JP2006098060A5 - - Google Patents

Claims (10)

A three-dimensionally movable member movable, the probes freely held displaced in one direction by scanning in contact with the object to be measured, a contact Sawashiki probe for measuring the coordinate position,
A permanent magnet fixed to the probe, and a box-shaped yoke that surrounds the permanent magnet and has an inner surface facing the permanent magnet with a gap that changes in distance relative to the uniaxial direction ,
The yoke is held by the moving member, and a force that cancels gravity applied to the probe by a magnetic force generated by the magnetic flux flowing through the permanent magnet and the yoke, and a spring element that changes according to the displacement of the probe with respect to the yoke A contact-type probe that generates force. A three-dimensionally movable member movable, the probes freely held displaced in one direction by scanning in contact with the object to be measured, a contact Sawashiki probe for measuring the coordinate position,
A permanent magnet fixed to said probe, said enclosing a permanent magnet, wherein with a gap distance changes with respect to the axial direction between the permanent magnets have a facing inner surface, an opening to said axial direction different from a direction A box-shaped yoke having a tapered portion whose width changes, and yoke driving means for moving the yoke in the taper direction of the tapered portion with respect to the probe ;
The yoke is held by the moving member via the yoke driving means, and the force that cancels the gravity applied to the probe by the magnetic force generated by the magnetic flux flowing through the permanent magnet and the yoke, and the displacement of the probe with respect to the yoke A contact probe characterized by generating a force as a spring element that changes according to the above. A three-dimensionally movable member movable, the probes freely held displaced in one direction by scanning in contact with the object to be measured, a contact Sawashiki probe for measuring the coordinate position,
A permanent magnet fixed to the probe; a box-shaped yoke that surrounds the permanent magnet and has an inner surface facing the permanent magnet with a gap that changes in distance relative to the uniaxial direction; and the yoke Yoke drive means for moving in the uniaxial direction with respect to the probe ,
The yoke is held by the moving member via the yoke driving means, and the force that cancels the gravity applied to the probe by the magnetic force generated by the magnetic flux flowing through the permanent magnet and the yoke, and the displacement of the probe with respect to the yoke A contact probe characterized by generating a force as a spring element that changes according to the above.   The contact probe according to any one of claims 1 to 3, wherein the box-shaped yoke has a curved inner surface curved with a constant curvature in a uniaxial direction.   The detection means which detects the relative position of a probe and a moving member is provided, The mass of the said probe is calculated based on the output of the said detection means, The Claim 1 thru | or 4 characterized by the above-mentioned. Contact probe.   The moving member has a stopper for restricting the movement of the probe, and for the origin of the probe position, the yoke can be moved by the yoke driving means so that the probe can be brought into contact with the stopper. The contact type probe according to claim 2.   7. The moving member has a stopper for restricting the movement of the probe, and probe driving means for moving the probe to abut against the stopper is provided. Contact probe.   8. The contact probe according to claim 7, wherein the probe driving means includes magnetic means for generating a Lorentz force on the probe.   The contact probe according to claim 7, wherein the probe driving means is configured to move the probe by blowing or sucking air.   A contact probe according to any one of claims 1 to 9, scanning means for scanning the contact probe over an object to be measured, and coordinate position measurement means for measuring a three-dimensional coordinate position of the probe. A shape measuring apparatus characterized by comprising.