JP2006154861A - Active matrix type liquid crystal display device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a new structure concerned with auxiliary capacity of a pixel. <P>SOLUTION: The structure has a substrate with an insulating surface, a crystalline silicon film formed on the substrate with the insulating surface, a gate insulating film formed on the crystalline silicon film, a gate electrode formed on the gate insulating film, a drain electrode formed on the gate electrode across an inter-layer insulating film, a dielectric formed on the drain electrode, and a conductive film formed on the dielectric, the drain electrode being formed covering ≥50% of the area of the crystalline silicon film to form a capacitor, including the conductive film and drain electrode as electrodes, with the dielectric. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The invention disclosed in this specification relates to a circuit configuration / arrangement of a pixel region of an active matrix display device using a thin film transistor and having a source line on a gate line. In particular, it relates to the configuration of the auxiliary capacity.

Recently, a technique for manufacturing a thin film transistor (TFT) on an inexpensive glass substrate has been rapidly developed. The reason is that the demand for active matrix liquid crystal display devices has increased.
In an active matrix liquid crystal display device, a thin film transistor is disposed in each of several tens to several millions of pixels arranged in a matrix, and charges entering and exiting each pixel electrode are controlled by a switching function of the thin film transistor. .

  Liquid crystal is sandwiched between each pixel electrode and the counter electrode to form a kind of capacitor. Therefore, by controlling the flow of electric charges into and out of the capacitor with the thin film transistor, the electro-optical characteristics of the liquid crystal can be changed, and the light transmitted through the liquid crystal panel can be controlled to display an image.

In addition, since the holding voltage of the capacitor having such a configuration gradually decreases due to current leakage, the electro-optical characteristics of the liquid crystal change and the contrast of image display is deteriorated.
Therefore, it is common to install another capacitor called an auxiliary capacitor in series with a capacitor composed of liquid crystal, and supply charges lost due to leakage or the like to the capacitor composed of liquid crystal.

  A circuit diagram of a conventional active matrix liquid crystal display device is shown in FIG. An active matrix display circuit is roughly divided into three parts. That is, a gate driver circuit 2 for driving a gate line (gate wiring, scan wiring, scanning wiring) 4, a data driver circuit 1 for driving a source line (data wiring, source wiring, signal wiring) 5, and a pixel An active matrix circuit 3 is provided. Of these, the data driver circuit 1 and the gate driver circuit 2 are collectively referred to as peripheral circuits.

  The active matrix circuit 3 is provided so that a large number of gate lines 4 and source lines 5 cross each other, and a pixel electrode 7 is provided at each intersection. In addition, a switching element (thin film transistor) 6 is provided for controlling the charge flowing into and out of the pixel electrode. As the thin film transistor, a top gate type (having a gate electrode on the active layer) and a bottom gate type (having an active layer on the gate electrode) are selectively used depending on the required circuit structure, manufacturing process, characteristics, etc. It is done. Further, as described above, the auxiliary capacitor 8 is provided in parallel with the pixel capacitor for the purpose of suppressing the fluctuation of the pixel voltage due to the leakage current. (Figure 1)

  On the other hand, since the conductivity of a thin film transistor is changed by light irradiation, it is necessary to overlap a thin film with a light-shielding film (black matrix) in order to prevent this. In addition, the above light-shielding film is also formed between the pixels in order to prevent display defects due to mixing of colors and brightness between the pixels and disturbance of the electric field at the boundary between the pixels.

  For this reason, this light-shielding film has a matrix shape and is called a black matrix (BM). The BM is initially provided on a substrate (opposite substrate) facing the substrate on which the active matrix circuit is provided because of advantages in the manufacturing process. However, the BM is active because it is necessary to increase the area of the pixel (increase the aperture ratio). Proposing on a substrate provided with a matrix circuit has been proposed.

  Various configurations of the auxiliary capacitance have been proposed, but it has been difficult to obtain a large capacitance while maintaining the opening portion (light transmission portion) of the pixel. The present invention has been made in view of such a current situation.

One of the inventions disclosed in this specification is:
A thin film transistor to which a source region to which a pixel electrode is connected is connected;
A drain electrode formed on the same layer as a source line connected to the drain of the thin film transistor;
Have
The drain electrode has a pattern covering an area of 50% or more of the active layer constituting the thin film transistor,
A storage capacitor is formed using the drain electrode.

