JP2006142587A - Manufacturing method of member with protruded part, member with protruded part, transmission type screen and rear type projector - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a member with a protruded part capable of easily and certainly manufacturing the member with the protruded part which has the protruded part having a desired shape, the member with the protruded part, a transmission type screen equipped with the member with the protruded part and a rear type projector. <P>SOLUTION: The manufacturing method of the member with the protruded part has a resin material applying process for applying a resin material having fluidity to a surface provided with the recessed parts of a member with the recessed parts and a peel assisting fixture in a state that the peel assisting fixture is arranged in the vicinity of the edge part of the member with the recessed parts equipped with a large number of the recessed parts, a solidification process for solidifying the resin material to form a solidified matter and a peeling process for peeling the solidified matter from the member with the recessed parts while grasping the region solidified on the fixture of the solidified matter. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a method for manufacturing a member with a convex portion, a member with a convex portion, a transmissive screen, and a rear projector.

In recent years, the demand for rear-type projectors is increasing as a display suitable for home theater monitors, large-screen televisions, and the like.
A transmissive screen used in a rear projector generally uses a lens substrate having a plurality of lenses. Conventionally, a lenticular lens substrate provided with a lenticular lens has been generally used as a lens substrate. The conventional rear projector provided with such a lenticular lens substrate has a problem that the left and right viewing angles are large, but the top and bottom viewing angles are small (the viewing angles are biased). In order to solve such problems, there has been an attempt to use a microlens sheet (microlens substrate) on which optically concave or convex rotationally symmetric microlenses are formed (see, for example, Patent Document 1). .
Conventionally, a lens substrate (particularly a microlens substrate) as described above supplies uncured resin to a substrate with recesses having a plurality of lens forming recesses to transfer the surface shape of the substrate with recesses. It was manufactured using a method (for example, 2P method) (for example, refer to Patent Document 2).

However, the above-described method has a problem that it is difficult to release the cured resin from the substrate with concave portions. In addition, such a problem occurs when a lens substrate (microlens substrate) having a microlens as a lens is manufactured, or when the size of a lens to be formed is small (when the lens is fine). If the lens to be formed has a high density (for example, 1000 / cm ² or more), the lens substrate to be manufactured has a large area (for example, a substrate having a diagonal length of 60 cm or more), etc. Even more prominent. This is considered to be because the fine patterns formed on the surface of the substrate with recesses are bitten together by the anchor effect. Further, when the substrate with concave portions is forcibly separated from the manufactured lens substrate, there is a problem that a member with concave portions or a convex portion formed by transfer (defects such as chipping on the convex lens occur. From the above, there has been a problem that the yield of the lens substrate is significantly reduced.

JP 2000-131506 A (Claims) JP 2003-279949 A (paragraph numbers 0167 to 0173)

  The objective of this invention provides the manufacturing method of the member with a convex part which can manufacture the member with a convex part which has a convex part of a desired shape easily and reliably, providing the said member with a convex part, Another object of the present invention is to provide a transmissive screen and a rear projector provided with the convex member.

Such an object is achieved by the present invention described below.
The manufacturing method of the member with a convex part of the present invention is a method of manufacturing a member with a convex part provided with a large number of convex parts corresponding to the concave part, using a member with a concave part provided with a large number of concave parts,
A resin material having fluidity is applied to the surface of the member with a recess and the jig provided with a peeling assisting jig in the vicinity of the edge of the member with the recess. A resin material application step;
A solidification step of solidifying the resin material into a solidified product;
And a peeling step of peeling the solidified material from the recessed member while gripping the solidified portion of the solidified material on the jig.
Thereby, the manufacturing method of the member with a convex part which can manufacture the member with a convex part which has a convex part of a desired shape easily and reliably can be provided. More specifically, when peeling the member with the convex portion from the member with the concave portion, the member with the convex portion is effectively prevented from causing defects such as chipping on the member with the concave portion and the convex portion to be formed. Can be manufactured.

In the manufacturing method of the member with a convex part of this invention, it is preferable to have the jig | tool removal process which peels the said solidified material from the said jig | tool and removes the said jig | tool prior to the said peeling process.
Thereby, when peeling a member with a convex part from a member with a recessed part, it can prevent more effectively that defects, such as a crack, arise in a member with a recessed part, or the convex part formed.
In the manufacturing method of the member with a convex part of this invention, it is preferable to use what the shape of the said recessed part at the time of planar view is a substantially ellipse shape as said member with a concave part.
Thereby, when peeling a member with a convex part from a member with a recessed part, it can prevent more effectively that defects, such as a crack, arise in a member with a recessed part, or the convex part formed. In addition, for example, when a member with a convex portion is used as a lens substrate (microlens substrate), it is possible to more effectively prevent the occurrence of moire due to light interference and to make the viewing angle characteristics particularly excellent. it can.
In the manufacturing method of the member with a convex part of this invention, it is preferable that the peeling direction at the time of peeling the said solidified material from the said member with a recessed part is substantially the same as the short-axis direction of the said recessed part.
Thereby, when peeling a member with a convex part from a member with a recessed part, it can prevent more effectively that defects, such as a chip, arise in a member with a recessed part and the convex part formed.

In the method for manufacturing a member with a convex portion according to the present invention, the concave portion has a length in the minor axis direction of L ₁ [μm] and a length in the major axis direction of L ₂ [μm], and 0.10 ≦ L It is preferable that the relationship of ₁ / L ₂ ≦ 0.99 is satisfied.
Thereby, when peeling a member with a convex part from a member with a recessed part, it can prevent more effectively that defects, such as a chip, arise in a member with a recessed part and the convex part formed. In addition, for example, when a member with a convex portion is used as a lens substrate (microlens substrate), it is possible to more effectively prevent the occurrence of moire due to light interference and to make the viewing angle characteristics particularly excellent. it can.

In the manufacturing method of the member with a convex part of this invention, it is preferable that the length of the short axis direction of the said recessed part is 10-500 micrometers.
Thereby, in manufacturing a member with a convex part, when peeling a member with a convex part from a member with a concave part, it prevents more effectively that defects, such as a crack, arise in a member with a concave part or a convex part formed. In addition, the productivity of the convex member can be increased. Moreover, when the member with a convex part to be manufactured is a microlens substrate, sufficient resolution can be obtained while effectively preventing the occurrence of inconvenience such as moire.

In the manufacturing method of the member with a convex part of this invention, it is preferable that the length of the major axis direction of the said recessed part is 15-750 micrometers.
Thereby, in manufacturing a member with a convex part, when peeling a member with a convex part from a member with a concave part, it prevents more effectively that defects, such as a crack, arise in a member with a concave part or a convex part formed. In addition, the productivity of the convex member can be increased. Moreover, when the member with a convex part to be manufactured is a microlens substrate, sufficient resolution can be obtained while effectively preventing the occurrence of inconvenience such as moire.

In the method for manufacturing a member with a convex portion according to the present invention, the member with a concave portion includes a plurality of first concave portions and a second portion provided as a dummy outside the region where the plurality of first concave portions are provided. It is preferable that it has a recessed part.
Thereby, when peeling a member with a convex part from a member with a concave part, it is more effectively prevented that a defect, such as a chip, arises in a member with a concave part or a convex part formed (especially 1st recessed part). be able to.

In the manufacturing method of the member with a convex part of this invention, it is preferable that the said member with a concave part has a 1st recessed part and a 2nd recessed part shallower than the said 1st recessed part.
Thereby, when peeling a member with a convex part from a member with a concave part, defects, such as a crack, on a member with a concave part and the convex part (the 1st crevice and the 2nd crevice. Especially the 1st crevice) formed Can be more effectively prevented.

In the method for manufacturing a member with a convex portion according to the present invention, the member with a concave portion includes a first region constituted by a plurality of first concave portions and a plurality of second concave portions outside the first region. A second region configured;
The density d ₂ [pieces / cm ² ] of the second recesses in the second region is smaller than the density d ₁ [pieces / cm ² ] of the first recesses in the first region. Is preferred.
Thereby, when peeling a member with a convex part from a member with a concave part, defects, such as a crack, on a member with a concave part and the convex part (the 1st crevice and the 2nd crevice. Especially the 1st crevice) formed Can be more effectively prevented.

In the manufacturing method of the member with a convex part of this invention, it is preferable to use what was comprised with the material which has transparency as said member with a concave part.
Thereby, for example, when the member with convex portions to be manufactured is a microlens substrate, a process such as formation of a black matrix can be suitably performed without removing the member with concave portions from the member with convex portions. As a result, the light utilization efficiency of the manufactured microlens substrate can be made particularly excellent.

In the manufacturing method of the member with a convex part of this invention, it is preferable that the said member with a convex part is a micro lens board | substrate provided with the micro lens as the said convex part.
Thereby, for example, a member with a convex portion manufactured using a member with a concave portion can be suitably used as a component (microlens substrate) of a transmissive screen or a rear projector. Moreover, in the conventional method, when the member with a convex portion to be manufactured is a microlens substrate, in particular, it is easy to cause inconvenience such as a member with a concave portion and a chip of the convex portion (microlens) to be formed. According to the present invention, it is possible to effectively prevent the occurrence of various problems in the production of a microlens substrate. That is, when applied to the manufacture of a microlens substrate, the effects of the present invention are particularly remarkable.

The member with a convex portion of the present invention is manufactured using the method of the present invention.
Thereby, the member with a convex part which has a convex part of a desired shape (the surface shape of the member with a concave part was faithfully transferred) can be provided.
In the member with a convex part of this invention, it is preferable that it is comprised with the material which has transparency.
Thereby, for example, a member with a convex portion can be suitably used as a component (lens substrate) of a transmissive screen or a rear projector.

The transmission screen of the present invention is characterized by including the member with a convex portion of the present invention.
Accordingly, it is possible to provide a transmissive screen in which occurrence of image problems due to lens defects is effectively prevented.
A rear projector according to the present invention includes the transmission screen according to the present invention.
Thus, it is possible to provide a rear projector in which the occurrence of image problems due to lens defects is effectively prevented.

Hereinafter, the manufacturing method of the member with a convex part, the member with a convex part, a transmission type screen, and a rear type projector of the present invention are explained in detail based on a suitable embodiment shown in an accompanying drawing.
In the present invention, the “substrate” refers to a concept that is substantially inflexible and includes a relatively large thickness, a sheet-like material, a film-like material, and the like. .
Although the use of the member with a convex portion of the present invention is not particularly limited, in this embodiment, the member with a convex portion is mainly used as a microlens substrate (convex lens substrate) constituting a transmissive screen and a rear projector. explain.
First, manufacture of a member with a convex part of the present invention, in particular, a member with a concave part (a member with a concave part for manufacturing a microlens substrate) that can be suitably used for manufacturing a microlens substrate 1 described later, and a manufacturing method thereof will be described. .

  FIG. 1 is a schematic plan view showing a first embodiment of a member with a recess used for manufacturing a microlens substrate, and FIG. 2 is a schematic longitudinal sectional view showing a method for manufacturing the member with a recess shown in FIG. is there. In the manufacture of the member with recesses, a large number of recesses are actually formed on the substrate, and in the manufacture of the microlens substrate, a large number of protrusions are actually formed on the substrate. To make it easier to understand, a part of it is highlighted.

First, the structure of the member with a concave part (member with a concave part for microlens substrate manufacture) used for manufacture of a microlens substrate (member with a convex part) is demonstrated.
The member with recesses (member with recesses for manufacturing a microlens substrate) 6 may be made of any material such as various metal materials, various glass materials, various resin materials, and the like.
When the member 6 with a recess is made of a material having excellent shape stability, the stability (reliability) of the shape of the recess (microlens forming recess) 61 and the micro formed using the recess 61. The dimensional accuracy of the lens 21 can be made particularly excellent, and the optical characteristics as the lens substrate can be made particularly reliable. Examples of such materials having excellent shape stability include various metal materials and various glass materials.

  Moreover, when the member 6 with a recessed part is comprised with the material which has transparency, in the manufacturing method of the microlens board | substrate 1 which is mentioned later, in the state which the member 6 with a recessed part was closely_contact | adhered to the board | substrate main body 2 (member with a recessed part) The black matrix 3 can be formed without removing 6 from the substrate body 2). Thereby, the handleability of the substrate body 2 is improved, and the black matrix 3 can be suitably formed. Examples of such a transparent material include various resin materials and various glass materials.

The concave member (microlens substrate manufacturing concave member) 6 includes a plurality of concave portions (microlens forming concave portions) 61.
The concave portion (microlens forming concave portion) 61 has a substantially oval shape (however, a flat shape and a substantially bowl shape) in which the vertical width is larger than the horizontal width when the member with concave portion (member with concave portion for microlens substrate manufacturing) 6 is viewed in plan view. And a shape obtained by cutting the upper and lower sides of a substantially circle). Since the concave portion 61 has such a shape, the member with the convex portion (substrate body 2) is provided with the concave portion in the manufacture of the microlens substrate 1 (substrate body 2) as the member with the convex portion as described in detail later. When peeling from the member 6, it is possible to effectively prevent defects such as chipping from occurring in the member 6 with a recess and the formed microlens 21. In addition, the manufactured microlens substrate 1 is preferably used for manufacturing the microlens substrate 1 that can effectively prevent the occurrence of inconvenience such as moire and can have particularly excellent viewing angle characteristics. Can do. Further, by using the concave member 6 having the concave portion 61 having such a shape as a molding die, it is possible to more effectively prevent the breakage and variation of the unevenness, the uneven pattern is faithfully transferred, and the optical characteristics are excellent. In addition, a microlens substrate (a member with a convex portion) 1 can be obtained. In addition, the transmissive screen and the rear projector provided with such a microlens substrate (member with projections) 1 can display a high-quality image more stably.

Further, the length (pitch) in the minor axis direction (lateral direction) of the recess 61 when viewed in plan is L ₁ [μm], and the length (pitch) in the major axis direction (longitudinal direction) is L ₂ [μm]. Then, it is preferable to satisfy the relationship of 0.001 ≦ L ₁ / L ₂ ≦ 0.99, more preferably to satisfy the relationship of 0.1 ≦ L ₁ / L ₂ ≦ 0.99, and More preferably, the relationship 5 ≦ L ₁ / L ₂ ≦ 0.95 is satisfied, and most preferably the relationship 0.6 ≦ L ₁ / L ₂ ≦ 0.8 is satisfied. By satisfying the relationship as described above, the effects as described above become more remarkable. On the other hand, if the value of L ₁ / L ₂ is too small, the vertical viewing angle is small and the amount of straight light increases, and the viewing angle characteristics tend to be remarkably deteriorated. On the other hand, if the value of L ₁ / L ₂ is too large, depending on the density of the recesses 61 and the like, the effect of making the shape of the recesses 61 substantially elliptical may not be sufficiently exhibited.

  Further, the length (pitch) in the minor axis direction of the concave portion 61 when viewed in plan is preferably 2 to 500 μm, more preferably 20 to 300 μm, and further preferably 30 to 100 μm. When the length of the concave portion 61 in the short axis direction is a value within the above range, when the microlens substrate 1 is peeled from the concave portion member 6 in the manufacture of the microlens substrate 1, the concave portion member 6 is formed. It is possible to more effectively prevent defects such as chipping from occurring in the microlens 21 and to increase the productivity of the microlens substrate 1. In addition, it is possible to obtain a sufficient resolution in the image projected on the screen while effectively preventing the occurrence of inconvenience such as moire.

