JP2006226869A - Optical measurement apparatus, optical microscope, and optical measurement method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical measurement apparatus, an optical microscope, and an optical measurement method allowing measurement of the two-dimensional depth of an object to be measured W, using a simple structure. <P>SOLUTION: Light successively emitted from in-line light-emitting elements of an LD array 11 is allowed to pass through an image rotator 15, which is arranged rotatably with different rotation angles to rotate an image of light passed through according to the rotation angle. The light is then allowed to converge by a converging lens 16 and irradiated on the object to be measured W. The light, reflected off the object to be measured W, is allowed to pass through the image rotator 15 again and return to the direction of the image of light at light emission. The reflected light is received by a one-dimensional image sensor 17, in which light-receiving elements are arranged in a single row. On the basis of the amount of light received in the one-dimensional image sensor 17, two-dimensional depth on the surface of the object to be measured W is measured. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an optical measurement device, an optical microscope, and an optical measurement method.

  2. Description of the Related Art Conventionally, an optical microscope including an optical measurement device that measures the depth (depth, film thickness) of the surface of a measurement object placed on a stage is known.

In this type, the surface of the measurement object is scanned one-dimensionally by driving the galvano mirror with the light projected from the light projecting element, and the light reflected on the surface of the measurement object is one-dimensional image sensor. And measuring the depth of the surface of the measurement object based on the amount of the received light.
Japanese Patent No. 3544019

  However, in the above configuration, only the one-dimensional depth of the surface of the measurement object can be measured, and when it is desired to measure the two-dimensional depth of the surface of the measurement object, the measurement is performed after one-dimensional scanning. Since the object must be scanned by rotating it 90 degrees, this work is necessary.

  In addition, it is conceivable to drive the two galvanometer mirrors to scan the surface of the measurement object two-dimensionally. In such a case, the light is received by the two-dimensional image sensor. The mechanical and electrical structure is complicated.

  Furthermore, in the configuration in which the galvanometer mirror is driven to scan the surface of the measurement object, a driving mechanism for driving the galvanometer mirror is required, and the apparatus becomes large.

  The present invention has been completed based on the above circumstances, and provides an optical measurement apparatus, an optical microscope, and an optical measurement method capable of measuring a two-dimensional depth of a measurement object with a simple configuration. With the goal.

As a means for achieving the above object, an optical measuring apparatus according to the invention of claim 1 is directed to a light (line-shaped image of a line-like image) projected from a light-projecting means provided with a light-projecting element. Formed parallel light) is converged from the parallel light by the converging lens and irradiated to the measurement object, and the light reflected by the measurement object becomes parallel light through the objective lens, and the parallel light is converged to An optical measuring device that receives light by a light receiving means that is arranged in a line corresponding to an image, and measures the depth of the measurement object surface based on the amount of light received by the light receiving means,
On the optical path between the light projecting unit and the converging lens and on the optical path between the objective lens and the light receiving unit, an image rotating unit that rotates an image of light transmitted according to a rotation angle is an optical axis. It is characterized in that it is configured so as to be rotatable around the center.

  Note that “projecting in a predetermined order” from the light projecting means not only projects the projecting elements one by one in a predetermined order, but also performs an operation of projecting a plurality of projecting elements simultaneously. To be performed in the order.

According to a second aspect of the present invention, in the first aspect, the converging lens is configured to also serve as the objective lens, and the measurement is provided on an optical path between the light projecting unit and the converging lens. One image rotating means that transmits both the light toward the object side and the reflected light from the measurement object is arranged coaxially with the convergent lens,
The reflected light from the measurement object passes through the image rotating means and is branched by the branching means, and the branched light is received by the light receiving means.

  According to a third aspect of the present invention, in the apparatus according to the second aspect, the projected light is converted into parallel light on the optical path between the light projecting means and the image rotating means, and the measurement object It is characterized in that an imaging lens for converging the reflected light from is provided.

