JP2006088552A - Standard lattice and its production method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To mass-produce a standard lattice detecting a position accurately by resin moloding. <P>SOLUTION: Since a reflecting surface angle lattice 32 integrated with a platen 34 can be molded by a resin molding mold 50, the lattice 32 thinned in the shape of a sheet can be mass-produced inexpensively. Since the lattice 32 integrated with the platen 34 is taken out from the mold 50 and can easily be fitted to a linear motor 18, the lattice 32 molded in the shape of a sheet can be fitted exactly, and the lattice 32 molded accurately can be prevented from being fitted in a distorted state. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a reference grating and a manufacturing method thereof, and more particularly to a reference grating constituting a two-dimensional angle grating that performs position detection with high accuracy and a manufacturing method thereof.

  In response to the high integration and low price of semiconductor devices that are the foundation of IT technology, there is an increasing demand for high productivity, high accuracy, high speed, and the like for semiconductor exposure apparatuses that manufacture semiconductor devices. A stage, which is a key component of a semiconductor exposure apparatus, is required to have a high-speed multi-degree-of-freedom transfer positioning function having an accuracy of around 10 nm and a moving range of several hundred mm to several thousand mm. Therefore, it is necessary to precisely measure the multi-degree-of-freedom position and orientation of the stage and feed back the result to control the positioning of the stage.

  As a conventional stage position measurement method, an optical linear encoder, a laser length measuring device, an autocollimator, or the like has been generally used. These are basically based on the one-dimensional length or posture measurement, and the position or posture is measured by a combination of a plurality of axes.

  Laser interferometers used for high-accuracy measurement measure the position of the stage (positioning object) using laser light, so measurement is based on air fluctuations in the device where the stage is placed. There was a problem that the accuracy of the value of was lowered. In addition, in a laser interferometer, optical components can be placed only outside (around) the stage, and it is necessary to mount a metal pipe serving as a laser optical path in each direction in order to prevent air fluctuations. Therefore, there is a problem that the entire stage apparatus becomes large and the configuration becomes complicated.

  Further, when the stage rotates about the Z axis, there is a problem that the reflected light from the stage is detached from the light receiving portion of the interferometer, and the position in the XY directions cannot be detected. As a detection apparatus that solves such a problem, a surface encoder that irradiates a reference grating (angle grating) with laser light and detects reflected light reflected by the reference grating with a two-dimensional angle sensor in the XY direction; There is what is called (see, for example, Patent Document 1).

Here, in the reference grating (two-dimensional angular grating) having a three-dimensional fine concavo-convex pattern used as a measurement reference plane, an ultra-precision fine concavo-convex pattern having a sine wavelength of the order of 100 μm and an amplitude of the order of 100 nm is accurately obtained. It is desired to be formed. Moreover, the fine uneven | corrugated shaped pattern formed in the surface of a reference | standard grating | lattice is processed by carrying out fine processing with the machine tool using a fine cutting tool, for example.
JP 2003-22959 A

  However, in the method of finely processing the fine concavo-convex pattern of the reference grating with a machine tool, the sinusoidal concave and convex portions are processed one by one, and the sine wavelength is on the order of 100 μm and the amplitude is on the order of 100 nm. Since it is necessary to process the concavo-convex shape with high accuracy, it takes a considerable time to process the entire reference lattice, which is not suitable for mass production.

  When a surface encoder is used as the position detector of the stage device, the total length of the reference grating needs to be extended to about 2 m to 3 m depending on the size of the workpiece. In particular, the sine wavelength is on the order of 100 μm, and the amplitude is When precise processing conditions such as forming an uneven shape of the order of 100 nm are required, it is difficult to form a fine uneven shape pattern.

  Therefore, an object of the present invention is to provide a reference grid and a method for manufacturing the same that solve the above problems.

  In order to solve the above problems, the present invention has the following means.