  Further, the length (pitch) of the concave portion 61 in a plan view is preferably 5 to 750 μm, more preferably 25 to 500 μm, and still more preferably 50 to 150 μm. When the length of the concave portion 61 in the short axis direction is a value within the above range, when the microlens substrate 1 is peeled from the concave portion member 6 in the manufacture of the microlens substrate 1, the concave portion member 6 is formed. It is possible to more effectively prevent defects such as chipping from occurring in the microlens 21 and to increase the productivity of the microlens substrate 1. In addition, it is possible to obtain a sufficient resolution in the image projected on the screen while effectively preventing the occurrence of inconvenience such as moire.

  Further, the radius of curvature of the concave portion 61 in the minor axis direction (hereinafter also simply referred to as “the radius of curvature of the concave portion 61”) is preferably 5 to 250 μm, more preferably 15 to 150 μm. More preferably, it is 50 μm. When the radius of curvature of the recess 61 is a value within the above range, the viewing angle characteristic can be made particularly excellent. In particular, both the horizontal and vertical viewing angle characteristics can be improved.

  Moreover, it is preferable that the depth of the recessed part 61 is 5-750 micrometers, It is more preferable that it is 10-450 micrometers, It is further more preferable that it is 15-150 micrometers. When the depth of the concave portion 61 is a value within the above range, the member with the convex portion (substrate body 2) is peeled from the member with the concave portion 6 in manufacturing the microlens substrate 1 (substrate body 2) as the member with the convex portion. In doing so, it is possible to more effectively prevent defects such as chipping from occurring in the member 6 with recesses and the formed microlens 21. Further, the viewing angle characteristics of the manufactured microlens substrate 1 can be made particularly excellent.

Further, when the depth of the recess 61 is D ₁ [μm] and the length of the recess 61 in the minor axis direction is L ₁ [μm], the relationship of 0.90 ≦ L ₁ / D ₁ ≦ 1.40 is satisfied. It is preferable that the relationship 0.95 ≦ L ₁ / D ₁ ≦ 1.2 is satisfied, and it is more preferable that the relationship 1.0 ≦ L ₁ / D ₁ ≦ 1.1 is satisfied. . By satisfying such a relationship, it is possible to make the viewing angle characteristics particularly excellent while effectively preventing the occurrence of moire due to light interference.

Further, the density of the concave portions 61 in the first region 68 in which the concave portions 61 are formed (the region corresponding to the effective lens region of the microlens substrate 1) (the number per unit area when the member 6 with concave portions is viewed in plan) d. ₁ is not particularly limited, but is preferably 100 to 400 million units / cm ^2, more preferably from 5,000 to 200,000 pieces / cm ^2, 1 ten thousand it is 100,000 pieces / cm ² of the Further preferred. When the density d _{1 of the} concave portions 61 is a value within the above range, an image with sufficiently high resolution can be obtained in the microlens substrate 1 manufactured using the member 6 with concave portions. In the manufacturing method of the lens substrate 1, it is possible to more effectively prevent defects such as chipping from occurring in the concave member 6 and the microlens 21.

  The plurality of recesses 61 are arranged in a staggered pattern. When the concave portions 61 are arranged in this manner, in the manufacture of the microlens substrate 1 (substrate body 2) as a member with convex portions, when the member with convex portions (substrate body 2) is peeled from the member 6 with concave portions, It can prevent more effectively that defects, such as a chip, arise in member 6 with a crevice, or micro lens 21 formed. Further, by arranging the recesses 61 as described above, it is possible to effectively prevent the occurrence of inconvenience such as moire. On the other hand, for example, if the recesses 61 are arranged in a square lattice shape, it is difficult to sufficiently prevent the occurrence of inconvenience such as moire. In addition, when the concave portions 61 are randomly arranged, it is difficult to sufficiently increase the occupation ratio of the concave portions 61 in the effective lens region where the concave portions 61 are formed, and the light transmittance of the microlens substrate (the member with the convex portions). It becomes difficult to sufficiently increase (light utilization efficiency), and the obtained image becomes dark.

  Further, as described above, in the present embodiment, the recesses 61 are arranged in a staggered pattern when the member 6 with recesses is viewed in a plan view. 65 and the adjacent second row 66 are preferably offset by a half pitch in the lateral direction. Thereby, in manufacturing the microlens substrate 1 (substrate body 2) as a member with convex portions, the member 6 with concave portions or the like is formed when the member with convex portions (substrate body 2) is peeled from the member 6 with concave portions. It is possible to more effectively prevent defects such as chipping from occurring in the micro lens 21. In addition, in the manufactured microlens substrate 1, it is possible to more effectively prevent the occurrence of moire due to light interference and to make the viewing angle characteristics particularly excellent.

Next, the manufacturing method of the member 6 with a recessed part is demonstrated, referring FIG. In practice, a large number of recesses are formed on the substrate. However, for the sake of easy understanding, a part of the recess is shown here.
First, when manufacturing the member 6 with a recessed part, the board | substrate 7 is prepared.
The substrate 7 having a uniform thickness and having no deflection or scratches is preferably used. The substrate 7 is preferably one whose surface is cleaned by washing or the like.

  Examples of the material of the substrate 7 include soda glass, crystalline glass, quartz glass, lead glass, potassium glass, borosilicate glass, and alkali-free glass. Among them, soda glass, crystalline glass (for example, neo-serum), Alkali-free glass is preferred. Soda glass, crystalline glass, and alkali-free glass are easy to process, are relatively inexpensive, and are advantageous from the viewpoint of manufacturing cost.

  <A1> As shown in FIG. 2A, a mask forming film 85 is formed on the surface of the prepared substrate 7 (covering step). The mask forming film 85 functions as a mask by forming an opening (initial hole) in a later step. At the same time, a back surface protective film 89 is formed on the back surface of the substrate 7 (the surface opposite to the surface on which the mask forming film 85 is formed). Of course, the mask forming film 85 and the back surface protective film 89 can be formed simultaneously.

The constituent material of the mask forming film 85 (mask 8) is not particularly limited. For example, a metal such as Cr, Au, Ni, Ti, Pt, an alloy containing two or more selected from these metals, and oxidation of the metal Examples thereof include metal (metal oxide), silicon, and resin.
Further, the mask forming film 85 (mask 8) may have, for example, a substantially uniform composition, or a laminated body having a plurality of different layers.

  As described above, the configuration of the mask forming film 85 (mask 8) is not particularly limited, but is a laminate having a layer mainly composed of Cr and a layer mainly composed of Cr oxide. Preferably there is. The mask forming film 85 (mask 8) having such a configuration has excellent stability with respect to etching solutions having various compositions (the substrate 7 can be more reliably protected in the etching process described later). In addition, an opening having a desired shape can be easily and reliably formed by laser light irradiation as described later. In addition, when the mask forming film 85 (mask 8) has the above-described configuration, for example, a liquid containing ammonium monohydrogen difluoride can be suitably used as an etchant in an etching process described later. . Since ammonium monohydrogen difluoride is not a poisonous deleterious substance, it is possible to prevent the human body and the environment during work more reliably. In addition, the mask forming film 85 (mask 8) having the above-described configuration can efficiently relieve internal stress of the mask forming film (mask), and can be adhered to the substrate 7 (particularly in an etching process). Excellent adhesion). Therefore, by using the mask forming film 85 (mask 8) having the above-described configuration, the concave portion 61 having a desired shape can be easily and reliably formed.

  The method for forming the mask forming film 85 is not particularly limited, but when the mask forming film 85 is made of a metal material (including an alloy) such as Cr or Au or a metal oxide (for example, Cr oxide) The mask forming film 85 can be suitably formed by, for example, vapor deposition or sputtering. When the mask forming film 85 is made of silicon, the mask forming film 85 can be suitably formed by, for example, a sputtering method or a CVD method.

  The thickness of the mask forming film 85 (mask 8) varies depending on the material constituting the mask forming film 85, but is preferably about 0.01 to 2.0 μm, more preferably about 0.03 to 0.2 μm. . If the thickness is less than the lower limit value, the shape of the initial hole formed in the initial hole forming step (opening forming step) described later may be distorted depending on the constituent material of the mask forming film 85 and the like. is there. In addition, when wet etching is performed in an etching process described later, the masked portion of the substrate 7 may not be sufficiently protected. On the other hand, when the upper limit is exceeded, depending on the constituent material of the mask forming film 85 (mask 8), it is difficult to form a penetrating initial hole in an initial hole forming process (opening forming process) described later. In addition, the mask 8 may be easily peeled off due to internal stress of the mask 8.

  The back surface protective film 89 is for protecting the back surface of the substrate 7 in the subsequent steps. By this back surface protective film 89, erosion, deterioration, etc. of the back surface of the substrate 7 are preferably prevented. This back surface protective film 89 has the same configuration as the mask forming film 85, for example. For this reason, the back surface protective film 89 can be provided in the same manner as the mask forming film 85 simultaneously with the formation of the mask forming film 85.

<A2> Next, as shown in FIG. 2B, a plurality of initial holes 81 are formed in the mask forming film 85 to serve as mask openings for etching described later (initial hole forming step). Thereby, the mask 8 having a predetermined opening pattern is obtained.
A method for forming the initial hole 81 is not particularly limited, but a method using laser light irradiation is preferable. Thereby, the initial hole of the desired shape arranged in the desired pattern can be formed easily and accurately. As a result, the shape, arrangement method, density, and the like of the recesses 61 can be controlled more reliably. Further, by forming the initial hole by laser irradiation, the member with a recess can be manufactured with high productivity. In particular, the concave portion can be easily formed even on a large-area substrate. In addition, when forming the initial hole by laser light irradiation, by controlling the irradiation conditions, the initial hole can be formed without forming the initial recess as described later, along with the initial hole, the shape, size, An initial recess having a small variation in depth can be easily and reliably formed. In addition, by forming an initial hole in the mask forming film 85 by laser light irradiation, it is easier and less expensive to open the mask forming film 85 than in the case where the opening is formed by a conventional photolithography method. A part (initial hole) can be formed.

In addition, when the initial hole is formed by irradiation with laser light, the type of laser light to be used is not particularly limited, but ruby laser, semiconductor laser, YAG laser, femtosecond laser, glass laser, YVO ₄ laser, Ne-He A laser, an Ar laser, a CO ₂ laser, an excimer laser, and the like can be given. Moreover, you may use wavelengths, such as SHG of each laser, THG, and FHG.

Usually, in this step, the initial holes 81 are formed with a density and an array pattern corresponding to the recesses 61.
When forming the initial hole 81 in the mask forming film 85, as shown in FIG. 2B, not only the mask forming film 85 but also a part of the surface of the substrate 7 is removed at the same time, and the initial recess 71 is formed. It may be formed. Thereby, when etching is performed in an etching process described later, the contact area with the etching solution is increased, and erosion can be suitably started. Further, by adjusting the depth of the initial recess 71, the depth of the recess 61 (maximum lens thickness) can be adjusted.

  Although the depth of the initial recessed part 71 is not specifically limited, It is preferable to set it as 5 micrometers or less, and it is more preferable to set it as about 0.1-0.5 micrometer. When the initial hole 81 is formed by laser irradiation, the variation in depth can be more reliably reduced with respect to the plurality of initial concave portions 71 formed together with the initial hole 81. Thereby, the variation of the depth of each recessed part 61 which comprises the member 6 with a recessed part also becomes small, and the dispersion | variation in the magnitude | size of each microlens 21 of the microlens substrate 1 finally obtained also becomes small. As a result, variations in the size, focal length, and lens thickness of each microlens 21 can be particularly reduced.

  The shape and size of the initial hole 81 formed in this step is not particularly limited, but it is substantially circular and the diameter is preferably 0.8 to 20 μm, more preferably 1.0 to 10 μm. Preferably, it is 1.5-4 micrometers. When the diameter of the initial hole 81 is a value within the above range, the concave portion 61 having the above-described shape can be reliably formed in the etching process described later. However, when the initial hole 81 has a flat shape such as a substantially elliptical shape, the length in the minor axis direction can be substituted for the value of the diameter. That is, when the initial hole 81 formed in this step has a flat shape, the width of the initial hole 81 (length in the minor axis direction) is not particularly limited, but is preferably 0.8 to 20 μm, More preferably, it is 1.0-10 micrometers, and it is still more preferable that it is 1.5-4 micrometers. When the width of the initial hole 81 is a value within the above range, the concave portion 61 having the above-described shape can be reliably formed in the etching process described later.

In addition, when the initial hole 81 formed in this step has a flat shape, the length of the initial hole 81 (length in the major axis direction) is preferably 0.9 to 30 μm, and preferably 1.5 to More preferably, it is 15 micrometers, and it is still more preferable that it is 2.0-6 micrometers. When the length of the initial hole 81 is a value within the above range, the concave portion 61 having the above-described shape can be more reliably formed in the etching process described later.
Further, not only the initial hole 81 is formed by irradiating the mask forming film 85 with the laser beam but also, for example, when the substrate 7 is covered with the mask forming film 85 (mask 8), the substrate is previously formed. It is also possible to form a defect on the mask forming film 85 by arranging foreign matters in a predetermined pattern on the surface 7 and covering the mask forming film 85 thereon to make the defect the initial hole 81.

<A3> Next, as shown in FIG. 2C, the substrate 7 is etched using the mask 8 provided with the initial holes 81 to form a large number of recesses 61 on the substrate 7 (etching step). .
The etching method is not particularly limited, and examples thereof include wet etching and dry etching. In the following description, a case where wet etching is used will be described as an example.

  By performing etching (wet etching) on the substrate 7 covered with the mask 8 having the initial holes 81, the substrate 7 has openings (initial holes) of the mask 8 as shown in FIG. A large number of recesses 61 are formed on the substrate 7 by etching from the portion corresponding to. As described above, since the initial holes 81 formed in the mask 8 are arranged in a staggered pattern (in a staggered pattern), the formed recesses 61 are formed in a staggered pattern (in a staggered pattern) on the surface of the substrate 7. It will be arranged.

In the present embodiment, when the initial hole 81 is formed in the mask forming film 85 in the step <A2>, the initial recess 71 is formed on the surface of the substrate 7. Thereby, at the time of etching, the contact area with the etching solution is increased, and erosion can be suitably started.
Further, when the wet etching method is used, the concave portion 61 can be suitably formed. If, for example, an etching solution containing ammonium monohydrogen difluoride is used as the etching solution, the substrate 7 can be etched more selectively, and the recess 61 can be suitably formed.

When the mask 8 is mainly composed of Cr, a liquid containing ammonium monohydrogen difluoride is particularly suitable as the hydrofluoric acid-based etching liquid. Since the ammonium hydrogen difluoride solution is not a poisonous and deleterious substance, it can prevent the influence on the human body and the environment during work. Further, in the case where ammonium monohydrogen difluoride is used as the etching solution, the etching solution may contain, for example, hydrogen peroxide. Thereby, an etching speed can be made faster.
In addition, wet etching can be performed with a simpler apparatus than dry etching, and more substrates can be processed at one time. Thereby, productivity improves and the member 6 with a recessed part can be provided cheaply.

<A4> Next, as shown in FIG. 2D, the mask 8 is removed (mask removal step). At this time, the back surface protective film 89 is also removed together with the removal of the mask 8.
When the mask 8 is a laminated body having a layer mainly composed of Cr and a layer mainly composed of Cr oxide as described above, the removal of the mask 8 is, for example, ceric ammonium nitrate and perchlorine. The etching can be performed using a mixture containing an acid.
As described above, as shown in FIG. 2D and FIG. 1, the concave member 6 in which a large number of concave portions 61 are formed in a staggered pattern on the substrate 7 is obtained.

