JP2006079868A - Electron microscope - Google Patents

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JP2006079868A
JP2006079868A JP2004260376A JP2004260376A JP2006079868A JP 2006079868 A JP2006079868 A JP 2006079868A JP 2004260376 A JP2004260376 A JP 2004260376A JP 2004260376 A JP2004260376 A JP 2004260376A JP 2006079868 A JP2006079868 A JP 2006079868A
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secondary electron
electron
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detection signal
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JP4613554B2 (en
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Michiya Yamaguchi
道也 山口
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Casio Computer Co Ltd
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<P>PROBLEM TO BE SOLVED: To realize an electron microscope having a simple structure and being low cost, where the electron microscope can provide observation of a three-dimensional image of the ruggedness on a sample surface. <P>SOLUTION: When the whole surface of a sample 6 is irradiated with an electron beam 8 injected from an electron gun 7 in a form of shower, secondary electrons 15 are emitted from the whole surface of the sample 6. The secondary electrons 15, emitted from the small area 6a of the surface of the sample 6, are detected by a secondary electron emitting detector for a left eye 13 and a secondary electron emitting detector for a right eye 14, with a fixed parallax between left and right. When a display panel for the left eye and a display panel for the right eye are observed via an observation window for a left eye 22 and an observation window for a right eye 23 of observation glasses 4, at the same time; the display panels are set in the backs of the observation windows, respectively, the three-dimensional image of pits and projections in the small area 6a of the surface of the sample 6 is captured. If an operator manipulates the operation rod 11 of a joystick 3, while watching the three-dimensional image, then a secondary electron detector 9 is simply shifted in the desired direction, and the operator can observe the three-dimensional image of the pits and projections of the small areas in a raw in the desired direction, from the one small region 6a on the surface of the sample 6. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

この発明は電子顕微鏡に関し、特に、試料表面から放出される２次電子に基づいて試料表面の凸凹の立体的な画像を観察することができる電子顕微鏡に関する。   The present invention relates to an electron microscope, and more particularly to an electron microscope capable of observing a three-dimensional image of unevenness on a sample surface based on secondary electrons emitted from the sample surface.

従来の電子顕微鏡には、電子銃から射出された電子線を集束レンズ及び対物レンズによって細く絞った電子線とし、この電子線を試料表面の点的な微小領域に照射し、試料表面の微小領域から放出される２次電子を２次電子検出器で検出し、試料が載置された試料台を微小移動手段で３次元的に精密に微小移動させることにより、精密な３次元走査を可能とし、２次電子検出器からの２次電子検出信号及び３次元走査データに基づいて演算部で試料表面の凸凹の立体画像データを演算し、この演算結果による立体画像データに応じた試料表面の凸凹の立体画像をモニターテレビに表示させるようにしたものがある（例えば、特許文献１参照）。   In a conventional electron microscope, an electron beam emitted from an electron gun is thinly focused by a focusing lens and an objective lens, and this electron beam is irradiated onto a small spot area on the sample surface. Secondary electrons emitted from the sensor are detected by a secondary electron detector, and the sample stage on which the sample is placed is moved minutely in a three-dimensional manner by a minute moving means, thereby enabling precise three-dimensional scanning. Based on the secondary electron detection signal from the secondary electron detector and the three-dimensional scanning data, the calculation unit calculates the three-dimensional image data of the sample surface unevenness, and the sample surface unevenness according to the three-dimensional image data based on the calculation result Are displayed on a monitor television (for example, see Patent Document 1).

特開平８−２１２９５９号公報JP-A-8-212959

ところで、上記従来の電子顕微鏡では、電子銃から射出された電子線を細く絞った電子線として試料表面の点的な微小領域に照射させるための集束レンズ及び対物レンズが必要であり、また試料台を３次元的に精密に微小移動させるための比較的高価なピエゾ素子を含む微小移動手段が必要であり、さらに２次電子検出器からの２次電子検出信号及び３次元走査データに基づいて試料表面の凸凹の立体画像データを演算するための比較的高価な演算部が必要であり、全体として構成が複雑でコスト高となってしまうという問題があった。   By the way, the conventional electron microscope requires a focusing lens and an objective lens for irradiating a pointed minute region on the sample surface as an electron beam narrowed down from an electron gun. Is required to include a relatively expensive piezo element for precisely moving the sample three-dimensionally, and a sample based on the secondary electron detection signal and the three-dimensional scanning data from the secondary electron detector. There is a need for a relatively expensive calculation unit for calculating the three-dimensional image data of the surface unevenness, and there is a problem that the configuration is complicated and expensive as a whole.

