JP2006184539A - Cooling device and exposure drawing apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent a damage from spreading when a coolant leaks from an inlet connecting portion or a discharge connecting portion guiding the coolant to and from a plurality of cooling members, by specifying in an early stage the inlet connecting portion or the discharge connecting portion where the coolant leaks. <P>SOLUTION: Inlet pipes 62A to 62D to supply a coolant to a plurality of cooling members 52A to 52D are connected to pipes 54 of the cooling members 52A to 52D at the inlet connecting portions 63A to 63D, respectively. Discharge pipes 64A to 64D to discharge a coolant from a plurality of cooling members 52A to 52D are connected to pipes 54 of the cooling members 52A to 52D at the discharge connecting portions 64A to 64D, respectively. The inlet connecting portions 63A to 63D and the discharge connecting portions 65A to 65D are disposed on one plane in the back of a cooling device 50 for a light source. Thereby, the inlet connecting portions 63A to 63D or the discharge connecting portions 65A to 65D where the coolant leaks is specified in an early stage, when the coolant leaks. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a cooling device that supplies and cools a plurality of light source units or a plurality of heat generating members, and an exposure drawing apparatus including the cooling device.

  Conventionally, various exposure drawing apparatuses for writing an image by exposing exposure light to a photosensitive material surface have been proposed.

  Such an exposure drawing apparatus is provided with a plurality of light source devices, modulates light emitted from the plurality of light source devices into a predetermined pattern, and writes an image by exposing the photosensitive material surface through optical components. (For example, refer to Patent Document 1).

  In this exposure drawing apparatus, when driving a plurality of light source devices, the amount of light emitted from each light source varies due to heat generated by the light sources arranged in each light source device. For this reason, it is necessary to install a radiator (cooling device) at a site where each light source is installed, and supply a coolant such as cooling water to cool the light source.

However, there is a possibility that water leakage may occur at the pipe connection portion (pipe joint or the like) of the introduction pipe or the discharge pipe for supplying or discharging the refrigerant to the radiator. In addition, since a plurality of radiators are arranged, it is difficult to identify a pipe connection portion where water leakage has occurred at an early stage.
JP 2002-351886 A

  The present invention has been made in view of the above problems, and provides a cooling device and an exposure drawing device that can specify the leakage of refrigerant in a pipe connection portion at an early stage and can easily cope with the leakage. With the goal.

  In order to solve the above problems, the cooling device according to the first aspect of the present invention is a cooling device that cools a plurality of light source portions from which light is emitted, and by conducting a refrigerant in a pipe, A plurality of cooling members for cooling the plurality of light source units, respectively, connected to the plurality of cooling members and connected to the introduction side connection portions for introducing a refrigerant from a supply pipe to the pipe, and connected to the plurality of cooling members, respectively. A discharge side connection portion for discharging the refrigerant from the pipe to a discharge pipe, and the introduction side connection portion and the discharge side connection portion are provided concentrated on the same surface or the same region. It is a feature.

  According to the first aspect of the present invention, the plurality of cooling members that respectively cool the plurality of light source units are provided, and the plurality of light source units are cooled by the refrigerant being conducted into the pipes of the respective cooling members. . Each cooling member is provided with an introduction side connection part for introducing the refrigerant from the supply pipe into the pipe, and a discharge side connection part for discharging the refrigerant from the pipe to the discharge pipe, and these introduction side connection part and the discharge side connection. Are concentrated on the same surface or the same region. Thus, when refrigerant leakage occurs, the introduction side connection portion and the discharge side connection portion provided on the same surface or in the same region are inspected so that the introduction side connection portion and the discharge side connection portion where the refrigerant leakage has occurred Can be identified. For this reason, it is possible to repair the introduction side connection part or the discharge side connection part in which refrigerant leakage has occurred at an early stage. Further, since the introduction side connection portion and the discharge side connection portion are provided concentrated on the same surface or the same region, the assembly work is facilitated and the maintenance workability is improved.

  A cooling device according to a second aspect of the present invention is a cooling device that cools a plurality of heat generating members, and a plurality of cooling members that respectively cool the plurality of heat generating members by conducting a refrigerant in a pipe. An inlet-side connecting portion that is connected to each of the plurality of cooling members and introduces the refrigerant from a supply pipe to the pipe; and a discharge-side connection that is connected to the plurality of cooling members and discharges the refrigerant from the pipes to a discharge pipe. And the introduction side connection part and the discharge side connection part are concentrated on the same surface or the same region.

