JP2006138855A - Rotation measuring apparatus and fabricating method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a rotation measuring apparatus, achieving stability in manufacturing process, cost reduction, and refinement in structure, and to provide a fabrication method therefor. <P>SOLUTION: The rotation measuring apparatus comprises a pair of vibrating sections on a substrate having electrostatic vibrators, support bodies connected to the substrate, elastic bodies mutually connecting the support bodies and the electrostatic vibrators, and a pair of measurement electrodes placed on the substrate, mutually corresponding to the pair of vibrating sections. When vibration is generated by electrostatic force and rotation is generated due to the influence of the Coriolis force in the pair of vibrating sections, by making the pair of vibrating sections swing vertically to the substrate and the changing the amounts of the electrical capacities between the measuring electrodes and the vibrating sections, the amount of rotation is measured. The fabricating method of the rotation measuring apparatus can be completed, using one mask during the semiconductor manufacturing process, which prevents generation of influence on measurement results, together with the unsymmetrical structures, with errors generated among different masks during the manufacturing process. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention provides an oscillating rotation amount (angular velocity / angular acceleration) measuring device such as a gyroscope and a method for manufacturing the same, which uses a symmetric vibrating structure formed by a single manufacturing process mask. More specifically, the rotation amount measuring device generates an initial vibration using electrostatic force, and when the rotation amount is generated according to the principle of Coriolis force, the vibration structure is vibrated perpendicularly to the initial vibration direction and the rotation axis direction, Measure the amount of rotation (angular velocity / acceleration).

  A gyroscope is an inertial measurement element that mainly measures the angular velocity of rotation using the principle of inertia and is traditionally applied mainly to military, aviation, and navigation navigation applications. The principle of the traditional gyroscope is achieved by using the conservation of angular momentum, but the traditional gyroscope has problems such as complicated structure and wear during high-speed rotation. However, there are problems such as high price and large weight.

  According to the development of consumer industry, regardless of the field, such as: Inertial navigation, automobiles, robots, medical processes, electronic equipment-related consumables and electronic entertainment products, etc. Demand is increasing. However, with recent technological development of semiconductor technology, microcurrent current (MENS) manufacturing process technology that combines semiconductor manufacturing process, mechanical and electronic technology is also progressing more and more. In this way, it has become possible to manufacture a lightweight and low-cost micro gyroscope by utilizing the technical field of the micro machine.

The gyroscope is mainly a vibratory rotation amount (angular velocity / acceleration) measuring instrument, and there are a lot of published technologies in the literature. For example, the technology described in US Pat. No. 4,381,672 (Patent Document 1) The amount of rotation is measured through a single cantilever structure. However, when a single cantilever beam vibrates, the center of gravity of the cantilever structure constantly changes due to the vibration, resulting in noise and inaccurate measurement results. USPat.No.5,445,025 (Patent Document 2) and USPat.No.6,201,341 (Patent Document 3) (In addition, Patent Documents 4 and 5) solve the problem of changing the center of gravity using a symmetrical vibration structure. ing.
However, although the techniques described in the above two patents solve the problem of the change in the center of gravity caused by the asymmetric structure, it is impossible to reduce the structure by the micro-manufacturing process technology.

U.S.P.4,381,672 U.S.P.5,445,025 U.S.P.6,201,341 JP2002-13931 JP2004-205492

  In the present invention, a combination of symmetrical structures is used, and when the rotation occurs using the principle of Coriolis force, the vibration structure moves perpendicular to the vibration direction, and the rotation amount (angular velocity / angular acceleration) that achieves measurement of the rotation amount is achieved. ) It aims at providing a measuring device and its manufacturing method.

