JP2006148736A - Noise filter - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a noise filter which improves the yield, without decreasing the electrostatic capacity. <P>SOLUTION: The noise filter is provided with an internal conductor 12 set on the upper face of a first insulating layer 11, a plurality of second insulating layers 13 set below the first insulating layer 11, and a first metal layer 14 and a second metal layer 15 set so as not to be electrically connected to each same face of the plural second insulating layers 13. The first metal layer 14 is electrically connected to the second metal layer 15; and the first metal layer 14 and the second metal layer 15 set in the second insulating layers 13 adjoining in the vertical directions are made to mutually face via the insulating layers 13. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a noise filter widely used in electronic devices such as small digital devices, OA devices, and portable terminals.

  As shown in FIG. 9, a conventional noise filter of this type includes a coil conductor 2 formed on a first insulating layer 1 made of a ceramic material and a plurality of coils formed on a second insulating layer 3 made of a ceramic material. Thus, the conventional noise filter is opposed to the inductor conductor composed of a plurality of coil conductors 2. The capacitor portion is composed of a plurality of metal layers 4. And the electrostatic capacitance was increased by enlarging the area of the metal layer 4.

As prior art document information relating to the invention of this application, for example, Patent Document 1 is known.
Japanese Utility Model Publication No. 60-17895

  In the conventional noise filter described above, the area of the metal layer 4 is increased in order to increase the capacitance. When the area of the metal layer 4 is increased in this way, the ceramic material constituting the metal and the insulating layer Since the thermal contraction rate differs between the first and second layers, stress may be generated at the interface between the metal layer 4 and the second insulating layer 3 at the time of firing, and cracks and peeling may occur, thereby reducing the yield of the noise filter. It had the problem that.

  The present invention solves the above-described conventional problems, and an object of the present invention is to provide a noise filter capable of improving the yield without reducing the capacitance.

  In order to achieve the above object, the present invention has the following configuration.

  The invention according to claim 1 of the present invention includes an internal conductor provided on the upper surface of the first insulating layer, and a plurality of second insulating layers provided above or below the first insulating layer, A first metal layer and a second metal layer provided so as not to be electrically connected to each other on the same surface of each of the plurality of second insulating layers, wherein the first metal layer is the inner conductor. And the first metal layer and the second metal layer provided in the second insulating layer adjacent in the vertical direction are opposed to each other through the second insulating layer. According to this configuration, the metal layer formed on the same surface of the second insulating layer is divided into the first metal layer and the second metal layer. The area of the metal layer formed on the two insulating layers can be reduced, whereby the first and second insulating layers Even if it is made of a ceramic material, the stress at the interface between the first and second metal layers and the first and second insulating layers during firing can be reduced, thus preventing the occurrence of cracks and peeling. Thus, the yield can be improved.

  Further, the capacitance in the capacitor portion formed by the inner conductor, the first metal layer, and the second metal layer is such that the inner conductor, the first metal layer, and the second metal layer facing each other in the vertical direction. In addition to the gap between the first metal layer and the second metal layer that are formed on the same surface of the second insulating layer and face each other in the lateral direction, the capacitance is reduced. It has the effect that there is no.

  The invention according to claim 2 of the present invention is particularly the one in which the inner conductor is formed in a spiral shape. According to this configuration, the inductance of the inner conductor can be increased, so that noise can be removed in a high frequency band. It has the effect of being able to.

  In the invention according to claim 3 of the present invention, in particular, the first metal layer and the second metal layer provided on the same surface of the second insulating layer are respectively formed with recesses and protrusions, and The concave portion and the other convex portion are made to face each other. According to this configuration, the distance between the first metal layer and the second metal layer on the same surface of the second insulating layer is long. Therefore, it is possible to increase the facing area between the first metal layer and the second metal layer, thereby increasing the capacitance between them.

