JP2006128574A - Solar battery cell and its manufacturing method, solar battery module, and its manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a solar battery cell module using solar cells of which the solar cell module can be composed without performing patterning including scribing on the entire electrode film etc., formed over the entire surface of one surface side of a substrate. <P>SOLUTION: The solar battery cell module is constituted by electrically and serially connecting a plurality of solar battery cells 10, each formed by laminating an electrode film 14, a p-type semiconductor layer 16, an n-type semiconductor layer 18, and a transparent electrode 20 on one surface side of the substrate 12 in this order. The plurality of solar cells 10 are arranged in series; an extension electrode film 14a which is extended from the electrode film 14 and in an exposed state is formed on one of both flanks of the substrate 12, which face flanks of other solar cells 10 and 10 disposed adjacently to a solar battery cell 10 on both sides thereof; an extension transparent electrode 20a which is extended from the transparent electrode 20 without coming into contact with the electrode surface 14a is formed on the other flank; and the extension electrode film 14a of the solar cell 10 and extension transparent electrodes 20a of the adjacent solar battery cells 10 are electrically connected. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a solar battery cell and a manufacturing method thereof, and a solar battery module and a manufacturing method thereof. More specifically, the present invention is formed by laminating an electrode film, a p-type semiconductor layer, an n-type semiconductor layer, and a transparent electrode on one surface side of a substrate. The present invention relates to a solar cell and a manufacturing method thereof, a solar cell module in which a plurality of solar cells are electrically connected in series, and a manufacturing method thereof.

As a solar cell used for a solar cell, a solar cell formed by laminating an electrode film, a p-type semiconductor layer, an n-type semiconductor layer and a transparent electrode on one side of a substrate, a so-called compound semiconductor solar cell It has been known.
Such a compound semiconductor solar battery cell can be produced at a lower cost than a crystalline solar battery cell using a thin film such as crystalline silicon, and an electromotive force of substantially the same level can be obtained. Is becoming clear.
By the way, in the electromotive force of a compound semiconductor solar cell alone, since sufficient electric power that can be practically used cannot be obtained, usually, a plurality of compound semiconductor solar cells (hereinafter sometimes simply referred to as solar cells). Are used as a solar cell module electrically connected in series.
As a manufacturing method of such a solar cell module, the following Patent Document 1 is proposed.
Japanese Unexamined Patent Publication No. 2000-252506 (FIGS. 1 and 2 and corresponding explanation points)

  An outline of the manufacturing method proposed in Patent Document 1 is shown in FIG. First, as shown in FIG. 9A, a full-surface electrode film formed by sputtering on the entire surface of one surface side of the glass substrate 200 is scribed by laser to form electrode films 202, 202,. Then, a photoelectric conversion unit 204 composed of an n-type semiconductor layer made of amorphous silicon and a p-type semiconductor layer made of amorphous silicon is formed on the electrode films 202, 202. Further, an ITO film 206 as a transparent electrode is formed on the photoelectric conversion unit 204 by a sputtering method.

Next, as shown in FIG. 9B, after the ITO film 206 and the p-type semiconductor layer are scribed by a laser to form a separation groove 208 that separates into a solar cell portion and an extraction portion of the electrode film 202. The connection hole 210 is formed in the extraction part of the electrode film 202. The connection hole 210 passes through the p-type semiconductor layer constituting the photoelectric conversion unit 204 and reaches the n-type semiconductor layer.
Thereafter, as shown in FIG. 9C, a silver thin film is formed on the entire surface including the ITO film 206, the separation groove 208, and the connection hole 210 by vapor deposition, and then the silver thin film is patterned to form a film on the ITO film 206. In addition, a grid electrode 212 is formed and a silver layer is deposited in the connection hole 210.
Further, the conductive region 214 reaching the electrode film 202 is formed by diffusing silver in the connection hole 210 in the n-type semiconductor layer or the like made of amorphous silicon by heat treatment. The conductive region 214 can electrically connect the ITO film 206 and the electrode film 202 of the adjacent solar battery cell.