In addition, the present invention provides a rotation amount measuring device and a method for manufacturing the same that can reduce the amount of power consumed by the element and reduce the electrostatic drive voltage by utilizing the resonance effect caused by the combination of symmetrical structures. With the goal.
Furthermore, an object of the present invention is to provide a rotation amount measuring device that achieves noise reduction by using a design in which the position of the center of gravity never changes when the rotation amount measuring device is driven, and a manufacturing method thereof.
In addition, the present invention provides a rotation amount measuring apparatus that uses a multi-axis measuring structure formed by a single manufacturing process mask, achieves stable manufacturing process, lowers costs, and refines the structure, and a manufacturing method thereof. For the purpose.

In order to achieve the above-mentioned object, the rotation amount (angular velocity / acceleration) measuring apparatus of the present invention is characterized by providing a first pair of vibration parts, which are installed symmetrically on a substrate, and the vibration parts are static. An electro-vibration body, a support body connected to the substrate, the support body and the electrostatic vibration body are connected to each other and fixed on the support body, and the distance between the electrostatic vibration body and the substrate is constant. And a measurement electrode unit that is installed on the substrate and corresponds to the first pair of vibration units.
Preferably, the electrostatic vibrator is further provided with a plurality of mass bodies, and the plurality of mass bodies are arranged on the electrostatic vibrator at an appropriate interval. Increase exercise.
The rotation amount measuring device preferably further includes a conductive plate, and the conductive plate is installed below the measurement electrode unit and is connected to the vibration unit.
It is desirable that the two electrostatic vibrators of the first pair of vibration parts are electrically coupled.
The rotation amount measuring device preferably further includes a second pair of vibration parts, the first pair of vibration parts and the second pair of vibration parts are orthogonal to each other, and the measurement electrode part is installed on the substrate and the The first pair of vibration parts and the second pair of vibration parts are installed corresponding to each other. Between the electrostatic vibrators of the second pair of vibrating parts adjacent to the electrostatic vibrators of the first pair of vibrators, a comb electrode structure is arranged on one side so as to cross each other. . The two electrostatic vibrating bodies of the first pair of vibration parts and the second pair of vibration parts are electrically separated and connected.

That is, the invention of claim 1 is composed of a first pair of vibration parts, an electrostatic vibration body, a support body, an elastic body, and a measurement electrode part, and the first pair of vibration parts are symmetrically installed on a substrate, The vibrating portion includes an electrostatic vibrating body, the support body is connected to the substrate, and the elastic body is connected to the electrostatic vibration body and fixed on the support body. The electrostatic vibrating body has a certain distance from the substrate, and the measurement electrode unit is installed on the substrate and is mutually associated with the first pair of vibrating units. This is a rotation amount measuring device.
According to a second aspect of the present invention, the electrostatic vibrator is further provided with a plurality of mass bodies, the plurality of mass bodies are arranged on the electrostatic vibrator at appropriate intervals, and the inertia of the electrostatic vibrator is provided. The rotation amount measuring device according to claim 1, wherein the movement is increased.
The invention according to claim 3 is characterized in that a conductive plate is provided, and the conductive plate is installed between the substrate and the measurement electrode part and is connected to the vibration part. The rotation amount measuring apparatus according to claim 1.
According to a fourth aspect of the present invention, the second pair of vibration parts is provided, the first pair of vibration parts is orthogonal to the second pair of vibration parts, and the measurement electrode part is installed on the substrate and the first pair of vibration parts. The rotation amount measuring apparatus according to claim 1, wherein the rotation amount measuring apparatus corresponds to the vibrating portion and the second pair of vibrating portions.
According to a fifth aspect of the present invention, an interdigitated electrode structure is arranged between the electrostatic vibrators of the first pair of vibrators and the electrostatic vibrators of the second pair of vibrators adjacent to each other. The rotation amount measuring device according to claim 4, wherein the rotation amount measuring device is provided.