  In the invention according to claim 4 of the present invention, a plurality of first metal layers and a plurality of second metal layers are provided on the upper surface of the second insulating layer, respectively. Since the number of the first metal layer and the second metal layer facing each other on the same surface of the insulating layer can be increased, the facing area between the first metal layer and the second metal layer can be increased. Thereby, it has the effect that the electrostatic capacitance between these can be increased.

  According to the fifth aspect of the present invention, in particular, one end portion of the inner conductor is electrically connected to a part of all the first metal layers and a part of all the second metal layers. And the other end of the inner conductor is electrically connected to the remaining first metal layer and the second metal layer. According to this configuration, the first metal forming the capacitor portion Since both the layer and the second metal layer can be connected to the inner conductor serving as the inductor conductor, an effect of forming an LC parallel type noise filter in which the inductor conductor and the capacitor portion are connected in parallel can be formed. It is what has.

  The invention according to claim 6 of the present invention includes an internal conductor provided on the upper surface of the first insulating layer, a plurality of second insulating layers provided above or below the first insulating layer, A plurality of first metal layers provided so as not to be electrically connected to the same surface of a part of the second insulating layers among the plurality of second insulating layers, and the plurality of second insulating layers A plurality of second metal layers provided so as not to be electrically connected to each other on the same surface of the other second insulating layer, and electrically connecting the first metal layer to the internal conductor In addition, the plurality of first metal layers and the plurality of second metal layers provided in the second insulating layer adjacent in the vertical direction are opposed to each other through the second insulating layer. Therefore, according to this configuration, a plurality of first metal layers can be connected to both end portions of the inner conductor. If a plurality of second metal layers are connected to the ground, a π-type noise filter in which a capacitor portion made of the first metal layer and the second metal layer is connected to both ends of the inductor conductor made of the internal conductor It has the effect that can be formed.

  As described above, the noise filter of the present invention includes an internal conductor provided on the upper surface of the first insulating layer, a plurality of second insulating layers provided above or below the first insulating layer, A first metal layer and a second metal layer provided so as not to be electrically connected to each other on the same surface of each of the plurality of second insulating layers, and the first metal layer and the inner conductor The first metal layer and the second metal layer provided in the second insulating layer adjacent in the vertical direction are electrically connected to each other with the second insulating layer facing each other. Therefore, the metal layer formed on the same surface of the second insulating layer can be divided into two parts, the first metal layer and the second metal layer, whereby the second insulating layer Since the area of the metal layer formed on the first and second insulating layers can be reduced, the first and second insulating layers are Even if it is made of a metal material, the stress at the interface between the first and second metal layers and the first and second insulating layers during firing can be reduced, thereby preventing cracks and peeling. Yield can be improved.

  Further, the capacitance in the capacitor portion formed by the inner conductor, the first metal layer, and the second metal layer is such that the inner conductor, the first metal layer, and the second metal layer facing each other in the vertical direction. In addition to the gap between the first metal layer and the second metal layer that are formed on the same surface of the second insulating layer and face each other in the lateral direction, the capacitance is reduced. There is an excellent effect of not.

(Embodiment 1)
Hereinafter, the invention described in the first to fourth aspects of the present invention will be described using the first embodiment.

  FIG. 1 is an exploded perspective view of a noise filter according to Embodiment 1 of the present invention, and FIG. 2 is a perspective view of the noise filter.

  As shown in FIG. 1, the noise filter according to Embodiment 1 of the present invention includes an internal conductor 12 provided on the upper surface of the first insulating layer 11 and a plurality of noise filters provided below the first insulating layer 11. The first metal layer 14 and the second metal provided so as not to be electrically connected to each other on the upper surfaces of the second insulating layer 13 and the plurality of second insulating layers 13. A second insulating layer that is electrically connected to the inner conductor 12 and that is adjacent in the vertical direction. The first metal layer 14 and the second metal layer 15 respectively provided on 13 are opposed to each other through the second insulating layer 13.