そこで、この発明は、構成が簡単でコストを低減することができる電子顕微鏡を提供することを目的とする。   SUMMARY OF THE INVENTION An object of the present invention is to provide an electron microscope that has a simple configuration and can reduce costs.

この発明は、上記目的を達成するため、試料表面から２次電子を放出させる電子ビーム発生手段と、前記試料表面から放出された２次電子を取り込み、２次元型の左目用２次電子検出信号及び右目用２次電子検出信号を出力する２次元型の２次電子検出手段と、前記２次電子検出手段を移動させる移動手段と、前記２次電子検出手段からの左目用２次電子検出信号及び右目用２次電子検出信号に基づいて左目用画像及び右目用画像を表示する立体表示手段とを備えていることを特徴とするのである。   In order to achieve the above object, the present invention provides an electron beam generating means for emitting secondary electrons from the sample surface, and taking in secondary electrons emitted from the sample surface, and a two-dimensional type secondary electron detection signal for the left eye. And a two-dimensional type secondary electron detection means for outputting a secondary electron detection signal for the right eye, a moving means for moving the secondary electron detection means, and a secondary electron detection signal for the left eye from the secondary electron detection means And a stereoscopic display means for displaying the left-eye image and the right-eye image based on the right-eye secondary electron detection signal.

この発明によれば、試料表面から放出された２次電子を２次元型の２次電子検出手段で取り込み、２次電子検出手段からの２次元型の左目用２次電子検出信号及び右目用２次電子検出信号に基づいて立体表示手段で試料表面の凸凹の左目用画像及び右目用画像を表示することにより立体的な画像を観察可能としているので、立体表示手段で観察しながら、２次電子検出手段を移動手段でただ単に移動させると、試料表面の観察したい領域の凸凹の立体的な画像を簡易に観察することができ、これにより構成が簡単でコストを低減することができる。   According to the present invention, the secondary electrons emitted from the sample surface are taken in by the two-dimensional secondary electron detection means, and the two-dimensional secondary electron detection signal for the left eye and the right eye 2 from the secondary electron detection means. Since the three-dimensional display means displays the uneven left-eye image and right-eye image on the sample surface based on the secondary electron detection signal, the three-dimensional image can be observed. If the detecting means is simply moved by the moving means, it is possible to easily observe a three-dimensional image of the unevenness of the region to be observed on the sample surface, thereby simplifying the configuration and reducing the cost.

（第１実施形態）
図１はこの発明の第１実施形態としての電子顕微鏡の概略構成図を示す。この電子顕微鏡は、装置全体の制御を行なうための制御部１、真空容器２、ジョイスティック３、観察用メガネ４等を備え、詳細は後述するが、観察用メガネ４で観察しながらジョイスティック３を操作すると、図示しない排気手段により適度な真空状態に維持された真空容器２内の下部に設けられた試料台５に載置された試料６の表面の観察したい領域の凸凹の立体的な画像を簡易に観察することができるようになっている。 (First embodiment)
FIG. 1 shows a schematic configuration diagram of an electron microscope as a first embodiment of the present invention. The electron microscope includes a control unit 1 for controlling the entire apparatus, a vacuum vessel 2, a joystick 3, an observation glasses 4 and the like. As will be described in detail later, the joystick 3 is operated while observing with the observation glasses 4. Then, a three-dimensional image of the unevenness of the region to be observed on the surface of the sample 6 placed on the sample stage 5 provided in the lower part of the vacuum vessel 2 maintained in an appropriate vacuum state by an evacuation means (not shown) can be simplified. Can be observed.

真空容器２内において試料台５の上方には電子銃７が設けられている。電子銃７は、陰極から放出された電子を陽極で加速させ、この加速された電子を下方に向かってシャワー状に射出するようになっている。そして、電子銃７から下方に向かってシャワー状に射出された電子線８は、試料台５に載置された試料６の表面全域に照射されるようになっている。   An electron gun 7 is provided above the sample stage 5 in the vacuum vessel 2. The electron gun 7 accelerates the electrons emitted from the cathode at the anode, and emits the accelerated electrons downward in a shower shape. The electron beam 8 emitted in a shower shape downward from the electron gun 7 is applied to the entire surface of the sample 6 placed on the sample table 5.

