JP2006053727A - Pressure regulation device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a pressure regulation device of a further compact shape, capable of providing a stable gas pressure to a broad range of flow rates. <P>SOLUTION: This pressure regulation device is a two-stage type pressure regulation device in which direct acting first-stage decompression device and second-stage decompression device each using a diaphragm to which a poppet for closing or separating a valve seat is connected are connected in series. In this regulation device, a regulation spring chamber containing a load spring for regulating the diaphragm on the reverse side of the diaphragm is held in vacuum, and a passage of low-pressure gas reduced in pressure is provided between the regulation spring chamber and a housing. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a fluid pressure regulator, and more particularly to a pressure regulator that can provide a low pressure fluid that is small and stable over a wide range of flow rates.

  For example, in a semiconductor manufacturing apparatus or a fuel cell system, it is generally performed to use a gas supplied at high pressure from a high-pressure compressed gas container as a low-pressure gas by providing a pressure regulator downstream of the shut-off valve. Yes. In such a fluid supply system, the pressure regulator connected to the high-pressure compressed gas container has a constant low pressure even when the flow rate of the fluid changes when the fluid is discharged from the high-pressure compressed gas container and used. It is required to maintain the pressure, and even if the pressure of the residual gas in the high-pressure compressed gas container decreases after being used for a certain period of time, it is required to always maintain a constant low pressure.

As an example of a general pressure regulator, a pressure regulator using a bellows or a diaphragm whose peripheral portion is fixed to a housing is known (for example, see Patent Document 1). FIG. 9 shows a cross-sectional structure of a pressure regulator using a bellows whose peripheral portion is fixed to the housing. A pressure regulator 50 shown in FIG. 9 includes a housing 51 having a chamber 52 therein, an inlet 53 and an outlet 54 communicating with the chamber 52 provided in the housing 51, and between the inlet 53 and the outlet 54. A pressure regulator having a flow rate adjusting means 60 for selectively adjusting the flow of fluid, the flow rate adjusting means 60 comprising a pressure adjusting chamber 55 fixed in the chamber 52, a bellows 56, The movable pressure adjusting member 57 for adjusting the movement of the bellows 56 and the poppet 58 movable in conjunction with the bellows 56 are mainly configured.
In the pressure regulator 50, the bellows 56 expands and contracts by an amount corresponding to the pressure in the chamber 52 and the pressure set in the pressure regulation chamber 55. When the bellows 56 further expands and contracts, the poppet 58 directly connected to the bellows 56 can also move in the horizontal direction on the paper surface.

Now, with the high pressure gas source connected to the inlet 53, the outlet 54 side is closed, and the gas flow rate on the outlet 54 side is zero, the tip 58a of the poppet 58 is fitted into the valve seat 51a of the housing 51, and the valve seat The pressure in the pressure adjustment chamber 55 is adjusted so as to balance the amount of swelling of the bellows 56 when the portion 51a is in the closed state.
Next, when the gas on the outlet 54 side is allowed to flow in this state, the pressure in the chamber 52 decreases and the bellows 56 expands.
When the bellows 56 expands, the poppet 58 directly connected to the bellows 56 moves to the left in the drawing, and the tip 58a of the poppet 58 is separated from the valve seat 51a of the housing 51, so that a gas flow path 59 is formed.

When the gas flow path 59 is formed, the high-pressure gas supplied from the high-pressure gas source flows into the chamber 52 through the gas flow path 59 and the pressure in the chamber 52 increases, and when the pressure in the chamber 52 increases, the bellows 56 Contracts until the set pressure in the pressure adjusting chamber 55 is reached.
When the bellows 56 contracts, the poppet 58 that is directly connected to the bellows 56 moves to the right in the drawing, the tip 58a of the poppet 58 fits into the valve seat 51a of the housing 51, and the valve seat 51a It becomes blocked.
By repeatedly opening and closing the valve seat portion 51 a in this manner, the high-pressure gas entering from the inlet 53 is decompressed and supplied through the outlet 54.
Japanese Patent Laid-Open No. 03-149472

