JP2006097869A - Linear motion table device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve workability in maintenance of a linear motion table device mounted in a vacuum chamber. <P>SOLUTION: In this linear motion table device 1 mounted in the vacuum chamber 10, support brackets 54A, 54B for bearing a screw shaft 51c of a ball screw 51 for driving a moving table 4 which is linearly movably supported to a base 2, are mounted on the base 2. Further positioning members having positioning parts for determining relative positions of the support brackets 54A, 54B to the base 2, are mounted on the base 2, and the support brackets 54A, 54B have contact parts kept into contact with the positioning parts formed on the positioning members to determine the relative positions. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a linear motion table device installed in a vacuum chamber used for manufacturing or processing a semiconductor manufacturing apparatus, a machine tool, or a component thereof, for example.

As shown in FIG. 11, for example, the linear motion table device includes a base 2, linear guides 3 </ b> A and 3 </ b> B, and a moving table 4, and further includes a ball screw 510 and a support bracket 540 as a moving mechanism 500 ( For example, see Patent Document 1).
Incidentally, some linear motion table devices are installed in a vacuum chamber used in, for example, manufacturing or processing of semiconductor manufacturing apparatuses, machine tools, or parts thereof.

In such a linear motion table device installed in a vacuum chamber, vacuum components are used for components such as bearings and ball screws constituting the linear motion table device, but the degree of vacuum should be maintained. In consideration of the above, for example, usable lubricants are limited. Therefore, in the case of such a vacuum direct acting table device, the life tends to be relatively short as compared with the constituent elements of the atmospheric direct acting table device. Accordingly, the components such as bearings and ball screws constituting the linear motion table device are relatively frequently maintained, and therefore the maintenance of the components of the linear motion table device installed in the vacuum chamber can be performed efficiently. Is important.
JP 2003-239965 A

Here, when the linear motion table device is installed in the vacuum chamber, the components such as bearings and ball screws constituting the linear motion table device are adjusted when the individual components are first assembled and adjusted. Since it can be assembled and adjusted outside, it can be assembled relatively easily.
However, after installing the linear motion table device in the vacuum chamber, maintenance work such as disassembly and assembly inside the vacuum chamber will be carried out. However, the vacuum chamber has a complicated and narrow structure. It is difficult to secure a sufficient maintenance space. For this reason, after the linear motion table device is installed in the vacuum chamber, the maintenance work of the components of the linear motion table device requires a great deal of labor. In addition, there is a problem that during the maintenance work, the production line is stopped and a considerable amount of time is required to resume the production line, such as evacuation after maintenance. It is an important issue to improve.

  For example, in the technique described in Patent Document 1, the support bracket 540 is directly fixed to the end of the flat plate portion 2a on the base 2 of the linear motion table device. Therefore, when the maintenance work of the support bracket that is a component of the linear motion table device is performed inside the vacuum chamber, it is necessary to attach and detach the support bracket itself directly to the base. However, in the maintenance work of the support bracket, a special technique is required to assemble the moving table so that the running accuracy of the moving table and the axis of the ball screw supported by the support bracket 540 are within a desired parallelism. Also, in a narrow vacuum chamber, usually, a sufficient work space is not secured in the axial direction, and the work space required for maintenance is limited, so workability is poor.

  The present invention has been made paying attention to such problems, and is intended to improve the workability of maintenance of a linear motion table device installed in a vacuum chamber. The purpose is to improve the maintenance workability of the support bracket of the linear motion table device.

  In order to solve the above-mentioned problem, the invention according to claim 1 is a linear motion table device installed in a vacuum chamber, comprising a base and a movable table supported to be linearly movable with respect to the base. A ball screw having a nut fixed to the moving table via a nut bracket and a screw shaft for driving the nut in an axial direction; a support bracket for supporting the screw shaft on the base via a support unit; The base is provided with a positioning member formed with a positioning portion for determining the position of the support bracket on the upper surface thereof, and the support bracket is brought into contact with the positioning portion formed on the positioning member to It has the contact part which determines a position, It is characterized by the above-mentioned.