真空容器２内には２次電子検出部９及び該２次電子検出部９を移動させるための移動機構１０が設けられている。この場合、移動機構１０は、２次電子検出部９を精密に微小移動させる必要はなく、詳細には図示していないが、例えば、モータの駆動により、ワイヤ、アーム等を介して、２次電子検出部９を前後、上下、左右方向に比較的低速でただ単に移動させる構造となっている。   In the vacuum vessel 2, a secondary electron detector 9 and a moving mechanism 10 for moving the secondary electron detector 9 are provided. In this case, the moving mechanism 10 does not need to precisely move the secondary electron detector 9 and is not shown in detail. For example, the secondary mechanism is driven by a motor through a wire, an arm, etc. The structure is such that the electron detector 9 is simply moved at a relatively low speed in the front-rear, top-bottom and left-right directions.

すなわち、ジョイスティック３から、その１本の操作棒１１が操作されることにより、２次電子検出部９を前後、上下、左右方向に比較的低速でただ単に移動させるための移動信号が制御部１に供給されると、制御部１は走査部１２を駆動させ、これにより移動機構１０が駆動して、２次電子検出部９を前後、上下、左右方向に比較的低速でただ単に移動させるようになっている。   That is, when one operating rod 11 is operated from the joystick 3, a movement signal for simply moving the secondary electron detector 9 in the front-rear, up-down, left-right directions at a relatively low speed is given to the control unit 1. , The control unit 1 drives the scanning unit 12, thereby driving the moving mechanism 10 so that the secondary electron detection unit 9 is simply moved at a relatively low speed in the front-rear, up-down, left-right directions. It has become.

２次電子検出部９は、左目用２次電子検出器１３及び右目用２次電子検出器１４を備えている。この２つの２次電子検出器１３、１４は、試料台５に載置された試料６の表面のある程度の面積を有する小領域６ａから放出される２次電子１５を左右に一定の視差を生じさせて取り込むように配置されている。２次電子検出器１３、１４の概略構成は、図２に示すようになっている。   The secondary electron detector 9 includes a left-eye secondary electron detector 13 and a right-eye secondary electron detector 14. These two secondary electron detectors 13 and 14 produce a constant parallax in the left and right directions of the secondary electrons 15 emitted from the small region 6a having a certain area on the surface of the sample 6 placed on the sample stage 5. It is arranged to be taken in. The schematic configuration of the secondary electron detectors 13 and 14 is as shown in FIG.

すなわち、２次電子検出器１３、１４は、２次電子１５を取り込み、且つ、取り込んだ２次電子１５に後述する蛍光パネル１７を光らせるために必要なエネルギーを与える高圧グリッド１６と、高圧グリッド１６を通過した後の２次電子１５を拡大縮小するための電磁レンズ１６と、電磁レンズ１７の後段に配置され、蛍光体を内蔵するシンチレータ等の２次電子１５の照射によりその強度に対応した蛍光を発する蛍光パネル１７と、蛍光パネル１８の後段側に密着して配置され、アモルファスシリコンあるいは単結晶半導体により形成された光電変換素子を有するセンサパネル１９とを備えている。   That is, the secondary electron detectors 13 and 14 take in the secondary electrons 15, and give the energy necessary for causing the taken-in secondary electrons 15 to illuminate a fluorescent panel 17 described later, and the high-pressure grid 16. The electromagnetic lens 16 for enlarging / reducing the secondary electrons 15 after passing through, and the fluorescence corresponding to the intensity by irradiation of the secondary electrons 15 such as a scintillator having a fluorescent substance, disposed behind the electromagnetic lens 17. And a sensor panel 19 having a photoelectric conversion element formed of amorphous silicon or a single crystal semiconductor, which is disposed in close contact with the rear side of the fluorescent panel 18.

