JP2006140210A - Ultrasonic vibration cutting device and amplitude measuring method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an ultrasonic vibration cutting device measuring amplitude in a radial direction of a cutting blade which ultrasonic-vibrates and improving metal cutting precision. <P>SOLUTION: The ultrasonic vibration cutting device ultrasonic-vibrates the cutting blade 22 in the radial direction and cuts a work piece. The ultrasonic vibration cutting device is provided with an amplitude measuring device 50 measuring amplitude (d) where the cutting blade 22 ultrasonic-vibrates in the diameter direction. Since amplitude (d) where the cutting blade 22 ultrasonic-vibrates in the radial direction can be measured, cutting depth of the cutting blade 22 can be controlled based on measured amplitude (d). It can be confirmed whether the cutting blade 22 vibrates at scheduled amplitude (d) or not. Consequently, metal cutting precision can be improved. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an ultrasonic vibration cutting apparatus and an amplitude measurement method, and more particularly to an ultrasonic vibration cutting apparatus that cuts a workpiece by ultrasonically vibrating a cutting blade in a radial direction and an amplitude measurement method in the apparatus.

  In order to divide a workpiece such as a semiconductor wafer into chips, a cutting apparatus such as a dicing apparatus that cuts a semiconductor wafer into a lattice with a cutting blade that is a cutting grindstone is known. In such a cutting apparatus, it is a continuous problem to suppress the temperature rise at the machining point and to reduce chipping without increasing the cutting resistance. As means for solving such a problem, cutting using ultrasonic vibration has been studied.

  As an example of such a cutting method using ultrasonic vibration, Patent Document 1 describes an apparatus that ultrasonically vibrates a cutting blade in a thickness direction (rotational axis direction). In this method, a force that widens the cutting groove of the semiconductor wafer works by the ultrasonically oscillating cutting blade, so that there is a problem that the cutting resistance is inevitably increased and chipping is likely to occur.

  As a method for solving such a problem, Patent Document 2 describes an ultrasonic vibration cutting device that cuts a workpiece by ultrasonically vibrating a cutting blade in the radial direction thereof. In this ultrasonic cutting apparatus, the transmission direction of ultrasonic vibration transmitted through a rotating shaft (spindle) to which a cutting blade is attached is converted into a vertical direction by a vibration transmission direction converter attached together with the cutting blade. Thus, the cutting blade is vibrated in the radial direction.

JP 2002-336775 A JP 2000-210928 A

  However, in the above conventional ultrasonic vibration cutting apparatus, the cutting blade is vibrated in the radial direction. However, since the cutting blade cannot measure and grasp the amplitude of ultrasonic vibration in the radial direction, There has been a problem that the depth of cut cannot be controlled favorably. Further, if the amplitude cannot be measured, there is a problem that it cannot be confirmed whether or not the cutting blade vibrates at a predetermined amplitude. As a result, the cutting accuracy by the ultrasonic vibration cutting device was a factor.

  Therefore, the present invention has been made in view of such problems, and the object of the present invention is to measure the amplitude at which the cutting blade ultrasonically vibrates in the radial direction to improve the cutting accuracy. It is an object of the present invention to provide a new and improved ultrasonic vibration cutting apparatus and an amplitude measurement method in the ultrasonic vibration cutting apparatus.

  In order to solve the above-mentioned problems, according to a first aspect of the present invention, there is provided an ultrasonic vibration cutting apparatus for cutting a workpiece by ultrasonically vibrating a cutting blade in a radial direction. This ultrasonic vibration cutting device includes an amplitude measuring device that measures the amplitude of the ultrasonic vibration of the cutting blade in the radial direction. As a result, the amplitude of the ultrasonic vibration of the cutting blade in the radial direction can be measured, so that the cutting depth of the cutting blade can be controlled based on the measured amplitude, and whether or not the cutting blade vibrates at the planned amplitude. Can also be confirmed. Therefore, the cutting accuracy can be improved.

  Further, the amplitude measuring device has a light emitting element having a light emitting diameter larger than a vibration width of the cutting blade ultrasonically vibrating in a radial direction and a light receiving diameter larger than a vibration width of the cutting blade ultrasonically vibrating in the radial direction. The cutting blade is ultrasonically vibrated in the radial direction based on a change in the amount of light received by the light receiving element when the cutting edge of the cutting blade is ultrasonically vibrated in a light beam connecting the light emitting element and the light receiving element. The amplitude to be measured may be measured. As a result, the amplitude of the ultrasonic vibration of the cutting blade in the radial direction can be accurately measured. Further, since the measurement is performed by a non-contact method, the cutting blade can be prevented from being damaged.

  The “width of vibration that causes the blade to vibrate ultrasonically in the radial direction” is the difference between the radius of the cutting blade that vibrates ultrasonically in the radial direction at the time of maximum diameter expansion and the radius of the cutting blade at the time of minimum diameter reduction. It is. Therefore, “the width of vibration in which the cutting blade ultrasonically vibrates in the radial direction” is twice the “amplitude in which the cutting blade ultrasonically vibrates in the radial direction”.

  In addition, the amplitude measuring device includes a contact that contacts the cutting edge of the cutting blade and vibrates following the ultrasonic vibration in the radial direction of the cutting blade, and the cutting blade is in contact with the contact. The amplitude of ultrasonic vibration of the cutting blade in the radial direction may be measured based on the change in the position of the contact when the blade is vibrated ultrasonically. As a result, the amplitude of the ultrasonic vibration of the cutting blade in the radial direction can be accurately measured.

  The ultrasonic vibration cutting apparatus includes: a spindle; a spindle housing that rotatably supports the spindle; a cutting blade attached to the tip of the spindle; and an ultrasonic vibrator that ultrasonically vibrates the spindle. The transmission direction of the ultrasonic vibration transmitted from the ultrasonic vibrator via the spindle may be changed, and the cutting blade may be ultrasonically vibrated in the radial direction. Thereby, the cutting blade can be ultrasonically vibrated accurately and evenly through the spindle.

  In order to solve the above problems, according to another aspect of the present invention, in an ultrasonic vibration cutting apparatus for cutting a workpiece by ultrasonically vibrating the cutting blade in the radial direction, the cutting blade is moved in the radial direction. There is provided an amplitude measuring method for measuring an amplitude of ultrasonic vibration of a cutting blade in a radial direction using a cutting blade detection device that detects that the cutting edge of the cutting blade has reached a predetermined position when moved. The amplitude measuring method includes a step of measuring a position of the cutting blade when the cutting blade detecting device detects a cutting edge of the cutting blade by moving a cutting blade in a state of not being ultrasonically vibrated in a radial direction; A step of measuring the position of the cutting blade when the cutting blade is moved in the radial direction and the cutting blade detector detects the cutting edge of the cutting blade; Detecting a difference between the position of the cutting blade measured and the position of the cutting blade measured in the state of ultrasonic vibration, and determining an amplitude at which the cutting blade ultrasonically vibrates in a radial direction. Features. As a result, the amplitude of the ultrasonic vibration of the cutting blade in the radial direction can be measured, so that the cutting depth of the cutting blade can be controlled based on the measured amplitude, and whether or not the cutting blade vibrates at the planned amplitude. Can also be confirmed. Therefore, the cutting accuracy can be improved.

