JP2006103254A - Manufacturing method for nozzle plate, nozzle plate, and ink-jet head - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method for a nozzle plate by which a nozzle high in machining accuracy can be inexpensively and easily manufactured, a nozzle plate manufactured by the manufacturing method, and an ink-jet head provided with the nozzle plate manufactured by the manufacturing method. <P>SOLUTION: The manufacturing method is provided with a process for making a polyamic acid sheet 51, a water-repellent layer 52, and a photosensitive layer 53 successively overlie one face 50 of a substrate 12, to which a through-hole 17 is bored corresponding to a position of a nozzle 11a beforehand, a process for forming a pattern including a hole shape 55 corresponding to the nozzle 11a to the photosensitive layer 53, a process for machining the nozzle to the water-repellent layer 52 and the polyamic acid sheet 51 with wet etching corresponding to the hole shape 55 of the pattern of the photosensitive layer 53, a process for removing the photosensitive layer 53, and a process for imidizing the polyamic acid by heat treatment. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a method for manufacturing a nozzle plate having nozzles through which fluid is discharged, a nozzle plate manufactured by the manufacturing method, and an ink jet head including the nozzle plate.

  As a nozzle plate for discharging a fluid, for example, a nozzle plate for discharging ink of an ink jet printer is known. In the nozzle plate of this ink jet printer, it is known to use a laser processing device, a punch processing device, or the like for nozzle drilling.

For example, Patent Document 1 describes a technique in which a nozzle is formed by irradiating a polyimide film attached to a substrate with laser light.
JP 2003-231260 A (see FIG. 1)

  The nozzle plate of an ink jet printer is required to have a high processing accuracy in addition to a small hole diameter. Therefore, in order to cope with such highly accurate nozzle processing, expensive laser processing devices and punch processing devices are required.

  In an inkjet printer, the number of nozzles perforated in the nozzle plate tends to increase in order to increase the recording density and speed. However, since there is a limit to the number of nozzles that can be processed at a time in a laser processing apparatus or a punch processing apparatus, there is a problem that the processing time required for one nozzle plate increases as the number of nozzles increases.

  SUMMARY OF THE INVENTION The present invention solves the above-described problems, and includes a nozzle plate manufacturing method capable of easily and inexpensively manufacturing a nozzle with high processing accuracy, a nozzle plate manufactured by the manufacturing method, and the nozzle plate. An object of the present invention is to provide an ink jet head.

  In order to achieve the above object, the nozzle plate manufacturing method according to the first aspect of the present invention is a nozzle plate manufacturing method including a nozzle from which a fluid is discharged. A step of sequentially laminating a polyamic acid sheet, a water repellent layer, and a photosensitive layer on one surface of the provided substrate, a step of forming a pattern including a hole shape corresponding to the nozzle on the photosensitive layer, and the photosensitive layer In accordance with the hole shape of the pattern, a step of processing the nozzle by wet etching on the water repellent layer and the polyamic acid sheet, a step of removing the photosensitive layer, and a step of imidizing the polyamic acid by heat treatment are provided. It is what.

  According to a second aspect of the present invention, there is provided the nozzle plate manufacturing method according to the second aspect of the present invention, wherein the nozzle plate has nozzles through which fluid is ejected. In addition, a step of sequentially laminating a photosensitive polyamic acid sheet and a photosensitive water repellent layer, a step of exposing a pattern for forming the nozzle on the polyamic acid sheet and the water repellent layer, and The water-repellent layer and the polyamic acid sheet are provided with a step of processing a nozzle by wet etching and a step of imidizing polyamic acid by heat treatment.

  The invention described in claim 3 is the nozzle plate manufacturing method according to claim 1 or 2, wherein the water repellent layer contains a polyamic acid before heat treatment. is there.

  According to a fourth aspect of the present invention, there is provided a nozzle plate manufacturing method according to the fourth aspect of the present invention, wherein the nozzle plate has a nozzle through which a fluid is discharged. A step of sequentially laminating a polyamic acid sheet in which water repellent components are dispersed non-uniformly and a photosensitive layer, a step of forming a pattern including a hole shape corresponding to the nozzle on the photosensitive layer, and a pattern of the photosensitive layer The polyamic acid sheet containing a water-repellent component is processed by wet etching, the photosensitive layer is removed, and the polyamic acid is imidized by heat treatment. In the sheet, the water-repellent component is dispersed so that it is not contained on the side close to one side of the substrate but is contained on the side far from the one side. And it is characterized in that is.

