JP2006106602A - Method for manufacturing liquid crystal display device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid crystal display device by which a portion where a columnar spacer is to be disposed can be flattened and a uniform cell gap can be obtained to improve display quality. <P>SOLUTION: The method for manufacturing a liquid crystal display device having a liquid crystal layer 410 held between an array substrate 200 and a counter substrate 400 is characterized in that the method for producing the array substrate 200 includes steps of: disposing an insulating film 210 on the substrate surface; disposing pixel electrode 213 corresponding to display pixels PX (R, G, B) in a matrix on the insulating film 218; and polishing the insulating film 218 exposed from the pixel electrodes 213 by using the pixel electrodes 213 as a mask. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a method of manufacturing a liquid crystal display device, and in particular, a color filter on array in which a color filter layer is provided on a substrate surface on which switching elements for driving pixel electrodes are formed for the purpose of colorizing the liquid crystal display device. The present invention relates to a method for manufacturing a liquid crystal display device having a (COA) structure.

  A flat display device typified by a liquid crystal display device is used in various fields such as an OA device, an information terminal, a clock, and a television by making use of features such as light weight, thinness, and low power consumption. Among them, a liquid crystal display device using a thin film transistor (TFT) is widely used as a monitor for displaying a large amount of information such as a portable terminal and a computer because of its high responsiveness.

  An active matrix liquid crystal display device includes display pixels arranged in a matrix, and includes a liquid crystal layer sandwiched between a pair of substrates having electrodes. That is, the array substrate is connected to the scanning line and the signal line arranged so as to be orthogonal to each other, the thin film transistor (TFT) disposed near the intersection of the scanning line and the signal line, and the TFT for each display pixel. And a pixel electrode. The counter substrate includes a counter electrode common to a plurality of display pixels.

  In addition, the liquid crystal display device for color display includes a color filter layer colored in red (R), green (G), and blue (B) arranged for each pixel on any one of the substrates. In particular, a color filter on array (COA) structure in which a color filter layer is arranged in each display pixel on the array substrate side has an advantage that a high aperture ratio can be obtained.

The pair of substrates having such a structure are bonded together in a state where a predetermined cell gap is formed, and a liquid crystal layer is held in the cell gap between such substrates. The cell gap is formed by, for example, a columnar spacer disposed on the main surface of the array substrate. In order to reduce the manufacturing cost, such a columnar spacer is formed by a photolithography process together with a color filter layer disposed in each display pixel, a black light shielding layer disposed around the effective display portion, and the like. It has been proposed (see, for example, Patent Document 1).
JP 2002-131759 A

  However, in the array substrate adopting such a COA structure, the color filter layers of different colors overlap each other at the peripheral portion of each display pixel, and a step portion is formed in these portions. The shape of the stepped portion and the size of the step are varied in the array substrate surface.

  The causes of this variation are (1) film thickness accuracy of each color filter layer (due to film thickness variation by coating device), (2) patterning accuracy of each color filter layer (due to alignment accuracy by exposure device), (3) color This is due to the non-uniformity of the edge shape of the filter layer.

  When columnar spacers are formed on the color filter layer having such stepped portions having variations, a difference occurs in the finished height of the columnar spacers. As a result, when the array substrate and the counter substrate are bonded together, a uniform cell gap cannot be formed, and the display quality may be deteriorated.

  Further, even if a uniform cell gap can be formed between the array substrate and the counter substrate, a necessary cell gap can be ensured in a stepped portion where the columnar spacer is not formed at a large stepped portion. Can not. For this reason, alignment abnormalities of the liquid crystal molecules may occur, and there is a possibility of causing a decrease in contrast due to light leakage.

  In recent years, in particular, there has been an increasing demand for a narrow frame around the effective display area and an increase in the aperture ratio of one display pixel, making it difficult to design a marginal pixel. For this reason, the columnar spacers must be arranged in the overlapping portions of the color filter layers of different colors, and the effect of the step in such portions is inevitable.

  Accordingly, the present invention has been made to solve the above-described problems, and its purpose is to flatten the portion where the columnar spacer is arranged, and to realize a uniform cell gap to improve display quality. Another object of the present invention is to provide a method for manufacturing a liquid crystal display device.

A method of manufacturing a liquid crystal display device according to an aspect of the present invention includes
A method of manufacturing a liquid crystal display device in which a liquid crystal layer is held between a first substrate and a second substrate,
The manufacturing method of the first substrate is as follows:
Arranging an insulating film on the substrate surface;
Disposing a pixel electrode corresponding to a matrix-shaped display pixel on the insulating film;
Polishing the insulating film exposed from the pixel electrode using the pixel electrode as a mask;
It is characterized by including.