  In the above structure, since the auxiliary capacitor is formed over the thin film transistor, the aperture ratio of the pixel can be increased.

  In another invention disclosed in this specification, when the light shielding film is formed on the substrate on the active matrix side, the light shielding film is made conductive and is held at a constant potential, which is an electrode of the auxiliary capacitor. By using as above, the above-mentioned problems can be solved. In the first place, since the light-shielding film does not transmit light, the aperture ratio is not lowered by using the light-shielding film for the electrode of the auxiliary capacitor.

The active matrix display device of the present invention is
(1) Thin film transistor,
(2) a gate line and a source line formed thereon,
(3) a conductive film that functions as a light-shielding film and is maintained at a constant potential;
(4) Connect to the drain of the thin film transistor, and have a metal wiring in the same layer as the source line. (5) Between the conductive film and the source line, and have an interlayer insulator composed of at least two insulating layers.

  In the present invention, the top gate and the bottom gate can be used as the thin film transistor as long as the above conditions are satisfied. Because the main improvement of the present invention relates to the structure above the source line, there is no problem with the structure below the source line (that is, the positional relationship between the gate line and the active layer). is there. Further, the layer structure of the interlayer insulator may be three or more layers.

  According to one aspect of the present invention, in the above structure, the metal wiring and the conductive film (light-shielding film) are used as the electrodes in the etched portion of the upper insulating layer of the interlayer insulating material, and at least the interlayer insulating material. An auxiliary capacitor having a lower insulator layer as a dielectric is formed. The dielectric may be composed of two or more insulating layers.

  In another structure of the present invention, in the above structure, in the interlayer insulator, the conductive film (light-shielding film) has a portion in contact with the insulating layer under the interlayer insulator in a portion overlapping the metal wiring. It is characterized by.

  In the first and second aspects of the invention described above, it is effective to use silicon nitride as a main component, which can stably produce a lower layer of an interlayer insulator by a semiconductor process and has a high relative dielectric constant. In that case, the dielectric of the auxiliary capacitor may be a silicon nitride layer alone or may have a multilayer structure with another film (for example, silicon oxide).

  In this case, a larger capacitance can be obtained by using silicon nitride having a thin dielectric and a high dielectric constant. In the present invention, the thickness of the silicon nitride layer is 1000 mm or less, preferably 500 mm or less.

  Further, in such a structure, the silicon nitride film covers the active matrix circuit from the source line, and the barrier functions such as moisture resistance and ion resistance of silicon nitride can be effectively used.

  In the above invention, it is also effective to form the upper layer of the interlayer insulator using an organic resin that is easily flattened (for example, polyimide, polyamide, polyimide amide, epoxy, acrylic, etc.). Since the barrier function such as moisture resistance and ion resistance is weak, it is desired that the lower layer is made of a material having a high barrier function such as silicon nitride, aluminum oxide, aluminum nitride.

  Furthermore, in the above invention, it is effective to provide the metal wiring in a portion where the disclination (dislocation of liquid crystal molecules due to the influence of unevenness or a lateral electric field) is easily generated in the pixel for the following reason. Disclinations caused by dust and the like can be dealt with by cleaning the manufacturing process, but they are fundamental for device structure irregularities (for example, irregularities in the vicinity of pixel electrode contacts) and lateral electric fields. Treatment is impossible. A part where disclination occurs is inappropriate for use as a pixel, and conventionally, such a part has been covered with a light-shielding film and has been treated so as not to function as a pixel. An auxiliary capacity can be provided in the portion, and the area can be used effectively.

  As described above, a method has been proposed in which a conductive film used as a black matrix is used as an electrode, and an auxiliary capacitor is formed between the electrode and the metal wiring in the same layer as the source line.

  In this configuration, since the upper part of the TFT is used as a capacitor, the aperture ratio of the pixel can be increased.

  In the embodiment, an example using a top gate type thin film transistor is shown. However, since the present invention is an improvement related to a structure above the source line, it can be clearly understood that a bottom gate type thin film transistor can be similarly implemented. Thus, the present invention is industrially beneficial.

