JP2006228800A - Method of controlling movement of probe, and probe apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of controlling the movement of a probe which can perform positioning of a probe on a sample efficiently, and to provide a probe apparatus. <P>SOLUTION: In the probe apparatus which includes probes 10 and 11, in which a tip is arranged on the sample 23, probe drive means 6 and 7 for moving the probes 10 and 11, a control means for controlling the probe drive means 6 and 7, and an image forming unit 9 which can form images, including the tip of the sample 23 or the probes 10 and 11 and which arranges the tips of the probes 10 and 11 at a predetermined position of the sample 23; the control means controls the movements of the probes 10 and 11 by the probe drive means 6 and 7, based on a reference axis on the formed image and the deviated angle of the reference axis of the probe drive means corresponding to the reference axis. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a probe movement control method and a probe apparatus.

  It has a scanning electron microscope configuration with an electron optical system, a manipulator with a probe is placed in the sample chamber, and a scanned image of the sample obtained by scanning with an electron beam is acquired and displayed. And the like are detected through a probe, and thereby a probe apparatus capable of inspecting the electrical characteristics and the like of a sample is known.

  In such a probe device, it is necessary to accurately position the tip of the probe of the manipulator at a predetermined location such as a pad portion of a sample arranged in the sample chamber. Here, an example of a pad portion of a sample will be described as the predetermined portion.

  In this case, while the operator of the apparatus visually confirms the acquired scanning image, first, the electron optical system or the pad portion of the sample that is a contact object of the probe is displayed in the scanning image of the sample. Adjust the sample position. Thereafter, the probe of the manipulator arranged in the sample chamber is moved by manual operation, and the probe is operated so that the tip of the probe enters the scanned image.

  At this time, the operator performs a probe movement command operation while visually confirming the displayed scanning image. The X-axis and Y-axis in the image of the scanning image (scanning image) and the probe corresponding to these are operated. There may be an angular shift in the XY plane between the X axis and the Y axis of the drive system. That is, the X-axis and Y-axis on the screen in the scanned image and the X-axis and Y-axis of the drive mechanism of the drive system for moving the probe are not necessarily parallel to each other.

  Furthermore, it is desirable that the X axis and the Y axis of the drive system are orthogonal to each other, but the X axis and the Y axis are not always orthogonal to each other due to a displacement of the drive system or the like.

  In such a case, for example, even if the scanning direction of the electron beam is adjusted so that the X axis on the screen in the scanned image is parallel to the X axis of the drive system, the Y axis on the screen of the scanned image And the Y axis of the drive system are not parallel to each other, and an angular shift occurs even in this case.

  In addition, as an example of the manipulator arrange | positioned in the sample chamber of a scanning electron microscope as mentioned above, there exists a thing of patent document 1, for example.

JP 2002-365334 A

  As described above, between the X axis on the screen and the X axis of the probe driving system corresponding to the scanned image obtained by scanning with the electron beam, or the Y axis on the screen and the corresponding probe driving system. If there is an angular deviation with respect to the Y axis of the probe, the movement direction of the probe intended on the scanned image by the movement command of the operator and the movement of the probe that actually moves in the sample chamber by driving by the probe drive system There will be a difference between the directions.

  In this case, since the probe moves in a direction different from the direction intended by the operator on the scanned image, a positioning operation for positioning the tip of the probe on the sample pad portion by the operator's movement command is performed. It took time and effort, and it was difficult to perform positioning efficiently.

  The present invention has been made in view of these points, and an object of the present invention is to provide a probe movement control method and a probe apparatus capable of efficiently positioning a probe on a sample.

  A first probe movement control method according to the present invention includes a probe whose tip is arranged on a sample, probe driving means for moving the probe, control means for controlling the probe driving means, and sample or probe And a probe movement control method in a probe apparatus in which the tip of the probe is arranged on a predetermined position of a sample, the reference on the formed image being provided. The control means controls the movement of the probe by the probe driving means based on the deviation angle between the axis and the reference axis of the probe driving means corresponding to the reference axis.

