JP2006220779A - Optical element and manufacturing method and forming method therefor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical element which can be aligned in a state in which the abutting of an outer peripheral butting part in alignment is avoided and which comprehensively exhibits excellent quality and productivity. <P>SOLUTION: A layered type optical element is characterized in that a plurality of formed parts each having a 1st a diffraction optical surface formed on a 1st substrate and a surface or a ridge part crossing an optical axis formed on the 1st substrate at a right angle are formed integrally with the 1st diffraction optical surface and a plurality of formed parts each having a surface or a ridge part crossing an optical axis arranged in an equally divided position on the outer peripheral side surface of a 2nd substrate at a right angle are formed integrally with the 2nd diffraction optical surface. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an optical element capable of providing alignment means for a laminated optical element, and a method for manufacturing and a method for manufacturing the optical element.

  Conventionally, Patent Document 1 describes a method of aligning a laminated diffractive optical element. The outline of the method will be described with reference to FIGS.

  FIG. 12 is a cross-sectional view of a conventional laminated diffractive optical element, and FIG. 13 is a diagram illustrating an alignment process of the conventional laminated diffractive optical element.

  In FIG. 12, 201 and 203 are optical glass substrates, 202 and 204 are molding surfaces replica-molded on the substrates 201 and 203, respectively. 202a and 204a are diffractive optical surfaces that are transfer-molded from a mold (not shown) at the time of replica molding. 202b and 204b are alignment marks for alignment that are integrally formed in the center of the diffractive optical surfaces 202a and 204a during replica molding. Similarly, 202c and 204c are outer peripheral butting portions integrally molded outside the effective diameter of the diffractive optical surfaces 2a and 4a at the time of replica molding. In FIG. 12, 202c and 204c are in a state of being mounted. In this mounted state, the optical surface 201a or 203a of either the substrate 201 or 203 is fixed by a technique such as air adsorption (not shown) (here, 203a is fixed for explanation of the next process).

  Next, as shown in FIG. 13, the other substrate side surface 1 b that is not fixed is fixed by the micrometer fixed terminals 205 and 207 that are arranged at four equal positions, and the movable tip terminals 206 and 208 of the micrometer through spring pressing. Fine adjustment is performed by pressing, and the image is enlarged by a CCD camera (not shown) or the like, and 202b is aligned with the alignment mark 204b with high accuracy. Here, it is also unusual to adopt a device configuration in which the substrate side surface 201b is finely adjusted by pressing with two fixed terminals of the micrometer arranged at approximately three equal positions and one movable terminal of the micrometer via spring pressing. Absent.

  Further, Patent Document 2 proposes that “the other alignment mark convex portion is configured to be fitted in one alignment mark concave portion”.

JP 2002-182022 A JP 2002-258024 A

  However, in the example of the alignment method of the laminated diffractive optical element disclosed in Patent Document 1, the surface friction between the outer peripheral abutting portions 202c and 204c mounted during alignment increases, and the substrate 201 on the substrate 203 is immobilized. “Adsorption phenomenon” occurred and the alignment work became impossible. In addition, the operator inadvertently tried to cancel the adsorption phenomenon, causing scratches on the diffractive optical surface, and the tact of the alignment process increased due to an increase in the number of repeated trials of the alignment operation.

  Further, in the example of Patent Document 2, it is difficult to control by replica molding within an accuracy range in which the alignment in the height direction of an alignment mark of several tens of μm or less that does not actually affect the optical performance can be recognized. Not introduced into production.

  Accordingly, in view of these problems, the present invention is capable of aligning in a state where the outer peripheral abutting portion is not attached during alignment, and has an optical element that is excellent in quality and productivity, and a manufacturing method and molding thereof. It aims to provide a method.

  In order to achieve the above object, according to a first aspect of the present invention, in the laminated optical element, the first diffractive optical surface molded on the first substrate and the optical axis molded on the first substrate are orthogonal to each other. A plurality of molded parts having a surface or a ridge that is formed integrally with the first diffractive optical surface, and a surface or a ridge that is orthogonal to the optical axis disposed at an equal position on the outer peripheral side surface of the second substrate A plurality of molded parts having a part are formed integrally with the second diffractive optical surface.