そして、左目用２次電子検出器１３及び２次電子右目用２次電子検出器１４は、それぞれ取り込んだ２次電子１５の強度に応じた左目用２次電子検出信号及び右目用２次電子検出信号を制御部１に供給する。この場合、蛍光パネル１８及びセンサパネル１９は、２次元（面）型であり、左目用２次電子検出器１３及び２次電子右目用２次電子検出器１４からは２次元（Ｘ座標、Ｙ座標）の左目用２次電子検出信号及び右目用２次電子検出信号が出力される。制御部１は、供給された左目用２次電子検出信号及び右目用２次電子検出信号にそれぞれ応じた左目用画像データ及び右目用画像データを左目用表示駆動部２０及び右目用表示駆動部２１に供給する。   The left-eye secondary electron detector 13 and the secondary-electron right-eye secondary electron detector 14 respectively detect the left-eye secondary electron detection signal and the right-eye secondary electron detection according to the intensity of the captured secondary electrons 15. A signal is supplied to the control unit 1. In this case, the fluorescent panel 18 and the sensor panel 19 are of a two-dimensional (plane) type, and are two-dimensional (X coordinate, Y-direction) from the secondary electron detector 13 for the left eye and the secondary electron detector 14 for the secondary electron right eye. The secondary electron detection signal for the left eye and the secondary electron detection signal for the right eye are output. The control unit 1 converts the left-eye image data and the right-eye image data corresponding to the supplied left-eye secondary electron detection signal and right-eye secondary electron detection signal, respectively, into the left-eye display drive unit 20 and the right-eye display drive unit 21. To supply.

観察用メガネ４は、詳細には図示していないが、観察者の左目及び右目に対応する部分に左目用観察窓２２及び右目用観察窓２３を有し、各観察窓２２、２３の奥に液晶表示パネル等からなる左目用表示パネル及び右目用表示パネルを有する構造となっている。そして、左目用表示パネルは、左目用表示駆動部２０によって駆動され、左目用画像データに応じた左目用画像を表示し、右目用表示パネルは、右目用表示駆動部２１によって駆動され、右目用画像データに応じた右目用画像を表示するようになっている。   Although not shown in detail, the observation glasses 4 have a left-eye observation window 22 and a right-eye observation window 23 at portions corresponding to the left and right eyes of the observer, and are located behind the observation windows 22 and 23. It has a structure having a left-eye display panel and a right-eye display panel composed of a liquid crystal display panel or the like. The left-eye display panel is driven by the left-eye display driving unit 20 to display a left-eye image corresponding to the left-eye image data, and the right-eye display panel is driven by the right-eye display driving unit 21 to be used for the right eye. A right eye image corresponding to the image data is displayed.

次に、この電子顕微鏡の動作について説明する。電子銃７から下方に向かってシャワー状に射出された電子線８が試料台５に載置された試料６の表面全域に照射されると、試料６の表面全域から２次電子１５が放出される。この状態において、ある位置にある２つの左目用２次電子検出器１３及び２次電子右目用２次電子検出器１４は、試料６の表面のある小領域６ａから放出された２次電子を左右に一定の視差をもって同時に検出する。   Next, the operation of this electron microscope will be described. When the electron beam 8 emitted in a shower shape downward from the electron gun 7 is irradiated to the entire surface of the sample 6 placed on the sample table 5, secondary electrons 15 are emitted from the entire surface of the sample 6. The In this state, the two left-eye secondary electron detectors 13 and the secondary-electron right-eye secondary electron detectors 14 located at certain positions move the secondary electrons emitted from the small region 6a on the surface of the sample 6 to the left and right. Are simultaneously detected with a certain parallax.

そして、左目用２次電子検出器１３及び２次電子右目用２次電子検出器１４は、それぞれ検出された２次電子１５の強度に応じた左目用２次電子検出信号及び右目用２次電子検出を制御部１に供給する。制御部１は、この供給された左目用２次電子検出信号及び右目用２次電子検出信号にそれぞれ応じた左目用画像データ及び右目用画像データを左目用表示駆動部２０及び右目用表示駆動部２１に供給する。   Then, the left-eye secondary electron detector 13 and the secondary-electron right-eye secondary electron detector 14 respectively detect the left-eye secondary electron detection signal and the right-eye secondary electron according to the intensity of the detected secondary electrons 15. The detection is supplied to the control unit 1. The control unit 1 outputs the left-eye image data and the right-eye image data corresponding to the supplied left-eye secondary electron detection signal and right-eye secondary electron detection signal, respectively, to the left-eye display drive unit 20 and the right-eye display drive unit. 21.

すると、観察用メガネ４の左目用観察窓２２の奥に設けられた左目用表示パネルは、左目用表示駆動部２０によって駆動され、左目用画像データに応じた左目用画像を表示する。また、この左目用画像の表示と同時に、観察用メガネ４の右目用観察窓２３の奥に設けられた右目用表示パネルは、右目用表示駆動部２１によって駆動され、右目用画像データに応じた右目用画像を表示する。   Then, the left-eye display panel provided in the back of the left-eye observation window 22 of the observation glasses 4 is driven by the left-eye display drive unit 20 and displays a left-eye image corresponding to the left-eye image data. Simultaneously with the display of the left-eye image, the right-eye display panel provided in the back of the right-eye observation window 23 of the observation glasses 4 is driven by the right-eye display driving unit 21 and corresponds to the right-eye image data. Display the right eye image.

