JP2006162024A - Vibration damping device and its control method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a vibration damping device capable of obtaining superior vibration damping effect with a simple constitution. <P>SOLUTION: This vibration damping device comprises a dynamic vibration absorber connected with a main system mass. The dynamic vibration absorber comprises an auxiliary mass, a sensor for detecting a state of at least one of the main system mass and the auxiliary mass, and a first linear actuator driven on the basis of a result of the detection by the sensor. The first linear actuator comprises a first member having a coil, a movable second member, a first pair of permanent magnets arranged in a first area of the first member in the first direction in a state where their magnetic poles faced to the second member are opposite to each other, and a second pair of permanent magnets arranged in a second area of the first member in the first direction in a state where their magnetic poles faced to the second member are opposite to each other. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a vibration damping device including a dynamic vibration absorber and a control method thereof.

  As a vibration damping device, a dynamic vibration absorber using an auxiliary mass is known. The dynamic vibration absorber suppresses the vibration of the main system mass by applying the inertial force of the auxiliary mass to the main system mass that is the object of vibration suppression as a reaction force. The dynamic vibration absorber is a passive type equipped with a mechanical spring element and a damping element (damper), and actively controlling the spring characteristics and damping characteristics of the dynamic vibration absorber using the driving force of the actuator. There is an active type that controls vibration. In general, an active dynamic vibration absorber is composed of a sensor that detects at least one state (displacement, speed, acceleration, etc.) of an auxiliary mass, an actuator, a main mass, and an auxiliary mass, and based on a detection signal of the sensor, The vibration of the main mass is suppressed by driving the actuator so that the dynamic vibration absorber has optimum spring characteristics and damping characteristics. The following patent document discloses an example of a technique related to a dynamic vibration absorber.

  Active dynamic vibration absorbers are roughly classified into an oil pressure method and an electromagnetic force method depending on the difference in power source input to the actuator. The auxiliary mass driving method is roughly divided into a linear driving method and a motor driving method. The linear drive system is a system that linearly moves the auxiliary mass, and the motor drive system is a system that indirectly moves the auxiliary mass indirectly by rotating a ball screw by a servo motor. When a linear actuator is used as the actuator, the linear actuator dampens the main mass by vibrating (reciprocating) the auxiliary mass. In this case, the center of vibration of the mover may deviate from the center of the stroke of the linear actuator (for example, the center of the stator). In order to prevent this, conventionally, the mover (or by a mechanical spring element) Elements such as additional mass connected to this) are held, and the vibration center of the mover and the stroke center of the linear actuator are substantially matched. As another method, relative position control between the movable element (or an element such as an additional mass connected thereto) and the stator is actively performed.

In addition, when the mover (or an element such as an additional mass connected thereto) is held by the mechanical spring element as described above, the mover (or an element such as an additional mass connected thereto) is used as a dynamic vibration absorber. In order to function well, it is necessary to use a spring element having an optimal spring constant (or a spring constant close to this). Further, when the relative position control between the mover (or an element such as an additional mass connected thereto) and the stator is actively performed, the movable element (or the element such as an additional mass connected thereto) is subjected to dynamic vibration absorption. In order to function as a vibration absorber, it is necessary to control the dynamic vibration absorber so as to have optimum spring characteristics and damping characteristics.
Japanese Patent No. 3398634 JP 2003-184945 A

  However, in the configuration in which the movable element (or an element such as an additional mass connected to the movable element) is held by the mechanical spring element, the structure of the entire dynamic vibration absorber becomes complicated. Further, when it is desired to vibrate the mover with a large amplitude, it is difficult to realize a spring element that can handle the large amplitude. Further, in a configuration in which relative position control between the mover (or an element such as an additional mass connected thereto) and the stator is actively performed, the relative movement between the mover and the stator of the linear actuator is used for position control. Although a sensor for detecting the position or relative speed is required, such a sensor is generally expensive and causes an increase in the cost of the entire vibration damping device.

  The present invention has been made in view of such circumstances, and an object of the present invention is to provide a vibration damping device and a control method thereof that can obtain a good vibration damping effect with a simple configuration.

  In order to solve the above-described problem, a vibration damping device according to the present invention includes a dynamic vibration absorber connected to a main mass, wherein the dynamic vibration absorber includes an auxiliary mass, the main mass, and an auxiliary mass. A sensor that detects at least one state of mass or a relative state; and a first linear actuator that is driven based on a detection result of the sensor, wherein the first linear actuator includes a first member having a coil; A second member including a magnetic body provided so as to be movable relative to the first member in a first direction; and a first region of the first member that faces the second member. A first pair of permanent magnets arranged side by side in the first direction so that the magnetic poles facing the two members are opposite to each other, and the second member of the first member other than the first region, In the second region facing the second member And a second pair of permanent magnets arranged side by side in the first direction so that the magnetic poles facing each other are opposite to each other, each of the first pair of permanent magnets and the second pair of permanent magnets The magnetic poles are arranged in a second direction orthogonal to the first direction, and the first pair of permanent magnets and the second pair of permanent magnets are aligned with respect to the first direction. In the first pair of permanent magnets and the second pair of permanent magnets, the magnetic poles of the permanent magnets that are aligned with respect to the first direction are reversed.

  According to the present invention, when a current is passed in one direction of the coil provided in the first member, for example, the first member, one permanent magnet of the first pair of permanent magnets, the second member, the second member Of the pair of permanent magnets, a magnetic flux is formed by a loop composed of one permanent magnet that is aligned with one permanent magnet of the first pair of permanent magnets in the first direction, and the first member. On the other hand, when a current is passed in the reverse direction of the coil provided on the first member, the other of the first member, the other permanent magnet of the second pair of permanent magnets, the second member, and the first pair of permanent magnets. A magnetic flux is formed by a loop composed of the permanent magnet and the first member. That is, by alternately switching the direction of the current flowing through the coil provided in the first member, a magnetic flux that moves the second member in the reciprocating direction with respect to the first direction is formed. A single member can be reciprocated (vibrated) relative to the first direction. As described above, the second member can be reciprocated (vibrated) with respect to the first member simply by switching the direction of the current flowing through the coil. The vibration control effect can be obtained with a simple configuration. Moreover, since the spring characteristic based on the magnetic flux (magnetic force) formed by each of the first pair of permanent magnets and the second pair of permanent magnets is provided between the first member and the second member. The spring characteristic based on this magnetic force can be used as the spring characteristic of the dynamic vibration absorber. Therefore, the positional relationship between the first member and the second member without holding the second member by a mechanical spring element or actively performing relative position control between the first member and the second member. Can be maintained. Further, even when a mechanical spring element is required, it is sufficient to use one having a small spring constant. Even when active position control is required, a weak control force is sufficient. Therefore, it is possible to cope with vibrating the second member with a large amplitude, and a good vibration damping effect can be obtained with a simple configuration.