Further, when it is necessary to accurately control the low pressure gas at a low flow rate as in a semiconductor manufacturing apparatus, a pressure regulator 70 in which the pressure regulators having the above-described structure are connected in series as shown in FIG. in use. The pressure regulator 70 is a primary pressure regulator 71 and a secondary pressure regulator 72 connected in series, and the internal mechanisms of the pressure regulators 71 and 72 are substantially the same as the pressure regulator 50 described above. is there.
The high-pressure gas supplied from the inlet 73 is depressurized by the primary pressure regulator 71 and enters the secondary pressure regulator 72 through the connecting pipe 75, and is decompressed to a predetermined pressure and supplied from the outlet 74 to a desired stroke. . In the figure, P1, P2, and P3 are pressure gauges, and 76 is a safety valve.

In the pressure regulator 50 shown in FIG. 9, the bellows 56 and the movable pressure regulation member 57 are assembled when the flow rate regulation means 60 is assembled, and then the pressure regulation chamber 55 is formed by covering the cap 61. Further, the pressure is adjusted by sealing a gas having a predetermined pressure in the pressure adjusting chamber 55.
For this reason, if the ambient temperature changes during use of the pressure regulator 50, the gas in the pressure regulation chamber 55 expands and contracts, and the expansion / contraction amount of the bellows 56 depends on the set pressure of the movable pressure adjustment member 57. Deviation from the set amount. Therefore, there is a problem that it is difficult to obtain an accurate reduced pressure.
Further, the pressure regulator 70 shown in FIG. 10 has a structure that is long in the lateral direction with respect to the high-pressure gas inlet 73 and has a structure in which the gas flow path is connected by the connecting pipe 75. As a result, a special part has to be prepared for incorporation into various manufacturing processes.

  The present invention solves the above-mentioned problems, obtains a stable gas pressure over a wide range of flow rates, and makes a pressure regulator with a more compact shape, and in particular, has a hole diameter of 22 mm, which is a standard product that is generally widely used. It aims at providing the pressure regulator which can be integrated also in a general industrial container.

  In order to solve the above problems, a pressure regulator according to the present invention is a two-stage pressure regulator in which a direct-acting first-stage decompression device and a second-stage decompression device using a diaphragm are connected in series. A cylindrical first housing is fitted and connected to a disk-shaped end cap having a gas inlet, and a cylindrical second housing having a reduced-pressure gas outlet at the other end of the first housing. The first stage pressure reducing device and the second stage pressure reducing device housed in the first housing or the second housing are connected to each other by a movable pressure adjusting mechanism including a diaphragm and a load spring. And a flow rate adjusting mechanism for selectively adjusting the flow of fluid comprising a poppet and a valve seat, and the high pressure gas introduced from the high pressure gas inlet of the first stage pressure reducing device is Movable pressure After being depressurized to a predetermined pressure through a flow rate adjusting mechanism controlled by a regulating mechanism, the pressure is introduced into the second stage depressurizing device, and a predetermined pressure is passed through the flow rate adjusting mechanism controlled by the movable pressure adjusting mechanism of the second stage depressurizing device. The pressure regulator was configured to be decompressed to a pressure and discharged from the low-pressure gas outlet of the second-stage decompressor.

  If the pressure regulator is configured in this way, it becomes a pressure regulator having a compact shape. For example, if the first and second housings are made of pipes having an outer diameter of 21 mm, holes that are standard products that are generally widely used are used. The pressure regulator can be incorporated into a general industrial container having a diameter of 22 mm. Further, the pressure regulator can obtain a stable low-pressure gas pressure over a wide range of flow rates by the action of the movable pressure adjustment mechanism and the flow rate adjustment mechanism.