  According to the present invention, it is possible to provide a method for manufacturing a liquid crystal display device that can flatten a portion where a columnar spacer is disposed and can realize a uniform cell gap to improve display quality.

  A method for manufacturing a liquid crystal display device according to an embodiment of the present invention will be described below with reference to the drawings.

  As shown in FIGS. 1 and 2, the liquid crystal display device 1 includes a liquid crystal display panel 100. That is, the liquid crystal display panel 100 includes an array substrate (first substrate) 200, a counter substrate (second substrate) 400, and a liquid crystal layer 410 held between the array substrate 200 and the counter substrate 400. Yes. The liquid crystal display panel 100 includes an effective display unit 102 that displays an image. The effective display unit 102 includes a plurality of display pixels PX arranged in a matrix.

  In the liquid crystal display panel 100, the array substrate 200 is formed using a light-transmissive insulating substrate 201 such as glass. The array substrate 200 includes a plurality of signal lines X and a plurality of scanning lines Y arranged in a matrix on one main surface (front surface) of the insulating substrate 201 in the effective display unit 102 and each display pixel PX. A switch element 211 disposed near the intersection of the signal line X and the scanning line Y, and a pixel electrode 213 connected to the switch element 211 of each display pixel PX are provided.

  The switch element 211 is constituted by a thin film transistor provided with a polycrystalline silicon film 212. The polycrystalline silicon film 212 includes a channel region 212c, and a source region 212s and a drain region 212d that are disposed with the channel region 212c interposed therebetween. The gate electrode 215 of the switch element 211 is disposed on the channel region 212c via the gate insulating film 214 and connected to the scanning line Y (here, the gate electrode 215 is formed integrally with the scanning line Y). ) The source electrode 216s of the switch element 211 is connected to the source region 212s and to the pixel electrode 213. The drain electrode 216d of the switch element 211 is connected to the drain region 212d and to the signal line X (here, the drain electrode 216d is formed integrally with the signal line X).

  The pixel electrode 213 is formed of, for example, an ITO (indium tin oxide) or IZO (indium zinc oxide) conductive member having optical transparency. The pixel electrode 213 is disposed on the insulating film 218. The insulating film 218 is disposed so as to cover the switch element 211 and the interlayer insulating film 217. The insulating film 218 has a contact hole CH for electrically connecting the pixel electrode 213 and the source electrode 216 s of the switch element 211.

  The alignment film 219 is disposed on the entire surface of the effective display portion 102 so as to cover all the pixel electrodes 213. The light shielding layer 250 is arranged in a frame shape outside the effective display portion 102 in the array substrate 200. The light shielding layer 250 is made of a light shielding resin, for example, a black resin. The columnar spacer 104 is disposed at least on the effective display portion 102 in the array substrate 200, for example. The columnar spacer 104 is made of, for example, a black resin similar to the light shielding layer 250. The columnar spacer 104 and the light shielding layer 250 may be formed of the same material in the same process. Thereby, the number of manufacturing steps can be reduced as compared with the case where the columnar spacer 104 and the light shielding layer 250 are separately formed.

  The counter substrate 400 is formed using a light-transmitting insulating substrate 401 such as glass. The counter substrate 400 includes a counter electrode 403 common to all the display pixels PX on one main surface (front surface) of the insulating substrate 401 in the effective display unit 102. The counter electrode 403 is disposed so as to face all the pixel electrodes 213 and is formed of a light-transmitting conductive member such as ITO or IZO. The alignment film 405 is disposed on the entire surface of the effective display unit 102 so as to cover the entire counter electrode 403.

  The array substrate 200 and the counter substrate 400 having the above-described configuration are bonded to each other with the sealant 106 in a state where a predetermined cell gap is formed by the columnar spacer 104. The liquid crystal layer 410 is formed of a liquid crystal composition sealed in a gap between these substrates. That is, the liquid crystal layer 410 is held between the alignment film 219 on the array substrate 200 side and the alignment film 405 on the counter substrate 400 side. Thereby, the alignment of the liquid crystal molecules contained in the liquid crystal layer 410 is controlled by the alignment films 219 and 405.

