JP2006059726A - Static eliminator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a static eliminator preventing leakage since it does not hang down even if it is long, and to provide a static eliminator capable of preventing dust and deterioration of a discharge needle and capable of selecting ion concentration distribution. <P>SOLUTION: This static eliminator comprises a rigid frame provided with an electric passage and flow passages and at least one electric part attachably/detachably attached to the frame. The frame has a plurality of flow passages, uses air and nitrogen as fluids flowing through the flow passages, and makes nitrogen flow around a discharge needle of an electric part from the flow passages of the frame so that the discharge needle is isolated from air. Nitrogen is made flow into the electric part from the flow passages of the frame to prevent leakage due to adhesion of dirt to a high voltage part. When air is used as the fluid, the air is emitted outside of the electric part so that the electric part is separated from the air. An ion balance sensor is provided in the periphery of an air guide at the center of the discharge needle to enable accurate ion balance measurement. Ion concentration can be selected by selecting the number and interval of electric parts attached to the frame. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a static eliminator.

  FIG. 5 is a sectional view showing a conventional static eliminator. In FIG. 5, the static eliminator 10 has a housing 12, in which an electric part 14 that is an electric system and an air path 16 that serves as an air passage are formed. A replacement needle assembly 22 incorporating the discharge needle 20 is attached to the housing 12. In the mounted state, the rear end of the discharge needle 20 comes into contact with the high voltage connection terminal 18 disposed in the electrical part. The replacement needle assembly 22 is formed with an air path 22 a that guides air (air) from the air (air) path 16 in the housing 12 to the periphery of the tip of the discharge needle 20. Seal members 26 and 24 for preventing air leakage are provided between the replacement needle assembly 22 and the partition wall 12a of the housing and between the replacement needle assembly 22 and the lower end wall 12b of the housing. Has been placed.

  The discharge needle 20 is fed with a high voltage from the high voltage connection terminal 18 in the electrical unit 14, radiates ions 50 from the tip of the discharge needle 20, and the ions 50 are neutralized by the air 52 ejected from the air path 22 a. It is designed to fly away toward the target object.

Since the static eliminator of the conventional example has the electric part 14 and the air part 16 in the housing as described above, there are the following problems.
(1) Since the air part 16 is formed in a part of the housing (plastic case) 12 that accommodates the electric part containing high voltage, there is no so-called spine frame, and if it becomes long in the shape of a bar, it cannot withstand gravity. As shown in 6a, a phenomenon of sagging occurs. As a countermeasure against this, as shown in FIG. 6 b, it is lifted up by using a lifting tool 30, but this hinders, for example, a down blow in a clean room and causes a secondary disaster.
(2) Since the replaceable discharge needle 20 crosses the air portion 16, it is difficult to properly install a seal member for preventing air leakage, and there is a problem that leakage leakage occurs in an electrical portion where air contains a high voltage.
(3) Since two locations of the air leakage prevention seal to the electrical part 14 and the air leakage prevention seal to the outside air are simultaneously tightened with one rotation, it is theoretically difficult to seal both equally.
(4) Since the discharge needle 20 and the air path 22a coexist, a high voltage electric leakage occurs due to condensation of air due to adiabatic expansion of air when the air is released.

  Accordingly, it is an object of the present invention to provide a static eliminator that does not sag and does not cause leakage even if the static eliminator is long.

  Another object of the present invention is to provide a static eliminator capable of preventing dust generation and deterioration of a discharge needle and selecting an ion concentration distribution.

  In order to achieve the above object, the present invention is characterized by comprising a rigid frame having an electric path and / or a flow path, and at least one electric part detachably attached to the frame. The static eliminator is used.

  In particular, the frame has a plurality of flow paths, air or (and) nitrogen is used as a fluid flowing through the flow paths, nitrogen is flowed from the flow paths of the frame around the discharge needles of the electrical unit, and the discharge needles are isolated from the air. . In addition, nitrogen is allowed to flow from the flow path of the frame to the electric part to prevent electric leakage due to the adhesion of dirt to the high voltage part. When air is used as the fluid, the air is discharged outside the electrical unit, and the electrical unit is isolated from the air. Furthermore, the ion concentration can be selected by selecting the number and interval of electrical parts attached to the frame.

(1) By using an aluminum extrusion frame, it is possible to prevent drooping (deflection) due to gravity.
(2) Since the electrical part and the air part are separated, no leakage occurs. Since the coexistence of the discharge needle and the air opening is avoided, high voltage leakage due to air condensation does not occur.
(3) Eliminates the work of sealing the air when the user replaces the discharge needle. It is possible to avoid the leakage accident (leakage accident caused by air flowing into the high voltage part) caused by the user's responsible air leakage accident.
(4) Since the discharge needle is not in contact with the case, the occurrence of electric leakage is eliminated.
(5) Since the electric part and the air part are made independent, the electric part can be easily attached and detached.
(6) By flowing nitrogen through the flow path, the discharge needle and electronic circuit can be covered with nitrogen gas, the needle can be isolated from oxygen and dust in the air, and dust adhesion to the high voltage circuit can be prevented. This prevents dust generation from the needle oxide, eliminates the need to clean the needle, eliminates the need for replacement due to wear of the needle, and prevents leakage from the high voltage circuit.

  Also, if air is allowed to flow through another flow path, the flying distance of ions can be increased or dust can be removed with air without increasing the flow rate of nitrogen (saving nitrogen).

Since a plurality of fluids can be used simultaneously in this way, a nitrogen sheath (nitrogen) can be economically used with a small amount of nitrogen gas while using sufficient air to fly ions sufficiently far away or dusting with strong air. To cover and isolate).
(7) By passing electricity through the flow path, it is possible to supply power or to exchange control signals.
(8) The amount of ions per unit length, that is, the ion density, can be adjusted by detachably attaching the electrical part detachably to the frame.

