JP4802839B2 - Active vibration damping device and control method of active vibration damping device - Google Patents

Description

  The present invention relates to an active vibration damping device that controls vibration suppression of a target device and a method for controlling the active vibration damping device.

  Conventionally, as one of the means for suppressing the vibration of a structure, an additional vibration body is provided in the vibration direction of the structure, and the reaction when the additional vibration body is displaced with respect to the target structure is used as a target. There is known a dynamic damper that suppresses the vibration of the structure. There is also an active dynamic damper that increases the damping effect by providing an actuator between the additional vibrating body and the structure to be controlled, and generating a damping force on the actuator according to the measured vibration amount of the target structure. Are known.

  However, in such an active dynamic damper, it is necessary to drive the actuator in order to suppress vibration, and some energy must be added to it, which usually requires a running cost in the form of a power charge, etc. Energy saving of driving power is desired.

In order to solve such a problem, an active vibrating body is attached to the structure, and an active vibration suppression force is applied by an actuator provided between the target structure and the additional vibrating body to suppress vibration of the target structure. In the dynamic damper, the component less than the natural vibration frequency of the structure that has less influence on vibration suppression in the damping force command is removed by the low-pass filter, so that the power consumption of the actuator drive can be reduced. A control method is known (see, for example, Patent Document 1).
Japanese Patent No. 2766723

By the way, in the active dynamic damper as shown in Patent Document 1, it is necessary to adjust the two parameters of the spring realized by the actuator and the spring constant and damping coefficient of the damper so as to have the same characteristics as those of the optimum dynamic vibration absorber. There is a problem that adjustment work is troublesome.
There is also a problem that an ideal skyhook damper cannot be realized due to the effect of the spring realized by the actuator.

  The present invention has been made in view of such circumstances, and an object thereof is to provide an active vibration damping device and a control method for the active vibration damping device that can realize an ideal skyhook damper.

The active vibration damping device of the present invention includes an additional mass member supported by a spring element and a damper element, an actuator that drives the additional mass member , the additional mass member, and the control target device. a displacement sensor for detecting the relative displacement, wherein an acceleration sensor for detecting an absolute acceleration of the damping target device outputs based drive command composed of a plurality of signals to said absolute acceleration and the relative displacement amount, and control means for driving the actuator, a vibration suppressing active damping apparatus using a reaction force when driven in accordance with the vibration speed of the vibration damping target device by the prior SL additional mass member said actuator It said control means includes a signal providing a force corresponding to the absolute velocity of the vibration damping target device obtained from the acceleration sensor output, supporting the additional mass member A signal applied on the basis of the negative spring stiffness spring characteristic beat consumption to close to 0 member to said displacement sensor output, the negative damping closer to 0 to cancel the attenuation characteristic of the member supporting the additional mass member said by outputting a signal to provide on the basis of the displacement sensor output as the drive command, it characterized that you perform damping control of the vibration control target device.

Absolute speed before Symbol damping target device is preferably determined based on the acceleration sensor output to the integral value.

Signal to provide a spring rigidity of the front Kimake is preferably the is obtained a displacement sensor output by positive feedback.

Before the signal giving the attenuation Kimake is preferably the at the differential value of the displacement sensor output which are subjected to positive feedback.

Comprising a high pass filter to remove low frequency range of the previous SL displacement sensor output, the control means preferably outputs the driving command based on a signal obtained through the high-pass filter.

Comprising a high pass filter to remove low frequency range of the previous SL acceleration sensor output, the control means, based on a signal obtained through the high-pass filter, it is desirable to determine the signals to provide a force corresponding to the absolute velocity .

Includes a band-pass filter to detect only the damped vibration from the previous SL acceleration sensor output, the control means, based on a signal obtained through said band-pass filter, a signal that gives a force corresponding to the absolute velocity It is preferable to obtain .

It is desirable to Ru includes a band-pass filter for extracting a signal of a vibration control target frequency band only from the drive command for the previous SL actuator.

