JP5092206B2 - Linear actuator positioning control method and apparatus - Google Patents

Description

  The present invention relates to a linear actuator positioning control method and apparatus.

High-speed and high-precision positioning is required for the Z-axis actuator that drives the head used in a chip mounter or chip component inspection device in the vertical direction, and currently, it is composed of a rotary motor + ball screw. There are many cases.
As one application, a reciprocating motor used as a linear actuator is composed of a stator, a mover, and a bearing that supports the mover, and the mover is configured to reciprocate in the axial direction with respect to the stator. Yes.

  A configuration example of this linear actuator (reciprocating motor) is shown in FIG. In the figure, the linear actuator 1 supports a movable element 71, a stator 90 arranged around the movable element 71, and a movable element 71 that can reciprocate relative to the stator 90 by elastically deforming itself. Two leaf springs 73 are provided.

The mover 71 has a columnar shape, and includes a shaft 81 that reciprocates in the axial direction, and an iron piece 82 as a movable magnetic pole that is fitted inside the shaft 81 and is fixed at an intermediate position in the axial direction of the shaft 81. Yes.
The stator 90 includes a yoke 91 (laminated core) and a pair of coils 92 and 93 that are arranged so as to sandwich the mover 71 therebetween and are fixed to the inside of the yoke 91. The coil 92 is configured by attaching a winding drum 96 to a magnetic pole portion 91a formed so as to protrude inwardly from the yoke 91, and winding a metal wire 97 around the winding drum 96 in multiple layers. The coil 93 is configured such that a winding drum 96 is similarly attached to a magnetic pole portion 91b formed at a position facing the magnetic pole portion 91a across the mover 71, and metal wires 97 are wound around the winding drum 96 in multiple layers. Yes.

Permanent magnets 94 and 95 are arranged and fixed in the axial direction of the shaft 81 on the front end surface of the magnetic pole portion 91a toward the mover 71. Permanent magnets 94 and 95 are also arranged and fixed in the axial direction of the shaft 81 on the front end surface of the magnetic pole portion 91b facing the mover 71. These permanent magnets 94 and 95 are made of arc-shaped magnets having the same coaxial diameter and the same length, and are arranged adjacent to each other in the axial direction.
A magnetic center as will be described later exists at the midpoint of the shaft 81.

The principle of operation of the linear actuator 1 configured as described above will be described.
When no current flows through the coils 92 and 93, as shown in FIG. 2A, the magnetic flux is guided from the S pole to the N pole in the permanent magnet 94, so that the outer peripheral portion of the yoke 91 and the magnetic pole portion 91a. A magnetic flux loop that circulates in the order of the permanent magnet 95, the iron piece 82, and the outer peripheral portion of the yoke 91 is formed, and the permanent magnet 95 is guided from the S pole to the N pole, whereby the outer peripheral portion of the yoke 91, the magnetic pole portion 91a, A magnetic flux loop that circulates in the order of the permanent magnet 94, the iron piece 82, and the outer periphery of the yoke 91 is formed.

  In addition, when an alternating current (sine wave current, rectangular wave current) is passed through the coils 92 and 93, the magnetic flux is generated from the permanent magnet 94 when a current in the direction shown in FIG. In this case, the magnetic flux loop Flx1 that circulates in the order of the outer peripheral portion of the yoke 91, the magnetic pole portion 91a, the permanent magnet 94, the iron piece 82, and the outer peripheral portion of the yoke 91 is formed. As a result, a force acts on the mover 71 in the axial direction from the rear end to the front end of the iron piece 82, and the mover 71 is pushed by the force and moves in the same direction.

