JP2006064709A - System with substrate malfunction detecting circuit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a system for surely detecting and preventing wrong installation of DSA, in semiconductor testing devices or imperfect connection of connectors. <P>SOLUTION: The testing device comprises a set of DSA 10a, 10b equipped with a socket board 11, and a mother board 20 equipped with connectors to which connectors 14 of each socket board 11 on this set of DSA 10a, 10b. It is constituted of an inside diameter (ID) setting board respectively-provided on each of DSA 10a, 10b which defines ID numbers assigned to the DSA 10a, 10b and outputs ID signal indicating such ID numbers, a coincidence circuit which inputs the ID signal output from the ID setting board to detect the matching of the ID signal, and a daisy chain circuit which inputs signal from one of the connectors 21 on the mother board 20 side and sequentially-transmits signal to all connectors 21, 14 via connectors 14 on corresponding DSA side to detect the presence of output signal. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

The present invention relates to an apparatus that operates when a board having one or more connectors is connected to a corresponding counterpart board, such as a semiconductor testing apparatus for testing a semiconductor component.
In particular, according to the present invention, in an apparatus in which a plurality of boards are connected to a counterpart board as a set, an ID signal indicating the combination of the set of boards is input to detect a mismatch in the combination of the boards. By providing a matching circuit, it is possible to easily and reliably detect that different types of boards are used in combination, and to prevent damage, failure, etc. of the board, socket, and mounted parts due to incorrect board mounting. The present invention relates to an apparatus including an abnormality detection circuit suitable for a semiconductor test apparatus that can be used by combining a plurality of DSAs each having a plurality of socket boards.

  Further, the present invention provides a device in which a board provided with one or more connectors is connected to a counterpart board provided with one or more corresponding connectors, and signals are transmitted via all connected connectors. By providing a daisy chain circuit that transmits and detects the output result of the signal, it can easily and reliably detect the connection failure or dropout of the corresponding connector, and malfunction due to the connector connection failure or decrease in work efficiency. The present invention relates to an apparatus including an abnormality detection circuit suitable for a semiconductor test apparatus including a mother board and a socket board to which a plurality of connectors are connected simultaneously, which can be prevented in advance.

In general, in a semiconductor test apparatus for testing a semiconductor component, a semiconductor component to be tested is mounted on a board called a socket board, and the socket board is connected to a board called a motherboard on the side of the test apparatus main body. A semiconductor component is tested by inputting and outputting predetermined electrical signals required for the test to and from the socket board.
Here, in the conventional semiconductor test apparatus, the socket board on which the semiconductor components are mounted and the motherboard on the test apparatus main body side are electrically connected by wires, soldering, etc. Was inseparable and inseparable.
In such a conventional semiconductor test apparatus in which the socket board and the mother board are inseparably connected, the socket board cannot be detached and replaced independently, and it can cope with various diversified semiconductor component tests. The problem of becoming difficult occurred.

In recent years, as semiconductor components have become more complex and more dense, semiconductor components with different package structures and pin structures have been developed and provided. To test semiconductor components with different structures, It was necessary to change the socket board used as the interface to one corresponding to the pin structure and package structure of each semiconductor component.
However, in the conventional semiconductor test apparatus, as described above, the socket board is inseparably connected by soldering to the motherboard on the apparatus body side, so that only the socket board is attached / detached and replaced. If you wanted to test different types of semiconductor components, you had to replace the entire test equipment, including the motherboard.

In this way, in the conventional semiconductor test equipment that requires replacement of the entire equipment, it takes time to introduce new test equipment, and not only the test period is lengthened, but also expensive test equipment is introduced for each semiconductor component. Since it had to be replaced, the test cost was increased and resources were wasted.
For this reason, it has been extremely difficult to deal with all of the recent semiconductor components that have been markedly diversified by exchanging test equipment.
Therefore, the applicant of the present application, as a result of earnest research, in the following Patent Document 1, adopting a connector that can be detachably connected to each other as a connection structure of the socket board and the motherboard in the semiconductor test apparatus. On the other hand, we have come up with a semiconductor testing device that can be attached and detached.

FIG. 8 is an explanatory view conceptually showing the semiconductor test apparatus proposed by the applicant of this application in Patent Document 1, wherein (a) is a front view in an exploded state, and (b) is provided with a plurality of socket boards. It is the bottom view of DSA.
As shown in these drawings, in this semiconductor test apparatus, a DSA 110 on which a plurality of socket boards 111 are mounted and a mother board 120 are configured to be detachable.
A DSA (Device Specific Adapter) 110 is a socket board substrate in which a plurality of socket boards 111 and connectors 114 are mounted and fixed on an SB (socket board) frame 112 and unitized as a unit.

The DSA 110 is arranged on a SB frame 112 on which a plurality of socket boards 111 are based, and as shown in FIG. 8B, a connector (not shown) on the corresponding motherboard 120 side is provided on the bottom side. A plurality of connectors 114 that are fitted to each other are exposed.
Then, as shown in FIG. 8A, when this DSA 110 is mounted on the mother board 120, each connector 114 on the bottom surface of the DSA is fitted and connected to the corresponding connector 121 on the mother board side. The plurality of socket boards 111 are electrically connected to the mother board 120 side.
In the DSA 110, in order to simultaneously test a large number of semiconductor parts, DSAs having the same configuration are mounted on a single mother board in a plurality of units such as a set of two and a set of four. In (b), the arrangement | positioning state of 2 sets of DSA110 is shown.

According to such a semiconductor test apparatus, the DSA 110 on which a plurality of socket boards 111 are mounted can be detachably connected to the motherboard 120 via the connector 114, so that any DSA 110 can be connected to the motherboard 120. For example, when testing a semiconductor component having a different package structure or pin structure, the DSA 110 is removed from the motherboard 120 (see FIG. 8A), and a socket board corresponding to the semiconductor component to be tested. It is possible to change to another DSA 110 equipped with 111.
Therefore, in this semiconductor test apparatus, it is possible to cope with testing of different types of semiconductor parts by replacing only the DSA on which the socket board is mounted, and the entire apparatus including the mother board can be replaced like the conventional apparatus. Thus, a semiconductor test apparatus with low cost and excellent versatility could be realized.
Japanese Patent Application No. 2002-047186

By the way, in the semiconductor test apparatus in which the DSA can be attached to and detached from the mother board as described above, a plurality of DSAs each equipped with the same type of socket board are mounted on the mother board in order to simultaneously test a large number of semiconductor components. There was a thing.
However, since the DSA usually has the same external shape and appearance, even if the type and structure of the mounted socket board are different, the DSA unit may not be distinguished.
For this reason, there is a possibility that two or more DSAs having socket boards of different types and structures are erroneously combined and mounted on the same motherboard.