  The invention according to claim 5 is the nozzle plate manufacturing method according to any one of claims 1 to 4, wherein the through hole of the substrate serves as a flow path for supplying the fluid to the nozzle. It is what.

  A nozzle plate according to a sixth aspect of the present invention is manufactured by any one of the first to fifth manufacturing methods.

  An ink jet head according to a seventh aspect of the invention includes a nozzle plate manufactured by the manufacturing method according to any one of the first to fifth aspects.

  According to the invention described in claim 1, since a sheet of polyamic acid that is a precursor of polyimide is used instead of polyimide, it is easy to perform wet etching without using an expensive processing device such as a laser processing device. Manufacturing costs can be reduced. And since polyamic acid is heat-processed after the process of a nozzle and becomes a polyimide, the nozzle excellent in ink resistance can be obtained.

  Also, in wet etching, the processing time does not increase even if the number of nozzles is increased, which is suitable for processing a nozzle plate having a large number of nozzles.

  According to the second aspect of the present invention, since a sheet of polyamic acid that is a precursor of polyimide is used instead of polyimide, it is easy to perform wet etching without using an expensive processing apparatus such as a laser processing apparatus. Manufacturing costs can be reduced. And since polyamic acid is heat-processed after the process of a nozzle and becomes a polyimide, the nozzle excellent in ink resistance can be obtained.

  Also, in wet etching, the processing time does not increase even if the number of nozzles is increased, which is suitable for processing a nozzle plate having a large number of nozzles.

  Furthermore, since the polyamic acid sheet and the water repellent layer have photosensitivity, operations such as film formation, patterning, and removal of the photosensitive layer are not required, and the cost can be reduced by reducing the number of steps.

  According to the invention described in claim 3, since the water repellent layer contains polyamic acid, it can be etched simultaneously with the etching of the polyamic acid sheet, and the affinity between the polyamic acid sheet and the water repellent layer can be increased. Is high, the adhesion between the layers is enhanced.

  According to the invention described in claim 4, since a sheet of polyamic acid that is a polyimide precursor is used instead of polyimide, it is easy to perform wet etching without using an expensive processing device such as a laser processing device. Manufacturing costs can be reduced. And since polyamic acid is heat-processed after the process of a nozzle and becomes a polyimide, the nozzle excellent in ink resistance can be obtained.

  Also, in wet etching, the processing time does not increase even if the number of nozzles is increased, which is suitable for processing a nozzle plate having a large number of nozzles.

  Further, the polyamic acid sheet itself contains a water-repellent component, and the dispersion rate of the water-repellent component is changed between the side closer to one side of the substrate and the side farther from the substrate. That is, since one side contains a large amount of water-repellent components on the side that will later become the front surface of the nozzle (fluid outlet side), and one side contains less water-repellent components on the side that becomes the rear surface of the nozzle (fluid inlet side). The polyamic acid sheet can sufficiently exhibit water repellency with respect to fluid discharge while having adhesion to the substrate. As a result, the cost can be reduced by reducing the number of steps such as application and etching of the water repellent layer.

  According to invention of Claim 5, a board | substrate is used as a reinforcing material at the time of the process of a polyamic acid sheet. And since it is utilized as a plate provided with the flow path which continues to a nozzle as it is, it is not necessary to remove.

  According to the sixth aspect of the present invention, a highly accurate nozzle plate can be realized easily and with a simple process.

  According to the seventh aspect of the present invention, it is possible to realize an ink jet head including a nozzle plate that is easily manufactured with high accuracy by a simple process.

  Below, basic embodiment of this invention is described based on drawing. FIG. 1 is an exploded perspective view of a cavity unit to which the nozzle plate of the present invention is applied, FIGS. 2A to 2G are cross-sectional views showing the manufacturing process of the nozzle plate of the first embodiment, and FIG. ) To FIG. 3C are cross-sectional views showing the manufacturing process of the nozzle plate of the second embodiment, and FIGS. 4A to 4G are cross-sectional views showing the manufacturing process of the nozzle plate of the third embodiment. FIG. 5 is a partial cross-sectional view of a head unit using the nozzle plate of the present invention.