  According to a fourth aspect of the present invention, there is provided the method according to any one of the first to third aspects, wherein the light projecting element emits light in a wavelength band of a visible light region.

  According to a fifth aspect of the invention, there is provided the projector according to any one of the first to fourth aspects, wherein the light projecting means has a light projection state of a substantially middle portion of the light projected in a line shape. It is characterized in that it is different from the light projection state except for the intermediate portion.

  A sixth aspect of the invention is characterized in that the image rotating means comprises an image rotator in any one of the first to fifth aspects.

A seventh aspect of the present invention is the method according to any one of the first to sixth aspects, wherein the light in the wavelength band projected from the light projecting means can be imaged, and the reflected light from the measurement object. Imaging means for imaging and outputting an imaging signal corresponding to the imaging position;
It is characterized by further comprising display means for receiving an imaging signal from the imaging means and displaying information corresponding to the imaging position.

In the invention of claim 8, the measurement object is arranged on a stage,
The optical measurement apparatus according to claim 1, wherein the relative position between the convergent lens and the measurement object is changed by changing a height of the stage or an axial position of the convergent lens. An optical microscope equipped with a driving means for changing
It is characterized in that it comprises stage control means for moving the stage or the converging lens to a position where the amount of light received by a predetermined light receiving element among the plurality of light receiving elements is maximized by driving the driving means.

  The optical measuring method according to the ninth aspect of the invention irradiates the measurement object by rotating the light projected in parallel in a line shape from the light projecting means (parallel light forming a line-shaped image) by the image rotating means. Then, the light reflected by the measurement object is rotated by the image rotation means and received by a line of light receiving elements of the light receiving means, and the depth of the surface of the measurement object is measured based on the amount of light received by the light receiving means. However, it has characteristics.

<Invention of Claims 1 and 9>
According to this configuration, the angle at which the measurement object is irradiated with the light projected in parallel in a line shape from the light projecting unit can be changed according to the rotation angle of the image rotating unit. Further, by rotating the image of the light reflected from the measurement object by the image rotating means, the reflected light can be received by the light receiving elements of the light receiving means arranged in a line. Therefore, since it is not necessary to provide a light receiving means in which the light receiving elements are arranged two-dimensionally, the depth of the surface of the measurement object (one-dimensional (Cross-sectional shape) can be measured two-dimensionally (in a polar coordinate system) from all directions. Moreover, the depth (two-dimensional uneven | corrugated shape) in a two-dimensional plane coordinate system can be measured.

  In addition, for example, when a galvanometer mirror or the like is operated to irradiate light to be measured on the measurement object in a line, a mechanical configuration for driving the galvanometer mirror or the like is required, and the configuration is complicated. Become. On the other hand, according to the present configuration, the depth (one-dimensional cross-sectional shape or two-dimensional uneven shape) of the measurement object surface is measured from any direction with a simple configuration in which light is projected from the light projecting means. be able to.

<Invention of Claim 2>
According to this configuration, the image rotation means (and the lens) can be shared between the irradiation of the measurement object and the reflection from the measurement object, so that the number of parts can be reduced.

<Invention of Claim 3>
Since it is not necessary to emit parallel light having a width corresponding to the measurement range from the light projecting means, the distance in the longitudinal direction of the light projecting means can be shortened.

<Invention of Claim 4>
According to this configuration, since light in the wavelength band of the visible light region is emitted, it is easy to recognize the projected light.

<Invention of Claim 5>
According to this configuration, it is easy to grasp the center position of the image of the light irradiated to the measurement object because the projection state of the substantially intermediate portion of the light projected in a line shape is different. Matching becomes easy.

<Invention of Claim 6>
According to this configuration, the image can be rotated by a predetermined angle with a simple configuration.

<Invention of Claim 7>
According to this configuration, it becomes easy to grasp the position of the measurement object, the light irradiation position on the measurement object, and the like.