If DSAs with different types of socket boards are mounted on the same motherboard, the semiconductor component to be tested and the socket structure of the socket board will not be compatible. There is a risk that physical damage or the like may occur in sockets, socket guides, devices (semiconductor components), change kits for device replacement, and the like.
Therefore, it is necessary to prevent such erroneous DSA mounting.

Here, as means for preventing the DSA on which such a different type of socket board is mounted from being used by mistake, for example, a pin and a pin hole are formed in the DSA frame or an uneven shape is formed. However, it is conceivable that the pins and the concavo-convex shape are meshed only between the correct combinations of DSAs.
However, in this method of providing unevenness and a fitting structure on the DSA frame, the fitting structure must be changed for each type of socket board, and every time a different type of semiconductor component is tested, the DSA The problem was that the frame had to be newly designed and manufactured.
In addition, when the DSA frame is provided with a fitting structure, unevenness, or a pin is attached in this manner, there is a problem that the thickness of the DSA frame becomes thin and the strength becomes weak.

On the other hand, in the DSA detachable semiconductor test apparatus, as shown in FIG. 8, a plurality of socket boards and connectors are arranged in a fixed number on the frame to form a unit (see FIG. 8B). The DSA is provided with a large number of connectors, and the corresponding motherboard side is also provided with a large number of connectors.
For this reason, when the DSA is attached to and detached from the mother board, there are cases where poor fitting and poor connection occur in many connectors connected between the socket board and the mother board.
And when such a connection failure of a connector etc. arises, a normal test cannot be performed, work efficiency deteriorates, and there is a concern that the reliability of the test apparatus may be lowered.

From the above circumstances, devices that require the same type of board (DSA) to be used in an error-free manner, such as a semiconductor test equipment on the DSA removal side, and a large number of connectors can be attached and detached between boards. In repeated equipment, it is desired to develop new means that can detect the occurrence of incorrect mounting and misuse of the board, poor connection of the connector, poor conduction, etc., and effectively prevent this. It was.
Therefore, the applicant of the present invention created the invention of the present application that can reliably prevent the erroneous mounting of the plurality of substrates as described above, and can also reliably detect the poor connection between the plurality of connectors, after further earnest research. It has come to be.

  The present invention has been proposed to solve the above-described problems. In an apparatus in which a plurality of boards are connected to a counterpart board, an ID indicating the combination of the set of boards. By providing a coincidence circuit that detects the coincidence / non-coincidence of the combination of the relevant boards by inputting signals, it is possible to easily and reliably detect that different kinds of boards are used in combination. An object of the present invention is to provide a device with an anomaly detection circuit that can prevent damage, failure, etc. of mounted components, and is particularly suitable for a semiconductor test device that is used in combination with a plurality of DSAs having a plurality of socket boards. And

  Further, the present invention provides a device in which a board provided with one or more connectors is connected to a counterpart board provided with one or more corresponding connectors, and signals are transmitted via all connected connectors. By providing a daisy chain circuit that transmits and detects the output result of the signal, it can easily and reliably detect the connection failure or dropout of the corresponding connector, and malfunction due to the connector connection failure or decrease in work efficiency. An object of the present invention is to provide an apparatus with an abnormality detection circuit that can be prevented in advance, and that is particularly suitable for a semiconductor test apparatus including a motherboard and a socket board to which a plurality of connectors are connected simultaneously.

  In order to achieve the above object, an apparatus with a substrate abnormality detection circuit according to claim 1 of the present invention includes at least one set of substrate groups formed by combining a plurality of substrates, and a counterpart substrate to which the substrate groups are connected. An ID setting board that is provided on each board of the board group, sets a predetermined ID number assigned to the board group, and outputs an ID signal indicating the ID number And an ID signal input board for inputting each ID signal output from the ID setting board, and each ID signal output from the ID signal input board. And a coincidence circuit for detecting coincidence / non-coincidence of the ID signals of the corresponding substrates, and detecting a combination abnormality of the substrates in the substrate group.

According to the apparatus with a board abnormality detection circuit of the present invention having such a configuration, the board includes the ID setting board and the matching circuit for detecting the coincidence of the ID signals output from the ID setting board. Just by giving an ID number indicating that two or more substrates constituting a group satisfy a predetermined combination, the ID number can be input from each substrate to determine the coincidence.
As a result, it is possible to discriminate the combination of a plurality of substrates based on the ID number unique to the substrate group without changing the configuration or outer shape of the substrate, and to easily and reliably detect that different types of substrates are combined. It is possible to reliably prevent breakage, failure, etc. of the board, socket, and mounted parts due to mounting and the like.
In addition, by inputting the ID signal from the substrate side in this way, it is determined whether or not the combination of the substrates is correct, so that the consistency of the combination is determined at the same time that the substrate is mounted on the apparatus side. This makes it possible to perform a quicker determination process and to efficiently perform the original work and processing performed by mounting the substrate on the apparatus.
Moreover, since the board group can be specified by assigning an ID number, it is possible to easily cope with the addition or deletion of the ID number even when the type or number of boards increases or decreases. It is possible to realize an abnormality detection circuit with excellent performance.

  On the other hand, the apparatus with an abnormality detection circuit according to claim 2 has a board having one or more connectors and a counterpart board having one or more connectors to which each connector of the board is connected. A daisy chain circuit for inputting a signal from the counterpart board or one connector of the board, sequentially transmitting the signal to all the connectors via each corresponding connector, and detecting the presence or absence of an output signal And detecting a connection abnormality of all the connectors of the board and the mating board.

According to the apparatus with a substrate abnormality detection circuit of the present invention having such a configuration, a connection failure occurs between any of the connectors by including a daisy chain circuit that transmits a signal via one or more of all connectors. If there is a connection abnormality, this can be detected immediately.
Moreover, by detecting a connection failure by transmitting a signal between the connectors connected in this way, it is possible to determine the presence or absence of the failure at the same time as the connector between the boards is connected, and quickly connect It becomes possible to find defects and the like, and the original work and processing performed by connecting the connectors between the substrates can be performed efficiently.
As a result, even when a large number of connectors are connected at the same time, it is possible to easily and reliably detect connection failures and dropouts, and high reliability without malfunction due to connection failure of the connectors or reduction in work efficiency. An apparatus can be realized.

