JP2006142386A - Feed gear of machine tool - Google Patents

Feed gear of machine tool Download PDF

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JP2006142386A
JP2006142386A JP2004331301A JP2004331301A JP2006142386A JP 2006142386 A JP2006142386 A JP 2006142386A JP 2004331301 A JP2004331301 A JP 2004331301A JP 2004331301 A JP2004331301 A JP 2004331301A JP 2006142386 A JP2006142386 A JP 2006142386A
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force
moving body
machine tool
vertical wall
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JP4815787B2 (en
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Hiroyuki Hiramatsu
弘行 平松
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Nissan Motor Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a feed gear drastically reducing loading weight of a linear guide in presupposing a structure to arrange two linear motors face to face. <P>SOLUTION: A pair of the left and right synchronous linear motors 6 and a pair of the left and right linear guides 5 are arranged symmetrically left and right between a table 2 as a movable body and a base 1 to guide and support it, and the linear motors 6 are inclined at a prescribed angle with movable side vertical wall surfaces 7a, 7b and fixed side vertical wall surfaces 1a, 1b. The loading weight of linear guide 5 is reduced by setting off magnetic attracting force C of the linear motors 6 to provide thrust. Simultaneously, the loading weight of the linear guide 5 based on the weight of the table 2, etc. is also reduced by generating magnetic floating force F in accordance with an angle α. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、工作機械のスライダやテーブル等を移動体とする送り装置に関し、特に送り駆動源としてリニアモータを採用した送り装置の改良に関するものである。   The present invention relates to a feed device that uses a slider, a table, or the like of a machine tool as a moving body, and more particularly to an improvement of a feed device that employs a linear motor as a feed drive source.

放電加工機等の工作機械の送り装置としてリニアモータを駆動源とするものが特許文献１等で提案されている。これらの送り装置では、位置決め精度の良さ、発熱の少なさ、磁気吸引力の安定性等の理由から、一般的に同期型のリニアモータ（永久磁石とコイルスライダとの組み合わせ）が使われるが、同期型の場合には永久磁石とコイルスライダ間の磁気吸引力が最大推力の３〜４倍と大きいため、磁気吸引力に逆らって永久磁石とコイルスライダの間隙を一定に保つ機能を持ったリニアガイド（直動型ガイド部材）には常に大きな荷重が加わったままとなる。   As a feeding device for a machine tool such as an electric discharge machine, one that uses a linear motor as a drive source is proposed in Patent Document 1 and the like. In these feeders, a synchronous linear motor (combination of a permanent magnet and a coil slider) is generally used for reasons such as good positioning accuracy, low heat generation, and stability of magnetic attractive force. In the case of the synchronous type, the magnetic attractive force between the permanent magnet and the coil slider is as large as 3 to 4 times the maximum thrust. Therefore, the linear type has a function to keep the gap between the permanent magnet and the coil slider constant against the magnetic attractive force. A large load is always applied to the guide (direct acting guide member).

例えば切削加工や研削加工でよく使われる１５ｋＮ程度の推力を持ったリニアモータ駆動の送り装置では、リニアガイドに５０ｋＮもの荷重が加わるだけでなく、１５ｋＮ程度の推力を持ったリニアモータにて駆動される送り装置のコラムは１ｔｏｎ程度の質量があることから、古くから採用されている回転型モータとボールねじ機構との組み合わせからなる送り装置ではリニアガイドに１０ｋＮ程度の加重が加わるところ、リニアモータ駆動では１０ｋＮ＋５０ｋＮ＝６０ｋＮと、実に６倍もの荷重が加わることになる。   For example, in a linear motor drive feeder with a thrust of about 15 kN, which is often used in cutting and grinding, not only a load of 50 kN is applied to the linear guide, but also a linear motor with a thrust of about 15 kN is driven. Since the column of the feeding device has a mass of about 1 ton, in a feeding device composed of a combination of a rotary motor and a ball screw mechanism which has been used for a long time, a linear guide is applied where a load of about 10 kN is applied to the linear guide. Then, 10 kN + 50 kN = 60 kN, which is 6 times as much load.

