JP2006071477A - Angular velocity sensor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent to the utmost generation of an output error caused by deflection of a vibrator for angular velocity detection generated by driving vibration of a vibrator for driving, in an angular velocity sensor equipped with the vibrator for driving and the vibrator for angular velocity detection supported by a support substrate so as to be able to vibrate in mutually orthogonal directions. <P>SOLUTION: This sensor is equipped with the vibrator 30 for driving capable of vibrating in the first direction x and the vibrator 40 for angular velocity detection capable of vibrating in the second direction y. The vibrator 40 for angular velocity detection is connected to a support substrate 11 and supported thereby through a detection beam 45 having the degree of freedom in the second direction y, and has a shape extending along the second direction y, and the vibrator 30 for driving is connected to the vibrator 40 for angular velocity detection and supported thereby through a driving beam 35 having the degree of freedom in the first direction x, and the ratio (W/L) between the length L along the second direction y and the width W along the first direction x of the vibrator 40 for angular velocity detection is 0.1 or more. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an angular velocity sensor including a driving vibrator capable of vibrating in a first direction and an angular velocity detecting vibrator capable of vibrating in a second direction orthogonal to the first direction.

In general, this type of angular velocity sensor includes a support substrate, a driving vibrator supported on the support substrate so as to vibrate in a first direction, and a support substrate in a second direction orthogonal to the first direction. And an angular velocity detecting vibrator supported so as to be able to vibrate (see, for example, Patent Document 1).
Japanese Patent No. 2888029

  The inventor made a trial manufacture and examined the conventional angular velocity sensor as described above. FIG. 4 is a diagram showing a schematic plan configuration of an angular velocity sensor as a prototype.

  In this angular velocity sensor, a groove 25 is formed in a semiconductor substrate 10 such as a silicon substrate by using a known semiconductor manufacturing technique such as etching, so that a movable portion 25 including vibrators 30 and 40 as shown in FIG. , And each electrode 60, 70, 80 is formed by partitioning.

  The movable unit 25 includes a drive vibrator 30, an angular velocity detection vibrator 40, a drive beam 35 that couples both the vibrators 30 and 40, and a detection beam 45 that couples the angular velocity detection vibrator 40 to the substrate 10. And is configured.

  The driving vibrator 30 includes a weight portion 31 extending in the x direction in FIG. 4 and a plurality of extending portions 32 extending in the y direction on both sides of the weight portion 31.

  In addition, two angular velocity detecting vibrators 40 are provided on both outer sides of the weight portion 31 of the driving vibrator 30 in the x direction (hereinafter referred to as the first direction x) in FIG. Hereinafter, it has an elongated shape extending along the second direction y).

  Here, both ends of the weight portion 31 of the driving vibrator 30 are connected to the angular velocity detecting vibrator 40 via the driving beam 35. The angular velocity detecting vibrator 40 is connected to an anchor portion 50 that is a fixed portion to the substrate 10 via a detection beam 45. As a result, the movable portion 25 can move in a direction parallel to the substrate surface of the substrate 10 by connecting the four detection beams 45 to the anchor portion 50.

  Here, the drive beam 35 has a degree of freedom in the first direction x, and the detection beam 45 has a degree of freedom in the second direction y. With such a configuration of the beams 35 and 45, the driving vibrator 30 is supported by the support substrate 11 in a state where it can vibrate in the first direction x, and the angular velocity detecting vibrator 40 has the first shape. The shape is supported by the support substrate 11 so as to vibrate in a second direction y orthogonal to the direction x.

  Further, as shown in FIG. 4, a driving fixed electrode 60 fixed to the substrate 10 is disposed opposite to the side surface of each extending portion 32 of the driving vibrator 30. Further, the angular velocity detection fixed electrode 70 fixed to the substrate 10 is disposed opposite to the outer side surface of the angular velocity detection transducer 40.

  In the angular velocity sensor shown in FIG. 4, a vibration detecting fixed electrode 80 fixed to the substrate 10 is disposed opposite to the driving vibrator 30. The vibration detection fixed electrode 80 is configured as a monitor electrode for monitoring the drive vibration of the drive vibrator 30 in the first direction x.

  The detection operation of such an angular velocity sensor will be described. The detection operation is performed via each pad 50a, 60a, 70a, 80a and each electrode 60-80.

