JP2006071985A - Collimation mechanism for revolver and focusing mechanism - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To positionally adjust an objective lens by being moved by a very minute distance of several μm order. <P>SOLUTION: The collimation mechanism for a revolver has a 1st eccentric cam means arranged near the objective lens mount hole of a rotor member and converting rotation to 1st linear motion in a predetermined direction along a plane orthogonal to an optical axis direction, a 2nd eccentric cam means arranged near the objective lens mount hole of the rotor member so as to be opposed to the 1st eccentric cam means while putting the objective lens lens mount hole in between and converting rotation to 2nd linear motion in a direction orthogonal to the predetermined direction along the plane, and an objective lens fixing system member respectively engaged with the 1st eccentric cam means and the 2nd eccentric cam means, moving in a 1st linear motion direction in accordance with the 1st linear motion and moving in a 2nd linear motion direction in accordance with the 2nd linear motion. Then, the objective lens is fixed at the rotor part through the objective lens fixing system member. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a center adjustment mechanism and a focus adjustment mechanism in a revolver. More specifically, the present invention relates to a center adjustment mechanism and a focus adjustment in a revolver used when a plurality of objective lenses are switchably mounted on optical instruments such as various microscopes. Regarding the mechanism.

  Conventionally, as a device for performing fine processing control, a laser processing device equipped with a microscope for observing a processing target (hereinafter, appropriately referred to as a “microscope-mounted laser processing device”) is known. Yes.

  In such a microscope-mounted laser processing apparatus, a plurality of objective lenses having different magnifications are mounted on a revolver (objective lens conversion apparatus), and the revolver is rotated to switch the objective lens mounted on the revolver. Thus, the magnification of the observation image of the processing object by the microscope is changed.

  In recent years, an LCD repair apparatus incorporating a microscope-mounted laser processing apparatus is used as an apparatus for detecting and repairing a defective portion of a liquid crystal display (LCD). Even in such an LCD repair device, a microscope equipped with a revolver equipped with a plurality of objective lenses having different magnifications is used, and while rotating the revolver and switching and using the objective lens mounted on the revolver, LCD defects The site is detected and repaired.

  By the way, in a revolver equipped with a plurality of objective lenses having different magnifications as described above, the revolver is rotated and used due to the processing accuracy of the objective lens mounting hole for mounting the objective lens and the assembly accuracy of the objective lens. When the objective lens is changed, there is a so-called “field shift” in which the observed image is shifted from the center of the field of view, or a so-called “focus shift” in which the focal position is shifted from the image being observed. May occur.

  In a microscope, the occurrence of such visual field deviation and defocusing is of course a major problem. In particular, when a visual field deviation or defocusing occurs in a microscope mounted on the LCD repair device described above, the LCD Since a large number of pixels (cells) having the same shape are continuous, a serious problem is caused in that a defect portion found at a corner is lost by changing the objective lens.

  For this reason, as a mechanism for correcting visual field deviation and defocusing caused by changing the objective lens by rotating the revolver, for example, disclosed in Japanese Patent Application Laid-Open No. 11-237558 presented as Patent Document 1 A method has been proposed.

  The center adjustment mechanism, which is a mechanism for correcting the field deviation disclosed in Patent Document 1, moves the adjustment collar provided with the inclined surface in the direction perpendicular to the optical axis of the objective lens mounting flange. By converting to movement, the objective lens attached to the objective lens mounting flange is moved in a direction perpendicular to the optical axis to correct the occurrence of field deviation.

  However, the above-described center adjustment mechanism disclosed in Patent Document 1 uses an inclined surface to change the movement direction from the optical axis direction to the direction orthogonal to the optical axis direction. However, there is a problem that it is extremely difficult to adjust the position by moving the objective lens at a minute distance on the order of several μm, for example.

Further, the focus adjustment mechanism, which is a mechanism for correcting defocusing disclosed in Patent Document 1 described above, is a so-called “double nut system” in which the second nut member is tightened and fixed after the focus is adjusted by the first nut member. Therefore, there is a problem that the adjustment of the focal position is complicated.
Japanese Patent Laid-Open No. 11-237558 (pages 3 to 5, FIGS. 3 to 5)

  The present invention has been made in view of the various problems of the conventional techniques as described above. The object of the present invention is to position the objective lens by moving it at a minute distance on the order of several μm, for example. It is an object of the present invention to provide a center adjustment mechanism in a revolver that enables adjustment.

  The present invention is also intended to provide a focus adjustment mechanism in a revolver that can adjust the focus position of an objective lens by a simple operation without requiring complicated adjustment work.

  In order to achieve the above object, a center adjustment mechanism in a revolver according to the present invention includes a plurality of objective lenses in a plurality of objective lens mounting holes formed on the same circumference around the rotation axis of a rotatable rotor member. In the center adjustment mechanism in the revolver in which each is disposed, the rotational motion arranged in the vicinity of the objective lens mounting hole of the rotor member is converted into a first linear motion in a predetermined direction along a plane orthogonal to the optical axis direction. The first eccentric cam means and the first eccentric cam means in the vicinity of the objective lens mounting hole of the rotor member so as to face the first eccentric cam means, and to rotate the plane in the plane. The second eccentric cam means for converting the second linear motion in the direction orthogonal to the predetermined direction along the first direction, the first eccentric cam means, and the second eccentric cam means, respectively. And an objective lens fixing system member that moves in the first linear motion direction in accordance with the first linear motion and moves in the second linear motion direction in accordance with the second linear motion. And the objective lens is fixed to the rotor portion via the objective lens fixing system member.

  Therefore, according to the center adjustment mechanism in the revolver according to the present invention, the eccentric cam motion, which is the rotational motion of the eccentric cam, is converted into a linear motion on a plane orthogonal to the optical axis, and the objective lens fixing system is utilized using this linear motion. Since the position of the objective lens is adjusted by moving the member, the position of the objective lens can be adjusted by moving the objective lens by a minute distance on the order of several μm, for example.

  Here, in the center adjustment mechanism in the revolver according to the present invention, guide means for guiding the movement of the objective lens fixing system member in the first linear motion direction may be further provided. If it does in this way, it will become possible to move the said objective-lens fixing system member reliably to a said 1st linear motion direction, and it will become possible to aim at a more precise position adjustment of an objective lens.

  Further, the center adjustment mechanism in the revolver according to the present invention is a revolver in which a plurality of objective lenses are respectively disposed in a plurality of objective lens mounting holes formed on the same circumference around the rotation axis of a rotatable rotor member. In the center adjustment mechanism in FIG. 2, the first eccentric member is decentered with respect to the axis that is disposed around the objective lens mounting hole of the rotor member and is rotatable about an axis perpendicular to a plane perpendicular to the optical axis direction of the objective lens. A first cam means having one eccentric cam portion and a cam portion concentric with the axis; and the first cam means sandwiching the objective lens mounting hole in the vicinity of the objective lens mounting hole of the rotor member; Second cam means having a second eccentric cam portion arranged opposite to each other and rotatable about an axis perpendicular to the plane and eccentric with respect to the axis; and the first cam Arranged to be movable along the plane with respect to the first cam means as the means rotates, and to be movable along the plane with respect to the second cam means as the second cam means rotates. In addition, the first eccentric cam portion extends in a predetermined direction along the plane and the first eccentric cam portion is disposed, and the first eccentric cam portion is moved to the predetermined direction by the movement accompanying the rotation of the first cam means. A first eccentric cam guide portion that is relatively movable only in the direction, and extends in a direction perpendicular to the predetermined direction along the plane, and the cam portion is arranged to rotate the first cam means. The first cam means includes the cam guide portion that is relatively movable only in the orthogonal direction by the movement, and the second eccentric cam portion that extends in the orthogonal direction. Or the second An objective lens fixing system member having a second eccentric cam guide portion that is relatively movable only in the direction orthogonal to the second eccentric cam portion by the movement accompanying the rotation of the lens means, The objective lens fixing system member is moved in the orthogonal direction with the rotation of the first cam means, and the objective lens fixing system member is moved in the predetermined direction with the rotation of the second cam means. Is.

  Therefore, according to the center adjustment mechanism in the revolver according to the present invention, for example, the orthogonal coordinates composed of the X axis, the Y axis, and the Z axis with the optical axis as the Z axis and the plane orthogonal to the optical axis as the XY plane. In the system, a mechanism for moving the objective lens fixing system member in the X-axis direction by the first eccentric cam portion that converts the rotational motion into a linear motion in the X-axis direction, and converting the rotational motion into a linear motion in the Y-axis direction Since the moving mechanism of the objective lens fixing system member by the second eccentric cam portion is configured independently of each other, the objective lens can be moved in an arbitrary direction on the XY plane at a minute distance. At this time, since the cam portion and the cam guide portion serve as guides when moving in the X-axis direction, the objective lens fixing system member can be reliably moved in the X-axis direction.