The method of forming the plurality of recesses 61 on the substrate 7 is not particularly limited, but the method as described above (the mask 8 is obtained by forming the initial hole 81 in the mask forming film 85 by irradiation with laser light, Thereafter, etching is performed using the mask 8 to form the recess 61 on the substrate 7), and the following effects are obtained.
That is, by forming the initial hole 81 in the mask forming film 85 by laser irradiation (obtaining the mask 8), the predetermined hole can be easily and inexpensively compared with the case where the opening is formed by a conventional photolithography method. The opening (initial hole 81) can be formed in a pattern. Thereby, productivity improves and the member 6 with a recessed part can be provided cheaply.

Further, according to the method as described above, it is possible to easily perform processing on a large substrate. In the case of manufacturing a large substrate, it is not necessary to bond a plurality of substrates as in the prior art, and the seam of bonding can be eliminated. Thereby, a high-quality and large-sized member with a concave portion (microlens substrate) can be manufactured at a low cost by a simple method.
Further, when the initial holes 81 are formed by laser irradiation, the shape, size, arrangement, and the like of the formed initial holes 81 can be managed easily and reliably.

Next, a method for manufacturing the microlens substrate (member with convex portions) 1 using the member 6 with concave portions described above will be described.
3 to 6 are schematic longitudinal sectional views showing an example of a method for manufacturing a microlens substrate (a member with a convex portion). In the following description, the lower side in FIGS. 3 to 6 is referred to as “(light) incident side”, and the upper side is referred to as “(light) emission side”.

  <B1> First, as shown in FIG. 3A, the resin 23 having fluidity (for example, the softened resin 23, unpolymerized (unpolymerized) is formed on the surface of the member 6 with recesses on which the recess 61 is formed. Uncured resin 23) is applied. At this time, a detachable jig (gripping part forming member) 69 for assisting peeling is disposed near the end of the member 6 with the recess, and the resin 23 is also supplied onto the jig 69. The

As described above, in the present invention, a resin having fluidity is provided on the surface where the concave portion of the member with the concave portion is provided and on the jig in a state where the peeling assisting jig is arranged near the edge of the member with the concave portion. It is characterized in that the material is applied. Thereby, the edge vicinity of the formed member with a convex part (board | substrate main body) can be reliably hold | gripped in the process (process which peels a member with a convex part (board | substrate main body) from the member with a concave part) mentioned later. As a result, in the step of peeling the member with the convex portion from the member with the concave portion, it is possible to effectively prevent a relatively large stress from being applied to the concave portion and the convex portion near the convex portion corresponding to the concave portion. Separation of the member with the convex portion can be started and advanced more smoothly, and defects such as chipping can be effectively prevented from occurring near the convex portion of the member with the convex portion. Moreover, the stability of the shape of the recessed part of the member with a recessed part can be made especially excellent, and durability of the member with a recessed part can be improved.
The jig 69 may be made of any material, but the adhesiveness with the resin 23 (the resin 23 solidified after being applied in a fluid state) is different from that of the member 6 with a recess. 23 or less is preferable.

Further, the surface of the jig 69 (the surface on the side to which the resin 23 is applied) may be subjected to a mold release process. Thereby, prior to the step of removing the substrate body (member with projections) 2 from the member 6 with recesses and the flat plate 11, the jig 69 is easily and reliably removed (separated) from the substrate body (members with projections) 2. can do. As the mold release treatment, a film composed of a material having releasability such as a fluorine-containing organosilicon compound, a silicone compound such as alkylpolysiloxane, a fluorine compound such as polytetrafluoroethylene, or an alkyl quaternary ammonium salt is used. Examples include formation (including the formation of a liquid coating film), surface treatment with a silylating agent such as hexamethyldisilazane ([(CH ₃ ) ₃ Si] ₂ NH), surface treatment with a fluorine-based gas, and the like.

Moreover, (the length of the peeling direction of the substrate main body 2, FIGS. 3 (a) length indicated by the middle _{L 6)} the width of the jig 69 is not particularly limited, for example, in the range of 5~100mm Is preferably 10 to 80 mm, more preferably 20 to 60 mm. When the width of the jig 69 is a value within the above range, the above-described effects are made sufficiently remarkable while preventing the ineffective lens region of the microlens substrate 1 from becoming unnecessarily large. In addition, the stability of the shape of the recess 61 is improved, and the durability of the member 6 with a recess is further improved.
Moreover, the mold release process may be performed to the surface of the side where the recess 61 of the member 6 with recess is formed. Thereby, the microlens board | substrate 1 (board | substrate main body 2) can be isolate | separated (peeled) easily and reliably from the member 6 with a recessed part in the process mentioned later.

  <B2> Next, as shown in FIG. 3B, the resin 23 provided on the member 6 with a recess and the jig 69 is pressed by the flat plate 11. As a result, the resin 23 has a shape corresponding to the substrate body (member with projections) 2. In particular, in this embodiment, the resin 23 is pressed in a state where the spacer 20 is disposed between the member 6 with a recess and the flat plate 11. Thereby, the thickness of the microlens substrate 1 to be formed can be more reliably controlled, and the focal position of the microlens 21 on the finally obtained microlens substrate 1 can be more reliably controlled. And the occurrence of inconvenience such as color unevenness can be more effectively prevented.

  The spacer 20 is made of a material having a refractive index comparable to that of the resin 23 (resin 23 after solidification). By using the spacer 20 made of such a material, the microlens substrate 1 from which the spacer 20 is obtained can be obtained even when the spacer 20 is arranged in the portion where the recess 61 of the member 6 with recess is formed. An adverse effect on optical characteristics can be effectively prevented. Thereby, it becomes possible to arrange a relatively large number of spacers 20 in a wide area of the main surface of the member 6 with recesses (the surface side where the recesses are formed). As a result, the deflection of the member 6 with recesses and the flat plate 11 is achieved. Thus, the thickness of the resulting microlens substrate 1 can be more reliably controlled.

As described above, the spacer 20 is made of a material having the same refractive index as that of the resin 23 (resin 23 after solidification). More specifically, the spacer 20 has an absolute refractive index of the constituent material of the spacer 20. The absolute value of the difference from the absolute refractive index of the resin 23 after solidification is preferably 0.20 or less, more preferably 0.10 or less, even more preferably 0.02 or less, and solidification. Most preferably, the later resin 23 and spacer 20 are made of the same material.
The shape of the spacer 20 is not particularly limited, but is preferably substantially spherical or substantially cylindrical. When the spacer 20 has such a shape, the diameter is preferably 10 to 300 μm, more preferably 30 to 200 μm, and still more preferably 30 to 170 μm.

  In addition, when using the spacer 20 as mentioned above, when solidifying the resin 23, the spacer 20 should just be distribute | arranged between the member 6 with a recessed part, and the flat plate 11, and the timing which supplies the spacer 20 is especially limited. Not. For example, the resin 23 in which the spacers 20 are dispersed in advance as the resin to be applied may be used on the surface of the member 6 with the recesses on which the recess 61 is formed, or the spacer 20 is disposed on the member 6 with the recesses The resin 23 may be applied, or the spacer 20 may be applied after the resin 23 is supplied.

The resin 23 is usually made of a material corresponding to the constituent material of the substrate body 2 as described later. Further, in the resin 23, for example, a polymerization initiator, a curing inhibitor (for example, an amine compound), a dispersion medium, a solvent, a diffusion material (for example, fine particle (bead-shaped) glass, if necessary. Silica, inorganic oxides, inorganic carbonates, inorganic sulfates, organic resins, etc.), ultraviolet absorbers, light stabilizers, surfactants, antifoaming agents, antistatic agents, antioxidants, flame retardants Etc. may be included. For example, when the resin 23 includes a diffusing material, the viewing angle characteristics can be made particularly excellent when the microlens substrate 1 is applied to a transmission screen described later. Further, even if the configuration of the diffusing plate or the like is omitted, the viewing angle characteristics can be improved. For example, the transmission screen and the rear projector can be reduced in thickness.
Moreover, the mold release process may be given to the surface on the side which presses the flat resin 23. Thereby, the microlens board | substrate 1 (board | substrate main body 2) can be isolate | separated (peeled) easily and reliably from the flat plate 11 in the process mentioned later.

<B3> Next, the resin 23 is solidified (including curing (polymerization)), and then the flat plate 11 is removed (see FIG. 3C). As a result, the substrate body 2 including the microlens 21 (particularly, the microlens 21 that satisfies the conditions such as the shape and the arrangement described above) that is made of the resin filled in the concave portion 61 and functions as a convex lens is obtained. .
When the resin 23 is solidified by curing (polymerization), examples of the method include irradiation with light such as ultraviolet rays, irradiation with electron beams, and heating.

  In addition, it is preferable that the hardness of the resin 23 after hardening is Shore D80-20, and it is more preferable that it is Shore D60-30. Since the hardness of the resin is within the above range, the member with a convex portion (substrate body 2) has sufficient hardness, and can suppress an increase in stress when peeling from the member with a concave portion 6 as a mold. The stability of the concavo-convex pattern of the substrate body 2 (shape stability) is particularly excellent.

<B4> Next, the black matrix 3 is formed on the emission side surface of the substrate body 2 manufactured as described above.
First, as shown in FIG. 3D, a positive type photopolymer 32 having a light shielding property is applied to the exit side surface of the substrate body 2. As a method for applying the photopolymer 32 to the surface of the substrate body 2, for example, various coating methods such as dip coating, doctor blade, spin coating, brush coating, spray coating, electrostatic coating, electrodeposition coating, roll coater, etc. are used. be able to. The photopolymer 32 may be composed of a resin having a light shielding property, or may be a resin material (low light shielding property) dispersed or dissolved in a light shielding material. After application of the photopolymer 32, heat treatment such as pre-baking treatment may be performed as necessary.

  <B5> Next, as shown in FIG. 4E, the substrate main body 2 is irradiated with exposure light Lb in a direction perpendicular to the incident-side surface. The irradiated exposure light Lb is condensed by passing through each microlens 21. As a result, the photopolymer 32 in the vicinity of the focal point f of the microlens 21 (at the portion where the condensed light is incident) is exposed, and the other portions of the photopolymer 32 are not exposed or the exposure amount is reduced. Only the photopolymer 32 in the vicinity of the focal point f is exposed.

  Thereafter, development is performed. Here, since the photopolymer 32 is a positive photopolymer, the photopolymer 32 in the vicinity of the exposed focal point f is dissolved and removed by development. As a result, as shown in FIG. 4F, the black matrix 3 in which the opening 31 is formed in the portion corresponding to the optical axis L of the microlens 21 is formed. The development method varies depending on the composition of the photopolymer 32 and the like, but can be performed using, for example, an alkaline solution such as a KOH aqueous solution.

Thus, in the manufacturing method of the present embodiment, the black matrix is formed by irradiating the photopolymer with the exposure light condensed by the microlens. For example, compared to using a photolithography technique, A black matrix can be formed by a simple process.
Further, after development, for example, a heat treatment such as a post-bake treatment may be performed as necessary.

<B6> Next, the substrate body (member with projections) 2 is removed from the member 6 with recesses.
First, as shown in FIG. 5G, the jig 69 is also peeled from the substrate body 2 while removing the jig 69 from the recessed member 6. Thereby, the edge part of the board | substrate body 2 will be in the same state as having peeled from the member 6 with a recessed part.
Thus, by using the jig 69, the vicinity of the end of the formed substrate body 2 can be reliably gripped. As a result, it is possible to effectively prevent a relatively large stress from being applied to the concave portions provided in the concave member 6 and the corresponding convex portions on the substrate body 2 side. ) The peeling of 2 can be started and progressed more smoothly, and it is possible to effectively prevent defects such as chipping from occurring near the convex portion (microlens 21) of the substrate body (member with convex portion) 2. Can do. Moreover, the stability of the shape of the recessed part provided in the member 6 with a recessed part can be made especially excellent, and durability of the member 6 with a recessed part can be improved.

At the time of peeling, the substrate body 2 is bent (curved) as shown in FIG.
Further, when the substrate body 2 is peeled from the member 6 with a recess, the peeling direction is the minor axis direction of the recess 61 in the member 6 with a recess (the direction indicated by the arrow in FIG. 1). Thereby, the stress concerning the member 6 with a recessed part and the board | substrate body 2 in the case of peeling can be made small, and the defect of an uneven | corrugated pattern can be prevented.

  Further, when the substrate body 2 is peeled from the member 6 with the recesses, it is preferable to peel the substrate body 2 continuously (without interruption) at a substantially constant speed. Thereby, more stable peeling is possible. In addition, if there is a break at the time of peeling (separation of peeling), the stress applied to the member 6 with a recess and the substrate body 2 increases when the peeling is resumed, and the above effects may not be sufficiently exhibited.

  Although the peeling speed is not particularly limited, for example, it is preferably 0.1 to 500 mm / second, more preferably 1 to 100 mm / second, and further preferably 10 to 50 mm / second. When the peeling speed is a value within the above range, peeling can be performed more stably. On the other hand, when the peeling speed is less than the lower limit, it takes time for peeling, which may be disadvantageous in terms of productivity. On the other hand, if the peeling rate exceeds the upper limit, stress applied to the member 6 with a recess and the substrate body 2 may increase, and the above effects may not be sufficiently exhibited.

The force (tensile strength) at the time of peeling is not particularly limited, but is preferably, for example, 5 g / cm to 1 kg / cm (width), more preferably 8 g / cm to 700 g / cm (width). It is more preferably 10 g / cm to 500 g / cm (width). When the force (tensile strength) at the time of peeling is within the above range, peeling can be performed stably. On the other hand, if the force (tensile strength) at the time of peeling is less than the lower limit, it takes time for peeling, which may be disadvantageous in terms of productivity. On the other hand, if the force (tensile strength) at the time of peeling exceeds the upper limit, stress applied to the recessed member 6 and the substrate body 2 may increase, and the above effects may not be sufficiently exhibited.
As a result, a substrate body (member with projections) 2 provided with a black matrix 3 as shown in FIG.

<B7> Thereafter, the colored liquid 22 is applied to the substrate body 2 removed from the recessed member 6 to form the colored portion 22 to obtain the microlens substrate 1 (see FIG. 6J).
The color liquid may be any, but in the present embodiment, it contains a colorant and benzyl alcohol. The present inventor has found that by using such a coloring liquid, the substrate main body can be easily and reliably colored. In particular, it is possible to easily and reliably color a substrate body made of a material that has conventionally been difficult to color, such as an acrylic resin. This is considered to be due to the following reasons.

  That is, by using a colored liquid containing benzyl alcohol, the benzyl alcohol in the colored liquid penetrates and diffuses into the substrate body, loosens the bonds (intermolecular bonds) of the molecules constituting the substrate body, and the colorant enters. To secure space for Then, by replacing the benzyl alcohol with the colorant, the colorant is held in the space (which can be compared to a seat for the colorant (colored seat)), and the substrate body is colored.

  In addition, by using the coloring liquid as described above, a colored portion having a uniform thickness can be easily and reliably formed. In particular, the substrate body (work) to be colored has a fine structure such as a microlens on its surface (one with a small period of unevenness in the two-dimensional direction), and should be colored Even if the region has a large area, a colored portion can be formed with a uniform thickness (without color unevenness).