  First, the drive vibrator 30 is driven to vibrate in the first direction x via the drive fixed electrode 60. Under this driving vibration, when the angular velocity Ω is applied about the axis z orthogonal to the first direction x and the second direction y, the angular velocity detecting vibrator 40 is applied by the Coriolis force applied to the driving vibrator 30. Oscillates in the second direction y.

  The distance between the angular velocity detecting vibrator 40 and the angular velocity detecting fixed electrode 70 is changed by the detection vibration of the angular velocity detecting vibrator 40, and the angular velocity Ω is detected based on the change in capacitance between the two. I am doing so.

  In the angular velocity sensor having such a configuration, it is preferable that only the driving vibrator 30 vibrates during driving vibration.

  However, since the angular velocity detecting vibrator 40 has a shape extending along the second direction y, the vibration from the driving vibrator 30 is slightly transmitted to the angular velocity detecting vibrator 40, and the angular velocity is thus increased. The detection transducer 40 may bend along the width direction, that is, the first direction x.

  As described above, the angular velocity detecting vibrator 40 performs output by a change in capacitance with the angular velocity detecting fixed electrode 70. However, when the angular velocity detecting vibrator 40 bends as described above, The capacitance change due to the deflection occurs, and components other than the angular velocity component that should be detected are detected, leading to an output error.

  Specifically, when the angular velocity detecting vibrator 40 bends in the first direction x, the angular velocity detecting vibrator 40 is also deformed in the second direction y. Then, the distance (interval) along the second direction y between the angular velocity detecting transducer 40 and the angular velocity detecting fixed electrode 70 changes. The capacitance change is caused by this distance change.

  The present invention has been made in view of the above problems, and in an angular velocity sensor including a driving vibrator and an angular velocity detection vibrator supported on a support substrate so as to be able to vibrate in directions orthogonal to each other, the driving vibration is provided. An object of the present invention is to prevent the angular velocity detecting vibrator from being bent by the driving vibration of the child and generating an output error as much as possible.

  To achieve the above object, according to the first aspect of the present invention, there is provided a support substrate (11) and a driving vibrator (30) supported by the support substrate (11) so as to vibrate in the first direction (x). And an angular velocity detecting vibrator (40) supported on the support substrate (11) so as to vibrate in a second direction (y) orthogonal to the first direction (x). It features the following points.

  The vibrator for detecting angular velocity (40) is connected to and supported by the support substrate (11) via a detection beam (45) having a degree of freedom in the second direction (y), and the second direction ( It has a shape extending along y).

  The driving vibrator (30) is connected to and supported by the angular velocity detecting vibrator (40) via a driving beam (35) having a degree of freedom in the first direction (x).

  An angular velocity is applied about an axis (z) orthogonal to the first direction (x) and the second direction (y) under the vibration of the driving vibrator (30) in the first direction (x). The angular velocity detecting vibrator (40) vibrates in the second direction (y) due to the Coriolis force applied to the driving vibrator (30), and based on the vibration of the angular velocity detecting vibrator (40). To detect the angular velocity.

  The ratio (W / L) of the length L along the second direction (y) and the width W along the first direction (x) in the angular velocity detecting vibrator (40) is 0.1 or more Be. The present invention is characterized by these points.

  The present invention is based on the result of FEM (finite element method) analysis performed by the present inventor for the angular velocity sensor having the configuration as shown in FIG. 4, and according to the analysis, the ratio (W / L ) Is 0.1 or more, the deflection amount in the second direction (y) of the angular velocity detecting vibrator (40) due to the driving vibration of the driving vibrator (30) is reduced to a level that does not cause a problem in practice. It can be made smaller (see FIG. 3).

  Therefore, according to the present invention, the driving vibrator (30) and the angular velocity detecting vibrator (40) supported by the support substrate (11) so as to vibrate in directions (x, y) orthogonal to each other are provided. In the angular velocity sensor, it is possible to prevent the angular velocity detecting vibrator (40) from being bent by the driving vibration of the driving vibrator (30) and generating an output error as much as possible.

  Here, as in the invention according to claim 2, in the angular velocity sensor according to claim 1, the ratio (W / L) in the angular velocity detecting vibrator (40) is represented by x, and the driving vibrator ( 30) When the amount of displacement of the angular velocity detecting vibrator (40) in the second direction (y) during vibration in the first direction (x) is expressed in units of mm, the ratio x and the displacement The amount Y can satisfy the relationship expressed by the following formula 2.