  The invention according to claim 2 is the step of adjusting the centering of the first diffractive optical surface and the second diffractive optical surface, and a plurality of molded parts arranged at equal positions on the outer peripheral side surface of the first substrate; The plurality of molding portions arranged at equal positions on the outer peripheral side surface of the second substrate are in surface contact or line contact at the opposing positions, and a certain amount of the first optical abutting surface and the second optical abutting surface are provided. In the step of adjusting the centering of the first diffractive optical surface and the second diffractive optical surface, the first fixing for fixing either the first substrate or the second substrate in the step of adjusting the center of the first diffractive optical surface and the second diffractive optical surface Means, second fixing means for fixing the other substrate not using the first fixing means in a center-coaxial posture, rotation means capable of controlling rotation of the other substrate, and the first substrate Aligning means movable in a plane direction with respect to the second substrate, and after the centering adjustment, 1 substrate is rotated, and the contact state of each of the plurality of molded portions on the outer peripheral side surface of the first substrate and the plurality of molded portions on the outer peripheral side surface of the second substrate is released, and the first optical abutting surface And means for bringing the second optical abutting surface into contact with each other.

  According to a third aspect of the present invention, there is provided a first molding cylinder mold fitted to the outer peripheral end of the first substrate or the second substrate, an opposing surface spaced apart from the molding mold in the optical axis direction, and the first substrate A second molding cylinder that is mounted on the outer surface of the effective diameter of the first substrate or the second substrate and has a plurality of grooves at equal positions, and is rotatably fitted to the first and second molding cylinders. Then, each of the regulating cylinders provided with through holes that can be filled with resin from the side surface portion is disposed as a molding means, and a plurality of molded portions having surfaces or ridges orthogonal to the optical axis are integrally formed with the diffractive optical surface. It is characterized by.

  According to the present invention, in the alignment step of the laminated optical element, the plurality of molded portions provided on the outer circumferences of the first lens substrate and the second lens substrate are engaged with each other, so that the element final abutting surfaces are in contact with each other. A gap is generated between the elements, and scratches are not generated on the diffractive optical surface due to increased friction between elements during alignment, and tact is not increased due to an increased number of repeated trials of alignment work.

  In addition, according to the present invention, the jig for rotating the lens substrate by sandwiching the molding portion provided on the second lens substrate (movable side) in the process after the start of alignment and after the completion can be configured. In addition, it is possible to easily provide process introduction before and after the start of alignment for engaging and releasing the molded portions provided on the outer periphery of the first substrate and the second substrate.

  Furthermore, according to the present invention, since the alignment process proceeds stepwise in the direction of improving accuracy, an increase in the number of repeated trials of the alignment operation does not cause an increase in tact.

  In addition, according to the present invention, it is possible to easily form a plurality of forming portions on the side surface of the substrate without being influenced by the forming of the transfer surface.

  In the embodiment of the present invention, the above configuration is applied, and in the alignment step of the laminated diffractive optical element, a plurality of molding portions provided on the outer periphery of the first lens substrate and the second lens substrate are engaged with each other. As a result, a gap is created between the last abutting surfaces of the elements, and the tact increases due to the occurrence of scratches on the diffractive optical surface due to increased friction between the elements during alignment and the number of repeated trials of alignment work. An optical element that is not incurred and a molding method thereof can be realized.

  In addition, in the process before the alignment start and after the completion, a jig for rotating the lens substrate by sandwiching the molding portion provided on the second lens substrate (movable side) is configured with the first substrate It is easy to introduce the process before and after the start of alignment to engage and release the molding parts provided on the outer periphery of the second substrate.

  Furthermore, in order to improve the alignment accuracy, the cradle of the first lens substrate (fixed side) is configured in advance as an XY table with a 0.1 μm pitch resolution that can be moved with respect to the second lens substrate. This makes it possible to adjust the position of the first lens substrate in preparation for the retry of alignment work to correct alignment at the element final abutment surface proximity position or to correct alignment misalignment due to element abutment after alignment. become.