  Examples of the method for applying the coloring liquid include various application methods such as doctor blade, spin coating, brush coating, spray coating, electrostatic coating, electrodeposition coating, textile printing, roll coater, etc., and dipping the substrate body 2 in the coloring liquid. Among these methods, dipping (particularly, dip dyeing) is preferable. Thereby, the coloring part 22 (especially coloring part 22 of uniform thickness) can be formed easily and reliably. In particular, when the coloring liquid is applied by dip dyeing, the substrate body 2 to which the coloring liquid is applied is made of a material that is difficult to be colored by a conventional method such as an acrylic resin. Even if it is a thing, it can be colored easily and reliably. This is presumably because the dye that can be used for the dip dyeing has a high affinity with the ester group (ester bond) of the acrylic resin or the like.

The step of applying the coloring liquid is preferably performed in a state where the coloring liquid and / or the substrate body 2 is set to 60 to 100 ° C. Thereby, the coloring part 22 can be efficiently formed while sufficiently preventing the occurrence of an adverse effect on the substrate body 2 on which the coloring part 22 is to be formed (for example, deterioration of the constituent materials of the substrate).
Moreover, you may perform the process of providing a coloring liquid in the state (pressurized state) which raised atmospheric pressure, for example. Thereby, the penetration | invasion into the inside of a substrate main body of a coloring liquid can be accelerated | stimulated, As a result, the coloring part 22 can be formed efficiently in a short time.

The application of the coloring liquid may be repeated a plurality of times as necessary (for example, when the thickness of the colored portion 22 to be formed is relatively large).
In addition, after the coloring liquid is applied, a heat treatment such as heating or cooling, light irradiation, or a reduced pressure of the atmosphere may be performed as necessary. Thereby, fixing (stabilization) of the colored portion 22 can be promoted.

Hereinafter, the coloring liquid used in this step will be described in more detail.
Although the content rate of the benzyl alcohol in a coloring liquid is not specifically limited, It is preferable that it is 0.01-10.0 wt%, it is more preferable that it is 0.05-8.0 wt%, 0.1-5 More preferably, it is 0.0 wt%. When the content of benzyl alcohol is a value within the above range, it is easy and more effectively preventing the occurrence of adverse effects on the substrate body on which the colored portion 22 is to be formed (for example, deterioration of the constituent materials of the substrate). The suitable coloring part 22 can be formed reliably.

  The colorant contained in the coloring liquid may be any dye or pigment, but is preferably a dye, more preferably a disperse dye and / or a cationic dye, and a disperse dye. More preferably. Thereby, it is possible to efficiently form the colored portion while sufficiently preventing an adverse effect on the substrate body on which the colored portion is to be formed (for example, deterioration of the constituent materials of the substrate). In particular, even if the substrate body 2 to which the coloring liquid is applied is made of a material that is difficult to be colored by a conventional method such as an acrylic resin, it is easily and reliably colored. be able to. This is thought to be because the colorant as described above is more easily colored because the ester group (ester bond) of the acrylic resin or the like is used as a dyeing seat.

  As described above, the coloring liquid used in this embodiment contains at least a colorant and benzyl alcohol, but further contains at least one compound selected from benzophenone compounds and benzotriazole compounds. preferable. Thereby, the colored portion can be formed more efficiently while preventing the adverse effect on the substrate body on which the colored portion is to be formed (for example, deterioration of the constituent material of the substrate) more effectively. This is considered to be due to the following reasons.

  That is, a colored liquid containing at least one compound selected from benzophenone compounds and benzotriazole compounds and benzyl alcohol (hereinafter, benzophenone compounds, benzotriazole compounds, and benzyl alcohol are collectively referred to as “additives” )), The additive in the coloring liquid penetrates and diffuses into the substrate body, loosens the bonds (intermolecular bonds) of the molecules constituting the substrate body, and creates a space for the colorant to penetrate. Secure. Then, by replacing the additive with the colorant, the colorant is held in the space (which can be compared to a seat for the colorant (colored seat)), and the substrate body is colored. This is because when benzyl alcohol is used in combination with at least one compound selected from benzophenone compounds and benzotriazole compounds, these act in a complementary manner, and the coloring with the coloring liquid is good. This is probably because of this.

As the benzophenone-based compound, a compound having a benzophenone skeleton, a tautomer thereof, or a derivative thereof (for example, an addition reaction product, a substitution reaction product, a reduction reaction product, an oxidation reaction product, or the like) is used. be able to.
Examples of such compounds include benzophenone, 2,4-dihydroxybenzophenone, 2-hydroxy-4-methoxybenzophenone, 2,2′-dihydroxy-4,4′-dimethoxybenzophenone, 2,2 ′, 4,4. Examples include '-tetrahydroxybenzophenone, 2-hydroxy-4-octylbenzophenone, 4-benzyloxy-2-hydroxybenzophenone, benzophenone anil, benzophenone oxime, and benzophenone chloride (α, α'-dichlorodiphenylmethane). Among them, a compound having a benzophenone skeleton is preferable, and 2,2′-dihydroxy-4,4′-dimethoxybenzophenone and 2,2 ′, 4,4′-tetrahydroxybenzophenone are more preferable. By using such a benzophenone-based compound, the effects as described above appear more remarkable.

The benzotriazole compounds include compounds having a benzotriazole skeleton, or tautomers thereof, or derivatives thereof (for example, addition reaction products, substitution reaction products, reduction reaction products, oxidation reaction products). Etc.) can be used.
Examples of such compounds include benzotriazole, 2- (2-hydroxy-5-methylphenyl) -2H-benzotriazole, 2- (2-hydroxy-4-octyloxyphenyl) -2H-benzotriazole, and the like. Can be mentioned. Among them, a compound having a benzotriazole skeleton is preferable, and 2- (2-hydroxy-5-methylphenyl) -2H-benzotriazole, 2- (2-hydroxy-4-octyloxyphenyl) -2H-benzotriazole Is more preferable. By using such a benzotriazole-based compound, the effects as described above appear more remarkable.

  When the colored liquid contains a benzophenone compound and / or a benzotriazole compound, the total content of the benzophenone compound and the benzotriazole compound in the colored liquid is not particularly limited, but is 0.001 to 10. It is preferably 0 wt%, more preferably 0.005 to 5.0 wt%, and still more preferably 0.01 to 3.0 wt%. When the sum of the content ratios of the benzophenone compound and the benzotriazole compound is within the above range, an adverse effect on the substrate body on which the colored portion 22 is to be formed (for example, deterioration of the constituent materials of the substrate) is more effective. Therefore, the suitable colored portion 22 can be formed easily and reliably.

  Further, when the colored liquid contains a benzophenone compound and / or a benzotriazole compound, the content ratio of benzyl alcohol in the colored liquid is X [wt%], the content ratio of the benzophenone compound and the benzotriazole compound. When the total is Y [wt%], it is preferable to satisfy the relationship of 0.001 ≦ X / Y ≦ 10000, more preferable to satisfy the relationship of 0.05 ≦ X / Y ≦ 1000, and More preferably, the relationship of 25 ≦ X / Y ≦ 500 is satisfied. By satisfying the relationship as described above, the synergistic effect by using the benzophenone compound and / or the benzotriazole compound in combination with benzyl alcohol is more remarkably exhibited, and the substrate main body on which the colored portion 22 is to be formed. The preferred colored portion 22 can be formed easily and reliably while preventing the occurrence of adverse effects (for example, deterioration of the constituent materials of the substrate) more effectively.

  Further, the coloring liquid preferably further contains a surfactant. Thus, the coloring agent can be stably and uniformly dispersed even in the presence of benzyl alcohol, and the substrate body 2 to which the coloring liquid is applied is colored by a conventional method such as an acrylic resin. Even those composed of materials that are difficult to do can be easily and reliably colored. Examples of the surfactant include nonionic (nonionic), anionic surfactant, cationic surfactant, and amphoteric surfactant. Nonionic (nonionic) surfactants include, for example, ether surfactants, ester surfactants, ether ester surfactants, nitrogen-containing surfactants, and more specifically, , Polyvinyl alcohol, carboxymethyl cellulose, polyethylene glycol, acrylic acid ester, methacrylic acid ester and the like. Examples of the anionic surfactant include various rosins, various carboxylates, various sulfates, various sulfonates, various phosphates, etc. More specifically, gum rosin, polymerized rosin , Heterogenized rosin, maleated rosin, fumarized rosin, maleated rosin pentaester, maleated rosin glycerin ester, tristearate (for example, metal salt such as aluminum salt), distearate (for example, aluminum salt) , Metal salts such as barium salts), stearates (eg, metal salts such as calcium salts, lead salts, zinc salts), linolenate salts (eg, cobalt salts, manganese salts, lead salts, zinc salts, etc.) Metal salts, etc.), octanoates (eg, metal salts such as aluminum salts, calcium salts, cobalt salts, etc.), oleates (examples) Metal salts such as calcium salts and cobalt salts), palmitates (eg, metal salts such as zinc salts), naphthenates (eg, calcium salts, cobalt salts, manganese salts, lead salts, zinc salts, etc.) Metal salts, etc.), resinates (eg, metal salts such as calcium salt, cobalt salt, manganese lead salt, zinc salt etc.), polyacrylates (eg metal salts such as sodium salt, etc.), polymethacrylic acid Salt (for example, metal salt such as sodium salt), polymaleate (for example, metal salt such as sodium salt), acrylic acid-maleic acid copolymer salt (for example, metal salt such as sodium salt), cellulose , Dodecylbenzene sulfonate (eg, sodium salt), alkyl sulfonate, polystyrene sulfonate (eg, metal salt such as sodium salt), alkyl diphenyl ester, etc. Terujisuruhon salts (e.g., metal salts such as sodium salt), and the like. Examples of the cationic surfactant include various ammonium salts such as a primary ammonium salt, a secondary ammonium salt, a tertiary ammonium salt, and a quaternary ammonium salt. More specifically, (mono) Examples thereof include alkylamine salts, dialkylamine salts, trialkylamine salts, tetraalkylamine salts, benzalkonium salts, alkylpyridium salts, imidazolinium salts, and the like. Examples of amphoteric surfactants include various betaines such as carboxybetaine and sulfobetaine, various aminocarboxylic acids, and various phosphate esters.

Next, 2nd Embodiment of the manufacturing method of the member with a convex part of this invention is described.
Hereinafter, although 2nd Embodiment of the manufacturing method of the manufacturing method of the member with a convex part of this invention is described, it demonstrates centering around difference with embodiment mentioned above, The description is abbreviate | omitted about the same matter.
First, the member with a recessed part (member with a recessed part for microlens substrate manufacture) used with the manufacturing method of this embodiment and its manufacturing method are demonstrated.

  FIG. 7 is a schematic plan view showing a second embodiment of the member with recesses used for manufacturing the microlens substrate, and FIG. 8A is a partially enlarged view of the member with recesses shown in FIG. (B) is a schematic longitudinal cross-sectional view. 9 and 10 are schematic longitudinal sectional views showing a method for manufacturing the member with recesses shown in FIGS. In the manufacture of the member with recesses, a large number of recesses are actually formed on the substrate, and in the manufacture of the microlens substrate, a large number of protrusions are actually formed on the substrate. To make it easier to understand, a part of it is highlighted.

First, the structure of the member with a concave part (member with a concave part for microlens substrate manufacture) used for manufacture of a microlens substrate (member with a convex part) is demonstrated.
In the member with concave portion (member with concave portion for manufacturing the microlens substrate) 6 ′ of the present embodiment, outside the first region 67 corresponding to the effective lens region of the microlens substrate 1 (the first region in the member 6 with the concave portion). It has the 2nd area | region 68 in which the recessed part (2nd recessed part) 62 was provided in 67 (1st recessed part) the edge part side where the jig | tool 69 is arrange | positioned. That is, the member 6 ′ with a recess according to this embodiment has a recess (second recess) 62 in addition to the recess (first recess) 61, and the member 6 with a recess according to the first embodiment. It is the same.

  Thus, by providing the recess 62 (second region 68) outside the first region 67 corresponding to the effective region of the microlens substrate 1, the vicinity of the recess 61 of the member 6 ′ with recesses or the like is manufactured. The occurrence of defects such as chipping near the microlens (convex portion) 21 of the microlens substrate (member with convex portion) 1 can be more effectively prevented, particularly when the member with concave portions is used repeatedly. Even if it exists, it can prevent effectively that the above problems generate | occur | produce. This is considered to be due to the following reasons. That is, when peeling a member with a convex part from a member with a concave part, the stress applied to the member with a concave part and the member with a convex part is an initial stage of peeling (more specifically, a plurality of concave parts and convex parts corresponding thereto) In the combination of (2), it becomes larger at the stage where the peeling of the combination peeled at the initial stage proceeds), and once the peeling (peeling between the concave portion and the convex portion formed in the concave portion) proceeds once. Then, by providing a recess (second recess) outside the region (first region) where the recess (first recess) corresponding to the projection to be formed is provided, the stress at the time of peeling. Can be efficiently absorbed in the concave portion (near the second concave portion), and as a result, the vicinity of the concave portion of the member with the concave portion and the convex portion of the manufactured convex portion member (the convex portion to be formed) It is considered that the occurrence of defects such as cracks can be more effectively prevented. In particular, the effect of using the first recess (first region) and the second recess (second region) together, and the effect of using the jig as described above (the jig as described above). Thus, the effect of forming the gripping portion when the member with the convex portion is peeled) synergistically works, and a particularly excellent effect is obtained.

  Further, by providing the second recess 62 (second region 68), it is possible to stably perform the peeling with a relatively small force, and to increase the life of the member 6 ′ having the recess. it can. Moreover, by using the member 6 ′ having the recesses, the microlens substrate 1 (substrate body 2) can be stably manufactured, and productivity can be improved. And the microlens substrate (member with convex part) 1 manufactured using the member 6 'with concave part is more effectively prevented from defects such as chipping of the concave / convex pattern, and particularly excellent quality (particularly excellent optical characteristics). It will have. Moreover, the productivity of the microlens substrate 1 can be improved.

(Unit number per area when the member with concave portions 6 'viewed in plan) d ₂ density of the second recess 62 in the second region 68 is not particularly limited, the first recess in the first region 67 It is preferably shallower than a density of 61. Thereby, in the manufacture of the microlens substrate 1 (substrate body 2) as a member with convex portions, when the member with convex portions (substrate body 2) is peeled from the member 6 'with concave portions, the member 6' with concave portions, It is possible to more effectively prevent defects such as chipping from occurring in the formed microlens 21.

Specific value of the density of the second recess 62 in the second region 68 is not particularly limited, but is preferably 1,000 to 500,000 pieces / cm ^2, is 5,000 to 200,000 pieces / cm ² of Is more preferably 10,000 to 100,000 pieces / cm ² . As a result, the effects as described above can be exhibited more significantly, the stability of the shape of the second recess 62 is also improved, and the durability of the member 6 ′ with recesses is particularly excellent. .

When the density of the first recesses 61 in the first region 67 is d ₁ [pieces / cm ² ] and the density of the second recesses 62 in the second region 68 is d ₂ [pieces / cm ² ]. , Preferably 0.01 ≦ d ₂ / d ₁ ≦ 100, more preferably 0.05 ≦ d ₂ / d ₁ ≦ 50, and 0.1 ≦ d ₂ / d. More preferably, the relationship ₁ ≦ 10 is satisfied. By satisfying such a relationship, the above-described effects can be exhibited more remarkably, the stability of the shape of the second recess 62 is also improved, and the durability of the member 6 ′ with recesses is improved. Is particularly excellent.

