of an ink jet recording head 1 to which the liquid jet head of the present invention is applied. 1 is an exploded perspective view showing the overall structure of the recording head 1, FIG. 2 is a longitudinal sectional view of the recording head 1, and FIG. 3 is an AA sectional view of the recording head 1 (nozzle plate with the flow path unit removed). 4 is a view of the recording head 1 viewed from the head case side, FIG. 5 is a cross-sectional view of the recording head 1 taken along line BB, FIG. 6 is a perspective view of the vibrator unit, and FIG. It is a partially broken perspective view of a head case.

  The recording head 1 includes a head case 16 in which a piezoelectric vibrator 14 serving as a pressure generating unit is accommodated, and a flow path unit 26 that is fixed to a unit fixing surface of the head case 16 with an adhesive or the like.

  As shown in FIGS. 1 and 2, the flow path unit 26 includes a nozzle plate 10 in which nozzle openings 15 for ejecting ink are formed in a row, and a row of pressure generation chambers 19 communicating with the nozzle openings 15. And a flow path forming substrate 11 in which a flow path space including an ink storage chamber 17 that stores ink to be supplied to each pressure generating chamber 19 is formed, and the pressure generating chamber 19 bonded to one surface of the flow path forming substrate 11 A vibration plate (elastic plate) 12 that seals the flow path space that is included is laminated.

  The nozzle plate 10 is provided with a plurality of nozzle openings 15 to form a nozzle array 25. In this example, two nozzle arrays 25 are formed to eject different types of ink. The nozzle plate 10 is formed from a stainless steel plate.

  The flow path forming substrate 11 is provided with a pressure generation chamber 19 that communicates with the nozzle openings 15. A common ink storage chamber 17 that communicates with each pressure generation chamber 19 via the ink supply path 18 and stores ink to be supplied to each pressure generation chamber 19 is arranged along the row of the pressure generation chambers 19. It is formed to be arranged.

  The nozzle row 25 is provided in a direction perpendicular to the paper surface in FIG. In this example, two nozzle rows 25 are provided, and two rows of pressure generating chambers 19 are provided so as to correspond to the nozzle rows 25. The rows of the pressure generating chambers 19 are arranged so as to face each other in two rows, and one common ink storage chamber 17 is arranged on each side corresponding to each row of the pressure generating chambers 19. . In this example, the flow path forming substrate 11 is formed by etching a Si single crystal substrate.

  The diaphragm 12 is made of a polyphenylene sulfide film, and is formed by laminating island portions 13 made of stainless steel.

  The nozzle plate 10 is stacked on one surface of the flow path forming substrate 11, and the flow path unit 26 is configured by stacking the diaphragm 12 on the other surface so that the island portion 13 is disposed outside.

  On the other hand, the head case 16 is formed by injection-molding a thermosetting resin or a thermoplastic resin, and the diaphragm 12 is deformed in an accommodation space 21 penetrating vertically in accordance with the pressure generating chambers 19. A piezoelectric vibrator 14 for generating pressure is accommodated in the pressure generating chamber 19.

  The piezoelectric vibrator 14 is a piezoelectric vibrator 14 in a longitudinal vibration mode, the rear end side is fixed to the fixed plate 20, and the rod-shaped piezoelectric vibrators 14 form a row, and the piezoelectric vibrator 14 is fixed to the fixed plate 20. 20 is incorporated as a vibrator unit 30 fixed in a row to 20.

  As shown in FIG. 6, the vibrator unit 30 in the recording head 1 is configured such that the piezoelectric vibrator 14 has a rod-like shape toward the nozzle plate 10 from one end located on the nozzle plate 10 side of the fixed plate 20 on both surfaces of the fixed plate 20. Are arranged at a constant pitch so as to protrude. The root portions of the piezoelectric vibrators 14 are connected as an integral substantially plate-like portion 33 and fixed to the fixed plate 20. A slit-like cut 34 is formed between the piezoelectric vibrators 14, and the cut 34 extends from the tip of the piezoelectric vibrator 14 toward the base side and is located on the nozzle plate 10 side of the fixed plate 20. It is formed to one end. Further, at the base portion of the piezoelectric vibrator 14, the cut 34 is formed from the one end of the fixing plate 20 so as to be deeper on the surface side than the fixing surface side of the piezoelectric vibrator 14 with the fixing plate 20. 14 is cut obliquely toward the surface opposite to the fixed portion. In this example, the fixing plate 20 is made of a metal plate such as aluminum.