(Equation 2)
Y = 0.0148x ⁴ −0.0076x ³ + 0.0015x ² −0.0001x + 6 × 10 ⁻⁶
In addition, the code | symbol in the bracket | parenthesis of each said means is an example which shows a corresponding relationship with the specific means as described in embodiment mentioned later.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following embodiments and in FIG. 4, the same or equivalent parts are denoted by the same reference numerals in the drawings for the sake of simplicity.

  FIG. 1 is a schematic plan view of a capacitive angular velocity sensor 100 according to an embodiment of the present invention, and FIG. 2 is a schematic sectional view taken along line AA in FIG.

  The angular velocity sensor 100 is composed of a semiconductor substrate 10 such as a silicon substrate, and a groove is formed in the semiconductor substrate 10 using a known semiconductor manufacturing technique such as etching, as shown in FIG. The movable portion 25 including the vibrators 30 and 40 and the electrodes 60, 70, and 80 are partitioned and formed in the frame portion 20.

  Specifically, as shown in FIG. 2, the semiconductor substrate 10 includes an insulating film 13 such as a silicon oxide film between a first semiconductor layer 11 as a support substrate and a second semiconductor layer 12 thereon. This is an SOI (silicon on insulator) substrate sandwiched between two layers.

  Then, in this semiconductor substrate 10, by performing trench etching and release etching from the surface of the second semiconductor layer 12, the partitioned frame portion 20 as described above is movable with respect to the second semiconductor layer 12. The part 25 and each fixed electrode 60-80 are formed.

  Among these portions, the frame portion 20 and the fixed electrodes 60 to 80 are supported and fixed to the first semiconductor layer 11 as a support substrate via the insulating film 13 as shown in FIG. That is, the frame portion 20 and the fixed electrodes 60 to 80 correspond to fixed portions fixed to the support substrate 11 (that is, the substrate 10).

  The movable portion 25 includes a driving vibrator 30, an angular velocity detecting vibrator 40, a driving beam 35 connecting the two vibrators 30 and 40, the angular velocity detecting vibrator 40, and a first semiconductor as a support substrate. A detection beam 45 connecting the layer 11 is provided.

  The driving vibrator 30 includes a weight portion 31 extending in the x direction in FIG. 1 and extending portions 32 extending in the y direction on both sides of the weight portion 31. In this example, the extending part 32 is provided with a total of eight, four on the upper side of the weight part 31 and four on the lower side.

  Further, two angular velocity detecting vibrators 40 are provided on both outer sides of the weight portion 31 of the driving vibrator 30 in the x direction (hereinafter referred to as the first direction x) in FIG. Hereinafter, it has an elongated shape extending along the second direction y).

  In the present embodiment, the ratio (W / L) of the length L along the second direction y and the width W along the first direction x in the angular velocity detecting vibrator 40 is 0.1 or more. Adopted a unique configuration. The reason why this ratio (W / L) is 0.1 or more will be described later.

  Here, both ends of the weight portion 31 of the driving vibrator 30 are connected to the angular velocity detecting vibrator 40 via the driving beam 35. As shown in FIG. 1, in this example, the drive vibrator 30 and the angular velocity detection vibrator 40 are connected by four drive beams 35.

  The angular velocity detecting vibrator 40 is connected to an anchor portion 50 that is a fixed portion to the support substrate 11 via a detection beam 45. The anchor portion 50 is supported and fixed to the first semiconductor layer 11 as a supporting substrate via the insulating film 13 in the same manner as the frame portion 20 shown in FIG.

  In this example, as shown in FIG. 1, four anchor portions 50 are provided, and the detection beam 45 is connected to each anchor portion 50 as a cantilever. Accordingly, the movable portion 25 is supported so as to float on the support substrate 11 by connecting the four detection beams 45 to the support substrate 11 via the anchor portions 50.

  More specifically, the angular velocity detecting vibrator 40 is connected and supported to the support substrate 11 via the detection beam 45, and the driving vibrator 30 includes the angular velocity detecting vibrator 40 and the detection. Although the beam 45 is interposed, the beam is connected to the support substrate 11 via the driving beam 35.

  Here, the drive beam 35 has a degree of freedom in the first direction x. In this example, as shown in FIG. 1, the drive beam 35 has a plurality of beams, and can be substantially deformed by spring only in the first direction x.

