JP2006193369A - Method and apparatus for processing quartz glass bar and carbon tool used for the same - Google Patents

Method and apparatus for processing quartz glass bar and carbon tool used for the same Download PDF

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JP2006193369A
JP2006193369A JP2005006412A JP2005006412A JP2006193369A JP 2006193369 A JP2006193369 A JP 2006193369A JP 2005006412 A JP2005006412 A JP 2005006412A JP 2005006412 A JP2005006412 A JP 2005006412A JP 2006193369 A JP2006193369 A JP 2006193369A
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quartz glass
glass rod
processing
carbon
glass bar
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JP4583938B2 (en
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Shoji Hoshino
昇次 星野
Takashi Koshitani
隆 越谷
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Shin Etsu Chemical Co Ltd
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Shin Etsu Chemical Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00Re-forming shaped glass
    • C03B23/04Re-forming tubes or rods
    • C03B23/049Re-forming tubes or rods by pressing
    • C03B23/0493Re-forming tubes or rods by pressing in a longitudinal direction, e.g. for upsetting or extrusion

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method and an apparatus for processing a quartz glass bar and a carbon tool used for the same which can easily process the quartz glass bar at a low cost. <P>SOLUTION: The method for processing a quartz glass bar is characterized by holding a quartz glass bar 2 with one chuck 1a of a glass lathe and a carbon tool 3 with the other chuck 2b, heating the quartz glass bar 2 with an oxyhydrogen gas burner 4, and moving a lathe head to push-form the softened portion of the quartz glass bar 2 to the carbon tool 3, wherein a hemispherical protrusion is formed by pushing the softened portion. The quartz glass bar 2 can be automatically processed by automatically controlling the regulation of the movement to a predetermined position relative to the oxyhydrogen gas burner 4 and the oxygen and hydrogen gas flow rates, the temperature of the heated portion of the quartz glass bar 2, the relative movement of the carbon tool 3 toward the quartz glass bar 2, and the like, according to a preliminarily programmed condition. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、光ファイバ用石英ガラス母材の製造に係り、特には石英ガラス棒の加工方法及び装置、これに用いるカーボン治具に関する。   The present invention relates to the production of a quartz glass preform for optical fibers, and more particularly to a method and apparatus for processing a quartz glass rod, and a carbon jig used therefor.

光ファイバ用石英ガラス母材は、四塩化珪素などのガラス原料を酸水素火炎中で火炎加水分解させ、生成したガラス微粒子を回転している石英ガラス棒上に堆積・成長させて多孔質スート(以下、単にスートと称する)とし、さらに脱水、焼結して透明ガラス化することにより製造されている。   The silica glass base material for optical fibers is a porous soot produced by hydrolyzing glass raw materials such as silicon tetrachloride in an oxyhydrogen flame, and depositing and growing the generated glass particles on a rotating quartz glass rod. Hereinafter, it is simply referred to as soot), and is further dehydrated and sintered to form a transparent glass.

スートは、ハンドリングされ焼結装置等に移送されて透明ガラス化等の加工がなされるが、ハンドリング・移送に際しては、スートが脆弱で破損しやすいため、スートの堆積されていない石英ガラス棒の部分で把持している。
従来、スートのハンドリング・移送を容易とするために、石英ガラス棒の端部近傍の2ヶ所に突起部または凹部を設けることが行われている。
The soot is handled and transferred to a sintering machine, where it is processed into a transparent vitrification, etc., but during handling and transfer, the soot is brittle and easily damaged, so the portion of the quartz glass rod on which no soot is deposited Grasping with
Conventionally, in order to facilitate the handling and transfer of soot, it has been practiced to provide protrusions or recesses at two locations near the end of the quartz glass rod.