  Furthermore, the first eccentric cam portion can move only in the Y-axis direction within the first eccentric cam guide portion, while the second eccentric cam portion can only move in the X-axis direction within the second eccentric cam guide portion. Since the first eccentric cam portion and the second eccentric cam portion themselves act as a guide when the objective lens moves, the objective lens is fixed by the first eccentric cam portion. The Y-axis position does not shift when the system member moves in the X-axis direction, and the X-axis position does not shift when the objective lens fixing system member moves in the Y-axis direction by the second eccentric cam portion.

  Here, in the center adjustment mechanism in the revolver according to the present invention, an urging means for urging the objective lens fixing system member with respect to the rotor member may be further provided.

  Further, the focus adjusting mechanism in the revolver according to the present invention is a revolver in which a plurality of objective lenses are respectively disposed in a plurality of objective lens mounting holes formed on the same circumference around the rotation axis of a rotatable rotor member. The focus adjustment mechanism in FIG. 1 has a cylindrical shape that is disposed around the objective lens mounting hole of the rotor member and has an internal thread formed on the inner peripheral surface, and has a through-hole in the radial direction in which the internal thread is formed on the wall surface. An objective lens fixing system member provided and a cylindrical shape having a male screw formed on the outer peripheral surface, and an objective lens is mounted on the inner diameter side, and the female screw and the male screw of the objective lens fixing system member are screwed together An objective lens mounting member fixed to the objective lens fixing system member so as to be movable in the optical axis direction, and a male screw that is screw-coupled to a female screw formed in the through hole A coupling member formed on an outer peripheral surface; and an elastic body disposed between the male screw of the objective lens mounting member and the coupling member in the through hole, and the coupling member in the through hole And the objective lens mounting system member and the objective lens mounting member are fixed by pressing the male screw of the objective lens mounting member through the elastic body.

  Therefore, according to the focus adjusting mechanism of the revolver according to the present invention, the objective lens mounting member is held with respect to the objective lens fixing system member by using the elastic force of the elastic body. In addition, even after the objective lens mounting member is rotated along the screw, the fixed state can be maintained without any problem in practice.

  Here, in the focus adjustment mechanism in the revolver according to the present invention, at least a pair of notches disposed opposite to each other may be formed on the top of the objective lens mounting member. In this way, a tool such as a wrench can be locked in the notch, so that the objective lens mounting member can be easily rotated.

  Further, the above-described center adjustment mechanism in the revolver according to the present invention may include the focus adjustment mechanism in the revolver according to the present invention described above. In this way, it becomes possible to efficiently correct the field shift and the focus shift of the objective lens.

  Since the present invention is configured as described above, the position of the objective lens is moved by a minute distance on the order of several μm, for example, when the field of view of the objective lens mounted on the revolver is corrected. There is an excellent effect that adjustment can be achieved.

  In addition, since the present invention is configured as described above, the objective lens can be easily operated without requiring complicated adjustment work when performing the defocus correction work of the objective lens mounted on the revolver. There is an excellent effect that the focal position can be adjusted.

  Hereinafter, an example of an embodiment of a center adjustment mechanism and a focus adjustment mechanism in a revolver according to the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 shows a schematic external configuration explanatory diagram of an LCD repair apparatus 10 equipped with a microscope apparatus equipped with an example of an embodiment of a center adjustment mechanism and a focus adjustment mechanism in a revolver according to the present invention. 1A is a schematic front view of the LCD repair device 10, and FIG. 1B is a schematic right side view of the appearance.

  The LCD repair device 10 is configured using a microcomputer and controls a device control unit for controlling the operation of the entire device, a substrate transport unit for transporting an LCD substrate into the LCD repair device 10, and a substrate transport unit A stage unit on which the LCD substrate conveyed from the substrate is placed and moved, and a laser oscillation unit 20 that generates and emits laser light for performing fine processing on the LCD substrate by laser processing (see FIG. 2). .) And a microscope unit 30 (see FIG. 2) that condenses the laser light emitted from the laser oscillation unit and irradiates it to the LCD substrate placed on the stage unit to be processed. It is composed of

  The configuration and operation of each of the above-described device units in the LCD repair device 10 are the same as those of a conventionally known LCD repair device except for the configuration and operation of a revolver 34 (see FIG. 2) of the microscope unit 30 described later. Since it is the same, detailed description of the configuration and operation of each device unit other than the revolver 34 is omitted.

FIG. 2 is a diagram for explaining the external configuration of the laser oscillation unit 20 and the microscope unit 30. In the LCD repair device 10, the laser oscillation unit 20 and the microscope unit 30 are integrally assembled. Yes.

  The microscope unit 30 includes a microscope unit 32 having an optical system on the eyepiece lens side on which the laser light emitted from the laser oscillation unit 20 is incident, and a heart adjustment mechanism according to the present invention attached to the microscope unit 30 and A revolver 34 having a focus adjustment mechanism, objective lenses 36a, 36b, 36c, 36d, and 36e attached to the revolver 34, and a Z-axis direction that is the optical axis direction of the microscope unit 30 (reference showing an orthogonal coordinate system in FIG. 2) 2, the X-axis and the Y-axis are shown for convenience in the reference diagram showing the orthogonal coordinate system in FIG. The focus moves to each of the lens mounting portions 42a, 42b, 42c, and 42d, which is defined as an orthogonal axis on the XY plane. It is provided with a up and down mechanism 38 for the cause.

Hereinafter, the configuration of the revolver 34 provided with the heart adjustment mechanism and the focus adjustment mechanism according to the present invention will be described.

  FIG. 3 shows a schematic external configuration explanatory view of the revolver 34 in the direction of arrow A in FIG. 2. The revolver 34 has a motor (around the central axis O with the central axis O extending in the Z-axis direction as a rotation axis. It is rotatably arranged by driving (not shown).

  That is, the revolver 34 can be rotated around the central axis O by driving a motor (not shown) with the central axis O as the rotation axis, and the objective lenses 36a, 36b, 36c, 36d, and 36e are disposed respectively. Therefore, the rotor member 40 including five objective lens mounting holes 40a, 40b, 40c, 40d, and 40e having a circular shape formed on the same circumference centering on the central axis O as the rotation axis, and 4 Four objective lens mounting portions 42a, 42b, respectively disposed in four corresponding objective lens mounting holes 40a, 40b, 40c, 40d for mounting the objective lenses 36a, 36b, 36c, 36d, respectively. 42c and 42d. The objective lens 36e is directly attached to the objective lens attachment hole 40e by a conventionally known method.

  Here, the objective lens mounting portions 42a, 42b, 42c, and 42d corresponding to the four objective lens mounting holes 40a, 40b, 40c, and 40d have the same configuration. Description will be made centering on the objective lens mounting hole 40a for mounting the lens 36a and the objective lens mounting portion 42a.

FIG. 4 shows a detailed exploded perspective view of a main part of the revolver 34 centered on the periphery of the rotor member 40 in which the objective lens mounting hole 40a for mounting the objective lens 36a is formed and the objective lens mounting portion 42a. FIG. 5 is a schematic vertical cross-sectional view of the main part of the revolver 34 centered on the periphery of the rotor member 40 in which the objective lens mounting hole 40a for mounting the objective lens 36a is formed and the objective lens mounting portion 42a. It is shown.

  First, each of the objective lens mounting portions 42a constituting the X-axis direction moving mechanism for realizing the movement in the X-axis direction as the center adjusting mechanism according to the present invention is provided on the outer peripheral portion of the objective lens mounting hole 40a of the rotor member 40. The through-hole 50 for the X-axis direction moving mechanism for arranging the constituent members, and the objective lens mounting portion 42a constituting the Y-axis direction moving mechanism for realizing the movement in the Y-axis direction as the center adjusting mechanism according to the present invention. The fixing screws 78a, 78b, 78c are respectively screwed to the Y-axis direction moving mechanism through-hole 52 for arranging the constituent members and male screws formed on three fixing screws 78a, 78b, 78c described later. There are formed three screw holes 54a, 54b, 54c formed with female threads for fixing the screw.

  The X-axis direction moving mechanism through-hole 50 and the Y-axis direction moving mechanism through-hole 52 pass through a position facing each other with the objective lens mounting hole 40a interposed therebetween, that is, the center point O ′ of the objective lens mounting hole 40a. The three screw holes 54a, 54b, 54c are sequentially arranged at intervals of about 120 ° along the outer periphery of the objective lens mounting hole 40a.

