JP2006141138A - Stage driving control system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a stage driving control method capable of eliminating a special installation area as a damper for damping the oscillation of a structural body and attaining cost reduction in manufacture. <P>SOLUTION: This stage driving control system is constituted of a driving control circuit 1, an oscillation detector 11, a linear motor 12, and a position detector 13. The driving control circuit 1 controls the driving of the linear motor 12. The linear motor 12 has a stator and a stage (a movable element), and carries the stage to a position which is commanded by a position command signal 101. In this stage driving control method, the stage is made to work as a weight, the stator is made to work as an actuator. The stage driving control method becomes the damper having an active mass damper function, thus eliminating need for a special weight for damping and the actuator. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a stage drive control system for controlling the drive of a stage which is a mover of a linear motor, and in particular, a linear motor is used as a silicon wafer transfer means for a semiconductor manufacturing apparatus and has a function of suppressing vibration of the linear motor. The present invention relates to a stage drive control system.

  Conventionally, for example, in a semiconductor manufacturing apparatus or the like, a linear motor is usually used as a drive motor for a stage that is used when a silicon wafer is transferred or exposed. A linear motor consists of a stator and a mover. The stator is composed of a magnet and a rail, and the mover receives a force due to the interaction with the magnet of the stator and moves while being guided by the rail. In the field of semiconductor manufacturing equipment and the like, the mover is often referred to as a stage because it functions as a table on which a transported object such as a silicon wafer is placed. Therefore, in this application, the mover is referred to as a stage. During operation of the linear motor that transports the silicon wafer, a vibration state is generated in the structure on which the linear motor is mounted, which causes a problem in positioning the silicon wafer.

  FIG. 5 is a block diagram showing a linear motor system having a conventional stage drive control system. The stage drive control system in this figure is substantially the same as that disclosed in Patent Document 1 (Japanese Patent Laid-Open No. 2002-061703). It is a configuration. FIG. 6 is a schematic view showing a state in which the linear motor system of FIG. The linear motor system includes a vibration detector 11, a linear motor 12, a position detector 13, a drive control circuit 21, an active mass damper controller 22, an actuator 18, a weight 19, a structure 16, And a vibration isolation mount 17. The linear motor 12 includes a stator 14 and a stage 15 (FIG. 6). As shown in FIG. 6, the linear motor 12 (stator 14 and stage 15) and the vibration detector 11 of FIG. 5 are installed on a structure 16, and the structure 16 is placed on a vibration isolation mount 17. The position detector 13 is built in the same housing as the stator 14 and does not appear in FIG.

  The drive control circuit 21 includes a subtractor 3, a position controller 5, a differentiator 7, a subtractor 28, a speed controller 9 and an amplifier 10. The drive control circuit 21 functions as a stage drive control unit for the linear motor 12. The vibration detector 11 detects the vibration state of the structure 16. The stator 14 of the linear motor 12 receives the drive current 110 output from the drive control circuit 21 and controls the drive of the stage 15. The position detector 13 detects the transport position of the stage 15. The vibration detector 11 includes a position sensor and a uniaxial acceleration sensor. In the drive control circuit 21, the subtractor 3, the position controller 5, the subtractor 28, the speed controller 9, the amplifier 10, the linear motor 12 and the position detector 13 constitute a position control loop. In the drive control circuit 21, the differentiator 7, the subtractor 28, the speed controller 9, the amplifier 10, the linear motor 12, and the position detector 13 constitute a speed control loop. The linear motor (stator 14 and stage 15), drive control circuit 21 and position detector 13 constitute a stage drive control system.

  Next, with reference to FIG. 5, the operation at the time of operation of the linear motor system having the conventional stage drive control system will be described. In an operation state in which drive control for transporting the stage 15 in FIG. 6 is performed by the linear motor 12, a position command signal 101 for commanding the transport position of the stage 15 is input to the drive control circuit 21 from the outside. The position command signal 101 is input to the subtracter 3. The subtracter 3 also receives a transport position signal 113 obtained by detecting the transport position 112 accompanying the operation of the linear motor 12 by the position detector 13. The subtracter 3 performs a subtraction process between the position command signal 101 and the transport position signal 113, and outputs a position error signal 103 representing the difference. The position controller 5 amplifies the position error signal 103 to a predetermined level and outputs it as a position control signal 105.