In addition, the second probe movement control method according to the present invention controls a probe whose tip is arranged on the sample, probe driving means for moving the probe at least in the XY plane, and probe driving means. A probe movement control method in a probe apparatus, comprising: a control means for performing an operation; and an image forming means capable of forming an image including a sample or a tip of the probe, wherein the tip of the probe is placed on a predetermined position of the sample. Te, the deviation angle theta _x of the X-axis of the probe drive means corresponding to the X-axis and the X axis on the formed image, the probe driving means corresponding to the Y-axis and the Y-axis on the image The control means controls the movement of the probe by the probe driving means based on the deviation angle θ _{y from the} Y axis.

  Furthermore, a first probe device according to the present invention includes a probe whose tip is arranged on a sample, a probe driving means for moving the probe, a control means for controlling the probe driving means, and a sample or a probe An image forming means capable of forming an image including the tip of the probe, and a probe device for disposing the tip of the probe on a predetermined position of the sample, the reference axis on the formed image, and the reference axis The control means controls the movement of the probe by the probe driving means based on the deviation angle from the reference axis of the probe driving means corresponding to.

  The second probe device according to the present invention includes a probe whose tip is arranged on the sample, probe driving means for moving the probe at least in the XY plane, and for controlling the probe driving means. A probe device comprising: a control means; and an image forming means capable of forming an image including a sample or a probe tip, wherein the tip of the probe is arranged on a predetermined position of the sample. Based on the deviation angle θx between the X axis and the X axis of the probe driving means corresponding to the X axis, and the deviation angle θy between the Y axis on the image and the Y axis of the probe driving means corresponding to the Y axis. The control means controls the movement of the probe by the probe driving means.

  In the present invention, the control means is based on the deviation angle between the reference axis (X axis, Y axis) on the image and the reference axis (X axis, Y axis) of the probe driving means corresponding to the reference axis. Control the movement of the probe. Therefore, when the probe is moved, movement correction is automatically performed based on the deviation angle.

  Thereby, the positioning can be performed efficiently at the time of positioning the probe on the sample.

  Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic configuration diagram showing a probe apparatus according to the present invention, which has a configuration of a scanning electron microscope.

  In the figure, reference numeral 1 denotes an electron gun, and an electron beam 21 is emitted from the electron gun 1 toward a sample 23. The electron beam 21 emitted from the electron gun 1 is finely focused on the sample 23 by the focusing lens 2 and the objective lens 4 and irradiated. At this time, the electron beam 21 is appropriately deflected by the scanning coil 3, whereby the electron beam 21 scans a predetermined scanning area on the sample 23. The focusing lens 2, the scanning coil 3, and the objective lens 4 constitute an electron optical system 22.

  From the sample 23 scanned with the electron beam 21, detected electrons 24 such as secondary electrons are generated. The detected electrons 24 are detected by the electron detector 8. The electron detector 8 outputs a detection signal based on the detected detection result of the detected electrons 24.

  The detection signal from the electronic detector 8 is amplified, A / D converted, and sent to the image forming unit 9 as a digital signal. The image forming unit 9 forms image data based on the digital signal and outputs the image data to the bus line 14.

  Image data formed by the image forming unit 9 is sent via a bus line 14 to a display unit 19 having a CRT, LCD, or the like. The display unit 19 displays an image (scanned image) based on the image data. An operator who operates this apparatus can observe the scanned image of the sample by visually confirming the image displayed on the display unit 19.

  A sample 23 to be observed by scanning the electron beam 21 is placed on the sample stage mechanism 5. The sample stage mechanism 5 appropriately moves the sample 23 in the X direction and the Y direction along the horizontal plane, and the Z direction that is the vertical direction.

  Two probes (probes) 10 and 11 are provided above the sample 23. The tips of the probes 10 and 11 are arranged at predetermined positions on the sample 23. As a result, the tip is brought into contact with a predetermined position of the sample 23 and sample information such as a current flowing through the sample 23 can be detected. In this embodiment, one probe 10 is a current detection probe, and the other probe 11 is a voltage application probe.

  When the tips of these probes 10 and 11 are located in the scanning region of the electron beam 21 on the sample 23, image data of a scanning image including the tips of the probes 10 and 11 is formed by the image forming unit 9. It becomes.