Next, the objective lens mounting portion 42a will be described. The objective lens mounting portion 42a includes an adjuster string 56 having a cylindrical shape provided with an opening 56b in which an internal thread 56a is formed on the inner peripheral surface. The adjuster string 56 includes an X-axis adjustment guide long hole 56c extending in the Y-axis direction and penetrating in the Z-axis direction, a Y-axis adjustment guide long groove 56d extending in the X-axis direction and penetrating in the Z-axis direction, and screws Three fixing screw through holes 56e, 56f, and 56g that are arranged in alignment with the holes 54a, 54b, and 54c and are formed so as to penetrate in the Z-axis direction, and a wall surface in the radial direction along the XY plane. An X-axis through which two lock screw fixing holes 56h and 56i that pass through and are disposed at 90 ° along the inner periphery of the opening 56b and have an internal thread formed on the inner peripheral surface, and an X-axis pivot ring 62 to be described later An X-axis pivot ring guide groove 56k formed by extending in the X-axis direction is formed in the bottom surface near the adjustment guide long hole 56c.

  In this embodiment, the lock screw fixing hole 56h and the lock screw fixing hole 56i are arranged at 90 °, but can be arbitrarily arranged within a range of 60 to 120 °, for example. This is because when the lock screw 86a, 86b is screwed into the lock screw fixing holes 56h, 56i via the screw stoppers 88a, 88b and the focusing ring 84 is fixed to the adjuster string 56, the male screw 84a of the focusing ring 84 is locked. This is because they are firmly engaged and fixed to the female thread 56a of the adjuster string 56 in the direction facing the 86a and 86b in the XY plane. As a result, the male screw 84a of the confocal ring 84 and the female screw 56a of the adjust ring 56 can be rotated in the optical axis direction (Z-axis direction) without backlash, and the height (focus position) of the objective lens 36a is backlashed. It can be adjusted so that no occurs.

  In this embodiment, the number of lock screw fixing holes is two. However, the present invention is not limited to this, and even when the number of lock screw fixing holes is one, the role can be sufficiently fulfilled.

  The objective lens mounting portion 42a is further disposed in the X-axis adjustment guide long hole 56c through the X-axis direction moving mechanism through hole 50, and an X-axis eccentric cam screw 58 (with a male screw 58a formed at the lower end thereof. 6), an X-axis eccentric cam ring 60 fitted into the eccentric cam portion 58b of the X-axis eccentric cam screw 58, and an X-axis pivot ring 62 fitted into the rotation shaft portion 58c of the X-axis eccentric cam screw 58. , An X-axis camshaft 64 having a female screw 64a that is screw-coupled with a male screw 58a formed on the X-axis eccentric cam screw 58, an X-axis shaft ring 66 fitted into the shaft portion 64b of the X-axis camshaft 64, and a Y-axis A Y-axis eccentric cam screw 68 penetrating the direction moving mechanism through-hole 52 and disposed in the Y-axis adjustment guide long groove 56d and having a male screw 68a formed at the lower end; A Y-axis camshaft 72 formed with a Y-axis eccentric cam ring 70 fitted into the eccentric cam portion 68b of the eccentric cam screw 68, a female screw 72a that is screw-coupled with a male screw 68a formed on the Y-axis eccentric cam screw 68, and a Y-axis camshaft 72, a Y-axis shaft ring 74 fitted into the shaft portion 72b of the 72, a donut shape having an opening 76a formed at the center, and a through-hole 76b through which the head portion 58d of the X-axis eccentric cam screw 58 passes and a Y-axis eccentric cam screw 68. Ring washer provided with three fixed screw through holes 76d, 76e, 76f formed by being aligned with the notch groove 76c that penetrates the head 68d and the screw holes 54a, 54b, 54c, respectively. 76, through holes 76d, 76e, 76f and through holes 56e, 56f, 56g, respectively, and screw holes 5 The three fixing screws 78a, 78b, 78c, which are screwed to the respective a, 54b, 54c and sandwich the adjuster string 56 between the ring washer 76 and the rotor member 40, and the screw shafts of the fixing screws 78a, 78b, 78c The flat washers 80a, 80b, 80c and the spring washers 82a, 82b, 82c that are inserted into the screw heads and disposed between the screw head and the ring washer 76, and the male screw 84a that is screwed to the female screw 56a are formed on the outer peripheral surface. In addition, a cylinder in which eight wrench receiving portions 84b, 84c, 84d, 84e, 84f, 84g, 84h, and 84i are cut out at about 45 ° along the outer periphery at the top and a female screw 84j is formed at the lower portion of the inner peripheral surface. The formed concentric ring 84 and a male screw that is screw-coupled with the female screw of the lock screw fixing holes 56h and 56i are formed. Two locking screws 86a and 86b for fixing the focusing ring 84 to the adjuster string 56 by pressing the outer peripheral surface of the focusing ring 84 by the end by screwing the screw into the female screw, and the focusing ring 84 It has two screw stoppers 88a and 88b disposed between the outer peripheral surface and the lock screws 86a and 86b.

  Here, the X-axis direction moving mechanism is concentric with the X-axis eccentric cam ring 60 and the rotary shaft 58c that are eccentric with the rotary shaft 58c, which is the rotational axis of the X-axis eccentric cam screw 58, to form a circular outer shape. An X-axis eccentric cam screw 58 through which a pivot ring 62 that constitutes the outer shape is inserted constitutes an X-axis direction moving mechanism, and the Y-axis direction moving mechanism is eccentric from the rotational axis of the Y-axis eccentric cam screw 68. It is composed of a Y-axis eccentric cam screw 68 through which a Y-axis eccentric cam ring 70 having a circular outer shape is inserted, and is respectively provided in an X-axis adjustment guide long hole 56c, an X-axis pivot ring guide groove 56k, and a Y-axis adjustment guide long groove 56d. Inserted and placed. These X-axis direction moving mechanism and Y-axis direction moving mechanism are erected perpendicularly to a plane orthogonal to the optical axis.

  Further, it is assumed that the through holes 56e, 56f, and 56g formed in the adjust string 56 have an opening diameter having a predetermined margin than the shaft diameter of the fixing screws 78a, 78b, and 78c.

  A male screw 36aa is formed on the outer peripheral surface of the lower end portion of the objective lens 36a. The objective lens 36a is fixed to the confocal ring 84 by screwing the male screw 36aa into the female screw 84j of the confocal ring 84.

Next, each of the above-described constituent members will be described in detail. First, the X-axis camshaft 64 engages with a bottom opening step 50a of the X-axis direction moving mechanism through hole 50 formed in the rotor member 40. The Y-axis camshaft 72 includes an edge portion 64m that engages with a bottom opening step portion 52a of a through-hole 52 for a Y-axis direction moving mechanism formed in the rotor member 40.

  The X-axis camshaft 64 is screwed into the X-axis eccentric cam screw 58 by screwing the female screw 64a and the male screw 58a, and the X-axis eccentric cam screw 58 is moved in the optical axis direction (Z-axis direction) with respect to the rotor member 40. And is supported rotatably. Similarly, the Y-axis camshaft 72 is screwed into the Y-axis eccentric cam screw 68 by screwing the female screw 72a and the male screw 68a, and the Y-axis eccentric cam screw 68 is moved to the rotor member 40 in the optical axis direction (Z-axis direction). ) And is supported rotatably. Therefore, as described later, when the X-axis eccentric cam screw 58 or the Y-axis eccentric cam screw 68 is rotated around the axis during the adjustment operation for moving the objective lens 36a in the X-axis direction or the Y-axis direction, the X-axis camshaft 64 is rotated. Alternatively, the Y-axis camshaft 72 rotates around the axis together with the X-axis eccentric cam screw 58 or the Y-axis eccentric cam screw 68.

  As a material of the X-axis camshaft 64 and the Y-axis camshaft 72, for example, brass can be used.

  Next, the X-axis shaft ring 66 is a ring that is press-fitted without any gap between the X-axis camshaft 64 and the X-axis direction moving mechanism through-hole 50 formed in the rotor member 40 with a plus tolerance. Similarly, the Y-axis shaft ring 74 is a ring that is press-fitted without any gap between the Y-axis camshaft 72 and the Y-axis direction moving mechanism through-hole 52 formed in the rotor member 40 with a plus tolerance.

  The X-axis shaft ring 66 and the Y-axis shaft ring 74 are used to eliminate rattling between the X-axis cam shaft 64 and the Y-axis cam shaft 72 and the rotor member 40, It is inserted to reduce friction when the 72 rotates.

  The material of the X-axis shaft ring 66 and the Y-axis shaft ring 74 is preferably a material that is resistant to deformation, is slippery, and does not wear. For example, POM (polyacetal) can be used. Specifically, Duracon (trademark), Delrin (trademark), or the like can be used.