  The transport position signal 113 output from the position detector 13 is differentiated by the differentiator 7 and input to the subtractor 28 as the differential output 107. The subtracter 28 performs subtraction for subtracting the differential output 107 from the position control signal 105. The speed controller 9 receives the output 108 of the subtractor 28 and generates a speed control signal 109 for controlling the speed of the linear motor 12. The amplifier 10 has a power amplification function for driving the linear motor 12, amplifies the speed control signal 109, and generates a drive current 110. The linear motor 12 receives the drive current 110 output from the amplifier 10 at the stator 14, moves the stage 15 linearly, and transports a transported object such as a silicon wafer mounted on the stage 15. The position of the stage 15 is displaced following the position command signal 101 by the action of the drive control circuit 21 whose operation has been described so far. The transport position 112 of the stage 15 is detected by the position detector 13, and the position detector 13 outputs a transport position signal 113 indicating the detected position.

  The drive control circuit 21 of FIG. 5 has a position control loop that negatively feeds back the conveyance position signal 113 of the linear motor 12 detected by the position detector 13 to the subtractor 3 as described above. A speed control loop for negatively feeding back the differential output 107 to the subtractor 28 is also provided.

  The vibration detector 11 detects the vibration generated in the structure 16 due to the reaction force that the linear motor 12 receives from the stage 15, and outputs the detected vibration as the vibration state signal 111. The active mass damper controller 22 receives the vibration state signal 111 and generates a vibration suppression signal 122 for operating the actuator 18 so that the vibration of the structure 16 is minimized. The actuator 18 applies a vibration 118 having a phase, frequency, and amplitude indicated by the damping signal 122 to the weight 19. The weight 19 reduces the vibration of the structural body 16 by a vibration reaction operation.

  In the linear motor system having the conventional stage drive control method described above with reference to FIGS. 5 and 6, the drive control circuit 21 is used as a linear motor drive means for driving the linear motor 12 in accordance with the position command signal 101. The active mass damper controller 22, the actuator 18, and the weight 19 are provided as damping means for damping the vibration of the structure 16 based on the vibration state signal 111. The actuator 18 and the weight 19 constitute an active mass damper. The active mass damper is an apparatus for performing an operation of attenuating the shaking of the structure by moving the mass (weight) with a force opposite in phase to the shaking of the structure.

  In the semiconductor manufacturing apparatus, the structure 16 is placed on the vibration isolation mount 17 in order to attenuate the vibration from the floor. The stage 15 on which the silicon wafer is placed moves linearly by the interaction with the stator 14, but the structure 16 mainly swings at the resonance frequency of the vibration isolation mount 17 due to the reaction force of the linear movement. In the linear motor system of FIGS. 5 and 6, this vibration is reduced by an active mass damper composed of an actuator 18 and a weight 19.

  As described above, in the linear motor system shown in FIGS. 5 and 6, the stage drive control method includes the linear motor (stator 14 and stage 15), the drive control circuit 21, and the position detector 13. This conventional stage drive control system only controls the linear motor 12 and suppresses the vibration of the structural body 16 and thus does not have a vibration suppression function to suppress the vibration of the linear motor 12. Therefore, the linear motor system shown in FIGS. 5 and 6 is provided with an active mass damper composed of the actuator 18 and the weight 19 separately from the stage drive control system, thereby suppressing the vibration of the structure 16 and thus the linear motor. The vibration suppression function which suppresses 12 vibrations is obtained.

JP2002-061703

  As a most basic linear motor system having a vibration isolation function, there is a passive vibration isolation type linear motor system. The passive vibration isolation type linear motor system supports the structure on which the linear motor is installed with a vibration isolation mount.

  On the other hand, the above-described conventional linear motor system (FIGS. 5 and 6) is obtained by adding an active mass damper and an active mass damper controller to a passive vibration isolation type linear motor system. The vibration isolation method of the linear motor system shown in FIGS. 5 and 6 is an active vibration isolation method. This active vibration isolation method generates reaction stress in order to reduce the vibration of the structure 16. The reaction stress is generated by the active mass damper and the active mass damper controller 2. The active mass damper and the active mass damper controller 2 occupy a space independent of the linear motor system. The active mass damper includes an actuator 18 and a weight 19. The active mass damper controller 2 receives a vibration state signal 111 representing the vibration state of the structure 16 from the vibration detector 11 and sends a vibration suppression signal 122 to the active mass damper. As described above, the linear motor system having the conventional stage drive control method requires a special installation space for the vibration damping means of the structure independently of the stage drive control method, and thus it is difficult to reduce the size. . The actuator is an active device made of a motor or the like and is expensive. Therefore, it has been difficult to manufacture the conventional stage drive control system at low cost.