<Invention of Claim 8>
According to this configuration, the focal position of the irradiated light can be matched with the surface position of the measurement object.

<Embodiment 1>
Hereinafter, an optical measurement apparatus according to Embodiment 1 of the present invention will be described with reference to FIGS. 1 to 4.
1. Configuration of Optical Measuring Device The optical measuring device 10 is used in an optical microscope or the like, and irradiates light from a laser light source onto the surface of the measuring object W on the stage 25 and reflects it from the surface of the measuring object W. The depth (depth, film thickness) of the surface of the measuring object W is measured based on light.

  The laser light source includes, for example, a large number of light projecting elements made of a He—Ne laser that emits red laser light (light having a wavelength band in the visible light region) arranged in a line (Y-axis direction in FIG. 3). An LD array 11 is used to receive light from the light source driving circuit 21 and sequentially project light.

  On the optical axis of the laser (below the LD array 11), a beam splitter 12, a quarter wavelength plate 13, an imaging lens 14, an image rotator 15, and a converging lens 16 are provided on the same axis. The laser light L emitted sequentially from the laser beam L passes through the beam splitter 12 and the quarter-wave plate 13 and is converted into parallel light (line-shaped parallel projected light (forms a line-shaped image) by the imaging lens 14. After being transmitted through the image rotator 15, the light is converged by the converging lens 16 and irradiated onto the surface of the measuring object W. Reflected light from the surface of the measurement object W is converted into parallel light by the converging lens 16 and transmitted through the image rotator 15, and is reflected by the beam splitter 12 while being converged by the imaging lens 14. A number of light receiving elements provided on the side of the splitter 12 are received by the one-dimensional image sensor 17 arranged in a line in the vertical direction (Z-axis direction).

  The image rotator 15 is also referred to as a Dove prism, and the upper surface 15A and the bottom surface 15B of FIG. Inclined end surfaces 15C and 15D that are inclined downward). As shown in FIG. 3, the image rotator 15 is arranged on the central axis A in a vertical orientation so that the direction of the reference axis S is orthogonal to the central axis A (optical axis). The surface) is rotatably held by the rotation drive unit 23 (see FIG. 1), so that the center axis A can be rotated.

  Then, as shown in FIG. 2, incident light from one inclined end surface 15C (the inclined end surface on the LD array 11 side in FIG. 3) is refracted by the inclined end surface 15C, then totally reflected by the bottom surface 15B, and the other inclined The light is refracted at the end face 15D (the inclined end face on the measurement object W side in FIG. 3) and passes through the image rotator 15. As a result, as shown in FIG. 4A, when observed from one inclined end face 15C toward the measuring object W, the direction of the image of the incident light is the direction of the image rotator 15 (the direction of the reference axis S). ) (A1) in the same figure), the other inclined end face 15D emits the light of the image (a2) in the direction opposite to that at the time of incidence.

  On the other hand, the reflected light from the measurement object W is incident on the image rotator 15 again from the other inclined end face 15D, and on the same optical path as when entering the image rotator 15 (when projecting to the measurement object W side). Then, the light passes through in the opposite direction (see FIG. 2) and exits from one inclined end face 15C. As a result, the direction of the image of the light emitted from the inclined end surface 15C returns to the same direction as that at the time of incidence (a3), and is reflected by the beam splitter 12 and arranged in the same direction (Z-axis direction) as the image. The light is received by the one-dimensional image sensor 17 (a4). Since the amount of light received by the light receiving element varies depending on the depth of the measurement target W, the depth of the surface of the measurement target W in the Y-axis direction can be obtained based on the light reception position and the amount of light received by the one-dimensional image sensor 17. it can.

  Although not shown in the drawings, each of the rotation driving units 23 includes a holding member that holds the image rotator 15, a bearing portion that supports the holding member so as to freely pivot, and a drive gear that meshes with a gear formed on the outer periphery of the holding member. And a pulse motor that drives the drive gear forward and reverse. The pulse motor receives a drive pulse from the rotation control circuit 22 and rotates the image rotator 15 by an arbitrary angle according to the number of pulses supplied.