  Further, as shown in FIG. 2C, when a current in the direction opposite to the above flows through the coils 92 and 93, the magnetic flux is guided from the S pole to the N pole in the permanent magnet 95, so that the yoke 91. The magnetic flux portion Flx2 that circulates in the order of the outer peripheral portion, the magnetic pole portion 91a, the permanent magnet 95, the iron piece 82, and the outer peripheral portion of the yoke 91 is formed. As a result, a force acts on the mover 71 in the axial direction from the front end to the rear end of the iron piece 82, and the mover 71 is pushed by the force and moves in the same direction.

The mover 71 repeats the above operation by alternately changing the direction of the current flow to the coils 92 and 93 by the alternating current, and reciprocates in the axial direction of the iron piece 82 with respect to the stator 72. .
Since the reciprocating motor can be configured as a high-precision linear servo motor that can control the position, speed, and force by using a linear sensor for positioning, it can be used for the Z-axis actuator of the above device (see Patent Document 1). ).

In addition, although high-precision positioning as described above is not required, in applications where rough positioning is desired, the magnetic stable point is moved by changing the magnitude of the current without using a sensor and stopped here. A positioning method by open loop control has also been proposed.
JP 2003-339147 A

However, when the reciprocating motor mover is positioned only by the current change, there are the following problems.
That is,
(1) The moving time of the mover cannot be shortened.
As shown in FIG. 3, when the mover is moved to the Xo [mm] position in an open loop, it is necessary to flow a current Io at which the thrust becomes zero at the Xo [mm] position. When moving from the 0 [mm] position, when an electric current is passed, it starts to move with the force of Ff [N], the thrust decreases as it moves, and the thrust becomes almost 0 [N] immediately before the Xo position. Since the moving time of the mover is determined by the relationship between the thrust and the mass of the moving part, the requirement cannot be satisfied when a thrust greater than Ff [N] is required.

(2) Vibration occurs when stopped.
If positioning is performed by the method (1), the stop position Xo is reached while the high speed is maintained, and the stop position Xo is overrun. When it reaches a certain position, it is returned by a magnetic spring, and Xo goes too far in the opposite direction. This is repeated several times and stopped as shown in FIG. In the positioning device, it is necessary to suppress vibrations for reasons such as it takes time until settling or parts collide with each other due to overshoot.
Although there is a method of suppressing the vibration at the time of stopping by smoothing the current waveform, it takes a long time to move.

  The present invention has been made in view of such circumstances, and positioning of a linear actuator that can be moved at high speed and can be stopped while suppressing vibration when positioning a mover by open loop control. It is an object to provide a control method and apparatus.

In order to achieve the above object, the invention described in claim 1 is directed to a mover, a stator disposed around the mover, and the mover supported to be reciprocally movable with respect to the stator. A linear actuator positioning control method comprising: a laminated core; a coil fixed to the laminated core; and a permanent magnet provided facing the movable element. When the child is moved from the reference position to a predetermined position by a positive thrust, a current pattern supplied to the coil is a first current I1 for accelerating the mover in the positive direction from the reference position for a predetermined time T1. only supplying an electric current to the coil, then the first current I1 the mover said pre hear Doko current after a predetermined non-energization time T2 is not supplied to the coil predetermined for suppressing acceleration of by energization of Stop in position Characterized in that so as to energize the second current I2 to (I2 <I1) for.

  According to a second aspect of the present invention, in the linear actuator positioning control method according to the first aspect, the first current I1, the second current I2, and the times T1, T2 in the current pattern are the movable element. It is determined according to the movement distance and the movement time.

The invention according to claim 3 includes a mover and a stator disposed around the mover, the stator including a laminated core, a coil fixed to the laminated core, A linear actuator positioning control method comprising a permanent magnet provided facing the mover, wherein the mover is moved from a reference position to a predetermined position by a positive thrust, stopped, and then returned to the original position. When returning the mover, a current pattern supplied to the coil is energized with a third current I3 for accelerating the mover with a negative thrust from the stop position for a predetermined time T3. Reverse direction to the third current for decelerating the mover after a predetermined non-energization time T4 when no current is supplied to the coil for suppressing acceleration of the mover due to the energization of the third current I3. The fourth current of 4 (│I4│ <│I3│) was energized a predetermined time T5, characterized in that so as to zero the current applied to the coil.
.