  The invention according to claim 1 is a reference grid manufacturing method for manufacturing a reference grid having a predetermined fine concavo-convex pattern formed on a surface thereof, wherein a resin is formed in a molding space of the molding die having the fine concavo-convex pattern. A step of injecting a material, a step of curing the resin material injected into the molding space by heating the molding die to a predetermined temperature, and a lid member for closing the molding space of the molding die And a step of releasing the bonded resin molded product from the molding die together with the lid member.

  The invention according to claim 2 is characterized in that the lid member is an attachment base for attaching the resin molded product to a position detector.

  The invention according to claim 3 is characterized by comprising a step of forming a light reflecting metal film on the surface of the fine concavo-convex pattern transferred to the surface of the resin molded product.

  The invention described in claim 4 is characterized in that it includes a step of forming a light reflecting metal film on the surface of the lid member facing the molding space.

  The invention according to claim 5 is characterized in that CHF3 plasma treatment is performed on the fine uneven pattern formed on the inner wall of the molding die.

  The invention according to claim 6 is a step of laminating a glass layer on the surface of the lid member, a step of polishing and flattening the surface of the glass layer, and forming a light reflecting metal film on the surface of the glass layer. And a step of forming the resin thin film on the surface of the light reflecting metal film.

  The invention according to claim 7 is a step of laminating a glass layer on the surface of the lid member, a step of polishing and flattening the surface of the glass layer, and a step of forming the resin thin film on the surface of the glass layer. And a step of forming a light reflecting metal film on the surface of the resin thin film.

The invention according to claim 8 is a substrate integrally provided with the stator of the motor;
A resin member provided on the base material, with a fine uneven shape pattern formed on the surface,
A light reflecting film that is formed on the upper surface of the base material or the surface of the resin member and reflects position detection light emitted from a position detection light sensor provided on a moving body that moves together with the mover of the motor; It is characterized by having.

  According to the present invention, a step of injecting a resin material into a molding space of a molding die having a fine uneven shape pattern, and a resin material injected into the molding space by heating the molding die to a predetermined temperature And a step of releasing the resin molded product adhered to the lid member that closes the molding space of the molding die from the molding die together with the lid member. In addition, it is possible to mass-produce a thin reference grid at a low cost, and it is possible to relatively easily mold a resin thin film having a precise fine concavo-convex shape pattern.

  Furthermore, since it becomes possible to take out the reference grid integrated with the lid member from the molding die as it is and attach it, the molded reference grid can be accurately attached and molded with high accuracy. It is possible to prevent the reference grid from being attached in a distorted state.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a plan view showing main components of a stage apparatus to which a detection apparatus having a reference grating according to the present invention is applied.
As shown in FIG. 1, the stage device 10 is provided with a base 12, a Y stage 14 provided so as to be movable in the Y direction with respect to the base 12, and mounted on the Y stage 14 so as to be movable in the X direction. The X stage 16, the pair of guide rails 18 that guide the sliders 22 disposed at both ends of the Y stage 14, the pair of Y-direction linear motors 24 that drive the Y stage 14, and the X direction that drives the X stage 16 It has a linear motor (not shown). The linear motor 24 includes a stator (not visible in FIG. 1) provided on the guide rail 18 and a movable element (not visible in FIG. 1) provided on the slider 22. The slider 22 is moved by using the thrust generated between the child and the driving force.

  Further, a reflection type detection device 26 is attached to the guide rail 18 and the slider 22 as position detecting means for detecting the moving position of the slider 22 relative to the guide rail 18. The reflection type detection device 26 is configured to accurately measure the displacement of the slider 22 with respect to the guide rail 18 using an optical sensor. Details of the reflection type detection device 26 will be described later.