従来、石英ガラス棒に突起部または凹部を設けるには、石英ガラス棒の両端をガラス旋盤で把持し、加工する部分を酸水素ガスバーナで加熱・軟化させ、旋盤ヘッドを内方に移動し押し付けて軟化部分を球状に盛り上げ、さらに加熱箇所を移動し同様の操作を繰り返して数個の球状部を形成している。その後、形成された球状部の一部を円筒研削機で半球状に研削・加工し、さらに研削部を酸水素火炎で火炎研磨して透明に仕上げている。   Conventionally, to provide protrusions or recesses in a quartz glass rod, hold both ends of the quartz glass rod with a glass lathe, heat and soften the part to be processed with an oxyhydrogen gas burner, and move and press the lathe head inward. The softened portion is swelled into a spherical shape, and the heated portion is further moved and the same operation is repeated to form several spherical portions. Thereafter, a part of the formed spherical portion is ground and processed into a hemispherical shape with a cylindrical grinder, and the ground portion is further flame-polished with an oxyhydrogen flame to be transparent.

その他に、石英ガラス棒をガラス旋盤で加熱・延伸して形成する方法がある。例えば、突起部を形成するには、径の若干大きい石英ガラス棒を用意し、突起部形成箇所を残すように、それ以外の部分を加熱し順次延伸することで形成することができる。その他に、円筒研削機で研削して形成することもできる(特許文献1参照)。
また、石英ガラス棒に予め加工した搬送用部材を挿通し、ピン止めして突起部を形成する方法がある(特許文献2参照)。
特開平7−41330号公報 特開2001−172039号公報
In addition, there is a method of forming a quartz glass rod by heating and stretching with a glass lathe. For example, the protrusion can be formed by preparing a quartz glass rod having a slightly larger diameter and heating and sequentially stretching the other portions so as to leave the protrusion formation portion. In addition, it can be formed by grinding with a cylindrical grinder (see Patent Document 1).
Further, there is a method in which a preliminarily processed conveying member is inserted into a quartz glass rod and pinned to form a protrusion (see Patent Document 2).
JP 7-41330 A JP 2001-172039 A

以上、いずれの方法も、径の大きな石英ガラス棒や予め加工された搬送用部材を必要としたり、あるいは球状部を形成するために複数の加工工程を必要とし、製造コストが高くつくという問題があった。
そこで本発明は、石英ガラス棒を低コストで容易に加工することのできる石英ガラス棒の加工方法及び装置、これに用いるカーボン治具を提供することを目的としている。
As described above, each method requires a quartz glass rod having a large diameter and a pre-processed conveying member, or requires a plurality of processing steps to form a spherical portion, resulting in high manufacturing costs. there were.
Accordingly, an object of the present invention is to provide a method and apparatus for processing a quartz glass rod, which can easily process the quartz glass rod at low cost, and a carbon jig used therefor.

本発明の石英ガラス棒の加工方法は、ガラス旋盤の一方のチャックで石英ガラス棒を、他方のチャックでカーボン治具を把持し、酸水素ガスバーナで石英ガラス棒を加熱し、旋盤ヘッドを移動させて石英ガラス棒の軟化部分にカーボン治具を押し付け成形することを特徴とし、軟化部分の押し付けにより、半球状の突起部が形成される。
酸水素ガスバーナに対する所定位置への移動及び酸素・水素ガス流量の調節、石英ガラス棒の加熱部分の温度、石英ガラス棒に向かってのカーボン治具の相対的移動等を、予めプログラム化された条件に従って自動制御し、石英ガラス棒を自動的に加工することができる。
In the method for processing a quartz glass rod of the present invention, the quartz glass rod is held by one chuck of the glass lathe, the carbon jig is held by the other chuck, the quartz glass rod is heated by an oxyhydrogen gas burner, and the lathe head is moved. A carbon jig is pressed against the softened portion of the quartz glass rod, and a hemispherical protrusion is formed by pressing the softened portion.
Pre-programmed conditions such as movement to the specified position with respect to the oxyhydrogen gas burner and adjustment of the oxygen / hydrogen gas flow rate, the temperature of the heated portion of the quartz glass rod, the relative movement of the carbon jig toward the quartz glass rod, etc. The quartz glass rod can be processed automatically.