  Here, examples of the heat generating member include a motor and a control board.

  According to the second aspect of the present invention, when the refrigerant leak occurs, the inlet side where the refrigerant leak is generated by checking the inlet side connecting portion and the outlet side connecting portion provided on the same surface or the same region. The connection part or the discharge side connection part can be specified, and the introduction side connection part or the discharge side connection part can be repaired at an early stage. Further, since the introduction side connection portion and the discharge side connection portion are provided concentrated on the same surface or the same region, the assembly work is facilitated and the maintenance workability is improved.

  According to a third aspect of the present invention, in the cooling device according to the first or second aspect, a shielding plate is provided on the side of the plurality of light source parts with respect to the introduction side connection part and the discharge side connection part. It is characterized by having.

  According to invention of Claim 3, since the shielding board is provided between the introduction side connection part and the discharge side connection part, and the plurality of light source parts, the refrigerant leaks at the introduction side connection part or the discharge side connection part. Even if this occurs, the influence on the surrounding area can be prevented.

  According to a fourth aspect of the present invention, there is provided an exposure / drawing apparatus comprising the cooling device according to any one of the first to third aspects, wherein light emitted from the plurality of light source units is transmitted in a predetermined pattern. It is characterized in that an image is written on the surface of the photosensitive material after modulation.

  According to a fourth aspect of the present invention, the cooling device according to any one of the first to third aspects is provided, and the refrigerant leakage occurs when the refrigerant leakage occurs. A side connection part or a discharge side connection part can be identified early. For this reason, it is possible to minimize damage due to refrigerant leakage. In addition, the assembling work is facilitated and the maintenance workability is improved.

  Since the cooling device and the exposure drawing apparatus according to the present invention are configured as described above, the introduction side connection portion or the discharge side connection portion where the refrigerant leakage has occurred can be identified at an early stage, and damage due to the refrigerant leakage can be minimized. Can be suppressed. In addition, workability during assembly and workability during maintenance are improved.

  Hereinafter, embodiments of a cooling device according to the present invention will be described with reference to the drawings.

  First, an outline of the overall configuration of an exposure drawing apparatus equipped with a light source cooling device as a cooling device according to the first embodiment of the present invention will be described, and then the main part of the present invention will be described.

  FIG. 1 shows an exposure drawing apparatus 10 equipped with a light source cooling device 50 according to the first embodiment.

  The exposure drawing apparatus 10 is configured as a so-called flatbed surface exposure type multi-beam exposure apparatus, and includes a plate base 12 supported by four leg members 12A on a base 11, and the plate base. 12, a movable base 15 mounted on the movable base 15 so as to be movable in the feeding direction (scanning direction) indicated by Y in the figure, and installed on the movable base 15, for example, a printed circuit board (PCB), a color liquid crystal display A photosensitive material 21 such as a surface of a glass substrate such as an LCD (LCD) or a plasma display panel (PDP) is placed and fixed, and the position in the height direction indicated by Z in the figure is adjusted. A moving stage 14, a light source unit 16 that emits a multi-beam extending in one direction as laser light, and the multi-beam into desired image data Next, the spatial modulation is performed according to the position of the multi-beam, and the photosensitive material having sensitivity in the wavelength region of the multi-beam is irradiated with the modulated multi-beam as an exposure beam. And a control unit 20 that mainly generates modulation signals supplied to the respective exposure heads 26 of the exposure head unit 18 from the image data.

  In the exposure drawing apparatus 10, an exposure head unit 18 for exposing a photosensitive material is disposed above the moving stage 14, and each exposure head 26 installed in the exposure head unit 18 includes a light source unit. Bundled optical fibers 28 each drawn from 16 are connected.

  The exposure drawing apparatus 10 is provided with a portal frame 22 so as to straddle the plate base 12, and a pair of position detection sensors 24 are attached to both sides thereof. The position detection sensor 24 supplies a detection signal when the passage of the moving stage 14 is detected to the control unit 20.

  In the exposure drawing apparatus 10, two guides 30 extending along the stage moving direction are installed on the upper surface of the plate base 12. A movable pedestal 15 is mounted on the two guides 30 via a slider 31 so as to be reciprocally movable.

  In this exposure drawing apparatus 10, a photosensitive material (substrate) 21 which is an exposed material placed on a moving base 15 via a moving stage 14 is moved in a feeding direction with respect to a fixed exposure head unit 18. The photosensitive material surface is scanned and exposed.