  Further, in the present embodiment, the second concave portion is the second concave portion from the side where the first concave portion 61 is formed (the first region 67 side) toward the end of the member 6 ′ having the concave portion. The density of the recessed part 62 is provided so that it may become gradually sparse. As a result, the effects as described above can be exhibited more significantly, the stability of the shape of the second recess 62 is also improved, and the durability of the member 6 ′ with recesses is particularly excellent. .

  The depth of the second recess 62 is preferably shallower than the depth of the first recess 61. Thereby, in the manufacture of the microlens substrate 1 (substrate body 2) as a member with convex portions, when the member with convex portions (substrate body 2) is peeled from the member 6 'with concave portions, the member 6' with concave portions, It is possible to more effectively prevent the formation of defects such as chipping in the formed microlens 21.

  Although the specific value of the depth of the 2nd recessed part 62 is not specifically limited, It is preferable that it is 5-400 micrometers, It is more preferable that it is 15-150 micrometers, It is further more preferable that it is 25-50 micrometers. When the depth of the second concave portion 62 is a value within the above range, in the manufacture of the microlens substrate 1 (substrate body 2) as the member with convex portions, the member with convex portions (substrate body 2) is a member with concave portions. When peeling from 6 ', it can prevent more effectively that defects, such as a chip | tip, arise in the member 6' with a recessed part and the micro lens 21 formed.

Further, when the depth of the first recess 61 is D ₁ [μm] and the depth of the second recess 62 is D ₂ [μm], the relationship of 3 ≦ D ₁ −D ₂ ≦ 495 is satisfied. It is more preferable that the relationship 5 ≦ D ₁ −D ₂ ≦ 200 is satisfied, and it is more preferable that the relationship 10 ≦ D ₁ −D ₂ ≦ 50 is satisfied. By satisfying such a relationship, in the production of the microlens substrate 1 (substrate body 2) as a member with a convex portion, when peeling the member with a convex portion (substrate body 2) from the member 6 'with a concave portion, It is possible to more effectively prevent defects such as chipping from occurring in the member 6 ′ having a recess and the formed microlens 21.

  In the present embodiment, the second recess 62 is smaller than the first recess 61 in a plan view (a size in a plan view of the recessed member 6 ′). Thus, since the 2nd recessed part 62 is smaller than the 1st recessed part 61, the stress concerning member 6 'with a recessed part and the board | substrate body 2 is efficiently absorbed in the 2nd recessed part 62 vicinity at the time of peeling. Thus, the above-described effects can be exhibited more significantly. Further, if the size of the second recess 62 is relatively shallow, the stress related to the vicinity of the second recess 62 can be reduced. Therefore, the stability of the shape of the member 6 ′ with recesses (particularly in the vicinity of the second recess 62) can be made particularly excellent. As a result, the durability of the member 6 ′ with recesses is particularly excellent. can do. Also, the productivity of the microlens substrate 1 is improved.

The shape of the second recess 62 (the shape obtained by planarly viewing the member 6 ′ having the recess) is not particularly limited. Examples include a flat shape larger than the vertical width.
The number of the second recesses 62 in the second region 68 is not particularly limited, but when the second recesses 62 are provided in a row (rows substantially perpendicular to the peeling direction), The two recesses 62 are preferably provided in about 10 to 50,000 rows, more preferably about 500 to 10,000 rows, and still more preferably about 2000 to 5000 rows. Thereby, while preventing the ineffective lens region of the microlens substrate 1 from becoming unnecessarily large, the above-described effects can be exhibited sufficiently and the shape of the second recess 62 is improved. Stability is also improved, and the durability of the recessed member 6 ′ is particularly excellent.

  Moreover, when the 2nd recessed part 62 is provided in the shape of a row | line | column (row shape substantially perpendicular | vertical with respect to the peeling direction), the pitch (average) of an adjacent row | line | column is not specifically limited, For example, 20 It is preferable that it is -1000 micrometers, It is more preferable that it is 30-700 micrometers, It is further more preferable that it is 50-500 micrometers. When the pitch of adjacent rows is a value within the above range, the above-described effect can be exhibited more significantly, and the shape stability of the second recess 62 is improved, and a member with a recess. The durability of 6 'is particularly excellent.

The length of the peeling direction of the second region 68 (length shown in FIG. 7 _{L 5)} is not particularly limited, for example, it is preferably from 20 to 500 [mu] m, more preferably from 30~350μm 50 to 200 μm is more preferable. When the length of the second region 68 in the peeling direction is a value within the above range, the above-described effects can be sufficiently obtained while preventing the ineffective lens region of the microlens substrate 1 from becoming unnecessarily large. While being able to exhibit as a remarkable thing, durability of member 6 'with a recessed part can be made especially excellent.

  As described above, when the microlens substrate (member with convex portion) 1 is peeled from the member with concave portion (member with concave portion for manufacturing the microlens substrate) 6 ′, stress applied to the member is absorbed in the vicinity of the second concave portion 62. Thus, the concavo-convex pattern is prevented from being destroyed in the formation region of the first concave portion 61 and the microlens 21. Accordingly, the recessed member 6 'has a long life and excellent handling properties.

  Furthermore, by using the member 6 'with concave portions as a mold, it is possible to effectively prevent the occurrence of irregularities and variations, and the microlens substrate (members with convex portions) having an excellent optical characteristic in which the concave / convex pattern is faithfully transferred. ) 1 can be obtained. In addition, the transmissive screen and the rear projector provided with such a microlens substrate (member with projections) 1 can stably display a high-quality image.

Next, the manufacturing method of member 6 'with a recessed part is demonstrated, referring FIG. 9, FIG. In practice, a large number of recesses are formed on the substrate. However, for the sake of easy understanding, a part of the recess is shown here.
<A1 ′> First, similarly to the above-described embodiment, the substrate 7 is prepared, and the substrate 7 is covered with the mask forming film 85 and the back surface protective film 89 (see FIG. 9A).

<A2 ′> Next, as shown in FIG. 9B, the mask forming film 85 has a plurality of initial holes (first initial holes) 81 and a plurality of holes serving as mask openings at the time of etching. An initial hole (second initial hole) 82 is formed to form the mask 8 (initial hole forming step).
A method for forming the first initial hole 81 and the second initial hole 82 is not particularly limited, but it is preferable to use a method of laser light irradiation as in the above-described embodiment. Thereby, the first initial holes 81 and the second initial holes 82 having a desired shape arranged in a desired pattern can be easily and accurately formed. As a result, the shape, arrangement method, density, and the like of the recesses (first recess 61 and second recess 62) can be controlled more reliably. Further, by forming the first initial hole 81 and the second initial hole 82 by laser irradiation, the recessed member 6 ′ can be manufactured with high productivity. In particular, the concave portion can be easily formed even on a large-area substrate. Further, when forming the initial holes (the first initial hole 81 and the second initial hole 82) by laser light irradiation, the initial recesses (particularly in the second initial holes 82) are controlled by controlling the irradiation conditions. An initial hole (first initial hole 81, second initial hole 82) can be formed without forming an initial recess in the corresponding part, or an initial hole (first initial hole 81, second initial hole 82). ) And an initial recess (initial recess 71) with small variations in shape, size, and depth can be easily and reliably formed. In addition, by forming initial holes (first initial holes 81 and second initial holes 82) in the mask forming film 85 by laser light irradiation, an opening is formed by a conventional photolithography method. Compared to the above, openings (the first initial hole 81 and the second initial hole 82) can be formed in the mask forming film 85 easily and inexpensively.

Usually, in this step, the first initial holes 81 and the second initial holes 82 are formed with a density and an arrangement pattern corresponding to the first recess 61 and the second recess 62, respectively.
Further, when the first initial hole 81 and the second initial hole 82 are formed in the mask forming film 85, as shown in FIG. 9B, not only the mask forming film 85 but also the surface of the substrate 7 is formed. The initial recess 71 may be formed by removing the portion at the same time. As a result, the area of contact with the etchant when etching is increased, and erosion can be suitably started. Further, by adjusting the depth of the initial recess 71, the depth of the first recess 61 (maximum thickness of the lens) and the depth of the second recess 62 can be adjusted. In particular, in the present embodiment, as shown in the drawing, the initial recess 71 is formed only in the portion corresponding to the first recess 61 (first initial hole 81), and the second recess 62 (second initial hole). No initial recess is formed only in the portion corresponding to 82). As a result, the difference between the depth of the first recess 61 and the depth of the second recess 62 can be easily and reliably made relatively large. The formation and non-formation of such initial recesses can be easily and reliably managed by controlling the laser light irradiation conditions.
Further, not only the first initial hole 81 and the second initial hole 82 are formed by irradiating the formed mask 8 with laser light, but, for example, when the mask 8 is formed on the substrate 7, 7, foreign matters are arranged in a predetermined pattern, and a mask 8 is formed thereon, whereby a defect is positively formed in the mask 8, and the defect is first and second initial holes 81 and 82. It is good.

  In the illustrated configuration, the initial concave portion is described as being formed only in a portion corresponding to the first concave portion (first initial hole). However, the initial concave portion corresponds to the second concave portion (second initial hole). An initial recess may also be formed in the part. In such a case, the depth of the initial concave portion of the portion corresponding to the first concave portion (first initial hole) and the initial concave portion of the portion corresponding to the second concave portion (second initial hole), The shape or the like may be different. For example, the depth of the initial concave portion at the portion corresponding to the second concave portion may be shallower than the depth of the initial concave portion at the portion corresponding to the first concave portion.

<A3 ′> Next, as shown in FIG. 9C, the region where the second initial hole 82 is provided on the mask 8 (the region corresponding to the second region 68) has etching resistance. A seal member (tape) 88 is brought into close contact (attached).
<A4 ′> Next, etching (wet etching) is performed on the mask 8 in which the first initial holes 81 and the second initial holes 82 are formed, and the substrate 7 covered with the seal member 88. As a result, as shown in FIG. 9D, the etching proceeds at the portion corresponding to the first initial hole 81 of the substrate 7, and the portion covered with the seal member 88 is not etched.
Then, the seal member 88 is removed during the etching. As a result, the etching is started also at the portion corresponding to the second initial hole 82 of the substrate 7 covered with the seal member 88, and as shown in FIG. 61 and a second recess 62 having a depth shallower than that of the first recess 61 are formed.

<A5 ′> Thereafter, similarly to the above-described embodiment, the mask 8 and the back surface protective film 89 are removed, whereby the member 6 ′ with a recess in which the first recess 61 and the second recess 62 are formed. Is obtained (see FIG. 10F).
In the above description, the first concave portion 61 and the second concave portion 62 having different depths and sizes are formed by etching using the seal member 88, but the first concave portion 61, The formation method of the 2nd recessed part 62 is not limited to this. For example, in the step of forming the initial hole as described above, the spot diameter of the laser beam and the irradiation intensity are different at the portions corresponding to the first recess 61 and the second recess 62, thereby Such a 1st recessed part 61 and the 2nd recessed part 62 can be formed suitably.

Next, the manufacturing method of the microlens substrate (member with a convex part) 1 using member 6 'with a recessed part as mentioned above is demonstrated.
11 to 14 are schematic longitudinal sectional views showing a method for manufacturing a microlens substrate using the member with concave portions shown in FIGS. 7 and 8. In the following description, the lower side in FIGS. 11 to 14 is referred to as “(light) incident side” and the upper side is referred to as “(light) emission side”.

<B1 ′> First, in the same manner as in the above-described embodiment, on the surface of the member 6 ′ with recesses on the side where the recesses (the first recess 61 and the second recess 62) are formed, and on the jig 69. The resin 23 in a fluid state (for example, a softened resin 23, an unpolymerized (uncured) resin 23) is applied to the resin 23, and the resin 23 is pressed by the flat plate 11 (see FIG. 11A).
<B2 ′> Next, in the same manner as in the above-described embodiment, the resin 23 is solidified (including curing (polymerization)), and then the flat plate 11 is removed (see FIG. 11B). Accordingly, the substrate body 2 including the microlens 21 (particularly, the microlens 21 that satisfies the conditions such as the shape and the arrangement described above) that is configured by the resin filled in the first concave portion 61 and functions as a convex lens. Is obtained. As the resin 23 is solidified, a convex portion corresponding to the second concave portion 62 is formed together with the microlens 21. This convex portion may be removed from the final microlens substrate 1. Moreover, you may have a function as a lens.

<B3 ′> Next, the black matrix 3 is formed on the emission side surface of the substrate body 2 manufactured as described above in the same manner as in the above-described embodiment (FIGS. 11C and 12D). ) And FIG. 12 (e)).
<B4 ′> Next, in the same manner as in the above-described embodiment, the substrate body (member with protrusions) 2 is removed from the member 6 ′ with recesses (FIG. 13 (f), FIG. 13 (g), FIG. h)).
In particular, in this embodiment, since the member 6 with a recess has the second recess 62 in addition to the recess (first recess) 61 corresponding to the microlens 21, the second recess 62 and the The stress can be efficiently relaxed in the vicinity of the corresponding convex portion on the substrate body 2 side, and it is effective that a relatively large stress is applied in the vicinity of the first concave portion 61 and the microlens 21 corresponding thereto. It is possible to prevent the substrate main body (member with projections) 2 from being peeled off and started more smoothly with a relatively small force.
As a result, the substrate body (member with projections) 2 provided with the black matrix 3 as shown in FIG.
<B5 ′> Thereafter, in the same manner as in the above-described embodiment, the colored portion 22 is formed by applying a coloring liquid to the substrate body 2 removed from the recessed member 6 ′, and the microlens substrate 1 is formed. (See FIG. 14 (i)).

Next, the structure of a microlens substrate (a member with a convex part) and a transmission screen manufactured by applying the present invention will be described.
FIG. 15 is a schematic longitudinal sectional view showing a preferred embodiment of the microlens substrate (member with convex portions) of the present invention, FIG. 16 is a plan view of the microlens substrate shown in FIG. 15, and FIG. 16 is a schematic longitudinal sectional view showing a preferred embodiment of the transmission screen of the present invention including the microlens substrate shown in FIG. In the following description, the left side in FIGS. 15 and 17 is referred to as “(light) incident side”, and the right side is referred to as “(light) emission side”. In the present invention, unless otherwise specified, the “(light) incident side” and the “(light) output side” are the “incident side” of light for obtaining image light (video light), respectively. ”And“ outgoing side ”, not“ incident side ”or“ outgoing side ”of external light or the like.

  A microlens substrate (a member with convex portions) 1 is a member constituting a transmissive screen 10 to be described later. As shown in FIG. 15, a plurality of microlenses (convex portions) 21 arranged in a predetermined pattern are arranged. A substrate body 2 provided and a black matrix (light shielding layer) 3 made of a material having a light shielding property are provided. A colored portion (external light absorbing portion) 22 is provided on the light incident side of the microlens substrate 1 (that is, the light incident side of the microlens 21).