In the above configuration, the first insulating layer 11 is formed in a sheet shape from a dielectric material based on BaTiO ₃ , TiO ₂ or the like, or a ceramic material made of a magnetic material such as ferrite based on Fe ₂ O _3. It has insulation properties. The first insulating layer 11 is provided with a via electrode 16 at a predetermined position.

  The inner conductors 12 are formed in a spiral shape by printing or transferring a conductive material such as silver, and one inner conductor 12 is provided on the upper surface of the first insulating layer 11. It constitutes an inductor conductor. One end of the inner conductor 12 is exposed from the first insulating layer 11 to form a first lead electrode 12a, and the other end 12b is connected to the via electrode 16.

  The shape of the inner conductor 12 is not necessarily limited to a spiral shape, but may be a meandering shape, a straight line shape, or a spiral shape. However, the spiral shape can increase the inductance of the inner conductor 12. Therefore, noise can be removed in a high frequency band. In addition, since the inductance of the internal conductor 12 can be changed by adjusting the shape, length, and the like of the internal conductor 12, a frequency band in which noise can be removed can be set in a wide range. In addition, the number of the first insulating layers 11 and the number of the inner conductors 12 are not necessarily limited to one, but by providing two or more, the inductance can be increased, so that a wide frequency band. Can remove noise.

  Further, in the first insulating layer 11, another inner conductor may be formed between the lines of the inner conductor 12 along the inner conductor 12 on the same surface as the surface on which the inner conductor 12 is provided. . The other internal conductors are not necessarily provided, but by providing other internal conductors, a capacitor portion is formed by the internal conductor 12 and the other internal conductors. Therefore, noise can be removed in a wider frequency band.

Two of the second insulating layers 13 are provided below the first insulating layer 11, and a dielectric material based on BaTiO ₃ or TiO ₂ or a ferrite based on Fe ₂ O ₃ is used. It is comprised in the sheet form with the ceramic material which consists of magnetic materials, such as, and has insulation. In addition, one first metal layer 14 and one second metal layer 15 are provided on the upper surface of the second insulating layer 13.

  The first metal layer 14 is formed by printing or transferring a conductive material such as silver, and is formed on the upper surface of the two second insulating layers 13, that is, two in total. Has been. The first metal layer 14 has a convex portion at one end, and the convex portion is exposed from the second insulating layer 13 to form a second extraction electrode 14a. Yes. Further, the uppermost first metal layer 14 is electrically connected to the inner conductor 12 via the via electrode 16.

  Similar to the first metal layer 14, the second metal layer 15 is formed by printing or transferring a conductive material such as silver, and the upper surfaces of the two second insulating layers 13. One at a time, that is, a total of two. The second metal layer 15 also has a convex portion at each end, and the convex portion is exposed from the second insulating layer 13 to form a third extraction electrode 15a. Yes. In FIG. 1, the two third extraction electrodes 15a are drawn out in the same direction, but may be drawn out in different directions. Furthermore, the respective materials may be selected so that the thermal contraction rate of the first and second metal layers 14 and 15 and the thermal contraction rate of the second insulating layer 13 are close to each other.

  The first metal layer 14 and the second metal layer 15 are provided one on each of the upper surfaces of the two second insulating layers 13 and are spaced apart from each other so as not to be electrically connected to each other. Is provided. In addition, since it is necessary to face these up and down, a plurality of them are always formed.

  Further, the first metal layer 14 provided on the upper second insulating layer 13 is connected to the second metal provided on the lower second insulating layer 13 via the upper second insulating layer 13. The second metal layer 15 provided so as to face the layer 15 and on the upper second insulating layer 13 is connected to the lower second insulating layer via the upper second insulating layer 13. 13 is provided so as to face the first metal layer 14 provided in 13. Thereby, a capacitor | condenser part is formed between the 2nd metal layer 15 and the 1st metal layer 14 of an up-down direction, and an electrostatic capacitance can be obtained in distributed constant. Further, a capacitor portion is formed between the inner conductor 12 electrically connected to the uppermost first metal layer 14 and the uppermost second metal layer 15 to obtain a capacitance in a distributed constant manner. be able to.