<Embodiment 1>
FIG. 1 is a cross-sectional view of a configuration of an optical element according to Embodiment 1 of the present invention during alignment, FIG. 2 is a plan view of the optical element according to Embodiment 1, and FIG. FIG. 3B is a cross-sectional view illustrating a molding method for molding the molding portion of the present invention on the side surface of the first substrate, and FIG. 3B illustrates molding for molding the molding portion of the present invention on the side surface of the second substrate in the first embodiment. FIG. 4A is a plan view including a main part of an alignment device that engages and aligns with an optical element made of a second substrate, and FIG. 4B is a view from the second substrate. FIG. 5 is a side view of the alignment apparatus for aligning the optical element according to the first embodiment, and FIG. 6 is an alignment observation system. FIG. 7A is a diagram showing the configuration, and the alignment mark monitored in the first embodiment of the present invention is light. FIG. 7B shows a state in which the center of the alignment mark of the first substrate coincides with the center of the alignment mark of the first substrate, and FIG. (A) is sectional drawing showing a mode that the side surface of the 1st board | substrate and 2nd board | substrate of embodiment of this invention is joined, FIG.8 (b) is joining the 1st board | substrate and the side surface of a 2nd board | substrate. FIG. 9 is a schematic view showing the amount of misalignment of the normal plane according to the amount of wedge after the barrel contact of the two optical elements and the amount of wedge during alignment.

  1 and 2, 1 is a first substrate glass that serves as a base of an optical element, 2 is a first resin member that forms a blazed diffraction grating and an abutting surface of the optical element, and 5, 6, and 7 are adjustments. A first engaging resin member formed on the outer periphery of the first substrate that enables alignment by engaging with the optical element facing when the core is adjusted, 3 is a second substrate glass serving as a base of the optical element, 4 is A second resin member 8 that forms the abutting surface of the blazed diffraction grating and the optical element, and the second resin member 8 is formed on the outer periphery of the second substrate that engages with the opposing optical element during alignment adjustment to enable alignment. 2 is an engaging resin member.

  As the optical glass substrate of the substrate glasses 1 and 3, a general glass material S-BSL7 is used, and the first substrate glass 1 is a concave menis type and the second substrate glass 3 is a convex lens. Use.

  As the resin members 2 and 4, a photo-curing reaction type monomer resin is used, and a stamper type and a light irradiation device (not shown) are used on the first substrate glass 1 and the second substrate glass 3 as shown in FIG. The body mounting surfaces 2b and 4b that abut the relief pattern transfer surfaces 2a and 4a, the optical element made of the first substrate glass 1 and the optical element made of the second substrate 3 are replica-molded in advance. Here, the relief pattern transfer surface 2a and the body mounting surface 2b or the relief pattern transfer surface 4a and the body mounting surface 4b are integrally formed with each mold.

  The height on the curvature R of the body surface 2b is set to be several μm higher than the height on the curvature R of the grating tip of the transfer surface 2a, and the height on the curvature R of the body surface 4b is also the height of the grating tip of the transfer surface 4a. Since the height is set to several μm higher than the height on the curvature R, when the optical element made of the first substrate glass 1 and the optical element made of the second substrate glass 3 are joined, the lattice tip of the transfer surface 2a and the transfer surface 4a The lattice tips do not collide with each other. Also, the first resin member 2 and the second resin member 4 may be different resin materials as long as they match optical characteristics such as refractive index and Abbe number, and are thermosetting resins in the process. Alternatively, a photocuring / thermosetting resin may be used.

  The first engagement resin members 5, 6, 7 and the second engagement resin members 8, 9, 10 (9 and 10 are not shown) are the same photo-curing reaction type monomer resin as the resin members 2, 4. After applying and marking a coupling agent on each of the three equal portions of the side surfaces of the first glass substrate 1 and the second glass substrate 2, respectively, they are replica-molded in a band shape with a constant width (4 mm) The resin that has flowed out to the curvature R surface side of the first glass substrate 1 and the second glass substrate 2 is transfer-molded to each substrate side with a thickness of several μm, such as 5c, 6c, 7c, and 8c.