  According to a fourth aspect of the present invention, in the linear actuator positioning control method according to the third aspect, the third current I3, the fourth current I4, and the times T3, T4, T5 in the current pattern are It is determined according to the moving distance and moving time of the mover.

The invention according to claim 5 includes a mover, a stator disposed around the mover, and a spring that supports the mover in a reciprocating manner with respect to the stator. The stator is a linear actuator positioning control device including a laminated core, a coil fixed to the laminated core, and a permanent magnet provided facing the mover, and a current supplied to the coil and parameter setting means for setting parameters between the time current value and energizing a polar, on the basis of the set parameters by the parameter setting means controls the current supplied to the coil of the linear actuator of the desired said movable element Control means for moving to a position, and when moving the mover from a reference position to a predetermined position by positive thrust, the parameter setting means A first current I1 for accelerating the mover in the positive direction from the reference position is energized to the coil for a predetermined time T1, and then the mover is energized by energizing the first current I1. Set to energize a second current I2 (I2 <I1) for stopping the mover at the predetermined position after a predetermined non-energization time T2 when no current is supplied to the coil for suppressing acceleration of It is characterized by being.

  According to a sixth aspect of the present invention, in the linear actuator positioning control apparatus according to the fifth aspect, the first current I1, the second current I2, and the times T1, T2 in the current pattern are the movable element. It is characterized in that it is set according to the movement distance and movement time.

The invention according to claim 7 includes a mover and a stator disposed around the mover, and the stator includes a laminated core, a coil fixed to the laminated core, a positioning control system for a linear actuator comprising a permanent magnet provided so as to face the movable element, and a parameter setting means for setting parameters between the time current value and current including the polarity of the current supplied to said coil, Control means for controlling the current supplied to the coil of the linear actuator based on the parameter set by the parameter setting means to move the mover to a desired position. When the movable element is returned to the original position after being moved to a predetermined position by the thrust of and then stopped, the current pattern supplied to the coil by the parameter setting means The coil is supplied with a third current I3 for accelerating the mover from the stop position with a negative thrust for a predetermined time T3, and then the acceleration of the mover due to the supply of the third current I3 is suppressed. A fourth current I4 (| I4 | <| I3 |) in the direction opposite to the third current for decelerating the mover after a predetermined non-energization time T4 when no current is supplied to the coil for A characteristic is that the current flowing through the coil is set to zero after energization for a predetermined time T5.

  Further, the invention according to claim 8 is the linear actuator positioning control device according to claim 7, wherein the third current I3, the fourth current I4, and the times T3, T4, and T5 in the current pattern are It is determined according to the moving distance and moving time of the mover.

The invention according to claim 9 includes a mover, a stator disposed around the mover, and a spring that supports the mover in a reciprocating manner with respect to the stator. The stator is a linear actuator positioning control device including a laminated core, a coil fixed to the laminated core, and a permanent magnet provided facing the mover, and a current supplied to the coil advance parameters between the time current value and energizing a polar, multiple types and stored in that storage means, the coil of the linear actuator based on parameters selected by an external input of the parameter stored in the storage means Control means for controlling the current supplied to the movable element to move the movable element to a desired position, and the control means moves the movable element from a reference position to a predetermined position by a positive thrust. In this case, the parameter setting means energizes the coil with a first current I1 for accelerating the mover in the positive direction from the reference position for a predetermined time T1. Next, a second for stopping the mover at the predetermined position after a predetermined non-energization time T2 when no current is supplied to the coil for suppressing acceleration of the mover due to the energization of the first current I1. A current I2 (I2 <I1) is applied.

  The linear actuator positioning control apparatus according to claim 9 is the linear actuator positioning control apparatus according to claim 9, wherein the first current I1, the second current I2, and the times T1, T2 in the current pattern are the movable element. It is characterized in that it is set according to the movement distance and movement time.