  Here, the image rotator 15 rotates the image of the light transmitted through the image rotator 15 at a rotation angle that is twice the rotation angle of the image rotator 15 (rotation around the axis A). Therefore, when the rotation angle θ when the direction of the reference axis S of the image rotator 15 faces the Y axis direction of the XY coordinate plane is zero, the image rotator 15 is moved from the position where the rotation angle θ = 0 to a predetermined angular velocity. When the shaft is rotated, the transmitted image is rotated in the same direction at an angular velocity twice the angular velocity. That is, the image rotator 15 has a characteristic such that the transmission image has a rotation angle φ of 2θ with respect to the rotation angle θ.

Specifically, as shown in FIG. 4B, when observed from one inclined end face 15C of the image rotator 15 toward the measuring object W, the orientation of the image rotator 15 (the direction of the reference axis S) is the same. For example, when the image is rotated 45 degrees (rotation angle θ of the image rotator 15 = 45 degrees) from the direction of the image of the incident light (b1 in the figure), the image is 180 + 90 (45 from the other inclined end face 15D. The light of the transmitted image in the direction rotated by (2) degrees (that is, the negative direction of the X axis) is emitted (b2).
The light transmitted through the image rotator 15 is converged by the converging lens 16 and becomes an image (a negative direction of the X axis) in a direction rotated by 180 + 90 (45 × 2) degrees according to the rotation angle of the surface of the measurement object W. Laser light L is irradiated. Then, the light reflected from the surface of the measuring object W is converted into parallel light by the converging lens 16 and irradiated again to the image rotator 15.

  The reflected light incident on the image rotator 15 passes through the same optical path as the incident light in the image rotator 15 in the opposite direction, and the image of the laser light L transmitted through the image rotator 15 is rotated by −180 to 90 (45 × 2) degrees. (B3, that is, the same direction as the image at the time of light projection), and is reflected by the beam splitter 12 toward the one-dimensional image sensor 17. That is, if the rotation angle of the image rotator 15 is fixed at θ = 45 degrees even during reflection, an image in the same direction as that at the time of incidence (light projection) is emitted from one inclined end face 15C of the image rotator 15. It has become so.

  Then, the laser beam L reflected by the beam splitter 12 is changed to the same direction as that of the one-dimensional image sensor 17 by the beam splitter 12 (see FIG. 3) and sequentially received by the one-dimensional image sensor 17 ( b4). Since the amount of light received by each light receiving element varies depending on the depth of the measurement object W, the depth of the surface of the measurement object W in the X-axis direction is obtained based on the light reception position and the amount of light received by the one-dimensional image sensor 17. Can do. Although the rotation angle of the image rotator 15 is set to θ = 45 degrees, by changing the rotation angle θ, a one-dimensional cross-sectional shape (two-dimensional uneven shape) can be obtained two-dimensionally (in the polar coordinate system) from any direction. ) Can be measured.

  The stage 25 is moved in the vertical direction (Z-axis direction) by the stage drive mechanism 25 </ b> A, whereby the measuring object W placed on the stage 25 moves up and down and is converged by the converging lens 16. The surface position of the measurement object W is relatively variable in the Z-axis (vertical) direction with respect to the spot position of the laser beam L. When the stage drive mechanism 25A receives a drive signal from the stage control circuit 24 (stage control means), the stage 25 is moved up and down (vibrated) at a predetermined cycle.

2. Control of Optical Measuring Device Control by the optical measuring device 10 will be described with reference to FIG. First, the image rotator 15 is disposed at a position where the rotation angle θ = 0 degrees.
When the synchronization circuit 20 receives a measurement start signal from an operation switch (not shown) or the like, the synchronization circuit 20 sends a synchronization signal to the light source drive circuit 21, the rotation control circuit 22, the stage control circuit 24, and the CCD drive circuit 26.