  Here, for example, the height of the engagement surface 5a of the first engagement resin member 5, the height of the engagement surface 8a of the second engagement resin member 8, the height of the engagement surface 6a, and the height of the engagement surface 9a. The height of the engaging surface 7a and the height of the engaging surface 10a are set so as to separate the previously formed body mounting surfaces 2b and 4b by 50 μm when engaged with each other. The friction disappears and the alignment work described later progresses. Further, the first engagement resin members 5, 6, 7 and the second engagement resin members 8, 9, 10 may be made of a resin material different from that of the resin members 2, 4. Alternatively, a photocuring / thermosetting resin may be used.

  Next, a method for forming the engaging resin members 5 and 8 will be described with reference to FIG.

  In FIG. 3, reference numeral 11 denotes a transfer mold for setting the first glass substrate 1 to transfer and mold the outer shape of the engagement resin member 5, and 16 denotes a second glass substrate 3 for setting the engagement resin member 8. This is a transfer mold for transferring and molding the outer shape. Reference numerals 12 and 17 denote transparent molded cylinders for transmitting a part of each of the engaging resin members 5 and 8 by transmitting ultraviolet rays, and reference numerals 13 and 18 denote resin materials filled from the side openings, which are rotated to open the openings. Is an outer shape forming cylinder.

  As the mold material of the transfer molds 11 and 16, a stainless steel usually used as a stamper mold is treated with chemical nickel plating and the surface is polished. The surface roughness was Ra = 0.2 μm. The transparent molded cylinders 12 and 17 were formed by dip-coating Cytop on the cylindrical end faces 12a and 17a made of Pyrex glass and curing at 80 ° C. for 1 hour to form a release film. The outer shape forming cylinders 13 and 18 were provided with through-holes of 1 mm on the side surface of the cylindrical fluororesin at three equal positions on the circumference.

  In FIG. 3A, the optical element 21 is preliminarily applied with a silane coupling agent on the effective diameter outside 1b and the side surface 1c of the first glass substrate 1 and then cured at 60 ° C. for 1 h. The effective diameter outside 1b of the first glass substrate 1 of the optical element 21 is placed on the surface 11a on the transfer mold 11, and the transparent molding cylinder 12 is fitted to the outer diameter of the first glass substrate 1, so that the transfer mold 11 The transparent cylinder 12 is held at a position 3 mm higher than the upper 11b. The outer shape forming tube 13 is inserted into the outer diameter of the transparent forming tube 12 and the outer diameter portion of the transfer die 11. The side opening 13a of the outer shape forming cylinder 13 is aligned with the center of the mold width of the transfer mold 11, and a resin material prepared in advance in the dispenser is sealed from the side opening 13a.

When an appropriate amount is encapsulated, the outer shape forming cylinder 13 is rotated by 120 °, and an appropriate amount of resin material is encapsulated from the side opening 13a. The resin material used here is a photo-curing reaction type monomer resin similar to the resin members 2 and 4 described above. Therefore, when ultraviolet light energy is applied from the upper surface of the optical element 21 by an unillustrated ultraviolet irradiator, the encapsulated resin material is cured. The irradiation profile used at this time was an initial weak irradiation (1 mW / cm 2 to prevent sinking of the resin material.
× 10 sec + 30 mW / cm 2 × 300 sec).

  In the mold release procedure, the outer shape forming cylinder 13 is first removed while rotating. Next, the transparent molding cylinder 12 is removed, and then the coolant is sprayed on the upper surface side of the first glass substrate 1, and the engagement resin member 5 and the effective diameter outside 1 b of the first glass substrate 1 are transferred from the transfer mold 11. Release the resin.

  Next, each of the engaging resin members 8, 9, 10 formed on the optical element 23 is sandwiched to rotate the optical element 23, and the engaging resin members 5, 6, 7 of the first glass substrate 1 and the first The apparatus configuration and operation process for engaging the engaging resin members 8, 9, 10 of the second glass substrate 3 with each other will be described with reference to FIG.