そして、リニアガイドの寿命はそれ自体が受ける荷重の３乗に反比例（ただし、転動体がボールの場合であって、転動体がローラの場合には３．３乗に反比例）するので、上記のように６倍もの荷重が加わるとその寿命は１／６3＝１／２１６の寿命となる。 The life of the linear guide is inversely proportional to the third power of the load received by itself (however, when the rolling element is a ball and when the rolling element is a roller, it is inversely proportional to the third power) Thus, when a load of 6 times is applied, the lifetime becomes a lifetime of 1/6 3 = 1/216.

このような問題の対応策として、例えば特許文献２に記載のように、同じ仕様の二組のリニアモータを対向するように配置して、それぞれの磁気吸引力を相殺し、リニアガイドには磁気吸引力が加わらないように考慮されたものが提案されている。
特開平８−３０９６２０号公報（図１） 特開２００２−３４６８４４号公報（図２） As a countermeasure against such a problem, for example, as described in Patent Document 2, two sets of linear motors having the same specification are arranged so as to face each other, and the magnetic attraction forces are canceled out. The thing considered so that a suction | attraction force is not added is proposed.
JP-A-8-309620 (FIG. 1) JP 2002-346844 A (FIG. 2)

しかしながら、特許文献２に記載のような従来の技術では、磁気吸引力に基づくリニアガイドの荷重負担（負荷重量）は大幅に軽減できるものの、リニアモータを対向配置するというレイアウトのために構造体が大型化し、重くなった構造体の重量がそのままリニアガイドに加わることになるので、リニアガイドの小型化や寿命延長の効果は期待したほどのものが得られない可能性がきわめて高い。   However, in the conventional technique as described in Patent Document 2, the load burden (load weight) of the linear guide based on the magnetic attractive force can be greatly reduced, but the structure is not provided for the layout in which the linear motors are opposed to each other. Since the weight of the structure that has become larger and heavier is added to the linear guide as it is, it is highly possible that the effect of miniaturizing the linear guide and extending its life cannot be obtained as expected.

本発明はこのような課題に着目してなされたものであり、リニアモータを対向配置する構造を前提としつつも、リニアガイドの負荷重量を大幅に軽減できるように考慮された送り装置を提供しようとするものである。   The present invention has been made by paying attention to such a problem, and it is intended to provide a feeding device that is designed so that the load weight of the linear guide can be significantly reduced while assuming a structure in which linear motors are arranged to face each other. It is what.

請求項１に記載の発明は、支持体に案内支持された移動体に水平方向の直線送りを与える送り装置において、移動体側の左右対称位置にある一対の可動側縦壁面とそれに対向する支持体側のそれぞれの固定側縦壁面との間に、磁気吸引力に基づいて上記送り方向の推力を発生するリニアモータを直動型ガイド部材とともに左右対称となるように個別に介装配置するとともに、上記支持体に対する移動体の浮上力を発生させる手段を設けたことを特徴とする。   The invention according to claim 1 is a feeding device that applies a horizontal linear feed to a moving body guided and supported by a support body, and a pair of movable side vertical wall surfaces at a symmetrical position on the moving body side and a support side facing the pair. Linear motors that generate thrust in the feed direction based on the magnetic attractive force are individually interposed between the fixed-side vertical wall surfaces of the first and second guide members so as to be bilaterally symmetrical. Means is provided for generating a floating force of the moving body relative to the support.

上記のように移動体に浮上力を発生させる手段としては磁力に基づくものが望ましく、リニアモータを浮上力発生手段としても機能させる上では、左右一対のリニアモータを左右対称となるように垂直線に対して所定角度傾斜させて配置し、各リニアモータの磁気吸引力に基づく推力発生と並行してそのリニアモータの磁気吸引力に基づいて移動体に浮上力を発生させるようになっていることが望ましい。   As described above, the means for generating the levitation force on the moving body is preferably based on magnetic force. In order to make the linear motor function also as the levitation force generation means, the pair of left and right linear motors are vertically lined so as to be symmetrical. In parallel with the thrust generation based on the magnetic attraction force of each linear motor, the floating body is caused to generate a levitating force based on the magnetic attraction force of the linear motor. Is desirable.