In order to achieve the above-mentioned object, the present invention includes the following processes and steps. First, a first conductor layer is formed on a substrate, an insulating layer is formed on the first conductor layer, and then a part of the insulating layer on the first conductor layer is removed to form a concave groove on the insulating layer. A sacrificial layer is formed to cover the groove, a part of the sacrificial layer covering the groove is removed to form a contact hole, a second conductor layer is formed on the sacrificial layer to cover the contact hole, A part of the two-conductor layer is removed to form at least a pair of electrostatic vibration structures, and finally the sacrificial layer is removed.
It is desirable that an inertial display layer is further formed on the at least one pair of electrostatic vibration structures.
It is desirable that a third conductor layer is further formed between the substrate and the first conductor layer, and the third conductor layer is connected to the second conductor layer.

That is, in the invention of claim 6, a first conductor layer is formed on a substrate, an insulating layer is formed on the first conductor layer, a part of the insulating layer on the first conductor layer is removed, and a concave groove is formed. Forming a sacrificial layer on the insulating layer, covering the groove, removing a part of the sacrificial layer covering the groove, forming a contact hole, and forming a second conductor layer on the sacrificial layer. This is a method of manufacturing a rotation amount measuring device configured to cover the contact hole, remove a part of the lid second conductor layer to form a pair of electrostatic vibration structures, and remove the sacrificial layer.
The invention according to claim 7 is the method of manufacturing the rotation amount measuring device according to claim 6, further comprising the step of forming an inertial display layer on the pair of electrostatic vibration structures.
The invention according to claim 8 includes the step of forming a third conductor layer, which is further connected to the second conductor layer, between the substrate and the first conductor layer. This is the production method.

  According to the present invention, the position of the center of gravity never changes when using the resonance effect caused by the combination of symmetrical structures, reducing the power consumption of the element, lowering the electrostatic drive voltage, and driving the rotation amount measuring device. A design that does not, can achieve noise reduction, and can utilize a multi-axis metrology structure formed by a single manufacturing process mask to achieve manufacturing process stability, cost reduction, and structure refinement.

The present invention relates to a vibration type inertial measurement element which is a kind of gyroscope, and the feature of the rotation amount measuring device of the present invention is that a pair of vibration parts are provided on a substrate, and the vibration part is electrostatically A vibrating body, a support body connected to the substrate, an elastic body that connects the support body and the electrostatic vibration body to each other and is fixed on the support body, and a pair of vibration parts that are installed on the substrate and correspond to each other The pair of vibrating parts is vibrated by an electrostatic force, and when the rotation is caused by the influence of Coriolis force, the pair of vibrating parts are swung vertically with respect to the substrate, and the measurement is performed. The amount of rotation is measured by measuring the amount of change in the capacitance between the electrode section and the electrostatic vibrator.
In addition, the manufacturing method of the rotation amount measuring device of the present invention can be completed with one semiconductor manufacturing process mask, and affects the measurement result by combining an asymmetric structure with an error generated between different masks during the manufacturing process. Is to prevent the occurrence of
Hereinafter, preferred embodiments of a rotation meter (angular velocity / angular acceleration) measuring device of the present invention will be described with reference to the drawings.
As shown in FIG. 1, it is explanatory drawing of the Example of the rotation amount measuring apparatus of this invention. The rotation amount (angular velocity / angular acceleration) measuring device 2 is formed of a first pair of vibration portions 21 a and 21 b, a second pair of vibration portions 22 a and 22 b, a measurement electrode portion 23, and a feedback electrode portion 24 on the substrate 20.
The first pair of vibrating portions 21a and 21b have the same structure as the second pair of vibrating portions 22a and 22b, and the first pair of vibrating portions 21a and 21b are orthogonal to the second pair of vibrating portions 22a and 22b. .

As shown in FIG. 2, this figure is an explanatory view of the vibration amount measuring device of the rotation amount (angular velocity / angular acceleration) measuring device of the present invention. .
The vibration part 21 a includes an electrostatic vibration body 211, a support body 212, and an elastic body 213. The electrostatic vibrator 211 is made of a conductor. The support 212 is installed at the center of gravity of the electrostatic vibrator 211 and is connected to the substrate 20. The elastic body 213 is connected to the electrostatic vibrating body 211 and fixed on the support body 212, and the electrostatic vibrating body 211 is suspended on the substrate 20 and the mutual distance from the substrate 20 is increased. Keep it constant. The elastic body 213 is configured such that the electrostatic vibrating body 211 repeats vibration along the first direction 6 to generate an inertial motion, and the electrostatic vibrating body 211 is moved in a second direction 9 orthogonal to the first direction 6. The purpose is to prevent vibration along the line.