When the light source driving circuit 21 receives the synchronization signal from the synchronization circuit 20, the light source driving circuit 21 sequentially projects the light projecting elements of the LD array 11 at a predetermined light projecting interval. When the light projecting operation is completed, the light projecting elements of the LD array 11 are sequentially projected again at a predetermined light projecting interval after a predetermined time (rotation time of the image rotator 15 to a different angle) elapses.
When receiving the synchronization signal from the synchronization circuit 20, the stage control circuit 24 drives the stage drive mechanism 25A in synchronization with the light projection timing, and moves the stage 25 up and down (in the Z-axis direction. The operation of oscillating (moving) within the height range including the maximum position) is repeated by the number of lights projected at a predetermined interval (interval of the reciprocating period). After one cycle (one round) has elapsed, after a predetermined time (rotation time of the image rotator 15 to a different angle) elapses, the operation of vibrating the stage 25 up and down again is repeated by the number of lights projected at a predetermined interval.
When the CCD drive circuit 26 receives the synchronization signal from the synchronization circuit 20, the laser light L received by the one-dimensional image sensor 17 is read based on the read clock pulse. The light amount signal is output to the microcomputer 30 via the read and gain control circuit 27 and the A / D converter 28.

  When the rotation control circuit 22 receives the synchronization signal from the synchronization circuit 20, the rotation control unit 22 drives the rotation drive unit 23 after the elapse of time until the light projecting operation of the LD array 11 previously stored in the memory is completed. The rotator 15 is rotated to a rotation angle θ = 45 degrees.

  Since the microcomputer 30 calculates the height of the measurement object W (the position of the stage 25 in the Z-axis direction) based on the light reception timing (synchronization timing), the measurement object from which the maximum light reception amount of the one-dimensional image sensor 17 can be obtained. The depth (height) of the object W is detected, and the (surface) cross-sectional shape of the measurement object W is displayed on a display unit such as a monitor (not shown) from the information on the continuous depth.

3. Effects of this Embodiment According to this embodiment, the laser light projected in one row (line shape) from the LD array 11 (light projection means) according to the rotation angle of the image rotator 15 (image rotation means). The angle at which L irradiates the measurement object W can be changed. Further, by rotating the image of the light reflected from the measurement object W by the image rotator 15, the reflected light can be received by the light receiving element of the one-dimensional image sensor 17 (light receiving means) arranged in a line. Accordingly, since it is not necessary to provide a light receiving means in which the light receiving elements are two-dimensionally arranged, the depth of the surface of the measurement object W (one-dimensional) can be reduced at a lower cost compared to a configuration in which the light receiving elements are two-dimensionally arranged. Can be measured two-dimensionally (in a polar coordinate system) from any direction. Moreover, the depth (two-dimensional uneven | corrugated shape) in a two-dimensional plane coordinate system can be measured.

  Further, for example, when the galvanometer mirror or the like is operated to irradiate the measurement object W with light in a line, a mechanical configuration for driving the galvanometer mirror or the like is required. It becomes complicated. On the other hand, according to the present embodiment, the depth of the measurement object surface (one-dimensional cross-sectional shape or two-dimensional unevenness) from any direction with a simple configuration in which light is projected from the LD array 11 in a single line (line shape). Shape) can be measured.

<Embodiment 2>
The optical measuring device 40 according to the second embodiment includes an observation optical system for magnifying and observing the appearance of the measurement object W. In the following examples, the same components as those of the first embodiment are denoted by the same reference numerals, description thereof is omitted, and only different parts are described.

  Specifically, in addition to the configuration of the first embodiment, an observation light source 41 including a lamp that emits white light is provided. On the optical axis of the lamp 41, a condenser lens 42, a first half mirror 43, and a first light source are provided. Two half mirrors 44 are provided.