  Therefore, when the object of the present invention is applied to a linear motor system in which a linear motor is installed on a structure, no special installation space is required for the vibration damping means of the structure, and the manufacturing cost is low. The object is to provide a stage drive control system.

  In order to solve the above-mentioned problems, the present invention provides the following means.

(1) In a stage drive control system in which a linear motor comprising a stage and a stator is installed on a structure, the structure is placed on a vibration isolation mount, and the position of the stage is controlled by driving the linear motor ,
A position detector for detecting a transfer position of the stage and generating a transfer position signal representing the transfer position;
An information input including a position command signal for commanding the transfer position input from the outside, a vibration state signal of the structure detected by a vibration detector installed in the structure, and the transfer position signal is received. And a drive control circuit that outputs a drive current for performing drive control of the stage to the linear motor,
The drive control circuit has a drive function for driving the stage by controlling the linear motor and a vibration damping function for the structure.

(2) The drive control circuit receives the vibration state signal, and generates an damping signal that suppresses vibration of the structure, and an active mass damper controller;
A subtractor that receives the position command signal and the transport position signal and generates a position error signal by subtracting the transport position signal from the position command signal;
A position controller that receives the position error signal and generates a position control signal for the linear motor;
A differentiator for differentiating the transport position signal to generate a differential output;
An adder / subtracter that subtracts and outputs the differential output from an added value of the vibration suppression signal and the position control signal;
A speed controller that receives the output of the adder / subtractor and generates a speed control signal for the linear motor;
The stage drive control method according to (1), further comprising: an amplifier that amplifies the speed control signal and generates a drive current for driving the linear motor.

(3) Gains of the active mass damper controller and the position controller are variable,
The gain of the active mass damper controller is smaller in the acceleration section and the deceleration section of the linear motor than in the constant speed section and the stop section of the linear motor,
The stage drive control system according to (2), wherein the gain of the position controller is larger in the acceleration section and the deceleration section of the linear motor than in the constant speed section and the stop section of the linear motor.

(4) The drive control circuit receives the vibration state signal, and generates an damping signal that suppresses vibration of the structure, and an active mass damper controller;
A first differentiator for differentiating the position command signal and generating a first differential output;
An adder for adding the damping signal and the first differential output to generate an added output;
A subtractor that receives the position command signal and the transport position signal and generates a position error signal by subtracting the transport position signal from the position command signal;
A position controller that receives the position error signal and generates a position control signal for the linear motor;
A second differentiator for differentiating the transport position signal to generate a second differential output;
An adder / subtracter for subtracting a second differential output from an added value of the adder output and the position control signal;
A speed controller that receives the output of the adder / subtractor and generates a speed control signal for the linear motor;
The stage drive control method according to (1), further comprising: an amplifier that amplifies the speed control signal and generates a drive current for driving the linear motor.

  The stage drive control system of the present invention having the above-described configuration does not require a special installation space for the vibration damping means of the structure when applied to a linear motor system in which the linear motor is installed on the structure. Therefore, it can be manufactured at low cost because it does not require an active device such as a special actuator for vibration control.

  Therefore, if the stage drive control system of the present invention is applied to a passive vibration isolation type linear motor system, a small and inexpensive active vibration isolation type linear motor system can be obtained. Further, since the stage drive control system of the present invention does not require an active mass damper that occupies a space independent of the linear motor system, it can be easily added to an existing passive type vibration isolation type linear motor system, and in a wide range. Applicable to linear motor system.

  Next, embodiments of the present invention will be described with reference to the drawings.