  Next, the X-axis pivot ring 62 is accommodated in an X-axis pivot ring guide groove 56k formed in the adjuster string 56, and serves as a guide when the adjuster string 56 is moved in the X-axis direction. The X-axis pivot ring 62 has a plus tolerance with respect to the X-axis pivot ring guide groove 56k and acts so as not to shake in the Y-axis direction when the X-axis eccentric cam screw 58 is rotated. At the time of adjustment work for moving the objective lens 36a, the X-axis eccentric cam ring 60 and a rotation fulcrum are used.

  The material of the X-axis pivot ring 62 is preferably a material that is resistant to deformation, is slippery, and does not wear. For example, POM (polyacetal) can be used.

  Next, the X-axis eccentric cam ring 60 is press-fitted with a plus tolerance between the X-axis eccentric cam screw 58 and the X-axis adjustment guide long hole 56c formed in the adjuster string 56. The shaft eccentric cam screw 58 is moved without rattling.

  The material of the X-axis eccentric cam ring 60 is preferably a material that is resistant to deformation, is slippery, and does not wear. For example, POM (polyacetal) can be used.

  Next, the X-axis eccentric cam screw 58 having the eccentric cam portion 58b shown in FIG. 6 is screwed into the X-axis cam shaft 64, and the X-axis shaft ring 66, the X-axis pivot ring 62, and the X-axis eccentric cam ring 60 are integrated. To fix. Further, a cross-shaped through hole 58e is formed in the head portion 58d of the X-axis eccentric cam screw 58. When the X-axis eccentric cam screw 58 is rotated around the axis, a wrench or the like is provided in the through-hole 58e. A tool can be inserted and turned.

  The X-axis eccentric cam screw 58 has three functions of fixing the X-axis shaft ring 66, the X-axis pivot ring 62 and the X-axis eccentric cam ring 60, forming the eccentric cam portion 58b, and forming the cross-shaped through hole 58e. Therefore, it is preferable to cut out a material such as SUS304 (or SUS303), which is a stainless steel, in order to increase processing accuracy and strength.

  Next, the Y-axis eccentric cam ring 70 will be described. Like the X-axis eccentric cam ring 60, the Y-axis eccentric cam ring 70 is located between the Y-axis eccentric cam screw 68 and the Y-axis adjustment guide long groove 56d formed in the adjuster string 56. The Y-axis eccentric cam screw 68 moves with no play in the Y-axis adjustment guide long groove 56d.

  The material of the Y-axis eccentric cam ring 70 is preferably a material that is resistant to deformation, is slippery, and does not wear. For example, POM (polyacetal) can be used.

  The Y-axis eccentric cam ring 70 adjusts around the X-axis pivot ring 62 by rotating in the Y-axis adjustment guide long groove 56d during the adjustment operation for moving the objective lens 36a in the Y-axis direction. In the adjustment work that creates the movement of the ring 56 and moves the objective lens 36a in the X-axis direction, it acts as a guide so as not to move in the Y-axis direction.

  Next, similarly to the X-axis eccentric cam screw 58, the Y-axis eccentric cam screw 68 provided with the eccentric cam portion 68b is screwed into the Y-axis cam shaft 72, and the Y-axis shaft ring 74 and the Y-axis eccentric cam ring 70 are integrated. Fix it. The head 68d of the Y-axis eccentric cam screw 68 is provided with a cross-shaped through-hole 68e like the X-axis eccentric cam screw 68. When the Y-axis eccentric cam screw 68 is rotated around the axis, A tool such as a wrench can be inserted into the through hole 68e and rotated. Since the Y-axis eccentric cam screw 68 has the same configuration as the X-axis eccentric cam screw 68, the detailed illustration thereof is omitted with the aid of FIG.

  The Y-axis eccentric cam screw 68 has three functions of fixing the Y-axis shaft ring 74 and the Y-axis eccentric cam ring 70, forming the eccentric cam portion 68b, and forming the cross-shaped through hole 68e. In order to increase the strength, it is preferable to cut out a material such as stainless steel SUS304 (or SUS303).

  The Y-axis eccentric cam screw 68 rotates in the Y-axis adjustment guide long groove 56d during the adjustment operation for moving the objective lens 36a in the Y-axis direction, so that the X-axis pivot ring 62 becomes the rotation center. The adjustment string 56 is moved, and when the adjustment operation for moving the objective lens 36a in the X-axis direction is performed, it acts as a guide that does not move in the Y-axis direction.

  Next, the adjuster string 56 has a female thread 56a formed on the inner peripheral surface thereof, and a male thread 84a is screwed to the female thread 56a, and a confocal ring 84 for attaching the objective lens 36a is screwed. By adjusting the position of screwing of the confocal ring 84 with respect to the adjuster string 56, the position of the objective lens 36a in the optical axis direction (Z-axis direction) changes up and down, whereby the height of the objective lens 36a (focal position) ) Can be adjusted.

  As the material of the adjust ring 56, for example, aluminum A5056 can be used, and a white alumite treatment is used on the surface. Further, the durability is improved by the difference in the surface of the alumite treatment, which is more preferable.

  Next, the ring washer 76 adjusts the concentricity by the adjustment operation of moving the objective lens 36a in the X-axis direction and the Y-axis direction by the movement of the adjust ring 56, and then uses the fixing screws 78a, 78b, 78c to rotate the rotor member 40. This is intended to fix the adjuster string 56 to the upper surface.

  As a material of the ring washer 76, for example, SUS304 CSP-H, which is a spring material, is used in consideration of the fact that the ring washer 76 is tightened with the fixing screws 78a, 78b, and 78c and then returns to its original state. Is preferred.

  Next, the confocal ring 84 fixes the objective lens 36a by screwing the female screw 84j and the female screw 36aa. Further, by adjusting the screw coupling position between the male screw 84a and the female screw 56a, the focusing ring 84 can be moved up and down on the adjuster string 56 in the optical axis direction (Z-axis direction).

  In addition, as a material of the confocal ring 84, for example, brass can be used, and it is preferable to perform electroless nickel plating on the surface. By applying such electroless nickel plating, the generation of rust can be suppressed and the fitting state between the male screw 84a and the female screw 56a can be well maintained.

  Next, the screw stoppers 88a and 88b are preferably formed of an elastic body such as a resin that has elasticity and is extremely excellent in low friction, wear resistance, and impact resistance. For example, ultra high molecular weight polyethylene ( UHMW-PE).

  Next, the locking screws 86a and 86b are configured using a locking screw so that they will not fall off even when the revolver 34 is used over a long period of time.

In the above configuration, in order to assemble the above-described constituent members to configure the revolver 34, on the X-axis direction moving mechanism side, the X-axis shaft ring 66 is inserted into the through-hole 50 for the X-axis direction moving mechanism of the rotor member 40. And the X-axis camshaft 64 are inserted, and the X-axis eccentric cam screw 58 inserted through the X-axis pivot ring 62 and the X-axis eccentric cam ring 60 is screwed into the X-axis camshaft 64 and fixed. On the other hand, on the Y-axis direction moving mechanism side, the Y-axis shaft ring 74 and the Y-axis cam shaft 72 are inserted into the through-hole 52 for the Y-axis direction moving mechanism of the rotor member 40, and the Y-axis eccentric cam ring 70 is inserted. The Y-axis eccentric cam screw 68 is screwed into the Y-axis cam shaft 72 and fixed.

  After the X-axis direction moving mechanism and the Y-axis direction moving mechanism are assembled as described above, the X-axis eccentric cam screw 58 is inserted into the X-axis adjustment guide long hole 56c, and the Y-axis eccentric cam screw is inserted into the Y-axis adjustment guide long groove 56d. 68, the adjuster string 56 is placed on the rotor member 40 so as to surround the objective lens mounting hole 40a, and the ring washer 76 is placed on the upper surface of the adjuster string 56.

  Then, the screw holes 54a, 54b, 54c, the fixing screw through holes 56e, 56f, 56g and the fixing screw through holes 76d, 76e, 76f are respectively aligned, and the plain washers 80a, 80b, 80c and the spring washers 82a, 82b are respectively aligned. , 82c, the rotor member 40, the adjuster string 56, and the ring washer 76 are integrally connected by fixing screws 78a, 78b, 78c.