In consideration of the required vibration direction and the strength of the support structure, in this embodiment, the elastic body 213 is provided with the hook-like body 2130 and four long rod-like bodies 2131 to 2134 that are connected to each other. It is not limited. The same ends of the four long rods 2131 to 2134 are connected to the rod 2130, and the other ends of the two outer long rods 2131 and 2132 are connected to the electrostatic vibrator 211, The other ends of the two long rod-like bodies 2133 and 2134 are connected to the support 212.
The aspect ratio structure of the long rod-shaped body can control the vibration along the first direction 6 of the electrostatic vibrating body 211, and the strength of the support structure is taken into consideration. In the present embodiment, the electrostatic vibrating body 211 is configured symmetrically with a line connecting the connecting portion between the elastic body 213 and the support body 212 and a connecting portion between the elastic body 213 and the electrostatic vibrating body 211 as a center line. .

In order to increase the inertia of the electrostatic vibrating body 211, a plurality of mass bodies 214 are provided on the electrostatic vibrating body 211, so that the inertial mass of the electrostatic vibrating body 211 is increased. The mass bodies 214 are arranged on the electrostatic vibrator 211 at an appropriate interval, and the purpose of spacing the mass bodies from each other is to heat two different materials (electrostatic vibrator, mass body). In other words, the electrostatic vibrator is prevented from being deformed due to a difference in thermal expansion coefficient.
The mass body 214 can select one of a conductor material and a semiconductor material. In this embodiment, the material of the plurality of mass bodies 214 is gold (Au) in metals. In addition, a feedback comb body 215 is provided on the side surface of the electrostatic vibrator 211.

  As shown in FIG. 1, in order to enhance electrostatic force and increase the effect of vibration, the first pair of vibrating portions 21a and 21b and the second pair of vibrating portions 22a and 22b cross each other in adjacent portions. A comb-shaped electrode structure 216 arranged in such a manner is provided. The measurement electrode unit 23 is installed on the substrate 20 and corresponds to the first pair of vibration units 21a and 21b and the second pair of vibration units 22a and 22b. The feedback electrode unit 24 is located on one side of the electrostatic vibrator 211, and the feedback electrode unit 24 controls the closed circuit during vibration using the driving of the electrostatic vibrators 211, 211 ′, 221, and 221 ′. Then, the vibrations of the electrostatic vibrators 211, 211′221, 221 ′ are further stabilized. Between the feedback electrode section 24 and the electrostatic vibrators 211, 211′221, 221 ′, an interlaced arrangement of the comb electrode structure 241 and the feedback comb bodies 215, 215 ′, 225, 225 ′ is provided. .

After the first pair of vibrating portions 21a and 21b and the second pair of vibrating portions 22a and 22b are driven by receiving a driving voltage, the parasitic effect generated by the parasitic capacitance generated between the conductor and the substrate is the first effect. A phenomenon in which different sign charges are mutually attracted to the substrate 20 by causing the vibration parts 21a and 21b and the second vibration parts 22a and 22b and the substrate 20 to vibrate, the vibration part vibrates in a direction perpendicular to the substrate 20 (this To prevent the vibration from being generated by the amount of vibration generated by the Coriolis force and not from the rotational movement), a dielectric plate is further connected below each electrostatic vibrator 211. The substrate 20 is isolated from the first and second vibrating portions 21a, 21b, 22a, 22b.
FIG. 2 illustrates the vibration part 21a as an example and explains that the electrostatic vibration member is connected to the conductive plate 25. However, the conductive plate in FIG. The shape is not limited. In order to facilitate driving of the first pair of vibration parts 21a and 21b and the second pair of vibration parts 22a and 22b, the vibration part 21a is electrically connected to the vibration part 21b, and the vibration part 22a is connected to the vibration part 22b. Electrically connected.