  In FIG. 4, reference numerals 31, 32, and 33 hold the engaging resin members 8, 9, and 10, respectively, and a holding member that can hold the optical element 23. Reference numeral 34 denotes a connection that integrally connects the holding members 31, 32, and 33. Reference numeral 36 denotes a lever that can be rotated by connecting the connecting member 34 with a coupling member 35; 37, a lift that can move the lever 36 up and down; 38, a cam portion that allows the optical element 23 to be rotated via the lever 36; It is.

  The holding members 31, 32, and 33 are made of spring stainless steel SUS304. For example, 31 is held by holding the engaging resin member 8 from both sides like 31 a and 31 b, but the engaging resin member 8. , 9, 10 in the initial state where the phase is not clear, the members (31a-31b, 32a-32b, 33a-33b) on both sides of the holding members 31, 32, 33 are in a separated state.

  When the phase of the optical element 23 is in the engaged state on the optical element 21, the connecting member 34 is manually rotated, the spring seat locking mechanism (not shown) is removed and adjusted downward in the thrust direction, and re-locked to hold the clamping member 31, The members (31a-31b, 32a-32b, 33a-33b) on both sides of 32, 33 are engaged with the engaging resin members 8, 9, 10.

  As shown in FIG. 4 (b), when the engaging resin members 8, 9, 10 and the clamping member are completely engaged, via a connecting gear connected to a driving source (motor) (not shown) along the cam portion 38. When the lift 37 is rotated to the right, for example, the lever 36 screwed with the lift 37 with a trapezoidal screw is also rotated to the right, and the connecting member 34 is rotated to the right integrally therewith. When the engagement members 8, 9, 10 of the optical element 23 and the engagement members 5, 6, 7 of the optical element 21 are completely disengaged, the lift 37 stops rotating from a drive source (not shown). To do. At this phase, the gap between the body surface 4b of the optical element 23 and the body surface 2b of the optical element 21 is 10 μm and is in a non-contact state.

  As a next step, a temporary alignment operation by correcting the position of the optical element 21 will be described with reference to FIGS.

  In FIG. 5, 42 is an air adsorption valve that adsorbs and holds the optical element 21 downward, 40 is a support base that supports the optical element 21, 41 is a rubber buffer ring that adsorbs the R1 surface of the optical element 21, and 50. , 51 and 52 are tilt adjustment screws 43 for adjusting the tilt of the support base 40, a Y table for moving the support base 40 in the Y direction, 44 a micrometer with a 0.1 μm pitch resolution for moving and adjusting the Y table 43, and 45 for support. An X table that moves the table 40 in the X direction, 46 is a micrometer with a resolution of 0.1 μm that adjusts the X table 45, 47 is a Z table that moves the support table 40 in the Z direction, and 48 is a table that moves the Z table 47. A micrometer with 0.5 μm pitch resolution to be adjusted, 61 is an objective lens with a focus function for observing the alignment mark, and 62 is an objective lens connected Barrel, 63 a zoom unit for zooming the objective lens, 64 is a CCD camera that connects to the barrel 62.

  In FIG. 6, 66 is a TV monitor for monitoring the imaging of the CCD camera 64, 65 is an adjuster for displaying a target on the TV monitor 64, 67 is an illuminator fiber for guiding incident light to the objective lens, and 68 is an illuminator light source.

  In advance, the air adsorption valve 42 is opened and the optical element 21 is adsorbed and fixed, and the level of the illuminator light source is adjusted to a desired brightness so that the alignment mark can be observed. The adjuster 65 and the CCD camera 64 are connected to the TV monitor 66, and both power supplies are set to the ON state. Further, the support table 40 is moved and set so that the center of the optical element 21 is monitored by adjusting the Y table micrometer 44 and the X table micrometer 46. The focus of the objective lens 61 is adjusted, and the depth of the objective lens 61 is focused on the alignment mark of the optical element 21.

As shown in FIG. 7A, when the inner ring zone 72 of the alignment mark 74 is monitored out of the outer ring zone due to the height difference between the ring zones,
The inclination adjusting screws 50, 51, 52 are adjusted so that the outer ring zone 72 enters the inner diameter of the inner ring zone 73. Here, since the magnification of 100 times of the CCD camera 64 and the maximum magnification of 20 times of the objective lens 61 are set, the sensitivity is 2000 times (1 μm deviation is monitored at 2 mm).