そこで、観察者は、観察用メガネ４の左目用観察窓２２及び右目用観察窓２３を介してその各奥に設けられた左目用表示パネル及び右目用表示パネルにそれぞれ表示された左目用画像及び右目用画像を同時に観察すると、両目視差による立体視現象により、試料６の表面のある小領域６ａの凸凹の立体的な画像が観察されることになる。   Therefore, the observer uses the left-eye image displayed on the left-eye display panel and the right-eye display panel provided at the back of the left-eye observation window 22 and the right-eye observation window 23 of the observation glasses 4, and When the right-eye image is observed at the same time, an uneven three-dimensional image of the small region 6a on the surface of the sample 6 is observed due to a stereoscopic phenomenon due to the binocular parallax.

そして、観察者は、この立体的な画像を観察しながら、ジョイスティック３の操作棒１１を所望方向に操作すると、ジョイスティック３からこの操作に応じた移動信号が制御部１に供給される。すると、制御部１はこの供給された移動信号に応じて走査部１２を駆動させ、これにより移動機構１０が駆動して、左目用２次電子検出器１３及び２次電子右目用２次電子検出器１４が所望方向に比較的低速でただ単に移動する。   Then, when the observer operates the operation bar 11 of the joystick 3 in a desired direction while observing the stereoscopic image, a movement signal corresponding to the operation is supplied from the joystick 3 to the control unit 1. Then, the control unit 1 drives the scanning unit 12 according to the supplied movement signal, and thereby the movement mechanism 10 is driven to detect the secondary electron detector 13 for the left eye and the secondary electron detection for the secondary electron right eye. The vessel 14 simply moves in the desired direction at a relatively low speed.

したがって、観察者は、観察用メガネ４を介して、試料６の表面のある小領域６ａの凸凹の立体的な画像を観察しながら、ジョイスティック３の操作棒１１を所望方向（観察したい方向）に操作すると、試料６の表面の当該小領域６ａから所望方向（観察したい方向）に連続する小領域の凸凹の立体的な画像を簡易に観察することができる。   Therefore, the observer observes the operation rod 11 of the joystick 3 in a desired direction (direction to be observed) while observing the three-dimensional image of the unevenness of the small area 6 a on the surface of the sample 6 through the observation glasses 4. When the operation is performed, it is possible to easily observe a three-dimensional image of unevenness in a small area that continues in a desired direction (direction to be observed) from the small area 6a on the surface of the sample 6.

ところで、この電子顕微鏡では、電子銃７から電子線８を下方に向かってシャワー状に射出しているだけであり、集束レンズ及び対物レンズを備えていない。また、２次電子検出部９を所望方向に比較的低速でただ単に移動させればよく、従来のように、試料台を３次元的に精密に微小移動させるための比較的高価なピエゾ素子を含む微小移動手段を必要としない。   By the way, this electron microscope only emits the electron beam 8 downward from the electron gun 7 in a shower shape, and does not include a focusing lens and an objective lens. In addition, the secondary electron detector 9 is simply moved in a desired direction at a relatively low speed, and a relatively expensive piezo element for moving the sample stage minutely in a three-dimensional manner as in the prior art is used. It does not require a minute moving means.

さらに、観察用メガネ４を介して、試料６の表面のある小領域６ａの凸凹の立体的な画像を観察しながら、ジョイスティック３の操作棒１１を所望方向に操作すると、試料６の表面の当該小領域６ａから所望方向に連続する小領域の凸凹の立体的な画像を簡易に観察することができるので、従来のように、比較的高価な演算部を必要としない。以上のことから、この電子顕微鏡では、構成が簡単でコストを低減することができる。   Further, when the operation rod 11 of the joystick 3 is operated in a desired direction while observing a three-dimensional image of the unevenness of the small area 6a on the surface of the sample 6 through the observation glasses 4, the surface of the sample 6 is affected. Since it is possible to easily observe a three-dimensional image of unevenness in a small area that continues from the small area 6a in a desired direction, a comparatively expensive arithmetic unit is not required as in the prior art. From the above, this electron microscope has a simple configuration and can reduce the cost.