Subsequently, as shown in FIGS. 3 to 10, the method for manufacturing the rotation amount (angular velocity / acceleration) measuring device of the embodiment of the present invention includes the following steps and steps.
First, the first conductor layer 312 is formed on the substrate 311 (20) (see FIG. 3). Next, an insulating layer 321 is formed on the first conductor layer 312, and then a part of the insulating layer 321 on the first conductor layer 312 is removed to form a concave groove 331 (see FIG. 4). Then, a sacrificial layer 341 is formed on the insulating layer 321 and the concave groove 331 is covered (see FIG. 5).
Part of the sacrificial layer 341 covering the concave groove is removed to form a contact hole 351 (see FIG. 6).
Next, a second conductor layer 361 is formed on the sacrificial layer 341, and the contact hole 351 is covered (see FIG. 7). Part of the second conductor layer 361 is removed to form at least a pair of electrostatic vibration structures 371 (21a, 21b, 25) (see FIG. 8). At least one inertial display layer 381 (214) is formed on the electrostatic vibration structure 371 (see FIG. 9). Finally, the sacrificial layer 341 is removed (see FIG. 10). In this way, a strong structure in which the electrostatic vibration structure 371 and the inertial display layer 381 are suspended in the air on the substrate 311 can be easily manufactured, and the electrostatic vibration body is deformed due to a difference in thermal expansion coefficient. Can be avoided. In addition, it is possible to accurately manufacture a stable manufacturing process, a reduction in cost, and a precise structure.

Next, in the embodiment of the present invention, a method for manufacturing a rotation amount (angular velocity / acceleration) measuring device that solves the problem of parasitic capacitance by providing a conductive plate will be described.
FIGS. 11 to 19 are flowcharts for explaining the production stage of the embodiment of the present invention.
First, the third conductor layer 41 is formed on the substrate 40 (20) and covered with the insulating layer 42 (see FIG. 11). Subsequently, the first conductor layer 43 is formed on the insulating layer 42 (see FIG. 12). The first conductor layer 43 is covered with an insulating layer 44, and a part of the insulating layer material above the insulating layer 44 is removed to form a concave groove 441 (see FIG. 13). A sacrificial layer 45 is formed on the insulating layer 44, and the concave groove 441 is covered (see FIG. 14). A part of the sacrificial layer covering the concave groove 441 is removed, and a part of the third conductor layer 41 is exposed to form a contact cavity (hole) 451 (see FIG. 15).
Subsequently, a second conductor layer 46 is formed on the sacrificial layer 45, the contact cavity (hole) 451 is covered, and the second conductor layer 46 and the third conductor layer 41 are connected to each other (see FIG. 16). ). A portion of the second conductor layer 46 is etched to form the electrostatic vibration structure 48 (21a, 21b, 25) (see FIGS. 17 and 18). Further, an inertial display layer 47 (214) having a protrusion on at least one upper portion is formed on the electrostatic vibration structure 48 (see FIG. 18). Finally, the sacrificial layer 45 is removed, and a strong structure (FIG. 19) for floating the electrostatic vibration structure 48 on the substrate 40 can be easily manufactured. The body can be prevented from being deformed. It is possible to accurately manufacture a stable manufacturing process, cost reduction, and a precise structure.

The electrostatic vibration structures 371 and 48 in FIG. 1 are shown in FIG. 1 when the first pair of vibration portions 21a and 21b have a positive charge and the second pair of vibration portions 22a and 22b have a negative charge. Generates an electrostatic attraction force between the vibrating portion 22a and an electrostatic attraction force between the vibrating portion 21b. Further, the electrostatic vibration structures 371 and 48 in FIG. 2 are hexagonal portions of the electrostatic vibration bodies 211 and 211 ′ including the feedback comb body 215 215 ′ and the electrostatic comb body 216.
In this embodiment, the sacrificial layer 45 is made of an optical synthetic quartz glass material, and the insulating layers 42 and 44 are made of a silicon monoxide material. The inertial display layer 47 can select one of a conductor material and a semiconductor material, and gold (Au) is selected in this embodiment.