また、工作機械における移動体としては、スライド式のサドルやラム、テーブル、コラム、ヘッド、クイル等を想定している。   In addition, as a moving body in the machine tool, a sliding saddle, a ram, a table, a column, a head, a quill and the like are assumed.

したがって、本発明では、二組のリニアモータを対向配置してそれぞれの磁気吸引力を相殺し、リニアガイドには磁気吸引力が加わらないようにした点では先に例示した特許文献２に記載のものと同様である。   Accordingly, in the present invention, two sets of linear motors are arranged opposite to each other to cancel the magnetic attraction forces, and the magnetic attraction force is not applied to the linear guide. It is the same as that.

その上で、本発明では、浮上力発生手段をもって移動体を支持体から浮上させることにより、移動体の重量をも相殺して、直動型ガイド部材に加わる負荷重量を実質的に零に近い状態まで小さくすることができる。   In addition, in the present invention, the weight of the moving body is offset by lifting the moving body from the support with the levitation force generating means, and the load weight applied to the linear guide member is substantially close to zero. It can be reduced to the state.

請求項１に記載の発明によれば、送り装置を形成している支持体と移動体との間に介装されることになる直動型ガイド部材の負荷重量を著しく小さくすることができるため、ガイド部材そのものの小型化とともにその長寿命化を図ることができる効果がある。特にリニアモータ駆動の送り装置でとかく問題となっていた微速移動時のスティックスリップ現象の発生がなくなり、超低速から超高速までの全域にわたって、高精度な動的位置決め精度を確保できるようになる。   According to the first aspect of the present invention, the load weight of the linear guide member that is interposed between the support body and the movable body forming the feeding device can be remarkably reduced. There is an effect that the guide member itself can be miniaturized and its life can be extended. In particular, the stick-slip phenomenon at the time of slow speed movement, which has been a problem with a linear motor-driven feed device, is eliminated, and high-precision dynamic positioning accuracy can be ensured over the entire region from ultra-low speed to ultra-high speed.

図１は本発明に係る送り装置のより具体的な実施の形態を示す図である。   FIG. 1 is a view showing a more specific embodiment of a feeding apparatus according to the present invention.

この送り装置では、支持体としてのベース１と、ベース１に案内支持されて水平方向に直線的に走行移動可能な移動体としてのテーブル２と、このテーブル２上に搭載されたコラム３とを備えており、コラム３には例えば加工用の主軸４が装着される。   In this feeding device, a base 1 as a support, a table 2 as a movable body guided and supported by the base 1 and capable of linearly moving in the horizontal direction, and a column 3 mounted on the table 2 are provided. The column 3 is provided with, for example, a processing spindle 4.

これらのベース１、テーブル２およびコラム３等は、主軸４の軸心を通る垂直線Ｌを対称中心として左右対称の形状となっていて、ベース１とテーブル３との間には直動型ガイド部材として左右各一対のリニアガイド５が介装されているとともに、テーブル２に送りを与えるための駆動源として機能することになる同期型のリニアモータ６が同じく左右対称に配置されている。なお、同期型のリニアモータ６は、モータ６自体への通電の有無や通電量（＝発生推力）に関係なく、コイルとマグネットが引き合う磁気吸引力が一定である。   These base 1, table 2, column 3, and the like have a symmetrical shape with a vertical line L passing through the axis of the main shaft 4 as the center of symmetry, and a linear motion guide between the base 1 and the table 3. A pair of left and right linear guides 5 are interposed as members, and a synchronous linear motor 6 that functions as a drive source for feeding the table 2 is also symmetrically arranged. The synchronous linear motor 6 has a constant magnetic attraction force that attracts the coil and the magnet regardless of whether or not the motor 6 itself is energized and the amount of energization (= generated thrust).