  In addition, the cutting blade detection device has a light emitting element and a light receiving element arranged to face each other at a predetermined interval, and determines whether or not the cutting edge of the cutting blade exists on a light beam connecting the light emitting element and the light receiving element. It may be a non-contact sensor for sensing. This can prevent the cutting blade from being damaged.

  Further, the cutting blade detection device may be a contact sensor that detects that the cutting edge of the cutting blade is in contact. This makes the structure of the cutting blade detector simple and inexpensive.

  The ultrasonic vibration cutting apparatus includes: a spindle; a spindle housing that rotatably supports the spindle; a cutting blade attached to the tip of the spindle; and an ultrasonic vibrator that ultrasonically vibrates the spindle. The transmission direction of the ultrasonic vibration transmitted from the ultrasonic vibrator via the spindle may be changed, and the cutting blade may be ultrasonically vibrated in the radial direction. Thereby, the cutting blade can be ultrasonically vibrated accurately and evenly through the spindle.

  As described above, according to the present invention, the amplitude when the cutting blade of the ultrasonic vibration cutting device vibrates ultrasonically in the radial direction can be measured. For this reason, the cutting depth of the cutting blade with respect to the workpiece can be suitably controlled based on the measured amplitude, and it can also be confirmed whether or not the cutting blade vibrates with a predetermined amplitude. Therefore, the cutting accuracy of the workpiece by the ultrasonic vibration cutting device can be improved.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the present specification and drawings, components having substantially the same functional configuration are denoted by the same reference numerals, and redundant description is omitted.

  First, based on FIG. 1, the whole structure of the dicing apparatus 10 comprised as an example of the ultrasonic vibration cutting apparatus concerning the 1st Embodiment of this invention is demonstrated. FIG. 1 is an overall perspective view showing a dicing apparatus 10 according to the present embodiment.

  As shown in FIG. 1, the dicing apparatus 10 includes, for example, a cutting unit (spindle unit) 20 that cuts a workpiece 12 such as a semiconductor wafer, and a chuck table 15 that is a holding means for holding the workpiece 12. , A cutting unit moving mechanism (not shown) and a chuck table moving mechanism (not shown).

  The cutting unit 20 includes a cutting blade (details will be described later) mounted on a spindle. The cutting unit 20 cuts the workpiece 12 to form an extremely thin kerf (cut groove) by cutting the workpiece 12 while rotating a cutting blade that vibrates ultrasonically in the radial direction at a high speed. be able to.

  Further, the chuck table 15 is, for example, a disk-shaped table having a substantially flat upper surface, and is provided with a vacuum chuck (not shown) on the upper surface. For example, the workpiece 12 supported by the frame 14 via the wafer tape 13 is placed on the chuck table 15, and the workpiece 12 can be stably held by vacuum suction.

  The cutting unit moving mechanism moves the cutting unit 20 in the Y-axis direction. The Y-axis direction is a horizontal direction orthogonal to the cutting direction (X-axis direction), and is, for example, the axial direction of a spindle disposed in the cutting unit 20. By such movement in the Y-axis direction, the cutting edge of the cutting blade can be aligned with the cutting position (cutting line) of the workpiece 12. The cutting unit moving mechanism also moves the cutting unit 20 in the Z-axis direction (vertical direction). Thereby, the cutting depth of the cutting blade with respect to the workpiece 12 can be adjusted, or the cutting blade can be lowered toward the blade detecting means described later.

  During normal dicing, the chuck table moving mechanism moves the chuck table 15 holding the workpiece 12 back and forth in the cutting direction (X-axis direction) so that the cutting edge of the cutting blade is linear with respect to the workpiece 12. Act on the trajectory.

  The dicing apparatus 10 having such a configuration can perform the dicing process on the workpiece 12 by moving the cutting unit 20 and the chuck table 15 relative to each other while cutting the cutting blade rotating at a high speed into the workpiece 12. . The dicing apparatus 10 is provided with a display device 16 such as a monitor. The display device 16 is an image of the surface of the workpiece 12 imaged at the time of alignment, cutting setting information, and a measured cutting blade. Various information such as the amplitude of the can be displayed.

  Next, based on FIG. 2, the structure of the cutting unit 20 concerning this embodiment is demonstrated. FIG. 2 is a perspective view showing the cutting unit 20 according to the present embodiment.

  As shown in FIG. 2, the cutting unit 20 includes, for example, a flange 21, a cutting blade 22, a nut 24, a spindle 25, a spindle housing 26, a cutting water supply nozzle 27, and a foil cover 28. Prepare for.

  The cutting blade 22 is, for example, an extremely thin cutting grindstone having a substantially ring shape. The cutting blade 22 is attached to the tip of the spindle 25 by, for example, a flange 21 and a nut 24. The cutting blade 22 according to the present embodiment includes, for example, a cutting blade portion that is a cutting grindstone disposed on the outer peripheral portion, and a base portion (one side flange for attaching the cutting blade portion to the spindle 25). 21a, see FIG. 3) is a hub blade that is integrally formed. However, the present invention is not limited to this example, and the cutting blade 22 may be a so-called washer blade, and may be clamped to the spindle 25 by being sandwiched by flanges 21a and 21b (see FIG. 3) from both sides.

  The spindle 25 is a rotating shaft for transmitting a rotational driving force of a motor (not shown), which will be described later, to the cutting blade 22, for example, and rotates the mounted cutting blade 22 at a high speed of, for example, 30,000 rpm. be able to. Most of the spindle 25 is covered with a spindle housing 26, but its tip is exposed from the spindle housing 26, and a blade 22 or the like is attached to the tip.

  The spindle housing 26 is a housing provided so as to cover the spindle 25. The spindle housing 26 can support the spindle 25 so as to be rotatable at high speed by an air bearing provided therein. Details will be described later.

  The cutting water supply nozzle 27 is detachably provided on the side of the cutting blade 22, for example, and supplies cutting water near the processing point to cool it. Further, the foil cover 28 is provided so as to cover the outer periphery of the cutting blade 22 and prevents scattering of cutting water and cutting waste.

  The cutting unit 20 having such a configuration rotates the cutting blade 22 at a high speed by the spindle 25 and cuts the cutting edge of the cutting blade 22 into the workpiece 12 so as to relatively move. Thereby, for example, the processing surface of the workpiece 12 can be cut and an extremely thin kerf can be formed along the cutting line.

  Next, the internal configuration of the spindle housing 26 in the cutting unit 20 according to the present embodiment will be described based on FIG. FIG. 3 is a partially cutaway side view showing the internal configuration of the spindle housing 26 according to the present embodiment. In FIG. 3, for convenience of explanation, the spindle housing 26 is represented by a cross section cut along a vertical plane including the rotation axis of the spindle 25.

