JP2006192328A - Washing device - Google Patents

Washing device Download PDF

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JP2006192328A
JP2006192328A JP2005003707A JP2005003707A JP2006192328A JP 2006192328 A JP2006192328 A JP 2006192328A JP 2005003707 A JP2005003707 A JP 2005003707A JP 2005003707 A JP2005003707 A JP 2005003707A JP 2006192328 A JP2006192328 A JP 2006192328A
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cleaning
cleaning liquid
tank
coil
liquid
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Shozo Sugimura
昌三 杉村
Yasuyuki Harada
康之 原田
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PTC ENGINEERING KK
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PTC ENGINEERING KK
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a small-size washing device with high heating efficiency and small power consumption. <P>SOLUTION: The washing device is provided with at least a washing tank for storing a washing liquid and washing an object; a circulation mechanism provided with a circulation pipe having at least a part comprising a conductive pipe part and a pump; a coil wound on the conductive pipe part and generating an induced current; and an AC power source for flowing an AC current on the coil. The AC current is made flowing in the coil by the AC power source while circulating the washing liquid by the circulation mechanism and the induced current is generated in the conductive pipe part. Thereby, the circulating washing liquid is heated to perform washing of the object. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は洗浄液を加熱して洗浄を行なう洗浄装置に関する。   The present invention relates to a cleaning apparatus that performs cleaning by heating a cleaning liquid.

従来、光学部品や半導体部品等の対象物の洗浄に用いられる洗浄装置には、洗浄液を加熱して洗浄効率を高めて洗浄を行なうものがある（特許文献１参照）。図２は、このように洗浄液を加熱して対象物の洗浄を行なう従来の洗浄装置の例を示す概略図である。   2. Description of the Related Art Conventionally, there is a cleaning apparatus used for cleaning an object such as an optical component or a semiconductor component to perform cleaning by heating a cleaning liquid to improve cleaning efficiency (see Patent Document 1). FIG. 2 is a schematic view showing an example of a conventional cleaning apparatus for cleaning an object by heating the cleaning liquid as described above.

図２（ａ）の洗浄装置２０’は、洗浄液１’を収容する洗浄槽２’と、洗浄液タンク１０’と、洗浄液の循環管３’と、ポンプ４’と、ろ過フィルター９’と、例えばプラグヒーター等のヒーター１４’と、温度計１１’と、フロートスイッチ１５’と、超音波振動子１３’とを具備するものである。
この装置においては、洗浄液は洗浄液タンク１０’内に設置されたヒーター１４’により加熱され、ポンプ４’により循環管３’に送り出され、ろ過フィルター９’によりろ過され、洗浄槽２’に達する。洗浄槽２’からあふれ出た洗浄液は洗浄液タンク１０’により受けられる。このようにして加熱された洗浄液が循環しながら、洗浄槽２’の洗浄液１’に浸漬された対象物が洗浄される。また、洗浄液の液温は温度計１１’により測定される、フロートスイッチ１５’により洗浄液タンク１０’内の洗浄液液量を検出し、ヒーター１４’の保護を行い、ポンプ４’等により洗浄液流量を制御することで調整される。 The cleaning apparatus 20 ′ of FIG. 2A includes a cleaning tank 2 ′ for storing the cleaning liquid 1 ′, a cleaning liquid tank 10 ′, a cleaning liquid circulation pipe 3 ′, a pump 4 ′, a filtration filter 9 ′, A heater 14 'such as a plug heater, a thermometer 11', a float switch 15 ', and an ultrasonic transducer 13' are provided.
In this apparatus, the cleaning liquid is heated by the heater 14 'installed in the cleaning liquid tank 10', sent to the circulation pipe 3 'by the pump 4', filtered by the filtration filter 9 ', and reaches the cleaning tank 2'. The cleaning liquid overflowing from the cleaning tank 2 ′ is received by the cleaning liquid tank 10 ′. The object immersed in the cleaning liquid 1 ′ of the cleaning tank 2 ′ is cleaned while the cleaning liquid heated in this way circulates. The temperature of the cleaning liquid is measured by a thermometer 11 ′, the amount of the cleaning liquid in the cleaning liquid tank 10 ′ is detected by the float switch 15 ′, the heater 14 ′ is protected, and the flow rate of the cleaning liquid is increased by the pump 4 ′ or the like. It is adjusted by controlling.