  Next, a stage drive control system according to the first embodiment of the present invention will be described with reference to FIG. FIG. 1 is a block diagram showing a linear motor system having a stage drive control system according to a first embodiment of the present invention. FIG. 2 is a schematic diagram showing a linear motor system in a state where the linear motor of FIG. 1 is installed on the structure 16. This stage drive control system includes a drive control circuit 1, a vibration detector 11, a linear motor 12, and a position detector 13. As shown in FIG. 2, the linear motor 12 of FIG. 1 is installed on a structure 16, and the structure 16 is placed on a vibration isolation mount 17. The position detector 13 is built in the same housing as the linear motor 12 and is not shown in FIG. The drive control circuit 1 includes an active mass damper controller 2, a subtracter 3, a position controller 5, a differentiator 7, an adder / subtractor 8, a speed controller 9, and an amplifier 10. The drive control circuit 1 functions as a stage drive control unit for the linear motor 12. The vibration detector 11 detects the vibration state of the structure 16. The linear motor 12 includes a stator 14 and a stage 15. The linear motor 12 receives the drive current output from the drive control circuit 1 by the stator 14 and controls the drive of the stage 15. The position detector 13 detects the transport position of the stage 15. The vibration detector 11 includes a position sensor and a uniaxial acceleration sensor. In the drive control circuit 1, the subtractor 3, the position controller 5, the adder / subtractor 8, the speed controller 9, the amplifier 10, the linear motor 12, and the position detector 13 constitute a position control loop. In the drive control circuit 1, the differentiator 7, the adder / subtractor 8, the speed controller 9, the amplifier 10, the linear motor 12 and the position detector 13 constitute a speed control loop.

  As shown in FIG. 2, the structure 16 is placed on a vibration isolation mount 17 that attenuates vibration from the floor. A linear motor 12 composed of a stator 14 and a stage 15 is installed in a structure 16, and the stage 15 is a mover of the linear motor 12, and the transport position is controlled by a position command signal 101 supplied from the outside to the drive control circuit 1. Is done. As apparent from the comparison with the conventional example shown in the schematic external view of FIG. 6, the actuator 18 and the weight 19 in the conventional example are not necessary in the linear motor system of FIG.

FIG. 3 is a diagram showing waveforms of the speed and acceleration of the linear motor 12 of FIG. 1 and the vibration state of the structure 16. In FIG. 3A, the operation mode of the linear motor 12 is changed in the order of acceleration (section: 0-T ₁ ), constant speed (section: T ₁ -T ₂ ), and deceleration (section: T ₂ -T ₃ ). The speed 31 at the time is shown. FIG. 3 (b) shows acceleration 32 during acceleration and acceleration 33 during deceleration corresponding to FIG. 3 (a). FIG. 3C is a diagram showing the waveforms 34 and 35 of the vibration state of the structure 16 corresponding to FIG.

  Next, with reference to FIG. 1, the operation during operation of the first embodiment will be described. In the operating state in which the drive control for transporting the stage 15 in FIG. 2 is performed by the linear motor 12, a position command signal 101 for commanding the transport position of the stage 15 is input to the drive control circuit 1 from the outside. The position command signal 101 is input to the subtracter 3. The subtracter 3 also receives a transport position signal 113 obtained by detecting the transport position 112 accompanying the operation of the linear motor 12 by the position detector 13. The subtracter 3 performs a subtraction process between the position command signal 101 and the transport position signal 113, and outputs a position error signal 103 representing the difference.

  The position error signal 103 is amplified to a predetermined level by the position controller 5 and output as the position control signal 105. The vibration detector 11 detects the vibration generated in the structure 16 due to the reaction force that the linear motor 12 receives from the stage 15, and outputs the detected vibration as the vibration state signal 111. The active mass damper controller 2 receives the vibration state signal 111 and generates a vibration suppression signal 102 that acts to suppress vibration of the structure 16.

  On the other hand, the transport position signal 113 output from the position detector 13 is differentiated by the differentiator 7 and input to the adder / subtractor 8 as the differentiated output 107. The adder / subtracter 8 performs addition / subtraction processing for subtracting the differential output 107 from the added value of the position control signal 105 and the vibration suppression signal 102. The speed controller 9 receives the output 108 of the adder / subtractor 8 and generates a speed control signal 109 for controlling the speed of the linear motor 12. The amplifier 10 has a power amplification function for driving the linear motor 12, amplifies the speed control signal 109, and generates a drive current 110. The linear motor 12 is driven by a drive current 110 output from the amplifier 10. The stage 15 is conveyed linearly by the mechanical output of the linear motor 12. The linear motor 12 transports the stage 15 to the transport position 112 by the action of the drive control circuit 1 whose operation has been described so far. Thus, the position of the stage 15 is displaced following the position command signal 101.