  That is, after the spring washers 82a, 82b, 82c and the flat washers 80a, 80b, 80c are inserted into the fixing screws 78a, 78b, 78c, the fixing screws 78a, 78b, 78c are inserted into the fixing screw through holes 76d, 76e of the ring washer 76, The adjusting string 56 is urged against the rotor member 40 by passing through the fixing screw through holes 56e, 56f, 56g of the adjusting string 56f and the screw holes 54a, 54b, 54c of the rotor member 40. Thus, the adjuster string 56 is held by the rotor member 40 in a state where it can be relatively moved with a predetermined tolerance.

  Next, the focusing ring 84 is screwed into the adjust ring 56, and then the lock screws 86a and 86b are screwed into the lock screw fixing holes 56h and 56i on the side surface of the adjust ring 56 via the screw stoppers 88a and 88b. The focusing ring 84 is fixed to the end, and the revolver 34 is assembled.

  The objective lens 36a is screwed and fixed to the focusing ring 84 of the revolver 34 assembled as described above.

In order to correct the field of view of the objective lens 36a fixed to the revolver 34 assembled in this way, the X-axis eccentric cam screw 58 is rotated to move the adjust string 56 in the X-axis direction. The objective lens 36a fixed via the focusing ring 84 is moved in the X-axis direction, and the Y-axis eccentric cam screw 68 is rotated to move the adjuster string 56 in the Y-axis direction. By moving the objective lens 36a fixed via the ring 84 in the Y-axis direction, the objective lens 36a is moved to an arbitrary position on the XY plane, and the visual field shift of the objective lens 36a is corrected.

  7A and 7B, the operation of the X-axis direction moving mechanism when the X-axis eccentric cam screw 58 is rotated, that is, the X-axis eccentric cam ring 60, the X-axis pivot ring 62, and the X-axis Details of the linkage operation between the adjustment guide long hole 56c and the X-axis pivot ring guide groove 56k will be described. Reference numerals R1 and R2 shown in FIGS. 7A and 7B are virtual reference lines for explaining the operation of the X-axis direction moving mechanism when the X-axis eccentric cam screw 58 is rotated. 7 (a) and 7 (b) conceptually show the relationship between the constituent members in order to facilitate understanding of the linkage operation of the constituent members, and the ratio of the sizes of the constituent members. Is not necessarily the same as that shown in FIGS.

  As shown in FIGS. 7A and 7B, the X-axis pivot ring guide groove 56k has a substantially rectangular shape extending in the X-axis direction, and the short side thereof coincides with the diameter of the X-axis pivot ring 62. Dimensioned to do. The X-axis adjustment guide long hole 56c has an oval shape extending in the Y-axis direction, and is dimensioned so that the short diameter extending in the X-axis direction matches the diameter of the X-axis cam ring 60. ing.

  Here, in the X-axis direction moving mechanism, the X-axis eccentric cam ring 60 which is an eccentric cam in a direction perpendicular to the direction (X direction) to be moved is inserted into the X-axis adjustment guide long hole 56c formed in the adjuster string 56. Inserting.

  Therefore, when the X-axis eccentric cam screw 58 is rotated in the direction of the arrow D shown in FIGS. 7A and 7B, for example, the X-axis eccentric cam ring 60 is in the X-axis adjustment guide long hole 56c formed in the adjuster string 56. Is rotated, the rotational movement of the X-axis eccentric cam ring 60 is converted into the movement of the adjuster string 56 in the X-axis direction ((1) in FIGS. 7A and 7B → FIG. 7A). (B) (2)).

  Here, if there is no guide for preventing the adjuster string 56 from moving in the Y-axis direction, the eccentric cam motion in the above-described X-axis direction moving mechanism is not completely converted into linear motion.

  However, in this X-axis direction moving mechanism, the X-axis pivot ring 62 is disposed immediately below the X-axis eccentric cam ring 60 and accommodated in the X-axis pivot ring guide groove 56k formed in the adjuster string 56. For example, when the X-axis eccentric cam screw 58 is rotated in the direction of arrow D shown in FIGS. 7A and 7B, the eccentric cam motion by the X-axis eccentric cam ring 60 is restricted by the X-axis pivot ring 62. Thus, the image is converted only in the X-axis direction ((1) in FIGS. 7 (a) and 7 (b) → (2) in FIGS. 7 (a) and 7 (b), FIG. 8). At the same time, since the Y-axis eccentric cam screw 68 does not rotate when the X-axis eccentric cam screw 58 rotates, the Y-axis eccentric cam screw 68 also restricts the movement of the adjuster string 56 in the Y-axis direction.

  In other words, the rotation center of the X-axis pivot ring 62 coincides with the center axis of the X-axis pivot ring 62, so that the position does not change even if the X-axis pivot ring 62 rotates. However, since the rotation center of the X-axis eccentric cam ring 60 is eccentric, the X-axis eccentric cam ring 60 performs a planetary motion around the rotation axis of the X-axis pivot ring 62. Here, when the X-axis eccentric cam ring 60 is rotated in the direction of the arrow D shown in FIGS. 7A and 7B, the X-axis eccentric cam ring 60 moves the adjuster string 56 upward in FIG. 7 via the X-axis adjustment guide long hole 56c. Trying to push up (X-axis direction). However, since the X-axis pivot ring 62 is accommodated in the X-axis pivot ring guide groove 56k extending in the X-axis direction, the X-axis pivot ring 62 cannot move in the Y-axis direction. Is converted into the movement of the adjust string 56 in the X-axis direction.

  As described above, in the X-axis direction moving mechanism, when the X-axis eccentric cam screw 58 is rotated, the X-axis eccentric cam screw 58, the X-axis eccentric cam ring 60, the X-axis pivot ring 62, and the X string formed on the adjust ring 56 are rotated. By rotating the shaft adjustment guide slot 56c and the X-axis pivot ring guide groove 56k, the rotational drive around the optical axis (Z-axis) is converted into a linear motion in the X-axis direction. The visual field shift in the X-axis direction can be corrected.

  Next, the operation of the Y-axis direction moving mechanism will be described. In the Y-axis direction moving mechanism, the rotational movement of the Y-axis eccentric cam screw 68 is used as it is as the movement in the Y-axis direction. The guide long groove 56d and the Y-axis cam ring 60 are dimensioned so that the short side of the Y-axis adjustment guide long groove 56d extending in the Y-axis direction matches the diameter of the Y-axis eccentric cam ring 60.

  Therefore, when the Y-axis eccentric cam screw 68 is rotated, the adjuster string 56 rotates about the X-axis pivot ring 62 as a rotation center, thereby realizing the movement of the adjuster string 56 in the Y-axis direction. (See FIG. 9).

  Here, if the maximum adjustment amount of the visual field shift by the X-axis direction moving mechanism and the Y-axis direction moving mechanism described above is ± 0.5 mm, the movement of at least ± 0.6 mm must be ensured at the center position of the objective lens 36a. I must. For this reason, a movement amount of ± 1.2 mm is required in the vicinity of the Y-axis eccentric cam screw 68. However, as described above, the Y-axis direction moving mechanism is a pseudo model based on the rotational movement of the Y-axis eccentric cam screw 68. Therefore, a slight deviation in the X-axis direction occurs during adjustment in the Y-axis direction.

However, for example, if the amount of movement in the Y-axis direction is ± 0.58 mm, and the distance R from the X-axis pivot ring 62 is 22.75 mm, the adjuster string 56 at the time of maximum movement in the Y-axis direction is Rotate about 1.46 °. The amount of deviation in the X-axis direction at this time is
580 μm × sin 1.46 ° = 14.8 μm
(See FIG. 9). That is, a deviation of 14.8 μm in the X-axis direction is produced with respect to the maximum movement of 580 μm in the Y-axis direction of the objective lens, but this is a practically no problem level.

Next, correction of the defocus of the objective lens 36a to which the revolver 34 is fixed will be described. In this revolver 34, the objective lens 36a is attached to the confocal ring 84 inserted into the adjuster string 56 so that the objective lens 36a is focused. By rotating the ring 84, the height direction of the objective lens 36a can be moved. As shown in FIG. 10, the focusing ring 84 is formed by screwing the lock screws 86a and 86b into the lock screw fixing holes 56h and 56i of the adjuster string 56 through the screw stoppers 88a and 88b. 84a is fixed from the side.

  Here, since resin screw stoppers 88a and 88b are inserted between the lock screws 86a and 86b and the male screw 84a, the male screw 84a of the focusing ring 84 is secured even if the lock screws 86a and 86b are tightened strongly. On the other hand, the screw stoppers 88a and 88b having elasticity are appropriately crushed according to the shape of the male screw 84a, and the confocal ring 84 male screw 84a is not damaged.