  The detection beam 45 has a degree of freedom in the second direction y. In this example, as shown in FIG. 1, the detection beam 45 has a beam shape extending in the x direction, and can be substantially spring-deformed only in the second direction y. The resonance frequency is different between the drive beam 35 and the detection beam 45.

  With such a configuration of the beams 35 and 45, the driving vibrator 30 is supported by the support substrate 11 in a state where it can vibrate in the first direction x, and the angular velocity detecting vibrator 40 has the first shape. The shape is supported by the support substrate 11 so as to be able to vibrate in a second direction y orthogonal to the direction x. Therefore, the movable portion 25 can move in a direction parallel to the substrate surface of the support substrate 11.

  In addition, an angular velocity detection pad 50a is formed in each anchor portion 50 to which the detection beam 45 that cantilever-supports the movable portion 25 is connected, and the pad 50a and the detection beam 45 are electrically connected. Yes. A predetermined voltage can be applied to the driving vibrator 30 and the angular velocity detecting vibrator 40 through the angular velocity detecting pad 50a.

  Further, as shown in FIG. 1, the driving fixed electrode 60 fixed to the support substrate 11 is disposed opposite to the side surface of each extending portion 32 of the driving vibrator 30. And in the site | part which the extension part 32 of the drive vibrator | oscillator 30 and the drive fixed electrode 60 oppose, the comb-tooth part which protrudes in a comb-tooth shape from the opposing surface toward the other party is a mutual comb. It is provided so that teeth may mesh.

  Each driving fixed electrode 60 is electrically connected to a driving pad 60 a provided in the vicinity of the frame portion 20. A driving voltage is applied to the driving fixed electrode 60 through the driving pad 60a.

  As shown in FIG. 1, the angular velocity detection fixed electrode 70 fixed to the support substrate 11 is disposed opposite to the outer side surface of the angular velocity detection transducer 40. Here, two angular velocity detection fixed electrodes 70 are provided on each of the angular velocity detection transducers 40 in the vertical direction.

  Then, at the portion where the angular velocity detecting vibrator 40 and the angular velocity detecting fixed electrode 70 are opposed to each other, the comb teeth projecting in a comb shape from the opposing surface toward each other mesh with each other. It is provided as follows.

  Each angular velocity detection fixed electrode 70 is electrically connected to an angular velocity detection pad 70 a provided in the vicinity of the frame portion 20. The potential of the angular velocity detecting fixed electrode 70 can be measured through the angular velocity detecting pad 70a.

  Further, as shown in FIG. 1, a vibration detecting fixed electrode 80 fixed to the support substrate 11 is disposed opposite to the driving vibrator 30. Here, a total of four vibration detection fixed electrodes 80 are provided, two at the top and bottom at a position outside the drive fixed electrode 60.

  And in the site | part which the vibrator | oscillator 30 for a drive and the fixed electrode 80 for a vibration detection oppose, the comb-tooth part which protrudes in a comb-tooth shape toward the other party from the opposing surface of each other so that a mutual comb tooth may mesh | engage Is provided.

  Each vibration detection fixed electrode 80 is electrically connected to a vibration detection pad 80 a provided in the vicinity of the frame portion 20. The potential of the vibration detection fixed electrode 80 can be measured through the vibration detection pad 80a.

  The frame portion 20 is configured to surround the movable portion 25 including the vibrators 30 and 40 and the fixed electrodes 60, 70, and 80. The frame portion 20 is interposed via a pad or the like (not shown). , Being held at the GND potential. With such a configuration, the angular velocity sensor 100 of the present embodiment is configured.

  Next, a driving method of the angular velocity sensor 100 of the present embodiment will be described.

  The angular velocity sensor 100 of the present embodiment is driven by applying a desired driving voltage to the driving pad 60a to which the driving fixed electrode 60 is electrically connected.

  When the driving voltage is applied to the driving pad 60a, it is formed between the driving fixed electrode 60 and the extending portion 32 of the driving vibrator 30 in accordance with the periodic fluctuation of the AC component of the driving voltage. A suction force due to the volume is generated. As a result, the driving beam 35 is bent, and the driving vibrator 30 is vibrated in the first direction x, that is, driven and vibrated.

  At this time, the amount of overlap between the comb tooth portion of the vibration detecting fixed electrode 80 and the comb tooth portion of the driving vibrator 30 varies in accordance with the drive vibration, so that the capacitance formed by these changes.