  Furthermore, in the apparatus with a board abnormality detection circuit according to claim 3, at least one set of board groups formed by combining a plurality of boards provided with one or more connectors and connectors of each board of the board groups are connected. And a counterpart board having one or two or more connectors that are provided on each board of the board group and set a predetermined ID number assigned to the board group. An ID setting board that outputs an ID signal indicating the ID number, and an ID signal input board that is provided on a counterpart board corresponding to the board group and that inputs each ID signal output from the ID setting board; A matching circuit that inputs each ID signal output from the ID signal input board and detects matching / mismatching of the ID signals of the corresponding boards, and a counter circuit of the counterpart board or one of the boards. And a daisy chain circuit for detecting the presence / absence of an output signal by inputting a signal from the connector, sequentially transmitting the signal to all the connectors via each corresponding connector, and detecting a substrate combination abnormality in the substrate group At the same time, the connection abnormality of all the connectors of the board and the counterpart board is detected.

According to the apparatus with the board abnormality detection circuit of the present invention having such a configuration, both the coincidence circuit for judging the coincidence of the ID numbers given to the board group and the daisy chain circuit for detecting the connection failure of the connector are provided. By providing, it is possible to reliably detect an abnormal combination of boards and at the same time detect a connector connection failure between the board and the counterpart board.
Thereby, in a device in which a plurality of substrates are used in combination, and each substrate is provided with a plurality of connectors and connected to the other side, an ID number is assigned to reliably detect a combination abnormality between the substrates, Connection failures of a large number of connectors can be easily found, and a highly reliable device with excellent versatility and expandability can be provided.

  In particular, in the apparatus with an abnormality detection circuit according to claim 4, a plurality of ID signal setting boards are provided on the board, and one ID number of the board is set by the plurality of ID signal setting boards. , Output configuration.

According to the apparatus with a substrate abnormality detection circuit of the present invention having such a configuration, a plurality of ID signal setting boards are provided, and one ID number is constituted by all the numbers set by the plurality of ID signal setting boards. An arbitrary ID number can be freely set according to the number and type of substrates to be used.
As a result, even when the type or number of substrates increases or decreases, it is possible to more easily add, delete, and change ID numbers, and to provide an abnormality detection circuit with excellent versatility and expandability.

  On the other hand, in the apparatus with an abnormality detection circuit according to claim 5, the daisy chain circuit is configured such that one or more pins of the connector of the board and the counterpart board are short-circuited in the board and the counterpart board. It is configured to be connected.

According to the apparatus with a substrate abnormality detection circuit of the present invention having such a configuration, by using the existing pins of the connector provided between the substrates connected to each other, each pin is short-circuited in the substrate, The daisy chain circuit of the present invention that transmits signals via all connectors can be configured.
As a result, the daisy chain circuit according to the present invention can detect a connection failure or connection abnormality of a plurality of connectors without separately providing a special circuit or means, thereby increasing the size and complexity of the board or device. Therefore, it is possible to provide a highly reliable device that can detect a connection failure between mounted substrates in advance.

  In the apparatus with an abnormality detection circuit according to claim 6, the substrate is made of DSA having one or more socket boards to which a semiconductor component to be tested is mounted and connected, and the counterpart substrate is It is configured by a mother board of a semiconductor test apparatus on which DSA is mounted and connected.

  Furthermore, in the apparatus with an abnormality detection circuit according to claim 7, the substrate is composed of a DSA having one or more socket boards to which a semiconductor component to be tested is mounted and connected, and the substrate group includes the DSA. A plurality of substrates are combined, and the counterpart substrate is composed of a mother board of a semiconductor test apparatus on which a plurality of DSAs constituting the substrate group are integrally mounted and connected.

According to the apparatus with a substrate abnormality detection circuit of the present invention having such a configuration, the substrate according to the present invention is configured as a DSA, the counterpart substrate is configured as a mother board on which the DSA is mounted, and further includes a plurality of substrates. By configuring the group as a DSA group including a plurality of DSAs, the DSA detachable semiconductor test apparatus can be configured as an apparatus with an abnormality detection circuit according to the present invention.
As a result, in a semiconductor test apparatus capable of handling various semiconductor component tests by exchanging a DSA with a socket board alone, it is possible to mix up DSAs using the anomaly detection circuit of the present invention, drop off connectors, or contact failure. Etc. can be detected easily and reliably, and it is possible to provide a semiconductor test apparatus capable of testing a highly reliable semiconductor component by preventing occurrence of erroneous mounting or mounting failure.

As described above, according to the apparatus with a board abnormality detection circuit of the present invention, in an apparatus in which a plurality of boards are connected to a counterpart board, an ID signal indicating the combination of the set of boards is received. By providing a coincidence circuit that detects the coincidence / non-coincidence of the combination of the substrates by inputting, it is possible to easily and reliably detect that different substrates are used in combination.
As a result, it is possible to prevent damage, failure, etc. of the board, socket, and mounted parts due to incorrect mounting of the board, and in particular, a semiconductor test apparatus that is used in combination with a plurality of DSAs having a plurality of socket boards. It becomes suitable for.

Further, according to the apparatus with a board abnormality detection circuit of the present invention, the board provided with one or more connectors is connected in the apparatus connected to the counterpart board provided with the corresponding one or more connectors. By providing a daisy chain circuit that transmits a signal via all connectors and detects the output result of the signal, it is possible to easily and reliably detect connection failure or dropout of the corresponding connector.
As a result, it is possible to prevent malfunctions due to poor connection of connectors, a decrease in work efficiency, and the like, and it is particularly suitable for a semiconductor test apparatus including a mother board and a socket board to which a plurality of connectors are connected simultaneously.

Hereinafter, a preferred embodiment of an apparatus with a substrate abnormality detection circuit according to the present invention will be described with reference to FIGS.
FIG. 1 is an exploded perspective view showing a semiconductor test apparatus with a substrate abnormality detection circuit according to an embodiment of the present invention.
2 shows a semiconductor test apparatus with a substrate abnormality detection circuit according to the present embodiment, (a) is a front view of the DSA removed from the motherboard side, and (b) is a DSA shown in (a). It is a bottom view.
As shown in the figure, the apparatus with substrate abnormality detection circuit according to the present embodiment is a semiconductor component as an apparatus for connecting a plurality of connectors provided on the same surface of the substrate to a plurality of connectors on the corresponding counterpart substrate. A semiconductor test apparatus is provided that includes a DSA 10 in which a plurality of socket boards 11 are mounted in a row and a mother boat 20 on the other side to which the DSA 10 is connected. The present embodiment is provided with an abnormality detection circuit that detects a mistake in the DSA 10 and a connector connection failure between the DSA 10 and the motherboard 20 in the semiconductor test apparatus.