  Next, the Z table micrometer 48 is adjusted to + Z value side, that is, the optical element 21 is brought closer to the optical element 23 by +5 μm. Subsequently, the focus of the objective lens 61 is adjusted, and the depth of the objective lens 61 is adjusted to the alignment mark of the optical element 23. However, when the depth difference is 5 μm, as shown in FIG. 74 is also observed on the monitor at the same time. In this state, the alignment mark 84 of the optical element 23 should be close to the alignment mark 74. However, when the alignment mark 84 is not observed on the monitor, the zoom unit 63 is rotated to adjust the magnification of the objective lens to 5. It is lowered to about -6 times so that the alignment mark 84 is captured in the monitor area.

  The Y table micrometer 44 and the X table micrometer 46 are adjusted so that the alignment mark 84 is close to the alignment mark 74, and the magnification of the objective lens is increased up to 20 times, and the alignment mark 74 is shown in FIG. 7B. The Y table micrometer 44 and the X table micrometer 46 are finely adjusted so that the outer ring zone 73 is aligned with the inner diameter center of the inner ring zone 82 of the alignment mark 84.

  Next, the Z table micrometer 48 is adjusted to + Z value side by +4 μm. Here, it is reconfirmed that the outer ring zone 73 of the alignment mark 74 is at the center of the inner diameter of the inner ring zone 82 of the alignment mark 84. When the deviation occurs, the alignment mark is readjusted in the same manner as described above. Thus, the temporary alignment work has been completed.

  As the next step, the body surfaces 2b, 2c, and 2d of the optical element 21 are brought into contact with the body surfaces 4b, 4c, and 4d of the optical element 23, and after reconfirming the alignment, the optical elements 21 and 23 are joined to form an optical element. A process of releasing the clamping members 31, 32, 33 from the engaging resin members 8, 9, 10 of the element 23 will be described.

  Adjust the Z table micrometer 48 to the + Z value side by +1 μm. Similar to the above, the alignment mark is finally confirmed. Theoretically, the body surfaces 2b, 2c, and 2d of the optical element 21 should be abutted against the body surfaces 4b, 4c, and 4d of the optical element 23. Butting cannot be guaranteed. Accordingly, the Z table micrometer 48 is further adjusted to +2 μm toward the + Z value side.

By the way, the standard for the alignment accuracy is required to be about ± 2 μm for a lens having a diameter of φ50. In the stacked type element, the deviation on the normal plane with respect to the optical axis due to the falling of the butting is as shown in the following formula with reference to FIG.
tan θ = hA / R ⇒θ = tan ⁻¹ (hA / R)
tan θ = Δ2 / (hA + hB) => θ = tan ⁻¹ (Δ2 / (hA + hB))
Δ2 = hA (hA + hB) / R = (0.005 mm
× 0.01mm) /25mm=0.004 μm
Even if the abutting surface is tilted by 10 μm in terms of the Z value, the deviation on the normal surface remains at 0.002 μm. Even if the tilt of the normal surface of the molded part provided on the outer periphery of the substrate of the present invention with respect to the optical axis of the two substrates is centered so that the Z value is 0.1 mm, the deviation on the normal surface is 0.02 μm. Therefore, the tilt of the element final abutting surface does not affect the alignment accuracy range with the capability of replica molding.

  Next, a bonding agent is applied using a dispenser or the like to the outer peripheral boundary portion 3 equally divided portions 91, 92, and 93 of the optical elements 21 and 23 shown in FIG. 8, and light is cured using an unillustrated irradiator. . Here, a low-viscosity UV curable resin was used as the bonding agent. Subsequently, the air adsorbing valve 42 is opened to adsorb and fix the optical element 21, the connecting member 34 is manually rotated, the spring seat locking mechanism (not shown) is removed, the thrust is raised and adjusted, and the optical element 23 is re-locked. The holding members 31, 32, 33 are separated from the engaging resin members 8, 9, 10. Finally, the adsorption valve 42 is closed and the optical element 21 is opened.