  In the vibrator unit 30, the pressure generating chambers 19 are arranged in such a manner that two rows of the piezoelectric vibrators 14 formed on both surfaces of the fixed plate 20 face each other in the flow path unit 26. Corresponds to each of the columns.

  As shown in FIG. 7, the head case 16 is formed with an accommodating space 21 for accommodating the vibrator unit 30 described above. The housing space 21 has a large opening on the side opposite to the fixing surface of the flow path unit 26 of the head case 16, and the end of the row of the piezoelectric vibrators 14 is connected to the flow path unit 26 on the fixing surface. Two openings 32 for contacting the island portion 13 of the diaphragm 12 of the unit 26 are formed. And between the said opening parts 32, the fixed bar 31 with which the end surface by the side of the flow-path unit of the fixed plate 20 contact | abuts in the state in which the vibrator | oscillator unit 30 was accommodated in the accommodating space 21 is formed.

  Further, a guide groove 36 for guiding the fixing plate 20 is formed in the head case 16 on the opening side opposite to the flow path unit fixing surface with respect to the fixing bar 31 of the accommodation space 21. Further, guide slopes 37 are formed on both sides of the guide groove 36 to guide the piezoelectric vibrator 14 when the vibrator unit 30 is inserted into the accommodation space 21 from the opening side. The inner wall surface closer to the flow channel unit 26 fixing surface than the guide inclined surface 37 is a positioning surface S for positioning the position of the piezoelectric vibrator 14 in the column direction. Further, the side wall of the guide groove 36 of the fixed plate 20 serves as a positioning surface U that determines the position in the direction orthogonal to the rows of the piezoelectric vibrators 14.

  As shown in FIGS. 3 to 5, the vibrator unit 30 includes the row direction end T of one of the piezoelectric vibrators 14 among the rows of the piezoelectric vibrators 14 formed on both surfaces of the fixed plate 20. Two rows of piezoelectric vibrators 14 are accommodated in the head case 16 as positioning portions T in the column direction. At this time, the positioning portion T of the rows of the piezoelectric vibrators 14 and the positioning surface S which is the inner wall surface S of the opening portion of the head case 16 in the row direction face each other and are in contact with each other.

  Further, in the state where the vibrator unit 30 is accommodated, the positioning surface U on the side wall of the guide groove 36 of the fixed plate 20 and the plate surface of the fixed plate 20 come into contact with each other and the positioning in the direction orthogonal to the rows of the piezoelectric vibrators 14 is performed. Is done. In the state where the vibrator unit 30 is housed as described above, both end portions in the row direction of the fixing plate 20 of the vibrator unit 30 and the inner surface of the guide groove 36 are bonded and fixed by the adhesive 35.

  The front end surface of the piezoelectric vibrator 14 is fixed to the island portion 13 of the vibration plate 12 with the vibration plate 12 side of the flow path unit 26 bonded to the unit fixing surface of the head case 16 with an adhesive. The recording head 1 is configured by the fixing plate 20 being bonded and fixed to the head case 16.

  In the recording head 1 configured as described above, when a drive signal generated by a drive circuit (not shown) is input to the piezoelectric vibrator 14 via the flexible circuit board 22, the piezoelectric vibrator 14 is expanded and contracted in the longitudinal direction. . The expansion and contraction of the piezoelectric vibrator 14 causes the island portion 13 of the diaphragm 12 to vibrate to change the pressure in the pressure generation chamber 19 so that the ink in the pressure generation chamber 19 is ejected as ink droplets from the nozzle openings 15. It has become. In the figure, 24 is an ink flow path 24 for supplying ink to the ink storage chamber 17, and 27 is a head cover.

  The recording head 1 is attached to a carriage that reciprocates in the paper width direction of the recording paper, ejects ink droplets onto the recording paper while moving the carriage, and prints images and characters on the recording paper in a dot matrix. ing.