  In the vibration damping device of the present invention, the first member is formed by the first magnetic flux formed by the first pair of permanent magnets and the second magnetic flux formed by the second pair of permanent magnets. A configuration in which the second member is held in a predetermined positional relationship can be employed.

  According to the present invention, the first member and the second member are formed by the first magnetic flux formed by the first pair of permanent magnets and the second magnetic flux formed by the second pair of permanent magnets. Since a spring characteristic is imparted between them, the first member and the second member can be held in a predetermined positional relationship even when no current flows through the coil, for example. The positional relationship between the first member and the second member can be maintained without using or performing active position control.

  In the vibration damping device of the present invention, it is possible to employ a configuration in which one of the first member and the second member is a stator of the first linear actuator and the other is a mover.

  According to the present invention, one of the first member and the second member can be used as a stator and the other can be used as a mover, thereby realizing flexible operation.

  In the vibration damping device of the present invention, a configuration in which one of the first member and the second member is connected to an additional mass can be employed.

  According to the present invention, the first member connected to the additional mass by connecting either the first member or the second member to the additional mass to form the auxiliary mass as a whole and connecting the other to the main mass. Alternatively, the second member can function as a dynamic vibration absorber. By connecting the additional mass having the optimum mass to the first member or the second member, the optimum auxiliary mass can be obtained as a whole, and a good vibration damping effect can be obtained.

  In the vibration damping device of the present invention, it is possible to employ a configuration in which the larger one of the first member and the second member is used as the auxiliary mass.

  In a dynamic vibration absorber, in general, a better damping effect can be obtained when the mass of the auxiliary mass is larger. According to the present invention, it is possible to obtain a good vibration damping effect by using the larger one of the first member and the second member as the auxiliary mass.

  In the vibration damping device of the present invention, the first member is a cylindrical member, the second member is a shaft-like member disposed inside the first member, and the first region and the second region Each can adopt a configuration set on the inner surface of the first member. In this case, each of the first region and the second region may employ a configuration that is set at a position facing the second member on the inner surface of the first member.

  According to the present invention, the second member can be reciprocated (vibrated) in the axial direction inside the first member.

  In the vibration damping device of the present invention, the first member has a first surface, the second member has a second surface opposite to the first surface, and each of the first region and the second region. May adopt a configuration set on the first surface of the first member so as to be arranged in a two-dimensional direction.

  ADVANTAGE OF THE INVENTION According to this invention, a 2nd member can be moved to a two-dimensional direction (plane direction) with respect to a 1st member, and the damping device provided with the plane linear actuator can be provided.

  In this case, each of the first region and the second region can adopt a configuration in which a plurality of the first members are set.

  Accordingly, it is possible to provide a vibration damping device including a planar linear actuator that can move the second member in a plurality of different planar directions (specifically, the X direction and the Y direction) with respect to the first member.

  In the vibration damping device of the present invention, a configuration including a second linear actuator different from the first linear actuator can be employed.

  According to the present invention, various operations (processing) can be realized using the second linear actuator. For example, different vibration modes can be controlled using the first linear actuator and the second linear actuator, respectively. Alternatively, the second linear actuator can be used as the sensor.

  When the second linear actuator is used as a sensor, the state can be detected based on the induced electromotive force generated from the coil of the second linear actuator. Specifically, speed information can be detected based on the induced electromotive force generated from the coil of the second linear actuator. Further, acceleration information and position information (displacement amount information) can be obtained by performing predetermined calculation processing such as differentiation processing or integration processing on the obtained speed information.

  The vibration damping device control method of the present invention is a vibration damping device control method including a dynamic vibration absorber connected to a main mass, wherein the dynamic vibration absorber includes an auxiliary mass, the main mass and the auxiliary mass. A sensor that detects at least one of the states, and a first linear actuator that is driven based on a detection result of the sensor, wherein the first linear actuator includes a first member having a coil and the first member. And a magnetic pole facing the second member in a first region facing the second member of the first member, and a second member including a magnetic body provided to be relatively movable in the first direction. A first pair of permanent magnets arranged side by side in the first direction so as to be opposite to each other, and a second region facing the second member other than the first region of the first member , The magnetic poles facing the second member are mutually Magnetic flux formed by each of the first pair of permanent magnets and the second pair of permanent magnets, and a second pair of permanent magnets arranged side by side in the first direction A spring characteristic that generates a biasing force that maintains the first member and the second member in a predetermined positional relationship is provided between the first member and the second member. The characteristic is used as a spring characteristic of the dynamic vibration absorber.

  According to the present invention, between the first member and the second member, there is a spring characteristic based on magnetic flux (magnetic force) formed by each of the first pair of permanent magnets and the second pair of permanent magnets. Therefore, the spring characteristic based on this magnetic force can be used as the spring characteristic of the dynamic vibration absorber. Therefore, the positional relationship between the first member and the second member without holding the second member by a mechanical spring element or actively performing relative position control between the first member and the second member. Can be maintained. Therefore, it is possible to cope with vibrating the second member with a large amplitude, and a good vibration damping effect can be obtained with a simple configuration.

  In the control method of the present invention, a configuration using a dynamic vibration absorber utilizing a spring characteristic based on the magnetic flux of the first linear actuator and a resistance force generated by an induced electromotive force can be employed.

  According to the present invention, in addition to the spring characteristic based on the magnetic flux, the resistance force generated by the induced electromotive force can be used as the damping characteristic of the dynamic vibration absorber.

  In the control method of the present invention, it is possible to employ a configuration in which a second linear actuator different from the first linear actuator is provided and the second linear actuator is used as the sensor.

  According to the present invention, the second linear actuator can be used as a sensor. For example, speed information can be detected based on the induced electromotive force generated from the coil of the second linear actuator.

  According to the present invention, it is possible to obtain a good vibration damping effect with a simple configuration.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

<First Embodiment>
FIG. 1 is a diagram illustrating a vibration damping device 1 according to the first embodiment. In FIG. 1, a vibration damping device 1 includes a dynamic vibration absorber 3 connected to a main mass 2 that is a control target.

  In the following description, an XYZ orthogonal coordinate system is set, and description will be made with reference to this XYZ orthogonal coordinate system. In the present embodiment, the dynamic vibration absorber 3 controls (vibrates) the vibration generated in the X-axis direction of the main mass 2. That is, the vibration damping device 1 of the present embodiment is a one-degree-of-freedom vibration vibration damping device.