The linear actuator positioning control apparatus according to claim 11 is the linear actuator positioning control apparatus according to claim 9, wherein the control means moves the movable element from a reference position to a predetermined position by a positive thrust and stops the movable element. Thereafter, when returning the mover to the original position, a third current I3 for accelerating the mover from the stop position with a negative thrust is applied to the current pattern supplied to the coil by the parameter setting means. Is applied to the coil for a predetermined time T3, and then the current is not supplied to the coil for suppressing acceleration of the mover due to the application of the third current I3. After energizing a fourth current I4 (| I4 | <| I3 |) in the opposite direction to the third current for deceleration for a predetermined time T5, the current flowing through the coil is reduced to zero. And features.

  According to a twelfth aspect of the present invention, in the linear actuator positioning control device according to the eleventh aspect, the third current I3, the fourth current I4, and the times T3, T4, and T5 in the current pattern are It is determined according to the moving distance and moving time of the mover.

  As described above, according to the present invention, a mover and a stator disposed around the mover are provided, and the stator includes a laminated core, and a coil fixed to the laminated core. A linear actuator positioning control method comprising a permanent magnet provided facing the mover, wherein when the mover is moved from a reference position to a predetermined position by a positive thrust, a moving distance of the mover and In accordance with the movement time, a current pattern supplied to the coil is energized to the coil for a predetermined time T1 with a first current I1 for accelerating the mover in the positive direction from the reference position, and then the first The second current I2 for determining the stop position of the mover is energized after a predetermined non-energization time T2 when no current is supplied to the coil for suppressing acceleration of the mover due to the energization of the current I1. Yo Since the can be implemented in which the positioning of the movable element in the open loop control, enables high-speed movement, and a positioning control method and apparatus of the linear actuator can be stopped to suppress vibrations.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

A first embodiment of the linear actuator positioning control method of the present invention will be described.
[First Embodiment of Positioning Control Method]
The linear actuator positioning control method according to the first embodiment of the present invention includes a mover and a stator disposed around the mover, and the stator includes a laminated core and the laminated core. A linear actuator positioning control method comprising a fixed coil and a permanent magnet provided facing the mover, wherein the mover is moved from a reference position to a predetermined position by a positive thrust. As a current pattern supplied to the coil, a first current I1 for accelerating the mover in the positive direction from the reference position according to the moving distance and moving time of the mover is supplied to the coil for a predetermined time T1. and then down the front hear Doko to the predetermined position after a predetermined non-energization time T2 elapses without supplying current to the coil for suppressing the acceleration of the mover due to energization of the first current I1 It is characterized in the the fact as to energize the second current I2 (I2 <I1) for causing.

FIG. 5 shows a current pattern applied to the coil for driving the mover of the linear actuator.
In the linear actuator position control method according to the first embodiment,
(1) The magnitude I1 of the first current (current for increasing acceleration and moving time) and the energization time T1
(2) Non-energized section: T2 (resting time for suppressing acceleration due to current of (1))
(3) By adjusting the magnitude I2 of the second current (current for determining the stop position of the mover) according to the moving distance and moving time of the mover, the mover is moved at high speed and is movable. It is possible to reduce the displacement overshoot at the stop position of the child.

  FIG. 6 shows an activation signal, a current supplied to the coil, and a displacement waveform of the mover when the linear actuator is operated with a current pattern by the linear actuator positioning control method according to the present embodiment. Compared to the waveform shown in FIG. 4, it can be seen that the mover has moved to the target position in a short time and stopped without vibrating.

A case where the mover of the linear actuator is moved from the 0 [mm] position to the Xo [mm] position in the same manner as described above will be described with reference to FIGS.
In this case, of the current pattern supplied to the coil for driving the mover in the linear actuator, the current I2 needs to be a current at which the thrust becomes zero at the Xo [mm] position. A].
The current I1 is a current (I1> I2) for generating a force necessary to accelerate the mover at a high speed, and T1 is a time for continuing the acceleration.