本発明の石英ガラス棒の加工装置は、ガラス旋盤で石英ガラス棒を加工する装置であって、酸水素ガスバーナを所定の位置に移動させるバーナ位置決め用リニアスケール、酸水素ガスバーナへの酸素・水素ガス流量を調節する流量調節器、及び石英ガラス棒を成形するためのカーボン治具を備えていることを特徴としている。なお、石英ガラス棒の外径を測定するために外形測定器を設けても良い。
さらに、本発明の石英ガラス棒の加工装置は、予め設定されたプログラムに従って制御し、石英ガラス棒を自動的に加工する制御装置を備えている。
The quartz glass rod processing apparatus of the present invention is an apparatus for processing a quartz glass rod with a glass lathe, a burner positioning linear scale for moving the oxyhydrogen gas burner to a predetermined position, and oxygen / hydrogen gas to the oxyhydrogen gas burner. It is characterized by comprising a flow rate controller for adjusting the flow rate and a carbon jig for forming a quartz glass rod. An external shape measuring device may be provided to measure the outer diameter of the quartz glass rod.
Furthermore, the processing apparatus for the quartz glass rod of the present invention includes a control device that automatically controls the quartz glass rod by controlling according to a preset program.

本発明のカーボン治具は、石英ガラス棒を挿入する円筒状からなる孔部を有し、石英ガラス棒の加熱・軟化部分にその軸方向から円筒状のカーボン治具を押し付け、石英ガラス棒に半球状の突起部を形成するものであり、孔部の奥に空気抜きの穴を設けるとよい。   The carbon jig of the present invention has a cylindrical hole into which the quartz glass rod is inserted, and the cylindrical carbon jig is pressed from the axial direction to the heating / softening portion of the quartz glass rod, A hemispherical projection is formed, and an air vent hole is preferably provided in the back of the hole.

本発明によれば、石英ガラス棒にハンドリング・搬送に好適な突起部を容易かつ再現性良く形成することができ、さらに、自動化することで、短時間に低コストで加工することができる。   According to the present invention, a projection suitable for handling and transport can be easily and reproducibly formed on a quartz glass rod, and further, it can be processed in a short time and at low cost by automation.

本発明の石英ガラス棒の加工方法は、石英ガラス棒の所定の位置を加熱・軟化させてカーボン治具を押し付けることにより、半球状の突起部を容易に自動で形成することができる。なお、突起部の形成にカーボン製の治具を使用する理由は、
型の加工が容易であり、ガラスと治具が融着せず、かつ接触面が滑らかで研磨を必要としないことにある。このため、カーボン治具に使用するカーボン材は、不純物含有量が可能な限り低いものが好ましく、具体的にはカーボン以外の不純物の含有量が1重量%以下のものがよい。
また、突起部を半球状に成形する理由は、工程上、製品有効部をできるだけ長くとるためである。
In the method for processing a quartz glass rod of the present invention, a hemispherical protrusion can be easily and automatically formed by heating and softening a predetermined position of the quartz glass rod and pressing a carbon jig. The reason for using a carbon jig to form the protrusions is:
The mold is easy to process, the glass and the jig are not fused, the contact surface is smooth, and polishing is not required. For this reason, it is preferable that the carbon material used for the carbon jig has as low an impurity content as possible. Specifically, it is preferable that the content of impurities other than carbon is 1% by weight or less.
In addition, the reason for forming the protrusions in a hemispherical shape is to make the product effective part as long as possible in the process.

以下、本発明の石英ガラス棒の加工方法について詳細に説明するが、これらに限定されず、様々な態様が可能である。   Hereinafter, although the processing method of the quartz glass rod of this invention is demonstrated in detail, it is not limited to these, Various aspects are possible.

