JP2006208255A5 - - Google Patents

Claims (8)

A laminated body having a pinned magnetic layer with a fixed magnetization direction, a nonmagnetic material layer, and a free magnetic layer facing the pinned magnetic layer with the nonmagnetic material layer interposed therebetween, and connected to both ends of the laminated body A fixed portion provided with a magnetoresistive effect element having an electrode layer, and a rotating portion that forms a magnetic field and rotates to face the fixed portion,
On the surface of the fixed portion, the magnetoresistive effect elements whose magnetization directions of the fixed magnetic layer are opposite to each other are provided in pairs, and the magnetoresistive effect elements forming a pair have their resistance values In an angle detection sensor that is connected so that a difference is output and a magnetic field component parallel to the surface of the fixed portion that is applied from the rotating portion to the magnetoresistive element is detected,
An angle detection sensor, wherein a unidirectional exchange bias magnetic field Hex * of the pinned magnetic layer of the magnetoresistive effect element is 200 kA / m or more and a waveform distortion is 7 degrees or less.   The angle detection sensor according to claim 1, wherein a unidirectional exchange bias magnetic field Hex * of the pinned magnetic layer of the magnetoresistive element is 320 kA / m or more and a waveform distortion is 4 degrees or less.   The angle detection sensor according to claim 1 or 2, wherein the free magnetic layer has a laminated structure of a CoFe alloy and a NiFe alloy, and an absolute value of a magnetostriction constant λs is 1.3 ppm or less. The free magnetic layer has a laminated structure of a Co ₉₀ Fe ₁₀ alloy and a Ni _81.5 Fe _18.5 alloy, the thickness of the Co ₉₀ Fe ₁₀ alloy is 9 to 16 mm, and the thickness of the Ni _81.5 Fe _18.5 alloy is The angle detection sensor according to claim 3, wherein the angle detection sensor is 10 to 50 cm.   The angle detection sensor according to claim 1, wherein the magnetic field is 24 kA / m or more and 56 kA / m or less.   The pinned magnetic layer has an artificial ferrimagnetic structure of a first pinned magnetic layer, a second pinned magnetic layer, and a nonmagnetic layer interposed between the first pinned magnetic layer and the second pinned magnetic layer; The second pinned magnetic layer is formed in contact with the non-magnetic material layer;
  The net magnetic film thickness (netMs · t) of the pinned magnetic layer represented by a value obtained by subtracting the magnetic film thickness of the first pinned magnetic layer from the magnetic film thickness of the second pinned magnetic layer is 0. 031 (memu / cm ² The angle detection sensor according to any one of claims 1 to 5, wherein:   The angle detection sensor according to claim 6, wherein the film thickness of the first pinned magnetic layer is in a range of 12?   The angle detection sensor according to claim 6 or 7, wherein the first pinned magnetic layer and the second pinned magnetic layer are formed of a CoFe alloy.