  In the liquid crystal display panel 100, an integrally configured drive circuit unit 110 is disposed in the peripheral region of the effective display unit 102. The driving circuit unit 110 includes a scanning line driving circuit unit 251 disposed on one end side of the scanning line Y and a signal line driving circuit unit 261 disposed on one end side of the signal line X. The scanning line driving circuit unit 251 supplies a driving signal (scanning signal) to each scanning line Y. Further, the signal line drive circuit unit 261 supplies a drive signal (video signal) to each signal line X. The scanning line driving circuit unit 251 and the signal line driving circuit unit 261 are configured by thin film transistors including a polycrystalline silicon film, similarly to the switch element 211 in the effective display unit 102.

  Further, in the liquid crystal display panel 100, a pair of polarizing plates 220 and 407 whose polarization directions are set in accordance with the characteristics of the liquid crystal layer 410 are provided on the outer surface of the array substrate 200 and the outer surface of the counter substrate 400, respectively. In other words, the polarizing plate 220 is attached to the other main surface (back surface) of the insulating substrate 201 constituting the array substrate 200 with the adhesive 221. Further, the polarizing plate 407 is attached to the other main surface (back surface) of the insulating substrate 401 constituting the counter substrate 400 with an adhesive 406.

  By the way, in the liquid crystal display device for color display, as shown in FIG. 3, the insulating film 218 is composed of the color filter layer CF (R, G, B). Note that FIG. 3 does not illustrate components that are not necessary for the description. In the example shown in FIG. 3, the color filter layer CF (R, G, B) is formed of, for example, negative type color resists colored red, green, and blue, respectively, and red, green, and blue, respectively. The light of each color component is transmitted.

  Each color filter layer CF (R, G, B) is assigned to each display pixel PX of the corresponding color. That is, the red color filter layer CFR, the green color filter layer CFG, and the blue color filter layer CFB are disposed in the red display pixel PXR, the green display pixel PXG, and the blue display pixel PXB, respectively.

  Thus, when the color filter layer CF (R, G, B) of the color corresponding to each display pixel PX (R, G, B) is arranged, the peripheral edge of each display pixel PX (R, G, B), that is, adjacent to each other. The peripheral portions of the color filter layers of different colors are overlapped with each other for the purpose of suppressing light leakage between display pixels. For example, as shown in FIG. 3, each display pixel PX (R, G, B) is defined by a light-shielding wiring part (for example, signal line X, scanning line Y, switch element 211, etc.) W. An opening AP is provided on the inner side surrounded by W. When the color filter layer CF (R, G, B) is arranged in each display pixel PX (R, G, B), it differs on the peripheral edge of each display pixel PX (R, G, B), that is, on the wiring portion W. The color filter layers CF (R, G, B) of colors overlap each other.

  Here, when the green color filter layer CFG, the blue color filter layer CFB, and the red color filter layer CFR are formed in this order as in the example shown in FIG. The peripheral edge of the formed green color filter layer CFG is overlapped, and the peripheral edge of the red color filter layer CFR overlaps the peripheral edge of the green color filter layer CFG and the blue color filter layer CFB formed earlier.

  As described above, the peripheral portion of the display pixel PX (R, G, B) where the color filter layers CF (R, G, B) overlap each other has a thicker film thickness than the inner pixel effective portion surrounded by the peripheral portion. That is, the stepped portion BP exists on the surface (surface on the side where the cell gap is formed) of the color filter layer CF (R, G, B) located on the wiring portion W. The size of the stepped portion BP includes not only the thickness of the wiring portion W but also the thickness of the adjacent color filter layers superimposed.

  For this reason, the cell gap becomes non-uniform in the vicinity of the stepped portion BP, and the orientation of the liquid crystal molecules may be disturbed. Further, in order not to sacrifice the aperture ratio of the display pixel, the columnar spacer 104 is disposed on the color filter layer CF (R, G, B) so as to be located on the wiring portion W, that is, on the step portion BP. There is. In this case, a desired cell gap may not be obtained due to the influence of the step portion BP. In other words, the stepped portion BP becomes a factor that deteriorates display performance such as contrast.

Therefore, in this embodiment, the step portion BP on the surface of the color filter layer CF (R, G, B) is polished to be flattened. That is, as shown in FIG. 4, the color filter layer CF (R, G, B) exposed from the pixel electrode 213 on the wiring portion W is flattened by performing a dry etching process such as O ₂ ashing. It has become. That is, the step portion BP that is formed first is removed.

  Accordingly, since there is no step on the surface of the color filter layer CF (R, G, B), it is possible to prevent the occurrence of nonuniform cell gaps and poor alignment of liquid crystal molecules due to the presence of the step. It becomes.