  That is, the first metal layer 14 and the inner conductor 12 function not only as inductor conductors but also as one side of the counter electrode that is a part of the capacitor portion, similarly to the second metal layer 15.

  Note that the second insulating layer 13 may be provided not only in two but also in three or more. Also in this case, it is necessary to form the first metal layer 14 and the second metal layer 15 provided on the second insulating layer 13 adjacent in the vertical direction so as to face each other through the second insulating layer 13. There is.

  A predetermined number of other insulating layers 17 are provided on the upper surface of the inner conductor 12 and the lower surface of the second insulating layer 13 located below. Further, if the other insulating layer 17 and the first insulating layer 11 and the second insulating layer 13 are made of the same material, the adhesion between them is improved by firing, so that cracks and peeling are prevented. can do.

  Further, the first insulating layer 11, the inner conductor 12, the second insulating layer 13, the other insulating layer 17, the first metal layer 14, and the second metal layer 15 are laminated in the above-described configuration. A noise filter body 18 as shown in FIG. 2 is obtained.

  First and second external electrodes 19 and 20 serving as input / output terminals connected to the first and second lead electrodes 12a and 14a are provided on both end faces of the noise filter body 18, and the noise filter is further provided. On both side surfaces of the main body 18, third external electrodes 21 serving as ground terminals connected to the third extraction electrode 15a are provided.

  Here, the signal input from the first external electrode 19 is transmitted through the first lead electrode 12a to the inner conductor 12, the other end 12b of the inner conductor 12, the via electrode 16, and the uppermost first metal layer 14. And then output from the second external electrode 20 via the second extraction electrode 14a.

  Further, a signal input from the first external electrode 19 also flows to the lowermost first extraction electrode 12 a and the first metal layer 14. The capacitor portion between the first metal layer 14 and the second metal layer 15 above the first metal layer 14 flows from the third extraction electrode 15a in the upper second metal layer 15 to the ground. On the other hand, a signal input from the second external electrode 20 flows to the uppermost first extraction electrode 12a and the first metal layer 14, and the first metal layer 14 and the second metal layer below it. 15, the capacitor portion between the first and second metal layers 15 flows from the third extraction electrode 15 a to the ground.

  Next, the manufacturing method of the noise filter in Embodiment 1 of this invention is demonstrated.

  1 and 2, first, a predetermined number of rectangular first and second insulating layers 11 and 13 and other insulating layers 17 are prepared from a mixture of ceramic material powder and resin as raw materials. To do. At this time, the first and second insulating layers 11 and 13 and the other insulating layers 17 are not immediately fired but are in a green sheet state. In addition, a predetermined portion of the first insulating layer 11 is drilled by laser, punching, or the like, and the via electrode 16 is formed by filling the hole with silver.

  Next, after the second insulating layer 13 is disposed on the upper surface of the predetermined number of other insulating layers 17, the first metal layer 14 and the second metal layer are formed on both ends of the upper surface of the second insulating layer 13. 15 are formed one by one by printing.

  Next, another second insulating layer 13 is disposed on the top surfaces of the first metal layer 14 and the second metal layer 15.

  Next, the other first metal layer 14 and the second metal layer 15 are formed one by one on the upper surface of the other second insulating layer 13 by printing. In this case, the other first metal layer 14 is mutually connected to the second metal layer 15 provided on the second insulating layer 13 positioned below via the other second insulating layer 13 positioned above. On the other hand, the other second metal layer 15 is formed on the second insulating layer 13 located below through the other second insulating layer 13 located above. The metal layer 14 is formed so as to face each other.

  The first metal layer 14 and the second metal layer 15 may not be formed by printing, but may be formed by other methods such as transfer, vapor deposition, plating, or disposing a metal plate.