  Further, when the lock screws 86a and 86b are tightened strongly, they do not rotate unless a certain amount of torque is applied to the confocal ring 84. However, as shown in FIGS. The locking protrusions 100a and 100b are locked to any pair of wrench receiving portions 84b, 84c, 84d, 84e, 84f, 84g, 84h, and 84i facing each other, for example, the wrench receiving portions 84e and 84i. Thus, if the gripper 100c is gripped and rotated in the direction of arrow E or arrow F, the confocal ring 84 can be easily rotated.

  In this way, since the bifurcated wrench 100 is used, the locking protrusions 100a and 100b are either one of the wrench receiving portions 84b, 84c, 84d, 84e, 84f, 84g, 84h, and 84i facing each other. The focusing ring 84 can be rotated in either the direction of the arrow E or the direction of the arrow F with the pair of, for example, the wrench receiving portions 84e and 84i being engaged.

  Even after the focusing ring 84 is rotated using the wrench 100 as described above, the focusing ring 84 is pressed by the appropriate crushing condition of the screw stoppers 88a and 88b and the elastic force caused by the crushing. And can be fixed. That is, there is no need to retighten the lock screws 86a and 86b after the focus ring 84 is rotated and the focus is adjusted, so that there is no adjustment deviation at the time of lock after the focus adjustment.

  In addition, by configuring the bifurcated portion of the wrench 100 to be larger than the outer diameter of the objective lens, the focus can be adjusted while the objective lens is attached to the confocal ring 84.

Hereinafter, an example of a procedure for correcting the field deviation and the focus deviation performed at the factory when the microscope including the revolver 34 having the above-described configuration is shipped will be described.

  Procedure 1: The objective lens 36e is directly attached to the objective lens attachment hole 40e in the rotor member 40 of the revolver 34. The objective lens 36a is based on the place where the objective lens attachment hole 40e is directly attached. , 36b, 36c, 36d, and 36e, the field of view and the focus are adjusted. In the objective lens mounting hole 40e (hereinafter referred to as “reference hole” where appropriate) serving as a reference, the one having the highest magnification in the objective lens group to be mounted is usually mounted.

  Procedure 2: First, observation is performed through the objective lens mounting hole 36e attached to the objective lens mounting hole 40e serving as a reference hole, and the position is aligned with the target in the screen. For example, some LCD repair devices can draw a central cross line in the screen of the display device, and in such a device, the center cross line and the target are aligned.

  Procedure 3: Next, the revolver 34 is rotated so that the objective lens to be adjusted is positioned on the optical axis. Here, when the objective lens has a field shift or a focus shift, it is shifted from the central cross line of the screen of the display device due to the field shift, and the observation position is different because the focus position is different. It will be out of focus.

  Procedure 4: Before correcting field-of-view deviation (referred to as “concentric adjustment” in this specification as appropriate), first, correction of focal position (referred to as “confocal adjustment” in this specification as appropriate). To do so). That is, using the wrench 100, the focusing ring 84 is turned to adjust the focus. As a result, the focusing adjustment is completed, and then the concentric adjustment is started.

  Step 5: Slightly loosen the three fixing screws 78a, 78b, and 78c that fix the adjuster string 56 to the rotor member 40. At this time, because of the repulsive force of the spring washers 82a, 82b, 82c, the adjuster string 56 is in close contact with the rotor member 40 without dropping off.

  Procedure 6: Using the above-described X-axis direction moving mechanism and Y-axis direction moving mechanism, adjustment is performed so that the target set in Procedure 2 is captured at the screen center position. Although the adjuster string 56 is in close contact with the rotor member 40, the adjuster string 56 slides and moves on the rotor member 40 by the eccentric cam motion of the X-axis direction moving mechanism and the Y-axis direction moving mechanism.

  Step 7: If the target is aligned with the center of the screen, the three fixing screws 78a, 78b, 78c loosened in step 5 are tightened and fixed, and the concentric adjustment is completed.

Therefore, in the revolver 34 equipped with the center adjusting mechanism and the focal position adjusting mechanism according to the present invention, the eccentric cam is arranged at a position facing the objective lens so as to adjust the position on the XY plane. In this case, a slide guide in the X-axis direction is provided on the X-axis side by providing a cam having a circular outer shape on a concentric circle with the rotary shaft separately from the eccentric cam having a circular outer shape eccentric to the rotary shaft. As a result, the objective lens can be displaced by, for example, a minute distance on the order of several μm by the slide accompanying the rotation of the eccentric cam in the X-axis direction, and extremely reproducible. This makes it possible to make good adjustments.

  On the Y-axis side, a rotational movement about the X-axis side can be moved in the Y-axis direction by a distance obtained by multiplying the eccentric amount corresponding to the rotation by the ratio from the fulcrum. On the Y-axis side, the X-axis side can be moved to the center as a fulcrum, so that the objective lens can be displaced, for example, by a minute distance on the order of several μm, and can be adjusted with extremely good reproducibility. Become.

  Furthermore, after adjusting the field deviation of the objective lens, the fixing screws 78a, 78b, 78c are fixed via the ring washer 76, so that the rotational torque when the fixing screws 78a, 78b, 78c are tightened is insulated. It is possible to eliminate the deviation after adjustment.

  Furthermore, since the ring washer 76 and the adjuster string 56 are urged by the spring washers 82a, 82b, and 82c, it is possible to perform adjustment with good visibility with no defocusing during adjustment and locking.

  Further, even after the focusing ring 84 is rotated using the wrench 100 to adjust the defocus of the objective lens, the focusing is achieved by the appropriate crushing condition of the screw stoppers 88a and 88b and the elastic force accompanying the crushing. The ring 84 can be pressed to hold the fixation. For this reason, there is no need to retighten the lock screws 86a and 86b after adjusting the focus by rotating the confocal ring 84, so that there is no adjustment deviation at the time of locking after focus adjustment.

  In addition, by configuring the bifurcated portion of the wrench 100 to be larger than the outer diameter of the objective lens, the focus can be adjusted while the objective lens is attached to the confocal ring 84.

  Even if the processing accuracy of the lock screws 86a and 86b is somewhat poor, the focusing ring 84 is pressed via the screw stoppers 88a and 88b, so that torque unevenness hardly occurs and adjustment is easy.

Next, FIG. 14 shows a second embodiment of the present invention. FIG. 14 is a diagram corresponding to FIG. 4, and is a detailed exploded perspective view of the main part showing mainly the periphery of the rotor member in which the objective lens mounting hole for mounting the objective lens is formed and the objective lens mounting portion. is there.

  In FIG. 14, the same or equivalent components as those in the first embodiment of the present invention shown in FIGS. Such explanation is omitted.

  In FIG. 14, only the parts different from the configuration of the first embodiment of the present invention shown in FIGS. 1 to 13 are shown, and other configurations not shown are shown in FIGS. The configuration is the same as that of the first embodiment of the present invention shown in FIG.

  Hereinafter, the second embodiment of the present invention will be described. Here, in the first embodiment of the present invention shown in FIGS. The shaft eccentric cam screw 58 (see FIG. 6) and the Y-axis eccentric cam screw 68 are configured, but this is a device for minimizing the center adjusting mechanism portion. If there is enough space to provide the center adjustment mechanism, the cost can be reduced by dividing the eccentric cam screw into several parts as shown in the second embodiment of the present invention in FIG. Can be produced.

  That is, the X-axis eccentric cam screw 58 shown in FIG. 6 can be composed of a commercially available hexagon socket screw 58h and an eccentric cam 58i. On the other hand, the Y-axis eccentric cam screw 68 can be composed of a commercially available hexagon socket head screw 68h and an eccentric cam 68i. This eliminates the need to manufacture the X-axis eccentric cam screw 58 and the Y-axis eccentric cam screw 68 having complicated shapes, and only the X-axis eccentric cam 58i and the Y-axis eccentric cam 68i are manufactured. Can be suppressed.

  Next, the machining component will be described in detail. First, the X-axis camshaft 64h is engaged with the bottom opening step 50a of the X-axis direction moving mechanism through hole 50 formed in the rotor member 40. The Y-axis camshaft 72h includes an edge 72m that engages with a bottom opening step 52a of a through-hole 52 for a Y-axis direction moving mechanism formed in the rotor member 40.

  The X-axis camshaft sliding portion 64j and the Y-axis camshaft sliding portion 72j are manufactured with a minus tolerance with respect to the X-axis direction moving mechanism through hole 50 and the Y-axis direction moving mechanism through hole 52. The axial camshaft 64h and the Y-axis camshaft 72h are configured to be sufficiently rotatable around the axis in the through-hole 50 for the X-axis direction moving mechanism and the through-hole 52 for the Y-axis direction moving mechanism.