  The columnar spacers 104 can be disposed on the surface of the flattened color filter layer CF (R, G, B) on the wiring portion W. Therefore, columnar spacers with little height variation can be formed while maintaining a high aperture ratio, and a uniform desired cell gap can be formed. Thereby, display quality can be improved.

Next, a method for manufacturing a liquid crystal display device will be described. In FIGS. 5A to 5E, only the configuration necessary for the description is shown.
First, as shown in FIG. 5A, the metal film and the insulating film are repeatedly formed and etched on the insulating substrate 201 to correspond to each display pixel PX in addition to the scanning line Y and the signal line X. A wiring portion W such as the switch element 211 is formed.

  Subsequently, as shown in FIG. 5B, an insulating film 218 is disposed on the substrate surface. That is, the color filter layer CF (R, G, B) colored as a color corresponding to each display pixel PX (R, G, B) as an insulating film 218 on the surface of the insulating substrate 201 provided with various wiring portions W. ). The color filter layer CF (R, G, B) is formed as follows, for example.

First, an ultraviolet curable acrylic resin resist CG-2000 (manufactured by Fuji Film Olin Co., Ltd.) in which a green organic pigment is dispersed is applied to the insulating substrate 201 so as to cover the wiring portion W such as the switch element 211 by a spinner or the like. Apply to the entire surface. Thereafter, ultraviolet light having a wavelength of 365 nm is exposed at an exposure amount of 100 mJ / cm ² through a photomask having a pattern corresponding to the contact hole CH penetrating to the green display pixel PXG and the switch element 211. The exposed resist is developed with a 1% aqueous solution of KOH for 20 seconds and then dried. Thereby, the green color filter layer CFG having the contact hole CH is formed.

  Similarly, after the blue color filter layer CFB having the contact hole CH is formed by using the UV curable acrylic resin resist CB-2000 (manufactured by Fuji Film Olin Co., Ltd.) in which the blue organic pigment is dispersed. The red color filter layer CFR having the contact hole CH is formed using an ultraviolet curable acrylic resin resist CR-2000 (Fuji Film Olin Co., Ltd.) in which a red organic pigment is dispersed. In this embodiment, the film thickness of the color filter layer CF (R, G, B) was 3.0 ± 0.3 μm.

  By forming the color filter layer CF (R, G, B) in this way, adjacent color filter layers overlap each other on the peripheral edge of each display pixel PX (R, G, B), that is, on the wiring portion W. A step portion BP is formed.

  Here, the color filter layer CF (R, G, B) is formed by sequentially forming the green color filter layer CFG, the blue color filter layer CFB, and the red color filter layer CFR. Various changes can be made according to the characteristics of the color filter layer CF (R, G, B).

  As an exposure apparatus for exposing a resin resist, a proximity exposure apparatus is preferable from the viewpoint of productivity, but in this embodiment, alignment accuracy is reduced in order to reduce overlap between color filter layers. A high mirror projection exposure apparatus was used. In this embodiment, the size (step) of the step portion BP generated by overlapping the color filter layers CF (R, G, B) on the wiring portion W is 1 μm at the maximum.

  Subsequently, as shown in FIG. 5C, pixel electrodes 213 corresponding to the display pixels PX in a matrix are arranged on the color filter layer CF (R, G, B). In other words, a pixel electrode metal film, for example, an ITO film is formed on the surface of the color filter layer CF (R, G, B) to a thickness of 1500 angstrom by sputtering or the like. At this time, the contact hole CH is also filled with an ITO film. Thereafter, the ITO film is patterned into a desired shape corresponding to the display pixel PX, whereby the pixel electrode 213 electrically connected to the switch element 211 is formed. At this time, the metal film between the adjacent display pixels PX is removed. That is, the pixel electrode 213 is formed by patterning the ITO film, but the color filter layer CF (R, G, B) is not covered with the pixel electrode 213 at the peripheral edge of the display pixel. That is, the step portion BP of the color filter layer CF (R, G, B) along the peripheral edge of the display pixel PX is exposed from the pixel electrode 213.