より具体的には、テーブル２はその下面中央部からウェブ７が下方にスカート状に伸びた断面略変形Ｔ字状のものとして形成されている一方、ベース１はそのウェブ７を受容するべく断面略凹形状のものとして形成されていて、スライド案内機構としてはいわゆるあり溝型の案内機構となっている。そして、ウェブ７の両側面である可動側縦壁面７ａ，７ｂとそれに対向することになるベース１側の固定側縦壁面１ａ，１ｂのうち縦壁面７ａ，１ａ同士および７ｂ，１ｂ同士は共に平行であるものの、縦壁面７ａ，１ａ同士および７ｂ，１ｂ同士は左右対称となるように垂直線Ｌに対して所定角度αだけ傾斜させ、それら縦壁面７ａ，１ａ同士および７ｂ，１ｂ同士の間に同一仕様のリニアモータ６とリニアガイド５がそれぞれに介装配置してある。   More specifically, the table 2 is formed as a substantially deformed T-shaped cross section in which the web 7 extends downwardly from the center of the lower surface in a skirt shape, while the base 1 has a cross section to receive the web 7. The slide guide mechanism is a so-called dovetail guide mechanism. Of the movable side vertical wall surfaces 7a and 7b, which are both side surfaces of the web 7, and the fixed side vertical wall surfaces 1a and 1b on the base 1 side facing each other, the vertical wall surfaces 7a and 1a and 7b and 1b are parallel to each other. However, the vertical wall surfaces 7a, 1a and 7b, 1b are inclined by a predetermined angle α with respect to the vertical line L so as to be symmetrical, and between the vertical wall surfaces 7a, 1a and 7b, 1b. The linear motor 6 and the linear guide 5 having the same specifications are disposed in each case.

ここで、左右一対のリニアモータ６はそのコイルスライダ（可動子）６ａを可動側縦壁面７ａ，７ｂ側に、永久磁石（固定子）６ｂを固定側縦壁面１ａ，１ｂにそれぞれ固定配置し、各リニアモータ６ごとにコイルスライダ６ａと永久磁石６ｂとの間に同量ずつの所定のギャップを具備させてある。そして、上記のテーブル２やコラム３およびコイルスライダ６ａ等の可動側の重量をＷ、リニアモータ６一組当たりの磁気吸引力をＣとしたとき、下記（１）式を満たすように角度αを設定する。   Here, the pair of left and right linear motors 6 have their coil sliders (movers) 6a fixed to the movable side vertical wall surfaces 7a and 7b and permanent magnets (stator) 6b fixed to the fixed side vertical wall surfaces 1a and 1b, respectively. For each linear motor 6, a predetermined gap of the same amount is provided between the coil slider 6a and the permanent magnet 6b. When the weight on the movable side of the table 2, the column 3 and the coil slider 6a is W and the magnetic attraction force per set of the linear motor 6 is C, the angle α is set so as to satisfy the following expression (1). Set.

α＝ｓｉｎ-1（Ｗ／（２×Ｃ））‥‥（１）
なお、各リニアモータ６を形成しているコイルスライダ６ａと永久磁石６ｂとの相対位置関係は逆であってもよい。また、周知のように上記のギャップの大きさと磁気吸引力Ｃの大きさの間には相関があり、ギャップが小さいほどより大きな磁気吸引力が作用することになる。 α = sin −1 (W / (2 × C)) (1)
Note that the relative positional relationship between the coil slider 6a and the permanent magnet 6b forming each linear motor 6 may be reversed. As is well known, there is a correlation between the size of the gap and the magnitude of the magnetic attractive force C, and a larger magnetic attractive force acts as the gap is smaller.

したがって、このように構成された送り装置によれば、各リニアモータ６の通電制御を行うことにより、それぞれのリニアモータ６が発生する磁気吸引力Ｃに基づく推力によってテーブル２に所定の送りが付与され、テーブル２はベース１に案内されるかたちで直線的に走行移動することになる。   Therefore, according to the feeding device configured as described above, by performing energization control of each linear motor 6, a predetermined feed is given to the table 2 by the thrust based on the magnetic attractive force C generated by each linear motor 6. Thus, the table 2 travels linearly in a manner guided by the base 1.