  With such a configuration, in the recording head 1 of the present invention, the vibrator units 30 are arranged on the both sides of the fixed plate 20 at a constant pitch so that the piezoelectric vibrators 14 protrude in a rod shape from one end of the fixed plate 20. At the same time, the base portions of the piezoelectric vibrators 14 are connected together as an integral substantially plate-like portion 33 and fixed to the fixed plate 20. The vibrator unit 30 is formed on both surfaces of the fixed plate 20. Among the 14 rows of piezoelectric vibrators formed in the head case 16, the row direction end T of one of the 14 rows of piezoelectric vibrators is accommodated in the head case 16 as a positioning portion T in the row direction of the 2 rows of piezoelectric vibrators 14 rows. Yes.

  For this reason, rather than positioning the transducer unit 30 for each column as in the prior art, the fixed plate 20 on which two rows of piezoelectric transducers 14 formed with substantially the same positional accuracy are positioned is positioned. Thus, since two rows can be positioned simultaneously, there is almost no variation in the positional accuracy of the piezoelectric vibrator 14 between the two rows. Further, since the two rows of piezoelectric vibrators 14 can be simultaneously positioned by one positioning portion T, there is almost no variation in the positional accuracy of the piezoelectric vibrators 14 between the two rows. In addition, since the workability of the positioning work in a limited space is dramatically improved, the work efficiency is improved, the workability is improved, and the accuracy of the entire recording head 1 is also affected, and the precision level is improved. .

  In addition, by configuring the fixed plate 20 from a metal plate, the fixed plate 20 itself can be thinned while maintaining the rigidity of the print head 1 itself, which is advantageous in reducing the size of the print head 1 itself. Furthermore, since the contact portion with the resinous head case 16 is reduced, even if the head case 16 expands due to the influence of environmental humidity or the like, the influence of the expansion on the placement accuracy of the piezoelectric vibrator 14 is reduced. Deterioration of injection characteristics due to environmental humidity and the like is reduced.

  Further, the head case 16 is formed with two openings 32 for bringing the ends of the piezoelectric vibrator 14 rows into contact with the flow path unit 26, and between the openings 32, a fixing plate 20 is provided. Since the fixed bar 31 with which the surface on the flow path unit 26 side abuts is formed, the surface of the fixed plate 20 on the flow path unit 26 side is in contact with the fixed bar 31 and is orthogonal to the rows of the piezoelectric vibrators 14. Positioning work in the direction to be performed can be performed. For this reason, the workability of the positioning work in a limited space is dramatically improved, so that the work efficiency is improved and the accuracy of the recording head 1 as a whole is improved and the precision level is improved. To do. Furthermore, since the number of contact portions parallel to the injection direction with the resinous head case 16 is reduced, even if the head case 16 expands due to the influence of environmental humidity or the like, the expansion gives the placement accuracy of the piezoelectric vibrator 14. The influence is reduced, and the deterioration of the injection characteristics due to environmental humidity and the like is reduced.

  The flow path unit 26 has a structure in which two rows of pressure generation chambers 19 are arranged to face each other, and common ink storage chambers 17 are arranged on both sides thereof. Since the piezoelectric vibrators 14 corresponding to the two rows of the pressure generating chambers 19 are formed on both surfaces of the fixed plate 20, the rows of the pressure generating chambers 19 are close to each other. The piezoelectric vibrator 14 rows must be positioned close to each other in a limited space, so that the workability of the positioning work in the limited space is improved, the work efficiency is improved, and the workability is improved. The effect of improving the accuracy level by positively affecting the accuracy of the entire recording head 1 appears and is effective.

  Next, a method for manufacturing the recording head 1 of the present invention will be described.

  First, the vibrator unit 30 is made.

