JP2006111933A - Etching composition liquid - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide etching composition liquid which has more excellent restraining effect for side etching and can quickly etch exposed portion (41) in a copper thin film. <P>SOLUTION: The etching composition liquid contains the following component (a) to component (f) and the surface tension (γ) is ≤66 mN/m. Component (a): cuplic chloride or ferric chloride component, Component (b): hydrogen chloride component, Component (c): a 2-aminobenzothiazole compound component shown by formula (I), Component (d): an ethylene glycol compound component shown by formula (II): HO(CH<SB>2</SB>CH<SB>2</SB>O)<SB>n</SB>H, Component (e): a polyamine compound or its salt component shown by formula (III): H<SB>2</SB>N(CH<SB>2</SB>CH<SB>2</SB>NH)<SB>m</SB>H, and Component (f): a glycol ether compound shown by formula (IV-a): R<SP>a</SP>(OCH<SB>2</SB>CH<SB>2</SB>)<SB>2</SB>OH or formula (IV-b): (R<SP>b</SP>OCH<SB>2</SB>CH<SB>2</SB>)<SB>2</SB>O. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

The present invention relates to an etching composition liquid, and more particularly to an etching composition liquid used for forming a copper printed wiring.

A copper printed wiring board (1) provided with a copper printed wiring (3) on a substrate (2) is widely used as an electronic component. As a manufacturing method of such a copper printed wiring board (1),
As shown in FIG. 1 (1), a desired circuit pattern is formed on the copper thin film (4) of the copper thin film laminated substrate (1 ') in which the copper thin film (4) is laminated on the substrate (2). An etching resist thin film (5) is formed,
As shown in FIG. 1 (2), the exposed portion (41) of the copper thin film (4) that is not covered with the etching resist thin film (5) is etched by being brought into contact with the etching composition liquid,
As shown in FIG. 1 (3), a copper printed wiring (3) having a desired pattern is formed.
A so-called wet etching method is known, and as an etching composition solution, one containing (a) cupric chloride or ferric chloride and (b) hydrogen chloride is widely used.

In the wet etching method, a phenomenon called side etching occurs in which the exposed portion (4) is etched not only in the vertical direction (L) but also in the horizontal direction (H) with respect to the surface of the exposed portion (41). In order to form the copper printed wiring (3) having a fine circuit pattern, it is preferable to suppress this side etching and to advance the etching selectively in the vertical direction (L). For this reason, what was excellent in the effect which suppresses side etching is calculated | required as an etching composition liquid.

As such an etching composition liquid having an excellent side etching suppressing effect, Patent Document 1 (Japanese Patent Laid-Open No. 6-57453) discloses (a) cupric chloride, (b) hydrogen chloride, (c) 2-amino. An etching composition liquid containing a benzothiazole compound, (d) glycol compound and (e) polyamine compound is disclosed.
Patent Document 2 (Japanese Patent Laid-Open No. 63-79984) discloses an etching composition liquid containing (a) cupric chloride, (b) hydrogen chloride and aromatic sulfonic acid.

However, in recent years, the circuit pattern of the copper printed wiring (3) has been increasingly thinned, and an etching composition liquid that has a superior side etching suppression effect than the conventional etching composition liquid is required. Moreover, in order to improve productivity, what can etch an exposed part (41) rapidly is desired.

JP-A-6-57453 JP-A-63-79984

Thus, the present inventors have intensively studied to develop an etching composition solution that is more excellent in the side etching suppression effect and can rapidly etch the exposed portion (41) of the copper thin film, and as a result, has reached the present invention.

That is, the present invention provides an etching composition liquid comprising the following components (a) to (f).

〔式中、Ｘは水素原子、ニトロ基、メトキシ基または塩素原子を示す。〕
で示される２−アミノベンゾチアゾール化合物
成分(d)：式（II）
ＨＯ(ＣＨ₂ＣＨ₂Ｏ)_nＨ （II）
〔式中、ｎは１〜１３０の数を示す。〕
で示されるエチレングリコール化合物
成分(e)：式(III)
Ｈ₂Ｎ(ＣＨ₂ＣＨ₂ＮＨ)_mＨ （III）
〔式中、ｍは１〜５の数を示す。〕
で示されるポリアミン化合物またはその塩
成分(f)：式(IV-a)
Ｒ^a(ＯＣＨ₂ＣＨ₂)₂ＯＨ （IV-a）
〔式中、Ｒ^aは炭素数１〜３のアルキル基を示す〕
または式(IV-b)
(Ｒ^bＯＣＨ₂ＣＨ₂)₂Ｏ （IV-b）
〔式中、Ｒ^bは炭素数１〜３のアルキル基を示す〕
で示されるグリコールエーテル化合物 Component (a): Cupric chloride or ferric chloride component (b): Hydrogen chloride component (c): Formula (I)