[Semiconductor test equipment]
First, with reference to FIG.1 and FIG.2, the semiconductor test apparatus which comprises the apparatus with a board | substrate abnormality detection circuit which concerns on this embodiment is demonstrated.
As shown in the figure, the semiconductor test apparatus according to the present embodiment has substantially the same configuration as the semiconductor test apparatus shown in FIG. 8, and a socket board on which a semiconductor component (not shown) to be tested is mounted. 11 is configured to be detachable with respect to the mother board 20, and by replacing only the DSA 10 alone, it is a test apparatus that can cope with tests of different types of semiconductor components.

As shown in FIG. 1, the DSA (Device Specific Adapter) 10 includes a plurality of socket boards 11, and a connector 14 is disposed on the bottom side of the socket board (see FIG. 2B). The connector 14 corresponding to the board 11 is integrally formed as a single board, and is normally manufactured, attached, detached, replaced, etc. with this DSA as a unit.
By handling a plurality of socket boards in a unitized DSA unit in this way, for example, for a semiconductor component having a different package structure or pin structure, a corresponding socket board is prepared in a unitized DSA unit. A plurality of different semiconductor components can be tested by attaching and detaching the corresponding DSA to and from the motherboard.

In such a DSA detachable semiconductor test apparatus, a set of two or four sets of DSAs each having a socket board of the same configuration on one motherboard is provided so that a large number of semiconductor components can be tested simultaneously. A plurality of DSAs can be mounted and used as a set.
In this embodiment, as shown in FIG. 1, two DSAs 10 (DSA-A 10 a and DSA-B 10 b) are set as one set, and these two sets of DSAs 10 are integrally mounted and connected on the motherboard 20. It has become so.

Specifically, in the DSA 10 according to the present embodiment, a plurality of socket boards 11 are arranged on a frame-shaped SB frame (socket board frame) 12 serving as a base substrate, and within the frame space of the SB frame 12. In addition, a connector 14 connected to each socket board 11 is arranged.
Each socket board 11 is composed of a substrate having a component mounting connection portion (socket portion) for mounting and electrically connecting a semiconductor component to be tested, and one semiconductor component is mounted on each socket board 11. It has come to be. The plurality of socket boards 11 are each mounted and fixed on the frame portion of the SB frame 12.

The SB frame 12 is a frame member made of metal or the like and has a plurality of spaces (see FIG. 2B). In the present embodiment, as shown in FIG. It comes to have a space area. As shown in FIG. 2B, the connectors 14 connected to the socket board 11 are accommodated in the spaces of the SB frame 12, respectively.
Here, in the DSA 10 according to the present embodiment, as shown in FIGS. 1 and 2, the SB frame 12 includes two rows of eight space areas, and a total of 16 space areas are respectively socketed. A total of 32 boards 11 and two corresponding connectors 14 are provided. However, the number of socket boards 11 and connectors 14 and the number of spaces of the SB frame 12 are not particularly limited.

By storing the connector 14 in the SB frame 12 as described above, the connector 14 is disposed on the bottom surface side of each socket board 11, and each connector 14 is connected to the corresponding socket board 11 on the SB frame 12. At the same time, it is fixed on the same plane on the bottom side of the socket board, and all the connectors are simultaneously attached to and detached from the corresponding connector 21 (see FIG. 1) on the mother board 20 side.
Therefore, when the connector 14 on the DSA 10 side and the connector 21 on the motherboard 20 side are not properly fitted and connected, a connector connection failure occurs, and the presence or absence of this connector connection failure is determined by the daisy chain circuit 40 described later. It is to be detected.

As shown in FIG. 1, each socket board mounted on the SB frame 12 has a shape in which the four corners of the board of each socket board are notched, and the frame body portion of the SB frame 12 is exposed from the notched portion. In the exposed portion of the SB frame 12, a positioning hole 15 into which a positioning pin 22 protruding from the mother board 20 is inserted is formed.
By inserting the positioning pins 22 into the positioning holes 15, the DSA 10 is positioned and fixed at a predetermined position with respect to the mother board 20.
Here, in the present embodiment, the positioning holes 15 (and the positioning pins 22) are formed so as to be positioned at two positions on the left and right in the longitudinal direction of the SB frame 12 (see FIG. 2), but the DSA 10 is in a predetermined position. The positioning pins 22 and the positioning holes 15 can be provided at any positions as long as they are positioned, and the numbers thereof are not particularly limited.

Further, as shown in FIG. 2, in the SB frame 12, the ID number of the DSA 10 is set in an area where the connector arrangement surface does not interfere with the plurality of connectors 14, and an ID signal indicating the ID number is output. An ID setting board 13 is provided.
Details of the ID setting board 13 will be described later.
The DSA 10 having the above-described configuration is a combination of two DSA-A 10a and DSA-B 10b mounted with the socket board 11 having the same structure as a set, and the two sets of DSA 10 are integrated into a mother board. 20 is mounted.

That is, in the present embodiment, depending on the type of the DSA 10 and the socket board 11 in a pair, for example, “DSA-A and B”, “DSA-C and D”, “DSA-E and F”,. In this way, two DSAs 10 having the same structure socket board 11 mounted thereon are used in combination.
Therefore, in this case, for example, the combination of “DSA-A and DSA-C” or “DSA-B and DSA-D” means that different types of socket boards 11 are mounted on the motherboard 20. It becomes abnormal as a combination of DSA10.
Such a match / mismatch of the combination of DSAs 10 is detected by the ID match circuit 30 via an ID setting board 13 described later.

As shown in FIG. 1, the mother board 20 is a board provided on the main body side of the semiconductor test apparatus. As described above, the mother board 20 is provided with a plurality of connectors 21 corresponding to the DSA 10 side in which the plurality of socket boards 11 are unitized. (See FIG. 1).
When the DSA 10 is connected to the mother board 20 via a connector, a predetermined electrical signal necessary for the test is input / output to the DSA side via the mother board 20, and the semiconductor components on each socket board 11 are tested. It has come to be.
In this embodiment, a contact pin board 23 that is in contact with the ID setting board 13 on the DSA 10 side is disposed on the upper surface of the mother board 20 in an area that does not interfere with the plurality of connectors 21.
Details of the contact pin board 23 will be described later together with the ID setting board 13 on the DSA 10 side.