  The invention according to claim 2 is a linear motion table device installed in a vacuum chamber, a base, a movable table supported so as to be linearly movable with respect to the base, and a nut on the movable table A ball screw having a nut fixed via a bracket and a screw shaft for driving the nut in an axial direction; and a support bracket for supporting the screw shaft on the base via a support unit; a taper pin; A first taper hole formed at the support bracket mounting position of the base with the same taper angle as the taper pin; and the first taper hole formed in the support bracket with the same taper angle as the taper pin. A second taper hole formed so as to communicate with the mounting position of the support bracket on the base. Is characterized by being adapted to decide by inserting the tapered pin in a state in which communication between path hole and a second tapered bore.

  The invention according to claim 3 is the linear motion guide device according to claim 1 or 2, wherein the support bracket is mounted through the axial direction of the screw shaft in order to mount the support unit. An opening for allowing passage of the screw shaft is provided between the mouth and the mounting surface with respect to the base.

  ADVANTAGE OF THE INVENTION According to this invention, the linear motion table apparatus which can improve the maintenance workability | operativity of the linear motion table apparatus assembled | attached in a vacuum chamber can be provided. In particular, by providing a member for positioning the support bracket on the base, the support bracket can be easily positioned, and the maintenance workability of the support bracket of the linear motion table device in the vacuum chamber can be improved.

Hereinafter, embodiments of a linear motion table apparatus according to the present invention will be described with reference to the drawings as appropriate.
FIG. 1 is a diagram showing a first embodiment of the present invention, which is a perspective view showing a schematic configuration of a linear motion table device according to the present invention.
As shown in FIG. 1, the linear motion table device 1 is installed in a vacuum chamber 10 and includes a base 2, linear guides 3 A and 3 B, a moving table 4, and a ball screw 51 as a moving mechanism 5. And support brackets 54A and 54B.

  The base 2 is a block whose cross section is formed in a substantially U shape by a flat plate portion 2a and guide rail mounting portions 2b, 2c extending upward from both left and right end portions of the flat plate portion 2a, and is a highly rigid metal Made from materials. Guide rail mounting surfaces 2d and 2e are formed on the upper surfaces of the guide rail mounting portions 2b and 2c, respectively. The guide rail mounting surfaces 2d and 2e are respectively machined with accuracy capable of installing the linear guides 3A and 3B in parallel with the running direction in which the moving table 4 is moved. The guide rails 31A and 31B of the linear guides 3A and 3B are attached to the guide rail attachment surfaces 2d and 2e in parallel to the running direction in which the moving table 4 is moved by a large number of bolts (not shown).

FIG. 2 is a front view of the linear guide shown in FIG.
As shown in FIG. 2, each of the linear guides 3A and 3B includes guide rails 31A and 31B, and two sliders 32 that can slide on the guide rails 31A and 31B. In each slider 32, a large number of spherical rolling elements 33 are incorporated in the guide rails 31A and 31B so as to rollably engage rolling element rolling grooves formed along the longitudinal direction of the rails.

The moving table 4 is fixed on the slider 32 of the linear guides 3A and 3B, as shown in FIG. Further, the moving mechanism 5 for moving the moving table 4 includes a ball screw 51 provided in parallel with the linear guides 3A and 3B, and support brackets 54A and 54B for supporting the screw shaft 51c of the ball screw 51. Yes.
Here, the support brackets 54A and 54B will be described in more detail with reference to FIGS. FIG. 3 is a cross-sectional view showing a part of the linear motion table device of the present invention. FIG. 4 is an enlarged perspective view showing a portion X in FIG. 1, and only the support bracket and a positioning member for positioning the support bracket are shown in FIG. 5 is a view in the direction of the arrow Y in FIG. 1, and FIG. 6 is a plan view of the support bracket shown in FIG.

As shown in FIG. 3, the support brackets 54A and 54B are attached to the respective support units 52A and 52B that support the ball screw 51 (adjustable in the radial direction with respect to the corresponding support brackets 54A and 54B, respectively). ), Both ends in the axial direction of the screw shaft 51c of the ball screw 51 are supported on the base 2.
As shown in FIG. 3, the support units 52A and 52B include a bearing housing 52b that houses rolling bearings 52a and 52a such as ball bearings, and an outer ring presser 52f.

  The bearing housing 52b has a cylindrical portion 52d into which the outer rings of the rolling bearings 52a and 52a are fitted, and an annular outer ring receiver projecting inwardly on an inner peripheral surface at one axial end portion of the cylindrical portion 52d. A portion 52c is formed. Moreover, it has the structure by which the attachment flange 52e which protrudes outward is formed in the other bearing edge part. Then, the outer ring retainer 52f is inserted from the mounting flange 52e side with the rolling bearings 52a and 52a inserted into the cylindrical part 52d so that one of the outer rings is in contact with the outer ring receiving part 52c. By being fixed to the housing 52b, the rolling bearings 52a and 52a are held. The rolling bearings 52a and 52a are screwed by inserting a bearing mounting shaft portion 51i having a step portion 51h formed on the screw shaft 51c into the inner ring and tightening with a lock nut 56 screwed to the other end side. Attached to the shaft 51c.

Note that the configuration of the support unit 52B is not necessarily the same as that of the support unit 52A. For example, the number of rolling bearings fitted into the bearing housing may be one, and the outer ring receiving portion 52c and the outer ring retainer 52f may be omitted.
Here, in each of the support brackets 54A and 54B, as shown in FIG. 4, a mounting port 54a for mounting the cylindrical portion 52d of the bearing housing 52b in the support units 52A and 52B is formed so as to penetrate in the axial direction of the screw shaft 51c. An opening 55 that allows passage of the screw shaft 51c is formed between the mounting port 54a and the base mounting surface 54b at the lower end. As shown in FIG. 5, the opening 55 has a width WS wider than the diameter DB (outer diameter) of the screw shaft 51 c (WS> DB).

As shown in FIG. 3, the cylindrical portion 52d of the bearing housing 52b is inserted into the mounting opening 54a of each support bracket 54A, 54B, and the bearing housing 52b is inserted into the side surface of each support bracket 54A, 54B by four bolts 57a. It is screwed to the internal thread formed in the.
Further, on the base 2, as shown in FIGS. 1 and 6, for example, from the end of the flat plate portion 2a to the central portion of the end portion of the flat plate portion 2a where the guide rail mounting portions 2b and 2c are not formed. The substantially L-shaped positioning members 53A and 53B having positioning portions for determining the relative positions of the support brackets 54A and 54B with respect to the base 2 are attached at positions on the inner side by a distance corresponding to the thickness of the support brackets 54A and 54B. Yes. As shown in FIG. 6, the positioning members 53A and 53B are formed as positioning portions on the side surfaces where the positioning members 53A and 53B are in contact with the support brackets 54A and 54B in a direction perpendicular to the axis of the ball screw 51. The first positioning surface 53p and the second positioning surface 53r formed in the axial direction of the ball screw 51 are integrally provided.

Further, each support bracket 54A, 54B has a contact portion that determines the relative position by contacting each positioning portion formed on the positioning members 53A, 53B on the side surface of each support bracket 54A, 54B. Well processed.
Specifically, each of the support brackets 54A and 54B is formed as an abutting portion so as to abut on the first processed surface 54p formed so as to abut on the first positioning surface 53p and the second positioning surface 53r. Second processed surface 54r. The first machining surface 54p and the second machining surface 54r have such an accuracy that the ball screw 51 can be installed in parallel with the running direction in which the movable table 4 is moved when the first machining surface 54p and the second machining surface 54r are brought into contact with the positioning portions, respectively. The first processed surface 54p is in contact with the first positioning surface 53p to determine the axial position of the ball screw 51, and the second processed surface 54r is the first processed surface 54r. A contact portion that determines a position in a direction orthogonal to the axis of the ball screw 51 by contacting the second positioning surface 53r. As described above, at the time of reassembly after maintenance, these machining surfaces are used as contact portions to be brought into contact with the positioning portions of the positioning member, and the axial direction of the ball screw 51 and the position in the direction perpendicular to the axis are respectively desired. It is possible to position at the position. At the time of the first assembly performed outside the vacuum chamber, the brackets 52A and 52B are first adjusted and fixed so as to be at desired positions on the base 2, and the positioning members 53A and 53B are brought into contact therewith. And fix.

  Here, as shown in FIG. 7, the ball screw 51 constituting the moving mechanism 5 drives a cylindrical nut 51b fixed to the moving table 4 via a nut bracket 51a and the nut 51b in the axial direction. A screw shaft 51c is provided, and a large number of balls 51e that are rotatably engaged with a spiral ball rolling groove 51d formed on the screw shaft 51c are incorporated in the nut 51b.

  The moving mechanism 5 includes a drive mechanism unit that drives the ball screw 51. As the drive mechanism, for example, as shown in FIG. 3, a torque transmission mechanism 95 having a sealing function is connected to a screw shaft 51c of a ball screw 51 via a coupling 93 or the like, and a drive motor is connected to the torque transmission mechanism 95. An example is one in which 98 is fixed to the outer wall of the vacuum chamber 10 by a motor bracket 96 or the like. With this configuration, when the rotation of the drive motor 98 is transmitted from the torque transmission mechanism 95 to the screw shaft 51c of the ball screw 51 through the coupling 93 or the like without impairing the vacuum environment in the vacuum chamber, The nut 51b of 51 is driven in the axial direction, so that the moving table 4 can move together with the slider 32 on the guide rails 31 of the linear guides 3A and 3B.

  Next, maintenance work in the vacuum chamber of the linear motion table device 1 described above, and its operation and effect will be described in detail with reference to FIG. 8 as appropriate. FIG. 8 is a perspective view for explaining the maintenance work of the support bracket in the linear motion table device 1. In FIG. 8, only one support bracket portion is shown, and the other mechanism members are not shown. Yes.

According to the linear motion table device 1 having the above-described configuration, as shown in FIG. 8A, the ball screw 51 includes support brackets 54A and 54B in which both ends of the ball screw 51 in the axial direction are mounted on the base 2. Are supported by each.
Therefore, in the maintenance work, for example, when the ball screw 51 or the rolling bearing 52a or the like is replaced, for example, or when it is necessary to remove the support bracket, first, as shown in FIG. , 54B is removed. Next, as shown in FIG. 8C, the bolts 57a are removed and the support units 52A and 52B are removed.

  At this time, as shown in FIG. 8D, the support brackets 54A and 54B have an opening 55 that communicates with the mounting portion 54a and extends to the base mounting surface at the lower portion thereof. For this reason, the support brackets 54A and 54B can be removed in the direction directly above the axis of the ball screw 51 by removing the bolts of the support brackets 54A and 54B (the screw 59 shown in FIGS. 5 and 6). Therefore, even in the vacuum chamber 10 where a sufficient work space cannot be secured in the axial direction, the work of removing the support brackets 54A and 54B can be easily performed. That is, the support brackets 54A and 54B can be attached to and detached from the base 2 with the ball screw 51 attached. Therefore, even if the work space requiring maintenance is limited in the narrow vacuum chamber 10, for example, the replacement work of the ball screw 51 or the rolling bearing 52a can be performed efficiently.

  Here, the assembling work may be performed in the reverse order of the removal order. However, according to the linear motion table device 1, the mutual positions of the base 2 and the support brackets 54A and 54B are set to the support brackets 54A and 54B. The first processed surface 54p and the second processed surface 54r that are the contact portions of 54B are abutted against the first positioning surface 53p and the second positioning surface 53r that are the positioning portions of the positioning members 53A and 53B, respectively. , Can be determined by contact. Then, the first processed surface 54p and the second processed surface 54r, and the first positioning surface 53p and the second positioning surface 53r make the ball screw 51 parallel to the running direction in which the moving table 4 is moved. Each of them is processed with accuracy that can be installed. Thereby, even in the maintenance work in the narrow vacuum chamber, even a person who is not a professional engineer can easily carry out the work of reproducing the high-precision running accuracy of the moving table.

Further, according to the linear motion table device 1, the positioning members 53A and 53B position the support brackets 54A and 54B inside the flat plate portion 2a on the base 2 from the support brackets 54A and 54B. Therefore, the support brackets 54A and 54B can be pulled out in the axial direction only by removing the lock nut 56 and removing the set screws of the support brackets 54A and 54B. Further, mounting flanges 52e of the support units 52A and 52B are attached to the outside of the support brackets 54A and 54B. Therefore, the support units 52A and 52B can be easily attached and detached.
Further, by removing the support bracket 54A or the support bracket 54B, the ball screw 51 can be easily removed.

As described above, according to the linear motion table device 1 according to the present invention, the maintenance workability of the linear motion table device 1 installed in the vacuum chamber 10 can be improved. In particular, the workability of maintenance of the support brackets 54A and 54B of the linear motion table device 1 assembled in the vacuum chamber 10 can be improved.
Here, in the above-described embodiment, the positioning members 53A and 53B when the support brackets 54A and 54B are attached to the base 2 are positioned to make the positions of the ball screw 51 in the axial direction and the direction orthogonal to the axis desired positions. Although the configuration in which the parts are integrated has been described, the shape of the positioning member is not limited to this. Therefore, next, another example of the positioning member will be described.

  FIG. 9 is a diagram showing a second embodiment of the present invention, in which only the base 21, the support brackets 54A and 54B, and the positioning members are shown for ease of understanding, and the other mechanism members are the same. The illustration is omitted. In the second embodiment, only the configuration of the positioning member is different from that of the first embodiment described above, and the other configurations are the same, and thus the description other than the configuration of the positioning member is omitted.

  In this second embodiment, as a positioning member having a positioning portion for determining the relative position of the support brackets 54A and 54B with respect to the base 2 as shown in FIG. A square sesame 91 is provided. The square sesame 91 has a substantially cubic shape, and has through holes in the vertical direction, and the other side surface in which the through holes are not formed is finished with high accuracy. The square sesame 91 can be attached to a female screw (not shown) formed on the flat plate portion 21a by a set screw (not shown) that fixes the square sesame 91. As a result, if the three square sesame pieces 91 are brought into contact with and fixed to the support brackets 54A and 54B at the time of the initial assembly, the support brackets 54A and 54B are removed together with the ball screw 51 in the maintenance work. The side surface of the sesame 91 that has been finished with high accuracy functions as a positioning portion.

  According to such a configuration, the positioning member for determining the relative position at which the base 21 and the support brackets 54A and 54B are positioned at desired positions in the axial direction of the ball screw 51 and the direction orthogonal to the axis is provided with three square sesame 91. Can be formed. Therefore, since the processing surfaces of the support brackets 54A and 54B can be reduced and the contact portion with the positioning portion can be reduced, the reference surface can be simplified and the cost can be reduced. In the example shown in FIG. 9A, the example in which the positioning member is constituted by the three square sesame pieces 91 has been described. However, as a modification, for example, as shown in FIG. It can also be constituted by a shaped top 92.

Next, another example constituting the positioning unit will be further described.
FIG. 10 is a view showing a third embodiment of the present invention, in which only the structure related to the base 22, the support brackets 64A and 64B, and the positioning portion is shown for easy understanding, and other mechanisms are shown. Illustration of members is omitted. Note that the third embodiment differs from the first embodiment described above only in the configuration of the positioning portion, the mounting portion of the base 22 and the support brackets 64A and 64B, and the other configurations are the same. The description is omitted.

  In the third embodiment, a positioning member is not attached to the flat plate portion 22a on the upper surface of the base 22, as shown in FIG. In the third embodiment, instead of the positioning member on the flat plate portion 22a, a taper shape for driving the taper pin 81 in the vertical direction with respect to the mounting position of the support brackets 64A and 64B in the first embodiment. Is formed in the flat plate portion 22a on the upper surface of the base 22 as a first tapered hole 22g. Further, a tapered through hole is formed as a second tapered hole 64g in both sleeve portions of the support brackets 64A and 64B. The second taper hole 64g has the same taper angle as the taper pin 81, and is formed in the support brackets 64A and 64B so as to communicate with the first taper hole 22g.

  In the third embodiment, in order to determine the relative positions of the support brackets 64A and 64B with respect to the base 22, each of the first taper hole 22g and the second taper hole 64g has the same taper angle. A taper pin 81 having a tapered surface is provided. Regarding the formation of the first tapered hole 22g and the second tapered hole 64g, first, outside the vacuum chamber, the relative positions of the support brackets 64A and 64B with respect to the base 22 are adjusted in advance, The taper holes 22g and 64g, which are fixed by appropriate clamping means (four bolts 59 (not shown) screwed to the base 22 in the illustrated example) or the like and then aligned with the taper angle of the taper pin 81 by a taper reamer, etc. Perforated. When the support bracket 64A or the support bracket 64B is removed for maintenance or the like and reassembled, the taper pin 81 is easily inserted into the second taper hole 64g and the first taper hole 22g. Further, the support brackets 64A and 64B can be positioned at correct positions on the upper surface of the base 22, and can be fixed with bolts in this state.

  According to such a configuration, when the ball screw 51 is replaced in the maintenance work, for example, as shown in FIG. 5A, the first tapered hole 22g and the second taper 22g are removed even if the support brackets 64A and 64B are removed. By inserting the taper pin 81 in a state where the taper hole 64g is in communication, the mounting positions of the support brackets 64A and 64B can be reproduced as shown in FIGS. The taper pin 81 is formed with a female screw at the center of the head, and the male screw can be easily engaged with the female screw at the center of the head to remove the taper pin 81 in maintenance work. It is like that. Further, according to the third embodiment, the processing surface for determining the relative position between the base 22 and the support brackets 64A and 64B can be reduced, or the reference surface can be simplified to reduce the cost.

The linear motion table device according to the present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit of the present invention.
For example, in the maintenance work described above, the relative position of the support bracket with respect to the base simultaneously positions both the position in the axial direction of the ball screw and the position in the direction perpendicular to the axis of the ball screw. It is not limited to, and either one may be sufficient. However, in the maintenance work in a narrow vacuum chamber, even if it is not a professional engineer, the relative position of the support bracket with respect to the base is easy to carry out the work of reproducing the high-precision running accuracy of the moving table. It is desirable that both the position in the axial direction of the ball screw and the position in the direction orthogonal to the axis of the ball screw can be positioned simultaneously.
In the above-described embodiment, the moving table 4 is fixed on the slider 32 of the linear guides 3A and 3B and supported so as to be linearly movable with respect to the base 2. However, the present invention is not limited to this. You may support by a linear motion apparatus etc.

It is a perspective view which shows schematic structure of the linear motion table apparatus based on this invention. It is a front view of the linear guide shown in FIG. It is sectional drawing which shows a part of linear motion table apparatus of this invention. FIG. 2 is an X partial enlarged view of the support bracket shown in FIG. 1. It is a Y direction arrow directional view of the support bracket shown in FIG. It is a top view of the support bracket shown in FIG. It is a side view of the ball screw shown in FIG. It is a perspective view explaining the maintenance operation | work of the support bracket in the linear motion table apparatus based on this invention. It is a perspective view explaining 2nd embodiment of this invention. It is a perspective view explaining 3rd embodiment of this invention. It is a perspective view which shows the schematic structural example of the conventional linear motion table apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Linear motion table apparatus 2, 21, 22 Base 2a, 21a, 22a Flat plate part 3A, 3B Linear guide 4 Moving table 5 Moving mechanism 10 Vacuum chamber 22g First taper hole 51 Ball screw 51a Nut bracket 51b Nut 51c Screw shaft 51f Nut flange 52A, 52B, 64A, 64B Support unit 53A, 53B Positioning member 53p First positioning surface (positioning part)
53r Second positioning surface (positioning part)
54A, 54B Support bracket 54p First machining surface (contact part)
54r Second processed surface (contact portion)
55 Opening 56 Lock Nut 64g Second Taper Hole 81 Tapered Pin 91 Square Sesame DB Screw Shaft Outer Diameter WS Opening Width

Claims (3)

A linear motion table device installed in a vacuum chamber,
A base, a moving table supported so as to be linearly movable with respect to the base, a nut fixed to the moving table via a nut bracket, and a ball screw having a screw shaft for driving the nut in the axial direction; A support bracket for supporting a screw shaft on the base via a support unit;
The base is formed by attaching a positioning member on the upper surface of which a positioning portion for determining the position of the support bracket is formed,
The linear motion table device according to claim 1, wherein the support bracket has an abutting portion that abuts on a positioning portion formed on the positioning member to determine the position. A linear motion table device installed in a vacuum chamber,
A base, a moving table supported so as to be linearly movable with respect to the base, a nut fixed to the moving table via a nut bracket, and a ball screw having a screw shaft for driving the nut in the axial direction; A support bracket for supporting a screw shaft on the base via a support unit;
A taper pin, a first taper hole having the same taper angle as the taper pin and formed in the support bracket mounting position of the base, and the support bracket having the same taper angle as the taper pin. A second tapered hole formed so as to communicate with the tapered hole,
The mounting position of the support bracket on the base is determined by inserting the taper pin in a state where the first taper hole and the second taper hole are in communication with each other. Moving table device. The linear motion guide device according to claim 1 or 2,
The support bracket has an opening that allows passage of the screw shaft between a mounting port that penetrates in the axial direction of the screw shaft and a mounting surface for the base in order to mount the support unit. Direct acting table device.

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