  The drive control circuit 1 in FIG. 1 has a position control loop that negatively feeds back the conveyance position signal 113 of the linear motor 12 detected by the position detector 13 to the subtractor 3 as described above. A speed control loop for negatively feeding back the differential output 107 to the adder / subtractor 8 is also provided.

  In the embodiment of FIG. 1, the drive control circuit 1 has a drive function for driving the linear motor 12 according to the position command signal 101 and a vibration suppression function for attenuating the vibration of the structural body 16 based on the vibration state signal 111. The stage drive control means is also provided. Thus, in addition to the linear motor 12 and the position detector 13, the stage drive control system configured by including the drive control circuit 1 is the same as the conventional stage drive control system shown in FIGS. The actuator 18 and the weight 19 shown in FIGS. 5 and 6 are not required despite having the function of an active mass damper. Therefore, the embodiment of FIG. 1 enables miniaturization and reduction of manufacturing costs.

  When the linear motor 12 moves on the structure 16, the structure 16 swings at the natural frequency of the vibration isolation mount 17 (made of a spring) that supports the structure 16. The active mass damper realized by the stage drive control system of the embodiment of FIG. 1 is for performing an operation for quickly converging this fluctuation. Therefore, the stage drive control system of the present embodiment linearly moves the stage 15 to the target position while moving to generate a force that cancels the shaking. And this stage drive control system will generate | occur | produce the force which cancels the shake of the structure 16 in the position, when the stage 15 arrives at a target position.

  In the embodiment of FIG. 1, the position control by the position command value (value represented by the position command signal 101) and the vibration suppression control by the vibration state signal 111 of the output of the vibration detector 11 are performed simultaneously. A driving action for moving the position of the linear motor 12 by the position command value and a vibration damping action for suppressing the vibration of the linear motor 12 by the vibration state signal 111 occur simultaneously. Both actions are contradictory, and if the gain of the position control loop is large, the vibration damping action is suppressed. As described above, the first embodiment of FIG. 1 is a composite control system that has two control systems, that is, a position control system and a vibration suppression control system, and each control system exerts mutually opposing actions on the linear motor 12. .

  The first embodiment of the present invention is a composite control system in which the gain of the active mass damper controller 2 and the gain of the position controller 5 are fixed in the drive control circuit of FIG. The gain of the mass damper controller 2 is adjusted to an appropriate ratio, and the balance between the response performance of the linear motor 12 by the position control loop and the vibration suppression performance by the active mass damper controller 2 is appropriately selected.

  The first embodiment is modified to adjust the gain of the position control loop and the gain of the active mass damper controller 2 to an appropriate ratio according to the operation mode of the linear motor 12, so that the linear control by the position control loop is performed. The response performance of the motor 12 and the vibration suppression performance by the active mass damper controller 2 can always be set optimally.

  Next, a modification of the first embodiment in which the response performance and the vibration suppression performance are appropriately balanced depending on whether the operation of the linear motor 12 is the acceleration mode, the constant speed mode, or the deceleration mode. explain. When the linear motor 12 is driven as shown in FIG. 3, the structure 16 is shaken by the movement of the linear motor 12 only in a section where acceleration is generated, that is, an acceleration section and a deceleration section. Since the linear motor 12 generates thrust in the acceleration section and the deceleration section, the structure 16 is swayed by the reaction force of the thrust when stopped after the constant speed section and the deceleration section after the acceleration section.

As described above, FIG. 3 (a) shows a speed 31 corresponding to the acceleration section of the linear motor 12 _{(0 to T} 1), the constant speed _(T 1 ~T ₂₎ and deceleration section _(T 2 ~T ₃₎ 3 (b) shows acceleration 32 during acceleration / acceleration 33 during deceleration. FIG. 3 (c) shows the waveform of the vibration state of the structure 16 in addition to the same accelerations 32 and 33 as in FIG. 3 (b). 34 and 35 are shown. In the stage drive control system, which is a modification of the first embodiment, the gain of the active mass damper controller 2 is set so that the action of damping control is small and the action of position control is large in the acceleration section and the deceleration section. The gain of the active mass damper controller 2 is set so that G2 is reduced, the gain G5 of the position controller 5 is increased, and the action of the vibration suppression control is large and the position control action is small after the constant speed section and after the stop. G2 is increased and the gain G5 of the position controller 5 is decreased.