  A manufacturing process cross-sectional view of this example is shown in FIG. 3, and a manufacturing process top view is shown in FIG. The numbers in FIGS. 2 and 3 correspond. The film thickness and other numerical values in the following examples are merely examples, and are not necessarily optimal. Furthermore, the person who implements the present invention may change anything as necessary.

First, an amorphous silicon film is formed on the glass substrate 11 to a thickness of 500 mm by plasma CVD or low pressure thermal CVD. On the glass substrate, a silicon oxide film is preferably formed as a base film to a thickness of 3000 mm by sputtering or plasma CVD, but it is not necessary to provide a base film as long as it is on a quartz glass substrate. .
Next, the amorphous silicon film is turned into a crystalline silicon film by a known annealing technique such as heating or laser light irradiation, and this is etched to obtain the active layer 12 of the thin film transistor.

  Next, a silicon oxide film 13 is formed as a gate insulating film to a thickness of 1000 mm by plasma CVD, low pressure thermal CVD, or sputtering. Then, a polycrystalline silicon film containing phosphorus is formed to a thickness of 5000 mm by a low pressure CVD method, and this is etched to obtain a gate line (gate electrode) 14. (Fig. 3 (A))

Next, phosphorus ¹⁵ which is an impurity imparting N-type is implanted at a dose of 5 × 10 ^{14 to} 5 × 10 ¹⁵ atoms / cm ³ , thereby forming the source 15 and the drain 16. Both are N-type. After the impurity ions are implanted, the region where the impurity ions are implanted is activated by heat treatment, laser light irradiation, or strong light irradiation.

  Next, a silicon oxide interlayer insulator 17 having a thickness of 5000 mm is formed by a known insulator layer forming technique, the interlayer insulator 17 and the gate insulating film 13 are etched, and contact holes reaching the source 15 and the drain 16 are formed. Open the hole. Then, the source line 18 and the metal wiring (auxiliary capacitance electrode) 19 are formed by a known metal wiring forming technique. (Fig. 3 (B))

  FIG. 2A shows a state where the circuit obtained through the steps up to here is viewed from above. The numbers correspond to those in FIG. (Fig. 2 (A))

Next, the silicon nitride film 20 is formed by a plasma CVD method using silane and ammonia, or silane and N ₂ O, or silane, ammonia and N ₂ O. The silicon nitride film 20 is formed to a thickness of 250 to 1000 mm, here 500 mm. The method for forming the silicon nitride film may be a method using dichlorosilane and ammonia. Further, a low pressure thermal CVD method or a photo CVD method may be used, or another method may be used.

  Subsequently, the polyimide layer 21 is formed into a thickness of at least 8000 mm, preferably 1.5 μm, by spin coating. The surface of the polyimide layer is formed flat. Thus, an interlayer insulator composed of the silicon nitride layer 20 and the polyimide layer 21 is formed. Then, the polyimide layer 21 is etched to form the opening 22 for the auxiliary capacitor. (Figure 3 (C))

Note that silicon nitride may be etched depending on the etchant used when the polyimide layer 21 is etched. Therefore, in order to protect the silicon nitride, a silicon oxide film having a thickness of 50 to 500 mm, for example, 200 mm is formed of silicon nitride. You may provide between a layer and a polyimide layer.
Further, a titanium film having a thickness of 1000 mm is formed by a sputtering method. Of course, a metal film such as a chromium film or an aluminum film may be used, or another film forming method may be used. And this is etched and the black matrix 23 is formed. The black matrix 23 is formed so as to cover the previously formed auxiliary capacity hole. (Fig. 3 (D))

  FIG. 2B shows a state in which the auxiliary capacity holes 22 and the black matrix 23 obtained by the steps so far are viewed from above. The numbers correspond to those in FIG. An auxiliary capacitor is formed in the overlapping portion of the auxiliary capacitor hole 22 and the black matrix 23. Further, a contact hole for the pixel electrode is formed later in a region 31 where the metal wiring 19 and the black matrix 23 do not overlap. (Fig. 2 (B))

  Further, a polyimide film 24 having a thickness of 5000 mm is formed as an interlayer insulator, and the polyimide films 21 and 24 in the region 31 and the silicon nitride layer 20 are etched to form a contact hole reaching the metal wiring 19. Further, an ITO (indium tin oxide) film having a thickness of 1000 mm is formed by sputtering, and this is etched to form the pixel electrode 25. (Figure 3 (E))

  Thus, the active matrix circuit is completed. When the insulating layer is formed of a polyimide film as in this embodiment, planarization is easy and the effect is great. In this embodiment, the auxiliary capacitance is obtained in the portion 22 where the black matrix 23 and the drain 16 overlap, and the dielectric is the silicon nitride layer 17.