  A voltage application unit 13 is connected to the voltage application probe 11. The voltage application unit 13 is for applying a predetermined voltage to the probe 11. As a result, a voltage is applied to the sample 23 by the voltage application unit 13 via the probe 11.

  A current detection unit 12 is connected to the current detection probe 10. The current detection unit 12 is for detecting a current flowing through the sample 23 via the probe 10.

  Therefore, the current detection unit 12 can detect the current flowing through the sample 23 due to the voltage applied to the sample 23 by the voltage application unit 13. The current detection data detected by the current detector 12 in this way is sent to the bus line 14.

  The current to be detected by the current detection unit 12 via the current detection probe 10 is not limited to the current caused by the voltage applied to the sample 23 as described above, and the sample 23 is scanned. It may be a current (for example, an absorption current) generated due to the electron beam 21.

  The probes 10 and 11 are attached to probe driving means 6 and 7, respectively. The probe driving means 6 and 7 are composed of, for example, piezo elements, and move the probes 10 and 11 in the XY plane (horizontal plane) and in the Z direction which is the vertical direction.

  Here, the electron gun 1, the focusing lens 2, the scanning coil 3, the objective lens 4, and the sample stage mechanism 5 are driven by corresponding driving units 1 a to 5 a, respectively. Each of these driving units 1 a to 5 a is connected to the bus line 14.

  The probe driving means 6 and 7 for moving the probes 10 and 11 are driven by the corresponding driving units 6a and 6b, respectively. These driving units 6a and 6b are also connected to the bus line 14, respectively. The current detection unit 12 and the voltage application unit 13 are also connected to the bus line 14.

  The bus line 14 is further connected to a control unit 15, an image processing unit 16, a calculation unit 17, a display unit 19, and an input unit 19.

  The control unit 15 is a control means for controlling each component of the apparatus described above. The image processing unit 16 performs predetermined image processing on the image data formed by the image forming unit 9, thereby specifying the position coordinates of the probe tip on the image as will be described later.

  Moreover, the calculating part 17 is for performing each calculation mentioned later. A storage unit 18 is connected to the calculation unit 17.

  Further, as described above, the display unit 19 is for displaying an image based on the image data formed by the image forming unit 9. The input unit 20 includes a pointing device such as a mouse and a keyboard, and is used for executing command input and manual operation by an operator of the apparatus.

  The above is the configuration of the probe apparatus according to the present invention. Next, a probe movement control method according to the present invention will be described. In the following embodiments, an example in which one probe 10 is controlled to move will be described.

  First, the preparation process described below is performed.

  The electron beam 21 from the electron gun 1 is caused to scan the sample 23 as described above. By scanning with the electron beam 21, detected electrons 24 such as secondary electrons are generated from the sample 23, and the detected electrons 24 are detected by the electron detector 8. At this time, the tip of the probe 10 is included in the scanning area by the electron beam 21.

  The electronic detector 8 outputs a detection signal based on the detection result, and the image forming unit 9 forms image data based on the digitized detection signal. Based on the image data thus formed, the display unit 19 displays a scanned image, and the operator visually confirms the scanned image.

  An example of a scanned image displayed by the display unit 19 is shown in FIG. In the figure, reference numeral 30 denotes a scanning image (image) displayed by the display unit 19, and the distal end portion 10 a of the probe 10 is displayed on the image 30.

  In this state, it is assumed that the probe 10 is located at a location indicated by a one-dot chain line on the image 30 in FIG.

The image data formed by the image forming unit 9 is sent to the image processing unit 16. The image processing unit 16 performs predetermined signal processing on the image data, and detects the position coordinates (x ₁ , y ₁ ) on the image 30 of the tip 10 a of the probe 10 at this time. The data of the position coordinates (x ₁ , y ₁ ) thus detected is sent to the calculation unit 17.

  Next, the operator operates the input unit 20 and inputs an instruction to move the probe 10 by the probe driving unit 6 along the X-axis driving direction of the probe driving unit 6 by a predetermined distance. At this time, the control unit 15 receives the instruction and controls the driving of the probe driving unit 6 through the driving unit 6a. As a result, the probe 10 moves by a predetermined distance along the X axis in the probe driving means 6.