  In the second embodiment shown in FIG. 14, the X-axis shaft ring 66 and the Y-axis shaft ring 74 are omitted, unlike the first embodiment shown in FIGS. For this reason, the X-axis camshaft 64h and the Y-axis camshaft 72h are slightly rattled in the through-hole 50 for the X-axis direction moving mechanism and the through-hole 52 for the Y-axis direction moving mechanism. Although the amount of movement is reduced, it is possible to manufacture without reducing the amount of movement by predicting this rattling at the time of design and increasing the amount of eccentricity of the X-axis eccentric cam 58i or the Y-axis eccentric cam 68i. As a material of the X-axis camshaft 64h and the Y-axis camshaft 72h, for example, brass can be used.

  In the X-axis camshaft 64 h inserted through the through-hole 50 for the X-axis direction moving mechanism, the X-axis pivot ring mounting portion 64 i jumps out of the rotor member 40. The X-axis pivot ring 62 is mounted on the X-axis pivot ring mounting portion 64i through the mounting hole 62a. Thereby, the X-axis pivot ring 62 is attached concentrically with the X-axis camshaft 64h. Next, a commercially available hexagon socket head screw 58h is screwed into the mounting hole 58k of the X-axis eccentric cam 58i, the X-axis cam ring 60 is inserted into the mounting portion 58j of the X-axis eccentric cam 58i, and the X-axis eccentric cam 58i and the X-axis The hexagon socket head screw 58h integrated with the cam ring 60 is screwed and fixed to the female screw 64k of the X-axis cam shaft 64h through the X-axis pivot ring 62, so that the X-axis in the first embodiment shown in FIGS. A mechanism portion similar to the direction moving mechanism can be constructed.

  Here, as the material of the X-axis pivot ring 62, as in the first embodiment shown in FIGS. 1 to 13, a material that is resistant to deformation, slippery, and does not wear is preferable, so POM is used. In the second embodiment shown in FIG. 14, stainless steel SUS304 (or SUS303) is used as the X-axis cam ring 60, but as in the first embodiment shown in FIGS. 1 to 13. POM may be used because a material that is resistant to deformation, slippery and does not wear is preferred. Furthermore, stainless steel SUS304 (or SUS303) can be used for the X-axis eccentric cam 58i.

  Next, the Y-axis direction moving mechanism is the same as the Y-axis direction moving mechanism in the first embodiment shown in FIGS. 1 to 13 by adopting the same structure as the above-described X-axis direction moving mechanism. A mechanism part can be constructed.

  That is, a commercially available hexagon socket head screw 68h is screwed into the mounting hole 68k of the Y-axis eccentric cam 68i, the Y-axis cam ring 70 is inserted into the mounting portion 68j of the Y-axis eccentric cam 68i, and the Y-axis eccentric cam 68i and the Y-axis cam ring are inserted. The same mechanism as the Y-axis direction moving mechanism in the first embodiment shown in FIGS. 1 to 13 is obtained by screwing and fixing the hexagon socket head screw 68h integrated with 70 to the female screw 72k of the Y-axis camshaft 72h. Department can be built.

  Further, in the second embodiment shown in FIG. 14, instead of the ring washer 76 in the first embodiment shown in FIGS. 1 to 13, three donut-shaped washers 81a, 81b, 81c are provided. Used.

  Accordingly, in the second embodiment shown in FIG. 14, the spring screws 82a, 82b, 82c, the plain washers 80a, 80b, 80c and the washers 81a, 81b, 81c are inserted into the fixing screws 78a, 78b, 78c and then fixed. The screws 78a, 78b, and 78c are passed through the fixing screw through holes 56e, 56f, and 56g of the adjust string 56 and screwed to the screw holes 54a, 54b, and 54c of the rotor member 40, thereby adjusting the rotor member 40. The ring 56 is energized, and the adjuster string 56 is held by the rotor member 40 in a state of being relatively movable with a predetermined tolerance.

The above-described embodiment can be modified as shown in the following (1) to (9).

  (1) In the above-described embodiment, the focusing ring 84 that is the objective lens mounting member is screwed to the adjuster string 56 that is the objective lens fixing system member, and the rotor member is interposed via the focusing ring 84 and the adjuster string 56. Although the objective lens 36a is arranged with respect to 40, it is needless to say that the present invention is not limited to this. For example, the objective lens 36a may be directly attached to the adjust string 56, or the objective lens 36a may be attached to the adjust string 56 via a known focal position adjustment mechanism as a defocus correction mechanism.

  (2) In the above-described embodiment, the focal point of the objective lens 36a is adjusted by screwing the focusing ring 84, which is the objective lens mounting member, to the adjuster string 56, which is the objective lens fixing system member. Of course, the present invention is not limited to this. For example, a cylindrical member having a female screw formed on the inner peripheral surface and a through hole in the radial direction formed with a female screw formed on the wall surface so as to surround the objective lens mounting hole 40a of the rotor member 40 is disposed. Alternatively, the focal point of the objective lens 36a may be adjusted by screwing the confocal ring 84. In this case, a known heart adjustment mechanism may be provided as a visual field shift correction mechanism as necessary.

  (3) In the above-described embodiment, the X-axis eccentric cam screw 58, the X-axis eccentric cam ring 60, the X-axis pivot ring 62, the X-axis cam shaft 64, and the X-axis shaft ring 66 are configured as separate bodies. The members configured as a body were assembled and integrated.

At this time, if the X-axis eccentric cam ring 60, the X-axis pivot ring 62, and the X-axis shaft ring 66 are made of resin, it is possible to realize a structure that can be freely joined and rotated without providing a gap between the components. Therefore, it is possible to realize operability without causing a delay in operation when the motor is rotated forward and reverse. However, it is of course not limited to this, and the whole may be integrally formed in advance with metal or resin, or only appropriate members may be separately configured and assembled. .

  (4) In the above-described embodiment, the Y-axis eccentric cam screw 68, the Y-axis eccentric cam ring 70, the Y-axis cam shaft 72, and the Y-axis shaft ring 74 are configured as separate bodies, and the members configured as these separate bodies are provided. It was assembled and integrated. At this time, if the Y-axis eccentric cam ring 70 and the Y-axis shaft ring 74 are made of resin, it is possible to realize a structure that can be freely joined and rotated without providing a gap between the parts. It is possible to realize operability without causing a delay in operation at times. However, it is of course not limited to this, and the whole may be integrally formed in advance with metal or resin, or only appropriate members may be separately configured and assembled. .

  (5) In the above-described embodiment, the X-axis pivot ring 62 and the X-axis eccentric cam ring 60 are arranged in this order from the rotor member 40 side, but the present invention is not limited to this. The arrangement relationship between the ring 62 and the X-axis eccentric cam ring 60 may be reversed, and the X-axis eccentric cam ring 60 and the X-axis pivot ring 62 may be arranged sequentially from the rotor member 40 side. In that case, the arrangement of the X-axis adjustment guide slot 56c and the X-axis pivot ring guide groove 56k formed in the adjuster string 56 may be changed as appropriate.

  (6) In the above-described embodiment, a detailed description of a specific adjustment amount at the time of concentric adjustment is omitted, but for example, it can be set as follows.

Adjustment range: ± 0.6 mm (guaranteed value: ± 0.5 mm)
Eccentricity at 180 ° X axis: 0.6 mm (moving amount: 1.2 mm)
Y axis: 1.2 mm (movement amount: 2.4 mm)
(7) In the above-described embodiment, the X-axis eccentric cam screw 58 has a cross-shaped through-hole 58e drilled in the head 58d. However, the present invention is not limited to this. . For example, an X-axis eccentric cam screw 158 shown in FIG. 13 may be used in which a hexagonal hole 158e with which a hexagonal wrench can be engaged is formed at the top of the head 58d. As the material of the X-axis eccentric cam screw 158, SCM235 made of chromium molybdenum steel, 440C made of stainless steel, or the like can be used. When quenching is performed after the molding is completed, the strength of the hexagonal hole 158e can be further improved, and the service life of the X-axis eccentric cam screw 158 can be extended. In FIG. 13, for the sake of easy understanding, the same or corresponding components as those of the X-axis eccentric cam screw 58 shown in FIG. 6 are denoted by the same reference numerals as those in FIG.

  (8) In the above-described embodiment, the spring washers 82a, 82b, and 82c are used as the biasing means. However, the present invention is not limited to this, and a coil spring, a leaf spring, or the like is used. It is also possible.

  (9) You may make it combine suitably the embodiment shown above and the modification shown in said (1)-(8).

  The present invention can be used not only for a microscope provided with a plurality of objective lenses but also for various apparatuses equipped with such a microscope, such as a microscope-mounted laser processing apparatus and an LCD repair apparatus.

