JP2006128884A - Ultrasonic probe and its manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an ultrasonic probe which can be easily assembled regarding the ultrasonic probe used for an ultrasonic inspection device or the like. <P>SOLUTION: The manufacturing method for the ultrasonic probe has a process in which a rod-like terminal 3 is inserted to the through-hole 2 of a backing block material 1 having a plurality of the through-holes 2 extended in the substantially same direction so that one tip of the terminal 3 is located on the substantially same plane as the outer face of the backing block material 1, the backing block material 1 and the rod-like terminal 3 are fixed, and a plate-like ultrasonic vibrator 6 is fixed at a position corresponding to the terminal 3 on the substantially same plane. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an ultrasonic probe used in, for example, an ultrasonic inspection apparatus for examining the state of a welded portion or a medical ultrasonic image apparatus that performs imaging using ultrasonic waves, and a method of manufacturing the same.

Japanese Unexamined Patent Application Publication No. 2003-149213 discloses an ultrasonic probe having plate-like ultrasonic transducers arranged in a matrix. The plate-shaped ultrasonic transducer can increase the frequency of generated ultrasonic waves, and has an advantage that a sufficiently high resolution can be achieved.
Japanese Patent Laid-Open No. 2003-149213

  However, it is usually not easy to assemble the ultrasonic probe by fixing the plate-like member (ultrasonic vibrator) and one end of the rod-like terminal in view of handling. Accordingly, an object of the present invention is to provide an ultrasonic probe that can be easily assembled.

  In order to solve the above-mentioned problem, the ultrasonic probe manufacturing method according to the present invention has a plurality of through-holes 2 extending in substantially the same direction, and a rod-like terminal 3 is provided in the through-hole 2 of the backing block member 1. Is inserted so that the front end of the substrate is substantially flush with the outer surface of the backing block member 1, the backing block member 1 and the rod-like terminal 3 are fixed, and the plate-like ultrasonic transducer 6 is placed on the same plane. It is characterized by undergoing a process of fixing to the upper terminal 3 corresponding position. The “terminal 3” is a member that outputs the characteristic information of the vibrator 6 to the ultrasonic probe control device and applies (inputs) a voltage for generating ultrasonic waves to the vibrator 6 from the device.

  “Substantially” in the “substantially same direction” means that the exact same direction is not required. For example, in order to facilitate the above insertion, the through hole 2 is slightly tapered, and there is a slight displacement in the direction of the through hole 2 that functions as an ultrasonic probe terminal. Is.

  Also, “substantially” in the above “substantially on the same plane” means that the exact same plane is not required. For example, the smoothness of the plate-like ultrasonic transducer 6 and the outer surface of the backing block material 1 does not interfere with the assembly work, and electrical connection between the ultrasonic transducer 6 and one end of the terminal 3 is achieved. If so, it is “substantially on the same plane”.

  First, it is usually difficult to maintain the rod-like terminals 3 in an upright state, for example, in a matrix. Therefore, the difficulty can be alleviated by using a backing block material 1 having a plurality of through holes 2 extending substantially in the same direction and inserting the backing block material 1 into the through holes 2. Moreover, the arrangement | positioning position of the end of the said rod-shaped terminal 3 can be arrange | equalized so that the one front-end | tip of the said rod-shaped terminal 3 may be located on the substantially same plane as the backing block material 1 outer surface. .

  Next, the backing block material 1 and the rod-shaped terminal 3 are fixed. Such fixing is realized by using an adhesive 4 or by making the through-hole 2 have a sufficient force for fastening the rod-like terminal 3. Then, the plate-like ultrasonic transducer 6 can be easily fixed to each end of the rod-like terminal 3. This is because the plate-like ultrasonic transducer 6 and one end of the rod-like terminal 3 to be electrically connected are both flat, and there is little difficulty in fixing them. If it is attempted to electrically connect one end of the rod-like terminal 3 and the plate-like ultrasonic transducer 6 without using the backing block material 1, the operation is considered to be extremely difficult. Therefore, according to the present invention, an ultrasonic probe that can be easily assembled can be provided, and the problems to be solved by the present invention are solved.

  The “adhesive 4” includes both an insulating adhesive and a conductive adhesive. However, when the conductive adhesive is used, the adjacent terminals 3 are insulated. However, since the insulating operation is often difficult, it is advantageous to use an insulating adhesive. Moreover, the anisotropic conductive material 5 which has adhesiveness can also be used. By using the conductive adhesive or the anisotropic conductive material 5 having adhesiveness, it is possible to simultaneously realize the fixation and electrical connection between the one end of the rod-like terminal 3 and the plate-like ultrasonic transducer 6. May be advantageous.