In the pressure regulator of the present invention, the movable pressure adjusting mechanism has a diaphragm attached to the opening end of the cap, a load spring is disposed on the rear surface of the diaphragm via a diaphragm plate, and the other end of the load spring is connected to the spring bottom. Further, the adjusting screw screwed into the center of the other end of the cap is brought into contact with the spring bottom, and by rotating the adjusting screw, the load spring is expanded and contracted, so that the diaphragm 7 expands and contracts. It is preferable that the displacement amount be adjustable.
Further, the flow rate adjusting mechanism includes a poppet having one end connected to the diaphragm through a stay and having a conical tip portion, and the stay is a funnel-shaped valve seat provided at the center of the valve seat. The poppet 4 also moves with the expansion and contraction of the diaphragm, and the tip of the poppet is fitted to and released from the valve seat, so that the high-pressure gas passes through the valve seat. It is preferable to configure so that it can be stopped.
This is to obtain a stable low gas pressure for any wide range of flow rates.

In the pressure regulator of the present invention, the poppet has a square cross section, and the center of the disk-shaped end cap of the first stage pressure reducing device or the cylindrical first housing fitted and connected to the end cap The cross section formed in the part is inscribed in a circular concave part, and is configured to be movable in the axial direction in the concave part, and has a groove through which high pressure gas flows in the central part of the poppet. However, it can be configured to be discharged from the middle of the groove into the gap between the concave portion having a circular cross section and the poppet having a square cross section.
This is to make the gas pressure as compact as possible and to obtain a stable low gas pressure over a wide range of flow rates.

In the pressure regulator of the present invention, it is preferable to maintain a vacuum inside the adjustment spring chamber surrounded by the diaphragm plate and the cap and having a load spring inside.
Even if the ambient temperature changes during use, since there is no gas that expands and contracts in the adjustment spring chamber, the expansion and contraction amount of the diaphragm is accurately regulated by the set pressure determined by the movable pressure adjusting member. Therefore, an accurate reduced pressure can be obtained.
In the pressure regulator of the present invention, it is preferable to provide a decompressed gas flow path between the cap and the first housing or between the second cap and the second housing.
This is to provide a more compact decompression regulator.

  According to the present invention, a stable gas pressure can be obtained over a wide range of flow rates, and a pressure regulator having a more compact shape can be obtained. Therefore, a general industry having a hole diameter of 22 mm, which is a standard product that is generally widely used. It is possible to provide a pressure regulator that can be incorporated into a container for use.

Hereinafter, the present invention will be described in detail with reference to the drawings.
First, the operation principle of the diaphragm pressure regulator used in the present invention will be described with reference to the drawings.
5 to 8 are diagrams illustrating a series of operating principles of the diaphragm pressure regulator. FIG. 5 is a diagram showing the structure of the diaphragm pressure regulator 40. A cap 42 having a cap-shaped push screw 43 at the top is fitted in a housing 41 having a high-pressure gas inlet 44 and a low-pressure gas outlet 47. It is. Inside the housing 41, there is a primary chamber 45 that communicates from the high-pressure gas inlet 44 and a secondary chamber 46 that communicates with the low-pressure gas outlet 47, and a sleeve 49 is screwed into the center of the housing 41. The sleeve 49 is provided with a first recess 25 and a second recess 26, the first recess 25 is connected to the primary chamber 45, and the second recess 26 is connected to the secondary chamber 46. A space between the first depression 25 and the second depression 26 is narrow to form a gas passage 34, and a valve seat 27 is provided at the tip.
In the first recess 25 of the sleeve 49, there is a poppet 29 supported by a small spring 28. In the second recess 26, a stem 36 joined to a diaphragm 35 is inserted. The poppet 29 is connected via a stay 37 penetrating the gas passage 34.

  Further, inside the adjustment spring chamber 48 partitioned by the diaphragm 35 in the cap 42, the spring spring 38 that contacts the diaphragm 35 and the load spring 9 sandwiched between the spring bottoms 39 are housed. By adjusting and adjusting the position of the spring bottom 39, the displacement range of the diaphragm 35 can be adjusted.

  FIG. 5 shows that the high pressure gas load is applied from the high pressure gas inlet 44, the use of the low pressure gas is stopped and the low pressure gas outlet 47 is closed, and the diaphragm 35 is balanced with the pressure of the push screw 43 and the poppet 29 is a small spring. 28 shows a state where the valve seat 27 is lifted up and closed.