(実施例1)
図1に示すガラス旋盤の固定側チャック1aで、外径40mmの石英ガラス棒2を把持し、可動側チャック1bでカーボン治具3を把持した。バーナ4は、その先端と石英ガラス棒2の中心との距離が105mmでバーナ位置決め用リニアスケール6に取り付けられ、ロータリーエンコーダー7の出力でモーター8を駆動し、チェーン9を介してその回転量が伝えられ、バーナ4の移動距離が制御される。バーナ4には、燃焼ガスとして水素、助燃ガスとして酸素を供給し、流量調節器10でその流量を調節した。
Example 1
The quartz glass rod 2 having an outer diameter of 40 mm was held by the fixed side chuck 1a of the glass lathe shown in FIG. 1, and the carbon jig 3 was held by the movable side chuck 1b. The burner 4 is attached to the burner positioning linear scale 6 at a distance of 105 mm between its tip and the center of the quartz glass rod 2, and the motor 8 is driven by the output of the rotary encoder 7. The movement distance of the burner 4 is controlled. The burner 4 was supplied with hydrogen as the combustion gas and oxygen as the auxiliary combustion gas, and the flow rate was adjusted by the flow rate regulator 10.

石英ガラス棒2の加工は、図示していない外径測定器で測定された石英ガラス棒2の径サイズにより、バーナ4の加熱位置が決められ、バーナ4への供給ガス量、旋盤ヘッド11の移動距離及びそのタイミング等、予めプログラム化された条件に従って制御装置12により制御される。
以下に、石英ガラス棒の加工手順を示した。
In the processing of the quartz glass rod 2, the heating position of the burner 4 is determined by the diameter size of the quartz glass rod 2 measured by an outer diameter measuring device (not shown), the amount of gas supplied to the burner 4, the lathe head 11 It is controlled by the control device 12 according to preprogrammed conditions such as the moving distance and its timing.
The processing procedure for the quartz glass rod is shown below.

手順1;
先ず、図2(a)に示すように、一方のチャック1aで把持した石英ガラス棒2の自由端側を、他方のチャック1bに把持されたカーボン治具3の孔部(深さL)に差し込み、石英ガラス棒2をその軸周りに回転させながら所定の位置にバーナ4を移動させて加熱し、軟化させる。
Procedure 1;
First, as shown in FIG. 2 (a), the free end side of the quartz glass rod 2 gripped by one chuck 1a is made into the hole (depth L) of the carbon jig 3 gripped by the other chuck 1b. The burner 4 is moved to a predetermined position while rotating the quartz glass rod 2 around its axis, and heated and softened.

手順2;
次に、石英ガラス棒2の加熱部が軟化したところで、バーナ4を図の左方に逃がし、軟化部に向かってカーボン治具3を所定距離押し付け成形する。なお、成形は、所定時間加熱したところで、あるいは温度センサーで所定の温度に達したところで始めればよい。これにより図2(b)に示すように、軟化部が変形して半球状の第1の突起部が石英ガラス棒2の自由端からLの位置に形成される。
Step 2;
Next, when the heating portion of the quartz glass rod 2 is softened, the burner 4 is released to the left in the drawing, and the carbon jig 3 is pressed and molded toward the softening portion by a predetermined distance. Note that the molding may be started when heated for a predetermined time or when a predetermined temperature is reached by a temperature sensor. As a result, as shown in FIG. 2B, the softened portion is deformed and a hemispherical first protrusion is formed at a position L from the free end of the quartz glass rod 2.

手順3;
次に、第1の突起部から距離A離れた位置に第2の突起部を形成するが、それには、一端、石英ガラス棒2をカーボン治具3の孔部から離脱させ、カーボン治具3の孔部に、孔部の深さがBとなるようにカーボン製のコマ5を挿入した後(図2(c)参照)、再度、石英ガラス棒2を挿入し、第1の突起部から先端に向かって距離A離れた位置を加熱する。加熱部が軟化したところで、バーナ4を逃がし、軟化部に向かってカーボン治具3を所定距離押し付け成形する。これにより、第1の突起部から距離A離れた位置に半球状の第2の突起部が形成される。
図2(d)は、第2の突起部を形成した後、石英ガラス棒2をカーボン治具3の孔部から離脱させた状態(仕上がり形状)を示している。なお、第1、第2の突起部の位置は、カーボン治具3の孔部の深さによって変えることができる。
このようにして石英ガラス棒の所望の位置に、研削加工を必要としない半球状の突起部を必要な数だけ自動で容易に形成することができる。
Step 3;
Next, a second protrusion is formed at a position away from the first protrusion by a distance A. To this end, the quartz glass rod 2 is detached from the hole of the carbon jig 3 at one end, and the carbon jig 3 After inserting the carbon piece 5 so that the depth of the hole becomes B (see FIG. 2 (c)), the quartz glass rod 2 is inserted again, and the first protrusion is A position at a distance A toward the tip is heated. When the heating portion is softened, the burner 4 is released, and the carbon jig 3 is pressed and molded toward the softened portion by a predetermined distance. Thereby, a hemispherical second protrusion is formed at a position away from the first protrusion by a distance A.
FIG. 2D shows a state (finished shape) in which the quartz glass rod 2 is detached from the hole of the carbon jig 3 after the second protrusion is formed. The positions of the first and second protrusions can be changed depending on the depth of the hole of the carbon jig 3.
In this way, a necessary number of hemispherical protrusions that do not require grinding can be automatically and easily formed at a desired position of the quartz glass rod.