  A nozzle plate 11 shown in FIG. 1 as an embodiment is applied to a cavity unit 10 of an inkjet printer 100 to be described later, and is attached to the surface (front surface, bottom surface in FIG. 1) side of the cavity unit 10, and fluid from the surface. Ink is discharged. The nozzle plate 11 is provided with a large number of nozzles 11a in a row.

  The manufacturing method of this nozzle plate 11 is demonstrated based on Fig.2 (a)-FIG.2 (d).

  First, as shown in FIG. 2A, a polyamic acid sheet 51, a water repellent layer 52, and a photosensitive layer 53 are sequentially formed on one surface 50 of the substrate 12 in which the through holes 17 corresponding to the positions of the nozzles are previously formed. Laminate.

  The polyamic acid sheet 51 is formed by forming a polyamic acid into a sheet shape, and is laminated on one surface 50 of the substrate 12 by transfer. Polyamic acid is a polyimide precursor, and becomes a polyimide resin excellent in ink resistance by a heat treatment described later. Further, in the above transfer, the polyamic acid sheet 51 is laminated on the substrate 12 by pressing and relatively rolling the roller body having the polyamic acid sheet 51 formed on the outer periphery on the substrate 12. Since the substrate 12 has the through-holes 17 formed in advance, the use of sheet-like polyamic acid does not cause any inconvenience such as entry of the polyamic acid into the holes. As the polyamic acid sheet, the Pyralux (registered trademark) PC series manufactured by DuPont and the Epanex (registered trademark) SFP series manufactured by Nippon Steel Chemical are suitable.

  The water repellent layer 52 is formed by coating a polyamic acid sheet 51 with a powdery water repellent component 57 dispersed in advance in a polyamic acid solution. The water repellent layer 52 may be formed into a sheet shape in advance and transferred onto the polyamic acid sheet 51. As the water repellent component 57, for example, FEP resin (tetrafluoroethylene-6 fluoropropylene copolymer resin), PFA resin (tetrafluoroethylene-perfluoroalkoxyethylene copolymer resin), PCTFE resin (trifluoride trifluoride). Fluorine resins such as ethylene chloride resin) and PTFE resin (tetrafluoroethylene resin) are suitable. Since the water repellent layer 52 is finally disposed on the front surface of the nozzle plate 11, particularly when the fluid is a liquid, the spread of the liquid due to wetting is prevented, and the effect of improving the discharge performance is exhibited. To do.

  The photosensitive layer 53 is a photoresist, and is formed by coating on the water repellent layer 52. Here, a positive type photoresist is used.

  Next, the upper surface of the photosensitive layer 53 is exposed and developed, and a pattern including a hole shape 55 corresponding to the nozzle 11a is formed in the photosensitive layer 53 as shown in FIG. Since the photosensitive layer 53 is a positive photoresist, a photomask is used in which a portion of the hole shape 55 is selectively exposed at a position corresponding to the through hole 17 to form a latent image.

  Next, an etching solution is supplied to the upper surface (surface opposite to the substrate 12) of the photosensitive layer 53 in a shower shape, and the water repellent layer 52 is formed according to the hole shape 55 of the photosensitive layer 53 as shown in FIG. And the polyamic acid sheet 51 is wet-etched. Thereby, all the nozzles 11a of the nozzle plate 11 are penetrated simultaneously. As the etching solution, NMP (N-methyl-2-pyrrolidone) or the like is suitable.

  Next, after removing the photosensitive layer 53, heat treatment is performed, and the polyamic acid contained in the polyamic acid sheet 51 and the water repellent layer 52 is imidized to become a polyimide resin. Thereby, as shown in FIG. 2D, the nozzle plate 11 is completed in a state of being laminated on the substrate 12. Since the photosensitive layer 53 is a photoresist, a dedicated photoresist removing solution (alkali solution) or the like is used. The heat treatment temperature needs to be 350 ° C. or higher for the dehydration condensation reaction in which the polyamic acid is imidized.