  As shown in FIG. 8, a piezoelectric material plate 40 is prepared. The piezoelectric material plate 40 is formed, for example, by thinly applying a piezoelectric material (for example, a titanic acid / lead zirconate based composite perovskite ceramic material) on a surface plate to form a first piezoelectric material layer, A first conductive layer is formed on the surface by vapor deposition or conductive paint so that an exposed portion is left in a part of the first piezoelectric material layer, and the piezoelectric material is thinly applied to the surface to form a second piezoelectric material. The material layer is formed, and the formation of the conductive layer on the side different from the first conductive layer is repeated as many times as necessary, and then the laminate is dried and baked at 100 to 1200 ° C. to form a plate-like piezoelectric material plate 40. The piezoelectric material plate 40 thus formed has an active portion 42 that vibrates longitudinally when a voltage is applied and an inactive portion 43 that does not contribute to vibration.

  As shown in FIG. 9, the piezoelectric material plates 40 are fixed to both surfaces of the fixed plate 20 with a conductive adhesive or the like so as to protrude from one end of the fixed plate 20. At this time, the inactive portion 43 of the piezoelectric material plate 40 and the fixed plate 20 are fixed, and the active portion 42 of the piezoelectric material plate 40 is protruded from one end of the fixed plate 20. The protruding active portion 42 is formed in the piezoelectric vibrator 14.

  As shown in FIG. 10 and FIG. 11, for the two piezoelectric material plates 40 fixed to both surfaces of the fixed plate 20, the same tool (one piece) is provided from the protruding end protruding from one end of the fixed plate 20 toward the fixed portion. A notch 34 is formed simultaneously with a wire saw 41). In this way, the slits 34 are simultaneously formed in the two piezoelectric material plates 40 fixed to both surfaces of the fixed plate 20 with one wire saw 41.

  At this time, the cut 34 is gradually formed from the protruding end of the piezoelectric material plate 40 toward the fixed portion, and finally the cut 34 is formed to the vicinity of the end of the fixed plate 20. At this time, the wire saw 41 is stretched so that tension is applied in the direction from the protruding end of the piezoelectric material plate 40 to the fixed portion, and in this state, the piezoelectric material plate 40 is cut while feeding the wire saw 41 in the longitudinal direction. The cut 34 is formed. At this time, since the wire saw 41 is inclined in the direction in which the tension is applied, the cut 34 is formed on the surface side of the root portion of the piezoelectric material plate 40 with respect to the fixing surface side of the piezoelectric material plate 40 with the fixing plate 20. It is formed so as to cut diagonally so that the direction becomes deeper.

  And (see FIG. 6), a plurality of the notches 34 are formed at a constant pitch in the longitudinal direction of the piezoelectric material plate 40, that is, in the column direction, and the rod-shaped piezoelectric vibrators 14 are arranged in rows on both surfaces of the fixed plate 20, respectively. A child unit 30 is formed. At this time, since the cut 34 is formed in the active portion 42, a bar-like portion remaining between the cuts 34 is formed in the piezoelectric vibrator 14 in the longitudinal vibration mode. Further, the inactive portion 43 fixed to the fixing plate 20 of the piezoelectric material plate 40 is not formed completely in the notch 34 but is formed in the plate-like portion 33 connected in an integral substantially plate shape. In this way, the vibrator unit 30 is formed.

  Next, as shown in FIGS. 12 and 13, the transducer unit 30 formed as described above is accommodated in the head case 16 to obtain the recording head 1.

  That is, the flow path unit 26 is bonded and fixed to the unit fixing surface of the head case 16 with an adhesive or the like. In the head case 16 in this state, the vibrator unit 30 is inserted from the front end side of the piezoelectric vibrator 14 through the opening opposite to the unit fixing surface. An adhesive is applied to the distal end surface of the piezoelectric vibrator 14, and the distal end surface of the piezoelectric vibrator 14 and the island portion 13 of the vibration plate 12 are joined with the adhesive.

  When the transducer unit 30 is accommodated in the head case 16, among the 14 rows of piezoelectric transducers formed on both surfaces of the fixed plate 20, the row direction end T of one of the piezoelectric transducers 14 rows is set to 2 rows of piezoelectric transducers. The transducers 14 are accommodated as positioning units T in the column direction.