Next, in order to obtain a predetermined low-pressure gas at the low-pressure gas outlet 47, the load spring 19 is compressed by a predetermined amount by rotating the push screw 43 as shown in FIG. Push down to chamber 46 side.
When the diaphragm 35 is pushed down to the secondary chamber 46 side, the stem 36 and the poppet 29 connected to the diaphragm 35 are interlocked and move downward against the small spring 28, so that the poppet 29 from the valve seat 27 The valve seat 27 of the sleeve 49 is released and the gas passage 34 penetrates.
When the gas passage 34 penetrates, the high-pressure gas entering from the high-pressure gas inlet 44 enters the secondary chamber 46 from the primary chamber 45 through the gas passage 34 and pushes up the diaphragm 35 upward in the drawing.
In FIG. 7, the pressure in the secondary chamber 46 rises, and the force that pushes up the diaphragm 35 balances with the compressive force of the load spring 9, and the poppet 29 is applied to the valve seat 27, so that the primary chamber 45 moves to the secondary chamber 46. This shows a state where the gas flow is stopped and the pressure in the secondary chamber is stabilized.

Next, as shown in FIG. 8, when the low pressure gas flows from the low pressure gas outlet 47, the pressure in the secondary chamber 46 decreases, and the compressive force of the load spring 19 becomes larger than the gas pressure pushing up the diaphragm 35. 35 is pushed down to the secondary chamber 46 side. Then, the poppet 29 is separated from the valve seat 27, the gas passage 34 penetrates, and the gas flows from the primary chamber 45 toward the secondary chamber 46. When the amount of gas flowing into the secondary chamber 46 and the amount of gas flowing out of the secondary chamber 46 become equal, the movement of the poppet 29 stops and the gas pressure in the secondary chamber 46 is stabilized.
Thus, depending on the action of the poppet 29 interlocked with the diaphragm 35, the gas pressure on the low-pressure gas outlet 47 side shows a stable pressure as set value regardless of the gas flow rate.

The pressure regulator of the present invention is configured to reduce the pressure of the high-pressure gas in a two-stage manner using the pressure reducing mechanism as described above.
FIG. 1 shows a cross-sectional structure of the pressure regulator of the present invention. FIG. 2 shows an enlarged cross-sectional structure of the first stage pressure reducing device of the pressure regulator 1 of the present invention shown in FIG.
The pressure regulator 1 of the present invention is a two-stage pressure regulator in which a direct-acting first-stage decompressor 2 and a second-stage decompressor 3 using a diaphragm 7 are connected in series. The stage pressure reducing device 2 and the second stage pressure reducing device 3 are respectively composed of movable pressure adjusting mechanisms 21 and 31 including diaphragms 7 and 7 and load springs 9 and 9, and a fluid flow including poppets 4 and 4 and valve seats 5 and 5. And flow rate adjusting mechanisms 22 and 32 for selectively adjusting the flow rate.
The high pressure gas introduced from the high pressure gas inlet 6 of the first stage pressure reducing device 2 of the pressure regulator 1 of the present invention is controlled by the movable pressure adjusting mechanism 21 of the first stage pressure reducing device 2. 22, the pressure is reduced to a predetermined pressure, introduced into the second stage pressure reducing device 3, and further reduced to a predetermined pressure through the flow rate adjusting mechanism 32 controlled by the movable pressure adjusting mechanism 31 of the second stage pressure reducing device 3. Then, it is configured to be discharged from the low pressure gas outlet 33 of the second stage pressure reducing device 3.
Thus, by connecting the two-stage decompression devices in series, a pressure regulator that is smaller and has a thin linear shape can be obtained.
Since the operating mechanisms of the first stage pressure reducing device 2 and the second stage pressure reducing device 3 are the same, the first stage pressure reducing device 2 will be described below.

  The first-stage pressure reducing device 2 of the pressure regulator 1 according to the present invention is configured by fitting and connecting a cylindrical first housing 14 to a disk-shaped end cap 13 having an inlet 6 for high-pressure gas. A cylindrical second housing 24 having a decompression gas outlet 33 is fitted and connected to the other end of the housing 14, and the first stage decompression device 2 is accommodated in the first housing 14. .