As shown in FIG. 7, when switching to I2 without providing a non-energized section, it reaches the stop position Xo with a high speed, so that only the current I2 is energized to the coil for driving the mover. Stops with greater vibration.
Thus, when there is no non-energized section, only the thrust in the positive direction is working, so the speed continues to increase.
On the other hand, when there is a non-energized section, as shown in FIG. 8, a force in the negative direction is applied after applying a large force in the positive direction, and the speed is reduced. When the current I2 is applied to the coil in a state where the mover is at a certain speed, the mover can reach the stop position Xo without vibrating.
The currents I1 and I2 and the times T1 and T2 are determined by the moving distance and the moving time.

[Second Embodiment of Positioning Control Method]
A linear actuator positioning control method according to a second embodiment of the present invention will be described. A linear actuator positioning control method according to a second embodiment of the present invention includes a moving element and a stator disposed around the moving element, and the stator includes a laminated core and the laminated core. A linear actuator positioning control method comprising a fixed coil and a permanent magnet provided facing the mover, wherein the mover is moved from a reference position to a predetermined position by a positive thrust and stopped. Thereafter, when the mover is returned to the original position, the current pattern supplied to the coil is accelerated by a negative thrust from the stop position according to the moving distance and moving time of the mover. the third current I3 supplying an electric current to the coil for a predetermined time T3, then given free passage without supplying current to the coil for suppressing the acceleration of the mover due to energization of the third current I3 for After energization time the for decelerating the movable member after the lapse of T4 third current and the reverse fourth current I4 to (│I4│ <│I3│) a predetermined time T5, the current supplied to said coil It is characterized by zeroing.

A case will be described in which after moving from the 0 [mm] position to the Xo [mm] position and stopping, the position returns from the stop position Xo [mm] to the 0 [mm] position. Description of the case of moving from the 0 [mm] position to the Xo [mm] position is omitted. Here, a case where the stop position Xo [mm] returns to the 0 [mm] position will be described.
When the current I2 is applied to the coil of the linear actuator and stopped at the position Xo [mm], when the current flowing through the coil is reduced to zero, the linear actuator generates the force -Fr shown in FIG. The child is accelerated by the force in the negative direction and stops vibrationally at the 0 [mm] position.

In order to move the mover at a high speed and stop it while suppressing vibration, it is sufficient to apply a current to the coil with the current pattern shown in FIG.
As in the case where the mover is moved from the 0 [mm] position to the Xo [mm] position, in FIG. 9, a current I3 and a time T3 are a current for accelerating the mover and a time for continuing the acceleration. If the current is reduced to zero in this state, the motor stops with a large vibration, and thus the current I4 in the reverse direction is energized and decelerated. If the current is set to zero while the mover is at a certain speed, the armature reaches the 0 [mm] position without vibration.

Currents I3 and I4 and times T3, T4 and T5 in the current pattern supplied to the coil are determined by the moving distance and the moving time.
FIG. 10 shows the current flowing through the coil and the displacement waveform of the mover when the linear actuator is reciprocated with the current pattern by the linear actuator positioning control method according to the second embodiment.
In the present embodiment, the current I3 is set to 0 [A].

[First Embodiment of Positioning Control Device]
FIG. 11 shows the configuration of the linear actuator positioning control apparatus according to the first embodiment of the present invention.
The linear actuator positioning control device according to the first embodiment of the present invention includes a mover and a stator disposed around the mover, and the stator includes a laminated core and the laminated core. It is a positioning control apparatus of the linear actuator 1 provided with the fixed coil and the permanent magnet provided facing the said needle | mover.