  For this purpose, the gain G2 of the active mass damper controller 2 and the gain G5 of the position controller 5 are controlled as follows. The conveyance position signal 113 output from the position detector 13 is fed back to the position controller 5. The position controller 5 differentiates the transport position signal 113, calculates the acceleration α of the stage 15, and calculates an appropriate gain G2 of the active mass damper controller 2 and an appropriate gain G5 of the position controller 5 based on the acceleration α. Then, gain commands for instructing the active mass damper controller 2 and the position controller 5 for the respective gains G2 and G5 are generated. In the stage drive control system which is a modification of the first embodiment, the gain command G2 sent from the position controller 5 to the active mass damper controller 2 is indicated by a broken line in FIG. The active mass damper controller 2 and the position controller 5 set their own gains to G2 and G5, respectively, according to the gain command.

  In the stage drive control system, which is a modification of the first embodiment, control is performed so that the damping signal 102 output from the active mass damper controller 2 acts effectively after the constant speed interval and after the stop. The system is operated, and the control system is operated so that the position command signal 101 acts more effectively than the damping signal 102 in the acceleration zone and the deceleration zone, and the synergistic control action by the position command signal 101 and the damping signal 102 is performed. The gain in the composite control system of the drive control circuit 1 is controlled in accordance with the operation mode of the linear motor 12 so as to effectively exhibit the above.

  FIG. 4 is a block diagram showing a stage drive control system according to the second embodiment of the present invention. This stage drive control system has a configuration in which a differentiator 4 and an adder 6 are added to the drive control circuit 1 in the first embodiment of FIG. Therefore, a schematic diagram showing a state in which the stage drive control system of the present embodiment is installed on the structure is shown in FIG. 2 as in the first embodiment of FIG. Therefore, in the following, the second embodiment of FIG. 4 will be described focusing on differences from the first embodiment of FIG. The differentiator 4 and the differentiator 7 correspond to the above-described first and second differentiators, respectively. In the second embodiment of FIG. 4 as well, as in the first embodiment of FIG. 1, the subtractor 3, the position controller 5, the adder / subtractor 8, the speed controller 9, the amplifier 10, the linear motor 12 and The position detector 13 constitutes a position control loop, and the differentiator 7, the adder / subtractor 8, the speed controller 9, the amplifier 10, the linear motor 12 and the position detector 13 constitute a speed control loop.

  In the drive control circuit 1 of FIG. 4, the differentiator 4 differentiates the position command signal 101 and outputs a first differential output 104, and the adder 6 adds the damping signal 102 and the differential output 104, and outputs the addition 106 is generated. The differentiator 4 forms a feedforward control system corresponding to the position command signal 101, and a position control signal 105 and an addition output 106 are input to the adder / subtractor 8. As described above, in the embodiment of FIG. 4, the differentiator 4 is provided and the feedforward control is adopted, so that the gain of the position control loop can be reduced. Since this feedforward control feeds forward the first differential output 104 obtained by differentiating the position command signal 101 by the differentiator 4, it can be referred to as speed feedforward control. The output 107 of the differentiator 7 in the second embodiment of FIG. 4 corresponds to the second differential output described above.

  As described above, in the embodiment of FIG. 4, the speed responsiveness in the drive control circuit 1 is improved by inserting the differentiator 4 and performing the speed feedforward control. Since the linear motor 12 cannot be controlled when there is no error amount only by feedback control, the error amount (value represented by the position error signal 103) increases as a result. Since it operates, the amount of error can be reduced. By adopting feedforward control, good position control can be performed even if the gain of the position control loop in the embodiment of FIG. 4 is reduced, so that the vibration control performance and the position control performance can be optimally improved.