  The detection signal detected by the reflection type detection device 26 is subjected to coordinate conversion by the coordinate converter 27 and input to the control device 28. The control device 28 includes calculation means (control program) that calculates a control amount that is set in advance and is supplied to the linear motor 24 based on an arithmetic expression, and outputs a control signal obtained by the calculation to each of the servo amplifiers 29a to 29c. Output to. The drive signals amplified by the servo amplifiers 29a to 29c are supplied to the Y-direction linear motor 24 and the X-direction linear motor, and the Y-direction linear motor 24 and the X-direction linear motor are based on this drive signal. The X stage 16 is driven.

  Further, the reflection type detection device 26 can detect the displacement of the Y stage 14 in the X and Y directions and the tilt angle in each direction by the position detection principle described later. Therefore, the control device 28 can drive the linear motor 24 with high precision so that the Y stage 14 does not tilt based on the detection data in each direction detected by the reflection type detection device 26.

FIG. 2 is a longitudinal sectional view of the configurations of the Y-direction linear motor 24 and the reflection type detection device 26 as seen from the front. FIG. 3 is a side view showing configurations of the Y-direction linear motor 24 and the reflection type detection device 26.
As shown in FIGS. 2 and 3, the slider 22 has a U-shaped cross section, and the mover 40 of the linear motor 24 is attached to the inner wall facing the reflecting surface angle grating 32. The mover 40 has a coil 38 molded therein, and drives the slider 22 by electromagnetic force generated from the coil 38.

  On the other hand, a platen 34 as a base material of the reflecting surface angle grating 32 is fixed to the upper surface of the guide rail 18. The platen 34 is made of stainless steel or the like, and a SUS magneton 34a as a stator of the linear motor 24 is formed on the upper surface. The SUS magnetic element 34a is formed into a block having a square of 1 mm pitch and a width of 0.5 mm, and the SUS magnetic element 34a is filled with an epoxy resin 34b.

  The reflection type detection device 26 includes a reflection surface angle grating 32 attached to the upper surface of the guide rail 18 together with a platen (base material) 34, and an optical sensor unit (position detection optical sensor) 36 attached to the slider 22. Have.

  The reflecting surface angle grating 32 is integrally provided on a flat platen 34 used as a lid member of a molding die. Therefore, the platen 34 is also used as a mounting base for the reflecting surface angle grating 32 formed in a thin film shape.

  The reflection surface angle grating 32 has a fine uneven pattern formed on the detection surface 32a. In this fine concavo-convex pattern, sinusoidal concave curved surfaces and convex curved surfaces are alternately arranged two-dimensionally as described later.

  The optical sensor unit 36 is provided at the end of the slider 22 so as to irradiate the detection surface 32 a of the reflection surface angle grating 32 with a laser beam for position detection. The reflection angle of the laser light reflected from the reflection surface angle grating 32 changes as the irradiation position of the detection surface 32a with respect to the concave or convex surface changes. The optical sensor unit 36 receives the laser beam reflected from the reflecting surface angle grating 32, detects the displacement of the light receiving spot, and measures the displacement amount of the slider 22 with respect to the reflecting surface angle grating 32.

  As described above, in the reflection type detection device 26, since the detection surface 32 a of the reflection surface angle grating 32 faces the slider 22, the movement of the slider 22 can be directly detected by the optical sensor unit 36. Therefore, it is possible to accurately detect the movement position of the Y stage 14 that is driven to the right.

Here, the configuration of the reflective detection device 26 used as a reflective surface encoder will be described with reference to FIGS.
FIG. 4 is a perspective view showing the position detection principle of the reflection type detection device 26. FIG. 5 is a diagram showing a schematic configuration of the optical sensor unit 36. FIG. 6 is a perspective view showing a schematic configuration of the reflection type detection device 26.

  As shown in FIG. 4, the reflecting surface angle grating 32 has a fine concavo-convex pattern in which sinusoidal concave curved surfaces and convex curved surfaces that change with a known function in the X direction and the Y direction are aligned. In the reflection type detection device 26, the fine uneven pattern of the reflection surface angle grating 32 is irradiated with laser light, and the position in the XY directions is detected by the output change of the two-dimensional angle sensor that receives the reflected light.