この場合、左右一対のリニアモータ６は共に同一仕様であるが故に、各リニアモータ６が発生する磁気吸引力Ｃは同一で作用する向きが逆であることから、双方のリニアモータ６が発生する磁気吸引力Ｃは相互に相殺されてしまい、したがってその磁気吸引力Ｃに基づく負荷重量が各リニアガイド５に加わることがなくなり、各リニアガイド５の負担が軽減される。   In this case, since the pair of left and right linear motors 6 have the same specifications, the magnetic attractive force C generated by each linear motor 6 is the same and the direction of action is opposite, so both linear motors 6 are generated. The magnetic attractive forces C cancel each other, so that the load weight based on the magnetic attractive force C is not applied to each linear guide 5 and the burden on each linear guide 5 is reduced.

その上、各リニアモータ６を角度αだけ傾斜させて配置してあるために、それぞれのリニアモータ６が発生する磁気吸引力Ｃの分力としてテーブル２をベース１から浮上させる浮上力Ｆが発生し、しかも先に述べたように角度αの大きさはテーブル２やコラム３等の重量を考慮して設定してあることから、上記浮上力Ｆをもってテーブル２等の重量をも相殺することができる。これにより、左右一対のリニアモータ６は浮上力発生手段としての機能をも併せ持っていることになる。   In addition, since each linear motor 6 is disposed at an angle α, a levitation force F that causes the table 2 to float from the base 1 is generated as a component of the magnetic attraction force C generated by each linear motor 6. In addition, as described above, the angle α is set in consideration of the weight of the table 2, the column 3 and the like, so that the weight of the table 2 and the like can be offset by the levitation force F. it can. Thereby, the pair of left and right linear motors 6 also have a function as a levitation force generating means.

その結果として、各リニアガイド５に加わる負荷重量を限りなく零に近いものとすることができ、先の述べたところの「リニアガイドの寿命はそれ自体が受ける荷重の３乗に反比例する」との定義にあてはめれば、各リニアガイド５の計算上の寿命を無限大にすることが可能となる。   As a result, the load weight applied to each linear guide 5 can be made as close to zero as possible, and as described above, “the life of the linear guide is inversely proportional to the cube of the load that the linear guide itself receives”. If the above definition is applied, it is possible to make the calculation life of each linear guide 5 infinite.

実際には、加減速時の荷重変動分があるので、リニアガイド５に加わる荷重がプラス（＋）方向になったりマイナス（−）方向になったりすることがあるが、テーブル２やコラム３およびコイルスライダ６ａ等の可動側となる総重量に比べればごく微少な量であり、ほとんど問題とならない。すなわち、リニアガイド５の負荷重量は静止時においてはほぼ零に近いものとなるとともに、加減速時においても１ｋＮ以下程度の負荷重量となるだけである。   Actually, since there is a load fluctuation at the time of acceleration / deceleration, the load applied to the linear guide 5 may be in the plus (+) direction or minus (−) direction. Compared to the total weight on the movable side of the coil slider 6a and the like, this is a very small amount and causes little problem. In other words, the load weight of the linear guide 5 is substantially close to zero when stationary, and only a load weight of about 1 kN or less during acceleration / deceleration.

このようにリニアガイド５に加わる負荷重量を著しく軽減できることで、リニアガイド５のサイズを大幅に小さくすることができるほか、イニシャルコストの低減と長寿命化によるランニングコストの低減を図ることができるようになる。   Since the load weight applied to the linear guide 5 can be remarkably reduced in this manner, the size of the linear guide 5 can be significantly reduced, and the initial cost and the running cost can be reduced by extending the service life. become.

また、リニアガイド５の転がり抵抗は、リニアガイド５が受ける荷重Ｗにリニアガイド５の摩擦係数μを乗じたものにほかならないから、リニアガイド５が受ける荷重Ｗを実質的に零とすることにより、超低フリクションのスライド案内機構を成立させることができ、リニアモータではとかく問題となりがちであった微速移動時のスティックスリップ現象を解消することができ、超低速から超高速までの全域にわたって高精度な動的位置決め精度を確保することができるようになる。   Further, the rolling resistance of the linear guide 5 is nothing but the load W received by the linear guide 5 multiplied by the friction coefficient μ of the linear guide 5, so that the load W received by the linear guide 5 is made substantially zero. The slide guide mechanism with ultra-low friction can be established, and the stick-slip phenomenon at the slow speed movement, which has been a problem with linear motors, can be resolved. Dynamic positioning accuracy can be ensured.