According to the method for manufacturing a solar cell module shown in FIG. 9, a plurality of solar cells electrically connected in series can be simultaneously formed on one substrate 200.
However, the electrical connection between the ITO film 206 and the electrode film 202 of the adjacent solar battery cell is made by the conductive region 214 formed by diffusing silver in the amorphous silicon, and thus lacks certainty. . Moreover, the formation time for forming the conductive region 214 is long, which may cause a decrease in the productivity of the solar cell module.
On the other hand, a solar cell module manufacturing method different from the solar cell module manufacturing method shown in FIG. 9 is also known. A method for manufacturing such a solar cell module is shown in FIG.

In the method of manufacturing the solar cell module shown in FIG. 8, first, an entire surface electrode film made of molybdenum or the like is formed on the entire surface of one surface side of the substrate 100 made of glass or the like by sputtering or vapor deposition, and then laser light is applied to the entire surface electrode film. Grooves 104, 104,... Are formed by irradiation or mechanical scribing, and patterning is performed on the electrode films 102, 102,... For each cell [FIG.
An entire n-type semiconductor layer 107 is formed on the entire p-type semiconductor layer 105 formed over the entire surface of the electrode films 102, 102,... [FIG. 8B].
Further, grooves 110, 110,... Are formed in the formed whole surface p-type semiconductor layer 105 and whole surface n-type semiconductor layer 107 by laser light irradiation or mechanical scribing, and the p-type semiconductor layer 106 and the n-type semiconductor layer 108 for each cell are formed. Is patterned [FIG. 8C]. The electrode film 102 of the adjacent cell is exposed on the bottom surface of the groove 110.
Next, the entire transparent electrode 111 made of ZnO or the like is formed over the entire surface of the n-type semiconductor layers 108, 108,... By sputtering or vapor deposition [FIG.
Thereafter, grooves 110, 110,... Are formed by mechanical scribe in the entire transparent electrode 111, the n-type semiconductor layer 108, and the p-type semiconductor layer 106, and the transparent electrode 112 for each cell is patterned, so that one substrate is formed. .. Can be formed on the substrate 100 from the transparent electrode 112, the n-type semiconductor layer 108, the p-type semiconductor layer 106, and the electrode film 106 [FIG. 8 (e)].
In the formed solar battery cell 116, a part of the transparent electrode 112 penetrates the p-type semiconductor layer 106 and the electrode film 106, and the electrode film 102 of the adjacent solar battery cell 116 fills the groove 110 forming the bottom surface. Has been formed. Therefore, each of the solar cells 116, 116,... Is connected in series with an electrode film 102 of the adjacent solar cell 116 with a part of the transparent electrode 112.

In the method for manufacturing a solar cell module shown in FIG. 8, a plurality of solar cells 116, 116,... Electrically connected in series without forming a conductive region due to metal diffusion are combined into one substrate 100. Can be formed simultaneously on top. For this reason, according to the manufacturing method of the solar cell module shown in FIG. 8, the productivity of the solar cell module can be improved as compared with the manufacturing method of the solar cell module shown in FIG.
However, in the method of manufacturing the solar cell module shown in FIG. 8, the entire surface of the substrate 100 is scribed over the entire surface of one surface of the substrate 100, and the entire surface of the electrode films 102, 102,. It is necessary to scribe the entire surface p-type semiconductor layer 105 and the entire surface n-type semiconductor layer 107 and scribe the entire surface transparent electrode 111 formed over the entire surface of the n-type semiconductor layers 108, 108,.
Such scribing is usually performed using laser light irradiation or mechanical scribing, but it is difficult to pattern a high-hardness full-surface electrode film like a full-surface electrode film made of molybdenum.
Further, when the entire transparent electrode 111, the n-type semiconductor layer 108 and the p-type semiconductor layer 106 are scribed to form the grooves 114, 114. There is a risk of short circuit with the electrode film 102 of the adjacent solar battery cell 116 attached to the exposed surfaces of the p-type semiconductor layer 108 and the p-type semiconductor layer 106 and exposed on the bottom surface of the groove 114.
Further, when the substrate 100 having an insulating film such as a SiO ₂ film formed on one surface side of the metal plate is used as the substrate 100, the insulating film is simultaneously scribed when the entire surface electrode film is scribed. May cause a short circuit between adjacent solar cells 116.
Accordingly, an object of the present invention is to provide a solar battery module capable of forming a solar battery module without performing patterning including scribing on the entire surface electrode film formed over the entire surface of one surface of the substrate, a manufacturing method thereof, and the solar battery. The object is to provide a solar electric module using a cell and a manufacturing method thereof.