  As a principle of position detection by the optical sensor unit 36 here, a method of optically detecting the displacement of the light receiving spot of the reflected light from the fine uneven pattern formed on the surface of the reflecting surface angle grating 32 is used. . That is, when the slider 22 is driven, the optical sensor unit 36 detects the change in the normal direction of the reflected light from the detection surface 32a of the reflection surface angle grating 32, thereby the slider 22 with respect to the reflection surface angle grating 32. The amount of movement in the Y direction can be measured.

  Next, the configuration of the optical sensor unit 36 will be described with reference to FIG. The optical sensor unit 36 is a two-dimensional angle sensor composed of a geometric optical sensor based on an autocollimation method.

  As shown in FIG. 5, the laser light 39 a irradiated from the laser light source 36 a of the optical sensor unit 36 passes through the polarization beam splitter 36 b and the quarter wavelength plate 36 c and enters the surface of the reflecting surface angle grating 32. . The laser beam 39 b reflected by the surface of the reflecting surface angle grating 32 is reflected by the polarization beam splitter 36 b, and the laser beam 39 b enters the autocollimator 37. The autocollimator 37 includes an objective lens 36d and a detector 36e that detects a spot position. The detector 36e outputs a detection signal corresponding to the light receiving spot position of the laser light 39b reflected by the reflecting film 32b on the surface of the reflecting surface angle grating 32.

As shown in FIG. 6, in the reflection type detection device 26, a reflection surface angle grating (reference grating) 32 that extends in the moving direction of the Y stage 14 and a reflection surface angle grating 32 that is a resin molded part are integrated. And a platen 34, and a photosensor unit 36 that emits a plurality of parallel lights 42 _{1 to} 42 _n toward the reflecting surface angle grating 32 and receives the reflected light. In the reflection surface angle grating 32, a reflection film (light reflection metal film) 32b formed by aluminum vapor deposition is formed on the surface of the detection surface 32a having a fine uneven pattern. The optical sensor unit 36, by emitting light toward a plurality of parallel light ₄₂ 1 through 42 _n to the reflection film 32b of the detection surface 32a, for receiving a plurality of reflected light reflected by the reflection film 32b, the movable portion 40 The amount of displacement and the direction of displacement are detected based on the transition of the light intensity distribution of the reflected light accompanying the movement of.

Further, the reflection type detection device 26 has a Y-direction moving position of the slider 22 as a main detection target, receives reflected light of a plurality of parallel lights 42 _{1 to} 42 _n , and moves in a moving direction ( The configuration is such that the vertical direction (Z direction) and the angles θx, θy, and θz around each axis, which cause motion errors with respect to directions other than the Y direction, can also be detected simultaneously.

  The reflection surface angle grating 32 is integrated with the platen 34 at the time of molding as will be described later. For this reason, the reflection surface angle grating 32 formed in a thin sheet shape is not distorted in the attachment work process, and can be attached in the adhesive state at the time of molding.

  Further, the platen 34 functions as a lid member for a resin molding die described later, and serves as both a mold for molding resin and a mounting base. In the present embodiment, a silicon resin such as polydimethylsiloxane (PDMS) is used as a resin material for molding the transparent body angle grating 30.

  Since this resin material called PDMS is a kind of silicon resin and has good shape transferability, it is possible to accurately transfer submicron shapes, and it has good transparency and fluidity and good self-adhesion. Therefore, PDMS is a resin material suitable for resin molding of the transparent body angle lattice 30 using a resin molding die. In addition, PDMS is added with a curing agent that promotes polymerization when heated to a predetermined temperature.