  As shown in FIG. 3, the spindle housing 26 includes, for example, a radial air bearing 30 and a thrust air bearing 31 that rotatably support the spindle 25, a motor 32 having a rotor 321 and a stator 322, and a spindle 25. An ultrasonic vibrator 33 provided at the rear end, an air supply path (not shown) for supplying high-pressure air to the radial air bearing 30 and the thrust air bearing 31, and the radial air bearing 30 and the thrust air bearing. And an exhaust passage (not shown) for exhausting the air ejected by 31. Further, a non-contact power feeding device 40 that supplies power to the ultrasonic transducer 33 is provided at the rear end portion of the spindle housing 26.

  The rear end side of the spindle 25 is connected to a rotor 321 that is a rotating shaft constituting the motor 32, and the spindle 25 rotates at a high speed by the rotational driving force generated by the interaction between the rotor 321 and the stator 322. . Further, a thrust plate 251 having a diameter larger than the shaft diameter of the spindle 25 is provided on the tip end side of the spindle 25.

  The radial air bearing 30 and the thrust air bearing 31 communicate with air supply means (not shown) configured by a high-pressure pump or the like via the air supply path. Thereby, the high pressure air provided by the air supply means is supplied to the radial air bearing 30 and the thrust air bearing 31.

  The radial air bearing 30 ejects air toward the outer periphery of the spindle 25 from, for example, a plurality of injection ports (not shown) provided substantially uniformly on the inner peripheral surface of the spindle housing 26. As a result, the radial air bearing 30 restricts the spindle 25 from moving in the radial direction perpendicular to the rotation axis (radial direction, that is, the X and Z axis directions), and causes the spindle 25 that rotates at high speed to move in the radial direction. (I.e., lateral blurring can be prevented).

  On the other hand, the thrust air bearing 31 ejects air from the injection ports (not shown) provided on the left and right sides of the thrust plate 251 so as to sandwich the thrust plate 251. Thereby, the thrust air bearing 31 can support the spindle 25 rotating at high speed in the thrust direction by limiting the movement of the spindle 25 in the rotation axis direction (thrust direction, that is, the Y-axis direction) (ie, in the thrust direction). , Can prevent vertical blur).

  Thus, the spindle housing 26 can support the spindle 25 so as to be rotatable at high speed by the air ejected from the radial air bearing 30 and the thrust air bearing 31. Note that the configuration of the air bearing is not limited to the example of FIG. 3 described above, and various design changes can be made. For example, the thrust air bearing 31 and the thrust plate 251 do not have to be provided with only one set on the cutting blade 22 side of the spindle 25 as in the example of FIG. One set may be provided at a location such as a side, or a plurality of sets may be provided at these locations.

  Further, most of the air ejected from the radial air bearing 30 and the thrust air bearing 31 is exhausted to the outside of the spindle housing 26 through the exhaust path, but a part of the air is exhausted to the spindle 25 on the cutting blade 22 side. And the spindle housing 26 are discharged and function as an air seal. The air flowing through the spindle housing 26 as described above also functions as a temperature control medium for controlling the temperature of the spindle housing 26 and the spindle 25. As a result, the temperature of the spindle 25 can be maintained at a predetermined temperature, and thermal distortion can be prevented from occurring in the spindle 25.

  The spindle 25, the spindle housing 26, the radial air bearing 30, the thrust air bearing 31, the motor 32, the air supply path, the exhaust path, and the air supply means as described above constitute an air spindle.

  Further, in the cutting unit 20 according to the present embodiment, as a vibration generating means for ultrasonically vibrating the spindle 25 and the cutting blade 22, as shown in FIG. 3, an ultrasonic vibrator 33 and the ultrasonic vibrator A non-contact type power supply device 40 that supplies power to 33 is provided.

  The ultrasonic transducer 33 is disposed further to the rear end side than the rotor 321 on the rear end side of the spindle 25 (on the side opposite to the cutting blade 22). The ultrasonic vibrator 33 is composed of an electrostrictive vibrator made of a piezoelectric ceramic material such as lead zirconate titanate (PZT). The ultrasonic vibrator 33 generates longitudinal ultrasonic vibration of a predetermined frequency by the electric power supplied from the non-contact power supply device 40. Note that the ultrasonic transducer 33 is not limited to such an electrostrictive transducer. For example, a magnetostrictive transducer (including a supermagnetostrictive transducer) or a quartz crystal resonator may be used as long as it can generate ultrasonic vibration. Can also be configured.

  The non-contact type power feeding device 40 includes a secondary transformer 44 provided at the rear end portion of the spindle 25 and a primary transformer 42 disposed so as to be separated from the secondary transformer 44 by a predetermined distance. . The non-contact type power supply device 40 transmits electric power from an external power source to the spindle 25 in a non-contact manner by an electromagnetic induction method and supplies it to the ultrasonic transducer 33. With this electric power, the ultrasonic transducer 33 generates ultrasonic vibrations to vibrate the spindle 25.

  In this manner, the ultrasonic vibrator 33 that is an electrostrictive vibrator provided on the spindle 25 is fed in a non-contact manner using the non-contact power feeding device 40. In the air spindle mechanism as described above, the spindle 25 is held by the spindle housing 26 without contact. In such a mechanism, it is not necessary to bring the power supply member into contact with the spindle 25 by supplying power with the non-contact power supply device 40, so that the spindle 25 can rotate smoothly and the advantages of the air spindle can be utilized. From such a viewpoint, it is preferable to use the non-contact power feeding device 40 as a power feeding device, but the invention is not limited to this example, and a contact type power feeding device can also be used. Note that when a magnetostrictive vibrator is used as the ultrasonic vibrator 33, the above power feeding device is not necessary.

  The ultrasonic vibrator 33 to which power is supplied from the non-contact type power supply device 40 having such a configuration generates ultrasonic vibrations to cause the spindle 25 to vibrate. This ultrasonic vibration is transmitted in the axial direction of the spindle 25 (Y-axis direction) and travels toward the cutting blade 22 attached to the tip of the spindle 25.

  Furthermore, the Y-axis position of the vibration transmission direction conversion point when the ultrasonic vibration transmitted in the rotation axis direction (Y-axis direction) of the spindle 25 in this way is converted into the radial direction (XZ plane direction) of the cutting blade 22 is as follows. The structure of the spindle 25 and the frequency of the ultrasonic transducer 33 are adjusted so that the mounting position of the cutting blade 22 with respect to the spindle 25 (the Y-axis position of the cutting blade 22) is the same.

  With the configuration described above, ultrasonic vibration is transmitted in the direction of the rotation axis of the spindle 25, and the vibration direction of the transmitted ultrasonic vibration is determined at the vibration transmission direction conversion point at the same position as the cutting blade 22. Can be converted in the radial direction. Accordingly, the workpiece 12 can be cut while the cutting blade 22 is ultrasonically vibrated in the radial direction, that is, while the ring-shaped cutting blade 22 is vibrated so as to repeatedly expand and contract at a high frequency.

  The principle of ultrasonic vibration of the cutting blade 22 in the radial direction as described above is described in, for example, the above-mentioned Patent Document 2 and is publicly known, but will be briefly described below with reference to FIG.