In addition, the part shown as the motherboard 20 in this embodiment generally includes an SPCF, a metal plate, a performance board, a utility board, etc. in addition to the motherboard provided on the main body of the semiconductor test apparatus. In this embodiment, the abnormality detection circuit is provided in the utility board 20a in the motherboard 20.
Therefore, the “motherboard” referred to in the present embodiment means the counterpart substrate according to the present invention to which the unitized DSA 10 is detachably connected.
Although not described in detail, in addition to the DSA 10 and the mother board 20 described above, the configuration and function provided in the semiconductor test apparatus of this embodiment are the same as those of the existing semiconductor test apparatus.

[ID setting board]
Next, the ID setting board 13 according to the present embodiment will be described with reference to FIGS. 3 and 4.
FIG. 3 is a principal cross-sectional front view conceptually showing the ID setting board 13 and the contact pin board 23 according to the present embodiment.
FIG. 4 is a block diagram conceptually showing the relationship between the ID setting board 13 and the ID matching circuit 30 according to the present embodiment.
The ID setting board 13 shown in these figures sets an ID number indicating a combination of each DSA 10 (DSA-A and B, DSA-C and D ...), and outputs an ID signal indicating the ID number. The board is provided on the connector mounting surface side of the DSA 10.

The ID setting board 13 is disposed in a region of the connector disposition surface of the SB frame 12 where it does not interfere with the plurality of connectors 14, and in this embodiment, as shown in FIG. Eight ID setting boards 13 are arranged in each DSA 10 (10a, 10b).
A contact pin board 23 serving as an ID signal input board is provided on the mother board 20 side facing the ID setting board 13.
As shown in FIG. 1, the contact pin boards 23 are arranged at positions corresponding to the respective ID setting boards 13, eight corresponding to the two DSA 10 a and 10 b, for a total of 16 contact pin boards 23. However, like the ID setting board 13, each is disposed in an area where it does not interfere with the connectors 21 of the plurality of motherboards.
Thus, when the DSA 10 is mounted on the mother board 20, the ID signal output 13a of the corresponding ID setting board 13 and the contact pin 23a of the contact pin board 23 come into contact with each other, as will be described later. The ID signal can be automatically output to the ID matching circuit 30.

As shown in FIG. 3, each ID setting board 13 is arranged on the surface of the DSA 10 facing the mother board 20 side by fixing means such as bolts, and a pair of ID signal output pads 13a on the fixed substrate surface. It has.
The pair of ID signal output pads 13a are connected to two pairs of ID number setting pads 13c on the back side of the substrate (DSA 10 side) through through holes 13b.
Each ID number setting pad 13c is connected to a GND pad 13e via a jumper line 13d.
The GND pad 13e is grounded to, for example, a bolt for fixing the ID setting board 13 through a conductor pattern (not shown).
The ID number setting pad 13c can be set to GND or OPEN depending on whether or not the jumper line 13e is connected to the GND pad 13e.

Specifically, when the ID number setting pad 13c is set to GND (connected to the GND pad 13e), the signal output from the ID signal output pad 13a to the ID matching circuit 30 described later is grounded on the input side. LOW (0).
On the other hand, when the ID number setting pad 13c is set to OPEN (not connected to the GND pad 13e), the signal output from the ID signal output pad 13a to the ID matching circuit 30 is HIGH due to the power supply voltage Vcc of the ID matching circuit 30. (1) (see FIG. 5).
As described above, in the ID setting board 13 according to the present embodiment, the signal output from the ID signal output pad 13a connected to the ID number setting pad 13c is LOW (0) depending on whether the jumper line 13e is connected. / HIGH (1) can be switched.
An ID signal indicating a desired ID number can be input to the ID matching circuit 30 by setting an arbitrary LOW (0) / HIGH (1) signal to the ID setting board 13 (FIG. 4).

Here, in this embodiment, as shown in FIG. 2, eight ID setting boards 13 are arranged in each DSA 10 (10a, 10b), and two ID setting boards 13 are provided. ID signal output pad 13a.
As a result, the ID number that can be set by the ID setting board 13a can be assigned to a 16-bit signal for a set of DSA 10 (10a, 10b). The upper (or lower) 14-bit signal is assigned as an ID signal indicating an ID number.
For example, the ID number indicating the combination of “DSA-A and B” is “00000000000001”, the ID number indicating “DSA-C and D” is “00000000000010”, etc. Can be granted.
As shown in FIG. 4, the 14-bit ID signal is output from each DSA 10a, 10b and input to the ID matching circuit 30 via the contact pin board 23 on the mother board 20 side.

The number of bits of the ID signal indicating the ID number of the DSA 10 is not limited to 14 bits in the present embodiment, and can be arbitrarily set according to the type of the DSA 10 and is required. The number of ID setting boards 13 and the number of output pads can be changed according to the number of bits.
For example, in the case of a semiconductor test apparatus in which 1000 types of DSA 10 are used, the ID number is 1000. Therefore, if a 10-bit signal is used, 1024 IDs can be assigned. Therefore, in this case, if the number of outputs is “2” as in the ID setting board 13 of this embodiment, it is sufficient to provide five for each DSA. On the other hand, in the case of a semiconductor test apparatus that can use 10,000 kinds of DSAs 10, 10,000 ID numbers are required, and 16384 ID numbers can be obtained by using a 14-bit signal as in this embodiment. Can be granted.

As described above, the ID setting board 13 according to the present embodiment can arbitrarily set the number of installations, the number of output bits, and the number of bits that can be used as the ID signal. Is.
The ID number is set on the ID setting board 13 before the assembly of the DSA 10 and after the type of the socket board 11 to be mounted on the DSA 10 is set, the corresponding two sets are identical to each other. It is preferable to attach the ID setting board 13 in which the ID number is set to a predetermined location of the DSA 10.
In addition, the ID number once set does not normally need to be changed later, and the DSA 10 may be erroneously mounted due to inadvertent ID change. As shown in FIG. 4, it is desirable to fix the DSA 10 using bolts or the like so that the DSA 10 cannot be attached or detached.