Here, each process of the manufacturing method of the transparent body angle grating | lattice 32 is demonstrated with reference to FIG. 7 (A)-(E).
As shown in FIG. 7A, in step 1A, a resin material (PDMS) 68 is injected from an injection device 54 communicated with the injection port 52 of the resin molding die 50. The resin molding die 50 has a configuration in which an upper die 56 and a lower die 58 are coupled by a fastening member 60, and a transfer master 62 for transferring a fine concavo-convex pattern is attached to the inside of the lower die 58. ing. Above the transfer master 62, a platen 34 that is detachably fastened to the upper die 56 is disposed so as to be opposed to each other through a minute gap.

  The transfer master 62 is formed of a flat plate, and a fine uneven pattern 62a similar to the detection surface 32a is processed on the upper surface by a single point diamond bite. Further, the surface of the fine concavo-convex pattern 62a is subjected to trifluoromethane (CHF3) plasma treatment, and a CHF3 thin film (film thickness of about 50 nm) is formed so that the resin material 68 can be easily released. Yes. Therefore, it is possible to easily release the resin material transferred from the fine uneven pattern 62a after resin molding.

  In the present embodiment, in order to prevent the efficiency of the linear motor 18 from decreasing, the gap between the fine concavo-convex pattern 62a and the platen 34 is set to 0.1 mm, and the reflecting surface angle grating 32 is formed as thin as possible. The molding space 64 by this gap becomes a cavity for resin molding into which the resin material 68 is injected. Therefore, in the injection device 54, the resin material 68 is pressurized at a predetermined pressure and injected into the molding space 64 formed by a narrow gap.

  As shown in FIG. 7B, the resin material injected from the injection port 52 in this way is filled in the molding space 64. Then, the injection process of the resin material 68 by the injection device 54 is performed until the resin material 68 flows out from the outflow port 66 separated from the injection port 52.

  In the next step 2A, the resin molding die 50 is heated to a predetermined temperature (for example, about 80 ° C.) according to the curing agent added to the resin material 68 filled in the molding space 64. As a result, the resin material 68 filled in the molding space 64 of the resin molding die 50 is cured. At this time, since the resin material 68 has self-adhesiveness, it is integrated with the platen 34 incorporated as a lid member of the upper die 56.

  As shown in FIG. 7C, in the next step 3A, the reflection surface angle grating 32 molded by the resin molding die 50 is taken out. In this extraction step, the reflection surface angle grating 32 is extracted together with the platen 34 and the transfer master 62. Therefore, the thin sheet-like reflecting surface angle grating 32 is taken out from the resin molding die 50 while being in close contact with the surface of the platen 34, and is prevented from being distorted or wrinkled in the taking out process. The

  As shown in FIG. 7D, in the next step 4A, the reflecting surface angle grating 32 is released from the transfer master 62. At this time, since PDMS is a resin material having self-adhesiveness, it is in close contact with the fine uneven pattern 62a of the transfer master 62, but the surface of the fine uneven pattern 62a is treated with trifluoromethane (CHF3) plasma. Therefore, the reflecting surface angle grating 32 can be separated from the fine concavo-convex pattern 62a relatively easily.

  Subsequently, in the next step 5 </ b> A, the peripheral portion of the reflecting surface angle grating 32 protruding from the platen 34 is cut and removed by the cutter 70. Thereby, the reflecting surface angle grating 32 to which the fine uneven shape pattern 62a is transferred by the transfer master 62 is obtained.

  As shown in FIG. 7E, in the next step 6A, aluminum is deposited on the detection surface 32a having the fine concavo-convex pattern while being integrated with the platen 34 to form the reflection surface 32b. Thus, the reflection surface angle grating 32 in which the reflection surface 32b is laminated on the surface of the detection surface 32a is obtained.

  As described above, in the first embodiment, the reflecting surface angle grating 32 integrated with the platen 34 can be molded by the resin molding die 50. Therefore, the reflecting surface angle grating 32 thinned into a sheet shape. Can be mass-produced at low cost, and the reflecting surface angle grating 32 can be taken out from the resin molding die 50 in an integrated state with the platen 34 and easily attached to the linear motor 18. It is possible to accurately attach the reflecting surface angle grating 32 molded into a shape, and to prevent the reflecting surface angle grating 32 molded with high accuracy from being attached in a distorted state.