As a result of repeated studies to solve the above problems, the present inventors have formed an extended electrode film by extending a part of the electrode film formed on the substrate to a part of the side surface, A plurality of solar cells in which an extended transparent electrode is formed by extending a part of a transparent electrode formed on an n-type semiconductor layer on a side surface opposite to the side surface on which the extended electrode film is formed Using a cell, a solar cell module can be easily formed by electrically connecting an electrode film extending to the side surface of a solar cell and a transparent electrode extending to the side surface of another solar cell Knowing what can be done, the present invention has been reached.
That is, the present invention provides a solar cell in which an electrode film, a p-type semiconductor layer, an n-type semiconductor layer, and a transparent electrode are stacked in this order on one side of a substrate. In the portion, the extended electrode film extending from the electrode film is formed in an exposed state, and the electrode film is formed on the side surface portion opposite to the side surface on which the extended electrode film is formed. An extended transparent electrode extending from the transparent electrode without being in contact with the solar cell is formed.
Furthermore, the present invention provides an electrode film, a p-type semiconductor layer, an n-type semiconductor layer, and a transparent electrode on one side of the substrate. A physical vapor deposition method in which the metal particles for electrode film to be formed fly to the electrode film formation surface of the substrate, and one side of the substrate and a part of the side surface forming the substrate with respect to the flying direction of the metal particles for electrode film The electrode is formed on the side surface of the substrate after the substrate is placed in an inclined state so as to be an exposed surface, and electrode film metal particles are deposited on the exposed surface of the substrate to form an electrode film. A transparent electrode metal particle for forming a transparent electrode by forming a p-type semiconductor layer and an n-type semiconductor layer so as to cover an electrode film formed on one side of the substrate while maintaining the exposed state of the film Using a physical vapor deposition method in which the material flies to the transparent electrode forming surface of the substrate, A substrate on which the p-type semiconductor layer and the n-type semiconductor layer are formed such that the upper surface of the semiconductor layer and the opposite surface to the side surface on which the electrode film is formed are exposed surfaces with respect to the flying direction of the metal particles for transparent electrodes. Is placed in an inclined state, and the transparent electrode is formed by depositing the transparent electrode metal particles on the exposed surface.

In the present invention, a plurality of solar cells formed by laminating an electrode film, a p-type semiconductor layer, an n-type semiconductor layer, and a transparent electrode in this order on one side of a substrate are electrically connected in series. In the connected solar battery modules, each of the solar battery cells is arranged in series, and one of both side faces of the substrate corresponding to the side face of the other solar battery cell located on both sides of the solar battery cell. An extended electrode film that is exposed from the electrode film is formed, and the other side surface of the both side surfaces is extended from the transparent electrode without being in contact with the electrode film. A solar cell module is characterized in that a transparent electrode is formed, and the extended electrode film of the solar battery cell and the extended transparent electrode of an adjacent solar battery cell are electrically connected.
Further, according to the present invention, a plurality of solar cells formed by laminating an electrode film, a p-type semiconductor layer, an n-type semiconductor layer, and a transparent electrode on one side of the substrate in this order are electrically connected in series. When manufacturing a connected solar cell module, as the solar cell, an extended electrode film extending from the electrode film is formed in an exposed state on a part of a side surface forming a substrate. The solar cell in which the extended transparent electrode extended from the transparent electrode without being in contact with the electrode film is formed on the side surface portion that is the opposite surface of the extended electrode film, It is also a method for producing a solar cell module, wherein the solar cells are arranged in series, and the extended electrode film of the solar cell is electrically connected to the extended transparent electrode of the adjacent solar cell.