[Wherein, X represents a hydrogen atom, a nitro group, a methoxy group or a chlorine atom. ]
2-aminobenzothiazole compound component (d) represented by formula (II)
HO (CH ₂ CH ₂ O) _n H (II)
[In formula, n shows the number of 1-130. ]
Ethylene glycol compound component (e) represented by formula (III)
H ₂ N (CH ₂ CH ₂ NH) _m H (III)
[In formula, m shows the number of 1-5. ]
Or a salt component thereof (f): Formula (IV-a)
R ^a (OCH ₂ CH ₂ ) ₂ OH (IV-a)
[Wherein, R ^a represents an alkyl group having 1 to 3 carbon atoms]
Or formula (IV-b)
(R ^b OCH ₂ CH ₂ ) ₂ O (IV-b)
[Wherein R ^b represents an alkyl group having 1 to 3 carbon atoms]
Glycol ether compound represented by

According to the etching composition liquid of the present invention, side etching is further suppressed, so that a copper printed wiring having a finer circuit pattern can be easily formed. Further, since the etching rate is high, the etching can be performed in a shorter time than conventional.

The content of cupric chloride [Cu (II) Cl ₂ ] or ferric chloride [Fe (III) Cl ₃ ] as the component (a) contained in the etching composition of the present invention requires a long time for etching. In view of the fact that a copper printed wiring (3) having a fine circuit pattern can be easily formed, it is usually 100 g / L or more, preferably 120 g / L or more. L or less, preferably 280 g / L or less.

The content of the component (b) hydrogen chloride [HCl] is usually 40 g / L or more as a free acid in that a copper printed wiring (3) having a uniform line width can be easily formed. Is not permeated between the resist thin film (5) and the copper thin film (4), and the copper printed wiring (3) having a fine circuit pattern can be easily formed, and is usually about 100 g / L or less.

Specific examples of the 2-aminobenzothiazole compound represented by the formula (I) of the component (c) include 2-aminobenzothiazole, 2-amino-6-nitrobenzothiazole, 2-amino-6-methoxybenzothiazole. , 2-amino-6-chlorobenzothiazole and the like, and these may be used alone or in combination of two or more. The content of the 2-aminobenzothiazole compound (I) as the component (c) in the etching composition liquid of the present invention is usually from the viewpoint that a sufficient effect of suppressing side etching can be obtained on the basis of the etching composition liquid. If the amount is too large, the etching rate becomes slow and impractical, so it is usually 0.2% by weight or less.

Examples of the ethylene glycol compound represented by the formula (II) of the component (d) include ethylene glycol (n = 1), diethylene glycol (n = 2), triethylene glycol (n = 3) and the like, and a molecular weight of 6000 (n = 130) The following may be mentioned, and these may be used alone or in combination of two or more. When n exceeds 130 and the molecular weight exceeds 6000, it becomes difficult to dissolve in the etching composition solution. The content of the ethylene glycol compound (II) as the component (d) in the etching composition liquid is usually 0.02% by mass or more, preferably 0.1% in terms of the effect of suppressing side etching with respect to the etching composition liquid. The content is not less than 3% by mass, since an effect commensurate with the content cannot be obtained even if it is excessively contained, and it is economically disadvantageous.

Examples of the polyamine compound represented by the formula (III) of the component (e) include ethylenediamine, diethylenetriamine, triethylenetetramine, tetraethylenepentamine, pentaethylenehexamine, and salts thereof include, for example, hydrochloride, sulfate and A phosphate is mentioned. The content of the polyamine compound (III) as the component (e) in the etching composition liquid of the present invention is usually 0.01% by mass or more, preferably 0, in terms of the effect of suppressing side etching with respect to the etching composition liquid. 0.03% by mass or more, and even if it is contained excessively, an effect commensurate with the content cannot be obtained, and it is economically disadvantageous, so it is usually 2% by mass or less.