  Next, the first insulating layer 11 having the via electrode 16 is disposed on the upper surfaces of the other first metal layer 14 and the second metal layer 15 located above. At this time, the via electrode 16 is connected to a part of the other first metal layer 14 located above.

  Next, the inner conductor 12 is formed on the upper surface of the first insulating layer 11 by plating.

  At this time, the other end 12 b of the internal conductor 12, that is, the center of the spiral is connected to the via electrode 16. As a result, the inner conductor 12 and the other first metal layer 14 positioned above are electrically connected via the via electrode 16.

  The inner conductor 12 is formed by forming a conductor having a predetermined pattern shape on a separately prepared base plate (not shown) by plating, and then transferring the conductor to the first insulating layer 11 in a green sheet state. To form. Note that the inner conductor 12 may be formed by other methods such as printing and vapor deposition instead of plating.

  Next, a predetermined number of other insulating layers 17 are formed on the upper surface of the inner conductor 12 to obtain a laminate (not shown).

  Further, in the above manufacturing process, in order to improve manufacturing efficiency, the inner conductor 12, the first metal layer 14, and the second metal layer 15 are stacked in the above-described configuration and then cut into individual pieces. Thus, a plurality of laminates may be obtained at the same time.

  Next, this laminate is fired at a predetermined temperature and time, and the noise filter body 18 is formed.

  Next, first and second external electrodes 19 and 20 are formed on both end faces of the noise filter body 18 by printing silver so as to be connected to the first and second extraction electrodes 12a and 14a. And the 3rd external electrode 21 is formed by printing silver so that it may connect with the 3rd extraction electrode 15a on both sides | surfaces.

  Finally, a nickel plating layer is formed on the surfaces of the first to third external electrodes 19 to 21 by plating, and a low melting point metal plating layer such as tin or solder is further formed on the surface of the nickel plating layer by plating.

  In the first embodiment of the present invention described above, the metal layer formed on the same surface of the second insulating layer 13 is divided into the first metal layer 14 and the second metal layer 15. Therefore, the area of the metal layer formed on the second insulating layer 13 can be reduced, so that even if the first and second insulating layers 11 and 13 are made of a ceramic material, the first and second layers during firing are formed. Since the stress at the interface between the second metal layers 14 and 15 and the first and second insulating layers 11 and 13 can be reduced, the occurrence of cracks and peeling can be prevented, thereby improving the yield. An excellent effect is obtained.

  In addition, the first metal layer 14 and the second metal layer 15 that are provided one by one so as not to be electrically connected to each other are provided on the upper surfaces of the plurality of second insulating layers 13. The capacitance of the capacitor portion is formed not only between the inner conductor 12 and the first metal layer 14 and the second metal layer 15 opposed in the vertical direction, but also on the same surface of the second insulating layer 13. In addition, it is also generated between the first metal layer 14 and the second metal layer 15 that are opposed in the lateral direction, and the capacitance is not reduced thereby. That is, even if the metal layer provided on the same surface of the second insulating layer 13 is divided into the first metal layer 14 and the second metal layer 15, the first metal layer 14 and the second metal layer 15 are separated. Are opposed to each other in the vertical direction, so that the capacitance does not decrease.

  As a result, the yield can be improved without reducing the capacitance.

  Further, the first and second insulating layers located on the upper and lower surfaces of the first and second metal layers 14 and 15 are divided by dividing the metal layer into the first metal layer 14 and the second metal layer 15. Since the area where the layers 11 and 13 are in contact with each other can be increased, it is possible to prevent the noise filter from being peeled off at the place where the first and second metal layers 14 and 15 are formed. In order to prevent this peeling more reliably, a through hole or a slit may be formed in the first and second metal layers 14 and 15.