(比較例1)
外径40mmの石英ガラス棒の両端をチャックで把持しガラス旋盤にセットした。予定した突起部形成位置にバーナを移動して加熱し、軟化したところで、一方の旋盤ヘッドを内方に移動して軟化部を圧縮し、球状の第1の突起部を形成した。さらに加熱位置を変えて同様の操作を繰返し、第2の突起部を形成した。この間、バーナの位置、ガス流量の調節、旋盤ヘッドの移動等は、作業者がガラスの軟化状態と形状を目視しながら行った。
次に、石英ガラス棒をガラス旋盤から取り出し、円筒研削機にセットして球状部分の半分を研削し、突起部を半球状に仕上げ、さらに研削粗面を酸水素バーナで火炎研磨を行い、透明に仕上げた(図3参照)。
(Comparative Example 1)
Both ends of a quartz glass rod having an outer diameter of 40 mm were held by a chuck and set on a glass lathe. When the burner was moved to a predetermined projection formation position and heated and softened, one lathe head was moved inward to compress the softened portion to form a spherical first projection. Further, the same operation was repeated while changing the heating position to form a second protrusion. During this time, the position of the burner, adjustment of the gas flow rate, movement of the lathe head, etc. were performed while the operator visually observed the softened state and shape of the glass.
Next, remove the quartz glass rod from the glass lathe, set it on a cylindrical grinder, grind the half of the spherical part, finish the protrusions into a hemisphere, and further polish the roughened surface with an oxyhydrogen burner, transparent (See FIG. 3).

本発明によれば、石英ガラス棒の加工コストの低減に寄与する。   According to the present invention, it contributes to the reduction of the processing cost of the quartz glass rod.

実施例で使用した加工装置の一例を示す概略図である。It is the schematic which shows an example of the processing apparatus used in the Example. (a)〜(d)は、本発明の実施例により、石英ガラス棒に突起部を形成する手順を説明する概略断面図である。(A)-(d) is a schematic sectional drawing explaining the procedure which forms a projection part in a quartz glass stick | rod by the Example of this invention. 従来の方法により、石英ガラス棒に突起部を形成する手順を説明する概略図である。It is the schematic explaining the procedure which forms a projection part in a quartz glass rod by the conventional method.

符号の説明Explanation of symbols

1a,1b……チャック、
2……石英ガラス棒、
3……カーボン治具、
4……バーナ、
5……コマ、
6……バーナ位置決め用リニアスケール、
7……ロータリーエンコーダー、
8……モーター、
9……チェーン、
10……流量調節器、
11……旋盤ヘッド、
12……制御装置。
1a, 1b ... chuck,
2 ... Quartz glass rod,
3 …… Carbon jig,
4 ... Burna,
5 ... top,
6: Linear scale for burner positioning,
7 …… Rotary encoder,
8 …… Motor,
9 …… Chain,
10 …… Flow regulator,
11 ... Lathe head,
12: Control device.