  The static eliminator of the present invention includes a rigid frame having an electric path and / or a flow path, and at least one electric part detachably attached to the frame.

FIG. 1 is a schematic view showing a static eliminator of an embodiment of the present invention. As shown in FIG. 1, the static eliminator 10 has a form in which an electric housing 74 is attached to a frame (hereinafter simply referred to as a frame) 72 of an aluminum extrusion material. In the frame 72, an electric path, an air path, nitrogen A gas (N ₂ ) path (see FIG. 3) is provided. As shown in FIG. 2, since a rigid frame 72 made of an aluminum extruded material is used, it is possible to prevent drooping (deflection) due to gravity.

  FIG. 3 is a cross-sectional view illustrating details of the static eliminator of the embodiment. In FIG. 3, the static eliminator 10 includes a frame 72 which is two main components and an electric part 76 accommodated in the electric part housing 74, and the electric part housing 74 can be attached to the frame 72. .

  In the frame 72, an electric path 78 that supplies electric signals to the electric parts (such as the discharge needle 20) in the electric section and supplies air for injecting the air beyond the tip of the discharge needle 20 is supplied. For this purpose, an air passage 80, a nitrogen passage 82 for supplying nitrogen gas around the discharge needle 20, and an auxiliary passage 84 for optional use are provided. An air guide 80 a extends from the air path 80.

  The discharge needle 20 is arranged in the electric part 76 accommodated in the electric part housing 74, and when the electric part housing 74 is mounted on the frame 72, power is supplied to the discharge needle 20 from the electric path 78. Then, ions 50 are generated, and nitrogen gas is supplied from the nitrogen gas path 82 to the periphery of the discharge needle 20. This prevents the discharge needle from being oxidized and suppresses dust generation and deterioration. In addition, air 52 is ejected from the air passage 80 through the air guide 80a when the tip of the discharge needle 20 is exceeded, and ions are blown away.

  FIG. 7 is an enlarged view showing a tip portion of the air guide when the ion balance sensor is attached to the above-described embodiment, FIG. 7a is a side sectional view thereof, and FIG. 7b is a bottom view thereof. The air guide 80 a is disposed at the center of the plurality of discharge needles 20. An ion balance sensor 90 is disposed on the outer periphery of the front end of the air guide 80a on the inner side (rear side) of the air outlet 80a1 of the air guide 80a. The ion balance sensor 90 has an ion balance sensor attached to an insulating sensor bobbin (90a). With such an arrangement, ions from each discharge needle 20 can be received evenly, and accurate measurement can be performed. For this reason, it can control so that the ion concentration radiated | emitted from each discharge needle 20 may be kept equal. Further, since the air 52 passes through the inside of the ion balance sensor 90 and is radiated into the air after passing, the ion balance sensor 90 can avoid the influence of moisture and moisture in the air.

  FIG. 4 is a schematic side view for explaining a form of mounting of the frame and the electric housing in the static eliminator. In the form shown in FIG. 4 a, the electric part housing 74 is used alone with respect to the frame 72. In the form shown in FIG. 4b, a plurality of electrical part housings 74 are mounted on the frame 72 and used, but the interval between them is shortened to increase the ion concentration. On the other hand, in the form shown in FIG. 4c, a plurality of electrical part housings 74 are also mounted and used with respect to the frame 72, but the interval between them is increased to lower the ion concentration. In this manner, a desired ion concentration can be selected by appropriately selecting the number and interval of the electric part housings 74 to be attached to the frame 72.

It is the schematic which shows the static eliminator of the Example of this invention. It is the schematic which shows the state which fixed the both ends of the static eliminator of an Example. It is sectional drawing which shows the detail of the static eliminator of an Example. It is a schematic side view for demonstrating the mounting | wearing form of the flame | frame and electric part housing in a static elimination device. It is sectional drawing which shows the static eliminator of a prior art example. It is the schematic which shows the state which fixed the both ends of the static eliminator of the prior art example. It is an enlarged view which shows the front-end | tip part of an air guide at the time of attaching an ion balance sensor.

Explanation of symbols

10 Static eliminator 20 Discharge needle 50 Ion 52 Air 72 Frame 74 Electric part housing 76 Electric part 78 Electric path 80 Air path 82 Nitrogen gas path

Claims (8)

  A static eliminator comprising: a rigid frame having an electric path and / or a flow path; and at least one electric part detachably attached to the frame.   2. The static eliminator according to claim 1, wherein the frame has a plurality of flow paths.   3. The static eliminator according to claim 1, wherein air or (and) nitrogen is used as a fluid flowing through the flow path.   4. The static eliminator according to claim 3, wherein nitrogen is allowed to flow from the flow path of the frame around the discharge needle of the electric part to isolate the discharge needle from the air.   4. The static eliminator according to claim 3, wherein nitrogen is caused to flow from the flow path of the frame to an electric part to prevent leakage due to adhesion of dirt to the high voltage part.   4. The static eliminator according to claim 3, wherein when air is used as the fluid, the air is discharged outside the electrical part, and the electrical part is isolated from the air.   4. The static eliminator according to claim 3, wherein a plurality of discharge needles are used, an air guide for guiding air is disposed at the center of the plurality of discharge needles, and the outer periphery of the air guide is inside the blowout hole at the tip of the air guide. An ion balance sensor is disposed on the static eliminator.   2. The static eliminator according to claim 1, wherein the ion concentration can be selected by selecting the number and interval of electrical parts attached to the frame.