  FIG. 4 is an explanatory diagram showing a vibration waveform W1 that resonates with ultrasonic vibration from the ultrasonic transducer 33 and a vibration waveform W2 in which the transmission direction is converted to the radial direction in the cutting unit 25 according to the present embodiment. is there. The vibration waveform W1 represents the instantaneous displacement (vibration amplitude) of the ultrasonic vibration due to resonance, and the vibration waveform W2 represents the instantaneous displacement (vibration amplitude) of the ultrasonic vibration whose transmission direction is converted to the radial direction. .

  As shown in FIG. 4, the maximum vibration amplitude points A, C, E, and G and the minimum vibration amplitude points B, D, F, and H of the vibration waveform W1 are on the rotation axis (Y axis) of the spindle 25. Exists. Usually, at the minimum vibration amplitude points B, D, F, and H, the radial extension of the spindle 25 is maximized. Therefore, the distance between the spindle 25 and the spindle housing 26 must be at least larger than the maximum diameter expansion amount of the spindle 25 at the minimum vibration amplitude points B, D, F, and H. However, with respect to other points, since the cutting unit 20 employs an air spindle mechanism, the vicinity of the minimum vibration amplitude points B, D, F, and H is structurally reinforced as in the case of the mechanical spindle mechanism. There is no need.

  The minimum vibration amplitude point B of the vibration waveform W1 is a vibration transmission direction conversion point, and a cutting blade 22 is provided at the position of this vibration transmission direction conversion point. At the vibration transmission direction conversion point B, the transmission direction of the ultrasonic vibration is changed from the rotational axis direction of the spindle 25 (hereinafter sometimes simply referred to as “axial direction”) to the radial direction of the cutting blade 22 (hereinafter simply referred to as “diameter”). ”Direction”). The blade diameter of the cutting blade 22 and the ultrasonic vibration so that the maximum vibration amplitude points α and β in the vibration waveform W2 of the ultrasonic vibration whose transmission direction is converted to the radial direction are positioned at the cutting edge of the cutting blade 22 in this way. The frequency is adjusted.

  Further, in order to suitably transmit and convert the ultrasonic vibration, each member is configured such that the cutting blade 22 and the flanges 21a and 21b are in close contact with each other, and the flanges 21a and 21b and the spindle 25 are in close contact with each other. ing.

  As described above, by changing the transmission direction of the ultrasonic vibration transmitted through the spindle 25 in the axial direction to the radial direction, the cutting blade 22 repeatedly expands and contracts, and the cutting edge of the cutting blade 22 It vibrates in the radial direction indicated by the arrow in FIG.

  Note that a vibration transmission direction conversion member such as a horn may be arranged at the vibration transmission direction conversion point (the B point) in order to promote the vibration transmission direction conversion. By providing this vibration transmission direction changing member, it becomes easy to perform accuracy and control when the cutting blade 22 is vibrated ultrasonically. However, if the position of the vibration transmission direction conversion point and the position of the cutting blade 22 are exactly matched, it is possible to convert the vibration transmission direction without providing a separate vibration transmission direction conversion member. is there.

  The configuration of the cutting unit 20 according to the first embodiment of the present invention, particularly, the configuration for ultrasonically vibrating the cutting blade 22 in the radial direction has been described above. In this way, by cutting the workpiece 12 with the cutting blade 22 that is ultrasonically vibrated in the radial direction, (1) cutting resistance is reduced as compared with normal cutting with a non-vibrated cutting blade. Therefore, chipping can be suppressed. (2) Since cutting water is easily supplied to the processing point, the temperature rise at the processing point is suppressed and distortion due to heat hardly occurs. (3) Contamination is caused by the vibration of the cutting blade 22. Since it is shaken off, there is an advantage that no contamination adheres to the cutting blade 22 and (4) the load on the cutting blade 22 is reduced and the life is extended.

  Next, as an aspect of the present invention, an amplitude measuring apparatus and an amplitude measuring method for measuring the amplitude of the cutting blade 22 that vibrates ultrasonically in the radial direction will be described. Hereinafter, the amplitude measuring apparatus and the amplitude measuring method according to the first to fourth embodiments having different measurement methods will be described. The configuration of the ultrasonic vibration cutting device (dicing device 10) according to the second to fourth embodiments is substantially the same as that of the above-described first embodiment, and a detailed description thereof will be omitted.

  In the first and second embodiments, ultrasonic vibration is performed in the radial direction with the position of the cutting blade 22 fixed, and the amplitude at which the cutting blade 22 is ultrasonically vibrated in the radial direction is measured using an amplitude measuring device. It is a technique. On the other hand, in the third and fourth embodiments, the cutting blade 22 is not ultrasonically vibrated (hereinafter referred to as “non-vibrating state”) or is ultrasonically vibrated (hereinafter referred to as “vibrating state”). The cutting blade 22 is moved in the radial direction (for example, lowered in the Z-axis direction) toward the fixed cutting blade detector, and the cutting edge position of the non-vibrating cutting blade 22 is detected. And calculating the difference between the position of the cutting blade 22 and the position of the cutting blade 22 when the cutting edge position of the cutting blade 22 in a vibrating state is detected, and the amplitude at which the cutting blade 22 ultrasonically vibrates in the radial direction. Is a method of measuring.

(First embodiment)
First, based on FIG. 5, an amplitude measuring apparatus 50 according to the first embodiment of the present invention and an amplitude measuring method using the same will be described. FIG. 5 is an explanatory diagram showing the configuration of the amplitude measuring apparatus 50 according to the first embodiment.

  As shown in FIG. 5, the amplitude measuring apparatus 50 according to the first embodiment is such that the cutting blade 22 has a spot diameter r larger than the width of vibration (twice the amplitude d) that the cutting blade 22 ultrasonically vibrates in the radial direction. A light-emitting element 62 and a light-receiving element 64 having (light-emitting diameter, light-receiving diameter) are provided, and light reception when the cutting edge of the cutting blade 22 is vibrated within a diameter r of a light beam L connecting the light-emitting element 62 and the light-receiving element 64 is received. Based on the amount of light received by the element 64, the device measures an amplitude d (hereinafter, sometimes simply referred to as “vibration d”) at which the cutting blade 22 ultrasonically vibrates in the radial direction.

  The amplitude measuring device 50 includes, for example, a non-contact sensor 60 and an amplitude converting unit 70.

  The non-contact sensor 60 is, for example, an optical sensor including a light emitting element 62, a light receiving element 64, a voltage detection unit 66, and a voltage detection unit 68. The non-contact sensor 60 is disposed at a position where the cutting blade 22 can reach, for example, in the vicinity of the chuck table 15.

  The light emitting element 62 and the light receiving element 64 are arranged on each side surface of the groove 65a formed in the base portion 65 so as to face each other with a predetermined interval at which the cutting edge of the cutting blade 22 can be inserted. The light beam L emitted and emitted by the light emitting element 62 is received by the light receiving element 64. The traveling direction of the light beam L is the axial direction (Y-axis direction) of the spindle 52 and is perpendicular to the radial direction (Z-axis direction) of the cutting blade 22.