2, the movable pressure adjusting mechanism 21 has a diaphragm 7 attached to the opening end of the cap 12, and a load spring 9 is disposed on the back surface of the diaphragm 7 via a diaphragm plate 8. The other end of the diaphragm 7 is held by the spring bottom 10, the adjusting screw 11 screwed into the center of the other end of the cap 12 is brought into contact with the spring bottom 10, and the adjusting screw 11 is rotated to expand the diaphragm 7. -It is configured to be able to adjust the amount of movable displacement that contracts.
A concave portion 16 is formed in the cap 12, and the diaphragm plate 8, the load spring 9 and the spring bottom 10 are accommodated in the concave portion 16 so that the load spring 9 can be expanded and contracted.

  A hole 17 passes through the center of one end of the cap 12, and the adjusting screw 11 is inserted into the hole 17. One end of the adjusting screw 11 is in contact with the spring bottom 10 so that it can be moved forward and backward. A cap plug 19 is fitted and joined to the other end of the adjusting screw 11 and is inserted into the hole 17 while maintaining airtightness.

Here, it is important that the inside of the space surrounded by the diaphragm 7 including the load spring 9 and the cap 12, that is, the inside of the adjustment spring chamber 18 is evacuated. If the inside of the adjustment spring chamber 18 is evacuated, gas that causes a volume change does not exist in the adjustment spring chamber 18 even if the ambient environmental temperature changes, so that the displacement amount of the diaphragm 7 is not affected. Therefore, more precise pressure control can be performed.
In order to make the inside of the adjustment spring chamber 18 into a vacuum, it may be sealed after being evacuated to vacuum at the time of assembly.

  The flow rate adjusting mechanism 22 includes a poppet 4 connected to the diaphragm 7 via a stay 15 and having a conical tip portion 4 a at one end, and the stay 15 is formed at the center of the valve seat 5. It penetrates the provided funnel-shaped valve seat 5a, and the poppet 4 also moves as the diaphragm 7 expands and contracts, and the tip 4a of the poppet 4 fits and separates from the valve seat 5a. By doing so, the high pressure gas can pass through and stop the valve seat 5.

The poppet 4 shown in FIG. 2 has a square cross section, and is formed at the center of a cylindrical first housing 14 that is fitted and connected to a disc-shaped end cap 13 of the first stage pressure reducing device 2. The recess is inscribed in the recess 13a having a circular cross section, and is configured to be movable along the axial direction in the recess 13a. The poppet 4 has a groove (not shown) through which high-pressure gas flows. The high-pressure gas is discharged from the middle of the groove into the gap between the recess 13a having a circular cross section and the poppet 4 having a square cross section.
By comprising in this way, since the flow path of high pressure gas can be ensured in the poppet 4, the apparatus can be comprised thinly linearly.

Further, in the first-stage decompression device 2 shown in FIG. 2, a decompression gas flow path 30 is provided between the cap 12 and the first housing 14.
The high-pressure gas that has passed through the poppet 4 is depressurized by the flow rate adjusting mechanism 22 and then flows through the space 30 formed along the surface of the diaphragm 7 through the flow path 30 of the depressurized gas.
By ensuring the flow path of the decompressed gas in this way, the entire apparatus can be configured to be thin and linear, so that the pressure regulator has a more compact shape, in particular, the first housing 14 and the second housing. If the housing 24 is configured to have an outer diameter of 21 mm, the pressure regulator can be incorporated into a general industrial container having a hole diameter of 22 mm, which is a standard product that is widely used in general.