  Thus, according to the above manufacturing method, the nozzles 11a are processed by wet etching, and all the nozzles 11a can be processed simultaneously. Therefore, even if the number of nozzles 11a required for one nozzle plate 11 is increased, the processing time is increased. Does not increase, so there is no need to worry about increased manufacturing costs.

  Further, the water repellent layer 52 of the nozzle plate 11 contains the same polyamic acid as the polyamic acid sheet 51 in the lower layer before the heat treatment. In general, it is difficult to process the water repellent layer 52 by wet etching, but in the present invention, the water repellent layer can be etched with a solvent of polyamic acid. Further, since the water repellent layer 52 has the same components as the base, the effect of increasing the adhesion to the lower layer after the heat treatment is also exhibited.

  Next, 2nd Embodiment which concerns on the manufacturing method of the nozzle plate of this invention is described based on drawing. FIG. 3A to FIG. 3C are cross-sectional views showing the manufacturing process of the nozzle plate of the second embodiment. The same reference numerals are given to the same descriptions as those in the first embodiment, and the detailed description is omitted.

  In the second embodiment, first, as shown in FIG. 3A, a photosensitive polyamic acid sheet 51a and a photosensitive water repellent layer 52a are formed on one surface 50 of the substrate 12 similar to that of the first embodiment. Are sequentially stacked.

  The polyamic acid sheet 51a is a sheet formed by imparting photosensitivity to the polyamic acid. The water repellent layer 52a is obtained by dispersing the water-repellent component 57 in the same manner as in the first embodiment in a polyamic acid solution imparted with photosensitivity, and is applied to the polyamic acid sheet 51a. In addition, although the polyamic acid sheet 51a and the water-repellent layer 52a have positive photosensitivity, they may be negative.

  Next, the water repellent layer 52a and the polyamic acid sheet 51a are exposed from the upper surface of the water repellent layer 52a. Since these are positive-type photosensitivity, a photomask is used in which a portion corresponding to the nozzle 11a is selectively exposed. Thereby, a latent image 56 having a shape corresponding to the nozzle 11a is formed inside the water repellent layer 52a and the polyamic acid sheet 51a.

  Next, by supplying an etching solution to the upper surface of the water repellent layer 52a in a shower shape, as shown in FIG. 3C, the portion of the latent image 56 is wet-etched, and the nozzle 11a is penetrated. As the etching solution, NMP (N-methyl-2-pyrrolidone) or the like is suitable.

  In the second embodiment, since the polyamic acid sheet 51a and the water repellent layer 52a both have photosensitivity, a step for applying, exposing, developing, and the like of the photosensitizer is unnecessary, and man-hours are reduced. Cost can be reduced. Other actions and effects are the same as in the first embodiment.

  Next, 3rd Embodiment which concerns on the manufacturing method of the nozzle plate of this invention is described based on drawing. FIG. 4A to FIG. 4D are cross-sectional views showing the manufacturing process of the nozzle plate of the third embodiment. The same reference numerals are given to the same descriptions as those in the first embodiment, and the detailed description is omitted.

  In the third embodiment, first, as shown in FIG. 4A, a polyamic acid sheet 51b in which a water repellent component 57 is non-uniformly dispersed on one surface 50 of a substrate 12 similar to that in the first embodiment, and a photosensitive member The layer 53 is sequentially stacked.

  The polyamic acid sheet 51b is obtained by dispersing a powdery water-repellent component 57 in a polyamic acid solution. When the sheet is formed into a sheet shape, the dispersion ratio of the water-repellent component 57 is formed on one side of the sheet. Is zero, and the other side of the sheet is formed so that a large amount of the water-repellent component 57 is dispersed. Then, one surface on which the dispersion ratio of the water repellent component 57 is zero is transferred so as to overlap the one surface 50 of the substrate 12.

  Next, as in the first embodiment, the upper surface of the photosensitive layer 53 is exposed and developed, and as shown in FIG. 4B, the photosensitive layer 53 includes a hole shape 55 corresponding to the nozzle 11a. Form.