一方、図２（ｂ）の洗浄装置２０’’は、洗浄液１’’を収容する洗浄槽２’’と、洗浄液タンク１０’’と、洗浄液の循環管３’’と、ポンプ４’’と、ろ過フィルター９’’と、パイプヒーター等のヒーター１４’’と、温度計１１’’と、フロートスイッチ１５’’と、超音波振動子１３’’とを具備するものである。
この装置においては、洗浄液は洗浄液タンク１０’’からポンプ４’’により循環管３’’に送り出され、ろ過フィルター９’’によりろ過され、循環管内に組み込まれたヒーター１４’’により加熱され、洗浄槽２’’に達する。洗浄槽２’’からあふれ出た洗浄液は洗浄液タンク１０’’により受けられる。このようにして加熱された洗浄液が循環しながら、洗浄槽２’’の洗浄液に浸漬された対象物が洗浄される。前述の場合と同様に、洗浄液の液温は温度計１１’’により測定される、フロートスイッチ１５’’により洗浄液タンク１０’’内の洗浄液液量を検出し、ポンプ４’’、ヒーター１４’’の保護を行なう。
以上説明した図２のような従来の洗浄装置に使用されるヒーター１４’、１４’’は、いずれも抵抗加熱式のものであり装置に組み込む際には大きな面積を必要とするものである。 On the other hand, the cleaning device 20 ″ of FIG. 2B includes a cleaning tank 2 ″ for storing the cleaning liquid 1 ″, a cleaning liquid tank 10 ″, a cleaning liquid circulation pipe 3 ″, and a pump 4 ″. A filtration filter 9 ″, a heater 14 ″ such as a pipe heater, a thermometer 11 ″, a float switch 15 ″, and an ultrasonic transducer 13 ″ are provided.
In this apparatus, the cleaning liquid is sent from the cleaning liquid tank 10 '' to the circulation pipe 3 '' by the pump 4 '', filtered by the filtration filter 9 '', and heated by the heater 14 '' incorporated in the circulation pipe. It reaches the washing tank 2 ″. The cleaning liquid overflowing from the cleaning tank 2 '' is received by the cleaning liquid tank 10 ''. The object immersed in the cleaning liquid in the cleaning tank 2 ″ is cleaned while the cleaning liquid heated in this way circulates. As in the case described above, the temperature of the cleaning liquid is measured by the thermometer 11 ″, the amount of the cleaning liquid in the cleaning liquid tank 10 ″ is detected by the float switch 15 ″, and the pump 4 ″ and the heater 14 ′ are detected. Protect '.
The heaters 14 ′ and 14 ″ used in the conventional cleaning apparatus as shown in FIG. 2 described above are both of the resistance heating type and require a large area when incorporated in the apparatus.

一方、近年、デジタルカメラやカメラ付き携帯電話のレンズ、また医療用レンズ、あるいはこれらと共に用いられる電子部品や金属加工部品等の需要の増加に伴い、これらの小型精密部品を洗浄するのに適する小型の洗浄装置に対する要求が高まってきた。   On the other hand, in recent years, with the increasing demand for digital cameras, camera-equipped mobile phone lenses, medical lenses, electronic parts and metal parts used in combination with these lenses, they are suitable for cleaning these small precision parts. The demand for cleaning equipment has increased.

特開２００１−１１８８２０号公報JP 2001-118820 A

本発明は、小型であり、加熱効率が高く電力消費量が少ない洗浄装置を提供することを目的とする。   An object of the present invention is to provide a cleaning device that is small in size, has high heating efficiency, and low power consumption.

