JP2006071195A - Method and device for drying cleaned-object - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a drying method of a cleaned object capable of quickly and surely performing drying processing even to the thin and light cleaned object of small heat storage quantity. <P>SOLUTION: A heat conductor 5 in which liquid 6 having heat conductivity is sealed, is heated. The cleaned object 2 to be dried is brought into contact with the heated heat conductor 5, so that the cleaned object 2 is dried by conducting the heat of the heat conductor 5 to the cleaned object 2. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention provides a method for drying an object to be cleaned in order to quickly and surely dry the cleaning liquid adhering to the object to be cleaned after the electric parts, machine parts, and other members are cleaned with a cleaning liquid or cleaning steam. The present invention relates to a method and its apparatus, and is intended to be able to dry well even an object to be cleaned that is light and thin and has a small amount of heat storage.

  Conventionally, as shown in Patent Document 1 to Patent Document 3, hydrophilic solvents such as water and alcohol, fluorine-based solvents, chlorine-based solvents, fluorine-based inert liquids, hydrocarbon-based solvents and the like with cleaning liquids and cleaning vapors When the cleaning liquid adhering to the object to be cleaned is dried after cleaning the object to be cleaned, the cleaning liquid with a low boiling point or the object to be cleaned with a large heat capacity is almost free of heat energy stored in the object to be cleaned. The cleaning liquid was volatilized to dry the object to be cleaned.

  However, if the object to be cleaned is light and thin, and the amount of heat stored during liquid cleaning or steam cleaning is small, the latent heat of vaporization is removed from the object to be cleaned due to evaporation of the cleaning liquid, so that the cleaning liquid is cleaned before it is completely dried. In many cases, the product was immediately cooled and could not be completely dried. In order to make up for this drawback, a method of irradiating the object to be cleaned with infrared rays, or spraying hot air, warm air, or the like on the object to be cleaned has been used.

Further, as in the invention of Patent Document 5, after the cleaning of the object to be cleaned is completed, the object to be cleaned is mounted on a mounting table equipped with a heater, and the cleaning liquid is evaporated by conducting the heat of the mounting table to the object to be cleaned. In addition, there are some which perform a drying process by blowing an inert gas onto an object to be cleaned to blow off the cleaning liquid. In another different patent document 6 that performs drying by heat conduction, a placing table with a heater is disposed in a decompression tank, and heat is conducted to the object to be washed disposed on the placing table, so that the object to be washed is disposed. It is dried under reduced pressure. Further, in different Patent Document 7, the hot water is circulated inside the mounting table on which the object to be cleaned is placed in the decompression tank, and the drying process is performed by conducting the heat of the hot water to the object to be cleaned through the mounting table. Is going. Further, in Patent Document 8, the object to be cleaned is stored in a storage container having excellent thermal conductivity, and the storage container is brought into contact with the heating body so that the heat of the heating body is transmitted to the object to be cleaned through the storage container. The drying process is performed.
JP 2002-177904 A JP-A-7-136603 JP 56-108884 A JP-A-8-236497 Japanese Patent Laid-Open No. 7-273078 JP-A-2-65233 Japanese Patent Laid-Open No. 7-117581 Japanese Patent No. 3474141

  However, in recent precision machines such as computer parts and mobile phone parts, there are many relatively light and thin parts that are easily damaged, such as silicon wafers, liquid crystal plates, springs, nets, filters, etc. In the method of spraying, a thin object to be cleaned is easily damaged or deformed by an impact such as wind pressure. Furthermore, rapid cooling due to the loss of latent heat of vaporization also causes damage and deformation of the object to be cleaned. In addition, in the case of infrared or warm / hot air, there is a risk of ignition if the cleaning liquid is flammable, and only the side close to the heating source such as warm / hot air or infrared may dry out, resulting in uneven drying. .

  Further, as disclosed in Patent Documents 5 to 8, the means for drying an object to be cleaned by heat conduction does not pose a risk of ignition and can increase the safety of work. However, in Patent Document 5, since an inert gas is blown, a thin object to be cleaned may be blown away by wind pressure or may be damaged. In Patent Documents 6 and 7, such a problem due to wind pressure or the like does not occur. However, heating with a heater may cause damage to an object to be cleaned due to overheating unless careful temperature monitoring is performed. It was.

  In Patent Documents 5 to 7, in order to improve the efficiency of moving work and prevent loss, it is necessary to store a light and thin object to be cleaned in a storage basket or the like and place it on a mounting table. In the case where the storage basket is made of a low-performance material, there is a possibility that the thermal conductivity to the object to be cleaned cannot be satisfactorily performed. In addition, heat is not easily conducted to the object to be cleaned at a position far from the mounting table as a heating source, and drying unevenness of the object to be cleaned may occur. Furthermore, in any of the inventions, the apparatus is large, requires a large installation place, and is expensive to introduce.

  On the other hand, in Patent Document 8, an object to be cleaned is stored in a storage basket made of a material having good heat conduction and placed on the mounting table, and the heat of the mounting table is conducted to the object to be cleaned through the storage basket. Let it dry. Therefore, it is possible to prevent the object to be cleaned from being damaged or lost, etc., and the radiant heat of the storage basket easily conducts heat even to the object to be cleaned away from the mounting table, so that the object to be cleaned can be dried more uniformly. It was possible. However, when a plurality of objects to be cleaned are stacked, they are easily conducted to the object to be cleaned near the top surface of the mounting table or the surface of the storage basket, but the object to be cleaned located near the center is heated. It was difficult to conduct, and it took a lot of time to completely dry the entire object to be cleaned.

  The present invention is intended to solve the above-described problems, and the object to be cleaned, which has been cleaned, in particular, the light object to be cleaned with a small amount of heat storage is quickly and reliably dried without causing unevenness in drying. It makes things possible. This drying is performed without impact such as rapid temperature change, vibration, wind pressure, etc., and even if it is a light and thin object to be cleaned, it can prevent damage and deformation well, and it can prevent fire and other dangers. Drying that does not occur. In addition, a drying apparatus capable of satisfactorily drying the article to be cleaned can be inexpensively formed with a simple structure and an easy manufacturing technique.

  In order to solve the above-described problems, the first invention is to heat a heat conductor sealed with a liquid having thermal conductivity inside, and to the heated heat conductor, an object to be cleaned for drying. The object to be cleaned is dried by conducting the heat of the heat conductor to the object to be cleaned.

  In addition, the second invention is such that a heat conductor formed in a heat-conducting liquid is sealed and heated, and an object to be cleaned is brought into contact with the heated heat conductor to be cleaned from the heat conductor. An apparatus for drying an object to be cleaned, comprising a holder for the object to be cleaned for conducting heat to the object.

  In addition, the object to be cleaned is subjected to steam cleaning or warm water cleaning in contact with the heat conductor, and then the heat of the heat conductor heated by the cleaning operation is contacted with the heat conductor. The material to be cleaned may be dried by conducting the heat.

  In addition, the object to be cleaned is held by a holder and is subjected to steam cleaning or warm water cleaning in a state of being in contact with the heat conductor, and then the heat of the heat conductor heated by the cleaning operation is The object to be cleaned may be dried by conducting to the object to be cleaned that has come into contact.

  In addition, the heat conductor is placed in a holder formed by a storage basket for storing the object to be cleaned, and after the cleaning of the object to be cleaned is completed, the object to be cleaned is held in the storage container to heat the object to be cleaned. The object to be cleaned may be dried in contact with a conductor.

  The holder is a storage basket for storing the object to be cleaned, and after the cleaning of the object to be cleaned, the object to be cleaned is held in the storage container, and the object to be cleaned is brought into contact with the heat conductor to be cleaned. It may be one that dries things.

  Further, the heat conductor may be provided so as to protrude from a mounting table of a cleaning device on which the holder formed by the storage basket is placed, and the protruding portion may be inserted into the holder to be in contact with an object to be cleaned.

  Moreover, a holder hold | maintains to-be-cleaned object separately, Comprising: You may form the holding | maintenance part with a heat conductor.

  The present invention is configured as described above, and heats a heat conductor sealed with a liquid having thermal conductivity inside, and holds the object to be cleaned for drying with a holder on the heated heat conductor. Since it is dried by contacting and conducting to the object to be cleaned, even the object to be cleaned that is light and thin and has a small amount of heat storage, supplements the object to be cleaned with heat lost from latent heat of vaporization from the heat conductor, The drying process can be performed quickly and reliably without causing uneven drying.

  Further, even if a part of the heat conductor is temporarily cooled by contact with a cooled object to be cleaned, this cooling causes a convection of a liquid having thermal conductivity, and the cooled part of the heat conductor. Can be heated. Therefore, thermal energy is continuously given to the object to be cleaned, and the drying process can be performed quickly. Furthermore, since it becomes indirect heating by heat conduction, there is no fear of igniting the cleaning liquid, and a safe drying process is possible. In addition, since it is dried by heat conduction with a heated liquid, the object to be cleaned is not subjected to impacts such as wind pressure or vibration, and even a thin and fine object to be cleaned is less likely to be damaged or deformed. Can be dried.

  The present invention is configured as described above, and is washed with a cleaning solution or cleaning steam such as hydrophilic solvent such as water or alcohol, a fluorinated solvent, a chlorinated solvent, a fluorinated inert liquid or a hydrocarbon solvent. The object to be cleaned to which the cleaning liquid is attached is dried. The method heats the heat conductor in which the liquid having heat conductivity is sealed, and makes the object to be cleaned come into contact with the heated heat conductor to thereby heat the object to be cleaned. Drying is conducted while conducting to. Therefore, even an object to be cleaned with a small amount of heat storage can be quickly and reliably dried while being always replenished with heat from the heat conductor.

  In addition, since the drying method by heat conduction is indirect heating, even when a flammable cleaning liquid such as an alcohol solvent is used, it does not ignite and can be safely dried. Furthermore, in this drying by heat conduction, heat energy can be supplied safely without giving an impact to the object to be cleaned. Moreover, this heated liquid can use warm water, heating oil, etc., for example. Furthermore, if the object to be cleaned is dried while heating the liquid in the heat conductor with an appropriate heating element, even if the latent heat of vaporization is lost due to evaporation of the cleaning liquid, Complete drying is possible while replenishing heat.

  In addition, since an object such as wind pressure or vibration is not applied to the object to be cleaned, it is possible to prevent the object to be cleaned from being damaged or deformed. Accordingly, it is possible to dry a thin object to be cleaned such as a silicon wafer, a liquid crystal plate, a spring, a net-like material, and a filter.

  In addition, the object to be cleaned may be subjected to steam cleaning or warm water cleaning together with the heat conductor in a state of being held by a holder and in contact with the heat conductor. Due to the contact between the heat conductor and the steam or hot water, the liquid in the heat conductor stores heat. Therefore, it is possible to dry the object to be cleaned by conducting the heat of this liquid to the object to be cleaned through the heat conductor, and it is possible to perform a simple cleaning process without the need to heat the heat conductor. It becomes. In addition, since the heat of the cleaning vapor or the cleaning liquid can be used for the drying process, cleaning with excellent energy efficiency is possible. In addition, this drying process may be performed after the cleaning process is completed and the cleaning steam and hot water are removed in a cleaning tank that performs steam cleaning or warm water cleaning. Further, after the cleaning is completed, the object to be cleaned held by the holder together with the heat conductor may be pulled up from the cleaning tank.

  In addition, the heat conductor is placed in a holder formed by a storage basket for storing the object to be cleaned, and after the cleaning of the object to be cleaned, the object to be cleaned is brought into direct contact with the heat conductor in the storage container. The object to be cleaned may be dried. By storing in the storage basket in this way, many objects to be cleaned can be dried at the same time, the drying speed can be improved, and a plurality of objects to be cleaned can be moved into the drying tank or loaded. It is easy to carry out the work of placing on a table or the like, and the object to be cleaned is prevented from being damaged or lost. In addition, since the heat conductor is brought into direct contact with the object to be cleaned in the holder formed by the storage rod to conduct heat, the heat generated by the storage rod is transferred to the object to be cleaned through the storage rod. There is no energy loss or the like, and the drying process can be performed by efficient heat conduction.

  In addition, if the heat conductor protrudes from the mounting table of the cleaning device on which the storage basket is mounted, and the protruding portion is inserted into the storage bowl so as to be able to come into contact with the object to be cleaned, the heat conduction of the storage bowl is achieved. Therefore, it is possible to efficiently conduct heat conduction from the heat conductor to the object to be cleaned. Therefore, for example, a storage basket made of a light and inexpensive resin material, which has a relatively low thermal conductivity, can be used as a holder, so that the cost during use can be reduced and the container stored in the storage basket can be used. It is also possible to carry out the cleaning work with little effort.

  In addition, in this case, the drying process can be performed continuously after the cleaning process for the object to be cleaned is completed in the cleaning apparatus and then placed on the mounting table. This drying may be performed while heating the liquid of the heat conductor by an appropriate heating means after completion of the cleaning, but in the case of steam cleaning or hot water cleaning, the heat projecting from the mounting table by these cleaning processes The liquid in the conductivity is stored. Therefore, it is not necessary to heat the liquid separately during the drying process, and the object to be cleaned can be dried by conducting the heat of the liquid stored by the cleaning to the object to be cleaned through the heat conductor.

  In addition, the heat conductor itself may be formed as a holder for holding the object to be cleaned, and the object to be cleaned is stably held by the holder to move between the apparatuses as well as to dry the object. The heat energy for cleaning can be supplied directly from the holder to the object to be cleaned. Therefore, it is possible to perform a drying process with high thermal efficiency, and by using both the holder and the heat conductor, a simple configuration with a small number of parts can be obtained, and a highly convenient product can be obtained. In addition to the above-described cleaning bowl and the above-described individual holders, the holder may be a cleaning tank for the object to be cleaned as long as the object can be in contact with the heat conductor. It ’s good.

  Hereinafter, Embodiment 1 of the present invention will be described with reference to FIGS. 1 to 3. (1) is a holder for storing and holding an object to be cleaned (2). The four side surfaces and bottom surface of the storage basket (1) are formed in a mesh shape. Further, the storage basket (1) storing the article to be cleaned (2) is placed on a mounting table (3) in a cleaning tank (not shown), and hydrophilic solvents such as water and alcohol, fluorine-based solvents , Steam cleaning with an appropriate cleaning liquid such as a chlorine-based solvent, a fluorine-based inert liquid, a hydrocarbon-based solvent, etc., or heating these cleaning liquids and spraying them onto the object to be cleaned (2) for hot water cleaning, etc. Is. Then, after the cleaning is completed, the object to be cleaned (2) is continuously dried in the cleaning tank. Further, the object to be cleaned (2) may be subjected to immersion cleaning, and after the cleaning is completed, the object to be cleaned (2) is pulled up from the cleaning liquid and dried.

  The mounting table (3) for mounting the storage basket (1) at the time of cleaning is formed of a material having excellent thermal conductivity such as metal, and as shown in FIG. 2, the upper surface of the thin rectangular base (4) is formed. In addition, a plurality of cylindrical heat conductors (5) are formed so as to protrude into the storage basket (1) and come into contact with the object to be cleaned (2). The plurality of thermal conductors (5) are formed in cavities as shown in FIGS. 1 and 3, and the liquid (6) having thermal conductivity is sealed in the cavities (7). ing. The liquid (6) sealed in the heat conductor (5) may be warm water or heated oil as long as it supplies heat energy to the surface of the heat conductor (5). May be.

  On the upper surface of the base (4) of the mounting table (3) formed in this way, the storage basket (1) for storing the object to be cleaned (2) is placed, and the thermal conductor (5) protruding from the base (4) is provided. ) Is inserted into the storage trough (1) through the mesh at the bottom of the storage trough (1). The object to be cleaned (2) is brought into contact with the heat conductor (5) arranged in the storage basket (1), the heat is conducted to dry the object to be cleaned (2), and the object to be cleaned (2 ) Drying device (8). In the drawing, the mesh is relatively large with respect to the size of the storage basket (1), and the heat conductor (5) inserted into the mesh is also described with a relatively large diameter. However, when storing thin and fine objects to be cleaned (2), etc., the mesh of the storage basket (1) is reduced to prevent the objects to be cleaned (2) from dropping and the diameter corresponding to the mesh. Thus, the heat conductor (5) is formed.

  Next, a method for drying the object to be cleaned (2) after completion of the cleaning using the drying device (8) will be described. First, the storage basket (1), which is a holder for storing and holding the object to be cleaned (2), is mounted on the upper surface of the base (4) of the mounting table (3). As shown in FIG. 2, the heat conductor (5) is inserted through the mesh at the bottom of the storage rod (1), and the heat conductor (5) is placed in the storage rod (1). Next, the object to be cleaned (2) that is relatively thin or fine and has a small heat storage amount, such as a silicon wafer, a liquid crystal plate, a spring, a net, and a filter, is stored in the storage container (1), and steam cleaning is performed. . In this way, since the object to be cleaned (2) is cleaned together with the mounting table (3) in the cleaning tank, the liquid (6) in the cavity (7) of the heat conductor (5) is heated by the cleaning vapor. The heat energy is stored.

  When the steam cleaning is completed, the condensed cleaning liquid adheres to the surface of the object to be cleaned (2). In order to carry out this drying process, it is not necessary to introduce hot air or the like, or a device, and the storage basket (1) is placed on the mounting table (3) and left for a while, or the object to be cleaned ( In the state where 2) is stored, the storage jar (1) together with the mounting table (3) is pulled up from the cleaning tank, moved to a drying chamber or the like and left. Thereby, the heat of the liquid (6) heated by the cleaning vapor is conducted to the object to be cleaned (2) in contact with the thermal conductor (5) through the surface of the thermal conductor (5). Therefore, the cleaning liquid adhering to the object to be cleaned (2) by this heat can be quickly and reliably dried.

  In addition, since a plurality of thermal conductors (5) are provided in a protruding manner, even if a plurality of objects to be cleaned (2) are stacked, they can be brought into contact with a larger number of objects to be cleaned (2) at a high frequency. The heat of (6) can be efficiently conducted to the entire object to be cleaned (2) group. Furthermore, since the objects to be cleaned (2) also come into contact with each other to conduct heat, even if a large number of objects to be cleaned (2) are stored in the storage basket (1), rapid drying with little unevenness is possible. Become.

  Also, since it is dried by heat conduction, wind pressure or impact is not applied to the object to be cleaned (2), and damage and deformation are prevented, and there is no drying unevenness that dries only in the direction of the heating source. Even if it exists, it prevents fire and the like, and a safe drying process becomes possible. Further, as the cleaning liquid evaporates, latent heat of vaporization is deprived from the object to be cleaned (2). However, since the object to be cleaned (2) is always replenished with heat from the heat conductor (5), the attached cleaning liquid is dried. Can be done completely.

  Further, the cleaning process and the drying process can be performed in a state where the object to be cleaned (2) is stored in the storage basket (1), the processing efficiency can be improved, and the cleaning liquid can be drained well. Further, the object to be cleaned (2) can be easily moved while preventing the object (2) to be cleaned from being damaged or lost by being stored in the storage case (1).

  Moreover, in Example 1, although the drying process is performed under atmospheric pressure, you may carry out under reduced pressure. For this purpose, a cleaning tank that can be depressurized may be used to perform a series of cleaning and drying processes under reduced pressure. As another means, in Example 2 shown in FIG. 4, a drying tank (16) for drying is prepared separately from the cleaning tank. The drying tank (16) can be hermetically sealed with a lid (17), and an on-off valve (18), a vacuum pump (19), a condenser (20), a vacuum release valve (21), a drain valve (22 ) Or the like is connected to reduce the pressure in the interior to allow the object to be cleaned (2) to be dried under reduced pressure. In this drying tank (16), a drying table (24) on which the storage basket (1) storing the object to be cleaned (2) and the mounting table (3) can be mounted.

  One side of the drying table (24) protrudes from the wall surface of the drying tank (16) and is connected to an appropriate heating source (25). The heating source (25) generates a heating fluid such as steam, heating oil, hot air, and the like so that it can flow through the drying table (24) and can supply heat to the heat conductor (5). In addition, a heater connected to the heating source (25) is provided in the drying table (24), and heat is supplied to the heat conductor (5) of the mounting table (3) mounted on the drying table (24). There may be. In addition, the temperature of the heating source (25) can be controlled, and a heat conductor (through a drying table (24) is provided at an appropriate temperature according to the shape and specific heat of the object to be cleaned (2), the boiling point and properties of the cleaning liquid, etc. 5) It is assumed that heat can be conducted continuously.

  In order to dry with the above apparatus, after the cleaning of the object to be cleaned (2) in the cleaning tank or the like, the storage basket (1) containing the object to be cleaned (2) together with the mounting table (3) is cleaned. Then, it is moved up to the drying tank (16) and placed on the upper surface of the drying table (24). Then, the inside of the drying tank (16) is decompressed by the decompression mechanism (23), and heat is supplied to the drying table (24) by the heating source (25), and the heat conductor (5) is passed through the mounting table (3). The liquid (6) inside is heated. Heating to the liquid (6) is conducted through the surface of the heat conductor (5) to the object to be cleaned (2) in contact with the heat conductor (5). The cleaning liquid adhering to (2) can be dried quickly and reliably. Even in the means of Example 2, there is no wind pressure or impact, so that it is possible to prevent the object to be cleaned (2) from being damaged or deformed, and the drying treatment under reduced pressure lowers the boiling point of the cleaning liquid. The object to be cleaned (2) can be efficiently dried with less heat energy by the heat conducted from the conductor (5).

  Moreover, even if the cleaning liquid adhering to the object to be cleaned (2) evaporates due to the decrease in boiling point and the latent heat of vaporization is taken away suddenly, the object to be cleaned (2) passes through the drying table (24). Since heat is always replenished from the heat conductor (5) connected to the heating source (25), there is no rapid temperature drop, and the attached cleaning liquid can be reliably dried and the object to be cleaned (2) Can be prevented from being damaged or deformed.

  Further, since the object to be cleaned (2) can be satisfactorily dried by the heat conductor (5), the storage basket (1) may be formed of a resin material having a relatively low heat conductivity. By using the storage basket (1) that can be easily handled, it is possible to improve the economic efficiency of implementation. Conversely, the storage bowl (1) may be formed of a metal having high thermal conductivity, and heat from the heat conductor (5) is also conducted from the storage bowl (1), and the inside of the storage bowl (1). It is possible to quickly conduct heat to a large number of objects to be cleaned (2), and further efficient drying treatment is possible.

  In the first and second embodiments, the drying device (8) is configured by providing the mounting table (3) with the storage basket (1) as a holder and providing the heat conductor (5). In Example 2 shown, a holder for holding an object to be cleaned (2) and performing a cleaning process or the like is formed of a heat conductor (5). The holder of the second embodiment is a so-called wafer cassette (11) in which a plurality of light and thin silicon wafers (10) are set and used.

  In this wafer cassette (11), a pair of aluminum bases (4) formed in a cavity are arranged in parallel via a spacing of silicon wafers (10), and the pair of bases (4) are connected. It is formed by connecting with ridges (12). In addition, an aluminum holding part (14) provided with a plurality of slits (13) in the vertical direction protrudes inside the pair of bases (4), and the inside of the holding part (14) is also a cavity. It communicates with the cavity of the base (4). As shown in FIG. 6, by inserting and arranging the silicon wafer (10) in the opposing slits (13) of the pair of holding portions (14), a plurality of silicon wafers (10) are placed in the wafer cassette (11). Can be set individually in parallel. A silicon wafer (10) set on the holding part (14) by connecting and fixing a pipe-like stopper (15) at a right angle to the slit (13), slightly below the vertical center of the holding part (14). Is prevented from falling off the slit (13). Then, with the silicon wafer (10) set, the wafer cassette (11) can be transferred to a cleaning tank or the like to perform the cleaning process efficiently.