In the present invention, as a solar cell, a substrate, an electrode film made of a molybdenum layer, a p-type semiconductor layer made of InCuS ₂ or CuInSe ₂ , an n-type semiconductor layer made of ZnS or CdS, and Al doped A solar battery cell composed of a transparent electrode made of ZnO can be suitably used.
By using a rectangular substrate as this substrate, an extended electrode film and an extended transparent electrode can be easily formed on one side surface of the substrate.
Furthermore, in a solar cell module, the extension electrode film | membrane of a photovoltaic cell and the transparent electrode of an adjacent photovoltaic cell can be connected reliably by electrically connecting with a conductive adhesive.

The solar battery cell according to the present invention is formed by laminating an electrode film, a p-type semiconductor layer, an n-type semiconductor layer, and a transparent electrode on a substrate in this order, and covers the entire surface on one surface side of the substrate. The entire surface electrode film formed can be manufactured without patterning including scribe.
Further, a solar electric module formed using such a solar battery cell includes a plurality of individually manufactured solar battery cells, an extended electrode film formed on the side surface thereof, and an extension of adjacent solar battery cells. By electrically connecting the transparent electrode, a plurality of solar cells can be easily electrically connected in series.
As described above, the solar cell module according to the present invention can be manufactured without performing patterning including scribing on the entire surface electrode film or the like formed over the entire surface on the one surface side of the substrate. For this reason, problems that occur when patterning including scribing is performed on the entire surface electrode film, for example, difficulty in performing patterning including scribing on the entire surface electrode film made of high-hardness molybdenum, or during this patterning The possibility of a short circuit due to the shavings of the substrate caused by scraping the substrate can be solved.
As a result, a highly reliable solar cell module can be easily obtained, and the manufacturing cost can be reduced.

An example of the solar cell module according to the present invention is shown in FIGS. FIG. 1 is a cross-sectional view of the solar cell module, and FIG. 2 is a top view of the solar cell module. The solar cell module shown in FIGS. 1 and 2 has a plurality of solar cells 10, 10... Electrically connected in series.
Such a solar battery cell 10 is formed by laminating an electrode film 14, a p-type semiconductor layer 16, an n-type semiconductor layer 18 and a transparent electrode 20 in this order on one surface side of a rectangular substrate 12. .
An extended electrode film 14a extending from the electrode film 14 is formed on one side surface of the substrate 12 constituting the solar battery cell 10, and on the opposite surface of the side surface on which the extended electrode film 14a is formed. The extended transparent electrode 20a extended from the transparent electrode 20 without being in contact with the electrode film 14 is formed.
In the solar electric module composed of the plurality of solar cells 10, 10... Having such a shape, the extended electrode film 14 a of the solar cell 10 and the extended transparent electrode 20 a of the adjacent solar cell 10 are connected, A plurality of solar cells 10, 10,... Are electrically connected in series.
The extension electrode film 14a and the extension transparent electrode 20a are connected by a conductive adhesive 22 as shown in FIGS.

When manufacturing the solar battery cell 10 constituting the solar battery module shown in FIGS. 1 and 2, first, as shown in FIG. 3, one surface side of a rectangular substrate 12 made of an insulating material such as glass or ceramic. In addition, an electrode film 14 made of a conductive layer such as molybdenum and an extended electrode film 14 a extending from the electrode film 14 to the side surface of the substrate 12 are formed by a physical vapor deposition method (PVD method).
When the electrode film 14 and the extended electrode film 14a are formed by the PVD method, with respect to the flying direction of the electrode film metal particles forming the electrode film 14 indicated by arrows in FIGS. The substrate 12 is placed on the mounting table 24 so that one surface side of the substrate 12 and one surface of the side surface of the substrate 12 are exposed surfaces. In this way, when the electrode film 14 and the like are formed on the substrate 12 by the PVD method, by tilting the substrate 12, the surface of the substrate 12 that is exposed with respect to the flying direction of the electrode film particles is formed. At the same time that the electrode film 14 can be formed, an extended electrode film 14 a extending from the electrode film 14 can be formed on the side surface of the substrate 12.
The inclination angle of the substrate 12 is preferably 10 to 45 °, more preferably about 20 °.
By the way, among the one surface side of the substrate 12 shown in FIG. 3, the vicinity of the edge on the opposite surface side of the side surface on which the extended electrode film 14 a is formed is an exposed surface (0.1 to the substrate end) on which one surface side of the substrate 12 is exposed. (A gap of about 1.0 mm). For this reason, in order to form the electrode film 14 while maintaining the vicinity of the edge on the exposed surface, as shown in FIG. 4A, the edge of the other substrate 12 adjacent to the vicinity of the edge of the substrate 12 ( The side surface on which the extended electrode film 14a is formed may be placed, and a ridge 24a as a mask member covering the vicinity of the edge of the substrate 12 is extended from the placement table 24 as shown in FIG. May be issued.