The second half mirror 44 is disposed on the optical path between the image rotator 15 and the converging lens 16.
A converging lens 45 and a CCD camera 46 are arranged in a direction orthogonal to the first half mirror 43.

  As a result, the light from the lamp 41 is converted into parallel light by the condenser lens 42, and the light transmitted through the first half mirror 43 is reflected by the second half mirror 44 and irradiated onto the measurement object W.

  Then, the light from the observation light source reflected by the measurement object W and the light from the LD array 11 are converted into parallel light by the converging lens 16 and divided into light that is transmitted by the second half mirror 44 and light that is reflected. Is done.

  Of these, the light reflected by the second half mirror 44 is divided by the first half mirror 43, and the light reflected by the first half mirror 43 is focused by the focusing lens 45 and enters the CCD camera 46 (imaging means). To do.

  An image picked up by the CCD camera 46 is output to a display 47 (display means) as an image pickup signal corresponding to the image pickup position.

The display 47 displays information on the depth of the measurement object W measured based on the imaging signal on the screen.
As in the second embodiment, by irradiating the measurement object W with light from the observation light source, the position of the measurement object W captured by the CCD camera 46, the irradiation position of the light on the measurement object W, and the like are determined. It becomes easy to grasp.

<Embodiment 3>
In Embodiment 3, the projection state of the substantially intermediate portion of the light projected from the laser light source in a line shape is different from the projection state other than the substantially intermediate portion, so that the light irradiated on the measurement target W is changed. This makes it easy to grasp the center position of the image.

  Specifically, among the many LD arrays 11 arranged in a line, the light amount of the light projecting element near the center is changed (for example, only the light amount of the light projecting element near the center is increased, or the light projecting element near the center is increased. Even if it is a laser light source other than the LD array 11, the amount of light in the vicinity of the center may be varied by adjusting the amount of light.

As a result, it is easy to grasp the center position of the image of the light irradiated onto the measurement object W, and thus the alignment of the irradiation position is facilitated.
<Other embodiments>
The present invention is not limited to the embodiments described with reference to the above description and drawings. For example, the following embodiments are also included in the technical scope of the present invention, and further, within the scope not departing from the gist of the invention other than the following. Various modifications can be made.

  (1) The light emitting sequence of the LD array 11 may be projected one by one in a predetermined order, but the operation of simultaneously projecting a plurality of light projecting elements may be performed in a predetermined order. . In particular, by sequentially performing the operation of simultaneously emitting light from a plurality of light projecting elements that are not adjacent to each other, it is possible to perform high-speed measurement, and it is possible to perform measurement more accurately without noise than when light is emitted from adjacent light projecting elements simultaneously. Furthermore, the light may be projected in a line using one light projecting element.

  (2) In the above embodiment, the focal position in the Z-axis direction with respect to the measurement target W is changed by moving the stage up and down, but the present invention is not limited to this. For example, it is good also as a structure which vibrates the converging lens 16 up and down (Z-axis direction), and changes the focus position of the Z-axis direction with respect to the measuring object W.

(3) In the above embodiment, the laser light L is projected from directly above the measurement object W. However, the laser light L is irradiated on the surface of the measurement object W at a predetermined angle from the lick direction. Also good.
In this case, although not shown, an imaging lens, an image rotator, and an objective lens that are separate from the imaging lens 14, the image rotator 15, and the converging lens 16 of the above embodiment are provided on the light receiving side, for example, in an oblique direction. The laser beam L emitted from the light source can be received. At this time, it is necessary to rotate the rotation angle of the image rotator on the light receiving side according to the rotation angle of the image rotator on the light projecting side, but the beam splitter 12 is not necessary.
However, according to the above embodiment, the image rotator 15 (and the lens) can be used in common when irradiating the measurement object W and when reflecting from the measurement object W. The number of parts can be reduced.