Next, the operation (operation method) of the embodiment of the present invention will be described.
As shown in FIG. 20, the rotation amount measuring device 2 can measure the rotation amounts of the two axes, and in this embodiment, the rotation amounts of the X axis and the Y axis are Ωx and Ωy. When the first pair of vibrating portions 21a and 21b have a positive charge and the second pair of vibrating portions 22a and 22b have a negative charge, the vibrating portion 21a has an electrostatic attraction force between the vibrating portion 22a. And an electrostatic attraction force is generated between the vibrating portion 21b and the vibrating portion 22b. On the other hand, when the first vibrating portions 21a and 21b have a positive charge and the second pair of vibrating portions 22a and 22b also have a positive charge, the vibrating portion 21a and the electrostatic repulsive force And an electrostatic repulsive force is generated between the vibrating portion 21b and the vibrating portion 22b.

  Based on the above-described principle, the drive circuit unit 27 provides an alternating electric field to the first pair of vibrating units, and provides a direct current electric field to the second pair of vibrating units, whereby the first pair of vibrating units 21a, 21b and The second pair of vibrating portions 22a and 22b generates an electrostatic force 5 that attracts and repels each other. The electrostatic force 5 includes displacements on the X axis and the Y axis. Due to the structure of the elastic body 213, the electrostatic vibrators 211, 211 ′, 221, 221 ′ vibrate in the first direction 6 in parallel along the substrate. In order to control the vibration frequency and generate a good resonance effect, the present invention controls the feedback control circuit 8 to be connected to the return electrode unit 24, and the return power unit 24 vibrates the electrostatic vibrators 211 and 211 ′. The form is measured and returned to the feedback control circuit 8. Since all the vibration part structures in the present embodiment are equal and have the same vibration frequency, a resonance effect can be generated, and the voltage of the driving electrostatic force is reduced. Further, the center of gravity position does not change when the vibrating structure is re-driven, unnecessary noise is prevented, and the signal when processing the back-end signal is stabilized.

にて表され、
（記号１）

は慣性座標系統の速度を表し、
（記号２）

は角速度の測定値を表す。
該第一対振動部２１ａ、２１ｂ及び該第二対振動部２２ａ、２２ｂは静電力が生む
振動によって速度（記号１）

が提供され、このように、該計測装置２は角速度の影響を受ける時に転向力を生じるのである。
図２１は、本発明の実施例の回転量(角速度・角加速度)計測装置がＸ軸の回転量を受けた時に振動部の該第一対振動部が受ける転向力を示した図である。
該第一対振動部２１ａ、２１ｂ及び第二対振動部２２ａ、２２ｂ静電力を受けて駆動し振動している状態下で、該計測装置２がＸ軸方向に回転する角速度の影響を受ける時、該第一対振動部２１ａ、２１ｂは基板２０に垂直に揺れ動き、該第一対振動部２１ａ、２１ｂが揺れ動くことにより、該第一対振動部２１ａ、２１ｂと該計測電極部２３の距離が変化し、該第一対振動部２１ａ、２１ｂと該計測電極部２３の間の電気容量に変化が生じ、この時、該計測回路部２６を通して電気容量の変化量ΔＣ１、ΔＣ２を測定でき、回路信号を通じて回転量(角速度・角加速度)の大きさへ反映することができる。 Here, the turning force F is given by (Formula 1)

Represented by
(Symbol 1)

Represents the velocity of the inertial coordinate system,
(Symbol 2)

Represents the measured value of angular velocity.
The first pair of vibrating portions 21a and 21b and the second pair of vibrating portions 22a and 22b are driven at speed (symbol 1) by vibration generated by electrostatic force.