Subsequently, as illustrated in FIG. 5D, the insulating film CF (R, G, B) exposed from the pixel electrode 213 is polished using the pixel electrode 213 as a mask. That is, the substrate surface provided with the pixel electrode 213 is dry-etched. Here, the O ₂ ashing process is performed to polish the color filter layer CF (R, G, B) exposed between the adjacent pixel electrodes 213. That is, in the O ₂ ashing process, the color filter layer CF (R, G, B) made of an organic insulating film is polished, but the pixel electrode 213 made of a metal film such as ITO is not polished. Therefore, the pixel electrode 213 functions as a mask, and the color filter layer CF (R, G, B) that is not covered by the pixel electrode 213 is polished. Thereby, the stepped portion BP is removed on the wiring portion W, and the peripheral portion of the display pixel exposed from the pixel electrode 213 can be flattened. In this embodiment, the step BP is removed to a size of about 0.2 μm.

Subsequently, as shown in FIG. 5E, columnar spacers 104 for forming a predetermined cell gap with the counter substrate 400 are formed on the polished insulating film CF (R, G, B). That is, the columnar spacer 104 having a predetermined height is formed simultaneously with the light-shielding layer 250 having a predetermined thickness by patterning after applying the black resin resist. In this embodiment, the height from the bottom part (contact part with the color filter layer) of the columnar spacer 104 to the tip part was 5.2 μm. At this time, the height variation of the columnar spacer 104 was ± 0.2 μm in the plane. Needless to say, the height of the columnar spacer 104 is not limited to this example, and can be arbitrarily changed according to specifications.
Subsequently, after the alignment film material is formed, the alignment film 219 is formed by performing a rubbing process in a predetermined direction as necessary. The array substrate 200 is manufactured through such a manufacturing process.

  On the other hand, in the effective display portion 102 on the insulating substrate 401, the counter electrode 403 is formed by forming an ITO film with a thickness of 1500 angstroms by sputtering or the like. And after forming alignment film material, the alignment film 405 is formed by performing a rubbing process in a predetermined direction as needed.

  Subsequently, a sealing material 106 made of an ultraviolet curable resin is applied and formed in a frame shape so as to surround the effective display portion 102. Then, a predetermined amount of liquid crystal material is dropped inside the area surrounded by the sealing material 106. Thereafter, in the vacuum chamber, the sealing material 106 is cured by irradiating the array substrate 200 and the counter substrate 400 with a predetermined pressure in a direction approaching each other to cure the seal material 106, and the array substrate 200 and the counter substrate 400 are attached. Match. As a result, a liquid crystal layer 410 containing liquid crystal molecules whose alignment is controlled by the alignment films 219 and 405 is formed.

  Subsequently, the polarizing plate 220 is bonded to the outer surface of the array substrate 200, that is, the outer surface of the insulating substrate 201 via the adhesive 221, and the polarizing plate 407 is bonded to the outer surface of the counter substrate 400, that is, the outer surface of the insulating substrate 401 via the adhesive 406. Glue.

  When the cell gap was measured for the liquid crystal display panel 100 manufactured by the above manufacturing process, the gap variation was ± 0.2 μm, and a substantially uniform cell gap could be formed in the effective display portion 102. When an image was displayed using the liquid crystal display panel 100, a uniform display quality without display unevenness could be realized. Moreover, no light leakage due to the alignment abnormality of the liquid crystal molecules was observed, and a high contrast could be realized.

As described above in detail, in the liquid crystal display device adopting the COA structure according to this embodiment, the color filter layer disposed so as to cover the switch elements is later disposed on the color filter layer in the array substrate. Polishing is performed by O ₂ ashing or the like using the pixel electrode as a mask. This makes it possible to remove the stepped portion on the surface of the color filter layer that is not covered by the pixel electrode formed earlier.

That is, the step portion formed in the portion where the color filter layers overlap is located on the wiring portion W that is the peripheral portion of the display pixel. On the other hand, the pixel electrode is independently arranged on the inner side of the peripheral edge of the display pixel. That is, the color filter layer that forms the step portion is exposed from the pixel electrode. Therefore, by performing the O ₂ ashing process, the pixel electrode made of the metal film is not etched, but the stepped part made of the insulating film is etched, so that the periphery of the display pixel can be flattened. Since the columnar spacer can be formed in the flattened portion in this manner, the variation in the height of the columnar spacer is reduced, and a uniform cell gap can be formed.
Therefore, it is possible to solve the problem due to the presence of the stepped portion, and it is possible to provide a liquid crystal display device with good display quality.

  Note that the present invention is not limited to the above-described embodiment as it is, and can be embodied by modifying the components without departing from the gist of the invention in the stage of implementation. In addition, various inventions can be formed by appropriately combining a plurality of components disclosed in the embodiment. For example, some components may be deleted from all the components shown in the embodiment. Furthermore, you may combine suitably the component covering different embodiment.