A parameter setting personal computer (PC) 10 for setting parameters such as a current value including a polarity of a current supplied to the coil and an energization time, and the coil of the linear actuator based on the parameter set for the parameter setting And a control device 20 that controls the current to be supplied and moves the mover to a desired position.
The control device 20 includes a current command generation unit 200 that generates a current command based on the set parameters, and a current pattern that is set in the coil of the linear actuator 1 based on the current command generated by the current command generation unit 200. And a power circuit 202 for supplying current. The parameter setting personal computer (PC) 10 corresponds to the parameter setting means of the present invention, and the control device 20 corresponds to the control means of the present invention.

Further, instead of the parameter setting personal computer 10 for setting parameters such as the current value including the polarity of the current supplied to the coil and the energization time, a parameter setting volume 210 provided inside (or outside) the control device 20 is used. Is possible.
When the mover of the linear actuator 1 is moved from the reference position to a predetermined position by positive thrust, the mover is moved by the parameter setting personal computer 10 or the parameter setting volume 210 as shown in FIG. A current pattern to be supplied to the coil according to a distance and a moving time is obtained by energizing the coil with a first current I1 for accelerating the mover in the positive direction from the reference position for a predetermined time T1, and then The second current I2 for determining the stop position of the mover is energized after a predetermined non-energization time T2 when no current is supplied to the coil for suppressing acceleration of the mover due to the energization of the current I1. Set to do.

  Further, when the mover of the linear actuator 1 is moved from a reference position to a predetermined position by a positive thrust and stopped, and then returned to the original position, the parameter setting personal computer 10 or parameter setting As shown in FIG. 9, the current volume supplied to the coil by the volume 210 for the first time is used to accelerate the mover from the stop position with a negative thrust according to the moving distance and moving time of the mover. The current I3 of 3 is supplied to the coil for a predetermined time T3, and then the current is not supplied to the coil for suppressing the acceleration of the mover due to the supply of the first current I1, after a predetermined non-energization time T4 has elapsed. A current that flows through the coil after energizing a fourth current I4 in a direction opposite to the third current for decelerating the mover for a predetermined time T5. It is set to zero.

  In the above configuration, when the activation signal is input from the outside, the control device 20 controls the movement and positioning of the mover according to the set parameters of the linear actuator 1.

[Second Embodiment of Positioning Control Device]
FIG. 12 shows the configuration of a linear actuator positioning control apparatus according to the second embodiment of the present invention. The linear actuator positioning control device according to the present embodiment differs in configuration from the linear actuator positioning control device according to the first embodiment in that the parameter setting personal computer 10 or the parameter setting means of the parameter setting volume 210 is different. Instead of setting parameters of the current pattern supplied to the coil that drives the mover in the current command generation unit 200 in the control device 20, a plurality of types of movement parameters are previously set in the current command generation unit 200A of the control device 20. A storage unit 2000 for storing is provided, and a moving parameter is selected by a selection signal input from the outside. Since the other configuration is the same as that of the linear actuator positioning control device according to the first embodiment, A duplicate description is omitted.

As shown in FIG. 12, several setting values are prepared in the storage unit 2000 in the current command generation unit 200A (movement distance: for 1 [mm], for 2 [mm], for 3 [mm], etc.). By selecting a parameter for movement with a selection signal such as a contact input signal from the outside, a set value is written in the current command generation unit 20A so that it can operate with an optimal current pattern.
A current pattern (FIG. 5) when the mover moves from a reference position, for example, 0 [mm] to a target position X0 [mm], or moves from the reference position to the target position, and then returns to the original position The current pattern when reciprocating (FIG. 9) is the same as that of the first embodiment of the linear actuator positioning control device.

  According to the embodiment of the present invention, when positioning control of the linear actuator is performed in an open loop, the linear actuator can be moved at a high speed and stopped at a target position while suppressing vibration.

