JP2006194862A5 - - Google Patents

Claims (8)

A cavity having a first surface and a second surface facing each other and receiving a medium to be detected is formed so as to open to the first surface side, and a bottom surface of the cavity is formed so as to be able to vibrate. A vibration cavity forming base,
A piezoelectric element having a first electrode formed on the second surface side of the vibration cavity forming base, a piezoelectric layer stacked on the first electrode, and a second electrode stacked on the piezoelectric layer;
A flow path formed by laminating on the first surface side of the vibration cavity forming base, a liquid supply path for supplying a liquid to be detected to the cavity, and a liquid discharge path for discharging the liquid to be detected from the cavity. With a forming base,
The space formed including the cavity, the liquid supply path, and the liquid discharge path is formed symmetrically with respect to the center of the cavity existing in a region sandwiched between the liquid supply path and the liquid discharge path. Liquid detection device.   The liquid detection device according to claim 1, wherein a space forming the cavity is substantially cylindrical.   3. The liquid detection according to claim 1, wherein the liquid supply path and the liquid discharge path have a flow path area restricted with respect to the cavity, and are set to have a length such that a fluid mass of the liquid exists therein. apparatus.   The liquid detection device according to claim 1, further comprising a supply-side buffer chamber communicating with the liquid supply path and a discharge-side buffer chamber communicating with the liquid discharge path.   The liquid detection device according to claim 4, wherein the supply-side buffer chamber and the discharge-side buffer chamber are formed symmetrically with respect to the center of the cavity.   6. The liquid detection device according to claim 4, wherein each of the supply side buffer chamber and the discharge side buffer chamber has a capacity of at least 10 times the capacity of the cavity. A container body having a liquid delivery port for delivering the liquid stored inside to the outside;
The liquid detection device according to any one of claims 1 to 6, which is mounted on the container body,
The liquid inside the container main body is supplied to the cavity through the liquid supply path of the liquid detection device, and is discharged from the cavity through the liquid discharge path. Liquid container. The supply side buffer chamber constitutes a main part of the internal space of the container main body and communicates with a liquid storage chamber for storing liquid, and the discharge side buffer chamber is an internal part of the internal space of the container main body. The liquid container according to claim 7 , wherein the liquid container communicates with a liquid delivery space communicating with a liquid delivery port for delivering the liquid stored in the outside.