  The dynamic vibration absorber 3 in the present embodiment is a so-called active dynamic vibration absorber, and is a sensor that detects an additional mass 4 and / or a relative state of at least one of the main mass 2 and the additional mass (auxiliary mass) 4. 5 and a linear actuator 11 </ b> A that is driven based on the detection result of the sensor 5. The dynamic vibration absorber 3 drives the additional mass (auxiliary mass) 4 in the X-axis direction using the driving force of the linear actuator 11A, and uses the inertial force of the auxiliary mass including the additional mass 4 as a reaction force. To suppress vibration of the main mass 2.

  The sensor 5 shown in FIG. 1 is connected to the additional mass 4 and detects, for example, the absolute acceleration of the additional mass 4. The detection result of the sensor 5 is output to the controller 6. Based on the state quantity (acceleration) detected by the sensor 5, the controller 6 is a linear actuator so that the dynamic vibration absorber 3 can obtain optimum spring characteristics and damping characteristics for damping the main mass 2. The optimum driving amount (control amount) of 11A is derived, and the derived result is output as a command signal to the linear actuator 11A via the power amplifier 7. The power amplifier 7 is supplied with power from the power supply circuit 8. The linear actuator 11 </ b> A controls the main mass 2 by driving (vibrating) the additional mass 4 in the X-axis direction based on a command signal from the controller 6.

  Although the sensor 5 detects the state quantity of the additional mass 4 here, the sensor 5 may detect the state quantities of the main mass 2 and the additional mass 4. For example, the sensor 5 may be constituted by a displacement sensor, and each displacement of the main mass 2 and the additional mass 4 may be detected using the displacement sensor. The displacement information (position information) of the main mass 2 and the additional mass 4 detected by the displacement sensor is output to the controller 6. The controller 6 obtains the relative displacement (relative state) between the main mass 2 and the additional mass 4 based on the detection results of the displacement sensors, and based on the relative displacement, the optimum of the linear actuator 11A is obtained. A suitable driving amount may be derived to drive the additional mass 4. Alternatively, the sensor 5 is constituted by a speed sensor, and the controller 6 derives the optimum driving amount of the linear actuator 11A based on the speed information (relative speed between the main mass 2 and the additional mass 4). The additional mass 4 may be driven.

  An eddy current sensor or the like can be used as the above-described sensor (displacement sensor). Moreover, the state quantity of the main mass 2 and the additional mass 4 can also be detected by using a strain gauge, a piezoelectric element, a piezoelectric film or the like together with a leaf spring.

  Next, the linear actuator 11A will be described with reference to FIGS. The linear actuator 11A includes a yoke (first member, stator) 12 having a coil 18, a mover (second member) 13 provided so as to be relatively movable in the X-axis direction with respect to the yoke 2, and a yoke. 12 includes a pair of permanent magnets (first pair of permanent magnets) 14 and 15, and a pair of permanent magnets (second pair of permanent magnets) 16 and 17 provided on the yoke 12. . Two coils 18 are provided on the yoke 12. The yoke (stator) 12 is fixed to the main mass 2. Moreover, as shown in FIG. 3, the additional mass 4 is connected to the mover 13 via a connecting member 4A. The connecting member 4A is made of a non-magnetic material (for example, a synthetic resin such as engineering plastic).

  The auxiliary mass of the dynamic vibration absorber 3 is configured to include the mover 13, the connecting member 4 </ b> A, and the additional mass 4. In the following description, movable parts such as the movable element 13, the connecting member 4 </ b> A, and the additional mass 4 that are movable with respect to the yoke 12 are collectively referred to as “auxiliary mass 9” as appropriate.

  The yoke 12 in this embodiment is a cylindrical member, and a through hole 21 is formed at the center thereof. On the other hand, the mover 13 is a shaft-like member disposed inside the through hole 21 of the yoke 12, and the outer peripheral surface of the mover 13 in a sectional view is substantially circular. Further, the movable element 13 has a through hole 31 at the center thereof. The mover 13 is provided inside the through hole 21 of the yoke 12 so as to reciprocate in the X-axis direction with respect to the yoke 12. Here, the length of the mover 13 in the X-axis direction (axial direction) is shorter than that of the yoke 12.

  The inner surface 20 of the yoke 12 (through hole 21) is formed in an arc shape in cross section along the outer peripheral surface of the mover 13, and the first and second cylinders are provided at positions facing each other with the mover 13 in between. The plane portions 22A, 22B and the first and second cylindrical surface portions 22A, 22B are connected to both end portions, and the plane portion 23 provided substantially parallel to the XZ plane outside the cylindrical surface portion 22; Connected to the respective end portions, the flat portion 24 provided substantially parallel to the XY plane outside the flat portion 23 and the flat portion 24 opposed to each other were connected substantially parallel to the XZ plane. And an inner surface portion 25. The first inner cylindrical surface portion (first region) 22A is provided on the + Z side with respect to the mover 13, and the second cylindrical surface portion (second region) 22B is provided on the −Z side with respect to the mover 13. Yes. Here, the first and second cylindrical surface portions 22A and 22B have the same diameter, the same length, and the same width, and are arranged coaxially. Further, a concave portion 30 is formed by the flat surface portion 23, the flat surface portion 24, and the inner surface portion 25 on both sides of the first and second cylindrical surface portions 22A, 22B in the Y-axis direction.

  The yoke 12 includes a coil winding portion 28 around which the coil 18 is wound. The coil winding portion 28 is a portion of the yoke 12 between the inner surface portion 25 and the outer surface portion 26 parallel to the inner surface portion 25, and is provided substantially parallel to each other. The coil 18 is wound around the coil winding portion 28 in a ring shape over the entire width of the inner surface portion 25, and is fixed to the yoke 12.

  Permanent magnets 14 and 15 are provided side by side in the X-axis direction on the first inner cylindrical surface portion 22A of the inner surface 20 of the yoke 12 that faces the mover 13. The permanent magnets 14 and 15 are formed in an arc shape in cross section so as to follow the first inner cylindrical surface portion 22A, and are bonded and fixed to the first cylindrical surface portion 22A in a state where the positions around the X axis coincide with each other. . The permanent magnets 14 and 15 are made of ferrite magnets having the same diameter, the same length, and the same width, and are provided coaxially with each other. The permanent magnets 14 and 15 are of radial anisotropy in which magnetic poles are arranged in the Z-axis direction orthogonal to the X-axis direction, and the arrangement of the magnetic poles is reversed. Specifically, the -X side permanent magnet 14 has the N pole 14a on the outer diameter side and the S pole 14b on the inner diameter side, and the + X side permanent magnet 15 has the N pole 15a on the inner diameter side. The S pole 15b is disposed on the outer diameter side. The concave portions 30 of the yoke 12 are arranged on both sides of the permanent magnets 14 and 15 in the Y-axis direction.