  By measuring this change in capacitance from the potential of the vibration detection pad 80a to which the vibration detection fixed electrode 80 is connected, the magnitude of the drive vibration can be monitored. For this reason, the drive voltage is feedback-controlled in accordance with the magnitude of the drive vibration so that the magnitude of the drive vibration becomes a desired value.

  When an angular velocity Ω about the rotation axis z orthogonal to the directions x and y is input in a state where the drive vibration is performed, a Coriolis force is generated, and the deflection of the detection beam 45 causes the drive vibrator 30 and The entire movable unit 25 including the angular velocity detecting vibrator 40 performs detection vibration along the second direction y.

  Thereby, the space | interval between the comb-tooth part provided in the vibrator | oscillator 40 for angular velocity detection and the comb-tooth part provided in the fixed electrode 70 for angular velocity detection changes, and the capacity | capacitance formed by these changes. Since the potential of the angular velocity detection fixed electrode 70 changes with the change in capacitance, the angular velocity Ω can be detected by measuring this potential.

  By the way, according to the present embodiment, the support substrate 11, the driving vibrator 30 supported on the support substrate 11 so as to vibrate in the first direction x, and the support substrate 11 orthogonal to the first direction x. The angular velocity sensor 100 including the angular velocity detecting vibrator 40 supported so as to vibrate in the second direction y is characterized by the following points.

  The angular velocity detecting vibrator 40 is connected to and supported by the support substrate 11 via a detection beam 45 having a degree of freedom in the second direction y, and has a shape extending along the second direction y. Being.

  The driving vibrator 30 is connected to and supported by the angular velocity detecting vibrator 40 via a driving beam 35 having a degree of freedom in the first direction x.

  When the angular velocity Ω is applied around the axis z under the vibration of the driving vibrator 30 in the first direction x, the angular velocity detecting vibrator 40 is secondly applied by the Coriolis force applied to the driving vibrator 30. The angular velocity Ω is detected based on the vibration of the angular velocity detecting vibrator 40.

  The ratio (W / L) of the length L along the second direction y to the width W along the first direction x in the vibrator for detecting angular velocity 40 is 0.1 or more. The present embodiment is characterized by these points.

  The basis for the above ratio (W / L) being 0.1 or more will be described.

  As described above, when the angular velocity detecting vibrator 40 has a shape extending along the second direction y, the vibration from the driving vibrator 30 is transmitted to the angular velocity detecting vibrator 40, and the angular velocity is thus increased. The detection transducer 40 may bend along the width direction, that is, the first direction x.

  When the angular velocity detecting vibrator 40 bends in the first direction x, the angular velocity detecting vibrator 40 is also deformed in the second direction y. Then, since the distance (interval) along the second direction y between the angular velocity detecting transducer 40 and the angular velocity detecting fixed electrode 70 changes, a capacitance change occurs between the two 40 and 70 and should be originally detected. Components other than the angular velocity component are also detected, leading to an output error.

  In order to suppress the deflection along the first direction x of the angular velocity detecting vibrator 40 and to suppress the accompanying displacement of the angular velocity detecting vibrator 40 in the second direction y, the angular velocity detecting vibrator 40 is used. It is considered that the width W along the first direction x may be increased to increase the rigidity in the same direction x.

  However, even if the width is simply increased, the length L of the angular velocity detecting vibrator 40 is also taken into consideration, and if the width W is not increased, the angular velocity detecting vibrator 40 is moved in the first direction x. The rigidity does not increase.

  Accordingly, as the parameters of the rigidity of the angular velocity detecting vibrator 40 in the first direction x, the length L along the second direction y and the width W along the first direction x in the angular velocity detecting vibrator 40. (W / L) was adopted (see FIG. 1).

  Then, FEM (finite element method) analysis was performed, and the relationship between this ratio (W / L) in driving vibration and the displacement of the angular velocity detecting vibrator 40 in the second direction y was examined. In this analysis, for the drive vibration, for example, the period of the drive vibration in the first direction x of the drive vibrator 30 can be about several kHz.

  FIG. 3 is a diagram showing a result of investigating the relationship between the ratio (W / L) in the drive vibration by the FEM analysis and the displacement of the angular velocity detecting vibrator 40 in the second direction y (ie, displacement in the y direction). It is. In FIG. 3, the ratio (W / L) is represented by x on the horizontal axis, and the amount of y-direction displacement is represented by Y with the unit being mm, on the vertical axis.