A sliding operation plate member 38 is disposed on the moving base 15 via a guide rail (not shown), and is orthogonal to the scanning direction (arrow Y direction, which is the moving direction of the moving stage 14) by the linear drive mechanism 40. It is moved and adjusted precisely in the direction (arrow X direction). On the sliding operation plate member 38, a pair of wedge-shaped members 44 are arranged in parallel along a direction (arrow X direction) orthogonal to the scanning direction (arrow Y direction which is the moving direction of the moving stage 14). A triangular support block 48 is disposed on the pair of wedge-shaped members 44, and the moving stage 14 installed on the upper side of the support block 48 is configured to be supported in parallel with the moving base 15. Each support block 48 is supported by a support member (not shown) so as not to slide down on the wedge-shaped member 44 due to gravity. And
The linear drive mechanism 40 is driven and controlled by the control unit 20 so that each wedge-shaped member 44 integrated with the sliding operation plate member 38 is perpendicular to the scanning direction (arrow Y direction as the moving direction of the moving stage 14) (arrow X). The exposure surface height (in the direction of arrow Z) of each support block 48 is adjusted by precisely moving in the direction).

  In the light source unit 16, four light source devices 16A to 16D are arranged two by two substantially in parallel in the vertical direction. As shown in FIG. 3, the light source device 16 </ b> B includes a light source unit 17 </ b> B in which a large number of laser modules 112 having a plurality of LD chips are arranged, and lasers connected to the laser modules 112 and emitted from the laser modules 112. A multimode optical fiber 113 that guides and emits light; a multiplicity of multimode optical fibers 113 connected; a connector section 114 that focuses and emits laser light emitted from the multimode optical fibers; A drive control unit 115 that drives and controls the laser module 112 and a wiring 116 that connects each laser module 112 and each drive control unit 115 are provided. The laser module 112 is arranged in two light source rows 112a and 112b with the same laser beam emission direction. The light source arrays 112a and 112b are arranged so as to be positioned forward and backward with respect to the laser light emission direction. In addition, the multi-mode optical fiber 113 is bundled at the connector portion 114 to form a bundled optical fiber 28. The bundle-shaped optical fiber 28 is taken out from the connector portion 114, and focused light obtained by converging the laser beams emitted from the multi-mode optical fibers 113 is emitted from the bundle-shaped optical fiber 28. 3 shows the light source device 16B, the light source devices 16A, 16C, and 16D have the same configuration.

  In such an exposure drawing apparatus 10, as shown in FIG. 1, the light source unit 16 emits laser light from a bundle-like optical fiber 28. Further, image data corresponding to the exposure pattern is input to the control unit 20 and temporarily stored in a memory in the control unit 20.

  The moving stage 14 having the photosensitive material 21 adsorbed on the surface thereof is adjusted by being moved up and down so that the exposure surface position becomes a predetermined height (predetermined interval) with respect to the exposure head unit 18. The moving stage 14 is moved at a constant speed from the upstream side to the downstream side in the transport direction along the guide 30 by a driving device (not shown). When the leading end of the photosensitive material 21 is detected by the position detection sensor 24 attached to the portal frame 22 when the moving stage 14 passes under the portal frame 22, a plurality of lines of image data stored in the memory are obtained. The data is sequentially read out in increments of minutes, and a control signal (control data) is generated for each exposure head 26 by the control unit 20.

  Based on the generated control signal, each micromirror of the spatial light modulation element (not shown) is on / off controlled for each exposure head 26. When the spatial light modulation element is irradiated with laser light from the light source unit 16, the laser light reflected when the micromirror is in the on state forms an image at a required exposure beam spot position. In this way, the laser light emitted from the light source unit 16 is turned on / off for each pixel, and the photosensitive material 21 is exposed.

  The photosensitive material 21 is moved at a constant speed together with the moving stage 14 and scanned by the exposure head unit 18, and a strip-shaped exposed region is formed for each exposure head 26. When the scanning of the photosensitive material 21 by the exposure head unit 18 is completed and the rear end of the photosensitive material 21 is detected by the position detection sensor 24, the moving stage 14 is moved along the guide 30 by the driving device (not shown) in the conveyance direction. It returns to the origin on the upstream side, and again moves along the guide 30 from the upstream side in the transport direction to the downstream side at a constant speed.