なお、この電子顕微鏡では、図２に示すように、２次電子検出器１３、１４が２次電子１５を拡大縮小するための電磁レンズ１７を備えているので、この電磁レンズ１７の拡大縮小率を操作可能とすることにより、観察用メガネ４で立体的な画像を観察しながら、その立体的な画像を拡大縮小するようにしてもよい。   In this electron microscope, as shown in FIG. 2, the secondary electron detectors 13 and 14 include the electromagnetic lens 17 for enlarging and reducing the secondary electrons 15. , The stereoscopic image may be enlarged or reduced while observing the stereoscopic image with the observation glasses 4.

（第２実施形態）
上記第１実施形態では、真空容器２内の上部に設けた電子銃７から電子線８を下方に向かってシャワー状に射出させて試料６の表面全域に照射させているが、これに限定されるものではない。例えば、図３に示すこの発明の第２実施形態のように、電子銃７を２次電子検出部９の上面に設けて２次電子検出部９と共に移動可能とし、電子銃７から電子線８を試料６の表面の小領域６ａつまり２次電子検出器１３、１４による２次電子検出領域に向けて射出するようにしてもよい。このようにした場合には、電子銃７による電子照射領域と２次電子検出器１３、１４による２次電子検出領域とがほぼ同じとなるので、２次電子検出量が増大し、明るい画像が得られる。 (Second Embodiment)
In the first embodiment, the electron gun 8 provided in the upper part of the vacuum vessel 2 emits the electron beam 8 downward in a shower shape to irradiate the entire surface of the sample 6. However, the present invention is not limited to this. It is not something. For example, as in the second embodiment of the present invention shown in FIG. 3, the electron gun 7 is provided on the upper surface of the secondary electron detector 9 so as to be movable together with the secondary electron detector 9. May be emitted toward a small region 6 a on the surface of the sample 6, that is, a secondary electron detection region by the secondary electron detectors 13 and 14. In this case, since the electron irradiation region by the electron gun 7 and the secondary electron detection region by the secondary electron detectors 13 and 14 are substantially the same, the amount of secondary electron detection increases and a bright image is obtained. can get.

（第３実施形態）
上記第１、第２実施形態では、左目用２次電子検出器１３及び右目用２次電子検出器１４を用いているが、これに限定されるものではない。例えば、図４に示すこの発明の第３実施形態のように、左目用２次電子取り込み口３２及び右目用２次電子取り込み口３３を有する２次電子検出器３１を用いるようにしてもよい。 (Third embodiment)
In the first and second embodiments, the left-eye secondary electron detector 13 and the right-eye secondary electron detector 14 are used. However, the present invention is not limited to this. For example, as in the third embodiment of the present invention shown in FIG. 4, a secondary electron detector 31 having a left-eye secondary electron intake port 32 and a right-eye secondary electron intake port 33 may be used.

すなわち、この２次電子検出器３１は、左目用２次電子取り込み口３２に設けられた左目用高圧グリッド３４及び左目用偏光電極３６と、右目用２次電子取り込み口３３に設けられた右目用高圧グリッド３５及び右目用偏光電極３７と、左目用偏光電極３６及び右目用偏光電極３７の後段に配置された共通偏光電極３８と、共通偏光電極３８を通過した後の２次電子１５を拡大縮小するための電磁レンズ３９と、電磁レンズ３９の後段に配置された蛍光パネル４０と、蛍光パネル４０の後段側に密着して配置されたセンサパネル４１とを備えている。   That is, the secondary electron detector 31 includes a left-eye high-voltage grid 34 and a left-eye polarizing electrode 36 provided in the left-eye secondary electron intake port 32, and a right-eye secondary electron intake port 33 provided in the right-eye secondary electron intake port 33. The high-voltage grid 35 and right-eye polarizing electrode 37, the left-eye polarizing electrode 36 and the right-eye polarizing electrode 37, and the secondary electron 15 after passing through the common polarizing electrode 38 are enlarged or reduced. An electromagnetic lens 39, a fluorescent panel 40 arranged at the rear stage of the electromagnetic lens 39, and a sensor panel 41 arranged in close contact with the rear stage side of the fluorescent panel 40.