  As shown in FIG. 3, in the angular velocity sensor 100 of the present embodiment, the ratio x and the displacement amount Y satisfy the relationship represented by the following mathematical formula 3.

(Equation 3)
Y = 0.0148x ⁴ −0.0076x ³ + 0.0015x ² −0.0001x + 6 × 10 ⁻⁶
According to the study of the present inventor, if the displacement amount Y is smaller than about 5 × 10 ^{−7 to} 6 × 10 ⁻⁷ mm, the angular velocity detecting vibrator 40 and the angular velocity detecting fixed electrode 70 are between. The capacity change is small enough to cause no problem.

  Therefore, as shown in FIG. 3, if the ratio (W / L) is 0.1 or more, the deflection in the second direction y of the angular velocity detecting vibrator 40 due to the driving vibration of the driving vibrator 30. The amount Y can be reduced to such an extent that there is no practical problem.

  As described above, according to the present embodiment, the angular velocity sensor including the driving vibrator 30 and the angular velocity detecting vibrator 40 supported by the support substrate 11 so as to vibrate in the directions x and y orthogonal to each other. In 100, it is possible to prevent the angular velocity detecting vibrator 40 from being bent by the driving vibration of the driving vibrator 30 and generating an output error as much as possible.

(Other embodiments)
The angular velocity sensor shown in FIG. 1 shows an embodiment of the angular velocity sensor of the present invention, and is not limited to this.

  In short, the present invention includes a driving vibrator and an angular velocity detection vibrator supported on a support substrate so as to be able to vibrate in directions orthogonal to each other, and the angular velocity detection vibrator is provided on the support substrate via a detection beam. Applicable to any angular velocity sensor that is connected and further connected to the angular velocity detecting transducer via a driving beam, and the angular velocity detecting transducer extends along the vibration direction. Is possible.

  In the angular velocity sensor according to the present invention, the ratio (W / L) is set to be 0.1 or more, and the other parts can be appropriately changed in design. .

1 is a schematic plan view of a capacitive angular velocity sensor according to an embodiment of the present invention. It is a schematic sectional drawing in alignment with the AA in FIG. It is a figure which shows the relationship between ratio x equivalent to ratio (W / L) and y direction displacement Y of the vibrator for angular velocity detection. It is a figure which shows schematic planar structure of the angular velocity sensor as a prototype of this inventor.

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 ... Support substrate, 30 ... Drive vibrator, 35 ... Drive beam,
40 ... vibrator for detecting angular velocity, 45 ... detection beam,
L: Length along the second direction in the vibrator for detecting angular velocity,
W: the width along the first direction of the vibrator for detecting angular velocity,
x: first direction, y: second direction, z: rotation axis of angular velocity.

Claims (2)

A support substrate (11);
A driving vibrator (30) supported on the support substrate (11) so as to vibrate in a first direction (x);
An angular velocity sensor comprising: an angular velocity detecting vibrator (40) supported on the support substrate (11) so as to vibrate in a second direction (y) orthogonal to the first direction (x).
The angular velocity detecting transducer (40) is connected to and supported by the support substrate (11) via a detection beam (45) having a degree of freedom in the second direction (y), and the second Has a shape extending along the direction (y) of
The driving vibrator (30) is connected to and supported by the angular velocity detecting vibrator (40) via a driving beam (35) having a degree of freedom in the first direction (x).
Under the vibration of the driving vibrator (30) in the first direction (x), the first direction (x) and the second direction (y) are about an axis (z) orthogonal to the first direction (x). When an angular velocity is applied, the angular velocity detecting vibrator (40) vibrates in the second direction (y) by the Coriolis force applied to the driving vibrator (30), and the angular velocity detecting vibrator. The angular velocity is detected based on the vibration of (40),
The ratio (W / L) of the length L along the second direction (y) and the width W along the first direction (x) in the angular velocity detecting vibrator (40) is 0. An angular velocity sensor characterized by being one or more. The ratio (W / L) in the angular velocity detecting vibrator (40) is represented by x, and the angular velocity detecting vibrator when the driving vibrator (30) vibrates in the first direction (x). When the amount of displacement of (40) in the second direction (y) is expressed in Y with the unit as mm
The ratio x and the displacement amount Y are expressed by the following formula 1.
(Equation 1)
Y = 0.0148x ⁴ −0.0076x ³ + 0.0015x ² −0.0001x + 6 × 10 ⁻⁶
The angular velocity sensor according to claim 1, wherein the relationship expressed by:

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