  Permanent magnets 16 and 17 are provided side by side in the X-axis direction on the second inner cylindrical surface portion 22B of the inner surface 20 of the yoke 12 facing the mover 13. The permanent magnets 16 and 17 are formed in an arc shape in cross section along the second inner cylindrical surface portion 22B, and are bonded and fixed to the second cylindrical surface portion 22B in a state in which the positions around the X axis are aligned. . The permanent magnets 16 and 17 are made of ferrite magnets having the same diameter, the same length, and the same width, and are provided coaxially with each other. The permanent magnets 16 and 17 have radial anisotropy in which magnetic poles are arranged in the Z-axis direction orthogonal to the X-axis direction, and the arrangement of the magnetic poles is reversed. Specifically, the -X side permanent magnet 16 has an N pole 16a on the inner diameter side and an S pole 16b on the outer diameter side, and the + X side permanent magnet 17 has an N pole 17a on the outer diameter side. In addition, the S pole 17b is arranged on the inner diameter side. The concave portions 30 of the yoke 12 are disposed on both sides of the permanent magnets 16 and 17 in the Y-axis direction.

  The outer diameter of the mover 13 is slightly smaller than the inner diameter of the permanent magnets 14 to 17, and a gap is formed between the mover 13 and the permanent magnets 14 to 17.

  As described above, the first pair of permanent magnets 14 and 15 are arranged such that the magnetic poles (14b and 15a) facing the mover 13 are opposite to the first inner cylindrical surface portion 22A facing the mover 13 of the yoke 12. The second pair of permanent magnets 16 and 17 are arranged side by side in the X-axis direction so that the second inner cylindrical surface portion 22B of the yoke 12 that faces the movable element 13 other than the first inner cylindrical surface portion 22A, The magnetic poles (16a, 17b) facing the mover 13 are provided side by side in the X-axis direction so as to be opposite to each other.

  Further, each of the first pair of permanent magnets 14 and 15 and the second pair of permanent magnets 16 and 17 has magnetic poles arranged in the Y-axis direction. In addition, the first pair of permanent magnets 14 and 15 and the second pair of permanent magnets 16 and 17 are aligned with respect to the X-axis direction, and the first pair of permanent magnets 14 and 15 and the second pair of permanent magnets 16 and 17 are aligned. Among the permanent magnets 16 and 17, the magnetic poles of the permanent magnets that are aligned in the X-axis direction are reversed. That is, the permanent magnet 14 and the permanent magnet 16 that are aligned with respect to the X-axis direction have the magnetic poles (14b, 16a) on the inner diameter side opposite to each other, and the permanent magnet 15 and the permanent magnet 17 that are aligned with respect to the X-axis direction are also equal to each other. The side magnetic poles (15a, 17b) are reversed.

  The yoke 12 forms a base member 27 by punching a thin steel plate into a shape having two cylindrical surface portions 22, four flat surface portions 23, four flat surface portions 24, and two inner surface portions 25 with a press. The base member 27 is constituted by a laminated steel plate in which a plurality of base members 27 are joined while being aligned in the X-axis direction. Further, the yoke 12 is not provided with a back yoke having a shape extending inside the movable element 13.

  The mover 13 is formed by punching a thin steel plate with a press to form an annular base member 32 having a through hole 31 on the inside, and laminating a plurality of the base members 32 while aligning the positions in the X-axis direction. It consists of joined laminated steel sheets. That is, the mover 13 has a configuration including a magnetic body including an iron member.

  In the linear actuator 11A described above, an alternating current (sine wave current, rectangular wave current) is passed through the coils 18 on both sides in synchronization. Here, in the coils 18 on both sides, currents in opposite directions are caused to flow along the penetrating direction of the through hole 21 in the portions closer to the mover 13 than the respective coil winding portions 28.

  In a state where no current flows through the coils 18 on both sides, the yoke 12, the permanent magnet 15, the mover 13, the permanent magnet 14, and the permanent magnets 14 and 15 as shown by a two-dot chain line in FIG. The first magnetic flux is formed in a loop connecting the yoke 12 and the yoke 12 in this order, and the yoke 12, the permanent magnet 16, the movable element 13, the permanent magnet 17, and the yoke 12 are connected in this order by the pair of permanent magnets 16 and 17. A second magnetic flux is formed in the loop. At this time, the movable element 13 is stopped. That is, when no current is passed through the coil 18, the first magnetic flux formed by the first pair of permanent magnets 14 and 15 and the second magnetic flux formed by the second pair of permanent magnets 16 and 17. Thus, the positional relationship between the yoke 12 and the mover 13 is maintained so that the center position of the yoke 12 in the X-axis direction and the center position of the mover 13 in the X-axis direction substantially coincide with each other.

  Further, based on the first and second magnetic fluxes formed by the first pair of permanent magnets 14 and 15 and the second pair of permanent magnets 16 and 17, respectively, between the yoke 12 and the mover 13. A spring characteristic is generated that generates a biasing force that maintains the yoke 12 and the mover 13 in a predetermined positional relationship. Specifically, an urging force (spring characteristic) is applied so that the center position of the yoke 12 in the X-axis direction and the center position of the mover 13 in the X-axis direction are substantially matched. That is, for example, when the mover 13 is moved in the −X direction with respect to the yoke 12, a biasing force in the + X direction is generated in the mover 13, and the mover 13 is moved in the + X direction with respect to the yoke 12. In this case, a biasing force in the −X direction is generated in the mover 13. As described above, the first and second magnetic fluxes formed by the first pair of permanent magnets 14 and 15 and the second pair of permanent magnets 16 and 17, respectively, between the yoke 12 and the mover 13. Since a spring characteristic based on (magnetic force) is given, the yoke 12 and the mover 13 can be held in a predetermined positional relationship even when no current is passed through the coil 18, and mechanically. The positional relationship between the yoke 12 and the mover 13 (auxiliary mass 9) can be maintained without using a spring element or performing active position control.

  Here, in the following description, the spring characteristics based on the first and second magnetic fluxes (magnetic forces) are appropriately referred to as “magnetic spring characteristics”.

  This magnetic spring characteristic can be used as the spring characteristic of the dynamic vibration absorber 3. Accordingly, the movable element 13 and the additional mass 4 (that is, the auxiliary mass 9) connected thereto are held by the mechanical spring element, or the relative position control between the yoke 12 and the movable element 13 is actively performed. In addition, the positional relationship between the yoke 12 and the mover 13 can be maintained. Further, even when a mechanical spring element is required, it is sufficient to use one having a small spring constant. Even when active position control is required, a weak control force is sufficient. Therefore, it is possible to cope with the vibration of the movable element 13 with a large amplitude, and a good vibration damping effect can be obtained with a simple configuration.