[ID matching circuit]
Next, the ID matching circuit 30 according to the present embodiment will be described with reference to FIG.
FIG. 5 is a circuit diagram showing details of the ID matching circuit 30 according to the present embodiment.
As shown in the figure, an ID matching circuit 30 according to the present embodiment is a circuit that detects a mismatch between a pair of DSAs 10 (10a, 10b). In this embodiment, the ID matching circuit 30 is used for setting each ID of the DSAs 10a, 10b. Each 14-bit ID signal input from the board 13 is input.
Specifically, as shown in FIG. 5, the ID matching circuit 30 includes 14 XOR circuits for inputting 14-bit ID signals, 7 NOR circuits, and 1 AND circuit, and each DSA 10a, The 14-bit ID signal input from the ID setting board 13 of 10b is compared between corresponding bits, and a HIGH (1) signal is output only when all the bits match, otherwise A LOW (0) signal is output.

Thereby, the coincidence of the combinations of the DSAs 10 mounted on the mother board 20 is detected, and when different types of DSAs 10 are combined, an abnormal signal (LOW (0) signal) can be output. Therefore, it is possible to perform processing corresponding to the occurrence of abnormality. In the present embodiment, as will be described later, the lock mechanism for locking the DSA 10 to the mother board 20 side is controlled to be in an unlockable state, and a display indicating the ID number mismatch is performed.
In this embodiment, the ID matching circuit 30 is provided in the utility board 20a on the mother board 20 side (see FIGS. 4 and 7), and will be described later when an ID signal mismatch is detected. Furthermore, the utility board 20a is processed as “ID number abnormal”.

[Daisy chain circuit]
Next, the daisy chain circuit 40 according to the present embodiment will be described with reference to FIG.
FIG. 6 is an explanatory diagram conceptually showing the daisy chain circuit 40 according to the present embodiment.
As shown in the figure, the daisy chain circuit 40 inputs a signal from one connector 21 on the motherboard 20 side (connector 21 on the left end in FIG. 6), and a corresponding connector 14 on the DSA 10 side (connector 14 on the left end in FIG. 6). The signal is sequentially transmitted to the mother board 20 and all the connectors 21 and 14 of the DSA 10 via the circuit to detect the presence or absence of an output signal.

Specifically, the daisy chain circuit 40 allocates corresponding pins of the connector 21 on the motherboard 20 side and the connector 14 on the DSA 10 side for daisy chain, and forms a transmission line so that all the connectors are sequentially connected in series. In this embodiment, as shown in FIG. 6, all the connectors are connected in series by short-circuiting two pins of the connector 21 on the mother board 20 and the connector 14 on the DSA 10 side. It is.
First, on the mother board 20 side, two pins (male type pins in FIG. 6) of each connector 21 are assigned for daisy chain, one being an input side and the other being an output side. And between the adjacent connectors 21, the output pin for daisy chain of one connector 21 and the input pin for daisy chain of the other connector 21 are connected via a short-circuit wire 20a.
Also, on the DSA 10 side, two pins (female pins in FIG. 6) of each connector 14 are assigned for daisy chain, one is an input side and the other is an output side. The input side and the output side are connected by a short-circuit wire 14a.
In addition, the pin for daisy chain in each connector 21 and 14 can utilize the empty pin etc. which are not used in each connector, and can also provide a dedicated pin for daisy chain.

According to such a daisy chain circuit 40, only when all the corresponding connectors on the motherboard 20 side and the DSA 10 side are normally connected, the input side and the output side of the daisy chain circuit 40 are electrically connected. If there is a connection failure in such a connector, the daisy chain circuit 40 is not conducted.
Therefore, by applying a voltage to the input side of the daisy chain circuit 40, a normal signal (HIGH (1) signal) is output simultaneously with the connection of the connectors when all the connectors are not defective. Thus, by monitoring the presence or absence of this output signal, it is possible to detect whether or not all the corresponding connectors on the mother board 20 side and the DSA 10 side are normally connected.
Thereby, a connector connection abnormality between the mother board 20 and the DSA 10 is detected at the same time when the DSA 10 is mounted on the mother board 20 side and the connectors are connected to each other.
The output signal from the daisy chain circuit 40 is input to the utility board 20a (see FIG. 7). As will be described later, whether or not an abnormality has occurred in the utility board 20a along with the mismatch of the ID signals. In the case of an abnormality, it is processed as “Daisy Chain Abnormal”.

In this embodiment, the daisy chain circuit 40 allocates 2 pins for each connector on the motherboard 20 side and the DSA 10 side for daisy chain, but this is not particularly limited to 2 pins.
That is, as long as the daisy chain circuit 40 can form a transmission line so that all the connectors on the motherboard 20 side and the DSA 10 side are sequentially connected in series, the number of pins used and the connection method are not particularly limited.
Therefore, for example, when the DSA 10 and the mother board 20 are provided with a coaxial connector, the SIG line and the GND line of the coaxial connector are short-circuited so that the SIG line is assigned to the input side of the daisy chain and the GND line is assigned to the output side. The circuit 40 can also be configured.
In this embodiment, the input and output of the daisy chain circuit 40 are performed on the mother board 20 side, but it is also possible to input and output signals to the daisy chain circuit 40 on the DSA 10 side.

[Utility board]
Next, the utility board 20a according to the present embodiment will be described with reference to FIG.
FIG. 7 is a block diagram conceptually showing the utility board 20a in the semiconductor test apparatus with a substrate abnormality detection circuit according to the present embodiment.
The utility board 20a of the present embodiment is a board provided on the mother board 20 side. As shown in FIG. 7, the output signal from the daisy chain circuit 40 is input and the ID signal from the ID setting board 13 is input. ID matching circuit 30 is provided.
Then, as shown in FIG. 7, the utility board 20a has one AND circuit 33 that inputs the output signals of the daisy chain circuit 40 and the ID matching circuit 30, and a daisy chain abnormality that inputs the output signal of the daisy chain circuit 40. An ID number abnormality signal input unit 35 for inputting the signal input unit 34 and the output signal of the ID matching circuit 30 is provided.

The AND circuit 34 outputs a signal (HIGH (1) signal) indicating “no abnormality” only when the signals input from the daisy chain circuit 40 and the ID matching circuit 30 are HIGH (1), that is, normal. .
Based on the output signal of the AND circuit 34, it is detected whether there is no ID mismatch between the DSA 10 and there is no connection failure between all the connectors of the DSA 10 and the mother board 20, and control of "no abnormality" is performed. In this embodiment, when a “no abnormality” signal is output from the AND circuit 34, the lock mechanism that locks the DSA 10 to the mother board 20 side is controlled to the locked state (LOCK).