  Next, the light source cooling device 50 mounted on the light source unit 16 of the exposure drawing apparatus 10 will be described.

  As shown in FIGS. 1 and 2, four light source devices 16 </ b> A to 16 </ b> D arranged substantially parallel to the vertical direction are fixedly supported on a light source unit 16 on a frame (not shown). The four light source devices 16A to 16D include light source units 17A to 17D in which a large number of laser modules 112 (see FIG. 3) are arranged, and plate-like cooling members (under the light source units 17A to 17D, respectively) Radiators) 52A to 52D are disposed.

  As shown in FIGS. 3 and 6, the cooling member 52B is provided with an aluminum plate 53 having a size substantially the same as that of the light source unit 17B below the light source unit 17B. A pipe 54 through which a refrigerant (for example, cooling water) flows is disposed below the aluminum plate 53. The pipe 54 is arranged meandering over the entire aluminum plate 53 and supported by a support member (not shown) so that substantially the entire cooling members 52A to 52D can be cooled via the aluminum plate 53. Although FIG. 6 shows the cooling member 52B, the other cooling members 52A, 52C, and 52D have the same configuration.

  As shown in FIG. 2, the light source cooling device 50 includes a chiller 56 that cools and supplies the coolant to a predetermined temperature. The chiller 56 is connected to one supply pipe 58 through which the refrigerant flows, and this supply pipe 58 is branched into two supply pipes 60A and 60B on the lower side of the light source cooling device 50. Further, the supply pipe 60A is branched into two introduction pipes 62A and 62B at a branch part 61A, and the supply pipe 60B is branched into two introduction pipes 62C and 62D at a branch part 61B.

  The introduction pipe 62A is connected to a pipe 54 (refer to the direction of arrow A in FIG. 6) disposed on the cooling member 52A at an introduction side connection portion 63A made of a pipe joint. The introduction pipe 62B is connected to the pipe 54 of the cooling member 52B at the introduction side connection portion 63B, the introduction pipe 62C is connected to the pipe 54 of the cooling member 52C at the introduction side connection portion 63C, and the introduction pipe 62D is a cooling member at the introduction side connection portion 63D. Each is connected to a pipe 54 of 52D. These introduction side connection portions 63 </ b> A to 63 </ b> D are supported by a frame (not shown) by a support member 76.

  Furthermore, the discharge side (refer to the arrow B direction in FIG. 6) of the pipe 54 of the cooling member 52A is connected to the discharge pipe 64A by a discharge side connection portion 65A made of a pipe joint. Further, the pipe 54 of the cooling member 52B is connected to the discharge pipe 64B by the discharge side connection portion 65B, the pipe 54 of the cooling member 52C is connected to the discharge pipe 64C by the discharge side connection portion 65C, and the pipe 54 of the cooling member 52D is the discharge side connection portion 65D. Are connected to the discharge pipe 64D. These discharge side connection portions 65 </ b> A to 65 </ b> D are supported by a frame (not shown) by a support member 78. The introduction side connection parts 63A to 63D are piped so that the refrigerant is introduced into the pipe 54 from the lower side of the cooling members 52A to 52D, and the discharge side connection parts 65A to 65D are pipes 54 of the cooling members 52A to 52D. So that the refrigerant flows upward. Thereby, the flow of the refrigerant conducted in the pipe 54 is stabilized.

  Further, the discharge pipe 64A and the discharge pipe 64D are joined to one discharge pipe 68A at a branching portion 66A supported at the uppermost portion through which the refrigerant flows. Further, the discharge pipe 64B and the discharge pipe 64C are joined to one discharge pipe 68B at a branch part 66B supported at the same lift position (the uppermost part through which the refrigerant flows) as the branch part 66A. Further, the discharge pipe 68 </ b> A and the discharge pipe 68 </ b> B are joined to one recovery pipe 74 at the branch portion 72. The collection pipe 74 is connected to the chiller 56. A heat exchanger and a pump (not shown) are provided in the chiller 56, and the refrigerant recovered from the recovery pipe 74 is cooled to a predetermined temperature and sent to the supply pipe 58 to be circulated and supplied.