On the electrode film 14 thus formed, as shown in FIG. 5, the p-type is formed so as to cover the electrode film 14 while maintaining the state in which the extended electrode film 14a formed on the side surface of the substrate 12 is exposed. A semiconductor layer 16 and an n-type semiconductor layer 18 are formed.
The p-type semiconductor layer 16 is formed by forming a metal film formed by laminating an indium layer and a copper layer on the electrode film 14 formed on the one surface side of the substrate 12 so as to cover the electrode film 14. The p-type semiconductor layer 16 made of CuInS ₂ or CuInSe ₂ can be formed by subjecting to sulfidation or selenization.
Further, the formed p-type semiconductor layer 16 is subjected to KCN treatment for removing impurities such as copper sulfide and copper selenide by washing with a KCN solution.
The indium layer and the copper layer can be formed so as to cover the electrode film 14 by electrolytic plating using the electrode film 14 as a power feeding layer. In this electrolytic plating, a mask member such as a dry film is attached to the extended electrode film 14a so that the plating metal does not deposit on the end face of the extended electrode film 14a.
The indium layer and the copper layer can be formed by a sputtering method or a vapor deposition method. However, a mask member is used so that indium or copper particles do not adhere (deposit) to a portion where one surface side of the substrate 12 is exposed. It is necessary to deposit.

An n-type semiconductor layer 18 is formed on the formed p-type semiconductor layer 16 so as to cover the p-type semiconductor layer 16 as shown in FIG. The n-type semiconductor layer 18 can be formed by a chemical solution deposition method.
In order to form the n-type semiconductor layer 18 made of ZnS, ZnSO ₄ (0.1 mol / liter), thiourea (0.6 mol / liter) and NH ₃ aqueous solution (3 mol / liter) are mixed and maintained at 80 ° C. It can be formed by immersing the substrate 12 on which the p-type semiconductor layer 16 is formed in the mixed solution for about 10 minutes.
In order to form the n-type semiconductor layer 18 made of CdS, cadmium iodide (0.0015 mol / liter), NH ₃ aqueous solution (1.0 mol / liter) and ammonium iodide (0.01 mol / liter) are mixed. The substrate 12 is put into the solution, and when heated to about 40 ° C., thiourea (0.15 mol / liter) is added and immersed at 80 ° C. for 5 minutes.

Next, as shown in FIG. 6, the transparent electrode 20 is formed on the upper surface of the n-type semiconductor layer 18, and the extended transparent electrode 20 a extended from the transparent electrode 20 is formed on the side surface on which the extended electrode film 14 a is formed. Form on the opposite side. The transparent electrode 20 and the extended transparent electrode 20a are made of ZnO doped with Al.
The transparent electrode 20 and the extended transparent electrode 20a are formed by physical vapor deposition (PVD method). When the transparent electrode 20 and the extended transparent electrode 20a are formed by the PVD method, with respect to the flying direction of the transparent electrode metal particles forming the transparent electrode 20 indicated by arrows in FIGS. 7 (a) and 7 (b), The substrate 12 is mounted on the mounting table 26 so that the upper surface of the n-type semiconductor layer 18 and the surface opposite to the side surface on which the extended electrode film 14a is formed are exposed surfaces. In this way, when the transparent electrode 20 is formed on the upper surface of the n-type semiconductor layer 18 or the like by the PVD method, the substrate 12 is tilted so that the exposed surface is exposed to the flying direction of the transparent electrode particles. The transparent electrode 20 can be formed on the upper surface of the mold semiconductor layer 18, and at the same time, the extended transparent electrode 20a can be formed on the opposite side of the side surface on which the extended electrode film 14a is formed.
By the way, of the upper surface of the n-type semiconductor layer 18, the vicinity of the edge on the extended electrode film 14 a side is an exposed surface (a gap of about 0.1 to 1.0 mm to the substrate end) where the upper surface of the n-type semiconductor layer 18 is exposed. ). Therefore, in order to form the transparent electrode 20 while holding the vicinity of the edge with the upper surface of the n-type semiconductor layer 18 exposed, the upper surface of the n-type semiconductor layer 18 is formed as shown in FIG. A flange 26a as a mask member covering the vicinity of the edge may be extended from the mounting table 26, and as shown in FIG. 7B, another substrate 12 adjacent to the vicinity of the edge of the upper surface of the n-type semiconductor layer 18 is provided. It is good also as the state which mounted the edge part (side surface side which forms the extended transparent electrode 20a).
The inclination angle of the substrate 12 is preferably 10 to 45 °, more preferably about 20 °.