FIG. 8 is a perspective view showing a reference grid of the second embodiment. In FIG. 8, the same parts as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.
As shown in FIG. 8, the reflection type detection device 80 includes a transparent body angle grating (reference grating) 82 that extends in the moving direction of the first stage 14, and a reflection integrated with the transparent body angle grating 82. A platen 34 having a surface (a metal film for light reflection) 84 and an optical sensor unit 36 that emits a plurality of parallel lights toward the transparent angle grating 82 and receives the reflected light from the reflection surface 84 are provided. Then, the optical sensor unit 36 emits a plurality of parallel lights 42 _{1 to} 42 _n toward the detection surface 82 a of the transparent body angular grating 82, transmits the transparent body angular grating 82, and reflects the plurality of reflected lights on the reflecting surface 84. By receiving the reflected light, the displacement amount and the displacement direction are detected based on the transition of the light intensity distribution of the reflected light accompanying the movement of the movable portion 40.

  Further, the transparent angle grating 82 is integrated with the reflecting surface 84 of the platen 34 at the time of molding as will be described later. Therefore, the transparent body angle grating 82 formed in a thin sheet shape is not distorted in the attaching operation process, and can be attached as a unit.

  Thus, in the reflection type detection device 80, since the transparent body angle grating 82 is bonded to the platen 34, the detection surface 82a of the transparent body angle grating 82 faces the optical sensor unit 36, and the optical sensor unit 36 Thus, it is possible to accurately detect the X direction, the Y direction, and the angles θx, θy, and θz around each axis of the first stage 14 driven by the linear motor 18.

Here, each process of the manufacturing method of the transparent body angle grating | lattice 82 is demonstrated with reference to FIG. 9 (A)-(F).
As shown in FIG. 9A, in step 1B, aluminum is deposited on the surface of the platen 34 to form a reflecting surface (light reflecting metal film) 84.

  As shown in FIG. 9B, in the step 2B, the resin material (PDMS) 68 from the injection device 54 communicated with the injection port 52 of the resin molding die 50 is the same as in the step 1A of the first embodiment. Inject.

  As shown in FIG. 9C, the resin material injected from the injection port 52 in this way is filled in the molding space 64. Then, the injection process of the resin material 68 by the injection device 54 is performed until the resin material 68 flows out from the outflow port 66 separated from the injection port 52.

  In the next step 3B, the resin molding die 50 is heated to a predetermined temperature (for example, about 80 ° C.) according to the curing agent added to the resin material 68 filled in the molding space 64. As a result, the resin material 68 filled in the molding space 64 of the resin molding die 50 is cured. At this time, since the resin material 68 has self-adhesiveness, it is integrated with the reflecting surface 84 of the platen 34 incorporated as a lid member of the upper mold 56.

  As shown in FIG. 9D, in the next step 4B, the transparent body angle lattice 82 molded by the resin molding die 50 is taken out. In this extraction step, the transparent body angle grating 82 is extracted together with the platen 34 and the transfer master 62. Accordingly, the thin sheet-like transparent body angle grating 82 is taken out from the resin molding die 50 while being integrated with the platen 34, and is prevented from being distorted or wrinkled in the taking-out process. .

  As shown in FIG. 9E, in the next step 5B, the transparent body angle grating 82 is released from the transfer master 62. At this time, since PDMS is a resin material having self-adhesiveness, it is in close contact with the fine uneven pattern 62a of the transfer master 62, but the surface of the fine uneven pattern 62a is treated with trifluoromethane (CHF3) plasma. Therefore, the transparent body angle grating 82 can be separated from the fine concavo-convex pattern 62a relatively easily.