  Further, the light emitting diameter and the light receiving diameter r (the diameter of the light beam L) of the light emitting element 62 and the light receiving element 64 are at least larger than “the width 2d of vibration in which the cutting blade 22 ultrasonically vibrates in the radial direction” (r> 2d). ). For this reason, the cutting edge of the cutting blade 22 can be inserted between the light emitting element 62 and the light receiving element 64 and can be ultrasonically vibrated in the radial direction inside the light beam L. In other words, the cutting edge of the cutting blade 22 partially shields the light beam L, even when the cutting blade 22 that is ultrasonically vibrated in the radial direction has the smallest diameter or the largest diameter.

  In the non-contact sensor 60, when the cutting edge of the cutting blade 22 is in the light beam L connecting the light emitting element 62 and the light receiving element 52, the light amount L received from the light receiving element 64 is blocked by the light beam L from the light emitting element 62. (Received light amount) decreases. Therefore, when the cutting edge of the cutting blade 20 is ultrasonically vibrated in the radial direction as described above, the area for shielding the light beam L from the light emitting element 62 changes, and accordingly, the amount of light received by the light receiving element 64 changes. The non-contact sensor 60 outputs the received light amount of the light receiving element 64 thus obtained to the voltage detection unit 66.

  The voltage detector 66 converts the amount of light received from the light receiving element 64 into an electrical signal and outputs the electrical signal to the voltage detector 68. The voltage detector 68 detects a voltage value from the electrical signal input from the voltage detector 66 and outputs it to the amplitude converter 70.

  The amplitude conversion unit 70 converts the voltage value input from the non-contact sensor 60 and obtains an amplitude d at which the cutting blade 22 as a measurement target ultrasonically vibrates in the radial direction. The amplitude converter 70 is configured by a program installed in the control device of the dicing apparatus 10. The amplitude conversion unit 70 includes, for example, a voltage difference detection unit 72, a comparison unit 74, and a storage unit 76.

  The voltage difference detector 72 extracts the minimum voltage value and the maximum voltage value from the voltage values input from the voltage detector 68, calculates the voltage difference between the maximum voltage value and the minimum voltage value, It outputs to the comparison part 74.

  The comparison unit 74 compares the voltage difference actually input from the voltage difference detection unit 72 with the relationship data between the voltage difference and the amplitude d stored in advance in the storage unit 63, and compares the amplitude d as a measurement target. Is calculated.

  The storage unit 76 stores data representing the relationship between the voltage difference calculated by the voltage difference detection unit 72 and the amplitude d of the cutting blade 22 that vibrates ultrasonically in the radial direction. Such relation data is obtained in advance by experiments or the like and stored in the storage unit 76, for example. FIG. 6 shows an example of relationship data between the voltage difference and the amplitude d.

  As shown in FIG. 6, the relationship between the voltage difference and the amplitude d is determined when a light receiving element 64 having spot diameters of 0.2 mm and 0.1 mm is used. For example, when the spot diameter of the light receiving element 64 is 0.1 mm and the voltage difference input from the voltage difference detection unit 72 is 2 V, the comparison unit 65 refers to the relational data in FIG. The amplitude d of ultrasonic vibration in the radial direction is calculated to be 3 μm.

  The comparison unit 74 outputs the amplitude d calculated as described above to the display device 16. The display device 16 displays the amplitude d on the screen to allow the operator to recognize it.

  Next, an amplitude measurement method for measuring the amplitude d at which the cutting blade 22 ultrasonically vibrates in the radial direction using the amplitude measurement apparatus 50 having the above configuration will be described.

  First, the cutting unit moving mechanism is operated to lower the non-vibrating cutting blade 22, and the cutting edge at the lower end of the cutting blade 22 is inserted between the light emitting element 62 and the light receiving element 64 of the non-contact sensor 60. At this position, the lowering of the cutting blade 22 is stopped, and the height position (Z-direction position) of the cutting blade 22 is fixed. Next, the ultrasonic vibrator 33 is operated to ultrasonically vibrate the cutting edge of the cutting blade 22 within the light beam L connecting the light emitting element 62 and the light receiving element 64, and the cutting blade 22 is moved by using the amplitude measuring device 50. The amplitude d of ultrasonic vibration in the radial direction is measured.

  Specifically, as described above, when the cutting blade 22 is vibrated in the radial direction, the area where the cutting edge of the cutting blade 22 shields the light beam L periodically increases and decreases, so that the amount of light received by the light receiving element 64 is periodic. Increase or decrease. The amount of received light that increases or decreases in this way is converted into an electrical signal by the photoelectric conversion unit 66, and the voltage value is detected by the voltage detection unit 68. Further, the amplitude converter 70 extracts the maximum voltage value and the minimum voltage value from the voltage values and calculates the voltage difference between them, and then based on the voltage difference, By comparing the relation data with the amplitude d, the amplitude d at which the cutting blade 22 to be measured is ultrasonically vibrated in the radial direction is calculated. The amplitude d measured in this way is displayed on the display device 16.

  As described above, in the amplitude measurement method according to the first embodiment, the non-contact sensor 60 is used to measure the amplitude d at which the cutting blade 22 ultrasonically vibrates in the radial direction without contact with the cutting blade 22. To do. For this reason, the amplitude d can be accurately measured without damaging the cutting blade 22.

  As described above, in the non-contact sensor 60, the light emitting diameter 62 of the light emitting element 62 and the light receiving diameter r of the light receiving element 64 (that is, the light beam diameter r of the light beam L) are ultrasonic vibrations of the cutting blade 22 in the radial direction. The amplitude d cannot be measured unless it is larger than the vibration width 2d. However, the light beam diameter r is preferably as small as possible if the condition that it is larger than the vibration width 2d is satisfied. This is because when the beam diameter r is small when the cutting blade 22 vibrates, the change in the area where the cutting edge of the cutting blade 22 shields the light beam L becomes large, the voltage difference is easily measured, and the amplitude d is accurately measured. Because it can. As an example, when the amplitude d is 20 μm, it is considered that the light emission diameter r of the light emitting element 62 and the light reception diameter r of the light receiving element 64 are preferably about 100 μm, for example.

(Second Embodiment)
Next, based on FIG. 7, an amplitude measuring apparatus 150 according to a second embodiment of the present invention and an amplitude measuring method using the same will be described. FIG. 7 is an explanatory diagram showing the configuration of the amplitude measuring apparatus 150 according to the second embodiment.

  As shown in FIG. 7, the amplitude measuring apparatus 150 according to the second embodiment brings the cutting edge 22 of the cutting blade 22 in a non-vibrating state into contact with the contact 162, and maintains the contacting state with the diameter of the cutting blade 22 maintained. Based on the change in the position in the height direction of the contact 162 when the contact 162 is vibrated up and down following the ultrasonic vibration of the cutting blade 22, the cutting blade 22 This is a device for measuring the amplitude d of ultrasonic vibration in the radial direction.

  The amplitude measurement device 150 includes, for example, a contact sensor 160 and an amplitude conversion unit 170.