  A top view of the manufacturing process of this example is shown in FIG. The manufacturing process itself of this example is almost the same as that of Example 1, and the numbers correspond to those of Example 1. The present embodiment is different from the first embodiment in the circuit arrangement, and shows a method of effectively forming pixels (increasing a substantial aperture ratio) by providing an auxiliary capacitor in a portion where disclination is likely to occur. .

  First, the occurrence of disclination will be described with reference to FIG. FIG. 5 shows the same circuit arrangement as that of the pixel manufactured in Example 1. As shown in FIG. 5, a pixel electrode contact 31 is provided on the upper right side of the pixel, rubbing is performed from the upper right side to the lower left side (note that it is different from the lower left side to the upper right side), and source line inversion driving is performed. In a display device that performs (including a driving method in which signals applied between adjacent source lines have opposite polarities and dot inversion driving), disclination is likely to occur in the upper right portion 30 of the pixel. Since this portion is unsuitable for display, it is desirable to cover it with BM. (Fig. 5)

Therefore, as shown in FIG. 4A, the metal wiring 19 is not provided on the pixel as in the first embodiment, but on the right side of the pixel. (Fig. 4 (A))
Further, an opening 22 is formed on the metal wiring 19, and a BM 23 is provided thereon. As shown in FIG. 4B, the pixel electrode contact is also effectively provided in the lower right region 31. (Fig. 4 (B))

  Thus, an auxiliary capacity is formed in a portion where disclination is likely to occur. In this embodiment, the auxiliary capacitor provided on the upper side of the pixel in the circuit of the first embodiment is moved to the left, and the area of the opening in the circuit design is the same. However, a substantially larger opening area can be obtained by overlapping the disclination and the auxiliary capacity (or BM).

  A top view of the manufacturing process of this example is shown in FIG. The manufacturing process itself of this example is almost the same as that of Example 1, and the numbers correspond to those of Example 1. In the present embodiment, the arrangement of the auxiliary capacitors is substantially the same as that of the second embodiment, but more effective use of the area is achieved by changing the arrangement of the active layer of the thin film transistor.

  In this embodiment, the rubbing direction is from the lower left to the upper right. In this case, disclination is likely to occur in the lower left portion of the pixel. In the second embodiment, it is shown that the auxiliary capacitor is provided in the portion where such disclination is likely to occur. However, in this embodiment, a part of the active layer of the thin film transistor in the next row is also provided in this portion. That is, as shown in FIG. 6A, the metal wiring 19 is disposed on the left side of the pixel, and at the same time, the gate line branches are removed to form a straight line, and the active layer is disposed across the active layer. . (Fig. 6 (A))

Further, an opening 22 is formed on the metal wiring 19, and a BM 23 is provided thereon. (Fig. 6 (B))
Thus, an auxiliary capacitor and a part of the thin film transistor are formed in a portion where disclination is likely to occur. In this embodiment, the area of the circuit of the second embodiment can be used efficiently because the gate line branches are unnecessary.

  A top view of a manufacturing process of this example is shown in FIG. 8, and a main portion and a circuit diagram of the thin film transistor of this example are shown in FIG. The manufacturing process itself of this example is almost the same as that of Example 1, and the numbers correspond to those of Example 1. The numbers in FIGS. 7 and 8 also correspond to each other. In this embodiment, the arrangement of the auxiliary capacitors is substantially the same as that of the second embodiment. However, by changing the arrangement of the active layer and the gate electrode of the thin film transistor, the characteristics of the thin film transistor can be improved and the area can be effectively used. It is a thing.