  Subsequently, in the next step 6 </ b> B, the peripheral edge portion of the transparent body angle grating 82 protruding from the platen 34 is cut and removed by the cutter 70. As a result, as shown in FIG. 9F, a transparent body angle grating 82 having the fine uneven pattern 62a transferred by the transfer master 62 is obtained.

  The third embodiment is a modification of the first embodiment configured to adhere the reflecting surface angle grating 32 to the surface of the platen 34 described above. Hereafter, each process of the manufacturing method of Example 3 is demonstrated with reference to FIG. 10 (A)-(D).

As shown in FIG. 10A, in step 1C, a glass layer 90 is laminated on the surface of the platen 34. The surface of the platen 34 protrudes from the SUS magnetic element 34a blocked as described above, and the periphery of the SUS magnetic element 34a is filled with an epoxy resin 34b. The glass layer 90 is laminated on the surface of the epoxy resin 34b. In this state, the surface of the glass layer 90 is not flat and has an uneven shape due to the presence or absence of the SUS magnetic element 34a. The glass layer 90 is made of quartz glass (SiO ₂ ) or water glass.

  As shown in FIG. 10B, in step 2C, the surface of the glass layer 90 is polished by a polishing machine 92. The glass layer 90 is polished until it has a thickness of about several tens of μm, and its surface is processed. As a result, the surface of the glass layer 90 is flattened into a planar state that is not affected at all by the uneven shape due to the presence or absence of the SUS magnetic element 34a.

  As shown in FIG. 10C, in step 3C, the reflecting surface angle grating 32 is bonded to the surface of the glass layer 90. The reflecting surface angle grating 32 is molded by the molding method using the resin molding die 50 of Example 1 described above (see FIGS. 7A to 7D).

  As shown in FIG. 10D, in step 4C, the detection surface 32a of the reflection surface angle grating 32 is subjected to aluminum vapor deposition to form the reflection surface 32b. As a result, the reflection surface angle grating 32 is obtained in which the reflection surface 32b is laminated on the surface of the detection surface 32a which is not affected by the uneven shape due to the presence or absence of the SUS magnetic element 34a.

  Thus, in Example 3, since the reflecting surface angle grating 32 is adhered to the flattened surface of the glass layer 90, the flatness of the mounting surface of the reflecting surface angle grating 32 becomes high accuracy, and the detection surface 32a and The reflecting surface 32b is attached with the accuracy as designed.

  The fourth embodiment is a modification of the second embodiment configured to adhere the transparent angle grating 82 to the surface of the platen 34 described above. Hereafter, each process of the manufacturing method of Example 4 is demonstrated with reference to FIG. 11 (A)-(D).

  As shown in FIG. 11A, in step 1D, a glass layer 90 is laminated on the surface of the platen 34. In this state, the surface of the glass layer 90 is not flat and has an uneven shape due to the presence or absence of the SUS magnetic element 34a.

  As shown in FIG. 11B, in step 2D, the surface of the glass layer 90 is polished by a polishing machine 92. The glass layer 90 is polished until it has a thickness of about several tens of μm, and its surface is processed. As a result, the surface of the glass layer 90 is flattened into a planar state that is not affected at all by the uneven shape due to the presence or absence of the SUS magnetic element 34a.

  As shown in FIG. 11C, in step 3D, the reflective surface 84 is formed by performing aluminum vapor deposition on the surface of the glass layer 90.

  As shown in FIG. 11D, in step 4C, the transparent angle grating 82 is bonded to the reflecting surface 84 of the platen 34. The transparent body angle grating 82 is molded by a molding method using the resin molding die 50 of Example 2 described above (see FIGS. 8B to 8F). Thereby, the reflective surface 84 and the transparent body angle grating 82 which are not affected by the uneven shape due to the presence or absence of the SUS magnetic element 34a are obtained.