On the other hand, the daisy chain abnormality signal input unit 34 or the ID number abnormality signal input unit 35 outputs a signal indicating “abnormal” when the input signal is LOW (0), that is, an abnormal signal. ing.
As a result, it is detected that there is a connection failure in one of the connectors of the DSA 10 and the motherboard 20, and that there is a mismatch in the IDs of the DSA 10, and it is processed as “Daisy Chain Abnormal” or “ID Number Abnormal”. become.
In the present embodiment, the “abnormality” signal controls the lock mechanism that locks the DSA 10 to the mother board 20 side to be in an unlockable state (FREE), and corresponds to “Daisy Chain abnormality” or “ID number abnormality”. The LED to be turned on is lit to notify the occurrence of abnormality to the outside of the apparatus.

[Abnormality detection operation]
Next, an abnormality detection operation in the semiconductor test apparatus with a substrate abnormality detection circuit according to this embodiment configured as described above will be described.
First, two DSAs 10 are prepared as a set, mounted at a predetermined position on the mother board 20, and the connector 21 on the mother board 20 side and the connector 14 of each DSA 10 are fitted and connected.
When the DSA 10 is mounted on the mother board 20, the ID signal output pad 13a of the ID setting board 13 of each DSA 10 comes into contact with the contact pin 23a of the corresponding contact pin board 23 on the mother board 20 side, and the ID number of the DSA 10 is concerned. Is output.

The output ID signal is input to the ID match circuit 30 of the utility board 20a via the contact pin 23a, and a match / mismatch of the ID signals of the two DSAs 10 is detected. The result is an AND circuit of the utility board 20a. 34 and the ID number abnormality signal input unit 35.
Further, when the DSA 10 is mounted on the motherboard 20 and the connectors of the DSA 10 and the motherboard 20 are connected and the daisy chain circuit 40 is turned on, a daisy chain signal is output, and the AND circuit 34 and the daisy chain abnormality signal of the utility board 20a. Input to the input unit 34.

Then, in the AND circuit 33 of the utility board 20a, when the signal input from each circuit is HIGH (1), that is, when the signal is normal, a signal (HIGH (1) signal) indicating “no abnormality” is output. .
As a result, there is no discrepancy between the IDs of a pair of DSAs 10 mounted on the motherboard 20, and all the connectors of the DSA 10 and the motherboard 20 are normally connected. A lock mechanism that locks to the mother board 20 locks the DSA 10.
Therefore, in this state, it is possible to test a semiconductor component using the DSA 10 and the motherboard 20.

On the other hand, in the daisy chain abnormal signal input unit 34 or ID number abnormal signal input unit 35, when LOW (0), that is, when an abnormal signal is input, there is a connection failure in one of the connectors of the DSA 10 and the motherboard 20, If there is an abnormality in the combination of the DSAs 10 mounted on the motherboard 20, a signal indicating "abnormality" is output.
As a result, the corresponding “Daisy Chain abnormality present” or “ID number abnormality present” processing is performed.
That is, the lock mechanism that locks the DSA 10 to the mother board 20 side is controlled to the lock disabled state (FREE), and the LED corresponding to “Daisy Chain Abnormal” or “ID Number Abnormal” is lit and an abnormality occurs. It will be notified outside the device.
Therefore, in this state, the semiconductor test apparatus cannot be used, and the semiconductor test is performed with the DSA 10 having the wrong combination mounted on the motherboard 20, or some connectors are in a poorly connected state. There is no such thing as testing.

As described above, according to the apparatus with the board abnormality detection circuit according to the present embodiment, the coincidence between the ID setting board 13 indicating the combination of the DSA 10 and the ID signal output from the ID setting board 13 is detected. By providing the ID matching circuit 30, it is possible to determine whether or not a set of two DSAs 10 is a predetermined combination only by assigning a predetermined ID number and determining whether or not the ID numbers match. it can.
Thus, by assigning a unique ID number to each DSA 10 without changing the configuration, outer shape, etc. of the DSA 10, it is possible to determine the suitability of the DSA 10 combination, and easily and reliably detect the DSA 10 mix-up. Thus, it is possible to reliably prevent breakage, failure, etc. of the socket, mounted parts, etc. due to erroneous mounting of the DSA 10 or the like.
In this embodiment, an ID signal from the DSA 10 side is input to determine whether or not the combination of the DSA 10 is correct. Therefore, when the DSA 10 is mounted on the motherboard 20 side, it is determined whether or not the combination is appropriate. This makes it possible to perform a quick determination process and efficiently perform original test work and processing by the semiconductor test apparatus.
Moreover, since the combination of the DSA 10 can be specified by assigning an ID number, even when the type or number of DSA 10 increases or decreases, it can be easily handled by adding or deleting the ID number. An anomaly detection circuit excellent in expandability can be realized.

In this embodiment, since the daisy chain circuit 40 for transmitting signals via all the connectors of the DSA 10 and the motherboard 20 is provided, even if there is a connection failure or connection abnormality between any of the connectors, Can be detected immediately.
In addition, by detecting a connection failure or the like by the daisy chain circuit 40 that transmits signals between all the connectors, it is possible to determine the presence or absence of the failure or failure at the same time that the connector between the DSA 10 and the motherboard 20 is connected.
As a result, even in a semiconductor test apparatus equipped with a DSA 10 having a large number of connectors and a mother board 20, it is possible to easily and reliably detect connection failures and dropouts. It is possible to realize a highly reliable test apparatus that does not deteriorate.

In particular, in the present embodiment, by providing both the ID matching circuit 30 and the daisy chain circuit 40, it is possible to reliably detect a combination abnormality of the DSA 10 and to detect a connector connection failure between the DSA 10 and the motherboard 20 at the same time. it can.
As a result, in a semiconductor test apparatus in which a plurality of DSAs 10 are used in combination and each DSA 10 includes a plurality of connectors 14, an ID number is given to reliably detect a combination abnormality of the DSAs 10, and a number of connectors are connected. Defects can be easily found, and a highly reliable and highly reliable semiconductor test apparatus can be provided.

As mentioned above, although the preferable embodiment was shown and demonstrated about the apparatus with a board | substrate abnormality detection circuit of this invention, the apparatus with a board | substrate abnormality detection circuit which concerns on this invention is not limited only to embodiment mentioned above, this invention It goes without saying that various modifications can be made within the range described above.
For example, in the above embodiment, the ID setting board is used only for setting and outputting the ID number of a set of DSAs, but this is a number for setting and outputting an arbitrary number used for other purposes. It can also be used as a setting means.
That is, in the above embodiment, the ID setting board sets and outputs a 2-bit signal, and all the 2-bit signals are used as ID signals indicating the ID numbers. If the 6-bit signal can be set and output, 2 bits can be used as the ID signal according to the present invention, and the remaining 4 bits can be allocated for other signals.
As a result, for example, it is possible to use number means for inputting and setting an arbitrary serial number, user number, reference number, etc. at the user destination.