上記目的達成のため、本発明は、洗浄装置であって、少なくとも、洗浄液を収容して対象物を洗浄する洗浄槽と、少なくとも一部が導電性管部からなる循環管とポンプとを備える循環機構と、前記導電性管部に巻回して誘導電流を発生させるためのコイルと、該コイルに交流電流を流すための交流電源とを具備し、前記循環機構により洗浄液を循環させながら、前記交流電源により前記コイルに交流電流を流し、前記導電性管部に誘導電流を発生させることにより、前記循環する洗浄液を加熱して、対象物の洗浄を行なうものであることを特徴とする洗浄装置を提供する（請求項１）。   In order to achieve the above object, the present invention is a cleaning apparatus, comprising at least a cleaning tank for storing a cleaning liquid and cleaning an object, a circulation pipe including a circulation pipe and a pump at least partly made of a conductive pipe section A mechanism, a coil wound around the conductive tube portion to generate an induction current, and an AC power source for causing an AC current to flow through the coil. A cleaning apparatus for cleaning an object by flowing an alternating current through the coil by a power source and generating an induced current in the conductive tube portion to heat the circulating cleaning liquid. (Claim 1).

このように、循環機構により循環管を介して洗浄液を循環させながら、交流電源によりコイルに交流電流を流し、循環管の導電性管部に誘導電流を発生させることにより循環する洗浄液を加熱すれば、加熱のためには循環管の導電性管部にコイルを巻回するだけでよい。従って、従来の抵抗加熱式のヒーターを備える場合よりも装置の小型化ができる。また、洗浄液は導電性管部に発生する誘導電流によるジュール熱により加熱されるので、加熱効率が高く、装置の電力消費量も少なくできる。   In this way, if the cleaning liquid is circulated through the circulation pipe by the circulation mechanism, an alternating current is supplied to the coil by the AC power source, and an induction current is generated in the conductive pipe portion of the circulation pipe to heat the circulating cleaning liquid. For heating, it is only necessary to wind a coil around the conductive tube portion of the circulation tube. Therefore, the apparatus can be reduced in size as compared with a conventional resistance heating type heater. Further, since the cleaning liquid is heated by Joule heat generated by the induced current generated in the conductive tube portion, the heating efficiency is high and the power consumption of the apparatus can be reduced.

この場合、前記導電性管部は、前記循環管において、前記洗浄槽と前記ポンプとの間に配管されることが好ましい（請求項２）。
このように、導電性管部が、循環管において洗浄槽とポンプとの間に配管されれば、誘導加熱により所望の温度とした洗浄液を、温度の低下が少ないまま洗浄槽に送り込むことができる。 In this case, it is preferable that the conductive pipe portion is piped between the cleaning tank and the pump in the circulation pipe.
As described above, when the conductive pipe portion is provided between the cleaning tank and the pump in the circulation pipe, the cleaning liquid having a desired temperature by induction heating can be sent to the cleaning tank with little decrease in temperature. .

また、前記導電性管部はステンレスからなるものであることが好ましい（請求項３）。
このように、導電性管部がステンレスからなるものであれば、コイルにより発生する誘導電流により適度のジュール熱が発生して洗浄液を適度に加熱することができ、また耐久性も高いので好ましい。 Moreover, it is preferable that the said conductive pipe part consists of stainless steel (Claim 3).
Thus, it is preferable that the conductive tube portion is made of stainless steel because moderate Joule heat is generated by the induced current generated by the coil, the cleaning liquid can be heated appropriately, and durability is high.

また、前記循環機構は洗浄液を貯留する洗浄液タンクを備えるものであることが好ましい（請求項４）。
このように、循環機構が洗浄液を貯留する洗浄液タンクを備えるものであれば、洗浄槽に収容される洗浄液量及び循環する洗浄液量を常に適切な量に調整することができる。 Moreover, it is preferable that the said circulation mechanism is equipped with the washing | cleaning-liquid tank which stores a washing | cleaning liquid (Claim 4).
As described above, if the circulation mechanism includes a cleaning liquid tank that stores the cleaning liquid, the amount of the cleaning liquid stored in the cleaning tank and the amount of the cleaning liquid to be circulated can always be adjusted to appropriate amounts.

また、前記循環機構は流量センサーを備えるものであることが好ましい（請求項５）。
このように、循環機構が流量センサーを備えるものであれば、循環する洗浄液量がより正確に検出され、液温の制御をより正確に行なえ、過加熱や空焚きを防止できる。 Moreover, it is preferable that the said circulation mechanism is provided with a flow sensor (Claim 5).
Thus, if the circulation mechanism is provided with a flow rate sensor, the amount of cleaning liquid to be circulated can be detected more accurately, the liquid temperature can be controlled more accurately, and overheating and emptying can be prevented.

また、前記交流電源は前記コイルに周波数１００ｋＨｚ以下の交流電流を流すものであること好ましい（請求項６）。
このように、交流電源がコイルに周波数１００ｋＨｚ以下の交流電流を流すものであれば、交流電源からコイルに電力を供給するためのケーブルにおいて電送損失が少なく、効率的に加熱を行なうことができる。 Moreover, it is preferable that the alternating current power supply allows an alternating current having a frequency of 100 kHz or less to flow through the coil.
As described above, if the AC power supply allows an AC current having a frequency of 100 kHz or less to flow through the coil, the cable for supplying power from the AC power supply to the coil has little transmission loss and can be efficiently heated.

また、前記洗浄槽は超音波振動子を備えるものであることが好ましい（請求項７）。
このように、洗浄槽が超音波振動子を備えるものであれば、少ない電力量で効率的に加熱した洗浄液を用いてより洗浄効率の高い洗浄ができる小型の超音波洗浄装置となる。 Further, it is preferable that the cleaning tank is provided with an ultrasonic vibrator (claim 7).
As described above, if the cleaning tank includes an ultrasonic vibrator, a small ultrasonic cleaning apparatus capable of performing cleaning with higher cleaning efficiency using a cleaning liquid efficiently heated with a small amount of electric power.

本発明に従う構成の装置を用いて循環機構により洗浄液を循環させながら、交流電源によりコイルに交流電流を流し、導電性管部に誘導電流を発生させることにより、循環する洗浄液を加熱すれば、加熱のためには循環管の導電性管部にコイルを巻回するだけでよい。従って、従来の抵抗加熱式のヒーターを備える場合よりも装置の小型化ができる。また、洗浄液は導電性管部に発生する誘導電流によるジュール熱により加熱されるので、加熱効率が高く、装置の電力消費量も少なくできる。   While circulating the cleaning liquid by the circulation mechanism using the apparatus according to the present invention, if the circulating cleaning liquid is heated by flowing an alternating current through the coil by an AC power source and generating an induced current in the conductive tube, For this purpose, it is only necessary to wind a coil around the conductive tube portion of the circulation tube. Therefore, the apparatus can be reduced in size as compared with a conventional resistance heating type heater. Further, since the cleaning liquid is heated by Joule heat generated by the induced current generated in the conductive tube portion, the heating efficiency is high and the power consumption of the apparatus can be reduced.

以下、本発明について詳述する。
本発明者らは、近年要求が高まっている洗浄装置の小型化を実現する方法を鋭意検討したところ、従来の加熱方法を用いる場合には装置の小型化が制約されること、その制約は従来の加熱部の小型化が制約されることに起因することを見出した。 Hereinafter, the present invention will be described in detail.
The present inventors diligently studied a method for realizing downsizing of a cleaning apparatus, which has been increasing in demand in recent years. As a result, when a conventional heating method is used, the downsizing of the apparatus is restricted, and the limitation is the conventional one. It has been found that this is due to the limitation on the miniaturization of the heating part.

そこで本発明者らは、洗浄装置において、洗浄液を循環させるための循環管の一部を導電性の材質とし、これに巻回したコイルに交流電流を流して該導電性管部に電磁誘導による誘導電流を発生させ、その電気抵抗により発生するジュール熱によって管内を流通する洗浄液を加熱することに想到した。このような加熱方法によれば、洗浄装置には加熱装置としてはコイルを備えるだけでよく、さらに循環管が縦、横、斜めのいずれの方向であってもコイルを巻回することができるので、設置空間の有効利用ができ、設置面積を小さく抑えられ、加熱部を小型化できる。さらに電磁誘導により加熱するから加熱効率が高く電力消費量を少なくできる。またこのように加熱効率が高いのでコイルもより小型化できる。本発明者らはこのような考察に基づき、本発明を完成させた。   In view of this, the present inventors have made a part of the circulation pipe for circulating the cleaning liquid a conductive material in the cleaning apparatus, and an alternating current is passed through the coil wound around this to cause an electromagnetic induction to the conductive pipe part. It was conceived to generate an induced current and to heat the cleaning liquid flowing in the tube by Joule heat generated by the electric resistance. According to such a heating method, the cleaning device only needs to have a coil as the heating device, and the coil can be wound even if the circulation pipe is in any of the vertical, horizontal and diagonal directions. The installation space can be used effectively, the installation area can be kept small, and the heating unit can be miniaturized. Furthermore, since heating is performed by electromagnetic induction, heating efficiency is high and power consumption can be reduced. Further, since the heating efficiency is high in this way, the coil can be further downsized. Based on such considerations, the present inventors have completed the present invention.

以下、本発明の実施の形態について図面を用いて具体的に説明するが、本発明はこれらに限定されるものではない。
図１は、本発明に係る洗浄装置の実施形態の一例を示す概略図である。
この洗浄装置２０は、洗浄液１を収容して対象物を洗浄する洗浄槽２と、少なくとも一部が導電性管部３ａからなる循環管３とポンプ４とを備える循環機構５と、導電性管部３ａに巻回して誘導電流を発生させるためのコイル６と、ケーブル７を通じてコイル６に交流電流を流すための交流電源８とを具備するものである。 Hereinafter, embodiments of the present invention will be specifically described with reference to the drawings. However, the present invention is not limited to these embodiments.
FIG. 1 is a schematic view showing an example of an embodiment of a cleaning apparatus according to the present invention.
The cleaning apparatus 20 includes a cleaning tank 2 that contains a cleaning liquid 1 and cleans an object, a circulation mechanism 5 that includes a circulation pipe 3 and a pump 4 at least partially made of a conductive pipe portion 3a, and a conductive pipe. The coil 6 is wound around the part 3a to generate an induced current, and the AC power source 8 is used to pass an AC current through the cable 7 to the coil 6.

洗浄装置２０は、上記構成を具備することにより、循環機構５により洗浄液を循環させながら、交流電源８によりケーブル７を通じてコイル６に交流電流を流し、導電性管部３ａに誘導電流を発生させることにより、循環する洗浄液を加熱して、洗浄槽２の洗浄液１に浸漬した対象物の洗浄を行なうものである。このようにすれば、装置が小型となり、加熱効率が高く、装置の電力消費量も少なくできる。また加熱効率が高いので、加熱開始から所定の液温とするまでの時間を短くすることができる。   The cleaning device 20 has the above-described configuration, and causes an AC current to flow to the coil 6 through the cable 7 from the AC power source 8 while circulating the cleaning liquid by the circulation mechanism 5 to generate an induced current in the conductive tube portion 3a. Thus, the circulating cleaning liquid is heated, and the object immersed in the cleaning liquid 1 of the cleaning tank 2 is cleaned. In this way, the apparatus can be downsized, the heating efficiency is high, and the power consumption of the apparatus can be reduced. Moreover, since the heating efficiency is high, the time from the start of heating to the predetermined liquid temperature can be shortened.

洗浄液１は、例えば純水や有機溶剤あるいは酸等であり、液温は例えば９０℃程度まで加熱できる。
循環機構５は、洗浄液を清浄に保つために、洗浄液をろ過するためのろ過フィルター９を備えることが好ましい。また、循環機構５が洗浄液を貯留する洗浄液タンク１０を備えるものであれば、ポンプ４の出力等により洗浄槽に収容される洗浄液量及び循環する洗浄液量を調整する際に、洗浄液が蒸発等により一部が失われても流量不足等になることなく、常に適切な量に調整することができるので好ましい。洗浄槽２は、あふれた洗浄液を受けて回収するための洗浄液受け２ａを備えれば、洗浄液を有効活用できるので好ましい。また、液温を正確に測定するために、温度計１１は循環管３の導電性管部３ａの直後に設置することが好ましい。また、この洗浄装置は、洗浄槽や洗浄液タンク内にヒーターがないため、洗浄槽やタンク内に汚れが蓄積されるのが抑制される。 The cleaning liquid 1 is, for example, pure water, an organic solvent, or an acid, and the liquid temperature can be heated to, for example, about 90 ° C.
The circulation mechanism 5 preferably includes a filtration filter 9 for filtering the cleaning liquid in order to keep the cleaning liquid clean. Further, if the circulation mechanism 5 includes a cleaning liquid tank 10 that stores the cleaning liquid, when the amount of the cleaning liquid stored in the cleaning tank and the amount of the cleaning liquid to be circulated are adjusted by the output of the pump 4 or the like, the cleaning liquid is evaporated or the like. Even if a part is lost, it is preferable because it can always be adjusted to an appropriate amount without causing insufficient flow. It is preferable that the cleaning tank 2 includes a cleaning liquid receiver 2a for receiving and collecting the overflowing cleaning liquid because the cleaning liquid can be effectively used. In order to accurately measure the liquid temperature, the thermometer 11 is preferably installed immediately after the conductive tube portion 3 a of the circulation tube 3. In addition, since this cleaning apparatus has no heater in the cleaning tank or the cleaning liquid tank, it is possible to suppress the accumulation of dirt in the cleaning tank or the tank.

導電性管部３ａは電磁誘導によりジュール熱が発生する導電性材料からなるものであればとくに限定されないが、ステンレスからなるものであれば、適度のジュール熱が発生して洗浄液を適度に加熱することができ、また耐久性も高いので好ましい。
また、導電性管部３ａは、循環管３において洗浄槽２とポンプ４との間に配管されることが好ましい。このように配管すれば、ポンプにより送り出された洗浄液は導電性管部３ａにより加熱されてから洗浄槽２に達することとなるので、誘導加熱により所望の温度とした洗浄液を、温度の低下が少ないまま洗浄槽２に送り込むことができる。
なお、洗浄液に与える加熱量は、コイルの巻数を増やしたり導電性管部３ａの直径を太くすることで増加させることもできる。 The conductive tube portion 3a is not particularly limited as long as it is made of a conductive material that generates Joule heat by electromagnetic induction. However, if it is made of stainless steel, moderate Joule heat is generated and the cleaning liquid is heated appropriately. And high durability.
In addition, it is preferable that the conductive pipe portion 3 a is piped between the cleaning tank 2 and the pump 4 in the circulation pipe 3. If the piping is arranged in this manner, the cleaning liquid sent out by the pump reaches the cleaning tank 2 after being heated by the conductive tube portion 3a, so that the temperature of the cleaning liquid having a desired temperature by induction heating is small. It can be sent to the washing tank 2 as it is.
Note that the amount of heating applied to the cleaning liquid can be increased by increasing the number of turns of the coil or increasing the diameter of the conductive tube portion 3a.

コイル６は、その形状や材質、巻き数等は特に限定されない。交流電源８は、コイル６に交流電流を流すことができれば特に限定されないが、周波数が高過ぎると、交流電源８からコイル６に電力を供給するためのケーブル７の配線処理によっては電力が漏洩し、電送損失が増加するおそれがあるが、１００ｋＨｚ以下の周波数の交流電流を流すものであれば、十分に周波数が低いので電送損失が少なく、効率的に加熱を行なうことが出来るので好ましい。また、所望量の洗浄液を迅速に加熱するためには、周波数は３０ｋＨｚ以上であることが好ましい。   The shape, material, number of turns, etc. of the coil 6 are not particularly limited. The AC power supply 8 is not particularly limited as long as an AC current can flow through the coil 6. However, if the frequency is too high, the power leaks depending on the wiring process of the cable 7 for supplying power from the AC power supply 8 to the coil 6. However, it is preferable that an alternating current having a frequency of 100 kHz or less is allowed to flow because the frequency is sufficiently low so that the transmission loss is small and heating can be performed efficiently. Moreover, in order to heat a desired amount of cleaning liquid quickly, the frequency is preferably 30 kHz or more.