  (4) In the above-described embodiment, the image rotation means is composed of the image rotator 15, but is not limited thereto. For example, a configuration may be adopted in which the image is rotated in the same manner as the image rotator by reflecting with three reflecting plates.

  (5) Although the rotation angle of the image rotator 15 is 45 degrees, other rotation angles may be used.

The figure which shows schematic structure of the optical measuring device of Embodiment 1. Diagram showing the optical path in the image rotator The figure which shows the direction of the image of the light before and after reflection by the measurement object (A) Diagram showing direction of light image at different positions when θ = 0 degree (b) Diagram showing direction of light image at different positions when θ = 45 degrees The figure which shows schematic structure of the optical measuring device of Embodiment 2.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Optical measuring device 11 ... LD array (light projection means)
12 ... Beam splitter (branching means)
14 ... imaging lens 15 ... image rotator (image rotation means)
16 ... Converging lens 17 ... One-dimensional image sensor (light receiving means)
DESCRIPTION OF SYMBOLS 22 ... Rotation control circuit 23 ... Rotation drive part 24 ... Stage control circuit (stage control means)
25 ... Stage 46 ... CCD camera (imaging means)
47. Display (display means)
W ... Measurement object

Claims (9)

The light projected in parallel in a line shape from the light projecting means provided with the light projecting element is converged by the converging lens to irradiate the measurement target, and the light reflected by the measurement target is parallel through the objective lens. This parallel light is converged and received by a light receiving means in which a plurality of light receiving elements are arranged in a line corresponding to the image of the light, and the surface of the measurement object is measured based on the amount of light received by the light receiving means. An optical measuring device for measuring depth,
On the optical path between the light projecting unit and the converging lens and on the optical path between the objective lens and the light receiving unit, an image rotating unit that rotates an image of light transmitted according to a rotation angle is an optical axis. An optical measuring device is provided so as to be rotatable around the center. The converging lens is configured to also serve as the objective lens, and on the optical path between the light projecting unit and the converging lens, light toward the measurement object side and reflected light from the measurement object The one image rotating means that transmits both of them is arranged coaxially with the converging lens,
2. The optical measurement apparatus according to claim 1, wherein the reflected light from the measurement object is transmitted through the image rotating means and branched by a branching means, and the branched light is received by the light receiving means. An imaging lens is provided on the optical path between the light projecting means and the image rotating means to make the projected light parallel light and converge reflected light from the measurement object. The optical measuring device according to claim 2. The optical measuring device according to any one of claims 1 to 3, wherein the light projecting element emits light in a wavelength band of a visible light region. 2. The light projecting unit according to claim 1, wherein a light projection state of a substantially intermediate portion of the light projected in a line shape is different from a light projection state of a light other than the substantially intermediate portion. 5. The optical measuring device according to any one of 4 above. The optical measurement apparatus according to claim 1, wherein the image rotation unit includes an image rotator. Imaging means capable of imaging light in the wavelength band projected from the light projecting means, imaging reflected light from the measurement object, and outputting an imaging signal corresponding to the imaging position;
The optical measurement apparatus according to claim 1, further comprising a display unit that receives an imaging signal from the imaging unit and displays information corresponding to the imaging position. The measurement object is arranged on a stage,
The optical measurement apparatus according to claim 1, wherein the relative position between the convergent lens and the measurement object is changed by changing a height of the stage or an axial position of the convergent lens. An optical microscope equipped with a driving means for changing
An optical system comprising: stage control means for moving the stage or the converging lens to a position where a light receiving amount of a predetermined light receiving element among the plurality of light receiving elements is maximized by driving the driving means. microscope. The light projected in parallel from the light projecting means is rotated by the image rotating means to irradiate the measurement object, and the light reflected by the measurement object is rotated by the image rotating means to form a line of light receiving means. An optical measurement method comprising: measuring the depth of the measurement object surface based on the amount of light received by the light receiving means.

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