JP2006052422A - Film deposition method for carbon fiber, film deposition system and magnetron cathode produced by the method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To obtain a film deposition method for a carbon fiber by which the outer surface of a cylindrical body to be treated can uniformly be film-deposited with the carbon fiber in a state that the body is placed upright in a vacuum chamber. <P>SOLUTION: When carbon fiber is film-formed on the outer surface of the cylindrical body 1 to be treated by a thermal CVD (Chemical Vapor Deposition) process, inside the body 1 arranged in a state where the axis line is stood within a vacuum chamber 3 of a film deposition system, a cylindrical fixture 2 made of a material with a high thermal conductivity conducting heat from a stage 5 to the body 1 from the inside face of the body 1 is inserted, so as to perform the film deposition treatment. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a film forming method for forming a carbon fiber on the outer surface of a cylindrical object to be processed using a thermal CVD method, a film forming apparatus, and a magnetron cathode made by the film forming method. The present invention relates to a film forming technique for a magnetron cathode used in a high-frequency heating device such as a microwave oven and a pulse generator such as a radar.

  One of the cold cathode devices is carbon fiber. Here, the carbon fiber is a carbon nanotube in which a carbon sheet in which carbon atoms are arranged at the apexes of a honeycomb-like hexagon is closed in a cylindrical shape, a graphite nanofiber in which graphene sheets are laminated, or the like. It is well known that these carbon fibers can usually be formed by an arc discharge method, a laser evaporation method, a plasma CVD method, a thermal CVD method, or the like (for example, see Patent Document 1).

  For example, in the case of forming a carbon fiber film by a thermal CVD method, first, an object to be processed is placed on the stage in the vacuum chamber of the film forming apparatus, the vacuum chamber is evacuated, and the object on the stage is then evacuated. The treatment body is heated from the outside by a resistance heater under the stage or an infrared lamp (not shown) on the top surface, and vacuum heat treatment (reduction treatment) is performed. After that, by introducing carbon-containing gas and hydrogen gas into the vacuum chamber and heating the object to be processed to a condition temperature, the carbon atoms of the carbon-containing gas are combined with iron atoms or cobalt atoms on the surface of the object to be processed. Then, carbon fibers are grown on the object to be treated.

Here, it is known that in the case of a metal not containing iron or cobalt, carbon fibers do not grow or the growth rate is remarkably slow. In addition, when the temperature of the object to be processed is low at the time of film formation, the reaction of the carbon-containing gas is slow, and when it is high, it becomes difficult to substantially manage the production of the produced film. 600 ° C is considered good.
JP 2001-279441 A

  By the way, the conventional carbon fiber film forming method and apparatus by the thermal CVD method is a method in which heat is applied from the outside of the object to be processed by an upper infrared lamp in the vacuum chamber or a resistance heater at the bottom. When the carbon fiber film is formed on the outer surface of the cylindrical object to be processed with the axis lined up in the vertical direction, the temperature distribution in the longitudinal direction of the object to be processed becomes non-uniform so that the uniform carbon fiber There was a problem that the film could not be formed. Since the film formation of the carbon fiber is an endothermic reaction, if the heat conduction is not performed satisfactorily, remarkable temperature unevenness occurs, which greatly affects the film formation rate, the shape of the carbon fiber, and the like. As a result, the carbon fiber film thickness distribution becomes non-uniform.

  In order to ensure a uniform film thickness, it is conceivable to arrange a cylindrical object to be processed horizontally in the vacuum chamber and heat the object to be processed from below or above while rotating the object. Since a mechanism for rotating the processing body is newly required, it is necessary to greatly modify the film forming apparatus, which is difficult to realize.

  Furthermore, when assembling the object to be processed with other parts in the subsequent process, the carbon fiber is very fragile and cannot touch the film forming surface of the object to be processed, making the subsequent process extremely difficult. It was a thing.

  In consideration of the above circumstances, the present invention makes it possible to form a uniform carbon fiber film on the outer surface of a cylindrical object to be processed while being vertically placed in a vacuum chamber, and to assemble it. It is an object of the present invention to provide a carbon fiber film forming method and a film forming apparatus capable of forming a carbon fiber film on a finished part.

The above object is achieved by the following configuration.
(1) When forming a carbon fiber film on the outer surface of a cylindrical object by thermal CVD, the cylindrical object to be processed is disposed with its axis lined up in a vacuum chamber of a film forming apparatus. A film forming method for carbon fiber, characterized in that a film forming process is performed in a state in which a heating body for transferring heat from the inner side surface of the object to be processed is inserted.

  (2) In the above (1), the heating body is made of a material having higher thermal conductivity than the object to be processed, and the lower surface is in close contact with the upper surface of the stage of the film forming apparatus, and the outer peripheral surface is the cylindrical object. A carbon fiber film forming method comprising: inserting a jig in close contact with an inner surface of a processing object into the processing object, and performing the film forming process while heating the processing object with heat from a stage.

  (3) The carbon fiber film forming method according to (2), wherein the jig is formed as a column body in which a lower end surface is brought into close contact with an upper surface of the stage.

  (4) In the above (2), the jig is formed as a columnar body having a top-hat cross section in which the bottom surface of the collar portion is in close contact with the upper surface of the stage, and the lower end of the workpiece is placed on the top surface of the collar portion. A carbon fiber film forming method characterized by comprising:

  (5) In any one of the above (2) to (4), the jig is made of a material having a coefficient of thermal expansion larger than that of the object to be processed.

  (6) In the above (1), a magnetron cathode having a hollow cylindrical cathode body as the cylindrical object to be processed and having a heater coil as the heating body disposed therein is used as a film forming apparatus. Arranged in a vacuum chamber, the cathode coil is heated from its inner surface by passing a current through the heater coil and causing the heater coil to self-heat, and the film is formed on the outer surface of the cathode body that is the object to be processed. A method for forming a carbon fiber, comprising:

  (7) A film forming apparatus for performing the film forming method according to any one of (2) to (5), wherein the vacuum chamber is capable of being evacuated, and is disposed at a bottom portion of the vacuum chamber. A stage on which an object to be processed is placed, a heater for heating the stage, a processing gas supply system for supplying a processing gas necessary for forming a carbon fiber into the vacuum chamber, and an upper surface of the stage A cylindrical jig made of a highly heat-conductive material that is inserted into the object to be processed in a state where the lower surface of the object is erected and the outer peripheral surface of the object is in close contact with the inner surface of the cylindrical object. And a carbon fiber film-forming apparatus.

  (8) A cold cathode type magnetron cathode, wherein a carbon fiber film is formed on the outer surface of the cathode body by performing the film forming method described in (6) above.

  According to the carbon fiber film-forming method described in (1) above, a heating body is inserted into a cylindrical object to be processed, and heat is applied to the object to be processed from the inner surface by the heating object. Since the film is formed on the outer surface, the temperature gradient of the object to be processed at the time of film formation can be reduced, and the carbon fiber having a uniform film thickness can be formed. In addition, since only the heating body is inserted into the object to be processed, the film forming apparatus does not need to be significantly modified and can be easily realized.

  According to the carbon fiber film forming method described in (2) above, a jig made of a high thermal conductivity material is inserted into the object to be treated as a heating element, and heat from the stage is passed through the jig to be treated. Since the film is formed while being transmitted to the inner surface, a uniform carbon fiber film can be formed on the outer surface of the cylindrical object by simply adding a simple jig.

  According to the carbon fiber film-forming method described in (3) above, the jig to be inserted into the object to be processed is a column whose lower end surface is in close contact with the upper surface of the stage. The heat of the stage can be evenly transmitted to the object to be processed.

  According to the carbon fiber film forming method described in (4) above, since the jig to be inserted into the object to be processed is formed as a columnar body having a top-hat cross section, the jig and the object to be processed are placed on the stage. Can be placed in a stable posture, and the heat of the stage can be effectively transmitted to the object to be processed.

  According to the carbon fiber film-forming method described in (5) above, the jig to be inserted into the object to be processed is made of a material having a higher thermal expansion coefficient than the object to be processed. It is possible to maintain good adhesion between the jig and the heat transfer efficiency from the jig to the object to be processed.

  According to the carbon fiber film-forming method described in (6) above, an assembled magnetron cathode is disposed in a vacuum chamber, and a current is passed through a heater coil disposed inside the cathode body, so that the heater coil self-heats. Since the carbon fiber is deposited on the outer surface of the cathode body while heating the cathode body, the film thickness on the deposition surface can be made uniform, and the variation among individuals can be reduced. In addition, since the assembled cathode can be subjected to film formation, the cathode after film formation can be easily handled.