Examples of the glycol ether compound represented by the formula (IV-a) or (IV-b) of the component (f) include diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol n-butyl ether, diethylene glycol dimethyl ether, diethylene glycol dimethyl ether, diethylene glycol dimethyl ether. Examples thereof include n-butyl ether. The content of the glycol ether compound as the component (e) in the etching composition liquid is usually 0.3% by mass or more in terms of the effect of suppressing side etching on the basis of the etching composition liquid, and may be contained excessively. Since an effect commensurate with the content cannot be obtained and it is economically disadvantageous, it is usually 3% by mass or less.

The surface tension (γ) of the etching composition solution of the present invention is usually 30 mN / m or more, but the surface tension (γ) is preferably 66 mN / m or less from the viewpoint that side etching can be further suppressed. In the etching composition liquid that does not contain the glycol ether compound of component (f), the surface tension (γ) is relatively high and usually exceeds 66 mN / m. However, when the content of the glycol ether compound is increased, the surface tension (γ) is increased. Therefore, in order to make it 66 mN / m or less, for example, the content of the glycol ether compound of component (f) may be increased within a range not exceeding the above range.

In order to produce a copper printed wiring board (1) using the etching composition liquid of the present invention, as in a normal wet etching method, for example, as shown in FIG. An etching resist thin film (5) having a desired circuit pattern is formed on the copper thin film laminated substrate (1 ') in which the copper thin film (4) is laminated on the substrate (2) such as a substrate. Forming,
As shown in FIG. 1 (2), the exposed portion (41) of the copper thin film (4) not covered with the etching resist thin film (5) is etched by contacting with the etching composition solution of the present invention. By
As shown in FIG. 1 (3), a copper printed wiring (3) having a desired pattern may be formed.

Examples of the substrate (2) include an electrically insulating resin substrate and a glass substrate. The copper thin film (4) may be a thin film made of copper alone or an alloy containing copper as a main component.

The method of bringing the exposed portion (41) into contact with the etching composition liquid is not particularly limited. Alternatively, the etching composition liquid may be contacted by a spray etching method in which the exposed portion (41) of the copper thin film is contacted by spraying or the like. A spray etching method is preferable in that the side etching can be further suppressed, and the etching composition liquid is preferably sprayed from the vertical direction (L) to the exposed portion (41). The etching composition liquid after contacting the exposed portion (41) can be recovered and used again for the spray etching method.

The temperature of the etching composition liquid is usually in the range of 25 ° C. to 80 ° C., and is preferably 40 ° C. or higher in that etching proceeds at a sufficient rate, and the volatilization of hydrogen chloride as the component (b) is small. In that respect, it is preferably 50 ° C. or lower.

Since the etching composition solution of the present invention has an excellent side etching suppression effect, the exposed portion (41) of the copper thin film is selectively etched in the vertical direction (L) while suppressing the etching in the parallel direction (H). . Therefore, the copper printed wiring (3) having a fine circuit pattern can be easily formed by etching with the etching composition liquid of the present invention. Further, since the etching rate is high, the etching can be performed in a relatively short time.

As the etching progresses, the oxidation-reduction potential of the etching composition gradually decreases, and the etching rate may decrease. In such a case, hydrogen peroxide [H ₂ O ₂ ] is added to the etching composition. The oxidation-reduction potential may be maintained at +400 mV or higher (silver-silver chloride reference electrode standard). The amount of hydrogen peroxide added is not particularly limited, but since an effect commensurate with the amount added cannot be obtained and it is economically disadvantageous, the oxidation-reduction potential is usually +660 mV or less (see silver-silver chloride). An amount that falls within the range of (electrode reference) is added. The oxidation-reduction potential can be measured by a usual method, for example, using a platinum electrode as an indicator electrode.

EXAMPLES Hereinafter, although an Example demonstrates this invention in detail, this invention is not limited by this Example.

Example 1
[Preparation of etching composition]
(A) cupric chloride [CuCl ₂ ], (b) concentrated hydrochloric acid [35% aqueous hydrogen chloride solution], (c1) 2-aminobenzothiazole, (d1) diethylene glycol, (e1) diethylenetriamine hydrochloride and (f1 ) Diethylene glycol n-butyl ether was added to obtain an etching composition liquid having the composition shown in Table 1. The surface tension (γ) of this etching composition was 60.3 mN / m when measured at a temperature of 25 ° C. using an automatic surface tensiometer [manufactured by Kyowa Interface Science Co., Ltd., “CBVP-Z type”.

〔etching〕
As shown in FIG. 1 (1), a copper thin film (4) having a thickness (t) of 35 μm is laminated on one side of a glass epoxy substrate (width 200 mm, length 200 mm) (2) over the entire surface. A thin film laminated substrate (1 ') is prepared, and a large number of lines with a width (W ₄ ) of 50 μm are arranged in parallel with a distance of 50 μm on the copper thin film (4) by a dry film resist of 35 μm thickness. A line and space pattern was formed, and the etching composition obtained above was sprayed onto the substrate (2) at a temperature of 45 ° C. and a spray pressure of 0.15 MPa (1.5 kgf / cm ² , gauge pressure). Etching was performed by spraying from the vertical direction (L). Etching, as shown in FIG. 2, the width of the resist and W ₅ (= 50 [mu] m), a width copper thin film (4) is in contact with the substrate (2) is taken as W _3d, W _3d is W ₅ I went to match. The width W _3d was determined by observing the cross section with a confocal laser microscope [manufactured by Keyence Co., Ltd., “VK-8500”] after washing and drying the copper thin film multilayer substrate (1 ′) being etched. .

After the etching is finished, the width (W ₃ ) where the copper printed wiring (3) formed from the copper thin film is in contact with the resist (5) is obtained in the same manner, and the formula (1)
EF = t (μm) × 2 / (W _3d −W ₃ ) (1)
Thus, the etching factor (EF) was determined to be 3.5. It shows that side etching is suppressed, so that this etching factor (EF) is large.
Further, from the time (T) required for W _3d to coincide with W ₅ and the thickness of the copper thin film (4) (t = 35 μm), the formula (2)
ER = t (μm) / T (min) (2)
The etching rate (ER) was determined by 18.2 μm / min.

Example 2 to Example 8
(c1) Instead of 2-aminobenzothiazole, (c2) 2-amino-6-methoxybenzothiazole or (c3) 2-amino-6-nitrobenzothiazole,
(d1) Instead of diethylene glycol, (d2) triethylene glycol or (d3) polyethylene glycol (average molecular weight 4000)
(e1) Instead of diethylenetriamine hydrochloride, (e2) triethylenetetramine hydrochloride, (e3) tetraethylenepentamine sulfate or (e4) pentaethylenehexamine phosphate,
(f1) Example 1 except that (f2) diethylene glycol n-butyl ether or (f3) diethylene glycol diethyl ether was used instead of diethylene glycol n-butyl ether so as to have the contents shown in Table 1, respectively. The same operation was performed to obtain an etching composition solution, and etching was performed. The results are shown in Table 1.

Comparative Example 1
(f2) An etching composition solution was obtained and etched in the same manner as in Example 4 except that diethylene glycol di-n-butyl ether was not used. The results are shown in Table 1.

Comparative Example 2
[Preparation of etching composition]
Add (a) cupric chloride [CuCl ₂ ], (b) concentrated hydrochloric acid [35% aqueous hydrogen chloride solution] and paratoluenesulfonic acid to water to a content of 1.0% by mass. An etching composition liquid having the composition shown was obtained. The surface tension (γ) of this etching composition was 67.0 mN / m when measured at a temperature of 25 ° C. using an automatic surface tensiometer (manufactured by Kyowa Interface Science Co., Ltd., “CBVP-Z type”).

〔etching〕
Etching was performed in the same manner as in Example 1 except that the etching composition liquid obtained above was used instead of the etching composition liquid obtained in Example 1, and the etching factor (EF) was 2.4. The rate (ER) was 16.4 μm / min.

Comparative Example 3
Further, an etching composition solution was obtained and etched in the same manner as in Comparative Example 2 except that (f2) diethylene glycol n-butyl ether was added so as to have a content of 2.0% by mass. The results are shown in Table 1.

Table 1
━━━━━━━━━━━━━━━━━━━━━━━━━━━━━━━━━━━━━━━
CuCl ₂ HCl Component (c) Component (d) Component (e) Component (f) γ EF ER
(g / L) (g / L) (%) (%) (%) (%) (mN / m) (μm / min)
━━━━━━━━━━━━━━━━━━━━━━━━━━━━━━━━━━━━━━━
Example 1 140 50 c1: 0.1 d1: 1.0 e1: 1.0 f1: 0.5 60.3 3.5 18.2
Example 2 140 50 c2: 0.1 d1: 1.0 e2: 0.5 f2: 0.5 62.4 3.1 17.7
Example 3 140 90 c3: 0.05 d1: 1.0 e3: 0.1 f3: 1.5 60.3 3.5 18.1
Example 4 140 90 c1: 0.1 d1: 1.0 e4: 0.05 f2: 2.0 60.5 3.4 18.0
Example 5 260 50 c2: 0.1 d1: 0.5 e2: 1.0 f3: 0.5 62.1 3.1 17.8
Example 6 260 50 c3: 0.05 d2: 0.5 e3: 0.1 f1: 1.5 61.4 3.3 18.0
Example 7 260 90 c1: 0.1 d3: 0.5 e1: 1.0 f2: 2.0 60.5 3.4 18.1
Example 8 260 90 c1: 0.1 d2: 2.0 e4: 0.05 f3: 2.0 61.9 3.2 17.8
───────────────────────────────────────
Comparative Example 1 140 90 c1: 0.1 d1: 1.0 e4: 0.05 −66.7 2.5 17.2
Comparative Example 2 140 90 (paratoluenesulfonic acid: 1.0) −67.0 2.4 16.4
Comparative Example 3 140 90 (paratoluenesulfonic acid: 1.0) f2: 2.0 60.4 2.1 16.6
━━━━━━━━━━━━━━━━━━━━━━━━━━━━━━━━━━━━━━━
% Indicates a mass percentage based on the etching composition solution.
c1: 2-aminobenzothiazole
c2: 2-amino-6-methoxybenzothiazole
c3: 2-amino-6-nitrobenzothiazole
d1: Diethylene glycol
d2: Triethylene glycol
d3: Polyethylene glycol (average molecular weight 4000)
e1: Diethylenetriamine hydrochloride
e2: Triethylenetetramine hydrochloride
e3: Tetraethylenepentamine sulfate
e4: Pentaethylenehexamine phosphate
f1: Diethylene glycol n-butyl ether
f2: Diethylene glycol n-butyl ether
f3: Diethylene glycol diethyl ether

It is a schematic diagram for demonstrating the method to manufacture a copper printed wiring board. It is a schematic diagram which shows the cross-sectional shape of copper printed wiring.

Explanation of symbols

1: Copper printed wiring board 1 ': Copper thin film laminated substrate 2: Substrate 3: Copper printed wiring W _3d : Width at which the copper thin film is in contact with the substrate
W ₃ : Width where copper printed wiring is in contact with resist 4: Copper thin film 41: Exposed portion L: Vertical direction H: Parallel direction 5: Etching resist thin film W ₅ : Width

Claims (5)

An etching composition liquid comprising the following components (a) to (f):
Component (a): Cupric chloride or ferric chloride component (b): Hydrogen chloride component (c): Formula (I)

[Wherein, X represents a hydrogen atom, a nitro group, a methoxy group or a chlorine atom. ]
2-aminobenzothiazole compound component (d) represented by formula (II)
HO (CH ₂ CH ₂ O) _n H (II)
[In formula, n shows the number of 1-130. ]
Ethylene glycol compound component (e) represented by formula (III)
H ₂ N (CH ₂ CH ₂ NH) _m H (III)
[In formula, m shows the number of 1-5. ]
Or a salt component thereof (f): Formula (IV-a)
R ^a (OCH ₂ CH ₂ ) ₂ OH (IV-a)
[Wherein, R ^a represents an alkyl group having 1 to 3 carbon atoms]
Or formula (IV-b)
(R ^b OCH ₂ CH ₂ ) ₂ O (IV-b)
[Wherein R ^b represents an alkyl group having 1 to 3 carbon atoms]
Glycol ether compound represented by The content of component (a) is 100 g / L to 300 g / L, the content of component (b) is 40 g / L to 100 g / L, and the content of component (c) is 0.05% by mass to 0.2 mass% or less, the content of component (d) is 0.02 mass% to 2 mass%, the content of component (e) is 0.01 mass% to 1 mass%, The etching composition liquid according to claim 1, which is 0.5 mass% to 2 mass% of (f). The etching composition liquid according to claim 1 or 2, wherein the surface tension (γ) is 66 mN / m or less. An etching resist thin film (5) having a desired circuit pattern is formed on the copper thin film (4) of the copper thin film laminated substrate (1 ′) in which the copper thin film (4) is laminated on the substrate (2),
Etching by contacting an exposed portion (41) of the copper thin film (4) not covered with the etching resist thin film (5) with the etching composition liquid according to any one of claims 1 to 3. A method for producing a copper printed wiring board (1), characterized by: The manufacturing method according to claim 4, wherein an etching composition liquid is sprayed and contacted with the exposed portion (41) from a vertical direction (L).

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