そして、この２次電子検出器３１を備えた電子顕微鏡では、左目用高圧グリッド３４及び左目用偏光電極３６と右目用高圧グリッド３５及び右目用偏光電極３７とに印加する電圧を高速で交互に切り換えると、センサパネル４１から左目用２次電子検出信号と右目用２次電子検出信号とが高速で交互に出力され、観察用メガネの左目用表示パネルと右目用表示パネルとによって左目用画像と右目用画像とが高速で交互に表示されることになるので、両目視差及び残像現象による立体視現象により、観察者には、立体的な画像が観察されることになる。   In the electron microscope equipped with the secondary electron detector 31, the voltages applied to the left-eye high-voltage grid 34 and the left-eye polarizing electrode 36, the right-eye high-voltage grid 35 and the right-eye polarizing electrode 37 are alternately switched at high speed. The left-eye secondary electron detection signal and the right-eye secondary electron detection signal are alternately output at high speed from the sensor panel 41, and the left-eye image and the right-eye are displayed by the left-eye display panel and the right-eye display panel of the observation glasses. Since the work images are alternately displayed at a high speed, a stereoscopic image is observed by the observer due to the stereoscopic phenomenon due to the binocular parallax and the afterimage phenomenon.

なお、上記各実施形態において、観察用メガネの奥に設けられた表示パネルは１つとし、左目用観察窓及び右目用観察窓を左目用液晶シャッター及び右目用液晶シャッターとし、１枚の表示パネルに左目用画像と右目用画像とを高速で交互に表示させ、且つ、左目用画像表示と右目用画像表示との切り換えのタイミングに合わせて、左目用液晶シャッターと右目用液晶シャッターとの開閉を切り換えるようにしてもよい。また、１つの表示パネルにより、右目用画像と左目用画像を交互に表示する場合には、メガネ型でなくてもよい。   In each of the above embodiments, one display panel is provided behind the observation glasses, and the left-eye observation window and the right-eye observation window are used as the left-eye liquid crystal shutter and the right-eye liquid crystal shutter. Left and right eye images are displayed alternately at high speed, and the left and right eye liquid crystal shutters are opened and closed according to the timing of switching between the left eye image display and the right eye image display. You may make it switch. Further, when the right-eye image and the left-eye image are alternately displayed on one display panel, the glasses need not be glasses.

また、移動機構１０は、一例として、図５に概略的に示すように、試料台の周囲上方にリング状のレール５１を設け、レール５１にモータの駆動により往復動する第１の部材５２を取り付け、第１の部材５２にモータの駆動により上下動する第２の部材５３を取り付け、第２の部材５３にモータの駆動によりレール５１の半径方向に往復動する第３の部材５４を取り付け、第３の部材５４の先端部に２次電子検出部９を取り付けたものであってもよい。   Further, as an example, as schematically shown in FIG. 5, the moving mechanism 10 includes a ring-shaped rail 51 provided above the periphery of the sample stage, and a first member 52 that reciprocates by driving a motor on the rail 51. The second member 53 that moves up and down by driving the motor is attached to the first member 52, and the third member 54 that reciprocates in the radial direction of the rail 51 by driving the motor is attached to the second member 53, The secondary electron detector 9 may be attached to the tip of the third member 54.

また、移動機構１０は、他の例として、図６に概略的に示すように、試料台の周囲上方にリング状のレール５１を設け、レール５１にモータの駆動により往復動する移動部材５５を取り付け、移動部材５５に多関節アーム５６の基端部を取り付け、多関節アーム５６の先端部に２次電子検出部９を取り付けたものであってもよい。   As another example, as schematically shown in FIG. 6, the moving mechanism 10 is provided with a ring-shaped rail 51 above the periphery of the sample stage, and a moving member 55 that reciprocates by driving a motor on the rail 51. The base end portion of the articulated arm 56 may be attached to the attachment / moving member 55, and the secondary electron detection unit 9 may be attached to the distal end portion of the articulated arm 56.

この発明の第１実施形態としての電子顕微鏡の概略構成図。BRIEF DESCRIPTION OF THE DRAWINGS The schematic block diagram of the electron microscope as 1st Embodiment of this invention. 図１に示す２次電子検出器の概略構成図。The schematic block diagram of the secondary electron detector shown in FIG. この発明の第２実施形態としての電子顕微鏡の一部の概略構成図。The schematic block diagram of a part of electron microscope as 2nd Embodiment of this invention. この発明の第３実施形態としての電子顕微鏡の２次電子検出器の概略構成図。The schematic block diagram of the secondary electron detector of the electron microscope as 3rd Embodiment of this invention. 移動機構の一例の概略構成図。The schematic block diagram of an example of a moving mechanism. 移動機構の他の例の概略構成図。The schematic block diagram of the other example of a moving mechanism.