  According to the carbon fiber film forming apparatus described in (7) above, in addition to the elements of a normal film forming apparatus, a jig to be inserted into a cylindrical object to be processed is provided. The film-forming method as described in any of (5) can be implemented.

  In the cold cathode type magnetron cathode according to the above (8), since the carbon fiber film is formed on the outer surface of the cathode body in the assembled stage, the subsequent assembly process without touching the carbon fiber film forming surface is performed. Is easy to handle.

DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments of the invention will be described with reference to the drawings.
First, a first embodiment according to the present invention will be described.
FIG. 1 is a cross-sectional view of a thermal CVD film forming apparatus for performing a film forming process on a cylindrical object.
This film forming apparatus includes a vacuum chamber 3 that can be evacuated, a stage 5 that is disposed at the bottom of the vacuum chamber 3 and on which the workpiece 1 is placed, and a heater 4 that heats the stage 5 from below. A processing gas supply system (hydrocarbon gas cylinders 8 and 9 with control valves 6 and 7 and hydrogen gas cylinders 8 and 9) for supplying a processing gas necessary for film formation of carbon fiber into the vacuum chamber 3, and an exhaust system The rotary pump 11 and the valve 10 are erected with their lower surfaces in close contact with the upper surface of the stage 5 and their outer peripheral surfaces are in close contact with the inner surface of the cylindrical target object 1. And a cylindrical jig 2 (heating body) made of a high thermal conductive material to be inserted therein.
The jig 2 is made of a material having a higher thermal conductivity than the workpiece 1.

  Next, when carbon film is formed on the outer surface of the target object 1 containing iron (or cobalt), the target object 1 is disposed in a state where the axis is set up in the vacuum chamber 3 of the film forming apparatus. To do. At that time, a cylindrical jig 2 is inserted into the cylindrical object 1 and the lower surface of the jig 2 is brought into close contact with the upper surface of the stage 5. In this state, the mixed reducing gas is exhausted while being introduced into the vacuum chamber 3, and heated by the heater 4 from under the stage 5 to perform a reducing process before the film forming process.

  Thereafter, the inside of the vacuum chamber 3 is once evacuated, then the mixed gas of hydrocarbon gas and hydrogen gas is evacuated while being sent into the vacuum chamber 3, the pressure in the vacuum chamber 3 is set to a predetermined pressure, and the heater 4 is controlled to keep the temperature of the stage 5 at a predetermined temperature, and the film forming process is performed. After the processing, the heater 4 and the stage 5 are cooled and the object 1 is taken out from the vacuum chamber 3.

  As described above, the jig 2 is inserted into the cylindrical object 1 and the heat from the stage 5 is transferred to the inner surface of the object 1 via the jig 2 while the outside of the object 1 is being removed. By forming the film on the side surface, the temperature gradient of the object to be processed 1 at the time of film formation can be reduced, and the carbon fiber having a uniform film thickness can be formed. In addition, since the jig 2 having a simple structure is simply inserted into the object 1 to be processed, the film forming apparatus does not need to be significantly modified and can be easily realized.

  If the jig 2 to be inserted into the object to be processed 1 is made of a material having a higher coefficient of thermal expansion than the object to be processed 1, the degree of adhesion between the object to be processed 1 and the jig 2 can be increased by the difference in thermal expansion during heating. Since it can raise, the heat-transfer efficiency from the jig | tool 2 to the to-be-processed object 1 can be improved further.

  Moreover, as shown in FIG. 2, the shape of the jig 12 may be a columnar body having a top-hat cross section. By doing so, the bottom surface of the flange of the jig 12 can be stably brought into close contact with the upper surface of the stage 5, so that the jig 12 and the workpiece 1 can be placed on the stage 5 in a stable posture. The heat of the stage 5 can be transmitted to the workpiece 1 more effectively.

  1 and 2 exemplify the case where one object 1 is processed in one vacuum chamber 3, but a plurality of objects 1 are simultaneously formed in one vacuum chamber 3. You may make it do. In that case, as shown in FIG. 3, if the shape of the jig 12 is such that adjacent objects are connected to each other, handling becomes easier and the interval between the objects to be processed 1 can be properly taken. .

Next, Example 1 of the film forming process will be described.
The object 1 is a cylindrical body made of SUS304 having an outer diameter of 4.2 mm, an inner diameter of 3.7 mm, and a height of 3.6 mm, and contains iron. A cylindrical oxygen-free copper jig 2, which is a good heat conductor, is inserted into the cylindrical body (object to be processed) 1 in a press-fit manner. The jig 2 has an outer diameter of 3.7 mm and a height of 4 mm. This is set in a film forming apparatus.