The perspective view which shows an example of a structure of a linear actuator. Sectional drawing which shows the operation principle of the linear actuator shown in FIG. The characteristic view which shows the relationship between the displacement of a needle | mover which used the coil current of the linear actuator as a parameter, and thrust. The wave form diagram which shows the coil current at the time of 1 mm movement by the conventional system of a linear actuator, and the displacement of a needle | mover. The wave form diagram which shows an example of the electric current pattern supplied to the coil which drives the needle | mover of the linear actuator which concerns on embodiment of this invention. The wave form diagram which shows the coil current at the time of 1 mm movement when the linear actuator which concerns on embodiment of this invention is driven with the electric current pattern shown in FIG. 5, and the displacement of a needle | mover. The characteristic view which shows the relationship between the displacement and thrust in the case where there is no non-energized section using the coil current as a parameter. The characteristic view which shows the relationship between a displacement and a thrust in case there exists a non-energization area by making a coil current into a parameter. The wave form diagram which shows the electric current pattern in the case of moving a needle | mover reciprocatingly. The wave form diagram which shows the coil electric current and the displacement of a needle | mover when a needle | mover is reciprocated 1 mm. The block diagram which shows the structure of the linear actuator which concerns on 1st Embodiment of this invention. The block diagram which shows the structure of the linear actuator which concerns on 2nd Embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Linear actuator, 10 ... Parameter setting personal computer (PC), 20 ... Control apparatus, 200, 200A ... Current command generation part, 202 ... Power circuit, 210 ... Parameter setting volume, 2000 ... Memory | storage part

Claims (12)