  That is, when the vibrator unit 30 is inserted from the front end side of the piezoelectric vibrator 14 from the opening opposite to the unit fixing surface of the head case 16, the row of the piezoelectric vibrators 14 is inserted toward the accommodation space 21. The rows of piezoelectric vibrators 14 are inserted into the openings 32 while the piezoelectric vibrators 14 at both ends thereof are in contact with and guided by the guide inclined surfaces 37. Further, the fixing plate 20 is guided and inserted into the guide groove 36. Further, the vibrator unit 30 is inserted until the surface on the flow path unit side of the fixed plate 20 contacts the fixed bar 31 formed between the openings 32.

  At this time, of the 14 rows of piezoelectric vibrators formed on both surfaces of the fixed plate 20, the row direction end T of one of the piezoelectric vibrators 14 row is the inner wall surface S of the row direction end of the opening of the head case 16. Positioning is performed by facing and abutting the positioning surface S. Further, by bringing the side wall U of one guide groove 36 of the fixed plate 20 into contact with the plate surface of the fixed plate 20, the two rows of piezoelectric vibrators 14 are arranged in a direction perpendicular to the rows of the piezoelectric vibrators 14. The position is determined at the same time.

  According to the manufacturing method of the present invention described above, the two piezoelectric material plates 40 fixed to both surfaces of the fixed plate 20 are formed with the same tool by forming the notches 34 to form two rows of piezoelectric vibrators 14 rows. The two rows of piezoelectric vibrators 14 are formed with substantially the same positional accuracy. In order to house the transducer unit 30 in which two rows of piezoelectric transducers 14 are formed on one fixed plate 20 in the head case 16, the transducer unit 30 is not positioned for each column as in the prior art. Instead, by positioning the fixed plate 20 on which the two rows of piezoelectric vibrators 14 formed with substantially the same position accuracy are formed, the two rows can be positioned simultaneously. Thus, since the two rows of piezoelectric vibrators 14 formed with substantially the same position accuracy can be simultaneously positioned, there is almost no variation in the position accuracy of the piezoelectric vibrators 14 between the two rows. Even in the case of having three or more rows of piezoelectric vibrators 14, variations in positional accuracy of the entire piezoelectric vibrator 14 are suppressed, and as a result, variations in ink droplet ejection characteristics are reduced, leading to an improvement in image quality. In addition, by configuring the fixed plate 20 from a metal plate, the fixed plate 20 itself can be thinned while maintaining the rigidity of the print head 1 itself, which is advantageous in reducing the size of the print head 1 itself. Furthermore, since the contact portion with the resinous head case 16 is reduced, even if the head case 16 expands due to the influence of environmental humidity or the like, the influence of the expansion on the placement accuracy of the piezoelectric vibrator 14 is reduced. Deterioration of injection characteristics due to environmental humidity and the like is reduced.

  Further, when the transducer unit 30 is accommodated in the head case 16, among the rows of piezoelectric transducers 14 formed on both surfaces of the fixed plate 20, the row direction end portions of one of the piezoelectric transducers 14 rows are arranged in two rows. Since the piezoelectric vibrators 14 rows are accommodated as positioning portions in the row direction, two rows of piezoelectric vibrators 14 rows formed with substantially the same positional accuracy can be simultaneously positioned by one positioning portion, so that between the two rows Variation in positional accuracy of the piezoelectric vibrator 14 is almost eliminated. In addition, the workability of the positioning work in a limited space is dramatically improved, so that the work efficiency is improved and the workability is improved, and the accuracy of the entire liquid jet head is also positively affected, and the precision level is improved. .

  Further, since the notches 34 are simultaneously formed by the wire saw 41 with respect to the two piezoelectric material plates 40 fixed to both surfaces of the fixed plate 20, the same is applied to the two piezoelectric material plates 40 fixed to both surfaces of the fixed plate 20. The notches 34 can be formed by the wire saw 41, and the two rows of piezoelectric vibrators 14 can be formed with substantially the same positional accuracy.