The substrate body 2 is usually made of a transparent material.
The constituent material of the substrate body 2 is not particularly limited, but is mainly composed of a resin material and is composed of a transparent material having a predetermined refractive index.
Specific examples of the constituent material of the substrate body 2 include polyolefins such as polyethylene, polypropylene, ethylene-propylene copolymer, ethylene-vinyl acetate copolymer (EVA), cyclic polyolefin, modified polyolefin, polyvinyl chloride, poly Vinylidene chloride, polystyrene, polyamide (eg, nylon 6, nylon 46, nylon 66, nylon 610, nylon 612, nylon 11, nylon 12, nylon 6-12, nylon 6-66), polyimide, polyamideimide, polycarbonate (PC) , Poly- (4-methylpentene-1), ionomer, acrylic resin, acrylonitrile-butadiene-styrene copolymer (ABS resin), acrylonitrile-styrene copolymer (AS resin), butadiene-styrene copolymer Polyoxymethylene, polyvinyl alcohol (PVA), ethylene-vinyl alcohol copolymer (EVOH), polyethylene terephthalate (PET), polybutylene terephthalate (PBT), polyester such as polycyclohexane terephthalate (PCT), polyether, polyether ketone (PEK), polyether ether ketone (PEEK), polyether imide, polyacetal (POM), polyphenylene oxide, modified polyphenylene oxide, polysulfone, polyether sulfone, polyphenylene sulfide, polyarylate, aromatic polyester (liquid crystal polymer), poly Tetrafluoroethylene, polyvinylidene fluoride, other fluororesins, styrene, polyolefin, polyvinyl chloride, polyurea Various polyesters, polyesters, polyamides, polybutadienes, transpolyisoprenes, fluororubbers, chlorinated polyethylenes, and other thermoplastic elastomers, epoxy resins, phenol resins, urea resins, melamine resins, unsaturated polyesters, silicones Resins, urethane resins, etc., or copolymers, blends, polymer alloys, etc. mainly composed of these, are mentioned, and one or more of these are combined (for example, blend resins, polymer alloys, laminates) As body etc.).

  The resin material constituting the substrate body 2 generally has a larger absolute refractive index than various gases (the atmosphere in which the microlens substrate 1 is used), but the specific value of the absolute refractive index is 1.2 to It is preferably 1.9, more preferably 1.35 to 1.75, and even more preferably 1.45 to 1.60. When the absolute refractive index of the resin material is a value within the above range, the viewing angle characteristics can be made particularly excellent while making the utilization efficiency of light (incident light) particularly excellent.

The microlens substrate 1 includes a plurality of microlenses 21 as convex lenses having a convex surface on the light incident surface side.
The microlens 21 has a shape corresponding to the concave portion 61 constituting the concave portion member (microlens substrate manufacturing concave portion member) 6 and is arranged in a manner corresponding to the arrangement manner of the concave portion 61. These microlenses 21 are generally substantially the same as the concave portions 61 (the same as the convex portions with respect to the concave portions and the same except for the transferred shape and positional relationship). Has a method.

  More specifically, the microlens (convex portion) 21 has a substantially oval shape (however, a flat shape or a substantially bowl shape) in which the vertical width when the microlens substrate (member with convex portion) 1 is viewed in plan is larger than the horizontal width. And a shape obtained by cutting the upper and lower sides of a substantially circle). When the microlens 21 has such a shape, it is possible to make the viewing angle characteristics particularly excellent while effectively preventing the occurrence of inconvenience such as moire. In particular, both the horizontal and vertical viewing angle characteristics can be improved.

The length (pitch) in the minor axis direction (lateral direction) of the microlens 21 when viewed in plan is L ₁ [μm], and the length (pitch) in the major axis direction (vertical direction) is L ₂ [μm]. When satisfying the relationship of 0.001 ≦ L ₁ / L ₂ ≦ 0.99, it is more preferable to satisfy the relationship of 0.1 ≦ L ₁ / L ₂ ≦ 0.99, 0.5 It is more preferable that the relationship of ≦ L ₁ / L ₂ ≦ 0.95 is satisfied, and it is most preferable that the relationship of 0.6 ≦ L ₁ / L ₂ ≦ 0.8 is satisfied. By satisfying the relationship as described above, the effects as described above become more remarkable.

  The length (pitch) in the minor axis direction of the microlens 21 when viewed in plan is preferably 2 to 500 μm, more preferably 20 to 300 μm, and even more preferably 30 to 100 μm. When the length of the microlens 21 in the short axis direction is a value within the above range, it is possible to obtain sufficient resolution in the image projected on the screen while effectively preventing the occurrence of inconvenience such as moire. The productivity of the microlens substrate 1 (transmission type screen 10) can be further increased.

  Further, the length (pitch) in the major axis direction of the microlens 21 when viewed in plan is preferably 5 to 750 μm, more preferably 25 to 500 μm, and even more preferably 50 to 150 μm. . When the length of the microlens 21 in the short axis direction is a value within the above range, it is possible to obtain sufficient resolution in the image projected on the screen while effectively preventing the occurrence of inconvenience such as moire. The productivity of the microlens substrate 1 (transmission type screen 10) can be further increased.

  Further, the radius of curvature of the microlens 21 in the minor axis direction (hereinafter also simply referred to as “the radius of curvature of the microlens 21”) is preferably 5 to 250 μm, more preferably 15 to 150 μm, More preferably, it is 25-50 micrometers. When the radius of curvature of the microlens 21 is a value within the above range, the viewing angle characteristics can be made particularly excellent. In particular, both the horizontal and vertical viewing angle characteristics can be improved.

  The height of the microlens 21 is not particularly limited, but is preferably 5 to 750 μm, more preferably 10 to 450 μm, and still more preferably 15 to 150 μm. When the height of the microlens 21 is within the above range, the viewing angle characteristics can be made particularly excellent. In particular, both the horizontal and vertical viewing angle characteristics can be improved.

Further, when the height of the micro lens 21 is H [μm] and the length of the micro lens 21 in the short axis direction is L ₁ [μm], the relationship of 0.90 ≦ L ₁ /H≦1.40 is satisfied. It is preferable that the relationship 0.95 ≦ L ₁ /H≦1.2 is satisfied, and it is more preferable that the relationship 1.0 ≦ L ₁ /H≦1.1 is satisfied. By satisfying such a relationship, it is possible to make the viewing angle characteristics particularly excellent while effectively preventing the occurrence of moire due to light interference.

Further, the density (number per unit area when the microlens substrate 1 is viewed in plan view) of the microlens 21 in the effective lens region (the region corresponding to the first region 68 described above) provided with the microlens 21 is: Although not particularly limited, it is preferably 1 to 4 million pieces / cm ² , more preferably 5000 to 200,000 pieces / cm ² , and further preferably 10,000 to 100,000 pieces / cm ² . When the density of the microlenses 21 is a value within the above range, an image with sufficiently high resolution can be obtained on the microlens substrate 1.

  The plurality of microlenses 21 are arranged in a staggered pattern. By arranging the microlenses 21 in this way, it is possible to effectively prevent inconveniences such as moire. On the other hand, for example, if the microlenses are arranged in a square lattice or the like, it is difficult to sufficiently prevent the occurrence of inconvenience such as moire. In addition, when the microlenses are randomly arranged, it becomes difficult to sufficiently increase the microlens occupancy ratio in the effective area where the microlenses are formed, and the light transmittance (light utilization efficiency) of the microlens substrate is reduced. It will be difficult to raise it sufficiently, and the resulting image will be dark.

  As described above, in the present embodiment, the microlenses 21 are arranged in a staggered pattern when the microlens substrate 1 is viewed in plan view. However, the first row includes a plurality of microlenses 21. 25 and the adjacent second row 26 are preferably offset by a half pitch in the lateral direction. As a result, it is possible to more effectively prevent the occurrence of moire due to light interference and to make the viewing angle characteristics particularly excellent.

As described above, by strictly defining the shape, arrangement method, occupation ratio, etc. of the microlenses (convex parts), the viewing angle characteristics are particularly excellent while effectively preventing the occurrence of moire due to light interference. Can be.
Each microlens 21 is formed as a convex lens protruding to the incident side, and is designed so that the focal point f is located in the vicinity of the opening 31 provided in the black matrix (light shielding layer) 3. That is, parallel light La (parallel light La from a Fresnel lens portion 5 described later) incident on the microlens substrate 1 from a substantially perpendicular direction is condensed by each microlens 21 of the microlens substrate 1 and is black. A focal point f is formed in the vicinity of the opening 31 of the matrix 3. As described above, the microlens 21 is focused in the vicinity of the opening 31 of the black matrix 3 so that the light utilization efficiency can be made particularly excellent. In addition, since the microlens 21 is focused in the vicinity of the opening 31, the area of the opening 31 can be reduced. That is, the ratio of the area covered with the black matrix 3 (region other than the opening 31) when the microlens substrate 1 is viewed in plan can be increased. As a result, the contrast of an image formed by light transmitted through the microlens substrate can be made particularly excellent.

Further, when the microlens substrate 1 is viewed in plan from the light incident surface side (direction shown in FIG. 16), the occupation ratio of the microlens 21 is 90% in the effective lens region where the microlens 21 is formed. Preferably, it is 96% or more, more preferably 97 to 99.5%. When the occupation ratio of the microlens 21 is 90% or more, the straight light passing through other than the microlens 21 can be further reduced, and the light utilization efficiency can be further improved. Note that the occupation ratio of the microlens 21 is the center (the center of the top) 211 of the microlens 21 when viewed in plan and the central portion of the portion adjacent to the microlens 21 where the microlens 21 is not formed. In the line segment to be connected, the ratio of the length L ₃ [μm] of the portion where the microlens 21 is formed to the length L ₄ [μm] of the line segment (L ₃ / L ₄ × 100 [%]) (See FIG. 16).

  Further, as described above, the colored portion 22 is provided on the light incident side of the microlens substrate 1 (that is, the light incident side of the microlens 21). The coloring unit 22 can sufficiently transmit light incident from the incident side, and external light (for example, external light incident unintentionally from the light emitting side or the like) is reflected on the emission side. It has a function to prevent. By having such a colored portion, an image having excellent contrast can be obtained.

  In particular, in the present embodiment, the colored portion 22 is formed by applying a colored liquid (particularly, a colored liquid having a characteristic in composition) to the substrate body 2 as described above. When the colored portion 22 is formed in this manner, the adhesion of the colored layer is higher than when the colored layer is laminated (externally attached) on the substrate body. As a result, for example, it is possible to more reliably prevent an adverse effect on the optical characteristics of the microlens substrate due to a change in refractive index near the interface.

In addition, since the colored portion 22 is formed by applying a coloring liquid to the substrate body 2, variations in thickness at each portion (particularly, variations in thickness not corresponding to the surface shape of the substrate body). Is small. As a result, it is possible to more reliably prevent inconvenience such as color unevenness in the projected image.
Moreover, although the coloring part 22 is comprised with the material containing a coloring agent, the main component is the same as the main component of the board | substrate body 2 (micro lens 21) normally. Therefore, it is difficult for a sudden change in refractive index or the like near the boundary between the colored portion 22 and the other non-colored portion. Accordingly, it is easy to design the optical characteristics of the microlens substrate 1 as a whole, and the optical characteristics of the microlens substrate 1 are stable and highly reliable.

  The concentration of the colored portion 22 is not particularly limited, but it is preferably 20 to 85%, more preferably 35 to 70% in terms of a Y value (D65 / 2 ° field of view) based on the spectral transmittance. More preferably, it is ˜70%. When the density of the colored portion 22 is within the above range, the contrast of an image formed by light transmitted through the microlens substrate can be made particularly excellent. On the other hand, if the density of the colored portion 22 is less than the lower limit, the transmittance of incident light is reduced, and sufficient luminance cannot be obtained in the obtained image, resulting in insufficient image contrast. there is a possibility. Further, if the density of the colored portion 22 exceeds the upper limit, it becomes difficult to sufficiently prevent reflection of external light (external light incident from the side opposite to the light incident side), and the entire light source is turned on in the bright room. When the light is turned off, the amount of increase in the surface brightness of black display (black brightness) becomes large, so that the effect of improving the contrast of the image may not be sufficiently obtained.

  The color of the colored portion 22 is not particularly limited, but a colorant based on blue, mixed with red, brown, or yellow is used. The appearance is achromatic and black, and the balance of the three primary colors of the light from the light source is controlled. It is preferable to selectively absorb or transmit light having a specific wavelength. As a result, reflection of external light is prevented, the color tone of the image formed by the light transmitted through the microlens substrate is accurately expressed, color coordinates are wide (the range of color tone expression is sufficiently wide), and deeper Since black can be expressed, the contrast can be made particularly excellent as a result.

Further, a black matrix 3 is provided on the surface of the microlens substrate 1 on the light emission side. The black matrix 3 is made of a light-shielding material and is formed in a layer shape. By having such a black matrix 3, the black matrix 3 can absorb external light (external light that is not desirable for forming a projected image), and the image projected on the screen has excellent contrast. Can be. In particular, the contrast of the image by the microlens substrate 1 can be made particularly excellent by having the coloring portion 22 as described above and the black matrix 3.
Such a black matrix 3 has an opening 31 on the optical path of the light transmitted through each microlens 21. Thereby, the light condensed by each micro lens 21 can be efficiently passed through the opening 31 of the black matrix 3. As a result, the light utilization efficiency of the microlens substrate 1 can be increased.

  Further, the thickness (average thickness) of the black matrix 3 is preferably 0.01 to 5 μm, more preferably 0.01 to 3 μm, and further preferably 0.03 to 1 μm. When the thickness of the black matrix 3 is a value within the above range, the function as the black matrix 3 can be more effectively exhibited while preventing unintentional peeling, cracking, and the like of the black matrix 3 more reliably. For example, in the transmissive screen 10 including the microlens substrate 1, the contrast of the projected image can be made particularly excellent.

  In the above description, the concave portion 61 has substantially the same shape (dimension) and arrangement method as the convex portion (microlens 21) constituting the microlens substrate (member with convex portion) 1. Although described as a thing, for example, when the constituent material of the substrate body 2 of the microlens substrate (member with projections) 1 is likely to shrink (when the resin material constituting the substrate body 2 shrinks due to solidification). In consideration of the contraction rate, etc., between the microlens (convex portion) 21 constituting the microlens substrate 1 and the concave portion 61 constituting the concave member (microlens substrate manufacturing concave member) 6. Thus, the shape (dimension), occupation ratio, etc. may be different. In such a case, in the conventional method, inconvenience such as chipping in the substrate with concave portions or the microlens substrate is more likely to occur. However, in the present invention, even in such a case, The occurrence of inconvenience can be effectively prevented.

  In addition, when the microlens substrate 1 is manufactured using a member with a recess 6 ′ (a member with a recess having the second recess 62), it is usually outside the effective lens region where the microlens 21 is provided. There is a region provided with a convex portion corresponding to the second concave portion 62 of the member 6 with concave portions. Such a convex portion (a convex portion corresponding to the second concave portion 62) is manufactured as described above. After obtaining the substrate body 2 by the method, it may be removed by a method such as grinding or polishing, and the region where the convex portion corresponding to the second concave portion 62 is formed is removed by cutting or the like. Also good. In other words, the microlens substrate 1 may not include a convex portion corresponding to the second concave portion 62.

Next, the transmission screen 10 including the microlens substrate 1 as described above will be described.
As shown in FIG. 17, the transmission screen 10 includes a Fresnel lens portion 5 and the microlens substrate 1 described above. The Fresnel lens unit 5 is installed on the light (image light) incident side, and the light transmitted through the Fresnel lens unit 5 is incident on the microlens substrate 1.
The Fresnel lens unit 5 has a prism-shaped Fresnel lens 51 formed in a substantially concentric shape on the exit side surface. The Fresnel lens unit 5 refracts image light from a projection lens (not shown) to produce parallel light La parallel to the vertical direction of the main surface of the microlens substrate 1.