In addition, the semiconductor test apparatus shown in the above embodiment includes both an ID matching circuit and a daisy chain circuit, thereby detecting a DSA combination abnormality and also detecting a connector connection failure between the DSA and the motherboard. Of course, only one of them may be used.
Further, as the substrate group for which the suitability of the combination is determined by the ID matching circuit, the DSA of a set of two sheets is taken as an example in the above embodiment, but this is not limited to a set of two sheets, but two or more sheets. It goes without saying that a set of three or a set of four may be used. Similarly, the number of connectors in which connection failure is detected in the daisy chain circuit is also a plurality of connectors in the above-described embodiment. However, as long as at least one connector is provided between the substrates to be connected. good.

Furthermore, in the above-described embodiment, the board abnormality detection circuit according to the present invention has been described by taking as an example the attachment / detachment of the socket board and the motherboard connector in the semiconductor test apparatus. It is not limited to a semiconductor test apparatus equipped with
That is, in the apparatus with a substrate abnormality detection circuit of the present invention, two or more substrates are combined and connected to the other substrate, or a substrate having one or more connectors is provided with a corresponding connector. As long as it is a device that operates by being connected to, application to any substrate or device is not hindered.

It is a disassembled perspective view which shows the semiconductor testing apparatus with a board | substrate abnormality detection circuit which concerns on one Embodiment of this invention. 1 shows a semiconductor test apparatus with a substrate abnormality detection circuit according to an embodiment of the present invention, (a) is a front view of a state where a DSA is removed from a motherboard side, and (b) is a bottom view of the DSA shown in (a). is there. It is a principal part section front view showing notionally an ID setting board and a contact pin board in a semiconductor testing device with a substrate abnormality detection circuit concerning one embodiment of the present invention. 1 is a block diagram conceptually showing an ID setting board and an ID matching circuit in a semiconductor test apparatus with a substrate abnormality detection circuit according to an embodiment of the present invention. It is a circuit diagram which shows the detail of the ID matching circuit in the semiconductor testing apparatus with a board | substrate abnormality detection circuit based on one Embodiment of this invention. It is explanatory drawing which shows notionally the daisy chain circuit in the semiconductor testing apparatus with a board | substrate abnormality detection circuit based on one Embodiment of this invention. It is a block diagram which shows notionally the utility board in the semiconductor testing apparatus with a board | substrate abnormality detection circuit which concerns on one Embodiment of this invention. BRIEF DESCRIPTION OF THE DRAWINGS It is explanatory drawing which shows notionally the semiconductor testing apparatus which the applicant of this application has proposed in Japanese Patent Application No. 2002-047186, (a) is a front view of the state which removed DSA from the motherboard side, (b) is (a) It is a bottom view of DSA shown in FIG.

Explanation of symbols

10 DSA
10a DSA-A
10b DSA-B
11 Socket board 12 SB frame 13 ID setting board 14 Connector (DSA side)
20 Motherboard 20a Utility board 21 Connector (motherboard side)
23 Contact Pin Board 30 ID Matching Circuit 40 Daisy Chain Circuit

Claims (7)

An apparatus having at least one set of substrate groups formed by combining a plurality of substrates and a counterpart substrate to which the substrate groups are connected,
An ID setting board that is provided on each board of the board group, sets a predetermined ID number assigned to the board group, and outputs an ID signal indicating the ID number;
An ID signal input board that is provided on a counterpart board corresponding to the board group and that inputs each ID signal output from the ID setting board;
A matching circuit that inputs each ID signal output from the ID signal input board and detects matching / mismatching of the corresponding ID signal of each board, and
An apparatus with a substrate abnormality detection circuit, which detects a combination abnormality of substrates in the substrate group. An apparatus having a board with one or more connectors and a mating board with one or more connectors to which each connector of the board is connected,
A signal is input from the counterpart board or one connector of the board, a signal is sequentially transmitted to all connectors via each corresponding connector, and a daisy chain circuit that detects the presence or absence of an output signal is provided,
An apparatus with a substrate abnormality detection circuit, wherein connection abnormality of all the corresponding connectors of the substrate and the counterpart substrate is detected. At least one set of board groups formed by combining a plurality of boards having one or more connectors, and a mating board having one or more connectors to which the connectors of each board of the board groups are connected A device comprising:
An ID setting board that is provided on each board of the board group, sets a predetermined ID number assigned to the board group, and outputs an ID signal indicating the ID number;
An ID signal input board that is provided on a counterpart board corresponding to the board group and that inputs each ID signal output from the ID setting board;
A coincidence circuit that inputs each ID signal output from the ID signal input board and detects a coincidence / non-coincidence of the corresponding ID signal of each substrate;
A daisy chain circuit for inputting a signal from one connector of the counterpart board or one of the boards, sequentially transmitting the signal to all connectors via each corresponding connector, and detecting the presence or absence of an output signal,
While detecting a substrate combination abnormality in the substrate group,
An apparatus with a substrate abnormality detection circuit, wherein connection abnormality of all the corresponding connectors of the substrate and the counterpart substrate is detected. 4. The board abnormality detection circuit according to claim 1, wherein a plurality of the ID signal setting boards are provided on the board, and an ID number of one of the boards is set and output by the plurality of ID signal setting boards. apparatus. 4. The board abnormality detection according to claim 2, wherein the daisy chain circuit is connected by short-circuiting one or more pins provided in the connector of the board and the counterpart board in the board and the counterpart board. Device with circuit. The board is composed of a DSA having one or more socket boards to which a semiconductor component to be tested is mounted and connected;
6. The apparatus with a substrate abnormality detection circuit according to claim 1, wherein the counterpart substrate is a motherboard of a semiconductor test apparatus on which the DSA is mounted and connected. The board is composed of a DSA having one or more socket boards to which a semiconductor component to be tested is mounted and connected;
The substrate group is a combination of a plurality of substrates made of the DSA,
5. The apparatus with a substrate abnormality detection circuit according to claim 1, wherein the counterpart substrate is a mother board of a semiconductor test apparatus on which a plurality of DSAs constituting the substrate group are integrally mounted and connected.

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