  In the wafer cassette (11), the heated liquid (6) is sealed in a cavity (7) consisting of a pair of bases (4) and a holding part (14). The heat of (6) is conducted to the holding part (14) through the surface of the base (4) and the holding part (14), and is conducted to the silicon wafer (10) through this holding part (14). Accordingly, the entire wafer cassette (11) is used as the heat conductor (5), and the heat of the liquid (6) is efficiently conducted to the silicon wafer (10), so that quick and reliable drying is possible.

  The liquid (6) in the heat conductor (5) is heated by performing steam cleaning or hot water cleaning with the silicon wafer (10) set in the wafer cassette (11), and heat necessary for drying. You can store energy. After the cleaning is completed, the heat of the liquid (6) is conducted to the silicon wafer (10) through the base (4) and the holding part (14), and the cleaning liquid adhering to the silicon wafer (10) is efficiently removed. It is possible to evaporate. In addition, the silicon wafer (10) can be dried while being set in the wafer cassette (11), and can be efficiently moved from the cleaning tank to the drying chamber. The wafer (10) can be easily moved without causing damage or the like.

  In each of the above embodiments, the drying process of the object to be cleaned (2) that has been subjected to steam cleaning or shower cleaning or the like has been described, but the object to be cleaned (2) by immersion cleaning in the cleaning tank filled with the cleaning liquid. ) After cleaning, the object to be cleaned (2) stored in the storage basket (1) is pulled up from the cleaning tank, and the wafer cassette (11) and other jigs are cleaned. The product (2) may be pulled up from the washing tank and drained to appropriately perform a drying process. Also in this case, the liquid (5) in the thermal conductor (5) is immersed in the heated cleaning liquid by immersing the thermal conductor (5) such as the mounting table (3) and the wafer cassette (11) together with the object to be cleaned (2). 6) is heated to store heat energy, so the heat of the liquid (6) is transferred to the object to be cleaned (2) through the surface of the heat conductor (5), and the object to be cleaned (2) is good. Can be dried.

  In another different embodiment 4, the drying tank (16) is used, and the silicon wafer (10) can be washed and dried in a series. As shown in FIG. 7, a vertical movement mechanism (27) that can be moved up and down by a piston (26) is disposed outside the drying tank (16), and the piston ( The drying table (24) is connected to the arm (28) protruding from 26). The drying table (24) is suspended in the drying tank (16) by the arm (28). Steam, hot water, hot air, and the like heated by a heating source (25) provided in the vertical movement mechanism (27) can be circulated inside the arm (28) and the drying table (24).

  In order to clean and dry the silicon wafer (10) with the apparatus thus formed, first, the silicon wafer (10) is set in a wafer cassette (11) which is a holder. Then, the drying table (24) is raised by the vertical movement mechanism (27), and the wafer cassette (11) in which the silicon wafers (10) are individually set in parallel is placed on the drying table (24). Next, the drying table (24) is lowered by the vertical movement mechanism (27), the wafer cassette (11) is placed in the drying tank (16), and water, alcohol, etc. are placed in the drying tank (16). An appropriate cleaning solution (30) such as a hydrophilic solvent, a fluorine-based solvent, a chlorine-based solvent, a fluorine-based inert liquid, or a hydrocarbon-based solvent is introduced to clean the silicon wafer (10). When introducing the cleaning liquid, as shown in FIG. 7, the introduction amount is set so that the silicon wafer (10) is immersed, rather than introducing the entire drying tank (16) to be filled with the cleaning liquid (30). Ensure sufficient space in the drying tank (16).

  When the cleaning operation is completed, the drying table (24) is raised by the vertical movement mechanism (27), the wafer cassette (11) is pulled up from the cleaning liquid (30), and is placed in the space of the drying tank (16). , Draining and drying. At this time, heat is supplied to the drying table (24) by the heating source (25), and the heat is transferred to the wafer cassette (11) through the drying table (24), whereby the heat conductor (5 The liquid (6) is heated, and this heat is transferred to the silicon wafer (10) through the base (4) and the holding part (14), and the cleaning liquid (30) attached to the silicon wafer (10) is efficiently used. Can be evaporated.