When a solar cell module is manufactured using the plurality of solar cells 10, 10,... Shown in FIG. 6, the plurality of solar cells 10, 10,. By electrically connecting the output electrode film 14a and the extended transparent electrode 20a of the adjacent solar battery cell 10, a plurality of solar battery cells 10, 10... Can be electrically connected in series. At the time of such connection, the solar cells 10 and 10 can be reliably connected by connecting to the adjacent solar cells 10 with the conductive adhesive 22.
In the solar cell module shown in FIGS. 1 and 2, the solar cells 10, 10... May be resin-sealed while holding the transparent electrode 20 of each solar cell 10 exposed.

The solar battery cell 10 and the solar battery module shown in FIGS. 1 to 7 can be manufactured without performing patterning including scribing on the entire surface electrode film formed over the entire surface of one surface of the substrate. For this reason, problems that occur when patterning including scribe on the entire surface electrode film, for example, difficulty in applying patterning including scribe to the entire surface electrode film made of high-hardness molybdenum, and patterns including scribe on the entire surface electrode film The possibility of a short circuit due to the shavings of the substrate caused by scraping the substrate at the same time as the polishing can be eliminated, and a highly reliable solar cell module can be obtained.
1 to 7, the substrate 12 made of an insulating material such as glass or ceramic is used as the substrate 12. However, the solar battery cell 10 is formed without patterning including scribing on the entire surface electrode film or the like. Since it can be formed, a substrate in which an insulating film such as a SiO ₂ film is formed on one side of the metal plate can be used.

It is a cross-sectional view for demonstrating an example of the solar cell module which concerns on this invention. It is a top view of the solar cell module shown in FIG. It is a cross-sectional view for demonstrating one manufacturing process of a photovoltaic cell. It is explanatory drawing explaining the mounting base used at the formation process of the electrode film shown in FIG. It is a cross-sectional view for demonstrating one manufacturing process of a photovoltaic cell. It is a cross-sectional view of a completed solar battery cell. It is explanatory drawing explaining the mounting base used at the formation process of the transparent electrode shown in FIG. It is process drawing for demonstrating the manufacturing method of the conventional solar cell module. It is process drawing for demonstrating the manufacturing method of the other conventional solar cell module.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Solar cell 12 Board | substrate 14a Extension electrode film | membrane 14 Electrode film | membrane 16 P-type semiconductor layer 18 N-type semiconductor layer 20 Transparent electrode 20a Extension transparent electrode 22 Conductive adhesives 24 and 26 Mounting bases 24a and 26a

Claims (11)