  Further, as shown in FIG. 3, the first metal layer 14 and the second metal layer 15 are formed with recesses 14b and 15b and protrusions 14c and 15c, respectively. If the shape of the layer 15 is comb-shaped, and the other protrusions 15c and 14c are fitted into one of the recesses 14b and 15b so that the recesses and the protrusions face each other, the first metal layer 14 and the second metal layer 14 Since the area facing the metal layer 15 can be increased, the capacitance between them can be increased, whereby the impedance of the noise filter can be further increased.

  Furthermore, as shown in FIG. 4, if a plurality of first metal layers 14 and a plurality of second metal layers 15 are provided on the same surface of the second insulating layer 13, the first metal that faces the same surface is provided. Since the number of the layers 14 and the second metal layers 15 can be increased, the facing area between the first metal layer 14 and the second metal layer 15 can be increased, and thereby the capacitance between them can be increased. Since it can be increased, the impedance of the noise filter can be increased.

  3 and 4 show only the second insulating layer 13, the first metal layer 14, and the second metal layer 15 for ease of explanation.

(Embodiment 2)
Hereinafter, the invention according to claim 5 of the present invention will be described using the second embodiment.

  FIG. 5 is an exploded perspective view of the noise filter according to Embodiment 2 of the present invention. In the second embodiment of the present invention, components having the same configurations as those of the first embodiment of the present invention described above are denoted by the same reference numerals and description thereof is omitted.

  In FIG. 5, the second embodiment of the present invention is different from the first embodiment of the present invention described above in that the one end portion 12 a of the internal conductor 12 is positioned below the first metal layer 14 and above. The second metal layer 15 is electrically connected, and the other end 12b of the inner conductor 12 is electrically connected to the first metal layer 14 located above and the second metal layer 15 located below. Is a point.

  In this case, the second metal layer 15 located on the upper side and the first metal layer 14 located on the lower side are electrically connected to one end portion 12a of the inner conductor 12 via the first outer electrode 19 shown in FIG. The first metal layer 14 that is connected and located above and the second metal layer 15 that is located below are connected to the other end of the internal conductor 12 via the via electrode 16 and the second external electrode 20 shown in FIG. It is electrically connected to the part 12b. In this case, the third external electrode 21 serving as a ground terminal is not necessary.

  As a result, both the first metal layer 14 and the second metal layer 15 constituting the capacitor portion can be connected to the internal conductor 12 that is the inductor conductor, so that the inductor conductor and the capacitor portion are connected in parallel. An LC parallel type noise filter can be formed. In this case, an equivalent circuit as shown in FIG. 6 is obtained.

  Also in the second embodiment of the present invention, the first metal layer 14 and the second metal layer 15 face each other in the vertical direction, and the first metal layer is formed on the same surface of the second insulating layer 13. 14 and the second metal layer 15 are also opposed to each other in the lateral direction, so that the capacitance is not reduced.

  In the noise filters according to the first and second embodiments of the present invention, only the first metal layer 14 located at the top is connected to the inner conductor 12 in the first metal layer 14. The other first metal layer 14 may be connected.

  In the noise filters according to the first and second embodiments of the present invention, two first metal layers 14 and two second metal layers 15 are provided. However, three or more may be used. In this case, at least one first metal layer 14 and one second metal layer 15 must be connected to one end 12a and the other end 12b of the internal conductor 12, respectively.

(Embodiment 3)
The third aspect of the present invention will be described below with reference to the third embodiment.

  FIG. 7 is an exploded perspective view of the noise filter according to Embodiment 3 of the present invention. In the third embodiment of the present invention, those having the same configuration as that of the first embodiment of the present invention described above are denoted by the same reference numerals and description thereof is omitted.

  In FIG. 7, the third embodiment of the present invention is different from the first embodiment of the present invention described above in that a plurality of first metal layers 14 are disposed on the same surface of the second insulating layer 13 positioned above. And a plurality of second metal layers 15 are provided on the same surface of the second insulating layer 13 located below. In this case, the first metal layers 14 and the second metal layers 15 are not electrically connected to each other.