  In addition, the cleaning operation may be performed while heating the drying table (24) by the heating source (25), and the cleaning operation is promoted and the liquid (6) in the heat conductor (5) is removed. Heated. Accordingly, when the wafer cassette (11) is pulled up from the cleaning liquid (30), the heat stored in the liquid (6) in the heat conductor (5) is transferred to the silicon wafer (10) via the heat conductor (5). It is possible to conduct the drying process by transferring the heat to.

1 shows a drying apparatus according to a first embodiment of the present invention, in which a thermal conductor is provided on a mounting table on which a storage basket is mounted, and the thermal conductor is inserted into the storage basket and brought into contact with an object to be cleaned. FIG. The perspective view of the state which isolate | separated the storage basket and the mounting base. The partial expanded sectional view of a base | substrate and a heat conductor. Sectional drawing which shows Example 2, and has shown the state which has arrange | positioned the washing bowl which accommodated the to-be-cleaned object in the drying tank. The perspective view of the wafer cassette which shows the drying apparatus of Example 3 and circulated the liquid in the base | substrate, and provided the heat conductor. The perspective view of the state which set the some wafer to the wafer cassette. Sectional drawing which shows Example 4 and has mounted the wafer cassette which set the silicon wafer in the drying tank.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Storage basket 2 To-be-cleaned object 3 Mounting stand 5 Thermal conductor 6 Liquid 10 Silicon wafer (to-be-cleaned object of this invention)
11 Wafer cassette (holder of the present invention)

Claims (9)

  By heating a heat conductor in which a liquid having thermal conductivity is sealed, and bringing the object to be cleaned into contact with the heated heat conductor, the heat of the heat conductor is conducted to the object to be cleaned. A method for drying an object to be cleaned, characterized in that the object to be cleaned is dried.   A heat conductor formed by sealing a liquid having thermal conductivity inside so as to be heatable, and an object to be cleaned in contact with the heated heat conductor to conduct heat from the heat conductor to the object to be cleaned. An apparatus for drying an object to be cleaned, comprising a holder for the object to be cleaned.   The object to be cleaned is subjected to steam cleaning or warm water cleaning in contact with the heat conductor, and then the heat of the heat conductor heated by the cleaning operation is transferred to the object to be cleaned that is in contact with the heat conductor. 2. The method for drying an object to be cleaned according to claim 1, wherein the object to be cleaned is dried.   The object to be cleaned is held in contact with the heat conductor and is washed with steam and washed with steam or warm water, and then the heat of the heat conductor heated by the cleaning is transferred to the object in contact with the heat conductor. The apparatus for drying an object to be cleaned according to claim 2, wherein the object to be cleaned is dried by conduction to the object to be cleaned.   The heat conductor is placed in a holder formed by a storage basket for storing the object to be cleaned, and after the cleaning of the object to be cleaned, the object to be cleaned is held in the storage container, and the object to be cleaned is placed in the heat conductor. 4. The method for drying an object to be cleaned according to claim 1 or 3, wherein the object to be cleaned is dried by contacting the object.   The holder is a storage basket for storing the object to be cleaned, and after the cleaning of the object to be cleaned, the object to be cleaned is held in the storage container, and the object to be cleaned is brought into contact with the heat conductor to The apparatus for drying an object to be cleaned according to claim 2 or 4, wherein drying is performed.   The heat conductor is characterized in that it protrudes from the mounting table of the cleaning device for mounting the holder formed by the storage basket, and this protruding portion is inserted into the holder so as to be in contact with the object to be cleaned. The method for drying an object to be cleaned according to claim 1, 3 or 5.   The heat conductor is characterized in that it protrudes from the mounting table of the cleaning device for mounting the holder formed by the storage basket, and this protruding portion is inserted into the holder so as to be in contact with the object to be cleaned. The apparatus for drying an object to be cleaned according to claim 2, 4 or 6. The apparatus for drying an object to be cleaned according to claim 2 or 4, wherein the holder holds the object to be cleaned individually, and the holding part is formed of a heat conductor.