  The contact sensor 160 includes, for example, a contact 162 that comes into contact with the measurement object, a support unit 164 that supports the contact 162 so as to be able to reciprocate in a predetermined direction (for example, a vertical direction), an oscillating electrical conversion unit 166, a voltage A detection unit 168. The contact sensor 160 can be composed of, for example, an electroacoustic transducer such as a record needle or a bimorph sensor. The contact sensor 160 is disposed at a position where the cutting blade 22 can reach, for example, in the vicinity of the chuck table 15.

  The contact 162 is brought into contact with the cutting edge (lower end) of the cutting blade 22 at its upper end, and vibrates (for example, moves up and down) following the ultrasonic vibration of the cutting edge of the cutting blade 22. The vibration width of the contact 162 at this time is the same as the vibration width 2d of the cutting blade 22 that vibrates ultrasonically in the radial direction.

  The oscillating electricity conversion unit 166 converts the mechanical vibration of the contact 162 into an electrical signal and outputs the electrical signal to the voltage detection unit 168. The voltage detector 168 detects a voltage value from the electrical signal input from the oscillating electricity converter 166.

  The contact sensor 160 having such a configuration measures a change in position (mechanical vibration) of the contact 162 that vibrates following the cutting blade 22, converts the mechanical vibration into an electric signal, and converts the voltage value into an amplitude converter. Output to 170.

  The amplitude converter 170 converts the voltage value input from the contact sensor 160, and obtains an amplitude d at which the cutting blade 22 as a measurement object ultrasonically vibrates in the radial direction. The amplitude conversion unit 170 includes, for example, a voltage difference detection unit 172, a comparison unit 174, and a storage unit 176. The functional configuration of the amplitude converter 170 is substantially the same as that of the amplitude converter 70 of the first embodiment, and a detailed description thereof will be omitted.

  Next, an amplitude measurement method for measuring the amplitude d at which the cutting blade 22 ultrasonically vibrates in the radial direction using the amplitude measurement apparatus 150 having the above configuration will be described.

  First, the cutting unit moving mechanism is operated to lower the cutting blade 22, and the lowering of the cutting blade 22 is stopped at the position where the cutting edge at the lower end of the cutting blade 22 contacts the contact 162 of the contact sensor 160, The position in the height direction (Z direction position) of the cutting blade 22 is fixed. Next, while maintaining this contact state, the cutting blade 22 is ultrasonically vibrated in the radial direction, the ultrasonic vibrator 33 is operated, the cutting blade 22 is ultrasonically vibrated, and the amplitude measuring device 150 is used. Then, the amplitude d at which the cutting blade 22 ultrasonically vibrates in the radial direction is measured.

  Specifically, when the cutting blade 22 is vibrated in the radial direction, the contact 162 vibrates following this. The mechanical vibration of the contact 162 is converted into an electrical signal by the oscillating and electrical conversion unit 166, and the voltage value is detected by the voltage detection unit 168. Further, the amplitude converter 170 extracts the maximum voltage value and the minimum voltage value from the voltage values and calculates the voltage difference between them, and then based on the voltage difference, The relational data with the amplitude d is compared, and the amplitude d as a measurement target is calculated. The amplitude d measured in this way is displayed on the display device 16.

  As described above, in the amplitude measurement method according to the second embodiment, the contact sensor 160 can be used to accurately measure the amplitude d at which the cutting blade 22 ultrasonically vibrates in the radial direction. Further, since the cutting blade 22 in a non-contact state is brought into contact with the contact 162 and then the ultrasonic vibration of the cutting blade 22 is started to vibrate the contact 162, the detection is based on the contact method. , Damage to the cutting edge of the cutting blade 22 can be suppressed.

(Third and fourth embodiments)
Next, amplitude measurement methods according to the third and fourth embodiments of the present invention will be described with reference to FIGS. FIG. 8 is an explanatory view showing the operation of the dicing apparatus 10 in the amplitude measuring method according to the third embodiment, and FIG. 9 shows the operation of the dicing apparatus 10 in the amplitude measuring method according to the fourth embodiment. It is explanatory drawing shown. FIG. 10 is a flowchart showing amplitude measurement methods according to the third and fourth embodiments.

  As shown in FIGS. 8 and 9, in the amplitude measuring methods according to the third and fourth embodiments, for example, a cutting blade detection device that detects that the cutting edge of the lowered cutting blade 22 has reached a predetermined height. 80 and 90 are fixedly arranged. First, (1) the cutting blade 22 in a non-vibrating state is lowered, and when the cutting edge of the cutting blade 22 is detected by the cutting blade detectors 80 and 90, the cutting blade 22 of the cutting blade 22 is detected. The position (first position) is measured, and then (2) the cutting blade 22 in the vibrating state is lowered, and the cutting blade 22 when the cutting edge of the cutting blade 22 is detected by the cutting blade detectors 80 and 90 is measured. And (3) the difference between the first position and the second position is calculated, and the cutting blade 22 vibrates ultrasonically in the radial direction. It is a method of determining the width d.

  The difference between the third and fourth embodiments is whether the non-contact sensor 80 or the contact sensor 90 is used as the cutting blade detection device.

  In the third embodiment, as shown in FIG. 8, a non-contact sensor 80 is used as a cutting blade detection device. The non-contact sensor 80 is an optical sensor having a light-emitting element 82 and a light-receiving element 84 that are arranged to face each other at a predetermined interval, and the cutting edge of the cutting blade 22 exists on a light beam that connects the light-emitting element 82 and the light-receiving element 84. Detect whether to do.

  On the other hand, in the fourth embodiment, as shown in FIG. 9, a contact sensor 90 is used as a cutting blade detection device. The contact sensor 90 is a contact reaction type sensor that detects that the cutting edge of the cutting blade 22 is in contact, and is, for example, a micro switch.

  Below, based on FIG. 10, the amplitude measuring method concerning 3rd and 4th embodiment using this cutting blade detection apparatus 80 and 90 is demonstrated in detail.

  As shown in FIG. 10, first, in step S102, the non-vibrating cutting blade 22 is lowered toward the cutting blade detectors 80 and 90 (step S102). Specifically, as shown by the broken lines in FIGS. 8A and 9A, first, the cutting blade 22 is disposed above the cutting blade detectors 80 and 90 using the cutting blade moving mechanism. Then, the cutting blade 22 is lowered in the vertical direction (Z-axis direction) at a predetermined speed, and is brought close to the fixedly arranged cutting blade detection devices 80 and 90. At this time, the ultrasonic transducer 33 is not operating and the cutting blade 22 is not vibrating.

  Next, in step S104, the position (first position) of the cutting blade 22 when the cutting edge of the non-vibrating cutting blade 22 is detected by the cutting blade detectors 80 and 90 is measured (step S104). Specifically, as shown by the solid line in FIG. 8A, when the light beam connecting the light emitting element 82 and the light receiving element 84 is shielded by the blade edge of the lowered cutting blade 22, the light receiving element 84 receives light. Since the amount decreases or becomes zero, the non-contact sensor 80 can detect that the cutting edge of the cutting blade 22 has reached a predetermined height. On the other hand, as shown by the solid line in FIG. 9A, when the cutting edge of the lowered cutting blade 22 directly contacts the upper part of the contact sensor 90, the contact sensor 90 indicates that the cutting edge of the cutting blade 22 has a predetermined height. Can be detected. When the cutting edge of the cutting blade 22 is detected by the non-contact sensor 80 or the contact sensor 90 in this way, the control unit of the dicing apparatus 10 at this time determines the position of the cutting blade 22 (for example, the height of the rotary shaft 25a of the spindle 25). Is acquired from the cutting blade moving mechanism, and the position is stored as the first position.

