JP2006107252A5 - - Google Patents

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Publication number
JP2006107252A5
JP2006107252A5 JP2004295003A JP2004295003A JP2006107252A5 JP 2006107252 A5 JP2006107252 A5 JP 2006107252A5 JP 2004295003 A JP2004295003 A JP 2004295003A JP 2004295003 A JP2004295003 A JP 2004295003A JP 2006107252 A5 JP2006107252 A5 JP 2006107252A5
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Japan
Prior art keywords
filter
filters
pointer
stage
filter device
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Pending
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JP2004295003A
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Japanese (ja)
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JP2006107252A (en
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Priority to JP2004295003A priority Critical patent/JP2006107252A/en
Priority claimed from JP2004295003A external-priority patent/JP2006107252A/en
Publication of JP2006107252A publication Critical patent/JP2006107252A/en
Publication of JP2006107252A5 publication Critical patent/JP2006107252A5/ja
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Claims (9)

ソフトウエアで実現された複数のフィルタを有するフィルタ装置であって、
少なくとも一つのフィルタに関し、該フィルタへの入力値が記憶される領域を指すポインタを格納するメモリ手段と、該ポインタを書き換える手段とを備え、前記ポインタが指す領域に記憶された値を該入力値とすることを特徴とするフィルタ装置。 A filter device having a plurality of filters is implemented by Seo Futouea,
At least with respect to one of the filters, and memory means for storing a pointer to an area where input values to the filter is stored, and means for rewriting the pointer, the input a value stored in the area where the pointer points A filter device characterized by a value . 他のフィルタの出力値格納領域または当該フィルタ装置の入力バッファ領域を指すように各フィルタのポインタを前記書き換える手段が書き換えることによって、複数のフィルタを直列に接続することを特徴とする請求項１に記載のフィルタ装置。 2. The plurality of filters are connected in series by rewriting the pointer of each filter so as to point to an output value storage area of another filter or an input buffer area of the filter device. The filter device as described. ソフトウエアで実現された複数のフィルタを有するフィルタ装置であって、
少なくとも一つのフィルタに関し、該フィルタからの出力値が記憶される領域を指すポインタを格納するメモリ手段と、該ポインタを書き換える手段とを備え、前記ポインタが指す領域に該出力値を記憶させることを特徴とするフィルタ装置。 A filter device having a plurality of filters is implemented by Seo Futouea,
At least with respect to one of the filters, and memory means for storing a pointer to a region where the output value from the filter is stored, and means for rewriting the pointer, and stores the output value in the area where the pointer points And a filter device. 他のフィルタの入力値格納領域または当該フィルタ装置の出力バッファ領域を指すように各フィルタのポインタを前記書き換える手段が書き換えることによって前記複数のフィルタを直列に接続することを特徴とする請求項３に記載のフィルタ装置。 4. The plurality of filters are connected in series by rewriting the pointer of each filter so as to point to an input value storage area of another filter or an output buffer area of the filter device. The filter device as described. 前記複数のフィルタのそれぞれはノッチフィルタであることを特徴とする請求項１〜４のいずれかに記載のフィルタ装置。 The filter device according to claim 1, wherein each of the plurality of filters is a notch filter . 予め定められた数を前記複数のフィルタの数が越えた場合に警告を出すことを特徴とする請求項２または４に記載のフィルタ装置。 Filter apparatus according to claim 2 or 4, characterized in that a warning if the number defined Me pre number of the plurality of filters exceeds. ステージと、該ステージの位置と目標位置との差を求める減算器と該減算器の出力が入力される補償器とを有して該移動ステージの位置を制御する制御系とを有するステージ装置であって、前記制御系は、前記補償器の出力が入力されるフィルタ装置として請求項１〜６のいずれかに記載のフィルタ装置を備えることを特徴とするステージ装置。 Stage device having stages and, a control system and a compensator output of the subtractor and the subtractor for obtaining a difference between the position and the target position of the stage is input to control the position of the moving stage And the said control system is provided with the filter apparatus in any one of Claims 1-6 as a filter apparatus into which the output of the said compensator is input, The stage apparatus characterized by the above-mentioned. 原版のパターンを介して基板を露光する露光装置であって、
前記原版を搭載するステージおよび前記基板を搭載するステージの少なくとも一方として請求項７に記載のステージ装置を備えることを特徴とする露光装置。 An exposure apparatus that exposes a board through a pattern of an original plate,
Exposure apparatus comprising: a stage apparatus according to claim 7 as at least one of the stage carrying the stage and the substrate for mounting the original. 請求項８に記載の露光装置を用いて基板を露光する工程と、前記工程において露光された基板を現像する工程とを有することを特徴とするデバイス製造方法。 9. A device manufacturing method comprising: exposing a substrate using the exposure apparatus according to claim 8; and developing the substrate exposed in the step.
JP2004295003A 2004-10-07 2004-10-07 Filtering device and method for suppressing resonance by use of filter device Pending JP2006107252A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004295003A JP2006107252A (en) 2004-10-07 2004-10-07 Filtering device and method for suppressing resonance by use of filter device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004295003A JP2006107252A (en) 2004-10-07 2004-10-07 Filtering device and method for suppressing resonance by use of filter device

Publications (2)

Publication Number Publication Date
JP2006107252A JP2006107252A (en) 2006-04-20
JP2006107252A5 true JP2006107252A5 (en) 2007-11-29

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004295003A Pending JP2006107252A (en) 2004-10-07 2004-10-07 Filtering device and method for suppressing resonance by use of filter device

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL2007606A (en) * 2010-11-22 2012-05-23 Asml Netherlands Bv Controller, lithographic apparatus, method of controlling the position of an object and device manufacturing method.
JP7431597B2 (en) 2020-02-05 2024-02-15 キヤノン株式会社 Vibration control device, exposure device, and article manufacturing method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04232506A (en) * 1990-12-28 1992-08-20 Nitto Seiko Co Ltd Robot controller
JP3115237B2 (en) * 1996-09-03 2000-12-04 株式会社東芝 Control program creation device and control program creation method
JP2000137960A (en) * 1998-10-29 2000-05-16 Internatl Business Mach Corp <Ibm> Digital filter, servo controller and disk drive device

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