  The image data after the movement of the probe 10 is formed by the image forming unit 9 in the same manner as described above. In the image 30 displayed by the display unit 19 based on the image data formed at this time, it is assumed that the probe 10 has moved to a location indicated by a solid line on the image 30 in FIG.

The image data created at this time is also sent to the image processing unit 16 and subjected to predetermined signal processing. Thereby, the coordinate position (x ₂ , y ₂ ) on the image 30 of the tip portion 10a of the probe 10 at the time is detected. Data of the detected coordinate position (x ₂ , y ₂ ) is also sent to the calculation unit 17.

  Here, in the example shown in the same figure, the probe 10 is formed on the basis of the direction of the X axis (that is, the X axis of the driving mechanism) of the probe driving means 6 in which the probe driving means 6 moves and the scanning of the electron beam 21. The image 30 is different from the X-axis direction.

Based on the data of the two position coordinates (x ₁ , y ₁ ) and (x ₂ , y ₂ ), the calculation unit 17 executes the following calculation formula to calculate θ _x .

Here, θ _x is a deviation angle between the X axis on the image 30 and the X axis of the probe driving means.

  Thereafter, the operator operates the input unit 20 again and inputs an instruction for moving the probe 10 by the probe driving means 6 along the Y-axis driving direction of the probe driving means 6 by a predetermined distance. Accordingly, the control unit 15 receives the instruction and controls the driving of the probe driving unit 6 via the driving unit 6a, and the probe 10 moves by a predetermined distance along the Y axis in the probe driving unit 6.

  An image showing the position of the probe 10 before and after the movement of the probe 10 at this time is shown in FIG. In the figure, the position of the probe 10 before movement is indicated by a one-dot chain line, and the position of the probe 10 after movement is indicated by a solid line.

In the same manner as described above, the image processing unit 16 detects the coordinate position (x ₃ , y ₃ ) on the image 30 of the distal end portion 10a of the probe 10 before the movement, and also the distal end portion 10a of the probe 10 after the movement. The position coordinates (x ₄ , y ₄ ) on the image 30 are detected.

  In the example shown in the figure, an image formed based on the direction of the Y axis of the probe driving means 6 (that is, the Y axis of the driving mechanism) in which the probe 10 is moved by the probe driving means 6 and the scanning of the electron beam 21. There is a difference in the direction of the 30 Y-axis.

Thereafter, the arithmetic unit 17 executes the following arithmetic expression based on the data of the two coordinate positions (x ₃ , y ₃ ) and (x ₄ , y ₄ ) to calculate θ _y .

Here, θ _y is a deviation angle between the Y axis on the image 30 and the Y axis of the probe driving means.

Based on the thus obtained θ _x and θ _y , the X axis and Y axis on the image, the X axis (hereinafter referred to as Xm axis) of the probe driving means, and the Y axis (hereinafter referred to as Ym axis). 4 is shown in FIG. 4 as a reference. Incidentally, as shown in the figure, Xm axis of the probe drive means relative to the X axis on the image, Ym axis of the probe drive means relative to the Y axis on the deviation angle theta _x shifted and, also images, There is a shift by a shift angle θ _y .

  Further, the X axis and the Y axis are orthogonal to each other, but the Xm axis and the Ym axis are not necessarily orthogonal to each other. The reason why the Xm axis and the Ym axis are not exactly orthogonal is because both are axes of the drive mechanism, and mechanical attachment errors and the like occur.

The values of θ _x and θ _y calculated as described above are stored in the storage unit 18 connected to the calculation unit 17.

  The above is the description of the preparation process.

Next, a probe movement control method that is controlled based on the above θ _x and θ _y will be described with reference to FIG. Here, FIG. 5 shows an image 30 which is a scanned image displayed by the display unit 19.

  As shown in the figure, the image 30 has an X axis and a Y axis on the image. The coordinate system defined by the X axis and the Y axis specifies the position of each pixel (pixel) in the image 30.

The tip of the probe is described below a case of moving from the position of P ₁ on the image 30 shown in FIG. 5 to the position of P _2. Here, the coordinates of P ₁ on the image 30 are (X ₁ , Y ₁ ), and the coordinates of P ₂ are (X ₂ , Y ₂ ).