符号の説明Explanation of symbols

１ 制御部
２ 真空容器
３ ジョイスティック
４ 観察用メガネ
５ 試料台
６ 試料
７ 電子銃
９ ２次電子検出部
１０ 移動機構
１２ 走査部
１３ 左目用２次電子検出器
１４ 右目用２次電子検出器
２０ 左目用表示駆動部
２１ 右目用表示駆動部 DESCRIPTION OF SYMBOLS 1 Control part 2 Vacuum container 3 Joystick 4 Observation glasses 5 Sample stand 6 Sample 7 Electron gun 9 Secondary electron detection part 10 Movement mechanism 12 Scan part 13 Secondary electron detector for left eye 14 Secondary electron detector for right eye 20 Left eye Display Drive Unit 21 Right Eye Display Drive Unit

Claims (8)

試料表面から２次電子を放出させる電子ビーム発生手段と、前記試料表面から放出された２次電子を取り込み、２次元型の左目用２次電子検出信号及び右目用２次電子検出信号を出力する２次元型の２次電子検出手段と、前記２次電子検出手段を移動させる移動手段と、前記２次電子検出手段からの左目用２次電子検出信号及び右目用２次電子検出信号に基づいて左目用画像及び右目用画像を表示する立体表示手段とを備えていることを特徴とする電子顕微鏡。   An electron beam generating means for emitting secondary electrons from the sample surface, and taking in the secondary electrons emitted from the sample surface, and outputting a two-dimensional secondary electron detection signal for the left eye and a secondary electron detection signal for the right eye. Based on a two-dimensional type secondary electron detection means, a moving means for moving the secondary electron detection means, a left-eye secondary electron detection signal and a right-eye secondary electron detection signal from the secondary electron detection means An electron microscope comprising a stereoscopic display means for displaying a left-eye image and a right-eye image. 請求項１に記載の発明において、前記電子ビーム発生手段は、前記試料表面に対向して配置された電子銃からシャワー状に射出された電子線を前記試料表面の全域に照射するようになっていることを特徴とする電子顕微鏡。   The invention according to claim 1, wherein the electron beam generating means irradiates an entire area of the sample surface with an electron beam emitted in a shower form from an electron gun arranged to face the sample surface. An electron microscope characterized by having 請求項１に記載の発明において、前記電子ビーム発生手段は、前記２次電子検出手段と一体的に移動するように配置された電子銃から射出された電子線を前記試料表面に照射するようになっていることを特徴とする電子顕微鏡。   The electron beam generating means may irradiate the surface of the sample with an electron beam emitted from an electron gun disposed so as to move integrally with the secondary electron detecting means. An electron microscope characterized by that. 請求項１に記載の発明において、前記２次電子検出手段は、間隔をおいて配置された左目用２次電子検出器及び右目用２次電子検出器を有することを特徴とする電子顕微鏡。   2. The electron microscope according to claim 1, wherein the secondary electron detecting means includes a secondary electron detector for the left eye and a secondary electron detector for the right eye which are arranged at intervals. 請求項１に記載の発明において、前記２次電子検出手段は、前記試料表面から放出された２次電子を間隔をおいて配置された一対の取り込み部から取り込んで１つの２次電子検出部に導き、該２次電子検出部から左目用２次電子検出信号及び右目用２次電子検出信号を交互に出力するようになっていることを特徴とする電子顕微鏡。   In the first aspect of the present invention, the secondary electron detecting means takes in the secondary electrons emitted from the sample surface from a pair of taking-in parts arranged at intervals, and puts them into one secondary electron detecting part. An electron microscope characterized in that a secondary electron detection signal for the left eye and a secondary electron detection signal for the right eye are alternately output from the secondary electron detection unit. 請求項４または５に記載の発明において、前記２次電子検出手段は拡大縮小用の電磁レンズを有することを特徴とする電子顕微鏡。   6. The electron microscope according to claim 4 or 5, wherein the secondary electron detection means includes an enlargement / reduction electromagnetic lens. 請求項１に記載の発明において、前記立体表示手段は、左目用画像を表示する左目用表示パネル及び右目用画像を表示する右目用表示パネルを有するメガネ型であることを特徴とする電子顕微鏡。   2. The electron microscope according to claim 1, wherein the stereoscopic display means is a glasses type having a left-eye display panel for displaying a left-eye image and a right-eye display panel for displaying a right-eye image. 請求項１に記載の発明において、前記移動手段は、１本の操作棒を有するジョイスティックであることを特徴とする電子顕微鏡。   2. The electron microscope according to claim 1, wherein the moving means is a joystick having one operating rod.
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