また、洗浄液の液温制御のため、及び液量が少なくなって導電性管部が過加熱や空焚きの状態となるのを防止するために、従来は洗浄液タンク等に備えたフロートスイッチにより循環する洗浄液量を検出していた。しかしこの方法では、洗浄液として洗剤を含むものを用いた場合に検出量に誤差が生じる場合があった。これは、洗剤を含む洗浄液では液面に泡が発生し、これによってフロートスイッチが実際の液面より高い位置を液面として検出するからであると考えられる。この場合、洗浄液の実際の流量は所定値より低くなり、空焚き等のおそれがある。
しかし、循環機構５が流量センサー１２を備えるものであり、液面の高さではなく循環する洗浄液の流量を検出するものであれば、循環する洗浄液量がより正確に検出され、液温の制御がより正確にできるので好ましい。このとき、流量センサーの検出した流量に応じて誘導加熱を行なうように制御することで、空焚き等が確実に防止できる。 In order to control the liquid temperature of the cleaning liquid and to prevent the conductive pipe from overheating or emptying due to a decrease in the liquid volume, it has been conventionally circulated by a float switch provided in the cleaning liquid tank or the like. The amount of washing liquid to be detected was detected. However, in this method, an error may occur in the detected amount when a cleaning liquid containing a detergent is used. This is considered to be because bubbles are generated on the liquid level in the cleaning liquid containing the detergent, and the float switch detects a position higher than the actual liquid level as the liquid level. In this case, the actual flow rate of the cleaning liquid is lower than a predetermined value, and there is a risk of emptying.
However, if the circulation mechanism 5 includes the flow rate sensor 12 and detects the flow rate of the circulating cleaning liquid rather than the height of the liquid level, the circulating cleaning liquid amount can be detected more accurately, and the liquid temperature can be controlled. Is preferable because it can be more accurately performed. At this time, by performing induction heating according to the flow rate detected by the flow rate sensor, it is possible to reliably prevent idling or the like.

また、洗浄槽２が圧電素子等からなる超音波振動子１３を備えるものであれば、少ない電力量で効率的に加熱した洗浄液を用いてより洗浄効率の高い洗浄ができる小型の超音波洗浄装置となる。超音波振動子については特に限定されず、洗浄槽の大きさ等に応じて必要な数の超音波振動子を取り付ければよい。   In addition, if the cleaning tank 2 includes an ultrasonic vibrator 13 made of a piezoelectric element or the like, a small ultrasonic cleaning apparatus that can perform cleaning with higher cleaning efficiency using a cleaning liquid that is efficiently heated with a small amount of electric power. It becomes. The ultrasonic vibrator is not particularly limited, and a necessary number of ultrasonic vibrators may be attached according to the size of the cleaning tank.

尚、本発明は上記実施形態に限定されるものではない。上記実施形態は単なる例示であり、本発明の特許請求の範囲に記載された技術的思想と実質的に同一な構成を有し、同様な作用効果を奏するものは、いかなるものであっても本発明の技術的思想に包含される。   The present invention is not limited to the above embodiment. The above embodiment is merely an example, and the present invention has any configuration that has substantially the same configuration as the technical idea described in the claims of the present invention and that exhibits the same operational effects. It is included in the technical idea of the invention.

本発明に係る洗浄装置の実施形態の一例を示す概略図である。It is the schematic which shows an example of embodiment of the washing | cleaning apparatus which concerns on this invention. 従来の洗浄装置の例を示す概略図である。It is the schematic which shows the example of the conventional washing | cleaning apparatus.

符号の説明Explanation of symbols

１、１’、１’’…洗浄液、 ２、２’、２’’…洗浄槽、 ２ａ…洗浄液受け、
３、３’、３’’…循環管、 ３ａ…導電性管部、 ４、４’、４’’…ポンプ、
５…循環機構、 ６…コイル、 ７…ケーブル、 ８…交流電源、
９、９’、９’’…ろ過フィルター、 １０、１０’、１０’’…洗浄液タンク、
１１、１１’、１１’’…温度計、 １２…流量センサー、
１３、１３’、１３’’…超音波振動子、 １４’、１４’’…ヒーター、
１５’、１５’’…フロートスイッチ、 ２０、２０’、２０’’…洗浄装置。 1, 1 ', 1''... cleaning solution, 2, 2', 2 '' ... cleaning tank, 2a ... cleaning solution receiver,
3, 3 ', 3 "... circulation pipe, 3a ... conductive pipe part, 4, 4', 4" ... pump,
5 ... Circulation mechanism, 6 ... Coil, 7 ... Cable, 8 ... AC power supply,
9, 9 ', 9 "... filtration filter, 10, 10', 10" ... cleaning liquid tank,
11, 11 ', 11''... thermometer, 12 ... flow sensor,
13, 13 ', 13 "... ultrasonic transducer, 14', 14" ... heater,
15 ', 15 "... float switch, 20, 20', 20" ... cleaning device.