Therefore, if the displacement at the time of moving from the position of P _{1 to} the position of P ₂ is expressed by a vector, it becomes a vector L in the figure, and the component of the vector L is (L _x , L _y ). At this time, since the coordinates of P ₁ and P ₂ are (X ₁ , Y ₁ ) and (X ₂ , Y ₂ ), for the X-axis direction component L _x of the vector L, L _x = (X ₂ − X ₁₎ to become. Further, the Y-axis direction component Ly of the vector L is L _y = (Y ₂ −Y ₁ ).

  When performing the above movement, the probe is moved by Lx in the X-axis direction on the image 30 and is also moved by Ly in the Y-axis direction.

At this time, the Xm axis of the probe driving means for moving the probe and the X axis on the image 30 are shifted by the shift angle θ _x as described above. Further, the Ym axis of the probe driving unit and the Y axis on the image 30 are shifted by the shift angle θy as described above.

  Therefore, the control signal from the control unit 15 sent to the drive unit that drives the probe drive unit is Lxm, which indicates the amount of movement of the probe in the Xm axis direction of the probe drive unit (that is, the X axis direction of the probe drive unit itself). Further, assuming that the amount of movement of the probe in the Ym-axis direction of the probe driving means (that is, the Y-axis direction of the probe driving means itself) is Lym, each is expressed by the following equations.

  Here, the calculation of the above mathematical formula is executed by the calculation unit 17.

That is, the calculation unit 15 reads the values of θ _x and θ _y stored in the storage unit 18 and calculates the above mathematical formula from the information on the coordinate positions of P ₁ and P _2. The data of Lxm and Lym is output to the control unit 15. The control unit 15 sends a control signal to the drive unit that drives the probe drive unit based on the data of Lxm and Lym. In addition, based on the probe movement command input by the operation of the input unit by the operator, the information on the coordinate positions of P ₁ and P ₂ as the position information before and after the movement is sent from the control unit 15 to the calculation unit 17. Yes.

  The probe driving means moves the probe based on the movement amounts Lxm and Lym. As a result, on the image 30 displayed on the display unit 19, the probe is moved based on the deviation angles θx and θy.

  Here, the derivation process of the above formula (formula 11) will be described.

In FIG. 5, when moving the tip of the probe from P ₁ to P ₂ , the probe is moved by Lx in the X-axis direction on the image 30 and by Ly in the Y-axis direction on the image 30. .

  First, a case where the probe is moved by Lx in the X-axis direction on the image 30 will be described with reference to FIG.

  As shown in FIG. 6, a case is considered in which the probe 10 is moved by Lx along the X-axis direction on the image 30 and thereby moved from the position indicated by the alternate long and short dash line to the position indicated by the solid line. In this case, as the movement of the probe 10 by the probe driving means, the probe 10 is moved by L1xm along the Xm axis of the probe driving means, and the probe 10 is moved by L1ym along the Ym axis of the probe driving means. Will be allowed to.

  At this time, according to the sine theorem, L1xm and L1ym are respectively expressed by the following mathematical expressions.

  Next, a case where the probe is moved by Ly in the Y-axis direction on the image 30 will be described with reference to FIG.

  As shown in FIG. 7, consider a case where the probe 10 is moved by Ly along the Y-axis direction on the image 30, thereby moving the probe 10 from the position indicated by the one-dot chain line to the position indicated by the solid line. In this case, as the movement of the probe 10 by the probe driving means, the probe 10 is moved by L2ym along the Ym axis of the probe driving means, and the probe 10 is moved by L2xm along the Xm axis of the probe driving means. Will be allowed to.

  At this time, L2xm and L2ym are expressed by the following mathematical formulas according to the sine theorem.

From the above, the respective amount of movement Lxm and Lym probe at the time of moving the tip of the probe from the position of P ₁ to the position of P ₂ in FIG. 5 is a as follows.

  From the above equations, the mathematical expressions (Mathematical Expressions 11) representing Lxm and Lym described above are derived.