In the transmissive screen 10 configured as described above, the image light from the projection lens is refracted by the Fresnel lens unit 5 and becomes parallel light La. The parallel light La enters the surface of the microlens substrate 1 where the colored portion is formed, is condensed by each microlens 21, is diffused after being focused.
At this time, the light incident on the microlens substrate 1 is transmitted through the microlens substrate 1 with sufficient transmittance. The light that has passed through the opening 31 diffuses and is observed as a planar image by the observer.

Next, a rear projector using the transmission screen as described above will be described.
FIG. 18 is a diagram schematically showing the configuration of the rear projector of the present invention.
As shown in the figure, the rear projector 300 has a configuration in which a projection optical unit 310, a light guide mirror 320, and a transmissive screen 10 are arranged in a housing 340.

Since the rear projector 300 includes the transmission screen 10 as described above, an image with excellent contrast can be obtained. Furthermore, since the present embodiment has the above-described configuration, the viewing angle characteristics, light utilization efficiency, and the like are particularly excellent.
In particular, in the microlens substrate 1 described above, since the elliptical microlenses 21 are arranged in a staggered pattern (in a staggered pattern), the rear projector 300 is not particularly susceptible to problems such as moire.

As mentioned above, although this invention was demonstrated based on embodiment of illustration, this invention is not limited to these.
For example, each part of the microlens substrate, the transmissive screen, and the rear projector can be replaced with any structure that can exhibit the same function.
In the above-described embodiment, the spacer has been described as having a refractive index comparable to that of the resin (resin after solidification). However, the spacer is substantially formed with a recess of a member with a recess. In the case where it is arranged only in the non-effective region (ineffective lens region), it does not have to have the same refractive index as that of the resin (solidified resin). Further, the spacers as described above are not necessarily used in the production of the microlens substrate (member with convex portions).

Moreover, in embodiment mentioned above, although resin was provided to the surface of a member with a recessed part and a jig | tool, this was demonstrated as what presses with a flat plate, For example, resin is provided to the surface of a flat plate, and this is a member with a recessed part A microlens substrate (a member with a convex portion) may be manufactured by pressing with a jig.
Further, in the above-described embodiment, the initial hole forming step of the manufacturing method of the member with a recess has been described as forming the initial recess in the substrate together with the initial hole. However, such an initial recess may not be formed. . By appropriately adjusting the initial hole formation conditions (for example, laser energy intensity, beam diameter, irradiation time, etc.), only the initial hole is selected so that the initial recess is formed in a desired shape or the initial recess is not formed. Can be formed.

  In the above-described embodiment, the transmission screen is described as including a microlens substrate (a member with a convex portion) and a Fresnel lens. However, the transmission screen of the present invention does not necessarily include a Fresnel lens. It does not have to be. For example, the transmission screen of the present invention may be substantially constituted only by the member with a convex portion (microlens substrate) of the present invention.

  Moreover, in 2nd Embodiment mentioned above, it demonstrated as what forms a 1st recessed part and a 2nd recessed part from which depth differs by peeling off this sealing member in the middle of etching using a sealing member. However, such a sealing member may not be used. In particular, when it is not necessary to make the depth of the second concave portion shallower than the depth of the first concave portion, the first concave portion and the second concave portion are preferably used without using the sealing member as described above. Can be formed. Further, for example, the depth of the second recess can be made shallower than the depth of the first recess also by the following method. For example, etching is performed in the vicinity of the surface of the second initial hole, and etching is performed without covering the surface of the first initial hole. The first concave portion and the second concave portion can be suitably formed. Further, even without using the sealing member as described above, in the initial hole forming step, a relatively deep desired recess is formed in a portion corresponding to the first recess to correspond to the second recess. The part does not have an initial concave part (or a concave part shallower than the concave part formed in the part corresponding to the first concave part) or the size of the initial hole (opening part) of the mask is different. By doing so, the first recess and the second recess having different depths can be suitably formed.

In the embodiment described above, the microlenses (convex portions corresponding to the first concave portions) in the microlens substrate (members with convex portions) and the concave portions (first concave portions) in the members with concave portions are in a staggered pattern. Although described as being arranged, these arrangement patterns may be any pattern, for example, randomly arranged patterns.
Moreover, in embodiment mentioned above, the microlens (convex part corresponding to a 1st recessed part) in a microlens board | substrate (member with a convex part) and the recessed part (1st recessed part) in a member with a recessed part are planar views. Although the description has been given assuming that the shape is a substantially elliptical shape (flat shape), these shapes may be any shape such as a substantially circular shape or a substantially hexagonal shape.

  In the above-described embodiment, after the jig is removed, the substrate main body (member with a convex portion) is gripped near the end and the substrate main body is peeled from the member with the concave portion. The step of peeling the member from the member with the recess may be performed in a state where the jig is not removed. In such a case, for example, by holding the jig together with the vicinity of the end of the substrate main body, the member with the convex portion can be suitably peeled from the member with the concave portion.

In the embodiment described above, the convex portion corresponding to the concave portion (first concave portion) has been described as functioning as a microlens. For example, the convex portion corresponding to the first concave portion functions as a lenticular lens. Anything such as a thing may be used.
In the above-described embodiment, the first region is configured by only the first concave portion, and the second region is configured by only the second concave portion. There may be a region where two concave portions are mixed.

In the above-described embodiment, the second region is described as being provided in the vicinity of the left and right end portions of the member with recesses. However, the second region is, for example, one end side of the member with recesses (for example, FIG. 16 may be provided only on the right side or the left side in FIG.
Moreover, in embodiment mentioned above, although the member with a recessed part and the member with a convex part were demonstrated as what is a plate-like (a sheet form, a film form etc.) member (board | substrate), the member with a recessed part, the member with a convex part Any shape may be used. For example, the member with a recess may be a roll.

Further, in the above-described embodiment, the member with the convex portion is a member constituting a transmission type screen and a rear projector, and the member with the concave portion is described as being used as a mold for manufacturing the member with the convex portion. The use of the member with a convex portion of the present invention is not limited to the above, and may be anything. For example, the member with a convex portion of the present invention includes a diffusion plate, a black matrix screen, a screen of a projection display device (front projector) (front projection screen), a component member of a liquid crystal light valve of the projection display device (front projector), and the like. It may be applied to.
In the above-described embodiments, the member with a convex portion (microlens substrate) has been described as being used by being removed from the member with a concave portion, but the member with a concave portion is used without being removed from the manufactured member with a convex portion. (In particular, those used as components of optical products such as transmission screens and rear projectors).

[Manufacture of members with concave portions, members with convex portions and transmission screens]
Example 1
The member with a recessed part provided with the recessed part for microlens formation was manufactured as follows.
First, as a substrate, a soda glass substrate having a width of 1.2 m × length of 0.7 m and a thickness of 4.8 mm was prepared.
This soda glass substrate was immersed in a cleaning solution containing 4 wt% ammonium monohydrogen difluoride and 8 wt% hydrogen peroxide and etched by 6 μm to clean the surface.
Thereafter, cleaning with pure water and drying using N ₂ gas (removal of pure water) were performed.
Next, a Cr / Cr oxide laminate (a laminate in which Cr was laminated on the outer surface side of Cr oxide) was formed on this soda glass substrate by sputtering. That is, a mask forming film and a back surface protective film made of a Cr / Cr oxide laminate were formed on the surface of a soda glass substrate. The thickness of the Cr layer was 0.03 μm, and the thickness of the Cr oxide layer was 0.01 μm.

Next, laser processing was performed on the mask forming film, and a large number of initial holes were arranged in a staggered manner in a range of 113 cm × 65 cm (a region corresponding to the first region) of the central portion of the mask forming film. A pattern was formed and a mask was obtained. The density of the initial holes in this region was 26,000 holes / cm ² . The average width of the initial holes was 2.0 μm, and the average length was 2.1 μm.
In the laser processing, an excimer laser with an energy intensity of 600 mJ / cm ² is irradiated onto a substrate covered with a mask (the Cr / Cr oxide laminate) through a mask having 360 openings. It went by. The laser beam irradiated onto the substrate covered with the mask had a beam diameter (spot diameter) of 2 μm and an energy intensity of 1 mJ / cm ² at each spot. The scanning speed of the laser beam was set to 0.1 m / second.
At this time, a recess having a depth of 0.005 μm and an altered layer were also formed on the surface of the soda glass substrate at the site where the initial holes were formed.

Next, wet etching was performed on the soda glass substrate to form concave portions (recesses for forming microlenses) having a flat shape (substantially elliptical shape) when viewed in plan on the soda glass substrate. The formed many recesses had substantially the same shape as each other. The length (pitch) in the minor axis direction of the formed recess was 54 μm, the length in the major axis direction was 72 μm, the radius of curvature was 39 μm, and the depth was 38.5 μm. The density d ₁ of the recesses (first recesses) in the effective region (first region) where the recesses (first recesses) were formed was 26,000 pieces / cm ² . Moreover, the occupation rate of the recessed part in the effective area | region in which the recessed part was formed was 98%.
In the wet etching, an aqueous solution containing 4 wt% ammonium monofluoride difluoride and 4 wt% sulfuric acid was used as an etchant, and the immersion time was 125 minutes.

Next, the mask and the back surface protective film were removed by etching using a mixture of ceric ammonium nitrate and perchloric acid.
Thereafter, cleaning with pure water and drying using N ₂ gas (removal of pure water) were performed.
Thereby, the member with a recessed part in which many recessed parts (1st recessed part) for microlens formation were arranged on the soda glass substrate as shown in FIG. 1 in zigzag form was obtained. When the obtained member with recesses was viewed in plan, the occupation ratio of the recesses (first recesses) in the effective region (first region) where the recesses (first recesses) were formed was 98%. .

Next, a release agent (GF-6110) is applied to the surface of the substrate with recesses obtained as described above on which the recesses are formed, and an unpolymerized (uncured) acrylic resin ( PMMA resin (methacrylic resin)) was applied. Under the present circumstances, the substantially spherical spacer (diameter 2.0mm) comprised with the hardened | cured material of acrylic resin (PMMA resin (methacrylic resin)) was distribute | arranged to the substantially whole surface of the board | substrate with a recessed part. The spacers were arranged at a rate of 0.1 piece / cm ² .

  At this time, a jig for assisting in peeling is disposed at one end of the substrate body when peeling the member with the convex portion (resin after curing) later, and the resin is also supplied onto the jig. (See FIGS. 3 to 5). The width of this jig was 50 mm. Further, as the jig, a tool whose surface (surface to which the acrylic resin was applied) was subjected to gas phase surface treatment (mold release treatment) with hexamethyldisilazane was used.

Next, the acrylic resin was pressed with a flat plate made of soda glass. At this time, air was prevented from entering between the flat plate and the acrylic resin. Moreover, as a flat plate, the thing by which the mold release agent (GF-6110) was apply | coated to the surface at the side which presses acrylic resin was used.
Thereafter, the acrylic resin was cured by heating to obtain a substrate body. The refractive index of the obtained substrate body (cured resin) was 1.51. Further, the thickness of the resin layer (excluding the microlens) of the obtained substrate body was 2.0 mm. The flat (substantially oval) microlens had a short axis length (pitch) of 54 μm, a long axis length of 72 μm, a radius of curvature of 39 μm, and a height of 38.0 μm. . Further, the occupation ratio of the microlens in the effective region where the microlens is formed was 97%. Moreover, the hardness of the acrylic resin after curing was Shore D54.

Next, the flat plate was removed.
Next, a positive type photopolymer (PC405G: manufactured by JSR Corporation) in which a light-shielding material (carbon black) is added to the surface of the substrate main body on the emission side (surface opposite to the surface on which the microlens is formed). ) Was applied by a roll coater. The content of the light shielding material in the photopolymer was 20 wt%.

Next, a pre-bake treatment at 90 ° C. for 30 minutes was performed.
Next, an ultraviolet ray as parallel light of 80 mJ / cm ² was irradiated from the surface opposite to the surface on which the concave portion of the member with concave portions was formed. Thereby, the irradiated ultraviolet rays were collected by each microlens, and the photopolymer near the focal point f (near the center in the thickness direction of the black matrix) of each microlens was selectively exposed.

Thereafter, development was performed for 40 seconds using a 0.5 wt% aqueous KOH solution.
Thereafter, pure water cleaning and drying using N ₂ gas (removal of pure water) were performed, and a post-baking treatment at 200 ° C. for 30 minutes was further performed. Thereby, a black matrix having openings corresponding to the respective microlenses was formed. The thickness of the formed black matrix was 5 μm.

Then, the board | substrate body was removed from the member with a recessed part as follows.
First, the jig was removed from the formed substrate body while being removed from the member with the recess. After that, while holding the part of the substrate body that was in contact with the jig (the part where the acrylic resin solidified on the jig), the substrate body side was pulled to bend and continuously at a predetermined constant speed. Peeled (without rest). The direction of peeling was the short axis direction of the recess (longitudinal direction of the substrate body).
The tensile strength at this time was 80 g / cm (width), and the peeling speed was 20 mm / sec.

  Thereafter, a coloring liquid was applied to the substrate body peeled from the member with concave portions by dip dyeing. At this time, the entire surface side on which the microlenses were formed was in contact with the coloring liquid, and the coloring liquid was not in contact with the surface side on which the black matrix was formed. Further, the temperature of the substrate body and the coloring liquid when applying the coloring liquid was adjusted to 90 ° C. In addition, when applying the coloring liquid, the pressure of the atmosphere was increased to 120 kPa. Disperse dye (Blue (manufactured by Futaba Sangyo)): 2 parts by weight, disperse dye (Red (manufactured by Futaba Sangyo)): 0.1 part by weight, disperse dye (Yellow (manufactured by Futaba Sangyo)): 0. A mixture of 05 parts by weight, benzyl alcohol: 10 parts by weight, surfactant: 2 parts by weight, and pure water: 1000 parts by weight was used.

Under the conditions described above, the substrate main body and the coloring liquid were brought into contact for 20 minutes, and then the substrate main body was taken out of the tank in which the coloring liquid was stored, sufficiently washed with water, and then dried.
Thereafter, by drying (removal of pure water) using pure water cleaning and N ₂ gas, to obtain a microlens substrate on which the colored portion is formed. The density of the formed colored part was 55%.
In addition, a total of 500 microlens substrates were manufactured by repeatedly performing the same operation as described above using the above-described member with concave portions.
Then, using the first microlens substrate and the 500th microlens substrate, transmissive screens as shown in FIG. 17 were obtained.

(Example 2)
First, in the same manner as in Example 1, a substrate coated with a mask forming film and a back surface protective film was prepared.
Next, laser processing is performed on the mask forming film, and a large number of first initial holes are formed in a staggered pattern in a region of 113 cm × 65 cm (a region corresponding to the first region) of the central portion of the mask forming film. The arranged pattern was formed to obtain a mask. The density of the first initial holes in this region was 23,000 holes / cm ² . The average width of the first initial holes was 2.0 μm, and the average length was 2.2 μm. At the same time, a large number of second initial holes were formed in a range of 10 cm × 65 cm in the vicinity of both ends of the substrate in the longitudinal direction outside the region where the first initial holes were formed. The second initial holes were formed so as to have a pattern in which the density gradually became sparser toward the end of the substrate. The density of the second initial holes in these regions was 10,000 / cm ² . The average width of the second initial holes was 0.005 μm and the average length was 2.2 μm.