  The “backing block material 1” has a function as a damper that suppresses reflection of vibration propagated to the vibrator 6. Examples of materials suitable for fulfilling such a role include hard rubber and epoxy resin.

  In the manufacturing method of the ultrasonic probe of the present invention, the process of fixing the plate-like ultrasonic transducer 6 to the position corresponding to the terminal 3 on the same plane is collectively performed on the plurality of plate-like ultrasonic transducers 6. It is preferable that the process is performed. This is because the time required for manufacturing can be shortened.

  In the case of carrying out collectively, it is more preferable that the fixing step is realized by the anisotropic conductive material 5 made of a mixture of conductive particles and an insulating adhesive. This is because, as described above, it is possible to realize both the fixing and electrical connection between the one end of the rod-like terminal 3 and the plate-like ultrasonic transducer 6 at the same time, which is advantageous. In this case, the conductive particles electrically connect one end of the rod-like terminal 3 and the plate-like ultrasonic transducer 6 between the ultrasonic transducers 6 adjacent to each other in a matrix and / or between the terminals 3. Do not make electrical connections. That is, the elements are not connected. The reason for this is that the distance between one end of the rod-like terminal 3 and the plate-like ultrasonic transducer 6 is an extremely short distance which is usually less than or equal to the diameter of the conductive particles, whereas the ultrasonic vibration adjacent to the matrix shape. This is because the distances between the children 6 and / or the terminals 3 are long enough that the anisotropic conductive material 5 made of a mixture of conductive particles and an insulating adhesive cannot conduct.

  By implementing the ultrasonic probe manufacturing method of the present invention, for example, a plurality of plate-like ultrasonic transducers 6 arranged in a matrix are provided, and each of the transducers 6 is fixed to one end of a rod-like terminal 3. The ultrasonic probe according to the present invention, wherein the terminal 3 and the backing block material 1 are fixed, wherein one end of the rod-like terminal 3 and the outer surface of the backing block material 1 are substantially on the same plane. An acoustic probe is manufactured.

  Further, the ultrasonic probe manufacturing method of the present invention is carried out by using one ultrasonic transducer 6 and diverting it to an ultrasonic probe that is not arranged in a matrix, thereby obtaining a plate-shaped ultrasonic transducer 6. Is an ultrasonic probe in which the terminal 3 and the backing block material 1 are fixed to one end of the rod-shaped terminal 3, and one end of the rod-shaped terminal 3 and the outer surface of the backing block material 1 are substantially formed. Ultrasonic probes that are on the same plane are manufactured.

  Here, as described above, the fixing is realized by the anisotropic conductive material 5 made of a mixture of conductive particles and an insulating adhesive, and as described above, one end of the rod-like terminal 3 and the plate-like ultrasonic wave. It is preferable from the viewpoint that both the fixation with the vibrator 6 and the electrical connection can be realized at the same time.

  According to the present invention, an ultrasonic probe that can be easily assembled can be provided.

An example of a method for manufacturing the ultrasonic probe of the present invention will be described with reference to the drawings.
FIG. 1A is a longitudinal sectional view in which the through hole 2 of the backing block material 1 having a smooth bottom surface (outer surface) can be observed. First, a terminal 3 made of copper wire or phosphor bronze is inserted into the through-hole 2 (FIG. 1B). At the time of such insertion, the rod-shaped terminal is in a state where a smooth pedestal is in close contact with the bottom surface so that the bottom surface of the backing block material 1 and one end of the rod-shaped terminal 3 are substantially on the same plane. Insert 3 until it touches the pedestal.

  Here, as another means for positioning one end of the rod-shaped terminal 3 on substantially the same plane as the outer surface of the backing block member 1, a flange 9 is provided at the one end as shown in FIG. 9 can be considered as the shape of the backing block material 1 related to being accommodated in the backing block material 1. This means has an advantage that one end of the terminal 3 can be positioned substantially on the same plane as the outer surface of the backing block material 1 without requiring the pedestal. However, it is disadvantageous in that the forming process of the flange 9 and the through hole 2 of the backing block material 1 that accommodates the flange 9 is complicated. In addition, due to the shape of the flange 9 and the backing block material 1, air easily enters the gap between them. Since air is extremely difficult to propagate ultrasonic waves, an ultrasonic imaging apparatus or the like is disadvantageous in that the accuracy of input / output of information via an ultrasonic probe may be reduced. Furthermore, it is disadvantageous in that noise due to the reflection of the ultrasonic waves by the collar 9 may occur.