  As described above, in the present invention, the deviation angle between the reference axis (X axis, Y axis) on the image and the reference axis (X axis, Y axis) of the probe driving means corresponding to the reference axis is set. Based on this, the control means controls the movement of the probe. Therefore, when the probe is moved, movement correction is automatically performed based on the deviation angle.

  Thereby, the positioning can be performed efficiently at the time of positioning the probe on the sample.

  Here, in the present invention, a case where the gain Gxm of the probe driving unit in the Xm-axis direction and the gain Gym of the probe driving unit in the Ym-axis direction are considered will be described below.

  As a ratio of the distance Rxm along the Xm axis of the probe driving means on the image 30 and the amount of movement Mxm of the probe along the Xm axis by the probe driving means set corresponding to the distance Rxm, the gain Gxm is as follows: It is calculated in advance by the following formula.

  Further, the gain Gym is set as a ratio between the distance Rym along the Ym axis of the probe driving means in the image 30 and the amount of movement Mym of the probe along the Ym axis by the probe driving means set corresponding to the distance Rym. It is calculated in advance by the following formula.

  These gains Gxm and Gym are stored in the storage unit 18.

  Then, the calculation unit 17 multiplies the movement amounts Lxm and Lym calculated as described above by the corresponding gains Gxm and Gym, respectively, and calculates the movement amounts Gxm * Lxm and Gym * Lym that are obtained thereby. The data is output to the control unit 15 as the amount of movement of the probe along the Xm axis and Ym axis of the probe driving means. Based on the data of Gxm * Lxm and Gym * Lym, the control unit 15 sends a control signal to the drive unit that drives the probe drive unit.

  In this case, since the probe movement is controlled in consideration of the gain Gxm in the Xm-axis direction of the probe driving means and the gain Gym in the Ym-axis direction of the probe driving means, the probe tip is moved to a more accurate position. Can be made.

  Although the above embodiment has been described as an example in which the movement of one probe 10 provided in the probe apparatus is controlled, the same control can be performed even when the movement of the other probe 11 is controlled.

  In the above description, the step of moving the probe in the vertical direction (Z direction) was not mentioned. However, when the probe is brought into contact with the sample, the positioning in the XY direction is performed as described above. The tip of the probe is brought into contact with the sample surface by lowering the probe along the Z direction.

  At this time, when the probe is lowered along the Z direction, the probe tip may be displaced in the XY direction. In this case, the positional deviation amount in the XY direction with respect to the movement of the probe tip along the Z direction is measured in advance, and the positional deviation amount in the XY direction with respect to the Z direction position of the probe tip is obtained as a function. Keep it.

  And the position correction | amendment amount in the XY direction of the probe tip accompanying a Z direction movement of a probe is position-corrected based on the calculation result using the said function.

  In this way, the tip of the probe can be accurately brought into contact with a predetermined position on the sample surface.

It is a schematic block diagram which shows the probe apparatus based on this invention. It is a figure which shows an example of the image displayed when moving a probe to a X direction. It is a figure which shows an example of the image displayed when moving a probe to a Y direction. It is a figure which shows the relationship between the X-axis and Y-axis on an image, and the X-axis (Xm axis) and Y-axis (Ym axis) of a probe drive means. It is a figure which shows the case where a probe front-end | tip is moved from P1 to P2 on an image. It is a figure which shows the case where a probe is moved along the X-axis of an image on an image. It is a figure which shows the case where a probe is moved along the Y-axis of an image on an image.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Electron gun, 2 ... Condensing lens, 3 ... Scanning coil, 4 ... Objective lens, 5 ... Sample stage mechanism, 6 ... Probe drive means, 7 ... Probe drive means, 8 ... Electron detector, 9 ... Image formation part, DESCRIPTION OF SYMBOLS 10 ... Probe, 11 ... Probe, 15 ... Control part, 16 ... Image processing part, 17 ... Calculation part, 18 ... Memory | storage part, 19 ... Display part, 20 ... Input part, 21 ... Electron beam, 22 ... Electron optical system, 23 ... Sample, 1a-7a ... Driver

Claims (8)