Thus, the measuring device 2 generates a turning force when affected by the angular velocity.
FIG. 21 is a diagram illustrating the turning force received by the first vibration portion of the vibration portion when the rotation amount (angular velocity / angular acceleration) measuring apparatus according to the embodiment of the present invention receives the rotation amount of the X axis.
When the measuring device 2 is affected by the angular velocity of rotation in the X-axis direction in a state where it is driven and vibrated by receiving the electrostatic force of the first pair of vibrating portions 21a and 21b and the second pair of vibrating portions 22a and 22b The first pair of vibrating portions 21a and 21b swings perpendicularly to the substrate 20, and the distance between the first pair of vibrating portions 21a and 21b and the measurement electrode portion 23 is increased by swinging the first pair of vibrating portions 21a and 21b. The capacitance between the first vibrating portions 21a and 21b and the measurement electrode portion 23 changes, and at this time, the change amounts ΔC1 and ΔC2 of the capacitance can be measured through the measurement circuit portion 26. The amount of rotation (angular velocity / angular acceleration) can be reflected through the signal.

In addition to measuring the two-dimensional rotation amount by the combination of the two pairs of vibration parts described above, the embodiment of the present invention uses a pair of vibration parts (for example, the first pair of vibration parts 21a, 21b) and uses a one-dimensional The amount of rotation can be measured.
FIG. 22 is a diagram of another embodiment of the rotation amount (angular velocity / angular acceleration) measuring apparatus of the present invention. In order to vibrate the first pair of vibrating portions 21a and 21b, the fixed electrode 1 is installed at the position of the comb electrode structure 216 provided by the vibrating portion. In the present embodiment, the first pair of vibrating portions 21a and 21b are connected to each other, and the two fixed electrodes 1 are also connected to each other.
Therefore, the first pair of vibrating portions 21a and 21b are driven to vibrate along the first direction 6 simply by applying an AC voltage to the first pair of vibrating portions 21a and 21b and inputting a DC voltage to the fixed electrode 1. The one-dimensional rotation amount can be measured.

  Since the embodiment has the above-described configuration, the resonance effect generated by the combination of the symmetric structures is used to reduce the power consumption of the element, lower the electrostatic drive voltage, and drive the rotation amount measuring device. Sometimes using a design where the position of the center of gravity never changes, achieving noise reduction, utilizing a multi-axis measurement structure formed by a single manufacturing process mask, stabilizing the manufacturing process, reducing costs and precise structure Can be accurately manufactured.

  In the present invention, preferred embodiments have been disclosed as described above. However, the present invention is not limited to the present invention, and any person who is familiar with the technology can make various modifications within the spirit and scope of the present invention. Of course, changes can be made.