  Further, another means for positioning one end of the rod-shaped terminal 3 on substantially the same plane as the outer surface of the backing block material 1 is to insert the terminal 3 into the through hole 2 of the backing block material 1, for example, as described later. For example, after fixing the backing block material 1 and the terminal 3 with the adhesive 4, the outer surface of the backing block material 1 is ground with the terminal 3 with a file. According to such means, the position accuracy of the terminal 3 in the direction of the through hole 2 when the one end of the terminal 3 is positioned substantially on the same plane as the outer surface of the backing block material 1 can be made extremely good. There are advantages you can do.

  Further, as shown in FIG. 3, another means for inserting the terminals 3 into the backing block material 1 is to fix a plurality of terminals 3 in advance in a matrix on a pedestal or the like (FIG. 3 (a)), and then the backing block material. A means for accommodating the terminal 3 in the through hole 2 by aligning the one through hole 2 with the position of the fixed terminal 3 (FIG. 3B) or the like can be considered. Such means has difficulty in handling the terminal 3 in the step of fixing the terminal 3 in advance, and difficulty in alignment step of the backing block material 1 and the terminal 3, so that FIG. Therefore, it is disadvantageous as compared with the process through the process of FIG.

  Next, an insulating epoxy adhesive 4 is applied to the entire upper surface of the backing block material 1. At that time, since the adhesive 4 is also applied to a part of the side surface of the rod-shaped terminal 3, the backing block material 1 and the rod-shaped terminal 3 are fixed (FIG. 1C). Further, an anisotropic conductive material 5 in which 5 to 50% by weight of Sn—Ag—Cu alloy as conductive particles is mixed in an epoxy insulating adhesive is applied to the bottom surface of the backing block material 1 (FIG. 1 ( d)).

  Instead of the conductive particles, a simple substance such as Ni or a polymer having a surface plated with a conductive material such as copper can be used. The particle shape can be a ball or flake. Moreover, it is preferable that a particle diameter is substantially constant. When one end of the vibrator 6 and the terminal 3 is arranged in a matrix, for example, if conductive particles having an excessively large particle diameter exist between some of the vibrators 6 and one end of the terminal 3, they are adjacent to each other. This is because even if conductive particles having a small particle diameter exist between the other vibrator 6 and one end of the terminal 3, it may be considered that electrical connection between them may not be ensured there. The mixing ratio of the conductive particles is preferably small if the area of one end of the rod-like terminal 3 exposed on the substantially same plane as the outer surface of the backing block material 1 is large, and is large if the area is small. . The reason is that if the area is small, the mixing ratio is increased, and the probability that the conductive particles are in contact with all the terminals is increased, so that the electrical connection between the terminal 3 and the vibrator 6 is reliably realized. It is to do.

  Next, the plate-like ultrasonic transducer 6 is fixed to the corresponding position of the bottom of the backing block material 1 and one end of the rod-like terminal 3 (FIG. 1 (e)). With this fixing, electrical connection between the opposing plate-like ultrasonic transducer 6 and one end of the rod-like terminal 3 is realized by the anisotropic conductive material 5. However, even with the anisotropic conductive material 5, the electrical connection between the ends of the adjacent rod-shaped terminals 3 was not realized. Here, a part of the ultrasonic probe assembling work for fixing the plate-like ultrasonic transducer 6 is such that the shape of the side to be fixed is the same as that of the plate-like ultrasonic transducer 6 and the bottom surface of the backing block material 1 and the rod-like shape. Since it was one end of the terminal 3, it was the operation | work which laminate | stacks the smooth surface of both together, and was very easy.

The plate-like ultrasonic transducer 6 is a ceramic piezoelectric body made of PbZrTiO ₃ (PZT) having a thickness of 0.1 mm to 0.3 mm. A grid-like cut 8 is formed on one large plate-like ultrasonic transducer 6 by dicing or the like, and the terminals 3 arranged in a matrix and the individual ultrasonic transducers 6 (thick portions) face each other. (FIG. 1 (e)). The cuts 8 are for causing the vibrators 6 partitioned in a matrix to function as constituent elements of independent elements.

  Here, as shown in FIG. 4, prior to or simultaneously with the fixing of the plate-like ultrasonic transducer 6 to the position corresponding to the terminal 3 on the substantially same plane, one end of each rod-like terminal. It is preferable that the plate-like ultrasonic transducer is individually connected with an anisotropic conductive material made of a conductive adhesive 4 ′ or a mixture of conductive particles and an insulating adhesive. In order to connect “individually”, the conductive adhesive 4 ′ or the anisotropic conductive material here is dispensed by a dispenser or screen printed at the position of the terminal 3 or the vibrator 6 corresponding to the terminal 3. Supply by technique. “Individually” connection means that a predetermined distance is secured between the supplied conductive adhesive 4 ′ or anisotropic conductive material so as not to short-circuit adjacent terminals 3 or elements. . Since short circuit is prevented, the use of the conductive adhesive 4 ′ and an anisotropic conductive material having a high conductive particle content is allowed. As a result of the allowance, the reliability of electrical connection between the terminal 3 and the vibrator 6 is greatly improved.