  Further, in step S106, the cutting blade 22 is raised and then ultrasonically vibrated (step S106). Specifically, first, the cutting blade 22 is raised and waited above the cutting blade detectors 80 and 90, and then power is applied to the ultrasonic vibrator 33 to generate ultrasonic vibration. As a result, the cutting blade 22 vibrates ultrasonically in the radial direction and repeats the expansion and contraction.

  Thereafter, in step S108, the non-vibrating cutting blade 22 is lowered toward the cutting blade detectors 80 and 90 (step S108). Specifically, as shown by the broken lines in FIGS. 8B and 9B, first, the cutting blade 22 is lowered at a predetermined speed in the vertical direction (Z-axis direction) using the cutting blade moving mechanism. Then, the cutting blade detection devices 80 and 90 arranged in a fixed manner are brought closer to each other.

  Next, in step S110, the position (second position) of the cutting blade 22 when the cutting edge of the vibrating cutting blade 22 is detected by the cutting blade detectors 80 and 90 is measured (step S110). Specifically, as shown by a solid line in FIG. 8B, the light beam connecting the light emitting element 82 and the light receiving element 84 is shielded by the cutting edge of the cutting blade 22 in a vibrating state, so that the non-contact sensor 80 It can be detected that the cutting edge of the cutting blade 22 has reached a predetermined height. On the other hand, as shown by a solid line in FIG. 9B, the contact sensor 90 can detect that the cutting edge of the cutting blade 22 has reached a predetermined height when the cutting edge of the cutting blade 22 in a vibrating state comes into contact. .

  In this case, since the cutting blade 22 in the vibration state is ultrasonically vibrated in the radial direction (that is, the diameter is increased and decreased at a high cycle), the non-contact sensor 80 and the contact sensor 90 are configured so that the cutting blade 22 is expanded to the maximum. The cutting edge is detected when the diameter is reached. Therefore, the cutting blade 22 in the vibrating state is detected at a position above the cutting blade 22 in the non-vibrating state.

  When the cutting edge of the cutting blade 22 is detected by the non-contact sensor 80 or the contact sensor 90 in this way, the control unit of the dicing apparatus 10 at this time determines the position of the cutting blade 22 (for example, the height of the rotary shaft 25a of the spindle 25). ) Is acquired from the cutting blade moving mechanism, and the position is stored as the second position. In this way, the second position measured in the vibration state has an amplitude d (the cutting blade in the non-vibrating state) in which the cutting blade 22 ultrasonically vibrates in the radial direction, compared to the first position measured in the non-vibrating state. (The difference between the radius of 22 and the radius at the time of maximum diameter expansion of the cutting blade 22 in the vibration state) is positioned above.

  Further, in step S112, the difference between the first position and the second position is calculated (step S112). Specifically, the control unit of the dicing apparatus 10 calculates the difference between the first position detected in step S104 and the second position detected in step S110, and the cutting blade 22 has a diameter. An amplitude d that ultrasonically vibrates in the direction is obtained. The amplitude d measured in this way is displayed on the display device 16 and recognized by the operator, for example.

  The amplitude measurement methods according to the third and fourth embodiments have been described above. In this amplitude measurement method, the cutting blade detectors 80 and 90 need only detect the presence or absence of the cutting blade 22, and thus can be configured with a simple structure or circuit and have an advantage that the cost can be reduced. However, since a pulse motor or the like is normally used as a cutting unit moving mechanism for lowering the cutting blade 22, the lowering operation of the cutting blade 22 is not continuous but is intermittently performed at fine predetermined intervals. Is done. For this reason, considering that the amplitude d is about 20 μm, for example, the accuracy of the measurement result may be reduced as compared with the first and second embodiments. Further, from the viewpoint of preventing the cutting blade 22 from being damaged, the third embodiment using the non-contact sensor 80 is preferable to the fourth embodiment using the contact sensor 90.

  The amplitude measuring apparatus and the amplitude measuring method according to the first to fourth embodiments have been described above. According to this, the amplitude d when the cutting blade 22 of the dicing apparatus 10 ultrasonically vibrates in the radial direction can be suitably measured. For this reason, the cutting depth of the cutting blade 22 with respect to the workpiece 12 can be suitably controlled based on the measured amplitude d. It can also be confirmed whether or not the cutting blade 22 vibrates with a predetermined amplitude d. Therefore, the workpiece 12 can be cut with high accuracy using the dicing apparatus 10.

  As mentioned above, although preferred embodiment of this invention was described referring an accompanying drawing, it cannot be overemphasized that this invention is not limited to this example. It will be apparent to those skilled in the art that various changes and modifications can be made within the scope of the claims, and these are of course within the technical scope of the present invention. Understood.

  For example, in the above embodiment, the dicing apparatus 10 is described as an example of the ultrasonic vibration cutting apparatus, but the present invention is not limited to such an example. For example, as long as it is a device that cuts the workpiece 12 using the cutting blade 22 that rotates at high speed by the spindle 25, for example, various cutting devices that perform cutting processing other than dicing processing may be used.

  Moreover, in the said embodiment, although the hub blade provided with the hub (HUB) used as a base and a cutting blade part was used as the cutting blade 22, this invention is not limited to this example. For example, a so-called washer blade composed only of a ring-shaped cutting edge may be used.

  Further, in order to mount the cutting blade 22 on the spindle 25, a mount portion that protrudes integrally with the spindle 25 may be provided at the tip of the spindle 25. When the hub blade is used, the hub blade may be attached to the spindle 25 using only a nut and a mount member.

  In the cutting unit 20 according to the above embodiment, the example of the air spindle has been described as the support mechanism of the spindle 22, but the present invention is not limited to this example. For example, a mechanical spindle that supports the spindle 25 with a bearing may be used. The present invention is applicable to any spindle support mechanism as long as it is an ultrasonic vibration cutting device that ultrasonically vibrates the cutting blade 22 in the radial direction.

  In the third and fourth embodiments, first, after detecting the first position of the non-vibrating cutting blade 22 (S104), the cutting blade 22 is raised and then the vibrating cutting blade 22 is moved. Although the second position is detected again (S110), the present invention is not limited to this example.

  For example, first, the second position of the vibration cutting blade 22 may be detected (S110), and then the first position of the non-vibration cutting blade 22 may be detected (S104).