  Thus, in Example 4, since the reflective surface 84 is formed on the flattened surface of the glass layer 90, the flatness of the mounting surfaces of the reflective surface 84 and the reflective surface angle grating 32 becomes high accuracy, and the reflective surface 84 and the reflecting surface angle grating 32 are attached with the accuracy as designed.

It is a top view which shows the main components of the stage apparatus with which the detection apparatus which has the reference | standard grating | lattice which becomes this invention was applied. It is the longitudinal cross-sectional view which looked at the structure of the Y direction linear motor 24 and the reflection type detection apparatus 26 from the front. FIG. 3 is a side view showing configurations of a Y-direction linear motor 24 and a reflection type detection device 26. It is a perspective view which shows the position detection principle of the reflection type detection apparatus. FIG. 3 is a diagram showing a schematic configuration of an optical sensor unit 36. 3 is a perspective view showing a schematic configuration of a reflection type detection device 26. FIG. It is process drawing for demonstrating each process of the manufacturing method of the reflective surface angle grating | lattice 32. FIG. FIG. 6 is a perspective view showing a reference grid of Example 2. FIG. 10 is a process diagram for describing each process of the manufacturing method of Example 2. FIG. 10 is a process diagram for describing each process of the manufacturing method of Example 3. It is process drawing for demonstrating each process of the manufacturing method of Example 4. FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Stage apparatus 12 Base 14 Y stage 16 X stage 18 Guide rail 22 Slider 24 Linear motor 26 Reflection type detection apparatus 32 Reflection surface angle grating 32a Detection surface 32b Reflection film 34 Platen 36 Optical sensor unit 38 Coil 40 Movable element 50 For resin molding Mold 52 Inlet 54 Injection device 56 Upper die 58 Lower die 62 Transfer master 62a Fine uneven pattern 64 Molding space 68 Resin material 80 Reflection type detection device 82 Transparent body angle grating 84 Reflecting surface 90 Glass layer 92 Polishing machine

Claims (8)

A reference lattice manufacturing method for manufacturing a reference lattice having a predetermined fine uneven shape pattern formed on a surface,
Injecting a resin material into the molding space of the molding die having the fine uneven shape pattern;
Curing the resin material injected into the molding space by heating the molding die to a predetermined temperature;
Releasing the resin molded product bonded to the lid member closing the molding space of the molding die from the molding die together with the lid member;
A method for manufacturing a reference grid, comprising:   The reference grid manufacturing method according to claim 1, wherein the lid member is an attachment base for attaching the resin molded product to a position detector.   The method for producing a reference lattice according to claim 1, further comprising a step of forming a light reflecting metal film on the surface of the fine concavo-convex pattern transferred to the surface of the resin molded product.   4. The method for manufacturing a reference grid according to claim 1, further comprising a step of forming a light reflecting metal film on a surface of the lid member facing the molding space.   5. The reference grating manufacturing method according to claim 1, wherein a CHF 3 plasma treatment is performed on the fine concavo-convex pattern formed on the inner wall of the molding die. Laminating a glass layer on the surface of the lid member;
Polishing and flattening the surface of the glass layer;
Forming a light reflecting metal film on the surface of the glass layer;
Forming the resin thin film on the surface of the light reflecting metal film;
The method for manufacturing a reference grid according to claim 1, wherein: Laminating a glass layer on the surface of the lid member;
Polishing and flattening the surface of the glass layer;
Forming the resin thin film on the surface of the glass layer;
Forming a light reflecting metal film on the surface of the resin thin film;
The method for manufacturing a reference grid according to claim 1, wherein: A base material provided integrally with the stator of the linear motor;
A resin member provided on the base material, with a fine uneven shape pattern formed on the surface,
A light reflecting film that reflects the position detection light that is formed on the upper surface of the base material or the surface of the resin member and that is irradiated from a position detection light sensor provided on a moving body that moves with the mover of the linear motor;
A reference grid characterized by comprising: