JP2006090676A - Gas heating method, and gas to be heated passage forming member - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a gas heating method capable of improving heating efficiency when heating gas in a gas to be heated passage forming member body such as a pipe, and to provide a gas to be heated passage forming member providing easy implementation of the heating method. <P>SOLUTION: The gas to be heated passage forming member 1 comprises a hollow body 3 heated from the outside, and a heat insulating material 4 formed by a porous metal material 11 allowing passage of the gas to be heated through an interior and tightly inserted in a body 3 interior. The gas to be heated is led into an interior of the gas to be heated passage forming member 1, and the gas to be heated passage forming member 1 is heated by a heating means 2 from the outside. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a gas heating method for heating a gas used for manufacturing a semiconductor to a predetermined temperature, and a heated gas used for heating a gas used for manufacturing a semiconductor to a predetermined temperature. The present invention relates to a passage forming member.

  In piping used in semiconductor manufacturing equipment, it may be necessary to heat the gas to a predetermined processing temperature. For this reason, it is common practice to wind the pipe with a tape heater and heat the pipe from the outside. ing.

Further, Patent Document 1 describes a flexible pipe member having an improved heating, cooling or heat retaining effect as an inner / outer double pipe.
Japanese Utility Model Publication No. 1-91189

  In the conventional gas heating method, when the gas heating temperature is, for example, about 200 ° C. to 300 ° C., the required temperature cannot be obtained only by heating the pipe (heated gas passage forming member main body) from the outside. In addition, there is a problem in that the energy cost is high when the electric power of the heater is increased. Moreover, although the thing of patent document 1 is excellent in the heat retention effect, it cannot be said that it is enough with respect to the heating from the outside, and the further improvement is required.

  An object of the present invention is to enable a gas heating method capable of improving the heating efficiency when heating a gas in a heated gas passage forming member body such as a pipe, and to easily perform such a heating method. The object is to provide a heated gas passage forming member.

  According to the gas heating method of the present invention, a heated gas passage forming member is closely inserted into a heated gas passage forming member main body through which the heated gas is passed, and a heated gas passage forming member is allowed to pass therethrough. The main body is heated from the outside by a heating means.

  The heated gas passage forming member according to the present invention comprises a hollow main body heated from the outside, and a heat insulating material that is formed so that the heated gas can pass through the inside and is closely inserted into the main body. is there.

  In the gas heating method and heated gas passage forming member according to the present invention, the heated gas passage forming member main body is usually a pipe, but may be a block in which a pipe joint or a passage connecting the pipes is formed. . The heat insulating material may be formed from a porous metal material, and the heat insulating material may be formed from a porous metal material and a metal core material.

  As the porous metal material, a laminated body of cut and raised porous metal foil is preferable, but a porous metal sintered body obtained by heat-sintering a metal particle material containing a binder may be used, and the mesh may be arranged in the passage direction. It is good also as what laminated | stacked. In short, various materials can be used as the porous metal material as long as the thermal conductivity is high and a sufficient contact area with the gas is ensured. The metal is, for example, stainless steel that does not easily react with the gas to be heated, but may be copper or the like with emphasis on thermal conductivity, and may be titanium or other metals. The heating means is preferably a flexible heater called, for example, a micro heater, a tape heater, etc. In addition, various heating means that can be adapted to the contour shape of the heated gas passage forming member main body may be used. it can.

The cut-and-raised porous metal foil is a metal foil in which a large number of cut-and-raised parts are formed at predetermined vertical and horizontal intervals, and the thickness of the metal foil is preferably about 10 to 100 μm. One side of the hole is 200 to 700 μm, the other side of the hole is a square or rectangle of 200 to 700 μm, and the height (projection amount) is 200 to 600 μm. Further, the number of cuts is about 200 to 600 pieces / cm ² . The size and the number of the cut and raised are appropriately selected in consideration of the passage diameter, passage length, pressure loss and the like.

  When laminating the above-described cut-and-raised porous metal foil in a spiral shape, the metal foil of the adjacent layer is closely overlapped so that the tip of the cut-and-raise contacts the metal foil. In this case, a metal core material may be used. The length of the spiral laminated body of cut-up porous metal foil in the passage direction does not need to be the same as the length of the main body, and a plurality of laminated bodies are not spaced or spaced apart from each other in the main body. May be arranged in series. Since the spiral laminated body of the cut and raised porous metal foil can be obtained from one metal foil, it has excellent thermal conductivity, and when the heated gas passage forming member body is heated from the outside, Even the heat insulating material inside is heated to substantially the same temperature. The heated gas flows from one end of the heated gas passage forming member to the other end using the space formed between the adjacent cuts and the hole formed for the cut as a passage. The heated gas passage forming member is heated to a predetermined temperature.

  According to the gas heating method of the present invention, since the heat insulating material is closely inserted into the heated gas passage forming member main body such as a pipe, by heating the heated gas passage forming member main body from the outside, The heat of the heated gas passage forming member main body is conducted to the heat insulating material, and the heat insulating material is heated to substantially the same temperature as the heated gas passage forming member main body, and the heated gas passes through the heat insulating material. It is efficiently heated to a predetermined temperature. Therefore, even if the heating length of the heated gas passage forming member main body is made shorter than that without the heat insulating material, the same level of heating can be performed.

  Further, according to the heated gas passage forming member of the present invention, since the heat insulating material is closely inserted into the hollow main body, the heated gas passage forming member main body can be heated by heating the heated gas passage forming member main body from the outside. The heat is conducted to the heat insulating material, the heat insulating material is also heated to substantially the same temperature as the main body, and the heated gas is efficiently heated to a predetermined temperature while passing through the heat insulating material. Therefore, even if the heating length of the heated gas passage forming member main body is made shorter than that without the heat insulating material, the same level of heating can be performed.

  Embodiments of the present invention will be described below with reference to the drawings.

  1 and 2 show a heated gas passage forming member suitable for carrying out the gas heating method of the present invention.

  This heated gas passage forming member (1) includes a pipe body (3) heated from the outside by a tape heater (2) and the like, and a pipe body (3) formed of a porous metal material through which the heated gas can pass. 3) It consists of a heat insulating material (4) inserted closely inside.

  The heat insulating material (4) is formed by laminating porous metal foils (11) (thickness: 50 μm) with cut and raised portions (11a) in a spiral shape. Therefore, since it is formed of a single metal foil (11), it is very excellent in thermal conductivity, and the contact between adjacent layers by cutting up (11a) It is point contact instead of surface contact where the flat surfaces contact each other, and a sufficient gas passage gap is ensured and pressure loss is small. Such a porous metal foil (11) with cuts (11a) can be obtained, for example, by passing the metal foil material between a pair of rollers having a large number of protrusions on each cylindrical surface.

  A filter (5) is arranged at the outlet side end of the pipe body (3). The filter (5) is a metal filter, and the filter (5) receives heat from the tape heater (2), thereby preventing a temperature drop in the filter (5) portion.

  In FIG. 2, what is indicated by a two-dot chain line is a metallic core material (12), and the heat insulating material (4) is a porous metal material with a cut and raised portion (11a) as needed. It is composed of a metal foil (11) and a metal core material (12).

  FIG. 4 shows the measurement result of the temperature change when the gas flows through the heated gas passage forming member heated to 200 ° C. FIG. 3 shows a flow diagram of a test apparatus for performing this measurement. The test conditions are as follows: the test fluid is nitrogen gas, the primary side of the test pressure is 300 kPa, the secondary side is open to the atmosphere, and the test flow rate is 5 SLM. After raising the test line to the set temperature (200 ° C.), stability was confirmed and the temperature at the temperature measurement point was recorded.

  As shown in FIG. 3, the test apparatus uses a heated gas passage forming member (1) through a pressure reducing valve (21), a filter (22), a flow rate adjusting valve (23), and a mass flow meter (24). The gas temperature at the inlet of the heated gas passage forming member (1) and the gas temperature at the outlet are measured by the temperature sensor (26) ( It is possible to measure in 27). The heated gas passage forming member (1) is heated in a range of about 160 mm in length, and as a heating means, a micro heater manufactured by Sakaguchi Electric Heat Co., Ltd. (sheath diameter 1 mm, electric capacity 300 W, resistance 133.3Ω) is used. did.

  As can be seen from FIG. 4, in the case without the heat insulating material, the temperature rises only up to about 100 ° C. with respect to the external set temperature of 200 ° C. According to the heated gas passage forming member (1), the temperature is increased to about 150 ° C., and the heating efficiency is significantly increased.

  In addition, gas leakage from the center is prevented by adopting a configuration in which the laminated body of the porous metal foil (11) with the cut and raised (11a) is wound around the cylindrical metal core material (12). At the same time, the core material (12) itself retains heat, and the heating efficiency is improved.

FIG. 1 is a longitudinal sectional view showing an embodiment of a heated gas passage forming member according to the present invention. FIG. 2 is a cross-sectional view of the same. FIG. 3 is a flowchart showing the configuration of the test apparatus. FIG. 4 is a diagram showing a measurement result of temperature change.

Explanation of symbols

(1) Heated gas passage forming member
(2) Tape heater (heating means)
(3) Pipe body (heated gas passage forming member body)
(4) Heat insulation material
(11) Porous metal foil
(11a) Cut up
(12) Metal core

Claims (8)

  A heat insulating material through which the heated gas can pass is closely inserted into the heated gas passage forming member main body through which the heated gas passes, and the heated gas passage forming member main body is heated from outside by a heating means. A gas heating method characterized by:   The gas heating method according to claim 1, wherein the heat insulating material is formed of a porous metal material.   The gas heating method according to claim 1, wherein the heat insulating material is formed of a porous metal material and a metal core material.   The gas heating method according to claim 2 or 3, wherein the porous metal material is obtained by laminating porous metal foils having cut and raised portions in a spiral shape.   A heated gas passage forming member comprising a hollow main body heated from the outside, and a heat insulating material formed so that the heated gas can pass through the inside and intimately inserted inside the main body.   The heated gas passage forming member according to claim 5, wherein the heat insulating material is formed of a porous metal material.   The heated gas passage forming member according to claim 5, wherein the heat insulating material is formed of a porous metal material and a metal core material.   The member for forming a heated gas passage according to claim 6 or 7, wherein the porous metal material is formed by spirally laminating porous metal foils having cut and raised portions.

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