  In such a light source cooling apparatus 50, the introduction pipes 62A to 62D and the discharge pipes 64A to 64D are arranged in parallel between the supply pipe 58 and the cooling members 52A to 52D and between the cooling members 52A to 52D and the recovery pipe 74. The piping is connected to

  As shown in FIG. 4, the light source cooling device 50 is supported by a main body frame 80. The main body frame 80 includes light source portions 17A to 17D, cooling members 52A to 52D, and discharge side connection portions 65A to 65D. A shielding plate 82 is attached between the discharge side connection portions 65A to 65D. As shown in FIG. 5, the shielding plate 82 is a combination of 11 plate members 82 </ b> A to 82 </ b> K. That is, the shielding plate 82 has four plate members 82A, 82E, 82G, and 82I arranged on the left side when viewed from the back of the two plate members 82B and 82C located at the center, and five plates on the right side. Members 82D, 82F, 82H, 82J, and 82K are arranged. The plate members 82A, 82D, 82G, and 82H positioned on the left and right and up and down are provided with two notches 84 for passing the support members 76 and 78 (see FIG. 4). The plate members 82 </ b> B and 82 </ b> C located at the center are provided with notches 86 used when being attached to the main body frame 80. These shielding plates 82 are used to fasten the plate members 82A to 82K to the main body frame 80 with screws (not shown) after various pipes such as the introduction tubes 62A to 62D and the discharge tubes 64A to 64D of the light source cooling device 50 are completed. Attached by. Further, as shown in FIG. 4, a main body cover 90 is attached to a main body frame 80 on the back side of various pipes such as the introduction pipes 62A to 62D and the discharge pipes 64A to 64D of the light source cooling device 50 by screws (not shown). .

  Next, the operation of the light source cooling device 50 according to the first embodiment of the present invention will be described.

  As shown in FIG. 2, in the chiller 56, the refrigerant recovered from the recovery pipe 74 is cooled to a predetermined temperature and sent out to the supply pipe 58. The refrigerant flowing through the supply pipe 58 is divided into two supply pipes 60A and 60B. Further, the refrigerant flowing through the supply pipe 60A is divided into two introduction pipes 62A and 62B, and the refrigerant flowing through the supply pipe 60B is divided into two introduction pipes 62C and 62D. The refrigerant flowing through the introduction pipes 62A to 62D is introduced from the introduction side connection parts 63A to 63D into the pipes 54 (in the direction of arrow A in FIG. 6) arranged in the four cooling members 52A to 52D.

  And light source parts 17A-17D are cooled because a refrigerant | coolant conducts to the pipe 54 arrange | positioned at four cooling member 52A-52D. At that time, between the supply pipe 58 and the cooling members 52A to 52D, the introduction pipes 62A to 62D are connected in parallel via the supply pipes 60A and 60B, and the refrigerant having a substantially uniform temperature is supplied to each of the cooling members 52A to 52D. To be supplied.

  Further, the refrigerant conducted into the pipes 54 of the cooling members 52A to 52D is sent to the discharge pipes 64A to 64D from the discharge side connection portions 65A to 65D, respectively. Further, the refrigerant is sent to the branch portions 66A and 66B arranged at the uppermost part, and the refrigerant in the discharge pipe 64A and the discharge pipe 64D is merged into one discharge pipe 68A in the branch section 66A, and the discharge pipe 64B in the branch section 66B. The refrigerant in the discharge pipe 64C is merged into one discharge pipe 68B. Further, the refrigerant in the discharge pipe 68 </ b> A and the discharge pipe 68 </ b> B is merged into one recovery pipe 74 at the branch portion 72 and is recovered in the chiller 56. In the chiller 56, the refrigerant is cooled to a predetermined temperature by a heat exchanger and a pump (not shown) and supplied to the supply pipe 58, whereby the refrigerant is circulated and used.

  Thus, in the light source cooling device 50, the introduction side connection portions 63A to 63D and the discharge side connection portions 65A to 65D are provided concentrated on the same surface (back surface) side of the main body frame 80. Thereby, when a refrigerant leak occurs in any of the introduction side connection parts 63A to 63D and the discharge side connection parts 65A to 65D, the main body cover 90 is removed and the back side is examined, whereby the refrigerant leakage occurs. The introduction side connection parts 63A to 63D and the discharge side connection parts 65A to 65D can be specified. For this reason, it is possible to identify and repair the introduction side connection parts 63A to 63D or the discharge side connection parts 65A to 65D in which refrigerant leakage has occurred at an early stage, and to minimize leakage damage. Further, by providing the introduction side connection portions 63A to 63D and the discharge side connection portions 65A to 65D in a concentrated manner on the same surface (back surface) side, assembling work of piping and the like is facilitated, and maintenance workability is improved. .