  When the spring constant of the magnetic spring characteristic is insufficient or excessive with respect to the optimum spring constant of the dynamic vibration absorber 3, the optimum spring is obtained by feedback of displacement including steady components or feedback of vibration displacement. You may adjust so that it may become a constant. Also, even when adding mechanical spring elements such as leaf springs, it is sufficient to use one with a small spring constant, and it is only supported by a weaker spring than when using a boil coil motor or the like. It is easy to obtain a large amplitude.

  For example, as shown in FIG. 4, when a current is passed through the coil 18 on the + Y side in FIG. 4 so as to flow in the −X direction toward the mover 13, − Magnetomotive force is generated in the Z direction. Then, by the pair of permanent magnets 14 and 15 and the pair of permanent magnets 16 and 17, the coil 18 on the + Y side is provided with the yoke 12 and the pair of permanent magnets as shown by a two-dot chain line in FIGS. 4 and 5. 14, 15 of one permanent magnet 15, the mover 13, of the pair of permanent magnets 16, 17, one of the permanent magnets 17 aligned with the permanent magnet 15 in the X-axis direction, and the yoke 12 are connected in this order. Thus, a magnetic flux is formed. At the same time, when a current is applied to the −Y side coil 18 so as to flow toward the mover 13 in the + X direction, a magnetomotive force is generated in the coil winding portion 28 in the −Z direction. Then, as shown by a two-dot chain line in FIG. 4, the yoke 12, the pair of permanent magnets 14, the pair of permanent magnets 14, 15 and the pair of permanent magnets 16, 17 are also connected to the −Y side coil 18. Magnetic flux is formed by a loop connecting the one permanent magnet 15, the mover 13, one of the pair of permanent magnets 16 and 17, one permanent magnet 17 that is aligned with the permanent magnet 15 in the X-axis direction, and the yoke 12 in this order. Will be.

  Thus, the mover 13 (auxiliary mass 9) moves in the + X direction.

  Next, as shown in FIGS. 6 and 7, when a current is applied to the coil 18 on the + Y side so as to flow in the + X direction on the mover 13 side, the coil winding portion 28 on the inner side thereof is caused in the + Z direction. Magnetic force is generated. Then, as shown by a two-dot chain line in FIGS. 6 and 7, a pair of permanent magnets 14 and 15 and a pair of permanent magnets 16 and 17 cause a coil 18 on the + Y side to have a yoke 12 and a pair of permanent magnets. 14 and 15, the other permanent magnet 14, the mover 13, the pair of permanent magnets 16 and 17, the other permanent magnet 16 that is aligned with the permanent magnet 14 in the X-axis direction, and the loop that connects the yoke 12 in this order. Thus, a magnetic flux is formed. At the same time, when a current is passed through the coil 18 on the -Y side so as to flow in the -X direction toward the movable element 13, a magnetomotive force is generated in the + Z direction at the coil winding portion 28 on the inside. Then, as shown by a two-dot chain line in FIG. 6, the pair of permanent magnets 14 and 15, and the pair of permanent magnets 16 and 17, the coil 18 on the −Y side has a yoke 12, a pair of permanent magnets 14, 15 is a loop connecting the other permanent magnet 14, the mover 13, the other permanent magnet 16, of the pair 15, the other permanent magnet 16 that is aligned with the permanent magnet 14 in the X-axis direction, and the yoke 12 in this order. Magnetic flux is formed.

  Thus, the mover 13 (auxiliary mass 9) moves in the −X direction.

  Then, the direction of the current flowing through both the coils 18 is alternately changed by the alternating current, so that the above operation is repeated, so that the movable element 13 (auxiliary mass 9) has a predetermined stroke with respect to the yoke 12 in the X-axis direction. It will reciprocate.

  Further, in addition to using the magnetic spring characteristics based on the first and second magnetic fluxes (magnetic forces) as the spring characteristics of the dynamic vibration absorber 3, the coil 18 has a relative movement of the movable element 13 with respect to the yoke 12. Since an induced electromotive force corresponding to the speed is generated, the resistance force generated by the induced electromotive force can be used as the damping characteristic of the dynamic vibration absorber 3.

  As described above, the movable element 13 (auxiliary mass 9) reciprocates relative to the yoke 12 relative to the X-axis direction by alternately switching the direction of the current flowing through the coil 18 provided in the yoke 12 ( The dynamic vibration absorber 3 having the linear actuator 11A can provide a good vibration damping effect with a simple configuration.

  Further, since the coil 18 is provided not on the mover 13 but on the yoke 12, there is no need to supply power to the mover 13, and the moving mover 13 may cause a break in the power supply line to the coil 18. Disappear. Therefore, the reliability with respect to continuous operation etc. can be improved.

  Further, since the permanent magnets 14 to 17 are provided not on the mover 13 but on the yoke 12, the weights of the permanent magnets 14 to 17 and the coil 18 increase when a high magnetic flux density is to be obtained in order to improve the performance. However, the weight of the mover 13 does not increase. Therefore, it is possible to easily improve performance (push-up).

  Further, since there is no permanent magnet in the mover 13, it is not necessary to magnetize the mover 13, and no attractive force acts on the mover 13 when the mover 13 is manufactured. Manufacturing is easy. Therefore, manufacture becomes easy and cost reduction can be achieved.

  In addition, since the movable element 13 is moved by the magnetic flux of the loop as described above, a part of the yoke 12 is not arranged as a back yoke on the opposite side to the permanent magnets 14 to 17 of the movable element 13, that is, on the inner diameter side. Can be. Therefore, the space on the opposite side to the permanent magnets 14 to 17 of the mover 13, that is, the space on the through hole 31 side can be effectively used. For example, a part of the connecting member 4 </ b> A that connects the additional mass 4 and the mover 13 can be arranged in the through hole 31, or a part of the additional mass 4 can be arranged in the through hole 31. The connecting member 4A may be connected to the end of the mover 13 in the X-axis direction without arranging the connecting member 4A in the through hole 31.

  As the permanent magnets 14 to 17, it is possible to use rare earths such as neodymium and samarium cobalt, or plastic magnets in addition to the above-mentioned ferrite magnets, but it is costly to use ferrite magnets. More preferable from the viewpoint of reduction.

<Second Embodiment>
Hereinafter, a second embodiment will be described with reference to FIGS. 8 and 9. Here, in the following description, the same or equivalent components as those in the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  The linear actuator 11A in the first embodiment described above uses a cylindrical member (yoke) as a stator and a shaft member as a mover. However, the cylindrical member may be a mover and the shaft member as a stator. Good. For example, in the linear actuator 11B shown in FIGS. 8 and 9, the permanent magnets 14 and 15 and the permanent magnets 16 and 17 are arranged on the outer diameter side of the yoke 12 made of the shaft-shaped member including the coil 18. 15 and the movable element 13 made of a cylindrical member may be provided on the outer diameter side of the permanent magnets 16 and 17.