  In general, the assembly process including alignment adjustment tends to be complicated and cumbersome, but in small lot production such as a large-diameter lens exceeding φ80 mm, adjustment specifications can be reduced by shortening the product cycle. The semi-automatic machine process by partial automation as mentioned above is preferable, rather than being fully automated.

  In the alignment process of the laminated optical element having the above-described configuration, a plurality of molding portions provided on the outer circumferences of the first lens substrate and the second lens substrate are engaged with each other so that the element abutting surfaces are in contact with each other. In other words, the diffractive optical surface is not flawed due to increased friction between elements during alignment, and the number of repeated trials of alignment work is not increased.

  In addition, in the process before the alignment start and after the completion, a jig for rotating the lens substrate by sandwiching the molding portion provided on the second lens substrate (movable side) is configured with the first substrate It is easy to introduce the process before and after the start of alignment to engage and release the molding parts provided on the outer periphery of the second substrate. Furthermore, in order to improve the alignment accuracy, the cradle of the first lens substrate (fixed side) is configured in advance as an XY table with a 0.1 μm pitch resolution that can be moved with respect to the second lens substrate. This makes it possible to adjust the position of the first lens substrate in preparation for the retry of alignment work to correct alignment at the element final abutment surface proximity position or to correct alignment misalignment due to element abutment after alignment. become.

<Embodiment 2>
The second embodiment of the present invention is shown in FIGS. 10 and 11 when the engaging portion 105a of the engaging resin member 105 of the optical element 121 and the engaging portion 108a of the engaging resin member 108 of the optical element 123 are brought into contact with each other. This is a modified example of the first embodiment in which the ridge-shaped engaging portions 105a and 108a are formed so that the contact portion is a spot.

  The molding method of the engaging resin members 105 and 108 is almost the same as that of the first embodiment, but the surface of the transfer mold (not shown) for transferring and molding the engaging portions 105a and 108a is different from the first embodiment and is a ridge portion. A reverse (reverse transfer) surface of the shape is formed.

  In addition, since the alignment process including the apparatus configuration is the same as that of the first embodiment, the description thereof is omitted.

  The effect of the present embodiment is that the first substrate 1 rotates the optical element 23 while sandwiching each of the engaging resin members 8, 9, 10 formed on the optical element 23. By the transmission from the drive source described in “Description of Device Configuration and Operation Process for Engaging Engagement Resin Parts 5, 6, 7 and Engagement Resin Parts 8, 9, and 10 of Second Substrate 3” When the lift 37 and the lever 36 are rotated and the connecting member 34 rotates to rotate the optical element 23 via the clamping members 31, 32, 33, the engagement resin portions 8, 9, 10 and the optical element 21 are engaged. The mutual contact friction of the composite resin portions 5, 6, and 7 can be reduced to 1/3. As a result, the clamping members 31, 32, 33 are fatigued due to the operation durability of the apparatus, and the engagement resin members 8, 9, 10 of the optical element 23 are engaged with the engagement resin members 5, 7 of the optical element 21. The optical element 23 is not dropped from the clamping members 31, 32, 33 at a completely out of phase. Therefore, an increase in cost due to device trouble and device configuration maintenance can be minimized.