  Further, since the shielding plate 82 is provided between the introduction side connection portions 63A to 63D and the discharge side connection portions 65A to 65D and the plurality of light source portions 17A to 17D, the introduction side connection portions 63A to 63D or the discharge side Even if the refrigerant leaks in any of the connection parts 65A to 65D and the refrigerant is scattered, it is possible to prevent the refrigerant from adhering to the light source parts 17A to 17D. For this reason, failure of the light source units 17A to 17D due to refrigerant leakage can be prevented.

  In the above embodiment, the four light source units 17A to 17D are arranged. However, the present invention is not limited to this configuration, and the number of light source units can be set as appropriate. At this time, the number of the cooling members may be set according to the number of the light source units, and the introduction side connection portion and the discharge side connection portion through which the refrigerant flows may be provided concentrated on the same surface or the same region.

  In addition, in the said embodiment, although demonstrated as the light source cooling device which cools light source part 17A-17D, it can be used for the cooling device which cools several heat generating members (for example, a motor, a control board, etc.), Similarly, it is possible to identify the pipe connection portion where the refrigerant leakage has occurred at an early stage.

It is a perspective view showing the outline of the exposure drawing device carrying the cooling device for light sources concerning a 1st embodiment of the present invention. It is a perspective view which shows the cooling device for light sources which concerns on 1st Embodiment of this invention. It is a perspective view which shows the light source part cooled with the cooling device for light sources which concerns on 1st Embodiment of this invention. It is a block diagram which shows the state which attached the shielding board of the cooling device for light sources which concerns on 1st Embodiment of this invention. It is a block diagram which shows the shielding board of the cooling device for light sources which concerns on 1st Embodiment of this invention. It is a block diagram which shows the cooling member used with the cooling device for light sources which concerns on 1st Embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Exposure drawing apparatus 16 Light source unit 16A-16D Light source device 17A-17D Light source part 50 Light source cooling device (cooling device)
52A Cooling member 52B Cooling member 52C Cooling member 52D Cooling member 53 Aluminum plate 54 Pipe 56 Chiller 58 Supply pipe 60A Supply pipe 60B Supply pipe 61A Branch part 61B Branch part 62A Introduction pipe (supply pipe)
62B Introduction pipe (supply pipe)
62C introduction pipe (supply pipe)
62D introduction pipe (supply pipe)
63A Introduction side connection 63B Introduction side connection 63C Introduction side connection 63D Introduction side connection 64A Discharge pipe 64B Discharge pipe 64C Discharge pipe 64D Discharge pipe 65A Discharge side connection 65B Discharge side connection 65C Discharge side connection 65D Discharge side Connection part 66A Branch part 66B Branch part 68A Discharge pipe 68B Discharge pipe 72 Branch part 74 Collection pipe 76 Support member 78 Support member 80 Body frame 82 Shield plate 90 Body cover

Claims (4)

A cooling device for cooling a plurality of light source units from which light is emitted,
A plurality of cooling members that respectively cool the plurality of light source units by conducting a refrigerant in the pipe;
An introduction-side connecting portion that is connected to each of the plurality of cooling members and introduces a refrigerant from a supply pipe to the pipe;
A discharge-side connecting portion that is connected to each of the plurality of cooling members and discharges the refrigerant from the pipe to a discharge pipe,
The cooling apparatus, wherein the introduction side connection portion and the discharge side connection portion are provided concentrated on the same surface or the same region. A cooling device for cooling a plurality of heating members,
A plurality of cooling members that respectively cool the plurality of heat generating members by conducting a refrigerant in the pipe;
An introduction-side connecting portion that is connected to each of the plurality of cooling members and introduces a refrigerant from a supply pipe to the pipe;
A discharge-side connecting portion that is connected to each of the plurality of cooling members and discharges the refrigerant from the pipe to a discharge pipe,
The cooling apparatus, wherein the introduction side connection portion and the discharge side connection portion are provided concentrated on the same surface or the same region.   The cooling device according to claim 1 or 2, wherein a shielding plate is provided between the introduction side connection portion and the discharge side connection portion and the plurality of light source portions. The cooling device according to any one of claims 1 to 3, is provided,
An exposure drawing apparatus, wherein light emitted from the plurality of light source units is modulated into a predetermined pattern and an image is written on the surface of the photosensitive material.

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