JP2006053579A5 - - Google Patents

Claims (21)

A method of manufacturing a polymer waveguide substrate having a first region having an optical waveguide composed of a polymer layer or mainly composed of a polymer layer and a second region not having the optical waveguide on the same substrate, An adhesive layer for improving the adhesion or adhesion between the surface of the polymer layer and the substrate for forming the optical waveguide on the substrate surface is provided in the first region, and not provided in the second region. Then, after providing the adhesive layer in the first region, an optical waveguide is produced using a step of forming the polymer layer on the entire surface of the substrate, and the polymer layer at the boundary between the first region and the second region is formed. A method of manufacturing a polymer waveguide substrate, comprising: cutting the polymer layer in the second region from the substrate. The method of manufacturing the polymer waveguide substrate having an electrode for mounting a semiconductor element in the second region, wherein the electrode is formed on the substrate before forming an adhesive layer. Item 12. A method for producing a polymer waveguide substrate according to Item 1. 2. The method of manufacturing a polymer waveguide substrate according to claim 1, wherein a dicing device is used for cutting the polymer layer, and a bottom surface of a groove formed by the dicing device reaches the substrate. 4. The method of manufacturing a polymer waveguide substrate according to claim 1, wherein the substrate is any one of a silicon substrate, a silicon substrate having a silicon oxide film, a glass substrate, and a ceramic substrate. . The method for producing a polymer waveguide substrate according to claim 1, wherein a polymer containing fluorine is used for the polymer layer constituting the waveguide. 6. The method of manufacturing a polymer waveguide substrate according to claim 5 , wherein the lowermost layer of the polymer layer constituting the waveguide is made of a polymer containing fluorine. 7. The method of manufacturing a polymer waveguide substrate according to claim 5, wherein fluorinated polyimide is used for the polymer layer constituting the waveguide. 8. The method of manufacturing a polymer waveguide substrate according to claim 7 , wherein fluorinated polyimide is used for a lowermost layer of the polymer layer constituting the waveguide. The adhesive layer is a polyimide silicone resin, a polyimide resin containing no fluorine, organic aluminum compounds, organic zirconium compound, or an any organic titanium compound, or of claims 1 to 8, characterized in that it consists of the combination The manufacturing method of the polymer waveguide board | substrate as described in any one. A polymer waveguide substrate having a first region having an optical waveguide composed of a polymer layer and a second region having no optical waveguide on the same substrate, which constitutes the waveguide of the first region An adhesive layer for improving adhesion or adhesion between the lowermost polymer layer and the substrate is provided, and the substrate is cut to the boundary between the first region and the second region. it has a groove, polymer optical waveguide substrate wherein the second region on the substrate and having an etched surface after the adhesive layer is removed by etching. 11. The polymer waveguide substrate according to claim 10, wherein the etching surface of the second region is formed by oxygen reactive ion etching or wet etching using a hydrofluoric acid aqueous solution. 12. The polymer waveguide substrate according to claim 10, further comprising an electrode for mounting a semiconductor element in the second region. The polymer waveguide substrate according to claim 12, wherein the electrode is free from adhesion of foreign matter and unevenness. 14. The polymer waveguide substrate according to claim 10 , wherein the substrate is any one of a silicon substrate, a silicon substrate having a silicon oxide film, a glass substrate, and a ceramic substrate. The polymer waveguide substrate according to claim 10, wherein a polymer containing fluorine is used for the polymer layer constituting the waveguide. 16. The polymer waveguide substrate according to claim 15 , wherein the lowermost layer of the polymer layer constituting the waveguide is made of a polymer containing fluorine. The polymer waveguide substrate according to claim 15 or 16 , wherein a fluorinated polyimide is used for a polymer layer constituting the waveguide. 18. The polymer waveguide substrate according to claim 17, wherein a fluorinated polyimide is used for a lowermost layer of the polymer layer constituting the waveguide. The adhesive layer is a polyimide silicone resin, a polyimide resin containing no fluorine, organic aluminum compounds, organic zirconium compound, or an any organic titanium compound, or of claims 10 to 18, characterized in that it consists of the combination The polymer waveguide substrate according to any one of the above. 20. An intermediate part of a polymer waveguide substrate according to claim 10, wherein a polymer layer is formed on the entire surface of the substrate in which an adhesive layer is provided only in the first region on the substrate. Waveguide substrate member. The polymer waveguide substrate member according to claim 21, wherein the lowermost layer of the polymer layer is made of a polymer containing fluorine.