Here, the flow of the decompressed gas will be described with reference to FIG.
FIG. 2 shows that the flow of the decompressed gas is stopped by stopping the use of the low-pressure gas, and the pressure of the load spring 9 is adjusted in a state where the tip portion 4a of the poppet 4 closes the valve seat 5a to maintain the balance. Shows the case.
Next, when the use of the low-pressure gas is started and the flow of the decompressed gas is generated, the pressure in the space 23 on the left side of the diaphragm 7 as shown in FIG. 3 is lowered, so that the diaphragm 7 is indicated by an arrow. Displaces toward the left side of the page.
As the diaphragm 7 is displaced, the poppet 4 connected to the diaphragm 7 is also displaced toward the left side of the sheet as shown by the arrow, and the tip portion 4a of the poppet 4 is separated from the valve seat 5a. Then, a gas flow path 20 is formed in the valve seat portion, and the gas discharged from the poppet 4 passes through the valve seat 5a and flows through a narrow space formed between the diaphragm 7 and the terminal cap 13, as shown in FIG. It flows along the flow path 30 of the decompression gas formed between the cap 12 and the housing 14 along the arrow shown.

The depressurized gas flows along the flow path 30 of the depressurized gas in the first stage depressurizing apparatus 2 and flows into the second poppet 4 of the second stage depressurizing apparatus 3, and is depressurized one more stage.
In the second-stage decompression device 3, the pressure is reduced to a predetermined low pressure, and then flows through the flow path 30 of the second reduced pressure gas and is discharged from the outlet 33 of the low pressure gas.

The first-stage decompression device 2 has been mainly described above, but the second-stage decompression device 3 has almost the same structure and the same operation, and therefore detailed explanation is omitted.
As shown in FIG. 1, in the second-stage decompression device 3, the moderately decompressed gas is continuously introduced into the second poppet 4, and further decompressed by the movable pressure adjusting mechanism 31 and the flow rate adjusting mechanism 32, and the second stage The gas is discharged from a low-pressure gas outlet 33 provided at one end of the housing 24.

FIG. 4 shows the relationship between the flow rate of the low-pressure gas and the change in pressure of the low-pressure gas when such a pressure regulator is used.
FIG. 4 shows the second stage decompression device 3 when the high pressure nitrogen gas of 3.7 MPa is decompressed to the high pressure gas inlet 6 of the first stage decompression device 2 using the pressure regulator 1 shown in FIG. The pressure of the low pressure gas outlet 33 is shown. Here, the decompression pressure in the first stage decompression device 2 was set to 0.6 to 0.8 MPa.
As shown in the figure, although the pressure suddenly drops immediately after the start of distribution, the pressure is almost stable from the time when the flow rate exceeds 1 NL / min to the flow rate of 4 NL / min, and can sufficiently withstand the precise control of the gas flow rate. Met.
In the pressure regulator of the present invention, the pressure can be precisely controlled in a range from atmospheric pressure to negative pressure by using a diaphragm having a thickness of 50 μm.

It is a figure which shows the cross-section of the pressure regulator of this invention. It is a figure which shows the cross-section of the 1st stage pressure reduction apparatus of the pressure regulator of this invention. It is a figure explaining the gas flow path of the 1st stage pressure reduction apparatus of the pressure regulator of this invention. It is a figure which shows the relationship between the gas flow rate and pressure of the pressure regulator of this invention shown in FIG. It is a figure explaining the working principle of the pressure regulator of this invention. FIG. 6 is a diagram for explaining the operating principle of the pressure regulator of the present invention following FIG. 5. It is a figure explaining the operation | movement principle of the pressure regulator of this invention following FIG. It is a figure explaining the operating principle of the pressure regulator of this invention following FIG. It is a figure which shows the cross-section of an example of the conventional pressure regulator. It is a figure which shows the other example of the conventional pressure regulator, (a) is a top view, (b) shows a front view.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Pressure regulator, 2 ... 1st stage pressure reducing device, 3 ... 2nd stage pressure reducing device, 4 ... Poppet, 5 ... Valve seat Seat, 6 ... ・ ・ ・ ・ ・ Inlet, 7 ... Diaphragm, 8 ... Diaphragm plate, 9 ... Load spring, 11 ... Adjusting screw , 12... Cap, 13... Terminal cap, 14... First housing, 15. 17 .... Hole, 18 .... Adjustment spring chamber, 19 .... Cap plug, 20 .... Gas flow path, 21, 31, ... Movable pressure adjustment mechanism, 22, 32 ... Flow rate adjustment mechanism, 23 ... Space, 24 ... Second housing, 29 ... ..... Poppet, 30 .... Pressure flow path, 33 .... Outlet, 35 .... Diaphragm, 40 .... Pressure regulator, 41.・ ・ ・ ・ ・ ・ Housing, 45 ・ ・ ・ ・ ・ ・ Primary chamber, 46 ・ ・ ・ ・ ・ ・ Secondary chamber, 48 ・ ・ ・ ・ ・ ・ Adjustment spring chamber, 50,70 ・ ・ ・ ・ ・ ・Pressure regulator, 51 ··· Housing, 52 ··· Chamber, 53 ··· High pressure gas inlet, 54 ··· Low pressure gas outlet, 55 ··· -Pressure adjusting chamber, 56 ... Bellows, 57 ... Movable pressure adjusting member, 58 ... Poppet, 60 ... Flow rate adjusting means, 71 ... ... First stage pressure reducing device, 72 ... Second stage pressure reducing device, 75 ... Connection pipe