  Further, after detecting the first position of the non-vibrating cutting blade 22, the cutting blade 22 is ultrasonically vibrated at the same position, and then the cutting blade 22 is lifted by the cutting blade detection means 80, 90. The position of the cutting blade 22 when the cutting edge is no longer detected may be measured as the third position, and the difference between the third position and the first position may be set as the amplitude d. However, in this method, if a contact sensor is used, the cutting blade 22 may come into contact with the contact sensor and break, so it is preferable to use a non-contact sensor.

  In the third and fourth embodiments, the cutting blade 22 is lowered from above toward the cutting blade detection means 80 and 90 fixedly disposed below the cutting blade 22, and the cutting edge ( However, the present invention is not limited to such an example. For example, the cutting blade 22 is lifted in the radial direction from below to detect the cutting edge (upper end) position of the cutting blade 22 toward the cutting blade detection means 80 and 90 disposed above or on the side of the cutting blade 22. Alternatively, the cutting blade 22 may be horizontally moved from the side in the radial direction to detect the cutting edge (side end) position of the cutting blade 22. Further, it is possible to detect the cutting edge of the cutting blade 22 by moving the cutting blade detection means 80 and 90 in the radial direction of the cutting blade 22 toward the fixedly arranged cutting blade 22.

  In addition to the first to fourth amplitude measuring methods, a sensor is provided on the spindle 25 to detect ultrasonic vibration before the transmission direction is converted by the vibration transmission direction conversion unit (point B in FIG. 4). A method of measuring and estimating the amplitude d at which the cutting blade 22 ultrasonically vibrates in the radial direction is also conceivable. As the sensor in this case, for example, an acceleration sensor or an AE sensor can be considered. However, since this method indirectly measures the amplitude d of the cutting blade 22, the measurement accuracy may be low.

  The present invention can be applied to an ultrasonic vibration cutting apparatus that performs cutting while ultrasonically vibrating a cutting blade in the radial direction.

1 is an overall perspective view showing a dicing apparatus according to a first embodiment of the present invention. It is a perspective view which shows the cutting unit concerning the embodiment. It is a partial notch side view which shows the internal structure of the spindle housing concerning the embodiment. It is explanatory drawing which shows the principle which ultrasonically vibrates the cutting blade concerning the embodiment to radial direction. It is explanatory drawing which shows the structure of the amplitude measuring apparatus concerning the embodiment. 5 is a graph showing a relationship between a measured voltage difference and amplitude in the amplitude measuring apparatus according to the embodiment. It is explanatory drawing which shows the structure of the amplitude measuring apparatus concerning the 2nd Embodiment of this invention. It is explanatory drawing which shows operation | movement of the dicing apparatus in the amplitude measuring method concerning the 3rd Embodiment of this invention. It is explanatory drawing which shows operation | movement of the dicing apparatus in the amplitude measuring method concerning the 4th Embodiment of this invention. It is a flowchart which shows the amplitude measuring method concerning the 3rd and 4th embodiment of this invention.

Explanation of symbols

10: Dicing device 12: Workpiece 15: Chuck table 16: Display device 20: Cutting unit 22: Cutting blade 25: Spindle 26: Spindle housing 30: Radial air bearing 33: Ultrasonic vibrator 40: Non-contact power feeding device 50 , 150: Amplitude measuring device 60: Non-contact sensor 62: Light emitting element 64: Light receiving element 70, 170: Amplitude conversion unit 80: Non-contact sensor (cutting blade detection device)
82: Light emitting element 84: Light receiving element 90: Contact sensor (cutting blade detector)
160: Contact sensor 162: Contact d: Amplitude of ultrasonic vibration of cutting blade in radial direction r: Light emission diameter of light emitting element, light receiving diameter (light beam diameter) of light receiving element
L: Ray

Claims (8)

In an ultrasonic vibration cutting device that cuts a workpiece by ultrasonically vibrating a cutting blade in the radial direction:
An ultrasonic vibration cutting device comprising an amplitude measuring device for measuring an amplitude of ultrasonic vibration in the radial direction of the cutting blade. The amplitude measuring device includes:
A light emitting element having a light emission diameter larger than a vibration width of the cutting blade ultrasonically vibrated in a radial direction, and a light receiving element having a light receiving diameter larger than a vibration width of the cutting blade ultrasonically vibrated in a radial direction,
The cutting blade vibrates in the radial direction based on a change in the amount of light received by the light receiving element when the cutting edge of the cutting blade is vibrated ultrasonically within a light beam connecting the light emitting element and the light receiving element. The ultrasonic vibration cutting apparatus according to claim 1, wherein the amplitude is measured. The amplitude measuring device includes:
A contact that contacts the cutting edge of the cutting blade and vibrates following the ultrasonic vibration in the radial direction of the cutting blade;
Based on the change in the position of the contact when the cutting blade is vibrated ultrasonically with the cutting edge of the cutting blade in contact with the contact, the diameter of the cutting blade is reduced. The ultrasonic vibration cutting device according to claim 1, wherein an amplitude of ultrasonic vibration in a direction is measured. With a spindle;
A spindle housing for rotatably supporting the spindle;
The cutting blade mounted on the tip of the spindle;
An ultrasonic vibrator for ultrasonically vibrating the spindle;
With
4. The transmission direction of ultrasonic vibration transmitted from the ultrasonic vibrator via the spindle is changed, and the cutting blade is ultrasonically vibrated in a radial direction. The ultrasonic vibration cutting device according to claim 1. In an ultrasonic vibration cutting device that cuts a workpiece by ultrasonically vibrating the cutting blade in the radial direction, when the cutting blade is moved in the radial direction, it is detected that the cutting edge of the cutting blade has reached a predetermined position. An amplitude measurement method for measuring the amplitude of ultrasonic vibration of the cutting blade in the radial direction using a cutting blade detector that performs:
Moving the cutting blade in a state of not being ultrasonically vibrated in a radial direction, and measuring the position of the cutting blade when the cutting blade detection device detects the cutting edge of the cutting blade;
Moving the cutting blade in a state of ultrasonic vibration in a radial direction, and measuring the position of the cutting blade when the cutting blade detection device detects the cutting edge of the cutting blade;
Detecting a difference between the position of the cutting blade measured in a state where the ultrasonic vibration is not performed and the position of the cutting blade measured in a state where the ultrasonic vibration is performed; Determining the amplitude of ultrasonic vibration;
A method for measuring amplitude, comprising:   The cutting blade detection device has a light emitting element and a light receiving element arranged to face each other at a predetermined interval, and whether or not a cutting edge of the cutting blade exists on a light beam connecting the light emitting element and the light receiving element. The amplitude measuring method according to claim 5, wherein the amplitude measuring method is a non-contact sensor that senses a noise.   The amplitude measuring method according to claim 5, wherein the cutting blade detection device is a contact sensor that detects that the cutting edge of the cutting blade is in contact. The ultrasonic vibration cutting device
With a spindle;
A spindle housing for rotatably supporting the spindle;
The cutting blade mounted on the tip of the spindle;
An ultrasonic vibrator for ultrasonically vibrating the spindle;
With
8. The transmission direction of ultrasonic vibration transmitted from the ultrasonic vibrator via the spindle is changed, and the cutting blade is ultrasonically vibrated in a radial direction. Amplitude measurement method according to claim 1.

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