  FIG. 4 shows that as a result of fixing the plate-like ultrasonic transducer and one end of the rod-shaped terminal, one end of each rod-shaped terminal and the plate-like ultrasonic transducer are individually connected to the conductive adhesive 4. The ultrasonic probe according to the present invention is connected to an anisotropic conductive material made of a mixture of conductive particles and an insulating adhesive. The fixing is realized by an insulating adhesive 4 as shown in FIG.

  Next, the acoustic matching layer 7 is fixed to the surface of the vibrator 6 opposite to the surface where the cut 8 is present (FIG. 1 (f)). For the acoustic matching layer 7, an epoxy resin containing a polyimide film or ceramic powder having a thickness of 25 μm to 200 μm can be suitably used. In the present embodiment, a process of attaching a polyimide film to the vibrator 6 with an epoxy adhesive was performed. The acoustic matching layer 7 plays a role in reducing the difference in acoustic impedance between the vibration surface of the terminal 3 and the air and efficiently transmitting and receiving ultrasonic waves. By passing through the above process, the manufacturing method of the ultrasonic probe of this invention is completed, and the ultrasonic probe of this invention can be obtained.

  INDUSTRIAL APPLICABILITY The present invention has applicability in, for example, an ultrasonic inspection apparatus for examining the state of a welded part, a medical ultrasonic image apparatus that performs imaging using ultrasonic waves, and related industries.

It is a longitudinal cross-sectional view which shows the process in which the ultrasonic probe of this invention is manufactured. It is a longitudinal cross-sectional view which shows an example of the ultrasonic probe of this invention. It is a longitudinal cross-sectional view which shows one process of the ultrasonic probe manufacture which concerns on this invention. In the ultrasonic probe of the present invention, it is a longitudinal sectional view showing a state where one end of each rod-like terminal and a plate-like ultrasonic transducer are individually connected by a conductive adhesive.

Explanation of symbols

1. Backing block material2. Through hole 3. Terminal 4. Adhesive 4 '. 4. Conductive adhesive 5. Anisotropic conductive material Vibrator 7. Acoustic matching layer8. Break 9. Buttock

Claims (8)

An ultrasonic probe in which a plate-like ultrasonic transducer is fixed to one end of a rod-shaped terminal, and the terminal and a backing block material are fixed,
One end of the said rod-shaped terminal and the said backing block material outer surface are substantially on the same plane, The ultrasonic probe characterized by the above-mentioned. An ultrasonic probe having a plurality of plate-like ultrasonic transducers arranged in a matrix, each of the transducers being fixed to one end of a rod-like terminal, and the terminal and a backing block material being fixed,
One end of the said rod-shaped terminal and the said backing block material outer surface are substantially on the same plane, The ultrasonic probe characterized by the above-mentioned.   The ultrasonic probe according to claim 2, wherein the fixation is realized by an anisotropic conductive material made of a mixture of conductive particles and an insulating adhesive.   As a result of fixing the plate-shaped ultrasonic transducer and one end of the rod-shaped terminal, one end of each rod-shaped terminal and the plate-shaped ultrasonic transducer are individually connected with conductive adhesive or conductive particles and insulating adhesive. The ultrasonic probe according to claim 2, wherein the ultrasonic probe is connected by an anisotropic conductive material made of a mixture thereof.   A rod-shaped terminal is inserted into the through-hole of the backing block member having a plurality of through-holes extending in substantially the same direction so that one end thereof is substantially flush with the outer surface of the backing block member, A method of manufacturing an ultrasonic probe, comprising: a step of fixing the backing block member and a rod-shaped terminal and fixing a plate-like ultrasonic transducer to a terminal corresponding position on the same plane.   6. The process of fixing a plate-like ultrasonic transducer to a terminal corresponding position on the same plane is a step of collectively performing a plurality of plate-like ultrasonic transducers on the same plane. Of manufacturing ultrasonic probe.   The process of fixing the plate-like ultrasonic transducer to the terminal corresponding position on the same plane is realized by an anisotropic conductive material made of a mixture of conductive particles and an insulating adhesive. 6. A method for producing an ultrasonic probe according to 6.   Prior to or simultaneously with the fixing of the plate-like ultrasonic transducer to the terminal corresponding position on the same plane, one end of each rod-like terminal and the plate-like ultrasonic transducer are individually conductive. 6. The method of manufacturing an ultrasonic probe according to claim 5, wherein a process of connecting with an anisotropic conductive material composed of an adhesive or a mixture of conductive particles and an insulating adhesive is performed.

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