  The head case 16 is formed with two openings 32 for bringing the ends of the piezoelectric vibrator 14 rows into contact with the flow path unit 26, and a fixing bar 31 formed between the openings 32. Further, since the surface of the fixed plate 20 on the flow path unit 26 side is in contact, the surface of the fixed plate 20 on the flow channel unit 26 side is in contact with the fixed bar 31 and is orthogonal to the row of the piezoelectric vibrators 14. Positioning work in the direction to be performed can be performed. For this reason, the workability of the positioning work in a limited space is dramatically improved, so that the work efficiency is improved and the accuracy of the recording head 1 as a whole is improved and the precision level is improved. To do. Furthermore, since the number of contact portions parallel to the injection direction with the resinous head case 16 is reduced, even if the head case 16 expands due to the influence of environmental humidity or the like, the expansion gives the placement accuracy of the piezoelectric vibrator 14. The influence is reduced, and the deterioration of the injection characteristics due to environmental humidity and the like is reduced.

  The flow path unit 26 has a structure in which two rows of pressure generation chambers 19 are arranged to face each other, and common ink storage chambers 17 are arranged on both sides thereof. Since the piezoelectric vibrators 14 corresponding to the two rows of the pressure generating chambers 19 are formed on both surfaces of the fixed plate 20, the rows of the pressure generating chambers 19 are close to each other. The piezoelectric vibrator 14 rows must be positioned close to each other in a limited space, so that the workability of the positioning work in the limited space is improved, the work efficiency is improved, and the workability is improved. The effect of improving the accuracy level by positively affecting the accuracy of the entire recording head 1 appears and is effective.

  In the above description, the flow path forming substrate 11 provided with two nozzle rows 25 and two ink storage chambers 17 is described. However, the present invention is not limited to this, and the nozzle rows 25 include three or more rows. The present invention can also be applied to the flow path forming substrate 11 in which three or more ink storage chambers 17 are formed or the flow path forming substrate 11 in which a plurality of ink storage chambers 17 corresponding to the plurality of nozzle rows 25 communicate with each other. In this case as well, the same effects can be obtained, and variations in the positional accuracy of the entire piezoelectric vibrator 14 can be suppressed. As a result, variations in the ejection characteristics of ink droplets can be reduced, leading to an improvement in image quality.

  In each of the above-described embodiments, the recording head 1 including the piezoelectric vibrator 14 in the longitudinal vibration mode has been described. However, the present invention is not limited thereto, and the present invention is applied to the recording head 1 including the piezoelectric vibrator in the bending vibration mode. The present invention can also be applied, and the pressure generating means can be applied not to a piezoelectric vibrator but to a bubble jet (registered trademark) type recording head 1 that generates bubbles by heating a liquid in a pressure generating chamber. .

  The present invention can be applied to a liquid ejecting apparatus, and a typical example thereof is an ink jet recording apparatus including an ink jet recording head 1 for image recording. As other liquid ejecting apparatuses, for example, an apparatus having a color material ejecting head used for manufacturing a color filter such as a liquid crystal display, an electrode material (conductive paste) used for forming an electrode such as an organic EL display, a surface emitting display (FED), etc. ) An apparatus equipped with an ejection head, an apparatus equipped with a bioorganic matter ejection head used for biochip manufacturing, an apparatus equipped with a sample ejection head as a precision pipette, and the like.

FIG. 3 is an exploded perspective view illustrating an example of a recording head to which the present invention is applied. It is sectional drawing which shows the said recording head. It is AA sectional drawing of the said recording head. It is the figure which looked at the said recording head from the opposite side to the flow path unit. It is a BB sectional view of the above-mentioned recording head. It is a perspective view which shows a vibrator | oscillator unit. It is a partially broken perspective view which shows a head case. It is a figure explaining the process of the manufacturing method of this invention. It is a figure explaining the process of the manufacturing method of this invention. It is a figure explaining the process of the manufacturing method of this invention. It is a figure explaining the process of the manufacturing method of this invention. It is a figure explaining the process of the manufacturing method of this invention. It is a figure explaining the process of the manufacturing method of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Recording head, 10 Nozzle plate, 11 Flow path formation board | substrate, 12 Diaphragm, 13 Island part, 14 Piezoelectric vibrator, 15 Nozzle opening, 16 Head case, 17 Ink storage chamber, 18 Ink supply path, 19 Pressure generation chamber, 20 fixing plate, 21 accommodating space, 22 flexible circuit board, 24 ink flow path, 25 nozzle row, 26 flow path unit, 27 head cover, 30 transducer unit, 31 fixing bar, 32 opening, 33 plate-shaped part, 34 notch , 35 Adhesive, 36 Guide groove, 37 Guide slope, 40 Piezoelectric material plate, 41 Wire saw, 42 Active part, 43 Inactive part,