The thermal conductivity of SUS304 is 0.016 W / mm · K, and that of copper is 0.416 W / mm · K. The vertical thermal conductivity α (W / K) from the bottom to the top of the cylinder 1 is expressed by the following equation and value when the outer radius of the cylinder 1 is R, the inner radius is r, and the height is h: It becomes.
α = 0.016π (R ² −r ² ) /h=0.014

Moreover, the thermal conductivity β (W / K) when copper is filled in the cylindrical body 1 has the following formula and value.
β = 0.016π (R ² −r ² ) /h+0.416πr ² /h=1.26

  In this example, it can be seen that the thermal conductivity in the longitudinal direction is about 90 times from 0.014 to 1.26. Further, when the jig 2 inserted into the cylinder 1 is made of a material having a higher thermal expansion coefficient than that of the cylinder 1, the cylinder 1 and the jig 2 are brought into close contact with each other due to the difference in thermal expansion during film formation. The resistance when heat is transferred from the tool 2 to the cylinder 1 is reduced, which is more effective.

  When set in the film forming apparatus, a mixed reducing gas of hydrogen and nitrogen was introduced into the vacuum chamber 3 from the introduction port and exhausted from the exhaust port, so that the pressure in the vacuum chamber 3 was set to about 1 atm. Thereafter, a heater current for heating the stage 5 was supplied to the heater 4, the temperature of the stage 5 was set to about 600 ° C., and the surface of the object 1 was reduced before the film formation process. After that, the vacuum chamber 3 was evacuated by the rotary pump 11.

  Thereafter, while sending a mixed gas of hydrocarbon-based gas and hydrogen from the introduction port, the exhaust gas is exhausted from the exhaust port, the pressure in the vacuum chamber 3 is set to 1 atm, and the temperature of the stage 5 is maintained at about 550 ° C. for 45 minutes. A film forming process was performed.

Then, after the object 1 and the stage 5 were cooled, the object 1 was taken out from the vacuum chamber 3.
FIG. 6A shows the result of measuring the film thickness distribution at the top, center, and bottom of the cylindrical body 1 after this treatment. The film thickness distribution without the jig is shown in FIG. FIG. 4 shows the apparatus configuration without a jig. In the case where the jig 1 is not used, the carbon fiber 13 at the bottom is thick, while the top is thin, and the shape of the schematic diagram of FIG. On the other hand, when the jig 2 was used, the film thickness distribution was uniform.

  Moreover, when the surface of the cylinder (to-be-processed object) 1 was observed with the electron microscope, the carbon fiber with a diameter of 0.05-0.3 micrometer was confirmed. Such a result was obtained in the same manner when the jig 12 having a top hat cross section shown in FIG. 2 was used.

Next, a second embodiment of the present invention will be described.
FIG. 7 is an explanatory diagram of the film forming method of the second embodiment.
Unlike the previous embodiment, the film forming apparatus used in this film forming method does not include a heater and a stage, and current introduction terminals 14 and 15 are provided at the bottom of the vacuum chamber 3 having the introduction port 3A and the exhaust port 3B. And a heater power supply 32 connected thereto.
This film forming apparatus includes two sets of current introduction terminals 14 and 15 and a heater power source 32 so that two objects to be processed can be processed simultaneously. Other facilities are the same as those in FIG. 1 and are not particularly shown.

  The film forming process of the present embodiment is performed on the cathode body 21 in the assembly of the cold cathode type magnetron cathode 20, and two assemblies are prepared for the process. The magnetron cathode 20 has a hollow cylindrical cathode body 21 as a cylindrical object to be processed, and has a structure in which a heater coil 24 as a heating body is disposed therein.

FIG. 8 is a detailed view of the magnetron cathode 20.
The electron emission portion of the magnetron cathode 20 is a cylindrical cathode body 21 made of stainless steel (SUS304) and contains iron. The cathode 20 includes a cathode body 21, a heater coil 24 inserted therein, an upper end hat 22, a lower end hat 23, a center lead 25, a side lead 26, a side tube 29, connection terminals 27 and 28, and a stem 30. It is what has.