A mover; a stator disposed around the mover; and a spring that supports the mover in a reciprocating manner with respect to the stator, the stator including a laminated core, and the laminated A linear actuator positioning control method comprising a coil fixed to a core and a permanent magnet provided facing the mover,
When the mover is moved from a reference position to a predetermined position by positive thrust, a current pattern supplied to the coil is set to a first current I1 for accelerating the mover in the positive direction from the reference position. supplying an electric current to the coil for a time T1, then the first pre hear Doko current after a predetermined non-energization time T2 is not supplied to the coil for suppressing the acceleration of the mover due to energization current I1 A linear actuator positioning control method, wherein a second current I2 (I2 <I1) for stopping at the predetermined position is applied.   2. The linear actuator according to claim 1, wherein the first current I 1, the second current I 2, and the times T 1 and T 2 in the current pattern are determined according to a moving distance and a moving time of the mover. Positioning control method. A mover and a stator disposed around the mover, the stator including a laminated core, a coil fixed to the laminated core, and a permanent magnet provided facing the mover A linear actuator positioning control method comprising:
When the mover is moved from a reference position to a predetermined position by a positive thrust and stopped, and the mover is returned to the original position, the current pattern supplied to the coil is changed to the stop position. A third current I3 for accelerating with a negative thrust is applied to the coil for a predetermined time T3, and then a current is applied to the coil for suppressing acceleration of the mover due to the application of the third current I3. After energizing for a predetermined time T5 a fourth current I4 (| I4 | <| I3 |) opposite to the third current for decelerating the mover after the elapse of a predetermined non-energization time T4 that is not supplied, A linear actuator positioning control method characterized in that a current flowing through the coil is set to zero.   The linear current according to claim 3, wherein the third current I3, the fourth current I4, and the times T3, T4, and T5 in the current pattern are determined according to a moving distance and a moving time of the mover. Actuator positioning control method. A mover; a stator disposed around the mover; and a spring that supports the mover in a reciprocating manner with respect to the stator, the stator including a laminated core, and the laminated A linear actuator positioning control device comprising a coil fixed to a core and a permanent magnet provided facing the mover,
And parameter setting means for setting parameters between the time current value and the energization including polarity of the current supplied to said coil,
Control means for controlling the current supplied to the coil of the linear actuator based on the parameter set by the parameter setting means to move the mover to a desired position;
When the mover is moved from a reference position to a predetermined position by a positive thrust, the parameter setting means causes a current pattern supplied to the coil to accelerate the mover from the reference position in the positive direction. The first current I1 is applied to the coil for a predetermined time T1, and then a predetermined non-energization time T2 is elapsed in which no current is supplied to the coil for suppressing acceleration of the mover due to the application of the first current I1. A linear actuator positioning control device, which is set to energize a second current I2 (I2 <I1) for stopping the mover at the predetermined position later.   6. The linear actuator according to claim 5, wherein the first current I1, the second current I2, and the times T1 and T2 in the current pattern are set according to a moving distance and a moving time of the mover. Positioning control device. A mover and a stator disposed around the mover, the stator including a laminated core, a coil fixed to the laminated core, and a permanent magnet provided facing the mover A linear actuator positioning control device comprising:
And parameter setting means for setting parameters between the time current value and the energization including polarity of the current supplied to said coil,
Control means for controlling the current supplied to the coil of the linear actuator based on the parameter set by the parameter setting means to move the mover to a desired position;
When the mover is moved from a reference position to a predetermined position by a positive thrust and stopped, and then the mover is returned to the original position, the current pattern supplied to the coil by the parameter setting means is A third current I3 for accelerating the mover from the stop position by negative thrust is applied to the coil for a predetermined time T3, and then the acceleration of the mover due to the application of the third current I3 is suppressed. The fourth current I4 (| I4 | <| I3 |) in the direction opposite to the third current for decelerating the mover after the elapse of a predetermined non-energization time T4 when no current is supplied to the coil for a predetermined time A linear actuator positioning control apparatus, wherein the current flowing through the coil is set to zero after energization for T5.   The linear current according to claim 7, wherein the third current I3, the fourth current I4, and the times T3, T4, and T5 in the current pattern are determined according to a moving distance and a moving time of the mover. Actuator positioning control device. A mover; a stator disposed around the mover; and a spring that supports the mover in a reciprocating manner with respect to the stator, the stator including a laminated core, and the laminated A linear actuator positioning control device comprising a coil fixed to a core and a permanent magnet provided facing the mover,
Advance parameters between the time current value and the energization including polarity of the current supplied to the coil, a storage unit operable to plural kinds stored,
Control means for controlling the current supplied to the coil of the linear actuator based on a parameter selected by an external input among the parameters stored in the storage means, and moving the mover to a desired position. ,
When the control unit moves the mover from a reference position to a predetermined position by positive thrust, the parameter setting means causes the current pattern to be supplied to the coil to be moved in the positive direction from the reference position. A first current I1 for accelerating the coil is energized to the coil for a predetermined time T1, and then no current is supplied to the coil for suppressing acceleration of the mover due to the energization of the first current I1. A linear actuator positioning control apparatus, wherein a second current I2 (I2 <I1) for stopping the movable element at the predetermined position is energized after a lapse of a non-energization time T2.   The linear actuator according to claim 9, wherein the first current I1, the second current I2, and the times T1 and T2 in the current pattern are set according to a moving distance and a moving time of the mover. Positioning control device.   The control means moves the movable element from a reference position to a predetermined position by a positive thrust, stops the movable element and then returns the movable element to the original position, and then supplies the movable element to the coil by the parameter setting means. The coil is energized with a third current I3 for accelerating the mover with a negative thrust from the stop position for a predetermined time T3, and then the current of the mover is energized with the third current I3. A fourth current I4 (| I4 | <| I3 in a direction opposite to the third current for decelerating the mover after a predetermined non-energization time T4 when no current is supplied to the coil for suppressing acceleration. 10. The linear actuator positioning control device according to claim 9, wherein a current flowing through the coil is set to zero after energizing |) for a predetermined time T5.   The linear current according to claim 11, wherein the third current I3, the fourth current I4, and the times T3, T4, and T5 in the current pattern are determined according to a moving distance and a moving time of the mover. Actuator positioning control device.

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