Claims (8)

A flow path unit having a flow path forming substrate having a row of pressure generation chambers communicating with each nozzle opening formed in a row, and an elastic plate bonded to one surface of the flow path forming substrate;
A vibrator unit in which a piezoelectric vibrator that deforms the elastic plate to generate pressure in a pressure generating chamber is fixed in a row to a fixed plate;
A method of manufacturing a liquid jet head including the head unit in which the flow path unit is fixed and the vibrator unit is housed,
A piezoelectric material plate is fixed to both surfaces of the fixed plate so as to protrude from one end of the fixed plate,
For the two piezoelectric material plates fixed on both surfaces of the fixed plate, a plurality of the cuts are formed at a constant pitch at the same time with the same tool from the protruding end protruding from one end of the fixed plate toward the fixed portion. Forming a vibrator unit in which rod-like piezoelectric vibrators are arranged on both sides of the fixed plate,
A method of manufacturing a liquid jet head, wherein the vibrator unit is accommodated in a head case to obtain a liquid jet head.   When the vibrator unit is housed in the head case, among the piezoelectric vibrator rows formed on both surfaces of the fixed plate, the row direction end of one piezoelectric vibrator row is the row direction of the two rows of piezoelectric vibrator rows. The method of manufacturing a liquid jet head according to claim 1, wherein the liquid jet head is housed as a positioning portion.   3. The method of manufacturing a liquid jet head according to claim 1, wherein the tool is a wire saw, and the notch is simultaneously formed by the wire saw with respect to two piezoelectric material plates fixed to both surfaces of the fixed plate.   The head case is formed with two openings for bringing the tips of the piezoelectric vibrator rows into contact with the flow path unit, and a fixed bar formed between the openings is connected to the flow path unit of the fixed plate. The method of manufacturing a liquid jet head according to claim 1, wherein the side surface is in contact.   The flow path unit has a structure in which two rows of pressure generating chambers are arranged to face each other, and a common ink storage chamber is arranged on each side thereof. The vibrator unit is arranged on both sides of the fixed plate. 4. The method of manufacturing a liquid jet head according to claim 1, wherein a piezoelectric vibrator corresponding to a row of the pressure generation chambers of the two rows is formed. 5. A flow path unit having a flow path forming substrate having a row of pressure generation chambers communicating with each nozzle opening formed in a row, and an elastic plate bonded to one surface of the flow path forming substrate;
A vibrator unit in which a piezoelectric vibrator that deforms the elastic plate to generate pressure in a pressure generating chamber is fixed in a row to a fixed plate;
A head case to which the flow path unit is fixed and the vibrator unit is housed;
The vibrator units are arranged at a fixed pitch on both surfaces of the fixed plate so that the piezoelectric vibrators protrude from one end of the fixed plate in a rod shape, and the root portions of the piezoelectric vibrators are fixed to the fixed plate. Formed,
The vibrator unit has a head case in which the column direction end of one of the piezoelectric vibrator rows of the piezoelectric vibrator rows formed on both surfaces of the fixed plate is used as a positioning portion in the row direction of the two piezoelectric vibrator rows. A liquid ejecting head, wherein the liquid ejecting head is housed in the housing.   The head case is formed with two openings for bringing the tip of the piezoelectric vibrator array into contact with the flow path unit, and the surface of the fixed plate on the flow path unit side is abutted between the openings. The liquid ejecting head according to claim 6, wherein a fixed bar is formed in contact therewith.   The flow path unit has a structure in which two rows of pressure generating chambers are arranged to face each other, and a common ink storage chamber is arranged on each side thereof. The vibrator unit is arranged on both sides of the fixed plate. The liquid ejecting head according to claim 7, wherein piezoelectric vibrators corresponding to the rows of the pressure generating chambers of the two rows are formed.

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