  In the embodiment of FIG. 4, the drive control circuit 1 receives the position command signal 101 and drives the linear motor 12 based on the position detector 13 and the vibration of the structure 16 based on the vibration state signal 111. It is configured as a stage drive control means having both a damping function for damping. As described above, the stage drive control system configured by including the drive control circuit 1 together with the linear motor 12 and the position detector 13 eliminates the need for an actuator and weight for the active mass damper. Therefore, the embodiment of FIG. 4 enables miniaturization and reduction of manufacturing costs.

  The conventional example shown in FIGS. 5 and 6 includes the weight 19, but as is apparent from the above description, in the present invention, the stage 15 serves as the weight 19 in FIGS. 5 and 6. Since the stage 15 is heavy and sufficiently functions as a weight, the weight can be omitted in the present invention.

  Although the present invention has been specifically described with reference to the embodiments, it is needless to say that the present invention is not limited to these embodiments.

It is a block diagram which shows a linear motor system provided with the stage drive control system which is the 1st Embodiment of this invention. FIG. 2 is a schematic diagram illustrating the linear motor system of FIG. 1 in a state where a linear motor is installed on a structure body 16. It is a figure which shows the vibration state of a structure when operation | movement of a linear motor is an acceleration mode, a constant speed mode, and a deceleration mode. It is a block diagram which shows a linear motor system provided with the stage drive control system which is the 2nd Embodiment of this invention. It is a block diagram which shows a linear motor system provided with the conventional stage drive control system. FIG. 6 is a schematic external view showing the linear motor system of FIG. 5.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1,21 Drive control circuit 2,22 Active mass damper controller 3,28 Subtractor 4,7 Differentiator 5 Position controller 6 Adder 8 Adder / Subtractor 9 Speed controller 10 Amplifier 11 Vibration detector 12 Linear motor 13 Position detection 14 Linear motor stator 15 Linear motor stage (mover)
16 Structure 17 Anti-Vibration Mount 18 Actuator 19 Weight

Claims (4)

In a stage drive control system in which a linear motor including a stage and a stator is installed on a structure, the structure is placed on a vibration isolation mount, and the position of the stage is controlled by driving the linear motor.
A position detector for detecting a transfer position of the stage and generating a transfer position signal representing the transfer position;
An information input including a position command signal for commanding the transfer position input from the outside, a vibration state signal of the structure detected by a vibration detector installed in the structure, and the transfer position signal is received. And a drive control circuit that outputs a drive current for performing drive control of the stage to the linear motor,
The drive control circuit has a drive function for driving the stage by controlling the linear motor and a vibration damping function for the structure. The drive control circuit receives the vibration state signal and generates a vibration suppression signal that suppresses vibration of the structure, and an active mass damper controller;
A subtractor that receives the position command signal and the transport position signal and generates a position error signal by subtracting the transport position signal from the position command signal;
A position controller that receives the position error signal and generates a position control signal for the linear motor;
A differentiator for differentiating the transport position signal to generate a differential output;
An adder / subtracter that subtracts and outputs the differential output from an added value of the vibration suppression signal and the position control signal;
A speed controller that receives the output of the adder / subtractor and generates a speed control signal for the linear motor;
The stage drive control system according to claim 1, further comprising: an amplifier that amplifies the speed control signal and generates a drive current for driving the linear motor. Gains of the active mass damper controller and the position controller are variable,
The gain of the active mass damper controller is smaller in the acceleration section and the deceleration section of the linear motor than in the constant speed section and the stop section of the linear motor,
The stage drive control system according to claim 2, wherein the gain of the position controller is larger in the acceleration section and the deceleration section of the linear motor than in the constant speed section and the stop section of the linear motor. The drive control circuit receives the vibration state signal and generates a vibration suppression signal that suppresses vibration of the structure, and an active mass damper controller;
A first differentiator for differentiating the position command signal and generating a first differential output;
An adder for adding the damping signal and the first differential output to generate an added output;
A subtractor that receives the position command signal and the transport position signal and generates a position error signal by subtracting the transport position signal from the position command signal;
A position controller that receives the position error signal and generates a position control signal for the linear motor;
A second differentiator for differentiating the transport position signal to generate a second differential output;
An adder / subtracter for subtracting a second differential output from an added value of the adder output and the position control signal;
A speed controller that receives the output of the adder / subtractor and generates a speed control signal for the linear motor;
The stage drive control system according to claim 1, further comprising: an amplifier that amplifies the speed control signal and generates a drive current for driving the linear motor.

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