  In the present embodiment as well, the rubbing is performed from the lower left to the upper right as in the third embodiment, so that disclination is likely to occur in the lower left portion of the pixel. In Example 2, it is shown that an auxiliary capacitor is provided in such a portion, and in Example 3, an auxiliary capacitor and a part of an active layer of a single gate (single gate) thin film transistor are provided. However, in this embodiment, an active layer and a gate electrode of a triple gate thin film transistor are also provided in this portion.

  First, the outline of the triple gate thin film transistor of this embodiment will be described with reference to FIG. This thin film transistor has a structure in which a branch portion 29 is provided on the gate line 14 and the active layer 12 overlaps the gate line and its branch portion as shown in the figure. Each of the intersecting portions 26 to 28 becomes a transistor (FIG. 7A).

That is, as shown in FIG. 7B, a structure in which three thin film transistors are connected in series between the source line 18 and the metal wiring 19 is obtained. (Fig. 7 (B))
It is known that such a multi-transistor is particularly effective when used as an active matrix switching transistor (Japanese Patent Publication No. 5-44195).

  The thin film transistor having such a structure occupies the lower left portion of the pixel in the next row, but this portion is an area where disclination is likely to occur. Therefore, as in the second and third embodiments, this reduces the aperture ratio. Will not bring. That is, as shown in FIG. 8A, a branch portion 29 is provided on the gate line 14, and the active layer 12 is arranged so as to intersect the gate line 14 and the branch portion 29 three times. Further, the metal wiring 19 is arranged on the left side of the pixel as shown in the figure. (Fig. 8 (A))

Further, an opening 22 is formed on the metal wiring 19, and a BM 23 is provided thereon. (Fig. 8 (B))
Thus, an auxiliary capacitor and a part of the thin film transistor are formed in a portion where disclination is likely to occur. This embodiment is disadvantageous than that of the third embodiment in that a gate line branch is required as in the circuit of the second embodiment. However, by using a triple gate thin film transistor, the auxiliary capacitance is much smaller. May be. Therefore, overall, the characteristics of this example are superior to those of Example 3.

  A manufacturing process cross-sectional view of this example is shown in FIG. 11, and a manufacturing process top view is shown in FIG. The numbers in FIG. 9 and FIG. 11 correspond to each other and indicate the same as those indicated in other embodiments. In this embodiment, the arrangement of auxiliary capacitors is changed in the pixel circuit having the stacked structure shown in the first embodiment.

  In the same manner as in Example 1, an amorphous silicon film is formed to a thickness of 500 mm on a glass substrate 11 on which an appropriate base film is formed by a plasma CVD method or a low pressure thermal CVD method. The amorphous silicon film is converted into a crystalline silicon film by a technique, and this is etched to obtain the active layer 12 of the thin film transistor.

  Next, a silicon oxide film 13 is formed to a thickness of 1000 mm as a gate insulating film. Then, a polycrystalline silicon film containing phosphorus is formed to a thickness of 5000 mm by a low pressure CVD method, and this is etched to obtain a gate line (gate electrode) 14. (Fig. 11 (A))

Next, phosphorus ¹⁵ which is an impurity imparting N-type is implanted at a dose of 5 × 10 ^{14 to} 5 × 10 ¹⁵ atoms / cm ³ , thereby forming the source 15 and the drain 16. After the impurity ions are implanted, annealing is performed.

  Next, a silicon oxide interlayer insulator 17 having a thickness of 2 μm is formed by a known insulator layer forming technique. The insulator surface is planarized by a known planarization technique (for example, a chemical mechanical polishing (CMP) method). Thereafter, the interlayer insulator 17 and the gate insulating film 13 are etched to form contact holes reaching the source 15 and the drain 16. Then, the source line 18 and the metal wiring (auxiliary capacitance electrode) 19 are formed by a known metal wiring forming technique. At this time, the metal wiring 19 covers the gate line. (Fig. 11 (B))

  FIG. 9A shows a state where the circuit obtained through the steps up to here is viewed from above. What is characteristic in this embodiment is that the metal wiring 19 serving as an electrode of the auxiliary capacitor covers a part of the gate line 14. Both the gate line 14 and the metal wiring 19 are light-shielding, which causes a reduction in the area of the pixel. In the case of the first embodiment, since these are arranged so as not to overlap, the area of a portion that can be used as a pixel is reduced accordingly. In the present embodiment, the gate line 14 can also be used for a larger area by overlapping the metal wiring 19. (Fig. 9 (A))