  As a result, a plurality of first metal layers 14 can be connected to both end portions 12a, 12b of the inner conductor 12, and therefore, if the plurality of second metal layers 15 are connected to the ground, the inner conductor 12 is formed. It is possible to form a π-type noise filter in which a capacitor portion composed of the first metal layer 14 and the second metal layer 15 is connected to both ends of the inductor conductor. In this case, an equivalent circuit as shown in FIG. 8 is obtained.

  In the noise filter according to the first to third embodiments of the present invention, the inner conductor 12, the first metal layer 14, and the second metal layer 15 are arranged in the vertical direction to constitute one noise filter. However, an array type may be provided by providing a plurality of these.

  In addition, the second insulating layer 13 is provided below the first insulating layer 11. On the contrary, the second insulating layer 13 may be provided above the first insulating layer 11. is there.

  In the noise filter according to the third embodiment of the present invention, the plurality of first metal layers 14 are provided on the second insulating layer 13 positioned above, and the plurality of second metal layers 15 are disposed below. Contrary to this, a plurality of first metal layers 14 are provided on the second insulating layer 13 located below, and a plurality of second metal layers are provided. 15 may be provided on the second insulating layer 13 positioned above.

  The noise filter according to the present invention can improve the yield without reducing the capacitance, and can be applied to electronic devices that require noise countermeasures such as small digital devices, OA devices, mobile terminals, mobile phones, information devices, and the like. Useful.

1 is an exploded perspective view of a noise filter according to Embodiment 1 of the present invention. Perspective view of the noise filter Top view showing the main part of another example of the same noise filter Top view showing the main part of another example of the same noise filter The disassembled perspective view of the noise filter in Embodiment 2 of this invention Equivalent circuit diagram of the same noise filter The disassembled perspective view of the noise filter in Embodiment 3 of this invention Equivalent circuit diagram of the same noise filter Exploded perspective view of a conventional noise filter

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 1st insulating layer 12 Internal conductor 12a One end part of an internal conductor 12b The other end part of an internal conductor 13 2nd insulating layer 14 1st metal layer 14b Concave part 14c Convex part 15 2nd metal layer 15b Concave part 15c Convex part

Claims (6)

Each of the inner conductor provided on the upper surface of the first insulating layer, the plurality of second insulating layers provided above or below the first insulating layer, and the plurality of second insulating layers A first metal layer and a second metal layer provided so as not to be electrically connected to each other on the surface, and electrically connecting the first metal layer to the inner conductor and adjacent in the vertical direction A noise filter in which the first metal layer and the second metal layer provided on the second insulating layer are opposed to each other through the second insulating layer. The noise filter according to claim 1, wherein the inner conductor is formed in a spiral shape. The first metal layer and the second metal layer provided on the same surface of the second insulating layer are respectively formed with a concave portion and a convex portion, and one concave portion and the other concave portion are opposed to each other. Item 2. The noise filter according to Item 1. The noise filter according to claim 1, wherein a plurality of first metal layers and a plurality of second metal layers are provided on the same surface of the second insulating layer. One end of the inner conductor is electrically connected to a part of all the first metal layers and a part of all the second metal layers, and the other end of the inner conductor is left as the rest. The noise filter according to claim 1, wherein the noise filter is electrically connected to the first metal layer and the second metal layer. An inner conductor provided on the upper surface of the first insulating layer, a plurality of second insulating layers provided above or below the first insulating layer, and a part of the plurality of second insulating layers A plurality of first metal layers provided so as not to be electrically connected to each other on the same surface of the second insulating layer, and the same surface of the other second insulating layer among the plurality of second insulating layers A plurality of second metal layers provided so as not to be electrically connected to each other, electrically connecting the first metal layer to the inner conductor and adjacent to the second metal in the vertical direction. A noise filter in which the plurality of first metal layers and the plurality of second metal layers provided in an insulating layer are opposed to each other through the second insulating layer.

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