A probe whose tip is arranged on the sample, a probe driving means for moving the probe, a control means for controlling the probe driving means, and an image forming capable of forming an image including the tip of the sample or the probe A probe movement control method in a probe apparatus in which a tip of a probe is arranged on a predetermined position of a sample, comprising: a reference axis on a formed image; and a probe driving means corresponding to the reference axis A probe movement control method, wherein the control means controls the movement of the probe by the probe driving means on the basis of the deviation angle from the reference axis. A probe having a tip disposed on the sample, probe driving means for moving the probe at least in the XY plane, control means for controlling the probe driving means, and an image including the tip of the sample or the probe A probe movement control method in a probe apparatus comprising: an image forming means capable of forming; and a probe tip arranged on a predetermined position of a sample, the X axis on the formed image and the X axis on the formed image a shift angle theta _x of the X-axis of the corresponding probe driving means, on the basis of the deviation angle theta _y the Y-axis of the probe drive means corresponding to the Y-axis and the Y-axis on the image, the control means A probe movement control method, comprising: controlling probe movement by a probe driving means. The tip of the probe located at the first coordinate position (X ₁ , Y ₁ ) in the image is moved from the first coordinate position to the second coordinate position (X ₂ , Y ₂ ) in the image. When moving, the amount of movement Lxm of the probe along the X axis of the probe driving means is

And the amount of movement Lym along the Y axis of the probe driving means of the probe is set by

The probe moving method according to claim 2, wherein the probe moving method is set by: A gain Gxm, which is a ratio between a distance Rxm along the X axis of the probe driving means in the image and a movement amount Mxm of the probe along the X axis by the probe driving means set corresponding to the distance Rxm,

The ratio between the distance Rym along the Y axis of the probe driving means in the image and the amount of movement Mym of the probe along the Y axis by the probe driving means set corresponding to the distance Rym. The gain Gym becomes

Calculated by
Gxm * Lxm and Gym * Lym, which are movement amounts obtained by multiplying the set movement amounts Lxm and Lym by the corresponding gains Gxm and Gym, respectively, are respectively applied to the X axis and the Y axis of the probe driving means. 4. The method of moving a probe according to claim 3, wherein the amount of movement of the probe is along. A probe whose tip is arranged on the sample, a probe driving means for moving the probe, a control means for controlling the probe driving means, and an image forming capable of forming an image including the tip of the sample or the probe A probe device that disposes a tip of a probe on a predetermined position of a sample, and a deviation angle between a reference axis on a formed image and a reference axis of a probe driving unit corresponding to the reference axis Based on the above, the control means controls the movement of the probe by the probe driving means. A probe having a tip disposed on the sample, probe driving means for moving the probe at least in the XY plane, control means for controlling the probe driving means, and an image including the tip of the sample or the probe An image forming means that can be formed, and a probe device that arranges the tip of a probe on a predetermined position of a sample, comprising: an X axis on the formed image; and a probe driving means corresponding to the X axis a shift angle theta _x of the X axis, on the basis of the deviation angle theta _y the Y-axis of the probe drive means corresponding to the Y-axis and the Y-axis on the image, the control means of the probe by the probe drive means A probe apparatus characterized by controlling movement. The tip of the probe located at the first coordinate position (X ₁ , Y ₁ ) in the image is moved from the first coordinate position to the second coordinate position (X ₂ , Y ₂ ) in the image. When moving, the amount of movement Lxm of the probe along the X axis of the probe driving means is

And the amount of movement Lym along the Y axis of the probe driving means of the probe is set by

The probe device according to claim 6, wherein the probe device is set by: A gain Gxm, which is a ratio between a distance Rxm along the X axis of the probe driving means in the image and a movement amount Mxm of the probe along the X axis by the probe driving means set corresponding to the distance Rxm,

The ratio between the distance Rym along the Y axis of the probe driving means in the image and the amount of movement Mym of the probe along the Y axis by the probe driving means set corresponding to the distance Rym. The gain Gym becomes

Calculated by
Gxm * Lxm and Gym * Lym, which are movement amounts obtained by multiplying the set movement amounts Lxm and Lym by the corresponding gains Gxm and Gym, respectively, are respectively applied to the X axis and the Y axis of the probe driving means. The probe device according to claim 7, wherein the probe is moved along the probe.

Images