Claims (6)

  A two-stage pressure regulator in which a direct-acting first-stage decompression device and a second-stage decompression device using a diaphragm are connected in series, and a cylindrical end cap having a high-pressure gas inlet has a cylindrical shape. A first housing is fitted and connected, and a cylindrical second housing having a reduced pressure gas outlet is fitted and connected to the other end of the first housing. The first-stage decompression device and the second-stage decompression device housed in the first housing or the second housing selectively select a fluid pressure regulation mechanism comprising a diaphragm and a load spring, and a fluid flow comprising a poppet and a valve seat. A high-pressure gas introduced from the high-pressure gas inlet of the first stage pressure reducing device 2 through a flow rate adjusting mechanism controlled by the movable pressure adjusting mechanism of the first stage pressure reducing device. The pressure is reduced to a predetermined pressure and then introduced into the second stage pressure reducing device, and the pressure is reduced to a predetermined pressure through a flow rate adjusting mechanism controlled by a movable pressure adjusting mechanism of the second stage pressure reducing device. A pressure regulator configured to be discharged from a low-pressure gas outlet of a stage pressure reducing device.   The movable pressure adjusting mechanism has a diaphragm attached to the opening end of the cap, a load spring is disposed on the back surface of the diaphragm via a diaphragm plate, the other end of the load spring is suppressed by a spring bottom, and the cap other than the cap. An adjusting screw screwed into the center of the end is brought into contact with the spring bottom, and by rotating the adjusting screw, the load spring is expanded and contracted so that the amount of displacement by which the diaphragm expands and contracts can be adjusted. The pressure regulator according to claim 1, wherein   The flow rate adjusting mechanism includes a poppet having one end connected to the diaphragm via a stay and having a conical tip, and the stay includes a funnel-shaped valve seat provided at the center of the valve seat 5. The poppet moves through as the diaphragm expands and contracts, and the tip of the poppet is fitted and released from the valve seat, thereby allowing high-pressure gas to pass through and stop the valve seat 5. The pressure regulator according to claim 1 or 2, wherein the pressure regulator is configured as follows.   The poppet has a square cross section, and the circular cross section formed at the center of the disk-shaped end cap of the first stage pressure reducing device or the cylindrical first housing fitted and connected to the end cap The groove is configured to be movable in the axial direction along the recess, and the poppet has a groove through which high-pressure gas flows, and the cross-section from the middle of the groove The pressure regulator according to any one of claims 1 to 3, wherein the pressure regulator is configured to be discharged into a gap between a circular recess and a poppet having a square cross section.   The pressure regulator according to any one of claims 1 to 4, wherein the pressure adjusting chamber is surrounded by the diaphragm plate and the cap and maintained in a vacuum in an adjustment spring chamber having a load spring therein. 6. The flow path of the decompressed gas is provided between the cap and the first housing or between the second cap and the second housing. 6. Item 1. The pressure regulator according to item 1.

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