In a solar battery cell in which an electrode film, a p-type semiconductor layer, an n-type semiconductor layer and a transparent electrode are laminated in this order on one surface side of the substrate,
An extended electrode film extending from the electrode film is formed in an exposed state on a part of the side surface forming the substrate,
An extended transparent electrode extending from the transparent electrode without being in contact with the electrode film is formed on a side surface portion located opposite to the side surface on which the extended electrode film is formed. Solar cell. A solar cell includes a substrate, an electrode film made of a molybdenum layer, a p-type semiconductor layer made of InCuS ₂ or CuInSe ₂ , an n-type semiconductor layer made of ZnS or CdS, and a transparent electrode made of ZnO doped with Al The solar cell according to claim 1, wherein the solar cell is composed of   The solar cell according to claim 1 or 2, wherein the substrate is a rectangular substrate. When manufacturing a solar battery cell in which an electrode film, a p-type semiconductor layer, an n-type semiconductor layer, and a transparent electrode are laminated in this order on one side of the substrate,
Using the physical vapor deposition method in which the electrode film metal particles forming the electrode film fly to the electrode film formation surface of the substrate, the one surface side of the substrate and the substrate are formed with respect to the flying direction of the electrode film metal particles. After placing the substrate in an inclined state so that a part of the side surface becomes an exposed surface, and depositing electrode film metal particles on the exposed surface of the substrate to form an electrode film,
Forming a p-type semiconductor layer and an n-type semiconductor layer so as to cover the electrode film formed on the one surface side of the substrate while maintaining the exposed state of the electrode film formed on the side surface of the substrate;
Next, using a physical vapor deposition method in which the transparent electrode metal particles forming the transparent electrode fly to the transparent electrode forming surface of the substrate, the upper surface of the n-type semiconductor layer and the opposite surface of the side surface on which the electrode film is formed are The substrate on which the p-type semiconductor layer and the n-type semiconductor layer are formed is placed in an inclined state so as to be an exposed surface with respect to the flying direction of the transparent electrode metal particles, and the transparent electrode metal particles are formed on the exposed surface. A method for manufacturing a solar battery cell, comprising depositing a transparent electrode to form a transparent electrode. After forming an electrode film made of a molybdenum layer on the substrate, a p-type semiconductor layer made of InCuS ₂ or CuInSe ₂ is formed,
5. The solar cell according to claim 4, wherein after forming an n-type semiconductor layer made of ZnS or CdS on the p-type semiconductor layer, a transparent electrode made of ZnO doped with Al is formed on the n-type semiconductor layer. Cell manufacturing method. A solar cell module in which a plurality of solar cells formed by laminating an electrode film, a p-type semiconductor layer, an n-type semiconductor layer, and a transparent electrode in this order are electrically connected in series on one side of a substrate In
Each of the solar cells is arranged in series, and is extended from the electrode film to one of both side surfaces of the substrate corresponding to the side surfaces of other solar cells located on both sides of the solar cell. An extended electrode film in an exposed state is formed, and an extended transparent electrode extending from the transparent electrode without being in contact with the electrode film is formed on the other side surface of the both side surfaces,
The solar cell module, wherein the extended electrode film of the solar cell is electrically connected to the extended transparent electrode of the adjacent solar cell. A solar cell includes a substrate, an electrode film made of a molybdenum layer, a p-type semiconductor layer made of InCuS ₂ or CuInSe ₂ , an n-type semiconductor layer made of ZnS or CdS, and a transparent electrode made of ZnO doped with Al The solar cell module according to claim 6, wherein the solar cell module is configured by:   The solar cell module according to claim 6 or 7, wherein the extended electrode film of the solar battery cell and the transparent electrode of the adjacent solar battery cell are electrically connected by a conductive adhesive. A solar cell module in which a plurality of solar cells formed by laminating an electrode film, a p-type semiconductor layer, an n-type semiconductor layer, and a transparent electrode in this order are electrically connected in series on one side of a substrate When manufacturing
As the solar battery cell, an extended electrode film extending from the electrode film is formed in an exposed state on a part of the side surface forming the substrate, and the side surface which is the opposite surface of the extended electrode film For the part, using a solar cell in which an extended transparent electrode extended from the transparent electrode without contacting the electrode film is formed,
A plurality of the solar cells are arranged in series, and the extended electrode film of the solar cell is electrically connected to the extended transparent electrode of the adjacent solar cell. Method. As a solar cell, a substrate, an electrode film made of a molybdenum layer, a p-type semiconductor layer made of InCuS ₂ or CuInSe ₂ , an n-type semiconductor layer made of ZnS or CdS, and a transparent electrode made of ZnO doped with Al The manufacturing method of the solar cell module of Claim 9 using the photovoltaic cell comprised from these.   The manufacturing method of the solar cell module of Claim 9 or Claim 10 which electrically connects the extended electrode film of a photovoltaic cell and the transparent electrode of an adjacent photovoltaic cell with a conductive adhesive.

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