It is explanatory drawing of the Example of this invention. It is explanatory drawing of the vibration part structure of the Example of this invention. It is flow explanatory drawing of the manufacturing method of the Example of this invention. It is flow explanatory drawing of the manufacturing method of the Example of this invention. It is flow explanatory drawing of the manufacturing method of the Example of this invention. It is flow explanatory drawing of the manufacturing method of the Example of this invention. It is flow explanatory drawing of the manufacturing method of the Example of this invention. It is flow explanatory drawing of the manufacturing method of the Example of this invention. It is flow explanatory drawing of the manufacturing method of the Example of this invention. It is flow explanatory drawing of the manufacturing method of the Example of this invention. It is flow explanatory drawing of the production method of another Example of this invention. It is flow explanatory drawing of the production method of another Example of this invention. It is flow explanatory drawing of the production method of another Example of this invention. It is flow explanatory drawing of the production method of another Example of this invention. It is flow explanatory drawing of the manufacturing method of another Example of this invention. It is flow explanatory drawing of the production method of another Example of this invention. It is flow explanatory drawing of the production method of another Example of this invention. It is flow explanatory drawing of the production method of another Example of this invention. It is flow explanatory drawing of the production method of another Example of this invention. It is explanatory drawing of the vibration of the rotation amount measuring apparatus of the Example of this invention. It is explanatory drawing from the side of the turning force which the 1st pair vibration part of a vibration part receives when the rotation amount measuring apparatus of the Example of this invention receives rotation amount to a X-axis. It is explanatory drawing of the Example of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Fixed electrode 2 Rotation amount measuring apparatus 20 Board | substrate 21a, 21b 1st pair vibration part 211, 211 'Electrostatic vibration body 212 Support body 213 Elastic body 2130 Rod-shaped body 2131-2134 Long rod-shaped body 214 Mass body 215 215' Feedback comb Mold body 216 Electrostatic comb bodies 22a, 22b Second pair vibrating sections 221, 221 ′ electrostatic vibrator 225, 225 ′ feedback comb body 23 Measurement electrode section 24 Feedback electrode section 241 Comb electrode structure 25 Conductive plate body 26 Measurement circuit unit 27 Drive circuit unit 311 Substrate 312 First conductor layer 321 Insulating layer 331 Concave groove 341 Sacrificial layer 351 Contact hole 361 Second conductor layer 371 Electrostatic vibration structure 381 Inertial display layer 40 Substrate 41 Third conductor layer 42 Insulating layer 43 first conductor layer 44 insulating layer 441 concave groove 45 sacrificial layer 451 contact cavity 46 second conductor layer 47 inertial display layer 48 electrostatic vibration structure 5 electrostatic force 6 first direction 7 rotation Force 8 feedback control circuit 9 the second direction

Claims (8)

It is composed of a first pair of vibration parts, an electrostatic vibration body, a support body, an elastic body, a measurement electrode part,
The first pair of vibration parts are arranged symmetrically on a substrate, the vibration part is provided with an electrostatic vibration body,
The support is interconnected with the substrate;
The elastic body is connected to the electrostatic vibrating body and fixed on the support, and the electrostatic vibrating body has a certain distance from the substrate.
The rotation amount measuring apparatus according to claim 1, wherein the measurement electrode unit is disposed on the substrate and corresponds to the first pair of vibration units.   The electrostatic vibrator is further provided with a plurality of mass bodies, and the plurality of mass bodies are arranged on the electrostatic vibrator at appropriate intervals to increase the inertial motion of the electrostatic vibrator. The rotation amount measuring device according to claim 1.   The conductive plate body is provided, and the conductive plate body is installed between the substrate and the measurement electrode unit and is connected to the vibration unit. Rotation amount measuring device.   The second pair of vibration parts is provided, the first pair of vibration parts is orthogonal to the second pair of vibration parts, the measurement electrode unit is installed on the substrate, and the first pair and the second pair of vibration parts The rotation amount measuring device according to claim 1, wherein the rotation amount measuring device corresponds to each other.   A comb-shaped electrode structure is provided so as to be interlaced with each other between the electrostatic vibrator of the first pair of vibrators and the electrostatic vibrator of the second pair of vibrators adjacent to each other. The rotation amount measuring device according to claim 4.   A first conductor layer is formed on the substrate, an insulating layer is formed on the first conductor layer, a part of the insulating layer on the first conductor layer is removed to form a concave groove, and a sacrifice is formed on the insulating layer. Forming a layer, covering the groove, removing a part of the sacrificial layer covering the groove, forming a contact hole, forming a second conductor layer on the sacrificial layer, covering the contact hole, A method of manufacturing a rotation amount measuring device configured in a stage in which a part of a conductor layer is removed to form a pair of electrostatic vibration structures and a sacrificial layer is removed.   The manufacturing method of the rotation amount measuring device according to claim 6, further comprising forming an inertial display layer on the pair of electrostatic vibration structures. The method of manufacturing a rotation amount measuring device according to claim 6, further comprising forming a third conductor layer connected to the second conductor layer between the substrate and the first conductor layer.

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