  As shown in FIG. 9, when the gate line for driving the pixel electrode and the metal wiring 19 connected to the pixel electrode are arranged to overlap, the capacitive coupling between the gate line 14 and the metal wiring 19 is reduced. It is preferable to do. In this embodiment, the above-described problem is solved by sufficiently increasing the thickness of the interlayer insulator. However, as shown in FIG. 10, a metal wiring 19 may be overlapped on the gate line of the next row. (Fig. 10)

  Next, a silicon nitride film 20 is formed to a thickness of 250 to 1000 mm, here 500 mm. Further, a silicon oxide film (not shown) having a thickness of 200 mm is deposited. Subsequently, the polyimide layer 21 is formed into a thickness of at least 8000 mm, preferably 1.5 μm, by spin coating. The surface of the polyimide layer is formed flat. Thus, an interlayer insulator composed of the silicon nitride layer 20 and the polyimide layer 21 is formed. Then, the polyimide layer 21 is etched to form the opening 22 for the auxiliary capacitor. (Fig. 11 (C))

  Further, a titanium film having a thickness of 1000 mm is formed by sputtering, and this is etched to form the black matrix 23. The black matrix 23 is formed so as to cover the auxiliary capacity hole 22 previously formed.

  FIG. 9B shows a state in which the auxiliary capacity holes 22 and the black matrix 23 obtained in the steps so far are viewed from above. An auxiliary capacitor is formed in the overlapping portion of the auxiliary capacitor hole 22 and the black matrix 23. In order to increase the area of the opening, the auxiliary capacitor hole 22 is preferably formed so as to overlap the gate line 14. Further, in order to form a contact hole for the pixel electrode, a region 31 where the metal wiring 19 and the black matrix 23 do not overlap is also provided. (Fig. 9 (B))

  Further, a polyimide film 24 having a thickness of 5000 mm is formed as an interlayer insulator, and the polyimide films 21 and 24 in the region 31 and the silicon nitride layer 20 are etched to form a contact hole reaching the metal wiring 19. Further, an ITO (indium tin oxide) film having a thickness of 1000 mm is formed by sputtering, and this is etched to form the pixel electrode 25. (Fig. 11 (D))

  Thus, the active matrix circuit is completed. Although this embodiment relates to a single gate TFT, it can be similarly applied to a multi-gate TFT as shown in Embodiment 4 and the same effect can be obtained.

  A present Example is shown using FIGS. FIG. 12 shows active layers 105, 106, 107, and 108 formed in the lowermost layer. This active layer is formed on a glass substrate, a quartz substrate, or other insulating surface.

  A gate insulating film (not shown) is formed on the active layer. Gate lines 101 and 102 are formed on the gate insulating film.

  Here, the active layer portion where the gate line intersects the active layer becomes the channel formation region.

  An interlayer insulating film (not shown) is formed on the gate electrode, and source lines 103 and 104 are formed thereon.

  The source line 104 is connected to a source region formed in the active layer 106 through a contact 109, for example.

  In addition, drain electrodes 109, 110, 111, and 112 are formed using source lines and materials (obtained by patterning the same film).

  This drain electrode is used to form a capacitor. It is also used as a part of the BM.

  An extended portion of the drain wiring 110 indicated by 113 is a pattern for obtaining a capacitance value.

    The drain electrode has a structure that covers an area of more than half of the active layer. With such a structure, a predetermined auxiliary capacitance value can be earned without greatly reducing the aperture ratio.

  FIG. 13 shows a state in which, in addition to the state shown in FIG. 12, a silicon nitride film (not shown) is formed, and capacitance lines 113 and 114 are formed thereon.

  This silicon nitride film (not shown) functions as a storage capacitor dielectric.

  FIG. 14 shows that an interlayer insulating film is further formed on the capacitor lines 113 and 114 shown in FIG. 13, and the pixel electrodes 115, 116, 117, 118, 119, 120, 121, with ITO are formed thereon. In this state, 122 and 123 are formed.

  In the structure shown in this embodiment, since the auxiliary capacitance is formed so as to cover the TFT, the aperture ratio of the pixel can be made as high as possible.