It is a structure sectional view at the time of alignment adjustment of the optical element according to Embodiment 1 of the present invention. It is a structure top view at the time of the alignment adjustment of the optical element which concerns on Embodiment 1 of this invention. (A) is a cross-sectional view showing a molding method for molding the molded part of the present invention on the side surface of the first substrate according to the embodiment of the present invention, and (b) is a molded part of the present invention on the side surface of the second substrate. It is a structure sectional view showing the shaping | molding method which shape | molds. (A) is a top view including the principal part of the alignment apparatus which engages with the optical element which consists of a 2nd board | substrate of Embodiment 1 of this invention, and aligns, (b) is an optical element which consists of a 2nd board | substrate. It is a partial side view and cross-sectional view of an alignment apparatus that engages with and aligns the center. It is a side view of the alignment apparatus which aligns the optical element which concerns on Embodiment 1 of this invention. It is a figure showing the structure of the alignment observation system of Embodiment 1 of this invention. (A) is a figure showing a mode that the alignment mark monitored of Embodiment 1 of this invention inclines in the normal line direction with respect to an optical axis, (b) is the alignment mark center of a 1st board | substrate, and 2nd It is a figure showing a mode that the alignment mark center of the board | substrate of this corresponds. (A) is sectional drawing showing a mode that the 1st board | substrate of Embodiment 1 of this invention and the side surface of a 2nd board | substrate are joined, (b) is joining the side surface of a 1st board | substrate and a 2nd board | substrate. It is a top view showing a mode. It is the schematic showing the amount of alignment gaps of the normal line surface by the amount of wedges after body contact of two optical elements, and the amount of wedges at the time of alignment. It is a structure sectional drawing at the time of the alignment adjustment of the optical element which concerns on Embodiment 2 of this invention. It is a partial top view at the time of the alignment adjustment of the optical element which concerns on Embodiment 2 of this invention. It is sectional drawing of the conventional lamination type diffractive optical element. It is a figure showing the alignment process of the conventional lamination type diffractive optical element.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 1st board | substrate glass 2 1st resin member 2a, 4a Relief pattern transfer surface 2b, 4b Body mounting surface 3 2nd board | substrate glass 4 2nd resin member 5, 6, 7 1st engagement resin member 5a , 6a, 7a, 8a, 9a, 10a Engagement surface 8, 9, 10 Second engagement resin member 5c, 6c, 7c, 8c Outflow resin 11, 16 Transfer mold 12, 17 Transparent molding cylinder 13, 18 Outline molding Tube 13a Side opening 21, 23, 121, 123 Optical element 31, 32, 33 Nipping member 34 Connection member 36 Lever 38 Cam part 40 Support base 41 Buffer ring 42 Air adsorption valve 43 Y table 44, 46, 48 Micrometer 45 X table 47 Z table 61 Objective lens 62 Lens barrel 63 Zoom section 64 CCD camera 65 Adjuster 66 TV monitor 67 Fiber 68 Il Minator light source 72, 73 Inner ring zone (alignment mark)
74, 84 Alignment mark 105aa, 108a Engagement part

Claims (3)

In laminated optical elements,
A plurality of molded parts having a first diffractive optical surface molded on the first substrate and a surface orthogonal to the optical axis molded on the first substrate or a projecting part, and the first diffractive optical surface A plurality of molded parts that are formed integrally and have a surface perpendicular to the optical axis or a crest disposed at equal positions on the outer peripheral side surface of the second substrate are formed integrally with the second diffractive optical surface. An optical element.   In the step of adjusting the centering of the first diffractive optical surface and the second diffractive optical surface, a plurality of molding parts arranged at equal positions on the outer peripheral side surface of the first substrate, and the outer peripheral side surface of the second substrate A plurality of forming portions arranged at equal positions respectively in surface contact or line contact at opposing positions, the first optical abutting surface and the second optical abutting surface being spaced apart by a certain amount; and the first In the step of adjusting the center of the diffractive optical surface and the second diffractive optical surface, first fixing means for fixing either the first substrate or the second substrate, and the first fixing A second fixing means for fixing the other substrate without using the means in a substrate center coaxial posture; a rotating means capable of controlling rotation of the other substrate; and the first substrate in a plane with respect to the second substrate. Aligning means movable in the direction, and after the alignment adjustment, the first substrate is rotated The contact state of each of the plurality of molding portions on the outer peripheral side surface of the first substrate and the plurality of molding portions on the outer peripheral side surface of the second substrate is released, and the first optical abutting surface and the second optical abutting surface are released. A method for manufacturing an optical element, comprising: means for contacting the surfaces.   A first molding cylinder mold fitted to an outer peripheral end of the first substrate or the second substrate; an opposing surface spaced apart from the molding mold in the optical axis direction; and the first substrate or the second substrate. Can be rotatably fitted to the second and second molding cylinders, which are mounted on the outer surface of the effective diameter and provided with a plurality of grooves at equal positions, and can be filled with resin from the side surface. An optical element is formed by arranging a plurality of molding parts having surfaces or ridges orthogonal to the optical axis and integrally forming with a diffractive optical surface, each of which is provided with a regulation cylinder provided with a through-hole as molding means. Method.

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