FIG. 1 is a schematic external configuration diagram of an LCD repair device equipped with a microscope apparatus equipped with an example of an embodiment of a center adjustment mechanism and a focus adjustment mechanism in a revolver according to the present invention, and FIG. It is a schematic external appearance front view of an apparatus, and FIG.1 (b) is a schematic external appearance right view. FIG. 2 is an explanatory diagram of the external configuration of the laser oscillation unit and the microscope unit in the LCD repair device shown in FIG. FIG. 3 is a schematic external structural view of the revolver as viewed in the direction of arrow A in FIG. FIG. 4 is a detailed exploded perspective view of the main part of the revolver, centered on the periphery of the rotor member in which the objective lens mounting hole for mounting the objective lens is formed and the objective lens mounting portion. FIG. 5 is a schematic vertical cross-sectional view of a main part of the revolver showing the periphery of the rotor member in which the objective lens mounting hole for mounting the objective lens is formed and the objective lens mounting portion as a center. FIG. 6 is an explanatory diagram of the configuration of the X-axis eccentric cam screw, FIG. 6 (a) is a front view, and FIG. 6 (b) is a view taken in the direction of arrow B in FIG. 6 (a). FIG. 7 shows the operation of the X-axis direction moving mechanism when the X-axis eccentric cam screw is rotated, that is, between the X-axis eccentric cam ring, the X-axis pivot ring, the X-axis adjustment guide long hole, and the X-axis pivot ring guide groove. 7A and 7B are explanatory views showing details of the linkage operation, in which FIG. 7A shows the cross-sectional movement of the X-axis pivot ring, and FIG. 7B shows the cross-sectional movement of the X-axis eccentric cam ring. FIG. 8 is an explanatory diagram of the operation of the X-axis direction moving mechanism when the X-axis eccentric cam screw is rotated. FIG. 9 is an explanatory diagram of the operation of the Y-axis direction moving mechanism when the Y-axis eccentric cam screw is rotated. FIG. 10 is a cross-sectional view of the main part showing a state in which the confocal ring is fixed to the adjuster with the lock screw via the screw stopper. FIG. 11 is a perspective view of a schematic configuration of a main part showing a state in which the focus of the objective lens is adjusted. FIG. 12 is a schematic top view illustrating a state in which the focus of the objective lens is adjusted. FIG. 13 is a configuration explanatory view of an X-axis eccentric cam screw according to another embodiment, FIG. 13 (a) is a front view, and FIG. 13 (b) is a view taken in the direction of arrow G in FIG. 13 (a). . FIG. 14 shows a second embodiment of the present invention and corresponds to FIG. 4 showing the periphery of the rotor member in which the objective lens mounting hole for mounting the objective lens is formed and the objective lens mounting portion. FIG. 14 is a detailed exploded perspective view of a part, and the same or corresponding components as those of the first embodiment of the present invention shown in FIGS. 1 to 13 are denoted by the same reference numerals.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 LCD repair apparatus 20 Laser oscillation part 30 Microscope part 32 Microscope unit 34 Revolver 36a, 36b, 36c, 36d, 36e Objective lens 38 Focusing vertical mechanism 40 Rotor member 40a, 40b, 40c, 40d, 40e Objective lens attachment hole 42a , 42b, 42c, 42d Objective lens mounting part 56 Adjustable string

Claims (8)

In a center adjustment mechanism in a revolver in which a plurality of objective lenses are respectively disposed in a plurality of objective lens mounting holes formed on the same circumference around the rotation axis of a rotatable rotor member,
First eccentric cam means arranged in the vicinity of the objective lens mounting hole of the rotor member and converting the rotational motion into a first linear motion in a predetermined direction along a plane perpendicular to the optical axis direction;
The rotor member is disposed in the vicinity of the objective lens mounting hole of the rotor member so as to face the first eccentric cam means, and the rotational motion is orthogonal to the predetermined direction along the plane. Second eccentric cam means for converting to a second linear motion in a direction;
The first eccentric cam means and the second eccentric cam means are engaged with each other to move in the first linear motion direction in accordance with the first linear motion, and the second linear motion And an objective lens fixing system member that moves in the second linear motion direction according to
A center adjustment mechanism in a revolver, wherein the objective lens is fixed to the rotor portion via the objective lens fixing system member. The center adjustment mechanism in the revolver according to claim 1, further comprising:
And a guide means for guiding the movement of the objective lens fixing system member in the first linear motion direction. In a center adjustment mechanism in a revolver in which a plurality of objective lenses are respectively disposed in a plurality of objective lens mounting holes formed on the same circumference around the rotation axis of a rotatable rotor member,
A first eccentric cam portion that is arranged near the objective lens mounting hole of the rotor member and is eccentric with respect to the axis that is rotatable about an axis perpendicular to a plane perpendicular to the optical axis direction of the objective lens; First cam means having a cam portion concentric with the axis;
The axis line disposed near the objective lens mounting hole of the rotor member so as to face the first cam means with the objective lens mounting hole interposed therebetween, and rotatable about an axis perpendicular to the plane Second cam means having a second eccentric cam portion eccentric with respect to
Along with the rotation of the first cam means, it can move along the plane with respect to the first cam means, and with the rotation of the second cam means, along the plane with respect to the second cam means. The first eccentric cam is extended by a predetermined direction along the plane and the first eccentric cam portion is arranged so as to move along with the rotation of the first cam means. A first eccentric cam guide portion that is relatively movable only in the predetermined direction; and the first eccentric cam guide portion that extends in a direction orthogonal to the predetermined direction along the plane, and the cam portion is disposed to A cam guide portion that is relatively movable only in the orthogonal direction by the movement accompanying rotation of the cam means, and a second eccentric cam portion that extends in the orthogonal direction and the second eccentric cam portion. First cam means or An objective lens fixing system member having a second eccentric cam guide portion that can relatively move the second eccentric cam portion only in the orthogonal direction by the movement accompanying the rotation of the second cam means. Have
The objective lens fixing system member is moved in the orthogonal direction with the rotation of the first cam means, and the objective lens fixing system member is moved in the predetermined direction with the rotation of the second cam means. The centering mechanism in the revolver. In the center adjustment mechanism in the revolver according to any one of claims 1, 2, or 3,
And a biasing means for biasing the objective lens fixing system member with respect to the rotor member. In a focus adjustment mechanism in a revolver in which a plurality of objective lenses are respectively disposed in a plurality of objective lens mounting holes formed on the same circumference around the rotation axis of a rotatable rotor member,
An objective lens fixing system that has a cylindrical shape that is disposed to surround the objective lens mounting hole of the rotor member and that has an internal thread formed on the inner peripheral surface, and that has a through-hole in the radial direction in which the internal thread is formed on the wall surface Members,
It has a cylindrical shape with an external thread formed on the outer peripheral surface, an objective lens is mounted on the inner diameter side, and the female screw of the objective lens fixing system member and the male screw are screw-coupled, whereby light is transmitted to the objective lens fixing system member. An objective lens mounting member fixed to be movable in the axial direction;
A coupling member formed on the outer peripheral surface of a male screw that is screw-coupled with the female screw formed in the through hole;
An elastic body disposed between the male screw of the objective lens mounting member and the coupling member in the through hole;
Fixing the objective lens fixing system member and the objective lens mounting member by screwing the coupling member into the through hole and pressing the male screw of the objective lens mounting member via the elastic body. The focus adjustment mechanism in the revolver. The focus adjustment mechanism in the revolver according to claim 5,
The objective lens mounting member is formed with at least a pair of notch portions arranged opposite to each other at the top portion. In the center adjustment mechanism in the revolver according to any one of claims 1, 2, 3, or 4,
The objective lens fixing system member has a cylindrical shape that is disposed so as to surround the objective lens mounting hole of the rotor member and has an internal thread formed on an inner peripheral surface thereof, and has a radial direction in which an internal thread is formed on a wall surface. A through hole is drilled, and
It has a cylindrical shape with an external thread formed on the outer peripheral surface, an objective lens is mounted on the inner diameter side, and the female screw of the objective lens fixing system member and the male screw are screw-coupled, whereby light is transmitted to the objective lens fixing system member. An objective lens mounting member fixed to be movable in the axial direction;
A coupling member formed on an outer peripheral surface of a male screw that is screw-coupled with a female screw formed in the through hole; and an elasticity that is disposed between the male screw of the objective lens mounting member and the coupling member in the through hole. Has a body and
Fixing the objective lens fixing system member and the objective lens mounting member by screwing the coupling member into the through-hole and pressing the male screw of the objective lens mounting member via the elastic body. The centering mechanism in the revolver. The center adjustment mechanism in the revolver according to claim 7,
The objective lens mounting member is formed with at least a pair of notch portions arranged opposite to each other at the top portion.

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