図２は本発明の第２の実施の形態を示し、図１と共通する部分には同一符号を付してある。   FIG. 2 shows a second embodiment of the present invention, and the same reference numerals are given to the portions common to FIG.

この実施の形態では、テーブル２のウェブ１７における可動側縦壁面１７ａ，１７ｂおよびベース１側の固定側縦壁面１１ａ，１１ｂに図１ような角度αを持たせることなく左右一対のリニアモータ１６と左右各一対のリニアガイド５を対向配置する一方、ウェブ１７の下部に浮上力発生手段としての磁石ユニット８を設けたものである。   In this embodiment, a pair of left and right linear motors 16 are provided without giving the angle α as shown in FIG. 1 to the movable side vertical wall surfaces 17a and 17b and the fixed side vertical wall surfaces 11a and 11b on the base 1 side of the web 17 of the table 2. While a pair of left and right linear guides 5 are arranged to face each other, a magnet unit 8 as a levitation force generating means is provided below the web 17.

この磁石ユニット８は、ベース１に固定した固定側磁石８ａと、この固定側磁石８ａに所定のギャップをもって対向するようにウェブ１７の下端に固定した可動側磁石８ｂとをもって形成されていて、双方の磁石８ａ，８ｂ同士の対向面での極性が同じとなるように設定することにより、磁石８ａ，８ｂ同士の磁気反発力をもってテーブル２等を浮上させる磁気浮上力Ｆを発生するようになっている。   The magnet unit 8 is formed by a fixed side magnet 8a fixed to the base 1 and a movable side magnet 8b fixed to the lower end of the web 17 so as to face the fixed side magnet 8a with a predetermined gap. By setting the magnets 8a and 8b so that the polarities on the facing surfaces of the magnets 8a and 8b are the same, the magnetic levitation force F that causes the table 2 and the like to float with the magnetic repulsive force between the magnets 8a and 8b is generated. Yes.

なお、それぞれの磁石８ａ，８ｂは永久磁石でも電磁石でもよく、また上記の磁気反発力はテーブル２等の重量に応じて決定するものとする。   Each of the magnets 8a and 8b may be a permanent magnet or an electromagnet, and the magnetic repulsive force is determined according to the weight of the table 2 or the like.

したがって、この実施の形態においても磁気による浮上力Ｆが作用することにより、第１の実施の形態と同様にリニアガイド５の負荷重量を大幅に小さくすることができる。   Therefore, also in this embodiment, the magnetic levitation force F acts, so that the load weight of the linear guide 5 can be significantly reduced as in the first embodiment.

本発明に係る送り装置の好ましい実施の形態を示す断面説明図。Cross-sectional explanatory drawing which shows preferable embodiment of the feeder which concerns on this invention. 本発明に係る送り装置の別の実施の形態を示す断面説明図。Cross-sectional explanatory drawing which shows another embodiment of the feeder which concerns on this invention.

符号の説明Explanation of symbols

１…ベース（支持体）
１ａ，１ｂ…固定側縦壁面
２…テーブル（移動体）
５…リニアガイド（直動型ガイド部材）
６…リニアモータ（浮上力発生手段）
６ａ…コイルスライダ（可動子）
６ｂ…永久磁石（固定子）
７ａ，７ｂ…可動側縦壁面
８…磁石ユニット（浮上力発生手段）
１１ａ，１１ｂ…固定側縦壁面
１６…リニアモータ
１７ａ，１７ｂ…可動側縦壁面 1 ... Base (support)
1a, 1b ... fixed side vertical wall surface 2 ... table (moving body)
5… Linear guide (Direct acting guide member)
6 ... Linear motor (levitation force generating means)
6a ... Coil slider (mover)
6b ... Permanent magnet (stator)
7a, 7b ... movable side vertical wall surface 8 ... magnet unit (levitation force generating means)
11a, 11b ... fixed side vertical wall 16 ... linear motor 17a, 17b ... movable side vertical wall