  Next, as in the first embodiment, an etching solution is supplied to the upper surface of the photosensitive layer 53 in a shower shape, and the polyamic acid sheet 51b is formed according to the hole shape 55 of the photosensitive layer 53 as shown in FIG. Wet etching is performed to penetrate the nozzle 11a. As the etching solution, NMP (N-methyl-2-pyrrolidone) or the like is suitable.

  Next, after removing the photosensitive layer 53, heat treatment is performed, and the polyamic acid contained in the polyamic acid sheet 51b is imidized to become a polyimide resin. Thereby, as shown in FIG. 4D, the nozzle plate 11 is completed in a state of being laminated on the substrate 12.

  In this third embodiment, since the polyamic acid sheet 51b itself has water repellency and the water repellency component 57 is dispersed non-uniformly so that the water repellency differs in the thickness direction of the sheet, A separate layering process is not required, and the cost can be reduced by reducing the number of steps. Other actions and effects are the same as in the first embodiment.

  Next, the cavity unit 10 which is an application example of the nozzle plate 11 according to the above-described embodiment of the present invention will be described. As shown in FIG. 1, the cavity unit 10 is a long type in which a large number of nozzles 11 a are provided. On the back side of the nozzle plate 11, four manifold plates 12, 12, a spacer plate 13, and a base plate 14 are provided. It is configured to have a structure in which a thin metal plate is laminated and bonded with an adhesive. The substrate 12 (see FIGS. 2, 3 and 4) on which the polyamic acid sheet 51 is laminated corresponds to the lower manifold plate 12 of the two manifold plates shown in FIG.

  As shown in FIG. 1, the nozzles 11 a of the nozzle plate 11 are provided in a two-row staggered arrangement (total of four rows) extending in the long side direction (Y direction described later) of the nozzle plate 11 as a whole.

  The nozzle plate 11 is bonded to the lower manifold plate 12, and a large number of through holes 17 communicating with the respective nozzles 11 a are formed along the long side directions of the upper and lower manifold plates 12, 12 and the spacer plate 13. Two rows of staggered arrays corresponding to the nozzles 11a are provided at a constant pitch. Ink passages 12 a and 12 b are formed in the two manifold plates 12 and 12 so as to extend along both sides of each row of the through holes 17. However, the ink passage 12b in the lower manifold plate 12 is recessed so as to open only to the upper side of the manifold plate 12. The upper surfaces of the ink passages 12a and 12b are configured to be closed by stacking the spacer plate 13 on the upper manifold plate 12. Further, four ink passages 12a and 12b are provided corresponding to the four rows of the nozzles 11a, and inks of different colors can be supplied from the end portions on both short sides.

  The same number of pressure chambers 16 as the nozzles 11a are formed in the base plate 14 in four rows corresponding to the rows of the nozzles 11a. The tips of the pressure chambers 16 communicate with the nozzles 11a through through holes 17, 17 and 17 formed in the spacer plate 13 and the manifold plates 12 and 12, respectively. On the other hand, the other end of each pressure chamber 16 communicates with ink passages 12 a and 12 b in both manifold plates 12 and 12 through a communication hole 18 formed in the spacer plate 13.

  As a result, ink that has flowed into the ink passages 12a and 12b from the ink supply ports 19a and 19b drilled at both ends near the short sides of the base plate 14 and the spacer plate 13 passes through the ink passages 12a and the communication holes. After being distributed into each pressure chamber 16 through 18, the pressure chamber 16 passes through the through holes 17, 17, 17 to reach the nozzle 11 a corresponding to the pressure chamber 16. (See FIG. 5). Since different colors are supplied to the four ink passages 12a and 12b as described above, different colors of ink are ejected from the respective rows of the nozzles 11a.

  As shown in FIG. 1, the ink supply port 19a is provided for each of the ink passages 12a and 12b, and is connected to an ink cartridge (not shown) as an ink supply source. A filter 29 for removing dust in the ink is fixed to the upper surface of the ink supply port 19a with an adhesive.

  As shown in FIG. 5, the head unit includes the long cavity unit 10, a plate-type piezoelectric actuator 20 that is bonded to the cavity unit 10 via an adhesive or an adhesive sheet, and laminated. The flexible flat cable 40 is overlapped and joined to the back surface (upper surface) for electrical connection with an external device. The piezoelectric actuator 20 can selectively deform a portion corresponding to the pressure chamber 16 on the basis of an electric signal supplied via the flexible flat cable 40 to give an ejection pressure to the ink in the pressure chamber 16.