It is preferred to Ru with a notch filter for removing signals of vibration components other than the Target vibrations.

An actuator before Symbol actuator electromagnetic detects the counter electromotive force of the actuator, and feedback the inverse electromotive force signal as a speed signal, the said additional mass member further integration process to the counter electromotive force signal It is desirable to feed back as a relative displacement amount with the device to be controlled .

Before SL actuator is preferably a reciprocating motor.

The control method of the active vibration damping device of the present invention includes an additional mass member supported by a spring element and a damper element, an actuator that drives the additional mass member , the additional mass member, and the control with respect to the control target device. a displacement sensor for detecting a relative displacement amount between the target device, an acceleration sensor for detecting an absolute acceleration of the vibration control target device, based on a drive command composed of a plurality of signals to said absolute acceleration and the relative displacement In an active vibration damping device having a control means for outputting and driving the actuator, vibration suppression is performed using a reaction force when the additional mass member is driven by the actuator according to the vibration speed of the vibration damping target device. a control method of an active vibration damping device which, given a force corresponding to the absolute velocity of the vibration damping target device obtained from the acceleration sensor output That signal and the signal applied on the basis of a negative spring stiffness closer to the additional mass member 0 and vanishing out the spring characteristics of the support members to the displacement sensor output, the attenuation characteristic of the member supporting the additional mass member The vibration control of the device to be controlled is performed by outputting, as the drive command, a signal that gives a negative attenuation that cancels and approaches 0 based on the output of the displacement sensor .

  According to the present invention, it is possible to obtain an effect of being able to operate as an ideal skyhook damper without being affected by the spring characteristics and damping characteristics constituting the vibration damping device. In addition, by limiting the control band to the vicinity of the frequency of the target vibration, it is possible to obtain an effect that good vibration suppression control can be performed while taking advantage of the static spring characteristics of the vibration damping device.

  Hereinafter, an active vibration damping device according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a block diagram showing the configuration of the embodiment. In this figure, reference numeral 1 denotes a control target device 4 that is an object of vibration suppression control, and the additional mass member is driven by an actuator (reciprocating motor) provided therein to suppress vibration of the control target device 4. An active vibration damping device (hereinafter referred to as a vibration damping device). The control target device 4 here is a device or structure that needs to suppress its own vibration, such as a semiconductor-related device such as a robot arm, a mounter device, or an exposure device, a semiconductor transport vehicle, and plant piping. is there. Here, description will be made assuming that the control target device 4 has a predetermined mass and includes a spring 41 and a damper 42.

  Reference numeral 2 denotes a controller that controls the vibration damping device 1. Reference numeral 3 denotes a power amplifier that drives the vibration damping device 1. Reference numeral 11 denotes an additional mass (hereinafter referred to as a weight) added to the control target device 4. Reference numeral 12 denotes a stator constituting a reciprocating motor, which is fixed to the control target device 4. Reference numeral 13 denotes a mover constituting the reciprocating motor, which reciprocates (up and down in the drawing of FIG. 1). The vibration damping device 1 is fixed to the control target device 4 so that the direction of vibration to be suppressed of the control target device 4 matches the reciprocating direction (thrust direction) of the mover 13. Reference numeral 14 denotes a leaf spring that supports the mover 13 and the weight 11 so as to be movable in the thrust direction. Reference numeral 15 denotes a shaft that joins the movable element 13 and the weight 11 and is supported by a leaf spring 14. Reference numeral 16 denotes a displacement sensor that detects a relative displacement between the control target device 4 and the weight 11, and information on the detected displacement amount is output to the controller 2. Reference numeral 17 denotes an acceleration sensor that detects the acceleration of the control target device 4, and the detected acceleration information is output to the controller 2.

Here, the operation principle of the vibration damping device 1 will be described with reference to FIG. FIG. 2 is a schematic diagram modeling the vibration damping device 1 and the control target device 4 shown in FIG. In this figure, reference numeral M denotes a reciprocating motor which constitutes a spring element (k ₂₎ and the damper element (C ₂₎ and the actuator (u). Here, description will be made assuming that the mass of the weight 11 is m ₂ and the mass of the control target device 4 is m ₁ . Since the frequency of the control target device 4 is determined by the characteristics of the spring 41 having the spring constant k ₁ and the damper 42 having the damping coefficient C ₁ , if the weight 11 can function as a dynamic vibration absorber, the vibration of the control target device 4 is reduced. It becomes possible to suppress. The dynamic vibration absorber vibrates the weight 11 supported via the reciprocating motor M by driving the reciprocating motor M, and suppresses the vibration of the control target device 4 by the reaction force when the weight 11 vibrates. It is. The dynamic vibration absorber realized by the reciprocating motor M and the weight 11 is realized by adjusting the controller 2 because the spring element and the damper element of the passive dynamic vibration absorber are realized by the reciprocating motor M. However, it is necessary to strictly adjust the spring element and the damper element.

As shown in FIG. 2, in order to realize an ideal skyhook damper by adjusting the reciprocating motor M having a spring element and a damper element by the controller 2, a spring constant k ₂ and a damping coefficient C _{2 are used.} The force of proportional to the absolute speed should be applied. In the present invention, the reciprocating motor M is controlled based on the output of the displacement sensor 16 to give negative spring rigidity and negative damping, thereby canceling the spring constant k ₂ and the damping coefficient C ₂ closer to zero. The purpose is to eliminate the influence of the elements of the spring and the damper and to obtain the absolute speed of the control target device 4 based on the output of the acceleration sensor 17 and to control it so as to approach the characteristics of the skyhook damper based on these. At this time, the spring characteristics may be adjusted so that the natural frequency of the weight 11 is lower than the natural frequency of the control target device 4. Further, the attenuation coefficient may be adjusted so as to be smaller than C2. Strict adjustment is unnecessary as compared with the dynamic vibration absorber, and the parameter for suppressing the vibration of the control target device 4 can be subjected to vibration suppression control only by adjusting the feedback gain of the absolute speed.

Next, the configuration and control operation of the control system will be described with reference to FIG. FIG. 3 is a block diagram showing a control system model of the apparatus shown in FIG. In FIG. 3, “1 / m ₂ ”, “1 / s”, and “1 / s” in the upper stage are blocks indicating the state of the displacement x ₂ of the weight 11 when a force is applied, and “1” in the lower stage. “/ M ₁ ”, “1 / s”, and “1 / s” are blocks indicating the state of the displacement x ₁ of the control target device 4 when a force is applied. K ₂ and C ₂ indicate spring constants and damping coefficients of mechanical elements such as the leaf spring 14 of the reciprocating motor M. Further, c ₁ and k ₁ indicate the damping coefficient of the damper 42 and the spring constant of the spring 41, respectively. The controller 2 that performs the vibration suppression control inputs the output Ks of the displacement sensor 16 and passes the frequency limiting filter 21 to remove unnecessary signal components, and then provides a displacement feedback gain Kc and a frequency limiting filter. The relative speed s is obtained by differentiating the output of 21, and the feedback gain Cc of the relative speed is given to this. On the other hand, the controller 2 integrates the output Ka of the acceleration sensor 17 to convert it into an absolute speed, and then gives an absolute speed feedback gain Csc. A signal given the displacement feedback gain Kc, a signal given the relative speed feedback gain Cc, and a signal given the absolute speed feedback gain Csc are combined and passed through the frequency limiting filter 22, which is unnecessary. After removing the signal component, the signal is output to the power amplifier 3. Thus, the reciprocating motor (actuator) is driven based on the output signal of the power amplifier 3. At this time, the spring constant k ₂ and the damping coefficient C ₂ are controlled to approach 0 based on the displacement amount signal, and are controlled to act as a skyhook damper based on the vibration acceleration signal. As a result of such control, it is possible to operate as an ideal skyhook damper without being affected by the spring elements constituting the vibration damping device 1.

Referring now to FIG. 4, the spring constant k ₂ and the attenuation coefficient C ₂ based on the displacement amount is controlled so as to approach zero, the control as damping coefficient C ₂ is the damping coefficient of the skyhook damper The operation | movement which performs is demonstrated. FIG. 4 is a block diagram showing an operation principle model of the present invention. Δk ₂ shown in FIG. 4A is a gain corresponding to negative spring rigidity for eliminating the influence of the spring element k ₂ shown in FIG. On the other hand, ΔC ₂ shown in FIG. 4A is a gain for eliminating the influence of the damper element C ₂ shown in FIG. V is a gain with respect to the absolute speed of the control target device 4. In FIG. 4A, Δk ₂ is a negative spring constant corresponding to the spring constant k ₂ , and ΔC ₂ is a negative damping coefficient corresponding to the damper element C ₂ , so that the spring element k ₂ and the damper element C ₂ are apparently used. As shown in FIG. 4B, the control can be performed as a model of only the control amount V based on the absolute speed of the control target device 4. Then, since it is only necessary to control the damping coefficient to realize the skyhook damper based on V in FIG. 4B, optimal vibration damping control can be performed.

  Next, the frequency limiting filter 21 shown in FIG. 3 will be described. The filter 21 is a high pass filter for removing a low frequency portion of the output signal of the displacement sensor 16. By providing this high-pass filter, the static stiffness can be maintained with the spring constant of the mechanical system and the dynamic stiffness can be reduced, so that the static displacement of the additional mass can be kept unchanged. . The filter 21 may further include a band-pass filter for detecting only the vibration to be controlled among the output signals of the displacement sensor 16. The filter 21 may further include a notch filter for removing a signal of a vibration component (higher order mode vibration or the like) other than the vibration to be controlled.

  Further, a high-pass filter may be provided between the controller 2 and the power amplifier 3 for removing low frequency components from the output signal of the controller 2 (drive command for the reciprocating motor M). As a result, the static rigidity can be maintained by the spring constant of the mechanical system, and the dynamic rigidity can be reduced, so that the static displacement of the auxiliary mass can be kept unchanged. Further, a band-pass filter for extracting a signal in the control target frequency range from the output signal of the controller 2 (drive command for the reciprocating motor M) may be provided between the controller 2 and the power amplifier 3.

  Further, a high-pass filter for removing a low frequency portion of the acceleration sensor 17 may be provided. Moreover, you may provide the band pass filter for detecting only the vibration for vibration suppression from the output of the acceleration sensor 17. A filter equivalent to the filter 21 may be provided at the output position of the acceleration sensor 17. Further, the filter 21 may be omitted, and a filter equivalent to the filter 21 may be provided at the position of the filter 22.

  If the spring stiffness is set to 0 in the entire frequency range, the position holding force of the additional mass is lost, which makes it unstable. Thus, by limiting the control band to the vicinity of the frequency of the vibration to be controlled, the damping device Good vibration control can be performed while utilizing the static spring characteristic of 1.

  In the above description, the detection of the relative speed signal is obtained based on the output of the displacement sensor 16, but the counter electromotive force (reciprocal motor (electromagnetic actuator) generated by the relative motion of the weight 11 and the control target device 4 ( (Proportional to the relative displacement) may be detected and fed back as a velocity signal, and may be fed back as a vibration displacement signal through integration processing.