  When the carbon fiber is formed on the outer surface of the cathode body 21, first, the magnetron cathode 20 is accommodated in the vacuum chamber 3, and the current introduction terminal 14 in which the connection terminals 27 and 28 are fixed to the bottom of the vacuum chamber 3. , 15.

  Next, the mixed reducing gas is introduced into the vacuum chamber 3 from the introduction port 3A and is exhausted from the exhaust port 3B, so that the pressure in the chamber 3 is set to a predetermined pressure. Thereafter, an AC voltage is applied between the two current introduction terminals 14 and 15, and the current introduction terminal 14, the connection terminal 27, the center lead 25, the heater coil 24, the upper end hat 22, the cathode body 21, the lower end hat 23, A current for self-heating is supplied to the side lead 26, the connection terminal 28, and the current introduction terminal 15, and the cathode body 21 as the object to be processed is heated from the inside to about 600 ° C. by the self-heating of the heater coil 24, A reduction process is performed before the film formation process.

  Thereafter, while sending a mixed gas of hydrocarbon-based gas and hydrogen from the introduction port 3A, the exhaust gas is exhausted from the exhaust port 3B, the pressure in the vacuum chamber 3 is set to a predetermined pressure, and the cathode body 21 is kept at 550 ° C. for a predetermined time. The film forming process is performed. Then, after leaving, the magnetron cathode 20 is taken out from the vacuum chamber 3. By doing so, a magnetron cathode 20 having a carbon fiber film formed on the outer surface of the cathode body 21 is obtained.

  In this way, the assembled magnetron cathode 20 is arranged in the vacuum chamber 3, and a current is passed through the heater coil 24 arranged inside the cathode body 21, while the cathode body 21 is heated by self-heating of the heater coil 24. By forming a carbon fiber film on the outer surface of the cathode body 21, the film thickness of the film formation surface can be made uniform, and individual variations can be reduced. In addition, since the film formation process can be performed on the assembled cathode 20, the cathode 20 after film formation can be easily handled.

Next, Example 2 of the film forming process will be described.
The film formation target is the cathode body 21 of the magnetron cathode 20. The cathode body 21 that is the object to be processed is made of stainless steel (SUS304), is a cylinder having a diameter of 4.2 mm and a height of 10.8 mm, and contains iron. The upper end hat 22, the lower end hat 23, the center lead 25, and the side lead 26 are made of molybdenum, the side tube 29, the connection terminals 27 and 28 are made of nickel, the stem 30 is made of alumina, and the heater coil 24 is made of tungsten. is there.

  The lower end hat 23 and the side lead 26, the center lead 25 and the heater coil 24, and the upper end hat 22 and the heater coil 24 are fixed by plasma welding, respectively. Electrode emitting cathode body 21 and end hats 22 and 23, stem 30 and side tube 29, stem 30 and connection terminals 27 and 28, leads 25 and 26 and connection terminals 27 and 28 are fixed with silver solder, respectively. .

  The magnetron cathode 20 assembled in advance as described above is disposed in the vacuum chamber 3 of the film forming apparatus, and the connection terminals 27 and 28 of the magnetron cathode 20 are connected to the current introduction terminals 14 and 15 of the vacuum chamber 3, respectively.

  Next, a mixed reducing gas of hydrogen and nitrogen is introduced into the vacuum chamber 3 from the introduction port 3A and is exhausted from the exhaust port 3B so that the pressure in the vacuum chamber 1 is about 1 atm. Thereafter, an AC voltage is applied between the two current introduction terminals 14 and 15 from the heater power supply 32, and the current introduction terminal 14, connection terminal 27, center lead 25, heater coil 24, upper end hat 22, cathode body 21, lower A current for self-heating is caused to flow through the path of the side end hat 23, the side lead 26, the connection terminal 28, and the current introduction terminal 15, and the cathode body 21 as the object to be processed is set to about 600 ° C. from the inner surface before the film formation process. The reduction process is performed.

  Thereafter, while sending a mixed gas of hydrocarbon-based gas and hydrogen from the introduction port 3A, the exhaust gas is exhausted from the exhaust port 3B, and the pressure in the vacuum chamber 3 is set to 1 atm. Then, the cathode body 21 is kept at 550 ° C. for 45 minutes. The film forming process was performed. Then, the cathode 20 was cooled and then taken out. When the surface of the cathode body 21 was observed with an electron microscope, carbon fibers having a diameter of 0.05 to 0.3 μm were confirmed on the surface to be processed. The film thickness of the carbon fiber was several μm and was uniform over the axial direction of the cathode 20. Also, no carbon fiber was found attached to the parts such as molybdenum end hats 22 and 23 and leads 25 and 26.