  The nozzle plate 11 of the present invention is manufactured by the above-described manufacturing method without increasing the processing cost even when the number of nozzles is large. Therefore, in the ink jet printer using the nozzle plate 11, even if the number of nozzles is increased in order to improve the recording density and the recording speed, it is possible to suppress an increase in component costs related to the nozzle plate.

  Further, since the water-repellent layer 52 of the nozzle plate 11 is attached to the lower layer with high adhesion, even if the wiping operation of the ink on the surface of the nozzle plate 11 is repeated with a wiper member as is well known, Excellent durability can be exhibited.

  Needless to say, the nozzle plate 11 of the present invention is not limited to the configuration of an ink jet printer, and can also be used to discharge any fluid other than ink.

It is a disassembled perspective view of the cavity unit to which the nozzle plate of the present invention is applied. (A)-(g) is sectional drawing which shows the manufacturing process of the nozzle plate of 1st Embodiment. (A)-(c) is sectional drawing which shows the manufacturing process of the nozzle plate of 2nd Embodiment. (A)-(g) is sectional drawing which shows the manufacturing process of the nozzle plate of 3rd Embodiment. It is a fragmentary sectional view of the head unit using the nozzle plate of the present invention.

Explanation of symbols

10 Cavity unit 11 Nozzle plate 11a Nozzle 12 Substrate (manifold plate)
50 One surface 51 Polyamic acid sheet 51a Polyamic acid sheet 51b having photosensitivity Polyamic acid sheet 52 in which water repellent components are dispersed Water repellent layer 52a Water repellent layer having photosensitivity 53 Photosensitive layer 55 Hole shape 56 Latent image 57 Water repellent component

Claims (7)

In a method of manufacturing a nozzle plate having a nozzle from which a fluid is discharged,
A step of sequentially laminating a polyamic acid sheet, a water repellent layer, and a photosensitive layer on one surface of a substrate in which a through hole has been previously drilled corresponding to the position of the nozzle;
Forming a pattern including a hole shape corresponding to the nozzle in the photosensitive layer;
In accordance with the hole shape of the pattern of the photosensitive layer, a step of processing the nozzle by wet etching on the water repellent layer and the polyamic acid sheet;
Removing the photosensitive layer;
And a step of imidizing the polyamic acid by a heat treatment. In a method of manufacturing a nozzle plate having a nozzle from which a fluid is discharged,
A step of sequentially laminating a polyamic acid sheet having photosensitivity and a water-repellent layer having photosensitivity on one surface of a substrate in which a through hole has been previously drilled corresponding to the position of the nozzle;
Exposing the pattern for forming the nozzle to the polyamic acid sheet and the water repellent layer;
Processing the nozzle by wet etching on the water repellent layer and the polyamic acid sheet;
And a step of imidizing the polyamic acid by a heat treatment.   The method for manufacturing a nozzle plate according to claim 1, wherein the water repellent layer contains a polyamic acid before heat treatment. In a method of manufacturing a nozzle plate having a nozzle from which a fluid is discharged,
A step of sequentially laminating a polyamic acid sheet in which a water-repellent component is dispersed non-uniformly and a photosensitive layer on one surface of a substrate in which a through-hole corresponding to the position of the nozzle is previously formed;
Forming a pattern including a hole shape corresponding to the nozzle in the photosensitive layer;
According to the hole shape of the pattern of the photosensitive layer, a step of processing the nozzle by wet etching on a polyamic acid sheet containing a water repellent component;
Removing the photosensitive layer;
A step of imidizing polyamic acid by heat treatment,
In the polyamic acid sheet, the water repellent component is dispersed so as not to be contained on the side closer to one surface of the substrate but on the side farther from the one surface.   The method for manufacturing a nozzle plate according to claim 1, wherein the through hole of the substrate serves as a flow path for supplying the fluid to the nozzle.   A nozzle plate manufactured by the manufacturing method according to claim 1.   An inkjet head provided with the nozzle plate manufactured with the manufacturing method in any one of Claim 1 to 5.

Images