It is a block diagram which shows the structure of one Embodiment of this invention. It is the schematic diagram which modeled the apparatus shown in FIG. It is a block diagram which shows the control system model of the apparatus shown in FIG. It is a block diagram which shows an operation principle model.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Vibration control device, 11 ... Weight, 12 ... Reciprocating motor (stator), 13 ... Reciprocating motor (moving element), 14 ... Leaf spring, 15 ... Shaft, 16 ... Displacement sensor, 2 ... Controller, 3 ... Power amplifier, 4 ... Control target device, 41 ... Spring element, 42 ... Damper element

Claims (12)

An additional mass member supported by a spring element and a damper element, an actuator that drives the additional mass member, and a displacement sensor that detects a relative displacement amount between the additional mass member and the control target device with respect to the control target device And an acceleration sensor for detecting the absolute acceleration of the device to be controlled, and a control means for driving the actuator by outputting a drive command composed of a plurality of signals based on the relative displacement amount and the absolute acceleration. , a vibration suppressing active damping apparatus using a reaction force when driven in accordance with the vibration speed of the vibration damping target device by the prior SL additional mass member said actuator,
Said control means, said signal providing a force corresponding to the absolute velocity of the vibration damping target device obtained from the acceleration sensor output, a negative closer to the additional mass member 0 and vanishing out the spring characteristics of the supporting members of the A signal giving spring stiffness based on the displacement sensor output and a signal giving negative damping approaching zero by canceling the damping characteristic of the member supporting the additional mass member based on the displacement sensor output are output as the drive command. it allows active control device comprising a TURMERIC row damping control of the control target device. The absolute velocity of the control target device, an active vibration damping device according to 請 Motomeko 1 Ru calculated based on the integrated value of the acceleration sensor output. The active vibration damping device according to claim 1, wherein the signal giving the negative spring stiffness is obtained by positively feeding back the displacement sensor output. 2. The active vibration damping device according to claim 1, wherein the signal giving the negative attenuation is obtained by positively feeding back a differential value of the displacement sensor output. The high-pass filter which removes the low frequency range of the displacement sensor output is provided , and the control means outputs the drive command based on the signal obtained through the high-pass filter . Active vibration control device. A high-pass filter that removes a low-frequency region of the acceleration sensor output is provided , and the control means obtains a signal that gives a force corresponding to the absolute speed based on a signal obtained through the high-pass filter. 5. The active vibration damping device according to any one of 4 above. A band-pass filter that detects only vibration to be controlled from the acceleration sensor output is provided , and the control means obtains a signal that gives a force corresponding to the absolute speed based on a signal obtained through the band-pass filter. The active vibration damping device according to claim 1. Active damping device according to any preceding 請 Motomeko 1 7 having a band pass filter for extracting a signal of only the damped frequency range from a drive command for the actuator. Active vibration damping device according to any one of 請 Motomeko 1 having a notch filter for removing signals of vibration components other than the target vibration 8. The actuator is an electromagnetic actuator, detects a back electromotive force of the actuator, feeds back the back electromotive force signal as a speed signal, and further integrates the back electromotive force signal to control the additional mass member and the control active vibration damping device according to 請 Motomeko 1 you feedback as a relative displacement amount between the target device. The actuator active vibration damping device according to any one of Ah Ru請 Motomeko 1 to 10 in reciprocating motor. An additional mass member supported by a spring element and a damper element, an actuator that drives the additional mass member, and a displacement sensor that detects a relative displacement amount between the additional mass member and the control target device with respect to the control target device And an acceleration sensor for detecting the absolute acceleration of the device to be controlled, and a control means for driving the actuator by outputting a drive command composed of a plurality of signals based on the relative displacement amount and the absolute acceleration. In the active vibration damping device, the active mass damping device controls the vibration using a reaction force when the additional mass member is driven by the actuator according to the vibration speed of the vibration damping target device,
Said absolute signal to provide a force corresponding to the speed, the negative spring stiffness closer to the vanishing to 0 hit the spring characteristics of the member supporting the additional mass member of the vibration control target device obtained from the acceleration sensor output displacement The control is performed by outputting a signal given based on the sensor output and a signal giving a negative damping based on the displacement sensor output that cancels the damping characteristic of the member that supports the additional mass member and approaches zero, as the driving command. A method for controlling an active vibration damping device, comprising performing vibration damping control of a target device.

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