Claims (7)

洗浄装置であって、少なくとも、洗浄液を収容して対象物を洗浄する洗浄槽と、少なくとも一部が導電性管部からなる循環管とポンプとを備える循環機構と、前記導電性管部に巻回して誘導電流を発生させるためのコイルと、該コイルに交流電流を流すための交流電源とを具備し、前記循環機構により洗浄液を循環させながら、前記交流電源により前記コイルに交流電流を流し、前記導電性管部に誘導電流を発生させることにより、前記循環する洗浄液を加熱して、対象物の洗浄を行なうものであることを特徴とする洗浄装置。   A cleaning apparatus, comprising at least a cleaning tank that contains a cleaning liquid and cleans an object, a circulation mechanism that includes at least a part of a circulation pipe made of a conductive pipe part and a pump, and a wound around the conductive pipe part A coil for generating an induced current by turning, and an AC power source for allowing an AC current to flow through the coil, and circulating an AC current to the coil by the AC power source while circulating a cleaning liquid by the circulation mechanism, A cleaning apparatus for cleaning an object by heating the circulating cleaning liquid by generating an induced current in the conductive tube portion. 前記導電性管部は、前記循環管において、前記洗浄槽と前記ポンプとの間に配管されることを特徴とする請求項１に記載の洗浄装置。   The cleaning apparatus according to claim 1, wherein the conductive pipe portion is piped between the cleaning tank and the pump in the circulation pipe. 前記導電性管部はステンレスからなるものであることを特徴とする請求項１又は請求項２に記載の洗浄装置。   The cleaning apparatus according to claim 1, wherein the conductive tube portion is made of stainless steel. 前記循環機構は洗浄液を貯留する洗浄液タンクを備えるものであることを特徴とする請求項１乃至請求項３のいずれか一項に記載の洗浄装置。   The cleaning apparatus according to claim 1, wherein the circulation mechanism includes a cleaning liquid tank that stores a cleaning liquid. 前記循環機構は流量センサーを備えるものであることを特徴とする請求項１乃至請求項４のいずれか一項に記載の洗浄装置。   The cleaning apparatus according to any one of claims 1 to 4, wherein the circulation mechanism includes a flow sensor. 前記交流電源は、前記コイルに周波数１００ｋＨｚ以下の交流電流を流すものであることを特徴とする請求項１乃至請求項５のいずれか一項に記載の洗浄装置。   The cleaning apparatus according to any one of claims 1 to 5, wherein the AC power supply is configured to pass an AC current having a frequency of 100 kHz or less through the coil. 前記洗浄槽は超音波振動子を備えるものであることを特徴とする請求項１乃至請求項６のいずれか一項に記載の洗浄装置。   The cleaning apparatus according to any one of claims 1 to 6, wherein the cleaning tank includes an ultrasonic vibrator.
JP2005003707A 2005-01-11 2005-01-11 Washing device Pending JP2006192328A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018026505A (en) * 2016-08-12 2018-02-15 東京エレクトロン株式会社 Cleaning method and cleaning device of wetting nozzle
KR101974532B1 (en) * 2018-09-28 2019-05-02 (주)다온시스템 Ultrasonic-wave washer with automatic water level control

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018026505A (en) * 2016-08-12 2018-02-15 東京エレクトロン株式会社 Cleaning method and cleaning device of wetting nozzle
KR101974532B1 (en) * 2018-09-28 2019-05-02 (주)다온시스템 Ultrasonic-wave washer with automatic water level control

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