<Third Embodiment>
Next, a third embodiment will be described with reference to FIG. In the first and second embodiments described above, the first member (yoke) 12 having a coil and a magnet is used as a stator, but the first member 12 having a coil and a magnet can also be used as a mover. In the linear actuator 11C shown in FIG. 10, the second member 13 that does not have a coil and a magnet is fixed to the main mass 2 via a support member 13B and a leg member 13D. The support member 13B supports the second member 13, and the leg member 13D supports the support member 13B on the main mass 2. That is, in this embodiment, the 2nd member 13 which does not have a coil and a magnet is a stator of 11 C of linear actuators. On the other hand, the first member 12 having a coil and a magnet is provided so as to be movable in the X-axis direction with respect to the second member 13, serves as a mover of the linear actuator 11C, and assists the dynamic vibration absorber 3. The mass is 9.

  In a dynamic vibration absorber, in general, a better damping effect can be obtained when the auxiliary mass including the additional mass and the mover is larger. In order to efficiently convert the magnetic flux generated by energizing the coil into the thrust of the linear actuator, it is necessary to ensure a sufficient magnetic path area in the magnetic circuit including the coil and the like so as not to cause magnetic flux saturation. is there. For this reason, the mover (auxiliary mass) needs to have a certain size both in volume and mass. In the present embodiment, since the first member 12 having the coil 18 has a larger mass than the second member 13 having no coil, the first member 12 having the coil 18 is movable as shown in FIG. By using it as a child (auxiliary mass 9), the auxiliary mass 9 close to the optimum value or close to the optimum value can be realized without providing additional mass separately, and an increase in the size of the dynamic vibration absorber 3 can be prevented. .

  Moreover, when using the 1st member 12 which has the coil 18 as a needle | mover (auxiliary mass 9), you may make it add an additional mass to this 1st member 12 (connection). Even when the additional mass 4 is provided, the mass of the additional mass may be small, so that the size of the entire dynamic vibration absorber 3 can be prevented.

  Further, by feeding back the vibration acceleration of the auxiliary mass, the apparent mass can be increased and the vibration damping effect can be further increased.

<Fourth Embodiment>
A fourth embodiment will be described with reference to FIG. A vibration damping device 1 shown in FIG. 11 is a unit in which a linear actuator 11D, an auxiliary mass 9, a sensor 5, a controller 6, a power amplifier 7, a power circuit 8, and the like are integrated. Also in this embodiment, the 1st member 12 which has a coil is a needle | mover, and the 2nd member 13 which does not have a coil is a stator. The entire linear actuator 11 </ b> D including the first member 12 and the second member 13 is accommodated in the housing 50. The second member 13 is supported by a support member 13 </ b> B, and the support member 13 </ b> B is fixed to the inner wall of the housing 50. The controller 6, power amplifier 7, and power supply circuit 8 are unitized and accommodated in a box 10 connected to the housing 50. The first member 12 is connected to the slider 12S via the connecting member 12B. The slider 12S is provided so as to be movable in the X-axis direction on the support member 13B. The first member 12 connected to the slider 12S via the connection member 12B is supported by the support member 13B. The two members 13 can move in the X-axis direction. In this embodiment, the auxiliary | assistant mass 9 of the dynamic vibration damper 3 is comprised including the 1st member 12 and the connection member 12B which have a coil and a magnet. Further, the sensor 5A shown in FIG. 11 can detect relative displacement or speed between the main mass 2 and the first member 12 (auxiliary mass), and the sensor 5B can detect absolute acceleration. It is.

  Thus, handling can be facilitated by unitizing the vibration damping device 1.

  In the present embodiment, the second member that does not have a coil and a magnet may be a mover, and the first member that has a coil and a magnet may be a stator.

<Fifth Embodiment>
Next, a fifth embodiment will be described with reference to FIGS. Here, each of the 1st, 2nd members 12 and 13 in this embodiment is a substantially plate-shaped member, FIG. 12 (A) is the top view which looked at the 1st member 12 from upper direction, FIG.12 (B). These are the top views which looked at the 1st member 12 and the 2nd member 13 arrange | positioned on the 1st member 12 from upper direction. 13A is a cross-sectional view taken along the line AA in FIG. 12B, and FIG. 13B is a diagram illustrating a state in which a current flows through the coil 18.

  12 and 13, the linear actuator 11 </ b> E includes a first member (stator) 12 having a coil 18 and a second member (movable element) 13 provided to be movable with respect to the first member 12. ing. The first member 12 has an upper surface (first surface) 12J, and the second member 13 has a lower surface (second surface) 13K facing the upper surface 12J of the first member 12. The upper surface 12J of the first member 12 includes a first region 22A for providing the first pair of permanent magnets 14 and 15, and a second region 22B for providing the second pair of permanent magnets 16 and 17, respectively. Are set to be arranged in the XY plane direction (two-dimensional direction). In the present embodiment, the first pair of first and second regions 22A and 22B is set side by side in the X-axis direction, and the second pair of first and second regions 22A and 22B is the Y-axis. Set side by side.

  In addition, a slide mechanism (not shown) (for example, a slide bearing including a ball bearing) is provided between the first member 12 and the second member 13, and the second member 13 is in the XY direction with respect to the first member. It is provided to be movable. An air bearing (air pad) is interposed between the first member 12 and the second member 13, and the second member 13 is supported in a non-contact manner with respect to the first member 12 by the force of air. 13 may be provided so as to be movable in the XY direction with respect to the first member 12.

  In FIG. 13B, when a current is passed through the coil 18 on the −X side of the two coils arranged in the X-axis direction so as to flow in the −Y direction toward the center side of the first member 12, A magnetomotive force is generated in the −Z direction at the coil winding portion 28. Then, the pair of permanent magnets 14 and 15 and the pair of permanent magnets 16 and 17 cause the coil 18 on the −X side to have a yoke 12 and a pair of permanent magnets as shown by a two-dot chain line in FIG. One permanent magnet 16 of the magnets 16, 17, the second member 13, one of the pair of permanent magnets 14, 15, one permanent magnet 14 that is aligned with the permanent magnet 15 in the X-axis direction, and the first member 12, A magnetic flux is formed by a loop connecting in this order. At the same time, when a current is passed through the coil 18 on the + X side so as to flow in the −Y direction toward the center of the first member 12, a magnetomotive force is generated in the coil winding portion 28 in the + Z direction. Then, as shown by a two-dot chain line in FIG. 13B, the pair of permanent magnets 14 and 15 and the pair of permanent magnets 16 and 17 also cause the first member 12 and the pair of pairs One permanent magnet 16 of the permanent magnets 16, 17, the second member 13, of the pair of permanent magnets 14, 15, one permanent magnet 14 that is aligned with the permanent magnet 16 in the X-axis direction, and the first member 12 are A magnetic flux is formed by a loop connecting in order.

  Thus, the second member 13 moves in the −X direction. Further, the second member 13 can be moved in the + X direction by passing a current in the reverse direction through the coil 18. The second member 13 can be reciprocated in the X-axis direction with respect to the first member 12 by alternately switching the direction of the current flowing through both the coils 18 by the alternating current.

  Similarly, by passing a current through the coil 18 provided corresponding to the second pair of first and second regions 22A and 22B provided side by side in the Y-axis direction, and alternately switching the direction in which the current flows The second member 13 can reciprocate with respect to the first member 12 in the Y-axis direction.

  Thus, by setting the first and second regions 22A and 22B to be aligned in the two-dimensional direction, the second member 13 can be moved in the XY direction (plane direction) with respect to the first member 12. The vibration damping device 1 including the planar linear actuator 11E can be provided. And the two-degree-of-freedom vibration system can be damped by such a planar linear actuator 11E. In addition, when damping a two-degree-of-freedom vibration system, vibration can be controlled by providing, for example, two linear actuators configured as described in the first embodiment. In this case, two additional masses 4 are provided. Necessary. According to the planar linear actuator 11E of the present embodiment, a single auxiliary mass 9 (additional mass 4, movable element 13) can be used for vibration control with two degrees of freedom, and a vibration control device is used rather than using a plurality of dynamic vibration absorbers. The enlargement of 1 whole can be suppressed.

  Here, the second member 13 is movable in each of the X-axis direction and the Y-axis direction, but the second member 13 can be adjusted by appropriately adjusting the position and number of the first and second regions 22A and 22B. For example, the member 13 can be moved in an inclined direction with respect to the X-axis direction in the XY plane. Also, a combination of using two 2-degree-of-freedom dynamic vibration absorbers to suppress vibrations of 3 or 4 degrees of freedom is possible.

<Sixth Embodiment>
Next, a sixth embodiment will be described with reference to FIG. In the present embodiment, the vibration damping device 1 includes a first linear actuator 11F and a second linear actuator 11G that is different from the first linear actuator 11F. Here, each of the first linear actuator 11F and the second linear actuator 11G has substantially the same configuration as the linear actuator 11D described with reference to FIG. That is, in each of the first linear actuator 11F and the second linear actuator 11G, the first member 12 having a coil and a magnet is a mover, and the second member 13 having no coil and a magnet is a stator. Yes. The second member 13 of the first linear actuator 11F is supported by the support member 13B, and the second member 13 of the second linear actuator 11G is also supported by the support member 13B. The support member 13B is supported by the main mass via the leg member 13D. Further, the first members 12 of the first and second linear actuators 11F and 11G are connected to the slider 12S via the connecting member 12B, and the second member 13 supported by the support member 13B is X It can move in the axial direction. The first member 12 of the first linear actuator 11F and the first member 12 of the second linear actuator 11G are connected to different connecting members 12B and can move independently of each other on the support member 13B.

  Although the first linear actuator 11F and the second linear actuator 11G have substantially the same configuration, the auxiliary mass 9 including the first member 12 and the connecting member 12B, the magnetic spring characteristics, and the like are different from each other, and are different from each other. It has a resonance frequency. The controller 6 can use the first linear actuator 11F and the second linear actuator 11G to control each vibration mode having a different main mass 2.

  In the present embodiment, the second member that does not have a coil and a magnet may be a mover, and the first member that has a coil and a magnet may be a stator.

<Seventh Embodiment>
Next, a seventh embodiment will be described with reference to FIG. Also in the present embodiment, the vibration damping device 1 includes the first linear actuator 11H and the second linear actuator 11J different from the first linear actuator 11H. However, the second linear actuator 11J in the present embodiment includes: It is used as a sensor 5 that detects at least one of the main mass 2 and the auxiliary mass 9. Each of the first linear actuator 11H and the second linear actuator 11J has substantially the same configuration as the linear actuator 11D described with reference to FIG. That is, in each of the first linear actuator 11H and the second linear actuator 11J, the first member 12 having a coil and a magnet is a mover, and the second member 13 having no coil and a magnet is a stator. Yes. The second member 13 of the first linear actuator 11H is supported by the support member 13B, and the second member 13 of the second linear actuator 11J is also supported by the support member 13B. The support member 13B is supported by the main mass 2 via the leg member 13D. Further, the first members 12 of the first and second linear actuators 11H and 11J are connected to the slider 12S via the connecting member 12B, and the second member 13 supported by the support member 13B is X It can move in the axial direction. The first member 12 of the first linear actuator 11H and the first member 12 of the second linear actuator 11J are connected to the same connecting member 12B and are interlocked on the support member 13B. In the present embodiment, the auxiliary mass 9 is configured including the first member 12 and the connecting member 12B of the first and second linear actuators 11H and 11J.

  When the second linear actuator 11J is used as a sensor, an induced electromotive force is generated in the coil 18 of the second linear actuator 11J according to the moving speed of the first member 12 of the first and second linear actuators 11H and 11J. Based on the induced electromotive force generated from the coil 18, the state of the auxiliary mass 9, specifically, speed information can be detected. Further, acceleration information and position information (displacement amount information) can be obtained by performing predetermined calculation processing such as differentiation processing or integration processing on the obtained speed information.

  In the present embodiment, the second member that does not have a coil and a magnet may be a mover, and the first member that has a coil and a magnet may be a stator.

<Other embodiments>
When the magnetic spring characteristic is used (or when a mechanical spring element is provided), steady position control of the mover (auxiliary mass) becomes unnecessary. At this time, if the vibration displacement or vibration speed can be detected, the optimum spring constant and optimum damping coefficient of the dynamic vibration absorber can be controlled. When the linear actuator is driven, the linear actuator generates an induced electromotive force proportional to the speed. A speed signal can be obtained by detecting the induced electromotive force. It is also possible to obtain vibration acceleration by performing vibration processing on the differential signal of the vibration by integrating this. For example, in FIG. 16, a terminal voltage V and a current i are detected and output as an induced voltage E through an amplifier circuit and a differentiation circuit. In this case, it is necessary to set gains K1 and K2 corresponding to the winding resistance R and the winding inductance L. The setting is adjusted so that a current of a predetermined frequency is supplied while the movable part (movable element, auxiliary mass) of the linear actuator is constrained, and the output becomes zero. In the induced voltage E, since the relationship of E = VR · i−L (di / dt) is established, the induced voltage E can be obtained by detecting the terminal voltage V and the current i.

  When a spring constant close to the optimum value is obtained for the dynamic vibration absorber due to magnetic spring characteristics or mechanical spring elements, energy for damping is adjusted by adjusting the damping force generated by the induced electromotive force of the linear actuator. A high vibration damping effect can be obtained without supplying. The damping force can be adjusted by connecting a load resistance to both ends of the coil of the linear actuator and changing the magnitude of the load resistance.

  Note that the dynamic vibration absorber of the above-described embodiment is used for vibration suppression of seats and handles of automobiles, airplanes, trains, etc., and vibration suppression of human interface parts of machines that generate vibration such as mowers, rock drills, and vibration rollers. It can be used for vibration suppression of power transmission lines, aircraft wings, bridges, semiconductor manufacturing equipment and electron microscopes. Further, it can be applied to fine work under a microscope and suppression of shaking of a human hand during medical work.

1 is a schematic configuration diagram illustrating a vibration damping device according to a first embodiment. It is the front view which expanded the principal part of the damping device which concerns on 1st Embodiment. FIG. 3 is a side sectional view of FIG. 2. It is a front view for demonstrating the generated magnetic flux. It is a sectional side view for demonstrating the produced magnetic flux. It is a front view for demonstrating the generated magnetic flux. It is a sectional side view for demonstrating the produced magnetic flux. It is the front view which expanded the principal part of the damping device which concerns on 2nd Embodiment. It is a sectional side view of FIG. It is a schematic block diagram which shows the damping device which concerns on 3rd Embodiment. It is a schematic block diagram which shows the damping device which concerns on 4th Embodiment. It is a top view which shows typically the damping device which concerns on 5th Embodiment. FIG. 13 is a cross-sectional view taken along line AA in FIG. 12. It is a schematic block diagram which shows the damping device which concerns on 6th Embodiment. It is a schematic block diagram which shows the damping device which concerns on 7th Embodiment. It is a figure for demonstrating the principle of the speed detection using a linear actuator.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Damping device, 2 ... Main system mass, 3 ... Dynamic vibration absorber, 4 ... Additional mass, 5 ... Sensor, 9 ... Auxiliary mass, 11A-11H, 11J ... Linear actuator, 12 ... 1st member, 12J ... Upper surface (First surface), 13 ... second member, 13K ... lower surface (second surface), 14, 15 ... first pair of permanent magnets, 16, 17 ... second pair of permanent magnets, 18 ... coil, 22A ... 1st inner cylinder surface part (1st field), 22B ... 2nd cylindrical surface part (2nd field)

Claims (17)

In a damping device with a dynamic vibration absorber connected to the main mass,
The dynamic vibration absorber is
Auxiliary mass,
A sensor for detecting at least one of the main mass and the auxiliary mass, or a relative state;
A first linear actuator that is driven based on a detection result of the sensor,
The first linear actuator is
A first member having a coil;
A second member including a magnetic body provided to be movable relative to the first member in a first direction;
A first pair of permanents arranged in the first direction in the first region of the first member facing the second member so that the magnetic poles facing the second member are opposite to each other. Magnets,
Of the first member, provided in a second region facing the second member other than the first region, side by side in the first direction so that the magnetic poles facing the second member are opposite to each other. A second pair of permanent magnets;
Each of the first pair of permanent magnets and the second pair of permanent magnets has magnetic poles arranged in a second direction orthogonal to the first direction,
The first pair of permanent magnets and the second pair of permanent magnets are aligned with respect to the first direction;
Of the first pair of permanent magnets and the second pair of permanent magnets, the vibration control device is characterized in that the magnetic poles of the permanent magnets that are aligned in the first direction are reversed. A first magnetic flux formed by the first pair of permanent magnets;
By the second magnetic flux formed by the second pair of permanent magnets,
The vibration damping device according to claim 1, wherein the first member and the second member are held in a predetermined positional relationship.   3. The vibration damping device according to claim 1, wherein one of the first member and the second member is a stator of a first linear actuator, and the other is a mover. 4.   4. The vibration damping device according to claim 1, wherein one of the first member and the second member is connected to an additional mass. 5.   The damping device according to any one of claims 1 to 4, wherein a larger one of the first member and the second member is used as the auxiliary mass. The first member is a cylindrical member, and the second member is a shaft-like member disposed inside the first member;
Each of the said 1st area | region and the said 2nd area | region is set to the inner surface of the said 1st member, The damping device as described in any one of Claims 1-5 characterized by the above-mentioned.   The vibration damping device according to claim 6, wherein each of the first region and the second region is set at a position facing the second member on the inner surface of the first member. The first member has a first surface; the second member has a second surface opposite the first surface;
Each of the said 1st area | region and the said 2nd area | region is set to the 1st surface of the said 1st member so that it may rank in a two-dimensional direction, The Claim 1 characterized by the above-mentioned. Damping device.   9. The vibration damping device according to claim 8, wherein a plurality of each of the first region and the second region is set in the first member.   The vibration damping device according to any one of claims 1 to 9, further comprising a second linear actuator different from the first linear actuator.   The vibration control device according to claim 10, wherein different vibration modes are respectively controlled by using the first linear actuator and the second linear actuator.   The vibration damping device according to claim 10, wherein the second linear actuator is used as the sensor.   The vibration damping device according to claim 12, wherein the state is detected based on an induced electromotive force generated from a coil of the second linear actuator.   The vibration damping device according to claim 13, wherein speed information is detected based on an induced electromotive force generated from a coil of the second linear actuator. In the control method of the vibration damping device including the dynamic vibration absorber connected to the main mass,
The dynamic vibration absorber is
Auxiliary mass,
A sensor for detecting at least one of the main mass and the auxiliary mass;
A first linear actuator that is driven based on a detection result of the sensor,
The first linear actuator is
A first member having a coil;
A second member including a magnetic body provided to be movable relative to the first member in a first direction;
A first pair of permanent members arranged in the first direction in the first region of the first member facing the second member so that the magnetic poles facing the second member are opposite to each other. A magnet,
Of the first member, provided in a second region facing the second member other than the first region, side by side in the first direction so that the magnetic poles facing the second member are opposite to each other. A second pair of permanent magnets;
Based on the magnetic flux formed by each of the first pair of permanent magnets and the second pair of permanent magnets, the first member and the second member are interposed between the first member and the second member. And a spring characteristic that generates an urging force to maintain a predetermined positional relationship,
A control method using the spring characteristic as a spring characteristic of the dynamic vibration absorber.   The control method according to claim 15, wherein a dynamic vibration absorber using a spring characteristic based on the magnetic flux of the first linear actuator and a resistance force generated by an induced electromotive force is used. A second linear actuator different from the first linear actuator is provided;
The control method according to claim 15 or 16, wherein the second linear actuator is used as the sensor.

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