  In addition, by using a drain electrode formed between the drain region and the pixel electrode (this electrode is formed at the same time as the source wiring), a capacitance is formed between the capacitor line and the capacitor. Capacity can be obtained. That is, when such a configuration is adopted, the thickness of the dielectric film (in this case, the silicon nitride film) that constitutes the auxiliary capacitance can be reduced, so that the capacitance can be increased.

A circuit diagram of a general active matrix circuit is shown. 8A to 8D are top views of manufacturing steps of the active matrix circuit of Example 1. FIG. FIGS. 3A and 3B are cross-sectional views illustrating a manufacturing process of an active matrix circuit of Example 1. FIGS. FIG. 10 is a top view of a manufacturing process of an active matrix circuit of Example 2. The figure explaining disclination. 8A to 8D are top views of manufacturing steps of an active matrix circuit of Example 3. The outline | summary and circuit diagram of the thin-film transistor of Example 4 are shown. FIGS. 9A to 9C are top views of manufacturing steps of an active matrix circuit of Example 4. FIGS. FIG. 10 is a top view of manufacturing steps of an active matrix circuit of Example 5. FIG. 10 is a top view of an active matrix circuit related to the fifth embodiment. Sectional drawing of the manufacturing process of the active matrix circuit of Example 5 is shown. FIG. 10 is a top view illustrating a configuration of Example 6. FIG. 10 is a top view illustrating a configuration of Example 6. FIG. 10 is a top view illustrating a configuration of Example 6.

Explanation of symbols

1 Data Driver Circuit 2 Gate Driver Circuit 3 Active Matrix Circuit Area 4 Gate Line 5 Source Line 6 Thin Film Transistor (TFT)
7 Pixel electrode 8 Auxiliary capacitance 11 Glass substrate 12 Active layer 13 Silicon oxide film (gate insulating film)
14 Gate line (Gate electrode)
15 Source 16 Drain 17 Silicon oxide (interlayer insulator)
18 Source line 19 Metal wiring (auxiliary capacitance electrode)
20 Silicon nitride layer 21, 24 Polyimide layer 22 Opening part (auxiliary capacity)
23 Shading film (black matrix)
25 Pixel electrodes 26, 27, 28 Thin film transistors 29 Gate line branches 30 Disclination-prone portions 31 Contact hole-forming portions

Claims (7)

A substrate having an insulating surface;
A crystalline silicon film formed on the substrate having the insulating surface;
A gate insulating film formed on the crystalline silicon film;
A gate electrode formed on the gate insulating film;
A drain electrode formed on the gate electrode through an interlayer insulating film;
A dielectric formed on the drain electrode;
Having a conductive coating formed on the dielectric;
The drain electrode is formed so as to cover an area of 50% or more of the crystalline silicon film,
An active matrix liquid crystal display device, wherein the conductive film and the drain electrode are used as electrodes, and a capacitor is formed with the dielectric. A substrate having an insulating surface;
A crystalline silicon film formed on the substrate having the insulating surface;
A gate insulating film formed on the crystalline silicon film;
A gate electrode formed on the gate insulating film;
A drain electrode formed on the gate electrode through a first interlayer insulating film;
A dielectric formed on the drain electrode;
A conductive coating formed on the dielectric;
A pixel electrode formed on the conductive film via a second interlayer insulating film,
The drain electrode is formed so as to cover an area of 50% or more of the crystalline silicon film,
An active matrix liquid crystal display device, wherein the conductive film and the drain electrode are used as electrodes, and a capacitor is formed with the dielectric. In claim 2,
An active matrix liquid crystal display device, wherein the second interlayer insulating film is formed flat. In any one of Claims 1 thru | or 3,
The active matrix liquid crystal display device, wherein the dielectric has a multilayer structure of a silicon nitride film and a silicon oxide film. In any one of Claims 1 thru | or 3,
The active matrix liquid crystal display device, wherein the dielectric includes a silicon nitride film. In any one of Claims 1 thru | or 5,
An active matrix liquid crystal display device, wherein the substrate having an insulating surface is a glass substrate or a quartz substrate. In any one of Claims 1 thru | or 6,
An active matrix liquid crystal display device, wherein the conductive film is a capacitance line.

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