Claims (4)

支持体に案内支持された移動体に水平方向の直線送りを与える送り装置において、
移動体側の左右対称位置にある一対の可動側縦壁面とそれに対向する支持体側のそれぞれの固定側縦壁面との間に、磁気吸引力に基づいて上記送り方向の推力を発生するリニアモータを直動型ガイド部材とともに左右対称となるように個別に介装配置するとともに、
上記支持体に対する移動体の浮上力を発生させる手段を設けたことを特徴とする工作機械の送り装置。 In a feeding device that gives a linear feed in a horizontal direction to a moving body guided and supported by a support body,
A linear motor that generates thrust in the feed direction based on the magnetic attraction force is directly connected between a pair of movable side vertical wall surfaces at the left and right symmetrical positions on the moving body side and the respective fixed side vertical wall surfaces on the support side. Along with the movable guide member, it is arranged separately so as to be symmetrical,
A machine tool feeding device comprising means for generating a floating force of a moving body with respect to the support. 上記浮上力を発生させる手段が磁力に基づくものであることを特徴とする請求項１に記載の工作機械の送り装置。   2. The machine tool feeding apparatus according to claim 1, wherein the means for generating the levitation force is based on magnetic force. 左右一対のリニアモータを左右対称となるように垂直線に対して所定角度傾斜させて配置し、各リニアモータの磁気吸引力に基づく推力発生と並行してそのリニアモータの磁気吸引力に基づいて移動体に浮上力を発生させるようになっていることを特徴とする請求項１または２に記載の工作機械の送り装置。   A pair of left and right linear motors are arranged at a predetermined angle with respect to a vertical line so as to be symmetrical, and based on the magnetic attraction force of the linear motors in parallel with the thrust generation based on the magnetic attraction force of each linear motor. 3. The machine tool feeding apparatus according to claim 1, wherein a floating force is generated in the moving body. 左右一対のリニアモータとは別に、移動体の下方側から磁力に基づく浮上力を発生させる手段を設けたことを特徴とする請求項２に記載の工作機械の送り装置。   3. The machine tool feeding device according to claim 2, further comprising means for generating a levitation force based on a magnetic force from the lower side of the moving body, separately from the pair of left and right linear motors.
JP2004331301A 2004-11-16 2004-11-16 Machine tool feeder Expired - Fee Related JP4815787B2 (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008312405A (en) * 2007-06-18 2008-12-25 Mitsubishi Electric Corp Axial feeding device of linear motor drive
CN102126138A (en) * 2010-12-29 2011-07-20 中捷机床有限公司 Regular L-shaped sliding plate applying linear motor driving
KR101288599B1 (en) * 2007-05-29 2013-07-22 엘지디스플레이 주식회사 Apparatus for transferring substrates

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08192327A (en) * 1995-01-11 1996-07-30 Toshiba Mach Co Ltd Feed device for machine tool
JP2002142438A (en) * 2000-11-02 2002-05-17 Hitachi Ltd Xyz table
JP2003299337A (en) * 2002-04-04 2003-10-17 Canon Inc Positioner

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08192327A (en) * 1995-01-11 1996-07-30 Toshiba Mach Co Ltd Feed device for machine tool
JP2002142438A (en) * 2000-11-02 2002-05-17 Hitachi Ltd Xyz table
JP2003299337A (en) * 2002-04-04 2003-10-17 Canon Inc Positioner

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101288599B1 (en) * 2007-05-29 2013-07-22 엘지디스플레이 주식회사 Apparatus for transferring substrates
JP2008312405A (en) * 2007-06-18 2008-12-25 Mitsubishi Electric Corp Axial feeding device of linear motor drive
CN102126138A (en) * 2010-12-29 2011-07-20 中捷机床有限公司 Regular L-shaped sliding plate applying linear motor driving

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