Claims (10)

ガラス旋盤の一方のチャックで石英ガラス棒を、他方のチャックでカーボン治具を把持し、酸水素ガスバーナで石英ガラス棒を加熱し、旋盤ヘッドを移動させて石英ガラス棒の軟化部分をカーボン治具に押し付け成形することを特徴とする石英ガラス棒の加工方法。 Hold the quartz glass rod with one chuck of the glass lathe and the carbon jig with the other chuck, heat the quartz glass rod with the oxyhydrogen gas burner, move the lathe head, and fix the softened part of the quartz glass rod to the carbon jig A method for processing a quartz glass rod, wherein the method is formed by pressing to a quartz glass rod. 前記カーボン治具は、カーボン以外の不純物の含有量が1重量%以下のカーボン材で形成されている請求項1に記載の石英ガラス棒の加工方法。 The method for processing a quartz glass rod according to claim 1, wherein the carbon jig is formed of a carbon material having an impurity content other than carbon of 1 wt% or less. 前記軟化部分の成形で、半球状の突起部を形成する請求項1又は2に記載の石英ガラス棒の加工方法。 The method for processing a quartz glass rod according to claim 1 or 2, wherein a hemispherical protrusion is formed by forming the softened portion. 酸水素ガスバーナに対する所定位置への移動及び酸素・水素ガス流量の調節、石英ガラス棒の加熱部分の温度、石英ガラス棒に向かってのカーボン治具の相対的移動等を、予めプログラム化された条件に従って自動制御し、石英ガラス棒を自動的に加工する請求項1乃至3のいずれかに記載の石英ガラス棒の加工方法。 Pre-programmed conditions such as movement to the specified position with respect to the oxyhydrogen gas burner and adjustment of the oxygen / hydrogen gas flow rate, the temperature of the heated portion of the quartz glass rod, the relative movement of the carbon jig toward the quartz glass rod, etc. The method for processing a quartz glass rod according to any one of claims 1 to 3, wherein the quartz glass rod is automatically processed according to the above, and the quartz glass rod is automatically processed. ガラス旋盤で石英ガラス棒を加工する装置であって、酸水素ガスバーナを所定の位置に移動させるバーナ位置決め用リニアスケール、酸水素ガスバーナへの酸素・水素ガス流量を調節する流量調節器、及び石英ガラス棒を成形するためのカーボン治具を備えていることを特徴とする石英ガラス棒の加工装置。 An apparatus for processing a quartz glass rod by a glass lathe, a linear scale for positioning an oxyhydrogen gas burner to a predetermined position, a flow controller for adjusting an oxygen / hydrogen gas flow rate to the oxyhydrogen gas burner, and quartz glass An apparatus for processing a quartz glass rod, comprising a carbon jig for forming the rod. 前記カーボン治具は、カーボン以外の不純物の含有量が1重量%以下のカーボン材で形成されている請求項5に記載の石英ガラス棒の加工装置。 The quartz glass rod processing apparatus according to claim 5, wherein the carbon jig is formed of a carbon material having an impurity content other than carbon of 1 wt% or less. 石英ガラス棒の外径を測定するための外形測定器を備えている請求項5に記載の石英ガラス棒の加工装置。 6. The processing apparatus for a quartz glass rod according to claim 5, further comprising an external shape measuring device for measuring the outer diameter of the quartz glass rod. 予め設定されたプログラムに従って制御し、石英ガラス棒を自動的に加工する制御装置を備えている請求項5乃至7のいずれかに記載の石英ガラス棒の加工装置。 The processing apparatus for a quartz glass rod according to any one of claims 5 to 7, further comprising a control device that automatically controls the quartz glass rod by controlling according to a preset program. 石英ガラス棒の加熱・軟化部分に円筒状のカーボン治具を押し付け、石英ガラス棒に半球状の突起部を形成することを特徴とするカーボン治具。 A carbon jig characterized in that a cylindrical carbon jig is pressed against a heating / softening portion of a quartz glass rod to form a hemispherical protrusion on the quartz glass rod. 石英ガラス棒が挿入される孔部の奥に空気抜きの穴を有する請求項9に記載のカーボン治具。

The carbon jig according to claim 9, wherein an air vent hole is provided at the back of the hole portion into which the quartz glass rod is inserted.

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CN113998872A (en) * 2021-10-15 2022-02-01 湖州东科电子石英股份有限公司 Quartz spiral plate processing method

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