The laser processing was performed by irradiating an excimer laser on a substrate covered with a mask forming film (the Cr / Cr oxide laminate) through a mask having 360 openings. The scanning speed of the laser beam was set to 0.1 m / second. Further, the beam diameter (spot diameter) of the laser beam irradiated onto the substrate covered with the mask forming film was 2 μm. In addition, when forming the first initial hole, the energy intensity of the laser light irradiated onto the substrate covered with the mask forming film is set to 1 mJ / cm ^2, and the second initial When forming the hole, it was controlled to be 1 mJ / cm ² .
At this time, a recess having a depth of 0.005 μm and an altered layer were also formed on the surface of the soda glass substrate at the site where the first initial holes were formed.

Next, a seal member (tape) having etching resistance was brought into close contact with (adhered to) a region (region corresponding to the second region) provided with the second initial hole on the mask. As the sealing member, an adhesive tape having a base part made of polyethylene terephthalate and an adhesive layer made of an adhesive was used.
Next, wet etching was performed on the soda glass substrate provided with the mask, the back surface protective film, and the seal member. Then, in the course of this wet etching, the seal member was peeled to expose the second initial hole and contact with the etching solution.
By performing such etching, a first recess (microlens forming recess) and a second recess having a flat shape (substantially elliptical shape) when viewed in plan are formed on the soda glass substrate. . The formed many first recesses had substantially the same shape as each other. The formed first recess had a length in the minor axis direction of 54 μm, a length in the major axis direction of 82 μm, a radius of curvature of 40 μm, and a depth of 39.5 μm. The density d ₁ of the first recesses in the effective region (first region) where the first recesses are formed was 23,000 / cm ² . In addition, the many second recesses formed had almost the same shape. The formed second recess had a diameter of 80.0 μm and a depth of 39.5 μm. The density d ₂ of the second recesses in the region where the second recesses are formed (second region) was 1 million pieces / cm ² . The number of rows of the second recesses in the second region was 3000. Further, the pitch (average value) of adjacent rows in the second region was 250 μm. The length of the second region in the peeling direction was 20 mm.
In the wet etching, an aqueous solution containing 4 wt% ammonium monohydrogen difluoride and 8 wt% hydrogen peroxide was used as an etchant, and the immersion time was 2.5 hours.

Thereafter, in the same manner as in Example 1, the mask and the back surface protective film were removed, and further, pure water cleaning and drying (removing pure water) using N ₂ gas were performed.
As a result, a large number of first concave portions for forming microlenses are arranged in a zigzag pattern on the soda glass substrate as shown in FIG. A member with a recess having an area (second area) arranged so that the second recess gradually becomes sparse toward the outside in the vicinity of both ends on the longitudinal direction side of the substrate outside the area) was obtained. . When the obtained member with recesses is viewed in plan, the occupation ratio of the first recesses in the effective region (first region) where the first recesses are formed is 98%, and the second recesses are formed. The occupation ratio of the second recesses in the area (second area) was 50%.
A release agent (GF-6110) was applied to the surface of the member with recesses obtained as described above on which the recesses were formed.
Thereafter, a microlens substrate and a transmissive screen were produced in the same manner as in Example 1 except that the thus-obtained member was used.

(Examples 3 to 5)
The width of the jig is set as shown in Table 1, and the mask configuration, laser light irradiation conditions (the shape of the initial hole to be formed, the depth of the initial recess), the immersion time in the etching solution, and the like are changed. Thus, a member with a recess, a microlens substrate, and a transmission screen were manufactured in the same manner as in Example 1 except that the shape, density, arrangement pattern, and the like of the recess included in the member with a recess were changed as shown in Table 1. .

(Examples 6 to 8)
The width of the jig is set as shown in Table 1, and the mask configuration, laser light irradiation conditions (the shape of the initial hole to be formed, the depth of the initial recess), the immersion time in the etching solution, and the like are changed. In the same manner as in Example 2 except that the shape, density, arrangement pattern, and the like of the first concave portion and the second concave portion included in the concave portion member are changed as shown in Table 1, the concave portion member, the microlens A substrate and a transmission screen were produced.

(Comparative Example 1)
In the step of applying an unpolymerized (uncured) acrylic resin on the substrate with recesses, a member with recesses, a microlens substrate, and a transmission screen were prepared in the same manner as in Example 5 except that no jig was used. Manufactured.
(Comparative Example 2)
A member with a recess, a microlens substrate, and a transmissive screen were produced in the same manner as in Comparative Example 1 except that no colored portion was formed.
About each said Example and each comparative example, the structure of the mask used when manufacturing the member with a recessed part, the density of the recessed part (1st recessed part, 2nd recessed part) which the manufactured member with a recessed part has, shape, arrangement | sequence Table 1 summarizes the pattern, the width of the jig used when manufacturing the microlens substrate, the shape of the microlens included in the manufactured microlens substrate, the array pattern, the productivity of the microlens substrate (substrate body), and the like.

  As can be seen from Table 1, in the present invention, the microlens substrate could be manufactured with good productivity, whereas in the comparative example, the productivity of the microlens substrate was extremely poor. More specifically, in the present invention, the operation of peeling the substrate main body from the member with the concave portion could be easily and reliably performed, whereas in the comparative example, it is difficult to peel the substrate main body from the member with the concave portion. The peeling requires a greater force than the present invention.

[Production of rear projector]
Rear projectors as shown in FIG. 18 were produced using the transmission screens of the respective examples and comparative examples.
[Durability evaluation of a member with a recess]
About the member with a recessed part of each said Example and each comparative example, about the member with a recessed part (after peeling of a board | substrate main body was repeated 500 times) after manufacturing 500 microlens board | substrates, a recessed part (1st The surface on the side where the concave portions and the second concave portions) were formed was observed using a microscope. The state of the concavo-convex pattern on the substrate surface was evaluated according to the following four-stage criteria.
(Double-circle): The chip | tip of an uneven | corrugated pattern is not recognized at all.
◯: Almost no irregular pattern is observed.
(Triangle | delta): The chip | tip of an uneven | corrugated pattern is recognized slightly.
X: The chip | tip of an uneven | corrugated pattern is recognized notably.

[Evaluation of missing dots, etc.]
Sample images were displayed on the transmissive screens of the rear projectors of the respective examples and comparative examples. With respect to the displayed image, the occurrence of missing dots and uneven brightness was evaluated according to the following four criteria.
(Double-circle): A dot missing and the brightness nonuniformity are not recognized at all.
○: Dot missing and uneven brightness are hardly observed.
Δ: At least one of missing dots and uneven brightness is slightly recognized.
X: At least one of dot missing and brightness unevenness is noticeable.

[Evaluation of diffracted light, moire and color unevenness]
Sample images were displayed on the transmissive screens of the rear projectors of the respective examples and comparative examples. The displayed images were evaluated for the occurrence of diffracted light, moire and color unevenness according to the following four criteria.
A: No diffracted light, moire, or color unevenness is observed.
○: Almost no diffracted light, moire or color unevenness is observed.
Δ: At least one of diffracted light, moire, and color unevenness is slightly observed.
X: At least one of diffracted light, moire and color unevenness is remarkably recognized.

[Evaluation of contrast]
Contrast evaluation was performed on the rear projectors of each of the examples and comparative examples.
As contrast (CNT), the front luminance (white luminance) LW [cd / m ² ] of white display when all white light of 413 lx is incident in the dark room, and the front luminance of black display when the light source is completely turned off in the bright room The ratio LW / LB with the increase amount (black luminance increase amount) LB [cd / m ² ] was obtained. The black luminance increase amount is an increase amount with respect to the black display luminance in the dark room. The measurement in the bright room was performed under an environment where the ambient light illuminance was about 185 lx. The measurement in the dark room was performed in an environment where the external light illuminance was 0.5 lx or less.
The contrast represented by LW / LB was evaluated according to the following four-stage criteria.
(Double-circle): The contrast represented by LW / LB is 500 or more.
○: Contrast represented by LW / LB is 400 or more and less than 500.
(Triangle | delta): The contrast represented by LW / LB is 300-400.
X: The contrast represented by LW / LB is less than 300.

[Measurement of viewing angle]
The viewing angles in the vertical direction and the horizontal direction were measured in a state where the sample images were displayed on the transmissive screens of the rear projectors of the respective Examples and Comparative Examples.
The viewing angle was measured under the condition of measuring at an interval of 1 degree with a variable angle photometer (goniophotometer).
These results are summarized in Table 2.

  As is apparent from Table 2, in the present invention, even after the manufacture (peeling) of the substrate body (member with protrusions) was repeatedly performed, no defects in the uneven pattern were observed in the member with recesses. Further, according to the present invention, an image with excellent image quality free from dot omission, brightness unevenness, diffracted light, moire, color unevenness and the like was obtained. In the present invention, excellent contrast was obtained and the viewing angle characteristics were also excellent. That is, in the present invention, an excellent image can be stably displayed. In particular, excellent results were obtained also in a transmissive screen and a rear projector provided with a microlens substrate manufactured after repeatedly using a member with a recess.

  On the other hand, in the comparative example, the concavo-convex pattern was broken in the member with the concave portion obtained by repeatedly manufacturing (peeling) the member with the convex portion, and the transmissive screen manufactured using the obtained member with the convex portion and Satisfactory results were not obtained even with the rear projector. This is because a concave-convex pattern defect such as a chip occurs in a member with a concave portion, so that a microlens having a desired shape cannot be formed even on a manufactured microlens substrate, or the substrate body has a concave portion. This is probably because defects such as chipping occurred in the microlens when peeling from the member.

It is a typical top view showing a 1st embodiment of a member with a crevice. It is a typical longitudinal cross-sectional view which shows the manufacturing method of the member with a recessed part shown in FIG. It is a typical longitudinal section showing an example of a manufacturing method of a micro lens substrate (member with a convex part). It is a typical longitudinal section showing an example of a manufacturing method of a micro lens substrate (member with a convex part). It is a typical longitudinal section showing an example of a manufacturing method of a micro lens substrate (member with a convex part). It is a typical longitudinal section showing an example of a manufacturing method of a micro lens substrate (member with a convex part). It is a typical top view showing a 2nd embodiment of a member with a crevice. It is the elements on larger scale and longitudinal cross-section of the member with a recessed part shown in FIG. It is a typical longitudinal cross-sectional view which shows the manufacturing method of the member with a recessed part shown in FIG. 7, FIG. It is a typical longitudinal cross-sectional view which shows the manufacturing method of the member with a recessed part shown in FIG. 7, FIG. It is a typical longitudinal cross-sectional view which shows the manufacturing method of the micro lens board | substrate (member with a convex part) using the member with a recessed part shown in FIG. 7, FIG. It is a typical longitudinal cross-sectional view which shows the manufacturing method of the micro lens board | substrate (member with a convex part) using the member with a recessed part shown in FIG. 7, FIG. It is a typical longitudinal cross-sectional view which shows the manufacturing method of the micro lens board | substrate (member with a convex part) using the member with a recessed part shown in FIG. 7, FIG. It is a typical longitudinal cross-sectional view which shows the manufacturing method of the micro lens board | substrate (member with a convex part) using the member with a recessed part shown in FIG. 7, FIG. It is a typical longitudinal section showing a suitable embodiment of a micro lens substrate (member with a convex part) of the present invention. FIG. 16 is a plan view of the microlens substrate shown in FIG. 15. It is a typical longitudinal cross-sectional view which shows suitable embodiment of the transmissive screen of this invention provided with the micro lens board | substrate shown in FIG. It is a figure which shows typically the rear type projector to which the transmission type screen of this invention is applied.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Microlens board | substrate (member with a convex part) 2 ... Board | substrate main body (member with a convex part) 21 ... Microlens (convex part) 22 ... Colored part (external light absorption part) 23 ... Resin 25 ... 1st line 26 ... Second row 3 ... Black matrix (light shielding layer) 31 ... Opening 32 ... Photopolymer 5 ... Fresnel lens part 51 ... Fresnel lens 6, 6 '... Member with recess (member with recess for microlens substrate manufacture) 61 ... recess (1st recessed part, recessed part for microlens formation) 62 ... Recessed part (2nd recessed part) 65 ... 1st row 66 ... 2nd row 67 ... 1st area | region (effective area) 68 ... 2nd area | region 69 ... Jig (gripping part forming member) 7 ... Substrate 71 ... Initial recess 8 ... Mask 81 ... Initial hole (first initial hole) 82 ... Initial hole (second initial hole) 85 ... Mask forming film 88 ... Seal member 89 ... Back side protective film 11 ... Flat plate 10 ... Transmission type screen 20 ... Spacer 300 ... Rear type projector 310 ... Projection optical unit 320 ... Light guide mirror 340 ... Housing

Claims (16)

A method for producing a member with convex portions provided with a plurality of convex portions corresponding to the concave portions using a member with concave portions provided with a large number of concave portions,
A resin material having fluidity is applied to the surface of the member with a recess and the jig provided with a peeling assisting jig in the vicinity of the edge of the member with the recess. A resin material application step;
A solidification step of solidifying the resin material into a solidified product;
A method for producing a member with a convex portion, comprising: a peeling step of peeling the solidified material from the member with a concave portion while gripping a portion of the solidified material solidified on the jig.   The manufacturing method of the member with a convex part of Claim 1 which has the jig | tool removal process which peels the said solidified material from the said jig | tool prior to the said peeling process, and removes the said jig | tool.   The manufacturing method of the member with a convex part of Claim 1 or 2 using what the shape of the said recessed part at the time of planar view is a substantially ellipse shape as the said member with a concave part.   The manufacturing method of the member with a convex part of Claim 3 whose peeling direction at the time of peeling the said solidified material from the said member with a concave part is substantially the same as the short-axis direction of the said recessed part. The concave portion satisfies the relationship of 0.10 ≦ L ₁ / L ₂ ≦ 0.99 when the length in the minor axis direction is L ₁ [μm] and the length in the major axis direction is L ₂ [μm]. The manufacturing method of the member with a convex part of Claim 3 or 4.   The method for producing a member with a convex portion according to any one of claims 3 to 5, wherein the length of the concave portion in the minor axis direction is 10 to 500 µm.   The method of manufacturing a member with a convex portion according to any one of claims 3 to 6, wherein a length of the concave portion in a major axis direction is 15 to 750 µm.   The member with recesses has a plurality of first recesses and a second recess provided as a dummy outside the region where the plurality of first recesses are provided. The manufacturing method of the member with a convex part in any one of.   The manufacturing of the member with a convex part in any one of Claim 1 thru | or 8 with which the said member with a concave part has a 1st recessed part and a 2nd recessed part shallower than the said 1st recessed part. Method. The member with a recess has a first region composed of a plurality of first recesses, and a second region composed of a plurality of second recesses outside the first region,
The density d ₂ [pieces / cm ² ] of the second recesses in the second region is smaller than the density d ₁ [pieces / cm ² ] of the first recesses in the first region. Item 10. A method for producing a member with a convex portion according to any one of Items 1 to 9.   The manufacturing method of the member with a convex part in any one of Claim 1 thru | or 10 using what was comprised with the material which has transparency as said member with a concave part.   The manufacturing method of the member with a convex part in any one of Claim 1 thru | or 11 with which the said member with a convex part is a microlens board | substrate provided with the microlens as the said convex part.   A member with a convex portion, which is manufactured using the method according to claim 1.   The member with a convex portion according to claim 13, which is made of a material having transparency.   A transmission screen comprising the convex member according to claim 13.   A rear projector comprising the transmissive screen according to claim 15.

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