JP2006189612A5 - - Google Patents

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Publication number
JP2006189612A5
JP2006189612A5 JP2005001366A JP2005001366A JP2006189612A5 JP 2006189612 A5 JP2006189612 A5 JP 2006189612A5 JP 2005001366 A JP2005001366 A JP 2005001366A JP 2005001366 A JP2005001366 A JP 2005001366A JP 2006189612 A5 JP2006189612 A5 JP 2006189612A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2005001366A
Other languages
Japanese (ja)
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JP2006189612A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005001366A priority Critical patent/JP2006189612A/ja
Priority claimed from JP2005001366A external-priority patent/JP2006189612A/ja
Publication of JP2006189612A publication Critical patent/JP2006189612A/ja
Publication of JP2006189612A5 publication Critical patent/JP2006189612A5/ja
Withdrawn legal-status Critical Current

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JP2005001366A 2005-01-06 2005-01-06 バリア膜形成用材料及びそれを用いたパターン形成方法 Withdrawn JP2006189612A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005001366A JP2006189612A (ja) 2005-01-06 2005-01-06 バリア膜形成用材料及びそれを用いたパターン形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005001366A JP2006189612A (ja) 2005-01-06 2005-01-06 バリア膜形成用材料及びそれを用いたパターン形成方法

Publications (2)

Publication Number Publication Date
JP2006189612A JP2006189612A (ja) 2006-07-20
JP2006189612A5 true JP2006189612A5 (US20080242721A1-20081002-C00053.png) 2007-11-08

Family

ID=36796891

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005001366A Withdrawn JP2006189612A (ja) 2005-01-06 2005-01-06 バリア膜形成用材料及びそれを用いたパターン形成方法

Country Status (1)

Country Link
JP (1) JP2006189612A (US20080242721A1-20081002-C00053.png)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4716027B2 (ja) * 2006-08-11 2011-07-06 信越化学工業株式会社 レジスト保護膜材料及びパターン形成方法
JP2010016259A (ja) * 2008-07-04 2010-01-21 Panasonic Corp パターン形成方法
JP5563051B2 (ja) 2012-12-13 2014-07-30 Ａｚエレクトロニックマテリアルズマニュファクチャリング株式会社 上層膜形成用組成物およびそれを用いたレジストパターン形成方法

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