  In the embodiment described above, the liquid crystal display panel may be a transmissive type having a backlight unit on the array substrate side, or a reflective type in which the backlight unit is not required and the pixel electrode is formed by a reflective metal member. Further, it may be a transflective type in which each display pixel is provided with a light transmission part and a light reflection part.

  In the above-described embodiment, the columnar spacer for forming the cell gap is formed integrally with the array substrate. However, by adopting the manufacturing method as described above, the array substrate is planarized with high accuracy. Therefore, it is possible to obtain a desired cell gap by spraying spherical spacers instead of columnar spacers.

FIG. 1 schematically shows a structure of a liquid crystal display panel constituting a liquid crystal display device according to an embodiment of the present invention. FIG. 2 is a cross-sectional view schematically showing the structure of the liquid crystal display panel shown in FIG. FIG. 3 is a diagram for explaining a stepped portion formed in the peripheral portion of the display pixel. FIG. 4 is a cross-sectional view schematically showing the structure of a liquid crystal display device manufactured by the method for manufacturing a liquid crystal display device of the present invention. FIG. 5A is a diagram for explaining a process for manufacturing the liquid crystal display device shown in FIG. 4 and a diagram for explaining a process of forming a wiring part. FIG. 5B is a diagram for explaining a process for manufacturing the liquid crystal display device shown in FIG. 4, and a diagram for explaining a process of forming a color filter layer. FIG. 5C is a diagram for explaining a process for manufacturing the liquid crystal display device shown in FIG. 4 and a diagram for explaining a process of forming a pixel electrode. FIG. 5D is a diagram for explaining a process for manufacturing the liquid crystal display device shown in FIG. 4 and a diagram for explaining a step of polishing the stepped portion. FIG. 5E is a diagram for explaining a process for manufacturing the liquid crystal display device shown in FIG. 4, and is a diagram for explaining a step of forming a columnar spacer.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Liquid crystal display device, 100 ... Liquid crystal display panel, 102 ... Effective display part, 104 ... Columnar spacer, 200 ... Array substrate, 201 ... Insulating substrate, 211 ... Switch element, 213 ... Pixel electrode, 218 ... Insulating film, 219 ... Alignment film, 400 ... Counter substrate, 401 ... Insulating substrate, 410 ... Liquid crystal layer, PX (R, G, B) ... Display pixel, CF (R, G, B) ... Color filter layer, CH ... Contact hole, W ... Wiring part, BP ... Step part

Claims (6)

A method of manufacturing a liquid crystal display device in which a liquid crystal layer is held between a first substrate and a second substrate,
The manufacturing method of the first substrate is as follows:
Arranging an insulating film on the substrate surface;
Disposing a pixel electrode corresponding to a matrix-shaped display pixel on the insulating film;
Polishing the insulating film exposed from the pixel electrode using the pixel electrode as a mask;
A method of manufacturing a liquid crystal display device comprising: The manufacturing method of the first substrate includes a polishing step,
2. The method for manufacturing a liquid crystal display device according to claim 1, further comprising a step of forming a columnar spacer for forming a predetermined gap between the polished insulating film and the second substrate.   The method of manufacturing a liquid crystal display device according to claim 1, wherein the polishing step is performed by dry etching.   The method for manufacturing a liquid crystal display device according to claim 1, wherein the insulating film is a color filter layer disposed corresponding to each display pixel. The insulating film arranging step includes
A step of disposing the color filter layer on the substrate surface so as to cover the switch element disposed corresponding to each display pixel;
Forming a contact hole in the color filter layer capable of electrically connecting the switch element and the pixel electrode;
The manufacturing method of the liquid crystal display device of Claim 4 characterized by the above-mentioned. A method of manufacturing a liquid crystal display device in which a liquid crystal layer is held between a first substrate and a second substrate,
The manufacturing method of the first substrate is as follows:
Disposing a first color filter layer on the substrate surface corresponding to the display pixels of the first color;
Disposing a second color filter layer on the substrate surface corresponding to the display pixels of the second color adjacent to the display pixels of the first color;
Disposing a pixel electrode corresponding to each display pixel on the first color filter layer and the second color filter layer;
Polishing the portion where the first color filter layer and the second color filter layer overlap and exposed from the pixel electrode, using the pixel electrode as a mask;
A method of manufacturing a liquid crystal display device comprising:

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