  In the embodiment of FIG. 7, the case where two (or more) magnetron cathodes 20 are installed in one vacuum chamber 3 to perform the film forming process has been described. It may be processed. In this case, as shown in FIG. 9, an opening 33 a may be provided on the bottom surface of the vacuum chamber 33, and the opening 33 a may be covered with the flange portion of the side tube 29 of the magnetron cathode 20 via the seal member 35. In other words, the entire magnetron cathode 20 is not put into the vacuum chamber 33, but only the minimum necessary portion is put into the process. In such a case, since the volume of the vacuum chamber 33 can be small, the processing cost can be reduced.

It is sectional drawing of the thermal CVD film-forming apparatus used for implementation of the method of the 1st Embodiment of this invention. It is sectional drawing which shows the example which deform | transformed the jig | tool of the film-forming apparatus. It is sectional drawing which shows the example of the jig | tool in the case of processing a several to-be-processed object simultaneously. It is sectional drawing of the conventional film-forming apparatus without a jig | tool. It is a schematic cross section which shows the film thickness distribution at the time of forming into a film without a jig | tool. It is a characteristic view which compares the film thickness distribution of the case (a) with a jig, and the case (b) without a jig. It is sectional drawing which shows the state which is implementing the method of the 2nd Embodiment of this invention. FIG. 8 is a detailed view of the magnetron cathode in FIG. 7. It is sectional drawing which shows the example of an apparatus simplification in the case of film-forming processing of only one magnetron cathode.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 To-be-processed object 2, 12 Jig 3, 33 Vacuum chamber 4 Heater 5 Stage 20 Magnetron cathode 21 Cathode body (to-be-processed object)
24 heater coil

Claims (8)

  In forming a carbon fiber film on the outer surface of the cylindrical object by thermal CVD, inside the cylindrical object to be disposed with the axis lined up in the vacuum chamber of the film forming apparatus, A film forming method for carbon fiber, characterized in that a film forming process is performed in a state where a heating body for transferring heat to an object to be processed is inserted from an inner surface of the object to be processed.   The heating body is made of a material having higher thermal conductivity than the object to be processed, and the lower surface is in close contact with the upper surface of the stage of the film forming apparatus and the outer peripheral surface is in close contact with the inner side surface of the cylindrical object to be processed. The carbon fiber film forming method according to claim 1, wherein a film is formed by inserting a tool into the object to be processed and heating the object to be processed with heat from a stage.   The carbon fiber film forming method according to claim 2, wherein the jig is formed as a column body in which a lower end surface is brought into close contact with an upper surface of the stage.   3. The jig is formed as a columnar body having a top-hat cross section in which a bottom surface of a collar portion is brought into close contact with an upper surface of the stage, and a lower end of an object to be processed is placed on the top surface of the collar portion. The method for forming a carbon fiber described in 1.   The carbon fiber film forming method according to claim 2, wherein the jig is made of a material having a larger coefficient of thermal expansion than the object to be processed.   A magnetron cathode having a hollow cylindrical cathode body as the cylindrical object to be processed and having a heater coil as the heating body disposed therein is disposed in a vacuum chamber of a film forming apparatus, and the heater The current is applied to the coil to cause the heater coil to self-heat, whereby the cathode body is heated from its inner side surface, and a film forming process is performed on the outer side surface of the cathode body as the object to be processed. 2. The carbon fiber deposition method according to 1. A film forming apparatus for carrying out the film forming method according to claim 2,
A vacuum chamber that can be evacuated, a stage that is disposed at the bottom of the vacuum chamber and on which an object to be processed is placed, a heater that heats the stage, and a film formation of carbon fiber in the vacuum chamber A processing gas supply system for supplying a necessary processing gas; and a standing state in which the lower surface of the stage is in close contact with the upper surface of the stage and the outer peripheral surface of the stage is in close contact with the inner surface of the cylindrical object to be processed. A carbon fiber film forming apparatus comprising: a cylindrical jig made of a high thermal conductivity material inserted into a treatment body.   A cold cathode type magnetron cathode, wherein a carbon fiber film is formed on the outer surface of the cathode body by performing the film forming method according to claim 6.

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